CN103317510A - Robot equipment - Google Patents
Robot equipment Download PDFInfo
- Publication number
- CN103317510A CN103317510A CN2013101681087A CN201310168108A CN103317510A CN 103317510 A CN103317510 A CN 103317510A CN 2013101681087 A CN2013101681087 A CN 2013101681087A CN 201310168108 A CN201310168108 A CN 201310168108A CN 103317510 A CN103317510 A CN 103317510A
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- CN
- China
- Prior art keywords
- support arm
- robotic device
- arm
- feeder
- air guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Abstract
The embodiment of the invention provides robot equipment and relates to the technical field of display. The influence to image quality of a display can be avoided. The robot equipment comprises an equipment body, a mechanical arm and an air supplying device, wherein the mechanical arm is connected with the equipment body and comprises at least one support arm; a plurality of small holes are formed in the support arm and communicated with the air supplying device. The robot equipment is used for manufacturing the display.
Description
Technical field
The present invention relates to the Display Technique field, relate in particular to a kind of robotic device.
Background technology
Take liquid crystal display as example, in array base palte and the processing procedure to box substrate, all can relate to substrate and transmit, carry out corresponding processing step substrate is sent to different equipment.For example, being coated with substrate behind the photoresist just need to be sent to and carry out drying in the drying equipment and process.
At present, substrate transmits the most frequently used mode and mainly is transmitted as the master with roll extrusion (roller) transmission and manipulator (robot).Can select corresponding load mode according to arts demand, for example wet cleaning is general selects the roll extrusion load mode, and the coating stage (for example photoresist coating) is because considering that planarization adopts the manipulator load mode.
Wherein, manipulator transmits mainly to support pin (Pin) or vacuum cap type as main, yet, support pin or sucker no matter be, in the substrate transport process, all can come in contact with the part of substrate, can cause like this in the substrate transport process, because the back contact point can cause the local out-of-flatness of glass, thereby cause the generation of display picture quality bad (mura).
Summary of the invention
Embodiments of the invention provide a kind of robotic device, can avoid affecting the display picture quality.
For achieving the above object, embodiments of the invention adopt following technical scheme:
On the one hand, provide a kind of robotic device, comprised apparatus body and the mechanical arm that is connected with described apparatus body, described mechanical arm comprises at least one support arm, is provided with a plurality of apertures on each described support arm, and described a plurality of apertures communicate with feeder; Wherein, described robotic device also comprises described feeder.
Optionally, described feeder comprises the air guide pipeline, and described air guide pipeline is arranged at the lower surface of each described support arm; The described a plurality of apertures that arrange in described air guide pipeline and each described support arm communicate.
Optionally, described feeder comprises the air guide pipeline, and described air guide pipeline is arranged at the inside of each described support arm; The described a plurality of apertures that arrange in described air guide pipeline and each described support arm communicate.
Further preferred, described a plurality of apertures evenly distribute.
Preferably, described mechanical arm comprises at least two support arms, and described at least two support arms be arranged in parallel and equal in length.
Further alternative, described mechanical arm comprises at least three support arms, and described at least three support arms uniformly-spaced arrange.
Preferably, described mechanical arm also comprises: the first barrier structure that is arranged at relatively described apparatus body one side of each described support arm.
Preferably, described mechanical arm also comprises: parallel with described support arm, and all described support arms are arranged on outermost the second barrier structure relatively.
Further preferred, an end of described the second barrier structure is fixed on the described apparatus body, and the other end is arranged on along the centre position of described arm length direction.
Preferably, the gas that provides of described feeder is ionic air.
The embodiment of the invention provides a kind of robotic device, this robotic device comprises apparatus body, the mechanical arm and the feeder that are connected with described apparatus body, wherein said mechanical arm comprises at least one support arm, be provided with a plurality of apertures on the described support arm, described aperture communicates with described feeder; When this robotic device is used for transporting substrate, just this substrate can be swum in described support arm top and not with described arm contact, thereby can avoid affecting the display picture quality.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The top view of a kind of robotic device that Fig. 1 provides for the embodiment of the invention one;
The side view of a kind of robotic device that Fig. 2 provides for the embodiment of the invention one;
The side view of a kind of robotic device that Fig. 3 provides for the embodiment of the invention two;
The top view of the another kind of robotic device that Fig. 4 provides for the embodiment of the invention;
The top view of another robotic device that Fig. 5 provides for the embodiment of the invention.
Reference numeral:
The 10-apparatus body; The 20-mechanical arm, 201-support arm, 201a-aperture, 202-the first barrier structure; 203-the second barrier structure; The 30-feeder, 301-air feed main body, 302-air guide pipeline.
The specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
The embodiment of the invention provides a kind of robotic device 1, extremely shown in Figure 5 such as Fig. 1, this robotic device 1 comprises: apparatus body 10, the mechanical arm 20 that is connected with described apparatus body and feeder 30, wherein said mechanical arm comprises at least one support arm 201, be provided with a plurality of aperture 201a on each described support arm, described a plurality of aperture 201a communicate with described feeder 30.
The operation principle of the robotic device 1 that the embodiment of the invention provides when transporting substrate for example is: the gas that feeder 30 provides (for example air) is from the aperture ejection of support arm 201, thereby makes substrate float on described support arm 201 tops and do not contact described support arm 201.
Need to prove, the first, set according to actual conditions for quantity and the size of described aperture 201a, do not do restriction at this, with can be under the gas effect by described aperture 201a, make for example substrate that is positioned at described support arm top floating and do not contact described support arm 201 and be as the criterion.
In addition, not limiting it for described aperture 201a is the hole of running through upper surface and the lower surface of support arm, also can be the hole that does not arrive the lower surface of support arm, and namely the lower surface in this hole is positioned at described support arm inside; Wherein, the upper surface of support arm and little surface are the relative for example substrates that swims in the support arm top, near described substrate be upper surface, then another opposite face is lower surface.
The second, described a plurality of aperture 201a communicate with described feeder 30 and refer to, the gas that described feeder 30 provides sprays through described aperture.
The 3rd, the setting position of described feeder 30 is not limited in embodiments of the present invention, arrive described aperture 201a with the gas that described feeder 30 is provided and be as the criterion.
The 4th, the gas that described feeder 30 provides is required to be clean gas, needs to make substrate floating and can not have any impact to this substrate but prerequisite is this gas.
The embodiment of the invention provides a kind of robotic device, this robotic device comprises apparatus body, the mechanical arm and the feeder that are connected with described apparatus body, wherein said mechanical arm comprises at least one support arm, be provided with a plurality of apertures on the described support arm, described aperture communicates with described feeder; When this robotic device is used for transporting substrate, just this substrate can be swum in described support arm top and not with described arm contact, thereby can avoid affecting the display picture quality.
Consider when described robotic device transports substrate, for example be coated with the necessary photoresist of composition technique on this substrate, if this moment of substrate run-off the straight in the process of transporting, may cause the pattern of follow-up composition technique preparation to go wrong, therefore, in embodiments of the present invention, preferred, a plurality of aperture 201a that are arranged on each support arm 201 evenly distribute.
Further alternative, described mechanical arm 20 can comprise at least two support arms 201, and in the case, described at least two support arms 201 are preferably and be arranged in parallel and equal in length.
Further, described mechanical arm 20 can comprise at least three support arms 201, and is preferred for fear of the substrate run-off the straight that floats on described at least three support arms 201 tops in the case, and described at least three support arms 201 are uniformly-spaced arranged.
Optionally, as shown in Figure 2, described feeder 30 comprises air feed main body 301 and the air guide pipeline 302 that is connected with described air feed main body 301, and described air guide pipeline 301 is arranged at the lower surface of each described support arm 201; Described air guide pipeline 301 communicates with described a plurality of aperture 201a of setting in each described support arm 201.
Lower surface herein is relatively described support arm 201 one side that is used for carrying floating substrate, namely, the gas that the air feed main body 301 of feeder 30 produces sprays from the aperture that is positioned on the support arm through being positioned at the air guide pipeline 30 of support arm lower surface, thereby makes the substrate that is positioned at the support arm top floating.
For described air feed main body 301, be mainly used in providing gas, its position for example can be arranged on described apparatus body 10 inside.Certainly air feed main body 301 also can be arranged on other positions, and is floating with for example substrate that can will be positioned at described support arm top, realizes that the purpose of transporting gets final product.
Embodiment one, and the embodiment of the invention provides a kind of robotic device 1, and as depicted in figs. 1 and 2, this robotic device 1 comprises: apparatus body 10, the mechanical arm 20 that is connected with described apparatus body and feeder 30.
Wherein, described mechanical arm 20 comprises 4 support arms 201, and the interval between described 4 support arms 201 is equal, and the identical length of described 4 support arms etc.; Include the aperture 201a of a plurality of even settings of the upper surface that runs through described support arm and lower surface on each support arm 201.
Described feeder comprises air feed main body 301 and the air guide pipeline 302 that is connected with described air feed main body 301, the lower surface setting of described air guide pipeline 302 adjacent described support arms 201, and communicate with aperture 201a on being positioned at described support arm.Described air feed main body 301 is arranged on described apparatus body 10 inside.
In embodiments of the present invention, can be by the quantity of aperture 201a rationally be set, and the gas intensity by described aperture ejection, make the described support arm upper surface of the substrate distance 3-5mm that floats on the support arm top.
The embodiment of the invention provides a kind of robotic device, comprise apparatus body 10, the mechanical arm 20 that is connected with described apparatus body and feeder 30, wherein, mechanical arm 20 comprises the support arm 201 of 4 intervals and identical length etc., described support arm 201 comprises the aperture 201a of a plurality of even settings of the upper surface that runs through described support arm and lower surface, described feeder comprises air feed main body 301 and air guide pipeline 302, described air guide pipeline 302 is arranged at the lower surface of described support arm 201, and communicates with aperture 201a on being positioned at described support arm; Like this, the gas that air feed main body 301 produces sprays from the aperture that is positioned on each support arm through air guide pipeline 302, thereby can make the substrate that is positioned at described support arm top floating, and then can avoid affecting the display picture quality.
Optionally, as shown in Figure 3, described feeder 30 comprises air feed main body 301 and the air guide pipeline 302 that is connected with described air feed main body 301, and described air guide pipeline 302 is arranged at the inside of each described support arm 201; The described a plurality of aperture 201a that arrange in described air guide pipeline 302 and each described support arm communicate.
Herein, be, be arranged at aperture 201a on each support arm 201 and be the hole of running through the upper surface of described support arm but not running through the lower surface of described support arm, namely, the upper surface of described aperture 201a and described support arm 201 are same plane, and it is inner that the lower surface of described aperture 201a is positioned at described support arm.
For described air feed main body 301, its position for example can be arranged on described apparatus body 10 inside.Certainly air feed main body 301 also can be arranged on other positions, and is floating with for example substrate that can will be positioned at described support arm top, realizes that the purpose of transporting gets final product.
Embodiment two, and the embodiment of the invention provides a kind of robotic device 1, and as shown in figures 1 and 3, this robotic device 1 comprises: apparatus body 10, the mechanical arm 20 that is connected with described apparatus body and feeder 30.
Wherein, described mechanical arm comprises 4 support arms 201, and the interval between described 4 support arms 201 is equal, and the identical length of described 4 support arms etc.; Include the upper surface that runs through described support arm on each support arm 201 but do not run through the aperture 201a of a plurality of even settings of the lower surface of described support arm, that is, it is inner that the lower surface of described aperture 201a is positioned at described support arm.
Described feeder 30 comprises air feed main body 301 and is connected air guide pipeline 302 with described air feed main body 301, and described air guide pipeline 302 is arranged at described support arm 201 inside, and communicates with aperture 201a on being positioned at described support arm.Be, the lower surface of the aperture of the air guide pipeline 302 that is positioned at described support arm inside by being positioned at described support arm inside communicates with described aperture.Described air feed main body 301 is arranged on described apparatus body 10 inside.
In embodiments of the present invention, can be by the quantity of aperture 201a rationally be set, and the gas intensity by described aperture ejection, make the described support arm upper surface of the substrate distance 3-5mm that floats on the support arm top.
The embodiment of the invention provides a kind of robotic device, comprise apparatus body 10, the mechanical arm 20 that is connected with described apparatus body and feeder 30, wherein, mechanical arm 20 comprises the support arm 201 of 4 intervals and identical length etc., described support arm 201 comprises the upper surface that runs through described support arm but does not run through the aperture 201a of a plurality of even settings of the lower surface of described support arm, described feeder comprises air feed main body 301 and air guide pipeline 302, described air guide pipeline 302 is arranged at described support arm 201 inside, and communicates with aperture 201a on being positioned at described support arm; Like this, the gas that air feed main body 301 produces sprays from the aperture that is positioned on each support arm through air guide pipeline 302, thereby can make the substrate that is positioned at described support arm top floating, and then can avoid affecting the display picture quality.
Preferably, as shown in Figure 4, described mechanical arm 20 also comprises: the first barrier structure 202 that is arranged at relatively described apparatus body 10 1 sides of each described support arm 201.
Like this, can avoid swimming in for example substrate of described support arm 201 tops from the opposite side landing of relatively described apparatus body 10.
Preferably, as shown in Figure 5, described mechanical arm 20 also comprises: parallel with described support arm 201, and all described support arms are arranged on outermost the second barrier structure 203 relatively.
Like this, for example substrate that can avoid swimming in described support arm 201 tops from the vertical direction landing of the length direction of described support arm 201.
Further, an end of described the second barrier structure 203 is fixed on the described apparatus body 10, and the other end is arranged on along the centre position of described support arm 201 length directions.
For all embodiment of the present invention, preferred, the gas that described feeder 30 provides is ionic air.
The static of substrate one side that contacts with described ionic air of can neutralizing like this avoids static to discharge the impact that substrate is produced.
Embodiment three, and the embodiment of the invention provides a kind of robotic device 1, and with reference to figure 3 and shown in Figure 5, this robotic device 1 comprises: apparatus body 10, the mechanical arm 20 that is connected with described apparatus body and feeder 30.
Wherein, described mechanical arm comprises 4 support arms 201, and the interval between described 4 support arms 201 is equal, and the identical length of described 4 support arms etc.; Include the upper surface that runs through described support arm on each support arm 201 but do not run through the aperture 201a of a plurality of even settings of the lower surface of described support arm, that is, it is inner that the lower surface of described aperture 201a is positioned at described support arm.
Described feeder 30 comprises air feed main body 301 and the air guide pipeline 302 that is connected with described air feed main body 301, and described air guide pipeline 302 is arranged at described support arm 201 inside, and communicates with aperture 201a on being positioned at described support arm.Be, the lower surface of the aperture of the air guide pipeline 302 that is positioned at described support arm inside by being positioned at described support arm inside communicates with described aperture.Described air feed main body 301 is arranged on described apparatus body 10 inside.
In embodiments of the present invention, can be by the quantity of aperture 201a rationally be set, and the gas intensity by described aperture ejection, make the described support arm upper surface of the substrate distance 3-5mm that floats on the support arm top.
Further, described mechanical arm 20 also comprises: be arranged at the first barrier structure 202 of relatively described apparatus body 10 1 sides of each described support arm 201 and parallel with described support arm 201, and all described support arms are arranged on outermost the second barrier structure 203 relatively.
Wherein, the height of the first barrier structure 202 and the second barrier structure 203 is greater than the floating height of described substrate.
In embodiments of the present invention, realizing making on the floating basis of the substrate that is positioned at above the described support arm, can avoid described substrate from described support arm top landing.
The above; be the specific embodiment of the present invention only, but protection scope of the present invention is not limited to this, anyly is familiar with those skilled in the art in the technical scope that the present invention discloses; can expect easily changing or replacing, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (10)
1. a robotic device comprises apparatus body and the mechanical arm that is connected with described apparatus body, and described mechanical arm comprises at least one support arm; It is characterized in that,
Be provided with a plurality of apertures on each described support arm, described a plurality of apertures communicate with feeder;
Wherein, described robotic device also comprises described feeder.
2. robotic device according to claim 1 is characterized in that, described feeder comprises the air guide pipeline, and described air guide pipeline is arranged at the lower surface of each described support arm;
The described a plurality of apertures that arrange in described air guide pipeline and each described support arm communicate.
3. robotic device according to claim 1 is characterized in that, described feeder comprises the air guide pipeline, and described air guide pipeline is arranged at the inside of each described support arm;
The described a plurality of apertures that arrange in described air guide pipeline and each described support arm communicate.
4. according to claim 1 to 3 each described robotic devices, it is characterized in that, described a plurality of apertures evenly distribute.
5. according to claim 1 to 3 each described robotic devices, it is characterized in that, described mechanical arm comprises at least two support arms, and described at least two support arms be arranged in parallel and equal in length.
6. robotic device according to claim 5 is characterized in that, described mechanical arm comprises at least three support arms, and described at least three support arms uniformly-spaced arrange.
7. robotic device according to claim 1 is characterized in that, described mechanical arm also comprises: the first barrier structure that is arranged at relatively described apparatus body one side of each described support arm.
8. robotic device according to claim 1 is characterized in that, described mechanical arm also comprises: parallel with described support arm, and all described support arms are arranged on outermost the second barrier structure relatively.
9. robotic device according to claim 8 is characterized in that, an end of described the second barrier structure is fixed on the described apparatus body, and the other end is arranged on along the centre position of described arm length direction.
10. robotic device according to claim 1 is characterized in that, the gas that described feeder provides is ionic air.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013101681087A CN103317510A (en) | 2013-05-09 | 2013-05-09 | Robot equipment |
| PCT/CN2013/088976 WO2014180133A1 (en) | 2013-05-09 | 2013-12-10 | Mechanical arm device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013101681087A CN103317510A (en) | 2013-05-09 | 2013-05-09 | Robot equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103317510A true CN103317510A (en) | 2013-09-25 |
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ID=49186706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013101681087A Pending CN103317510A (en) | 2013-05-09 | 2013-05-09 | Robot equipment |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103317510A (en) |
| WO (1) | WO2014180133A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2014180133A1 (en) * | 2013-05-09 | 2014-11-13 | 京东方科技集团股份有限公司 | Mechanical arm device |
| CN104149095A (en) * | 2014-07-07 | 2014-11-19 | 京东方科技集团股份有限公司 | Mechanical hand |
| CN104741289A (en) * | 2013-12-25 | 2015-07-01 | 昆山国显光电有限公司 | Baseplate conveying device and coating device |
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- 2013-05-09 CN CN2013101681087A patent/CN103317510A/en active Pending
- 2013-12-10 WO PCT/CN2013/088976 patent/WO2014180133A1/en active Application Filing
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2014180133A1 (en) | 2014-11-13 |
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Application publication date: 20130925 |