WO2014180133A1

WO2014180133A1 - Mechanical arm device

Info

Publication number: WO2014180133A1
Application number: PCT/CN2013/088976
Authority: WO
Inventors: 郭总杰; 林承武; 袁剑峰; 周子卿; 许朝钦
Original assignee: 京东方科技集团股份有限公司; 北京京东方显示技术有限公司
Priority date: 2013-05-09
Filing date: 2013-12-10
Publication date: 2014-11-13
Also published as: CN103317510A

Abstract

A mechanical arm device (1) is used to manufacture displays. The device can avoid the impact on the display picture quality in the process of transferring substrates. The mechanical arm device (1) comprises a device body (10), a mechanical arm (20) connected to the device body (10) and a gas supply device (30). The mechanical arm (20) comprises at least one branch (201), and each branch (201) is provided with a plurality of small holes (201a) in communication with the gas supply device (30).

Description

A robotic device

The present invention relates to the field of display technologies, and in particular, to a robot apparatus. Background technique

Taking a liquid crystal display as an example, in the process of the array substrate and the counter substrate, substrate transfer is involved to transfer the substrate to different devices for corresponding process steps. For example, the substrate after the photoresist is applied needs to be transferred to a drying device for drying.

At present, the most common way of substrate transfer is mainly based on roller transfer and robot transfer. The corresponding transfer method can be selected according to the process requirements, for example, the wet transfer method is generally selected for the wet cleaning, and the robot transfer method is adopted in the coating stage (e.g., photoresist coating) for considering the flatness.

Among them, the robot is mainly driven by a pin (Pin) or a vacuum chuck. However, whether it is a support pin or a suction cup, the substrate will be partially contacted during the substrate transfer process, which may cause the substrate to be transferred. Because the back contact point will cause partial unevenness of the glass, resulting in poor picture quality (mura). Summary of the invention

Embodiments of the present invention provide a robotic device that avoids the effects of substrate transfer processes on the quality of the display.

In order to achieve the above object, the embodiment of the present invention adopts the following technical solutions:

In one aspect, a robot apparatus is provided, including a device body, a robot arm coupled to the device body, and a gas supply device, wherein the robot arm includes at least one arm, each of which is disposed on the arm a small hole, the plurality of small holes are in communication with the air supply device.

Optionally, the air supply device includes a gas guiding pipeline, and the air guiding pipeline is disposed adjacent to or abutting a lower surface of each of the arms; the air guiding line is in communication with the plurality of small holes provided in each of the arms.

Optionally, the air supply device includes a gas guiding pipeline, and the air guiding pipeline is disposed inside each of the arms; the air guiding pipeline is different from the plurality of small arms disposed in each of the arms The holes are connected.

Further preferably, the plurality of small holes are hooked.

Preferably, the robot arm comprises at least two arms, and the at least two arms are arranged parallel to each other and of equal length.

Further optionally, the mechanical arm includes at least three arms, and the at least three arms are equally spaced.

Preferably, the robot arm further comprises: a first blocking structure disposed on a side of each of the arms opposite to the apparatus body.

Preferably, the robot arm further comprises: a second blocking structure parallel to the arm and disposed at an outermost side with respect to all of the arms.

Further preferably, one end of the second blocking structure is fixed on the apparatus body, and the other preferably, the gas supplied by the air supply device is ionic air.

An embodiment of the present invention provides a robot apparatus, including a device body, a mechanical arm connected to the device body, and a gas supply device, wherein the mechanical arm includes at least one arm, and the arm is disposed on the arm a plurality of small holes, the small holes are in communication with the air supply device; when the robot device is used to transport the substrate, the substrate can be floated above the support arm without contacting the support arm, thereby Can avoid affecting the quality of the monitor picture. DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be described in detail below. It is obvious that the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, other technical solutions can be obtained according to these drawings without any creative work. 1 is a top plan view of a robot apparatus according to a first embodiment of the present invention;

2 is a side view of a robot apparatus according to Embodiment 1 of the present invention;

3 is a side view of a robot apparatus according to a second embodiment of the present invention;

4 is a top plan view of another robot apparatus according to an embodiment of the present invention;

FIG. 5 is a top view of still another robot apparatus according to an embodiment of the present invention.

Reference mark:

10-device body; 20-mechanical arm; 201-arm; 201a-small hole; 202-first blocking structure; 203-second blocking structure; 30-air supply device; 301-supply main body; Pipeline. The technical solutions in the embodiments of the present invention are clearly and completely described in the following with reference to the accompanying drawings in the embodiments of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. example. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts are within the scope of the present invention.

The embodiment of the present invention provides a robot apparatus 1 . As shown in FIG. 1 to FIG. 5 , the robot apparatus 1 includes: a device body 10 , a robot arm 20 connected to the device body, and a gas supply device 30 . The robot arm includes at least one arm 201, and each of the arms is provided with a plurality of small holes 201a, and the plurality of small holes 201a communicate with the air supply device 30.

The operating principle of the robot apparatus 1 provided by the embodiment of the present invention when transporting, for example, a substrate is: a gas (for example, air) supplied from the air supply device 30 is ejected from the small hole of the arm 201, so that the substrate floats on the arm 201. The upper arm 201 is not in contact with the upper side.

It should be noted that, firstly, the number and size of the small holes 201a are set according to actual conditions, which are not limited herein, so as to be located under the action of the gas passing through the small holes 201a. For example, the substrate above the arm floats without contacting the arm 201.

In addition, the small hole 201a is not limited to a hole penetrating the upper surface and the lower surface of the arm, and may also be a hole that does not reach the lower surface of the arm, that is, the lower end of the hole is located inside the arm; Wherein, the upper surface and the lower surface of the arm are relative to the substrate floating above the arm, for example, the substrate is adjacent to the upper surface, and the opposite surface is the lower surface.

Second, the plurality of small holes 201a communicating with the air supply device 30 means that the air supply device The gas supplied 30 is ejected through the small holes.

Thirdly, in the embodiment of the present invention, the installation position of the air supply device 30 is not limited, so that the gas supplied from the air supply device 30 can reach the small hole 201a.

Fourth, the gas supplied from the gas supply device 30 needs to be a clean gas, and the gas needs to float the substrate without any influence on the substrate.

An embodiment of the present invention provides a robot apparatus, including a device body, a mechanical arm connected to the device body, and a gas supply device, wherein the mechanical arm includes at least one arm, and the arm is disposed on the arm a plurality of small holes, the small holes are in communication with the air supply device; when the robot device is used to transport the substrate, the substrate can be floated above the support arm without contacting the support arm, thereby Can avoid affecting the quality of the monitor picture.

Considering that when the substrate is transported by the robot apparatus, for example, the substrate is coated with a photoresist necessary for the patterning process, and if the substrate is tilted during transportation, the pattern prepared by the subsequent patterning process may be problematic. Therefore, in the embodiment of the present invention, preferably, the plurality of small holes 201a provided on each of the arms 201 are evenly distributed.

Further optionally, the robot arm 20 may include at least two arms 201, in which case the at least two arms 201 are preferably arranged in parallel and of equal length.

Further, the robot arm 20 may include at least three arms 201. In this case, in order to avoid tilting of the substrate floating above the at least three arms 201, the at least three arms 201 are preferably Set at equal intervals.

Optionally, as shown in FIG. 2, the air supply device 30 includes a gas supply body 301 and a gas guiding line 302 connected to the gas supply body 301, and the gas guiding line 301 is disposed on each of the branches. a lower surface of the arm 201; the air guiding line 301 is in communication with the plurality of small holes 201a provided in each of the arms 201.

The lower surface here is opposite to the side of the arm 201 for carrying the floating substrate, that is, the gas generated by the air supply body 301 of the air supply device 30 passes through the air guiding line 30 located at the lower surface of the arm. A small hole in the arm is ejected to float the substrate above the arm.

For the gas supply body 301, it is mainly used to supply a gas, and its position can be set, for example, inside the apparatus body 10. Of course, the air supply main body 301 may be disposed at another position as long as the substrate above the arm can be floated to achieve the purpose of transportation.

A first embodiment of the present invention provides a robot apparatus 1, as shown in FIGS. 1 and 2, The robot apparatus 1 includes: an apparatus body 10, a robot arm 20 connected to the apparatus body, and a gas supply device 30.

Wherein, the robot arm 20 includes four arms 201, the four arms 201 are equally spaced, and the four arms are equal in length; each of the arms 201 includes the same A plurality of uniformly disposed small holes 201a of the upper and lower surfaces of the arms.

The air supply device includes a gas supply body 301 and a gas guiding line 302 connected to the gas supply body 301, and the gas guiding line 302 is disposed adjacent to or adjacent to the lower surface of the arm 201, and is located at the same The small holes 201a on the arms are communicated. The air supply main body 301 is disposed inside the apparatus body 10.

In the embodiment of the present invention, the number of the small holes 201a can be appropriately set, and by appropriately adjusting the gas intensity ejected by the small holes, the substrate floating above the support arm must be separated from the upper surface of the support arm by a large distance. 4 is especially chosen as a huge departure of 3-5mm.

An embodiment of the present invention provides a robot apparatus, including an apparatus body 10, a robot arm 20 connected to the apparatus body, and a gas supply device 30, wherein the robot arm 20 includes four arms 201 with intervals and equal lengths. The arm 201 includes a plurality of uniformly disposed small holes 201a penetrating the upper surface and the lower surface of the arm, and the air supply device includes a gas supply body 301 and a gas guiding line 302, and the gas guiding line 302 It is disposed on the lower surface of the arm 201 and is ejected from the small holes on the upper arm of the arm, so that the substrate located above the arm floats, thereby avoiding affecting the picture quality of the display.

Optionally, as shown in FIG. 3, the air supply device 30 includes a gas supply body 301, and a gas guiding pipeline 302 connected to the gas supply body 301, and the gas guiding pipeline 302 is disposed on each of the branches. The inside of the arm 201; the air guiding line 302 is in communication with the plurality of small holes 201a provided in each of the arms.

In this case, the small hole 201a provided in each of the arms 201 penetrates the upper surface of the arm but does not penetrate the hole of the lower surface of the arm, that is, the upper surface of the small hole 201a and The arms 201 are in the same plane, and the lower end of the small hole 201a is located inside the arm.

For the air supply body 301, its position can be set, for example, inside the apparatus body 10. Of course, the air supply main body 301 may be disposed at another position as long as the substrate above the arm can be floated to achieve the purpose of transportation. A second embodiment of the present invention provides a robot apparatus 1. As shown in FIGS. 1 and 3, the robot apparatus 1 includes: an apparatus body 10, a robot arm 20 connected to the apparatus body, and a gas supply device 30. .

Wherein, the robot arm comprises four arms 201, the intervals between the four arms 201 are equal, and the lengths of the four arms are equal; each arm 201 includes a through-the-branch A plurality of uniformly disposed small holes 201a of the upper surface of the arm but not penetrating the lower surface of the arm, that is, the lower end of the small hole 201a is located inside the arm. The air line 302 is disposed inside the arm 201 and communicates with the small hole 201a on the arm. That is, the air guide line 302 located inside the arm communicates with the small hole through the lower end of the small hole located inside the arm. The air supply main body 301 is disposed inside the apparatus body 10.

In the embodiment of the present invention, the number of the small holes 201a can be appropriately set, and by appropriately adjusting the gas intensity of the small holes, the substrate floating above the support arm is separated from the upper surface of the support arm by a certain distance. It is a distance of 3-5mm.

An embodiment of the present invention provides a robot apparatus, including an apparatus body 10, a robot arm 20 connected to the apparatus body, and a gas supply device 30, wherein the robot arm 20 includes four arms 201 with intervals and equal lengths. The arm 201 includes a plurality of uniformly disposed small holes 201a penetrating the upper surface of the arm but not penetrating the lower surface of the arm, and the air supply device includes a gas supply body 301 and a gas guiding line 302. The air guiding line 302 is disposed inside the arm 201 and communicates with the small hole 201a located on the arm; thus, the gas generated by the air supply body 301 is located from each arm through the air guiding line 302. The small holes are ejected, so that the substrate above the arm floats, thereby avoiding affecting the quality of the display screen.

Preferably, as shown in FIG. 4, the robot arm 20 further includes: a first blocking structure 202 disposed on a side of each of the arms 201 opposite to the apparatus body 10.

Thus, it is possible to prevent, for example, the substrate floating above the arm 201 from slipping off from the side opposite to the apparatus body 10.

Preferably, as shown in FIG. 5, the robot arm 20 further includes: a second blocking structure 203 disposed in parallel with the arm 201 and disposed on the outermost side with respect to all of the arms.

In this way, for example, the substrate floating from above the arm 201 can be avoided from the arm 201 The vertical direction of the length slides down.

Further, one end of the second blocking structure 203 is fixed on the apparatus body 10, and the other end terminates at a suitable position within the length of the arm 201 along the length direction of the arm 201, preferably ending at the arm 201. The middle of the length is generally in the middle.

For all embodiments of the present invention, preferably, the gas supplied from the gas supply device 30 is ionic air so that the static electricity on the side of the substrate in contact with the ionic air can be neutralized to avoid the influence of the electrostatic discharge on the substrate.

A third embodiment of the present invention provides a robot apparatus 1 . Referring to FIG. 3 and FIG. 5 , the robot apparatus 1 includes: an apparatus body 10 , a robot arm 20 connected to the apparatus body, and a gas supply device 30 . .

Wherein, the robot arm comprises four arms 201, the intervals between the four arms 201 are equal, and the lengths of the four arms are equal; each arm 201 includes a through-the-branch The upper surface of the arm but not the plurality of uniformly disposed small holes 201a of the lower surface of the arm, that is, the lower end of the small hole 201a is located inside the arm.

The air supply device 30 includes a gas supply body 301 and a gas guiding line 302 connected to the gas supply body 301. The gas guiding line 302 is disposed inside the arm 201 and is located on the arm. The small holes 201a communicate with each other. That is, the air guide line 302 located inside the arm communicates with the small hole through the lower end of the small hole located inside the arm. The air supply main body 301 is disposed inside the apparatus body 10.

Further, the robot arm 20 further includes: a first blocking structure 202 disposed on a side of each of the arms 201 opposite to the apparatus body 10, and parallel with the arm 201, and opposite All of the arms are disposed on the outermost second blocking structure 203.

Wherein, the heights of the first blocking structure 202 and the second blocking structure 203 are greater than the height at which the substrate floats.

In an embodiment of the invention, the substrate is prevented from slipping over the arm while floating the substrate above the arm. The above is only the specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention. It should be covered by the scope of the present invention. Therefore, the scope of the invention should be determined by the scope of the appended claims.

Claims

claims

1. A manipulator device, including an equipment body, a robotic arm connected to the equipment body, and an air supply device, wherein the robotic arm includes at least one support arm; each of the support arms is provided with a plurality of small arms. holes, and the plurality of small holes are communicated with the air supply device.

2. The manipulator device according to claim 1, wherein the air supply device includes an air guide line, and the air guide line is arranged adjacent to or adjacent to the lower surface of each of the arms;

The air-conducting pipeline communicates with the plurality of small holes provided in each arm.

3. The manipulator device according to claim 1, wherein the air supply device includes an air guide line, and the air guide line is provided inside each of the arms;

4. The robot device according to any one of claims 1 to 3, wherein the plurality of small holes are evenly distributed.

5. The manipulator device according to any one of claims 1 to 3, wherein the manipulator arm includes at least two arms, and the at least two arms are arranged parallel to each other and have equal lengths.

6. The robot device according to claim 5, wherein the robot arm includes at least three arms, and the at least three arms are arranged at equal intervals.

7. The manipulator device according to claim 1, wherein the manipulator arm further includes: a first blocking structure provided on the side of each arm opposite to the device body.

8. The robot device according to claim 1 or 7, wherein the robot arm further includes: a second blocking structure parallel to the support arm and disposed at the outermost side relative to all the support arms.

9. The manipulator device according to claim 8, wherein one end of the second blocking structure is fixed on the device body, and the other end terminates in the middle of the length of the arm along the length direction of the arm. Location.

10. The manipulator equipment according to claim 1, wherein the gas provided by the gas supply device is ionized air.