JPH0523651A - Cleaning device - Google Patents
Cleaning deviceInfo
- Publication number
- JPH0523651A JPH0523651A JP18226691A JP18226691A JPH0523651A JP H0523651 A JPH0523651 A JP H0523651A JP 18226691 A JP18226691 A JP 18226691A JP 18226691 A JP18226691 A JP 18226691A JP H0523651 A JPH0523651 A JP H0523651A
- Authority
- JP
- Japan
- Prior art keywords
- cleaned
- cleaning
- roller
- conveying
- article
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は被洗浄物の搬送機構を有
する洗浄装置に係り、特にガラス基板，シリコン基板を
洗浄対象物とし、ブラシを用いた擦り洗浄を行う洗浄装
置の被洗浄物搬送に係る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus having a mechanism for transferring an object to be cleaned, and more particularly, to transferring an object to be cleaned in a cleaning apparatus which uses a glass substrate or a silicon substrate as an object to be cleaned and performs rubbing cleaning with a brush. Pertain to.
【０００２】[0002]
【従来の技術】従来技術では実開平2−1290 号記載のよ
うに、弾性に乏しく、被洗浄物との接触面積の少ない多
数の搬送ローラを用いて被洗浄物を搬送していた。2. Description of the Related Art In the prior art, as described in Japanese Utility Model Laid-Open No. 2-1290, an article to be cleaned is conveyed by using a large number of conveyance rollers which have poor elasticity and a small contact area with the article to be cleaned.
【０００３】[0003]
【発明が解決しようとする課題】従来例では被洗浄物と
搬送ローラとの接触面積が少なく、十分な摩擦力を得る
ことができない。そのためブラシを被洗浄物に接触させ
る方法，圧力、及びブラシの材質によっては被洗浄物と
搬送ローラが空転を起し、被洗浄物を蛇行する、破損す
るなどの問題点があった。In the conventional example, the contact area between the article to be cleaned and the carrying roller is small, and it is not possible to obtain a sufficient frictional force. Therefore, depending on the method of bringing the brush into contact with the object to be cleaned, the pressure, and the material of the brush, the object to be cleaned and the transport roller may idle, causing the object to be cleaned to meander or be damaged.
【０００４】また多数の搬送ローラを被洗浄物と接触さ
せることにより、搬送ローラの材質及び搬送ローラと被
洗浄物との接触圧によっては、被洗浄物を傷つけたり、
汚染したりする可能性があった。Further, by bringing a large number of transport rollers into contact with the article to be cleaned, the article to be cleaned may be damaged or damaged depending on the material of the transport roller and the contact pressure between the transport roller and the article to be cleaned.
There was a possibility of contamination.
【０００５】本発明の目的は被洗浄を汚染したり傷つけ
たりすることなく、確実に搬送を行うことのできる洗浄
装置を提供することにある。It is an object of the present invention to provide a cleaning device which can be reliably transported without polluting or damaging the object to be cleaned.
【０００６】[0006]
【課題を解決するための手段】上記問題を解決するため
に請求項１から請求項５、及び請求項７から請求項８に
示すように、弾性のある搬送ローラで被洗浄物を上下か
ら挾み込んで搬送することにより、被洗浄物を確実に進
行方向に搬送する事ができる。In order to solve the above problems, as shown in claims 1 to 5 and 7 to 8, an article to be cleaned is vertically sandwiched by an elastic conveying roller. By squeezing and transporting, the object to be cleaned can be reliably transported in the traveling direction.
【０００７】また請求項９から請求項１１に示す様に、
進行方向に対し被洗浄物を上下方向，左右方向から挾み
込む様にガイドローラを設ける事により、被洗浄物の搬
送位置を正確に決めることができる。これにより被洗浄
物の蛇行，上下方向の動きを規制することができ、確実
に搬送を行う事ができる。Further, as shown in claims 9 to 11,
By providing the guide roller so as to sandwich the article to be cleaned in the vertical direction and the lateral direction with respect to the traveling direction, the transport position of the article to be cleaned can be accurately determined. As a result, meandering and vertical movement of the object to be cleaned can be regulated, so that the object can be reliably transported.
【０００８】また請求項６に示すように洗浄用ブラシに
用いられる材質の搬送ローラを用いることにより、搬送
ローラによって被洗浄物を傷つけたり再汚染したりする
事なく搬送を行なう事ができる。By using a carrying roller made of the material used for the cleaning brush as described in claim 6, it is possible to carry the object without damaging or recontaminating the object to be cleaned by the carrying roller.
【０００９】[0009]
【作用】洗浄用ブラシと同じ材質の弾性を持った搬送ロ
ーラで被洗浄物を上下から挾み込み、上記搬送ローラを
回転駆動することにより被洗浄物を搬送する。この時被
洗浄物の進行的に対する上下，左右方向への動きをガイ
ドローラにより規制する事により、確実に搬送を行なう
事ができる。The cleaning object is conveyed by rotating the driving roller so that the cleaning object is pinched from above and below by the conveying roller made of the same material as the cleaning brush and having elasticity. At this time, the conveyance of the article to be cleaned can be reliably carried out by restricting the movement of the article to be cleaned in the vertical and horizontal directions with respect to the progress.
【００１０】[0010]
【実施例】以下本発明の一実施例を図１により説明す
る。搬送ローラ４は、ガラス基板などの被洗浄物１を上
下から挾み込むように設置されており、図に記載されて
いない駆動系と結ばれた駆動軸３によって回転駆動され
ることにより、被洗浄物を搬送する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. The transport roller 4 is installed so as to sandwich the article to be cleaned 1 such as a glass substrate from above and below, and is driven to rotate by a drive shaft 3 connected to a drive system (not shown in the figure). Transport the wash items.
【００１１】洗浄用ブラシ２は例えばポリビニールホル
マール系の材質で構成されており、被洗浄物を上下から
挾み込む用に設置され、図に記載されていない駆動系に
より回転駆動されることにより、被洗浄物の擦り洗浄を
行なう。洗浄に用いる洗浄液８はノズル７により供給さ
れる。また洗浄液８は図に記載されていないノズルによ
り、搬送ローラ４にも供給される。The cleaning brush 2 is made of, for example, a polyvinyl formal material, is installed so that an object to be cleaned is inserted from above and below, and is rotated by a drive system (not shown). , Rubbing and cleaning the object to be cleaned. The cleaning liquid 8 used for cleaning is supplied by the nozzle 7. The cleaning liquid 8 is also supplied to the conveying roller 4 by a nozzle not shown in the figure.
【００１２】この時、搬送ローラ４と被洗浄物１との間
には静止摩擦力が働く。また洗浄用ブラシ２と被洗浄物
１との間には動摩擦が働く。材質が同じであれば、静止
摩擦係数及び動摩擦係数は等しくなる。よって洗浄用ブ
ラシ２と同じ材質の例えばポリビニールホルマール系の
材質で構成される搬送ローラ４を用い、搬送ローラ４と
被洗浄物１との接触面圧が洗浄用ブラシ２と被洗浄物１
との接触面圧より大きくなるように、搬送ローラ４と及
び洗浄用ブラシ２の被洗浄物１に対する押しつけ圧力及
び接触面積を設定する事により、確実に被洗浄物１を搬
送する事ができる。また、洗浄用ブラシ２の動摩擦係数
が搬送ローラ４の静止摩擦係数より小さくなるように、
洗浄用ブラシ２及び搬送ローラ４の材質を選定した場合
にも同様な効果を得ることができる。At this time, a static frictional force acts between the conveying roller 4 and the article to be cleaned 1. Dynamic friction acts between the cleaning brush 2 and the object to be cleaned 1. If the materials are the same, the static friction coefficient and the dynamic friction coefficient are equal. Therefore, the conveying roller 4 made of the same material as the cleaning brush 2, for example, a polyvinyl formal material, is used, and the contact surface pressure between the conveying roller 4 and the cleaning target 1 is the cleaning brush 2 and the cleaning target 1.
By setting the pressing pressure and the contact area of the conveying roller 4 and the cleaning brush 2 against the object to be cleaned 1 so as to be larger than the contact surface pressure with the object 1, the object to be cleaned 1 can be reliably conveyed. Further, in order that the coefficient of dynamic friction of the cleaning brush 2 becomes smaller than the coefficient of static friction of the transport roller 4,
Similar effects can be obtained even when the materials of the cleaning brush 2 and the transport roller 4 are selected.
【００１３】上下ガイドローラ５は被洗浄物の上下方向
への動きを規制しており、左右ガイドローラ６は被洗浄
物１の左右方向への動きを規制する。被洗浄物１は通
常、搬送ローラ４によってのみ支持されて搬送されてお
り、左右への蛇行及び上下への動きが生じた場合には、
上下ガイドローラ５及び左右ガイドローラ６が搬送方向
を修正する。上記、上下ガイドローラ５及び左右ガイド
ローラ６は図には記載されていない駆動系により回転駆
動されるか、または被洗浄物１との接触により従動的に
回転するものとする。The upper and lower guide rollers 5 regulate the vertical movement of the article to be cleaned, and the left and right guide rollers 6 regulate the lateral movement of the article 1 to be cleaned. The object to be cleaned 1 is usually supported and conveyed only by the conveying rollers 4, and when a meander to the left and right and a movement to the up and down occur,
The upper and lower guide rollers 5 and the left and right guide rollers 6 correct the conveying direction. It is assumed that the upper and lower guide rollers 5 and the left and right guide rollers 6 are driven to rotate by a drive system not shown in the drawing, or are driven to rotate by contact with the article to be cleaned 1.
【００１４】上記搬送方法では搬送用ローラ４の材質あ
るいは物性を洗浄用ブラシ２と同じにすることにより、
搬送機構部と被洗浄物１との接触により、被洗浄物１を
汚染したり傷つけたりすることなく搬送をおこなうこと
ができる。In the above carrying method, the material or the physical properties of the carrying roller 4 are the same as those of the cleaning brush 2,
By contact between the transport mechanism and the article to be cleaned 1, the article to be cleaned 1 can be transported without being contaminated or damaged.
【００１５】[0015]
【発明の効果】本発明によれば、洗浄用ブラシの形状，
材質，接触面圧，回転数などに関係なく、確実に被洗浄
物の搬送を行なうことができる。またガイドローラによ
り被洗浄物の動きを規制することにより、被洗浄物を破
損させたり、蛇行させることなく搬送することができ
る。また洗浄用ブラシと同じ材質の搬送ローラを用いる
ことにより、被洗浄物を傷つけたり汚染したりすること
なく搬送を行なうことができる。According to the present invention, the shape of the cleaning brush,
The material to be cleaned can be reliably transported regardless of the material, contact surface pressure, number of revolutions, etc. Further, by restricting the movement of the article to be cleaned by the guide roller, the article to be cleaned can be conveyed without damaging or meandering. Further, by using the conveying roller made of the same material as the cleaning brush, the object to be cleaned can be conveyed without being damaged or contaminated.
【図１】本発明の一実施例を示す図である。FIG. 1 is a diagram showing an embodiment of the present invention.
１…被洗浄物、２…洗浄用ブラシ、３…駆動軸、４…搬
送ローラ、５…上下ガイドローラ、６…左右ガイドロー
ラ、７…ノズル、８…洗浄液。DESCRIPTION OF SYMBOLS 1 ... To-be-cleaned object, 2 ... Cleaning brush, 3 ... Drive shaft, 4 ... Conveying roller, 5 ... Vertical guide roller, 6 ... Left and right guide roller, 7 ... Nozzle, 8 ... Cleaning liquid.
Claims (11)
において、弾性のある搬送ローラにより被洗浄物を搬送
することを特徴とする洗浄装置。1. A cleaning device for cleaning by rubbing with a brush, wherein an object to be cleaned is conveyed by an elastic conveying roller.
物を上下から挾み込むように設置したことを特徴とす
る、請求項１記載の洗浄装置。2. The cleaning apparatus according to claim 1, wherein a conveyor roller for conveying the object to be cleaned is installed so as to sandwich the object to be cleaned from above and below.
のあるスポンジ状の材質で構成されていることを特徴と
する、請求項１または請求項２記載の洗浄装置。3. The cleaning apparatus according to claim 1, wherein the transfer roller for transferring the object to be cleaned is made of a water-absorbing sponge-like material.
搬送ローラにも供給することを特徴とする、請求項１か
ら請求項３記載の洗浄装置。4. The cleaning apparatus according to claim 1, wherein the cleaning liquid used for cleaning the object to be cleaned is also supplied to the conveying roller.
ポリビニールホルマール系の材質であることを特徴とす
る、請求項１から請求項４記載の洗浄装置。5. The material of a carrying roller for carrying an article to be cleaned is
The cleaning device according to claim 1, wherein the cleaning device is made of a polyvinyl formal material.
洗浄用ブラシに用いられる材質であることを特徴とす
る、請求項１から請求項５記載の洗浄装置。6. A material of a carrying roller for carrying an article to be cleaned is
The cleaning device according to claim 1, which is a material used for a cleaning brush.
との接触面圧が、洗浄用ブラシと被洗浄物との接触面圧
より大きいことを特徴とする、請求項１から請求項６記
載の洗浄装置。7. The contact surface pressure between a conveyance roller for conveying an object to be cleaned and the object to be cleaned is larger than the contact surface pressure between a cleaning brush and the object to be cleaned. 6. The cleaning device according to 6.
浄用ブラシの反力に勝ることを特徴とする、請求項１か
ら請求項７記載の洗浄装置。8. The cleaning apparatus according to claim 1, wherein the cleaning roller conveys the object to be cleaned with a force greater than a reaction force of the cleaning brush.
洗浄物の搬送方向に対して左右方向の位置決めをおこな
うガイドローラを設置したことを特徴とする、請求項１
から請求項８記載の洗浄装置。9. A guide roller for positioning in the left-right direction with respect to the conveyance direction of the article to be cleaned is provided in addition to the conveyance roller for conveying the article to be cleaned.
9. The cleaning device according to claim 8.
被洗浄物の搬送方向に対して上下方向の位置決めをおこ
なうガイドローラを設置したことを特徴とする、請求項
１から請求項９記載の洗浄装置。10. A transport roller for transporting an article to be cleaned,
10. The cleaning apparatus according to claim 1, further comprising a guide roller for positioning the cleaning target in a vertical direction with respect to a conveyance direction of the cleaning target.
搬送速度と同調するように回転駆動することを特徴とす
る、請求項１から請求項１０記載の洗浄装置。11. The cleaning apparatus according to claim 1, wherein the positioning guide roller is rotationally driven so as to be synchronized with the conveyance speed of the object to be cleaned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18226691A JPH0523651A (en) | 1991-07-23 | 1991-07-23 | Cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18226691A JPH0523651A (en) | 1991-07-23 | 1991-07-23 | Cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0523651A true JPH0523651A (en) | 1993-02-02 |
Family
ID=16115255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18226691A Pending JPH0523651A (en) | 1991-07-23 | 1991-07-23 | Cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523651A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150005545A (en) | 2013-05-28 | 2015-01-14 | 가부시키가이샤 다이와 | Cleaning brush for printed circuit board and cleaning device using it |
| CN105215033A (en) * | 2015-10-21 | 2016-01-06 | 苏州市灵通玻璃制品有限公司 | A kind of bottom disk in microwave oven glass washing device |
| CN106315227A (en) * | 2016-09-05 | 2017-01-11 | 京东方科技集团股份有限公司 | Conveying system |
| CN106623189A (en) * | 2016-12-19 | 2017-05-10 | 武汉华星光电技术有限公司 | Substrate cleaning equipment |
| JP2017113663A (en) * | 2015-12-21 | 2017-06-29 | 日本電気硝子株式会社 | Cleaning device |
| CN108655144A (en) * | 2018-04-02 | 2018-10-16 | 连云港奇晴光电照明有限公司 | A kind of quartz glass cleaning device |
| US10414008B2 (en) | 2017-09-22 | 2019-09-17 | Matsuura Machinery Corporation | Method for supplying cutting oil |
| JP2020145256A (en) * | 2019-03-05 | 2020-09-10 | 株式会社ディスコ | Processing device and cleaning method |
| CN114669568A (en) * | 2017-07-12 | 2022-06-28 | 哈里斯股份有限公司 | Cleaning system |
-
1991
- 1991-07-23 JP JP18226691A patent/JPH0523651A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150005545A (en) | 2013-05-28 | 2015-01-14 | 가부시키가이샤 다이와 | Cleaning brush for printed circuit board and cleaning device using it |
| CN105215033A (en) * | 2015-10-21 | 2016-01-06 | 苏州市灵通玻璃制品有限公司 | A kind of bottom disk in microwave oven glass washing device |
| JP2017113663A (en) * | 2015-12-21 | 2017-06-29 | 日本電気硝子株式会社 | Cleaning device |
| CN106315227A (en) * | 2016-09-05 | 2017-01-11 | 京东方科技集团股份有限公司 | Conveying system |
| CN106623189A (en) * | 2016-12-19 | 2017-05-10 | 武汉华星光电技术有限公司 | Substrate cleaning equipment |
| CN114669568A (en) * | 2017-07-12 | 2022-06-28 | 哈里斯股份有限公司 | Cleaning system |
| US10414008B2 (en) | 2017-09-22 | 2019-09-17 | Matsuura Machinery Corporation | Method for supplying cutting oil |
| CN108655144A (en) * | 2018-04-02 | 2018-10-16 | 连云港奇晴光电照明有限公司 | A kind of quartz glass cleaning device |
| JP2020145256A (en) * | 2019-03-05 | 2020-09-10 | 株式会社ディスコ | Processing device and cleaning method |
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