CN106282949A - 一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法 - Google Patents

一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法 Download PDF

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CN106282949A
CN106282949A CN201610629967.5A CN201610629967A CN106282949A CN 106282949 A CN106282949 A CN 106282949A CN 201610629967 A CN201610629967 A CN 201610629967A CN 106282949 A CN106282949 A CN 106282949A
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赵斌
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Abstract

本发明公开一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，该方法是将要处理的无纺布在净化房内分切成需要的尺寸后安装在设备的放卷辊上；开启Roll‑Roll真空磁控溅射镀膜设备，调整设备至可镀膜工艺条件；开启离子源轰击聚酯无纺膜，将聚烃高分子键部分打开；在聚烃分子键打开的同时，开启中频溅射阴极，利用中频磁控溅射阴极反应溅射Si靶材，形成SixNy‑陶瓷材料嵌入到被打开的聚烃分子键位置；形成陶瓷膜；在真空状态下进行退火处理，消除陶瓷膜应力；收‑放卷连续溅镀；整卷镀膜完成；破真空；取下收券辊；取样检查性能；包装入库；本发明改善了无纺布隔膜的孔径尺寸、分布，提高无纺布隔膜热稳定性和机械强度的方法。

Description

一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法
技术领域
本发明涉及锂电池器件及锂电池材料制造技术领域，具体涉及一种利用真空磁控溅镀技术在锂电池用无纺布隔膜表面制备陶瓷膜的方法。
背景技术
无纺布隔膜由于具有可设计的孔结构和高的孔隙率，对电解液具有高的渗透率，因此无纺布可以作为锂离子电池隔离膜的潜在材料。但是作为锂离子电池的隔膜，无纺布隔膜还有许多缺点需要改善和克服，比如说，高厚度、大孔径、均匀差和机械强度低等等，这些缺点都严重的阻碍了无纺布作为锂离子电池隔膜的推广和应用。
为了缩小无纺布孔径、改善孔径分布均匀性、提高机械性能，有日本、德国厂商采取热压工艺在聚酯无纺布内嵌入陶瓷颗粒，陶瓷与聚酯混合，形成所谓的陶瓷隔离膜。此种制程工艺所需设备庞大，制成的陶瓷隔离膜也只处于推广阶段，还未大量使用。
发明内容
本发明的目的在于针对现有技术的缺陷和不足，提供一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，它改善了无纺布隔膜的孔径尺寸、分布，提高无纺布隔膜热稳定性和机械强度的方法。
为实现上述目的，本发明采用的技术方案是：一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，包括以下步骤：
a、将要处理的无纺布隔膜在净化房内分切成需要的尺寸后安装在Roll-Roll真空磁控溅射镀膜设备的放卷辊上；
b、开启Roll-Roll真空磁控溅射镀膜设备，调整设备至可镀膜工艺条件；
c、开启离子源轰击聚酯无纺膜，并将聚烃高分子键部分打开；
d、在聚烃分子键打开的同时，开启中频溅射阴极，利用中频磁控溅射阴极反应溅射Si靶材，形成SixNy-陶瓷材料嵌入到被打开的聚烃分子键位置；通过对磁控溅射阴极的工艺的控制，形成一层致密的陶瓷膜；
e、隔膜表面沉积陶瓷膜后，在真空状态下进行退火处理，消除陶瓷膜应力；
f、收-放卷连续溅镀；
g、整卷镀膜完成；
h、破真空；
i、取下收券辊；
j、取样检查性能；
k、包装入库。
优选的，所述步骤a中无纺布隔膜分切后的尺寸为：0.2-1.25m。
优选的，所述步骤b中可镀膜工艺条件为：本底真空度5x10-3Pa、工艺气氛3x10- 1Pa、加热温度80-200℃、离子源功率0.2-3kw、中频磁控溅射阴极功率1-20kw、镀膜速度0.1-5m/s。
优选的，所述步骤d中磁控溅射反应生产物SixNy参数:X值范围为：1-3；Y值范围2-4。
优选的，所述步骤e中的真空度为3x10-1-5x10-3Pa。
采用上述技术后，本发明有益效果为：
1、利用真空离子源处理工艺对无纺布隔膜进行表面活化处理，打开聚烃分子键，保证聚烃分子与陶瓷材料分子的分子键键结合，提高膜层附着力。
2、利用中频磁控溅射阴极反应溅射SixNy，在无纺布隔膜表面沉积一层陶瓷膜，改善了无纺布隔膜对电解液的润湿性，同时也提高了无纺布隔膜的热稳定性，改善锂离子电池的安全性能。
3、调制在无纺布表面沉积陶瓷膜的厚度，可以有效改变无纺布通气孔径的大小及分布均匀性。
4、隔膜表面沉积陶瓷膜后，在真空状态下进行退火处理，消除陶瓷膜内部应力，改善隔膜的机械性能。
具体实施方式
下面将结合本发明实施方案，对本发明实施方案中的技术进行清楚、完整地描述，显然，所描述的实施方案仅仅是本发明一部分方案，而不是全部的实施方案。基于本发明中的实施方案，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施方案，都属于本发明保护的范围。
本具体实施方式采用以下具体步骤：
a、将要处理的无纺布隔膜在净化房内分切成需要的尺寸后安装在Roll-Roll真空磁控溅射镀膜设备的放卷辊上；
b、开启Roll-Roll真空磁控溅射镀膜设备，调整设备至可镀膜工艺条件；
c、开启离子源轰击聚酯无纺膜，并将聚烃高分子键部分打开；
d、在聚烃分子键打开的同时，开启中频溅射阴极，利用中频磁控溅射阴极反应溅射Si靶材，形成SixNy-陶瓷材料嵌入到被打开的聚烃分子键位置；通过对磁控溅射阴极的工艺的控制，形成一层致密的陶瓷膜；
e、隔膜表面沉积陶瓷膜后，在真空状态下进行退火处理，消除陶瓷膜应力；
f、收-放卷连续溅镀；
g、整卷镀膜完成；
h、破真空；
i、取下收券辊；
j、取样检查性能；
k、包装入库。
步骤a中无纺布隔膜分切后的尺寸为：0.2-1.25m；步骤b中可镀膜工艺条件为：本底真空度5x10-3Pa、工艺气氛3x10-1Pa、加热温度80-200℃、离子源功率0.2-3kw、中频磁控溅射阴极功率1-20kw、镀膜速度0.1-5m/s；步骤d中磁控溅射反应生产物SixNy参数:X值范围为：1-3；Y值范围2-4；步骤e中的真空度为3x10-1-5x10-3Pa。
本具体实施方式使用真空磁控溅射镀膜技术对锂电池用无纺布隔膜进行表面陶瓷化处理，在真空环境下，利用高能等离子体轰击聚酯无纺膜，将聚烃高分子键部分打开，在聚烃分子键打开的同时，利用磁控溅射阴极反应溅射Si靶材，形成SiXNY-陶瓷材料-嵌入到被打开的聚烃分子键位置，通过对磁控溅射阴极的温度、气氛、功率等的控制，形成一层致密的陶瓷涂层，由分子键结合的陶瓷涂层，大大提高了与聚酯膜的结合力，通过精密控制陶瓷膜厚，可以改变无纺布的孔径及孔分布均匀性，同时提高无纺布作为锂电池隔膜用是的机械强度。
尽管已经示出和描述了本发明的实施方案，对于本领域的普通技术人员而言，可以理解在不脱离本发明的原理和精神的情况下可以对这些实施方案进行多种变化、修改、替换和变型，本发明的范围由所附权利要求及其等同物限定。

Claims (5)

1.一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，其特征在于：它包括以下步骤：
a、将要处理的无纺布隔膜在净化房内分切成需要的尺寸后安装在Roll-Roll真空磁控溅射镀膜设备的放卷辊上；
b、开启Roll-Roll真空磁控溅射镀膜设备，调整设备至可镀膜工艺条件；
c、开启离子源轰击聚酯无纺膜，并将聚烃高分子键部分打开；
d、在聚烃分子键打开的同时，开启中频溅射阴极，利用中频磁控溅射阴极反应溅射Si靶材，形成SixNy-陶瓷材料嵌入到被打开的聚烃分子键位置；通过对磁控溅射阴极的工艺的控制，形成一层致密的陶瓷膜；
e、隔膜表面沉积陶瓷膜后，在真空状态下进行退火处理，消除陶瓷膜应力；
f、收-放卷连续溅镀；
g、整卷镀膜完成；
h、破真空；
i、取下收券辊；
j、取样检查性能；
k、包装入库。
2.根据权利要求1所述的一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，其特征在于所述步骤a中无纺布隔膜分切后的尺寸为：0.2-1.25m。
3.根据权利要求1所述的一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，其特征在于所述步骤b中可镀膜工艺条件为：本底真空度5x10-3Pa、工艺气氛3x10-1Pa、加热温度80-200℃、离子源功率0.2-3kw、中频磁控溅射阴极功率1-20kw、镀膜速度0.1-5m/s。
4.根据权利要求1所述的一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，其特征在于所述步骤d中磁控溅射反应生产物SixNy参数:X值范围为：1-3；Y值范围2-4。
5.根据权利要求1所述的一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法，其特征在于所述步骤e中的真空度为3x10-1-5x10-3Pa。
CN201610629967.5A 2016-08-04 2016-08-04 一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法 Pending CN106282949A (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107403896A (zh) * 2016-08-04 2017-11-28 深圳市烯谷能源控股有限公司 一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法
CN110741107A (zh) * 2017-06-08 2020-01-31 巴斯夫欧洲公司 用于加工具有陶瓷涂层的金属带的辊对辊装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019130150A2 (en) * 2017-12-28 2019-07-04 3M Innovative Properties Company Ceramic-coated fibers including a flame-retarding polymer, and methods of making nonwoven structures

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2070137B1 (en) * 2006-09-25 2014-10-29 LG Chem, Ltd. Method for identifying the origin or kind of a separator itself or of an electrochemical device having the separator
JP5768359B2 (ja) * 2010-11-17 2015-08-26 ソニー株式会社 耐熱性微多孔膜、電池用セパレータ及びリチウムイオン二次電池
CN103066228A (zh) * 2012-12-27 2013-04-24 广东工业大学 一种无机/有机多层复合隔膜的制备方法
CN104630724B (zh) * 2013-11-07 2017-03-29 中国科学院兰州化学物理研究所 一种CrN/Cr/Si3N4/Cr多层耐磨耐蚀薄膜材料及其制备方法
CN103972451B (zh) * 2014-05-21 2016-06-29 北京印刷学院 电池隔膜的表面改性处理方法
CN106169552A (zh) * 2016-08-04 2016-11-30 深圳市第四能源科技有限公司 利用真空磁控溅射技术在pe隔膜表面制备陶瓷膜的方法
CN106282949A (zh) * 2016-08-04 2017-01-04 深圳市第四能源科技有限公司 一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107403896A (zh) * 2016-08-04 2017-11-28 深圳市烯谷能源控股有限公司 一种在锂电池用无纺布隔膜表面制备陶瓷膜的方法
CN110741107A (zh) * 2017-06-08 2020-01-31 巴斯夫欧洲公司 用于加工具有陶瓷涂层的金属带的辊对辊装置

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