CN106271957A - Roller conveyor, plate-shaped body inspection device, and glass plate manufacturing device - Google Patents

Roller conveyor, plate-shaped body inspection device, and glass plate manufacturing device Download PDF

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Publication number
CN106271957A
CN106271957A CN201610631566.3A CN201610631566A CN106271957A CN 106271957 A CN106271957 A CN 106271957A CN 201610631566 A CN201610631566 A CN 201610631566A CN 106271957 A CN106271957 A CN 106271957A
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CN
China
Prior art keywords
glass plate
liquid
roller conveyor
rolling element
stream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610631566.3A
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Chinese (zh)
Inventor
中山朗
中山一朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN106271957A publication Critical patent/CN106271957A/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6637—Special parts or details in view of lubrication with liquid lubricant
    • F16C33/6659—Details of supply of the liquid to the bearing, e.g. passages or nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Abstract

The invention relates to a roller type conveying device, an inspection device of a plate-shaped body and a manufacturing device of a glass plate, wherein the roller type conveying device conveys the plate-shaped body (30) by using a roller (54), and the roller type conveying device comprises: a plurality of rollers (54) arranged along a conveying path of the plate-like body (30); a resin bearing (56) made of or coated with resin, having a rolling element (68), an outer ring (70) and an inner ring (74) that sandwich the rolling element (68) and rollably house the rolling element, and rotatably supporting shafts (58) of the plurality of rollers (54); a liquid supply device (64) that supplies liquid to the rolling elements (68), a raceway surface (72) of the outer ring (70) that contacts the rolling elements (68), and a raceway surface (76) of the inner ring (74) that contacts the rolling elements (68); and a cover (66) that surrounds the resin bearing (56).

Description

Roller conveyor, the inspection device of plate body and the manufacture device of glass plate
The application be on April 3rd, 2015 submit to, Application No. 201380052211.3, it is invention entitled that " roll-type is defeated Send equipment, plate body check device and the manufacture device of glass plate " the divisional application of application.
Technical field
The present invention relates to roller conveyor and the inspection device of plate body and the manufacture device of glass plate.
Background technology
FPD (Flat Panel Display: flat faced display) as liquid crystal display etc. uses the manufacturer of glass plate One example of method, it is known to employ the float glass process manufacture method of the forming process being referred to as float glass process.
Float glass process manufacture method possesses: supplies melten glass to the surface of the motlten metal lodging in floating trough and is configured to banding The forming process of glass plate；Described ribbon glass plate is cut into the glass plate of the rectangular shape of given size, and to cutting off after The circumference of glass plate carry out the cut-out chamfering process of grinding；Face is ground for described glass plate, passes through lapping device This is ground the small concavo-convex or grinding step being ground removing that rises and falls in face；And inspection operation.
Described inspection operation possesses: after the glass plate ground after terminating carries out brush cleaning, carried out clearly by water under high pressure The matting washed；Glass plate is dried by the compressed air from air knife nozzle to glass plate injection clean dry Dry clean operation；And the flatness measuring the flatness (relief height is relative to the ratio of fluctuating spacing) in the face that is ground measures Operation.
By via these operations, glass plate being manufactured into and is suitable for the thickness 0.2～1.5mm of FPD glass plate and puts down The glass plate of Tan Dugao.
Patent document 1 discloses that the lapping device of batch with FPD glass plate as object.The grinding dress of patent documentation 1 Put and possess: absorption keeps the suction sheet of glass plate；It is provided with the film body that the film frame of this suction sheet is constituted by.Fill according to this grinding Put, to supplying pressure fluid between film body and the bracket installing film body, will be protected by suction sheet absorption by the pressure of pressure fluid The face that is ground of the glass plate held is pressed in grinding pad, and makes glass plate and grinding pad rotate against (rotation and/or revolution) Grinding is ground face.And, when grinding, serosity to grinding pad and is ground between face supply.It should be noted that by grinding The face that is ground of the glass plate that mill pad grinds is to manufacture TFT (Thin Film Transistor: thin in the manufacturing process of FPD Film transistor) or the face of CF (Color Filter: color filter), it is the face of the high-precision flatness of requirement.
On the other hand, in flatness measures operation, whether the flatness in the face that is ground of the glass plate after inspection grinding It is converged in the specification value of the manufacture being suitable for TFT or CF.The inspection of this flatness such as uses disclosed in patent documentation 2 smooth Degree determinator (inspection device) is carried out.
Flatness determinator according to patent documentation 2, irradiates the pattern with periodic light and shade to glass plate, and Accept to have passed through the pattern of glass plate or the pattern of reflection, it is achieved in order to detect the deviation (phase by the light and shade cycle in light image Deviation for the light and shade cycle in the pattern that glass plate irradiates) and to glass plate irradiate pattern in the light and shade cycle institute right The equalization of the light and shade by the region in light image of the size answered, and signal based on equalization calculates the smooth of glass plate Degree.
As described above, in grinding step (lapping device), the glass plate in the face of being ground has been ground by checking that operation is (flat Smooth degree determinator) check and be ground the flatness in face, but owing to serosity is attached to the glass plate that grinds after terminating, therefore lead to Cross and check that the described matting of operation will attach to the serosity of glass plate and washes out.Then, in flatness determinator, in order to Prevent the error detection remaining in the water droplet of glass plate, dust causes, in the described dry cleansing chemical industry sequence checking operation, pass through From air knife nozzle compressed air by water droplet, dust remove, after glass plate has been carried out dry cleansing, implement based on The flatness of flatness determinator measures.It should be noted that flatness measures the system of the glass plate at non-abrading glass plate Make in method such as fusion method and also implement.
It addition, glass plate by the roller conveyor that is made up of many rollers from lapping device to flatness determinator quilt Continuous transport, is laid in the bearing of the roller on the drying production line with described air knife nozzle, in order to avoid from bearing leakage Grease be attached to glass plate, and use the fluororesin etc. with self lubricity not using grease resin-made or The resins such as fluororesin are coated on the bearing (hereinafter referred to as resin bearing) of bearing steel.And, there is also the rolling with ceramic The resin bearing of kinetoplast.
[citation]
[patent documentation]
[patent documentation 1] Japanese Laid-Open 2004-122351 publication
No. 3411829 publication of [patent documentation 2] Japan's patent
Summary of the invention
[inventing problem to be solved]
But, even if not using the resin bearing of grease, owing to the abrasion of resin bearing also can produce the powder of resin Dirt, in the case of dispersing at this dust and being attached to glass plate, exists in inspection operation based on flatness determinator and leads Cause the such problem of error detection.
The present invention makes in view of such situation, and the roll-type that its object is to provide a kind of roller to be supported by resin bearing is defeated Send the roller conveyor dispersed of dust that equipment and can suppressing produces from resin bearing and the inspection device of plate body, And the manufacture device of glass plate.
[for solving the scheme of problem]
The present invention is in order to realize described purpose, and provides a kind of roller conveyor, utilize roller to carry plate body, described Roller conveyor possesses: many rollers, and the transport path along described plate body configures；Resin-made or be coated with the resin of resin Bearing, has rolling element and clamps this rolling element and can house this rolling element outer ring and inner ring in the way of rolling, by described The respective axle of many rollers rotatably supports；Fluid Supplying apparatus, to described rolling element, described outer ring with described rolling Orbital plane and the orbital plane connected with described rolling element of described inner ring that body connects supply liquid；And cover cap, surround described tree Fat bearing.
According to the present invention, from fluid Supplying apparatus to the rolling element of resin bearing, the track connected with rolling element of outer ring Face, inner ring the orbital plane connected with rolling element for liquid, therefore, it is possible to the resin that makes to produce due to the abrasion of resin Dust is mixed into liquid, is additionally, since resin bearing and is surrounded by cover cap, therefore, it is possible to suppress dispersing of described dust.And, liquid Body, as lubricant plays effect, therefore extends the service life of resin bearing.
Resin bearing is made up of outer ring, inner ring, rolling element and keeper, the sliding surface of rolling element, rolling element and keeper, The orbital plane of the inner ring that the orbital plane of the outer ring that rolling element connects and rolling element connect is to send out dirt position.Supply to this dirt position Liquid and make the resin of generation dust enclose liquid situation be inventive feature.
(definition of resin bearing)
The resin bearing of the present invention is at least one structure that will constitute in the outer ring of bearing, inner ring, rolling element and keeper Part is formed as resin-made or is coated with the bearing of resin.But, when at least one component in described component is formed as uncoated During the component that the bearing steel of resin exposes, the self lubricity of resin bearing declines.Knot accordingly, as preferred resin bearing Structure, whole components is preferably resin-made or the component to bearing steel coated with resins.
Whole component of resin bearing is that the material of resin during resin-made is not particularly limited, but preferably superelevation is divided Sub-weight northylen (UHMW PE:ultra high molecular weight polyethylene), politef (PTFE: Or polyether-ether-ketone (PEEK:polyetheretherketone) polytetrafluoroethylene).The material of the resin of coating Material is not particularly limited, but preferably has fluororesin or the polyimide resin of self lubricity.Bearing (rolling element, outer ring and interior Circle) material be not particularly limited, but preferably hard and there is pottery or the high-carbon chromium steel of mar proof.
And, from the viewpoint of intensity, life-span and lightweight, more preferably outer ring, inner ring and keeper are set to superelevation Rolling element is also set to ceramic by molecular weight polyethylene system.
Preferably, described fluid Supplying apparatus possesses one scheme of the present invention: support element, possesses described resin shaft The described outer ring held carries out maintaining part and the stream of described liquid kept；And liquid circulation feed unit, to described framework The entrance of the described stream of part supplies described liquid, and by the described liquid from the outlet discharge of described stream to described stream Entrance circulation supply.
A scheme according to the present invention, is possessing the outer ring to resin bearing and carries out keeping a framework of fixing maintaining part Part is provided with the stream of liquid, therefore without being arranged separately with support element by stream, it is possible to cut down parts count.Liquid By liquid circulation feed unit and to stream entrance supply, during by stream to the rolling element of resin bearing, The orbital plane connected with rolling element of outer ring, the orbital plane connected with the rolling element supply of inner ring.Further, arrange from the outlet of stream The liquid gone out utilizes liquid circulation feed unit to circulate supply to the entrance of stream.If it should be noted that following at liquid Ring path is arranged filter and is captured the dust being mixed into liquid by this filter, then can all the time by cleaning liquid to Stream supplies.
Preferably, the described stream of described support element has one scheme of the present invention: set across described maintaining part Put in side and the first flow path that connects with the entrance of described stream；And be arranged on across described maintaining part opposite side and with institute Stating the second flow path of the outlet of stream, described first flow path connects via described maintaining part with described second flow path.
A scheme according to the present invention, flows through first flow path and to guarantor from the entrance of stream to the liquid that first flow path supplies Portion of holding flows into.Thus, to the resin bearing supply liquid kept by maintaining part.Further, to the liquid of resin bearing supply from guarantor Portion of holding flows into second flow path and flows through second flow path, discharges from the outlet of stream.By by such first flow path and second Stream is located at support element, it is possible to smoothly feed liquid to resin bearing.
One scheme of the present invention preferably, between the described first flow path and described maintaining part of described support element, And between described maintaining part and described second flow path, possess the weir dike component blocking described liquid in described maintaining part, institute respectively State a part for the orbital plane of a part for the rolling element of resin bearing, described outer ring and one of the orbital plane of described inner ring Divide and impregnated in the described liquid blocked by described maintaining part.
A scheme according to the present invention, owing to the liquid supplied to maintaining part being blocked by weir dike component, therefore resin A part for the orbital plane of a part for the rolling element of bearing, the part of orbital plane for outer ring and inner ring becomes and impregnated in all the time The state of liquid.Thereby, it is possible to significantly suppress dispersing of the dust from resin bearing.
Preferably, the described axle of described roller is inserted through the described inner ring of described resin bearing to one scheme of the present invention, It is positioned on the described axle of both sides across described inner ring and is provided with slip and prevents component, described slip from preventing the end face of component from abutting In the end face of described inner ring and utilize fastening apparatus and be fixed on described axle.
A scheme according to the present invention, prevents the restraint effect of component by slip, and the axle of roller is relative to inner ring vertically Do not slide, it is possible to what anti-sliding stop caused sends out dirt, and the powder amount therefore from resin bearing can reduce than ever.Thus, energy Dispersing of enough suppression dust further.
It addition, the present invention is in order to realize described purpose, it is provided that the inspection device of a kind of plate body, possess: plate for carrying Shape body is while the cleaning part that is carried out；Carry the described plate body after being cleaned by described cleaning part while being dried also The dry cleansing portion of being cleaned；And the described plate body after being dried by described dry cleansing portion and cleaned is carried out The inspection portion checked, wherein, is configured at described dry cleansing portion by the roller conveyor of the present invention.
The inspection device of the plate body according to the present invention, owing to being configured at dry cleansing by the roller conveyor of invention Portion, therefore, it is possible to be greatly decreased described dust to be attached to the generation frequency of the error detection checking device that the situation of plate body causes Degree.
Preferably, described plate body is glass plate to one scheme of the present invention.
A scheme according to the present invention, owing to the dry cleansing portion checking device at glass plate is configured with the present invention's Roller conveyor, therefore the inspection precision of glass plate is greatly improved.
It addition, the present invention provides the manufacture device of a kind of glass plate, possess:
Forming section, moltens glass into ribbon glass plate；
Cut off chamfered section, described ribbon glass plate is cut into the glass plate of the rectangular shape of given size, and to cutting out The circumference of described glass plate carry out grinding；
Cleaning part, carries the described glass plate after circumference has been carried out grinding and is carried out；
Dry cleansing portion, carries the described glass plate after being cleaned by described cleaning part and is dried and carries out Clean；And
Inspection portion, checks the described glass plate after being dried by described dry cleansing portion and cleaned, described glass In the manufacture device of glass plate,
The roller conveyor of the present invention is configured at described dry cleansing portion.
A scheme according to the present invention, owing to the dry cleansing portion checking device at glass plate is configured with the present invention's Roller conveyor, therefore, it is possible to the glass plate that the inspection precision producing glass plate is greatly improved.
[invention effect]
Roller conveyor according to the present invention, it is possible to dispersing of the dust of the resin that suppression produces from resin bearing.By This, according to the inspection device of the plate body of the present invention, it is possible to described dust is greatly decreased and is attached to what the situation of plate body caused The Frequency of error detection.
Accompanying drawing explanation
Fig. 1 is the block diagram of each operation representing the device for producing glass sheet of liquid crystal display and glass board checking device.
Fig. 2 is the top view of the structure of the glass board checking device representing Fig. 1.
Fig. 3 is the side view of the structure cleaning device and dry cleansing gasifying device of the glass board checking device representing Fig. 1.
Fig. 4 is the top view of the structure representing roller conveyor in detail.
Fig. 5 is the front view of the roller conveyor that the A-A ' line from Fig. 4 is observed.
Fig. 6 is the assembling stereogram viewed from above of resin bearing and support element.
Fig. 7 is the axonometric chart observed from below of the support element of Fig. 6.
Fig. 8 is the block diagram of the structure representing the fluid Supplying apparatus comprising support element.
Fig. 9 is affixed to the axonometric chart that the resin bearing of support element is surrounded by cover cap.
Figure 10 is the resin bearing and the side view of support element pulled down by cover cap in fig .9.
[label declaration]
10 ... device for producing glass sheet, 12 ... glass board checking device, 14 ... forming process, 16 ... cut off chamfering process, 18 ... grinding step, 20 ... matting, 22 ... dry cleansing chemical industry sequence, 24 ... flatness mensuration operation, 26 ... clean device, 28 ... dry cleansing gasifying device, 30 ... glass plate, 32 ... roller conveyor, 34 ... brush cleaning part, 36 ... roller conveyor, 38 ... rotating brush, 40,42 ... high-pressure water jetting device, 44,46 ... nozzle, 48 ... housing, 49 ... dry cleansing space, 50, 52 ... air knife nozzle, 54 ... roller, 54A, 54B, 54C ... roller, 56 ... resin bearing, 57 ... gear mechanism, 58 ... axle, 59 ... drive Portion, 60 ... disc, 61 ... ring-type buffer component, 62 ... support element, 64 ... fluid Supplying apparatus, 66 ... cover cap, 68 ... rolling Kinetoplast, 70 ... outer ring, 72 ... orbital plane, 74 ... inner ring, 76 ... orbital plane, 76A ... lowest point, 78 ... liquid circulating apparatus, 80 ... maintaining part, 82 ... stream, 84 ... the entrance of stream, 86 ... the outlet of stream, 88 ... pump, 90 ... peripheral passage, 92 ... on Liter path, 94 ... decline path, 96 ... first flow path, 98 ... second flow path, 100,102 ... weir dike component, 104,106 ... cut Mouthful, 108 ... slide and prevent component, 110 ... screw, 112 ... electromagnetic valve, 114 ... control portion.
Detailed description of the invention
Hereinafter, describe the roller conveyor of the present invention and plate body with reference to the accompanying drawings in detail checks the preferred of device Embodiment.
In embodiments, the glass plate inspection dress on the device for producing glass sheet being arranged on liquid crystal display is described Put the roller conveyor that (the inspection device of plate body) is applicable.But, the device of the roller conveyor being suitable for the present invention does not has It is defined to glass plate and checks device.That is, as long as the bearing preventing the roller from pair roller type conveying equipment from carrying out supporting produces Dust is attached to the device of plate body can be suitable for the roller conveyor of the present invention.And, although illustrate liquid crystal display Glass plate as plate body but it also may be other the FPD glass such as plasma scope, organic el display Plate.And, it is not defined to glass plate, it is also possible to be metal system or resinous plate body.
Fig. 1 is the frame of each operation representing the device for producing glass sheet 10 of liquid crystal display and glass board checking device 12 Figure.
The manufacturing process of device for producing glass sheet 10 includes: the forming process 14 carried out by forming device (forming section)；By Cut off the cut-out chamfering process 16 that facing attachment (cut-out chamfered section) is carried out；Carried out by lapping device disclosed in patent documentation 1 grade Grinding step 18；By cleaning the matting 20 that device (cleaning part) is carried out；By dry cleansing gasifying device (dry cleansing Portion) the dry cleansing chemical industry sequence 22 that carries out；And by flatness determinator (inspection portion) disclosed in patent documentation 2 etc. carry out flat Smooth degree measures operation 24.And, the inspection operation of glass board checking device 12 includes matting 20, dry cleansing chemical industry sequence 22 And flatness measures operation 24.
Forming process 14 is to be configured to ribbon glass to the surface of the motlten metal lodging in floating trough supply melten glass The operation of plate.Cutting off chamfering process 16 is the glass plate of the rectangular shape that described ribbon glass plate cuts into given size right The circumference of the glass plate cut out carries out the operation of grinding.Grinding step 18 is glass plate is ground face small concavo-convex Or the operation being ground and remove that rises and falls.Matting 20 is after the glass plate ground after terminating carrying out brush and cleans, It is carried out by water under high pressure, will attach to the serosity of glass plate, the operation of lapping rejects removing.Dry cleansing chemical industry sequence 22 be by Compressed air is dried the operation cleaned to glass plate injection to glass plate.It is to glass plate that flatness measures operation 24 The operation that is measured of the flatness in the face that is ground.By above-mentioned operation, glass plate is to be suitable for liquid crystal display The thickness of glass plate, and the glass plate that flatness is high can be obtained.
The manufacture method of above-mentioned glass plate is based on float glass process, but present embodiment is readily adaptable for use in fusion method etc..Need Illustrate, utilize fusion method etc. forging plane is formed as element form the manufacture method in face to manufacture glass plate time, grind Operation 18 is omitted.
Fig. 2 is the top view of the structure briefly expressing glass board checking device 12, and Fig. 3 is to represent glass board checking device 12 Cleaning device (matting 20: with reference to Fig. 1) 26 and dry cleansing gasifying device (dry cleansing chemical industry sequence 22: with reference to Fig. 1) 28 The side view of structure.
As in figure 2 it is shown, ground the glass plate 30 in the face of being ground by roller conveyor 32 by grinding step 18, depend on Secondary by constituting the cleaning brush cleaning part 34 of device 26, high-pressure water jetting device 40,42 (with reference to Fig. 3) and dry cleansing makeup Putting 28, the flatness determinator measuring operation 24 to flatness is moved into.It should be noted that the paving in roller conveyor 32 The roller conveyor 36 being located at dry cleansing gasifying device 28 is the roller conveyor of the embodiment possessing resin bearing.And And, in fig. 2, illustrate glass plate 30 in order to easy to understand, be not by solid line but to be represented by double dot dash line.
Fig. 4 is the top view of the structure representing roller conveyor 36 in detail, and Fig. 5 is that the A-A ' line from Fig. 4 is observed Front view.
Each roller of roller conveyor 36 is by axle 58 and multiple discs 60,60 of abutting with the lower surface of glass plate 30 ... Constitute, and multiple discs 60 are configured at axle 58 at a prescribed interval.In fig. 2, in order to avoid miscellaneous and omit disc The diagram of 60, only diagrammatically illustrates the resin bearing 56 less than the diameter of disc 60 and axle 58.And, such as Fig. 4 and Fig. 5 institute Showing, the peripheral part at the disc 60 abutted with the lower surface of glass plate 30 is provided with rubber system or resinous ring-type buffering structure Part 61, prevents from causing scar to the lower surface of glass plate 30.
As Fig. 4 and Fig. 5, the both ends of axle 58 are joined the most highlightedly from the housing 48 of dry cleansing gasifying device 28 Put, link with drive division 59 via gear mechanism 57.The power in axle 58 self-driven portion 59 in the future transmits via gear mechanism 57, Thus driven and rotate, thus disc 60 rotates and moving glass plate 30.
Brush cleaning part 34 shown in Fig. 2 possesses and is arranged in the top of roller conveyor 32 and being ground with glass plate 30 The vertical in face is axle and the multiple stage rotating brush 38,38 that rotates in the horizontal direction ....Glass plate 30 is while being set by roll-type conveying Standby 32 carryings, the rotating brush 38,38 rotated by abutting with the face of being ground ... will attach to be ground the serosity in face and Grinding dust removes.
High-pressure water jetting device 40 is arranged in top as shown in Figure 3 across roller conveyor 32, and high-pressure water jet fills Put 42 and be arranged in lower section across roller conveyor 32.As shown in the arrow in the left side of Fig. 3, glass plate 30 is defeated by roll-type Send equipment 32 to carry, clean it by the water under high pressure ejected from the nozzle 44 of high-pressure water jetting device 40 and be ground face (upper surface), and clean its lower surface by the water under high pressure ejected from the nozzle 46 of high-pressure water jetting device 42.
The glass plate 30 having passed through cleaning device 26 is moved to the shell of dry cleansing gasifying device 28 by roller conveyor 32 In body 48.Further, in the carrying that the roller conveyor 36 by being arranged in housing 48 is carried out, it is attached to glass plate 30 Water droplet, dust etc. are removed by the compressed air from multiple air knife nozzles 50,52 (being each 1 in Fig. 2 and Fig. 3).Such as Fig. 2 Shown in the arrow on the arrow of downside and the right side of Fig. 3, the glass plate 30 having passed through air knife nozzle 50,52 measures operation to flatness 24 carryings.It should be noted that the dry cleansing space 49 being configured with air knife nozzle 50,52 is airtight by housing 48.Thus, exist The dust swum in the outside of housing 48 will not invade dry cleansing space 49.And, in Fig. 2～Fig. 4, by air knife nozzle 50, about 52 a pair is configured but it also may be arranged in housing 48 by multipair air knife nozzle at spaced intervals.
Air knife nozzle 50 above roller conveyor 36 and along glass plate 30 carrying direction arrange.Air knife nozzle 52 the lower section of roller conveyor 36 and along glass plate 30 carrying direction arrange.And, air knife nozzle 50 sprays with air knife Mouth 52 is arranged in pairs in the vertical direction.And, air knife nozzle 50,52 is in order to effectively remove the water being attached to glass plate 30 Drip, dust etc., and configure with tilting predetermined angular relative to the carrying direction of glass plate 30 as shown in Figure 2.
Additionally, roller conveyor 36 in order to by the compressed air from air knife nozzle 52 efficiently to glass plate 30 times Surface is sprayed, and by the partial cut of configuration air knife nozzle 52 as Fig. 2, Fig. 4 and Fig. 5.
That is, when being conceived to the roller constituted shown in the label 54 of the Fig. 2 in many rollers of roller conveyor 36, this roller 54 Avoid the allocation position of air knife nozzle 52 and be divided into 2 rollers 54A, 54B.Further, from the housing 48 roller 54A's prominent to outside Left part is supported on not shown general bearing (bearing of bearing steel), and the right part of the roller 54A being positioned at housing 48 is propped up Hold the resin bearing 56 in embodiment.And, it is supported on not shown from the right part of the housing 48 roller 54B prominent to outside General bearing (bearing of bearing steel), the left part of the roller 54B being positioned at housing 48 is supported on resin bearing 56.That is, tree Fat bearing 56 is applicable in housing the bearing of configuration.
It should be noted that about other many rollers of composition roller conveyor 36, essentially become same with roller 54 The structure of sample, therefore the description thereof will be omitted.
Then, basic structure and the effect possessing the roller conveyor 36 of resin bearing 56 is described.
Fig. 6 be resin bearing 56 and the support element 62 of approximately parallelepiped body shape that resin bearing 56 is supported from The assembling stereogram that top is observed, Fig. 7 is the axonometric chart observed from below of support element 62, and Fig. 8 is to represent to comprise to prop up The block diagram of the structure of the fluid Supplying apparatus 64 of frame member 62, is front view, in order to observe shown in Fig. 6 at support element 62 Weir dike component 100 and a part of cutting is represented.Fig. 9 is affixed to the resin bearing 56 of support element 62 by transparent resin system Cover cap 66 surround axonometric chart, Figure 10 is the resin bearing 56 and the side-looking of support element 62 pulled down by cover cap 66 in fig .9 Figure.
The roller conveyor 36 of the embodiment shown in Fig. 4 and Fig. 5 is in order to avoid spilling from bearing in housing 48 Grease is attached to the glass plate 30 before checking, and uses the resin bearing 56 possessing self lubricity not using grease As the bearing being arranged in housing 48.Further, be provided with the rolling element 68 to resin bearing 56 as Fig. 6, outer ring 70 with The inner peripheral surface that rolling element 68 connects i.e. orbital plane 72, the outer peripheral face connected with the rolling element 68 i.e. orbital plane 76 of inner ring 74 and guarantor Hold the keeper (not shown) of rolling element 68 for liquid (the such as water such as pure water, municipal water or subsoil water), the liquid of Fig. 8 Feedway 64.And, the cover cap 66 surrounding resin bearing 56 is set as shown in Figure 9.It should be noted that thick shown in Fig. 6 Arrow represents the resin bearing 56 assembly orientation relative to support element 62, and thin arrow represents the described liquid in support element 62 Flow direction.
By said structure, according to the roller conveyor 36 of embodiment, due to from fluid Supplying apparatus 64 to resin The rolling element 68 of bearing 56, the orbital plane 72 connected with rolling element 68 of outer ring 70, the rail connected with rolling element 68 of inner ring 74 Face, road 76 and keeper are for liquid, and the dust of the resin therefore produced due to the abrasion of resin bearing 56 can be mixed into liquid. Thereby, it is possible to reduce the powder amount from resin bearing 56, it is additionally, since resin bearing 56 and is surrounded by cover cap 66, therefore from tree The dust not being mixed into liquid in the dust that fat bearing 56 produces will not disperse outside cover cap 66.Therefore, according to embodiment Roller conveyor 36, it is possible to suppress dispersing of the dust from resin bearing 56 generation.
It addition, according to the glass board checking device 12 of the roller conveyor 36 possessing embodiment, it is possible to it is greatly decreased Described dust is attached to the flatness that the situation of glass plate 30 causes and measures the Frequency of the error detection in operation 24, therefore base Inspection precision in the glass plate 30 of flatness determinator is greatly improved.
It should be noted that the resin bearing 56 of embodiment is from the viewpoint of intensity, life-span and lightweight, outer ring 70, inner ring 74 and described keeper are ultrahigh molecular weight polyethylene, and rolling element 68 is ceramic.And, to resin bearing 56 The liquid of supply extends such advantage as lubricant plays effect, the service life the most also with resin bearing 56.
Then, the feature of fluid Supplying apparatus 64 is described.
Fluid Supplying apparatus 64 possesses support element 62 and the liquid circulating apparatus (liquid of Fig. 8 such approximately parallelepiped body shape Body circulation feed unit) 78.Support element 62 surface thereon possesses maintaining part 80 and possesses the channel-shaped of liquid as Fig. 6 Stream 82, this maintaining part 80 has the concave curved of the arc-shaped of the latter half by being fitted together to the outer ring 70 keeping resin bearing 56 Face.And, the entrance 84 of stream 82 (with reference to Fig. 6) it is provided with in one end of the bottom of the support element 62 shown in Fig. 7, and separately One end is provided with the outlet 86 of stream 82.
The liquid circulating apparatus 78 of Fig. 8 has peripheral passage 90, and the entrance 84 that this peripheral passage 90 possesses to stream 82 supplies The liquid discharged from the outlet 86 of stream 82 is also circulated the pump 88 of supply by liquid to the entrance 84 of stream 82.From stream 82 The liquid of entrance 84 supply supplies to the stream 82 of the upper surface of support element 62 via the path 92 that rises being located at support element 62 Give, after having passed through stream 82, via being located at the decline path 94 of support element 62 from outlet 86 discharge.
According to the fluid Supplying apparatus 64 so constituted, at the support element of the maintaining part 80 possessing fixing resin bearing 56 62 streams 82 being provided with liquid, therefore without being arranged separately with support element 62 by stream 82, it is possible to cut down parts count.
It addition, liquid is by liquid circulating apparatus 78 rolling element to resin bearing 56 during by stream 82 68, the orbital plane 72 connected with rolling element 68 of outer ring 70, the orbital plane 76 connected with rolling element 68 of inner ring 74 supply.And And, the liquid discharged from the outlet 86 of stream 82 circulates supply by pump 88 to the entrance 84 of stream 82.If it should be noted that Filter is set in the peripheral passage 90 of liquid, and is captured the dust being mixed into liquid by this filter, then can all the time by The liquid that the amount of dust is few supplies to stream 82.
Then, the feature of stream 82 is described.
The stream 82 of support element 62 possesses first flow path 96 and second flow path 98 as shown in Figure 6.And, first flow path 96 Connect via maintaining part 80 with second flow path 98.
First flow path 96 is arranged on a side side across the concave curved surface of the arc-shaped of maintaining part 80, and via rising path 92 And connect with the entrance 84 of stream 82.Second flow path 98 is arranged on the opposing party across the concave curved surface of the arc-shaped of maintaining part 80 Side, and connect with the outlet 86 of stream 82 via declining path 94.Rise path 92 and be arranged on one end of first flow path 96, under Fall path 94 is arranged on the other end of second flow path 98, but the position that arranges rising path 92 and decline path 94 does not has especially Limit, it is also possible to be arranged on the central authorities of each stream.It should be noted that the other end of second flow path 98 is and described first flow path The side that side set by one end of 96 is contrary.
According to the stream 82 so constituted, from the entrance 84 of stream 82 via rising what path 92 supplied to first flow path 96 Liquid flows through first flow path 96, flows into maintaining part 80.Thus, to the resin bearing 56 kept by maintaining part 80 for liquid. Further, the liquid to resin bearing 56 supply flows into second flow path 98 from maintaining part 80 and flows through second flow path 98, via under Fall path 94 is discharged from the outlet 86 of stream 82.By such first flow path 96 and second flow path 98 are located at support element 62, it is possible to smoothly feed liquid to resin bearing 56.
Then, first flow path 96 and the feature of second flow path 98 are described.
Between the first flow path 96 and maintaining part 80 of support element 62 and between maintaining part 80 and second flow path 98, point Do not possesses the weir dike component 100,102 blocking (accumulation) liquid in maintaining part 80.Thus, in the liquid blocked by maintaining part 80 It is impregnated with a part for the orbital plane 72 of a part for rolling element 68 for resin bearing 56, outer ring 70 and the orbital plane 76 of inner ring 74 A part.
According to possessing first flow path 96 and the second flow path 98 of such weir dike component 100,102, by weir dike component 100,102 the liquid to maintaining part 80 supply can be blocked, therefore in the rolling element 68 of bottom, the outer ring 70 of resin bearing 56 The orbital plane 72 connected with this rolling element 68 and the orbital plane 76 connected with this rolling element 68 of inner ring 74 become and submerge all the time The state of (impregnated in) liquid.Thereby, it is possible to significantly suppress dispersing of the dust from resin bearing 56.
Make liquid from first flow path 96 to maintaining part 80 it should be noted that possess in the center upper portion of weir dike component 100 The concave otch 104 flowed into, the center upper portion at weir dike component 102 possesses makes liquid flow to second flow path 98 from maintaining part 80 The concave otch 106 entered.The height of the bottom of otch 104,106, the water surface of the liquid i.e. blocked by maintaining part 80 are set in Than lowest point 76A of the orbital plane 76 of the inner ring 74 shown in double dot dash line in the Fig. 8 of the resin bearing 56 being fixed on maintaining part 80 Position by the top.Thus, the track connected with this rolling element 68 of a part for rolling element 68 for resin bearing 56, outer ring 70 A part for the part in face 72 and the orbital plane 76 connected with this rolling element 68 of inner ring 74 impregnated in liquid all the time.
But, and the axle 58 of the roller of the such roller conveyor of Figure 10 36 prevents component 108,108 from consolidating via pair of sliding Inner ring 74 due to resin bearing 56.That is, first axle 58 is inserted through inner ring 74 by this fixing means.Then, from the two of inner ring 74 The slip of circle shape is prevented component 108,108 from embedding to axle 58 by the respective direction of end face.Then, each slip is made to prevent component 108, the end face relative with inner ring 74 of 108 and the both sides end contact of inner ring 74.That is, slip is utilized to prevent component 108,108 Inner ring 74 is clamped.The external diameter of component 108 is prevented to be preferably below the external diameter of inner ring 74 it should be noted that slide.If sliding Prevent below the external diameter that external diameter is inner ring 74 of component 108, then will not hinder the flowing of liquid.Further, finally, to anti-from sliding Only the outer peripheral face of component 108 inserts screw (fastening apparatus) 110,110 towards the through screwed hole that inner peripheral surface is arranged, by 2 cunnings Moving prevents component 108,108 to be fixed on axle 58.Thus, the axle 58 of the roller of roller conveyor 36 via slip prevent component 108, 108 and be fixed on the inner ring 74 of resin bearing 56.
The axle 58 of roller is relative to inner ring 74, and preventing the restraint effect of component 108,108 from coming by slip will not vertically Slide.Thereby, it is possible to prevent the inner ring 74 from resin bearing 56 that described slip causes sends out dirt, therefore, it is possible to further press down Dispersing of powder process dirt.
It addition, as shown in Figure 8, the peripheral passage 90 that fluid Supplying apparatus 64 possesses to liquid circulating apparatus 78 starts and stops The only electromagnetic valve (valve) 112 of the supply of liquid.As desired electromagnetic valve 112 is carried out opening and closing, it is possible to start and stop The supply of liquid.
And, the beginning action of the supply of the liquid that electromagnetic valve 112 is carried out and stopping action being controlled by controlling portion 114.? Need not all the time when resin bearing 56 supplies liquid, as long as per stipulated time electromagnetic valve 112 being left by control portion 114 Close control, carry out beginning action and the stopping action of the supply of liquid.And, control portion 114 only exists to economize on electricity Pump 88 is made to operate if desired.That is, control portion 114 also controls the operating/stopping of pump 88.
Although in detail and illustrating the present invention with reference to specific embodiment, but without departing from the scope of the present invention and Purport and the situation of various correction or change of can applying is the most self-evident.
The Japanese patent application 2012-222761 that the application filed an application based on October 5th, 2012, and its content is made It is incorporated herein for reference.

Claims (8)

1. a roller conveyor, utilize roller to carry plate body,
Described roller conveyor is characterised by possessing:
Many rollers, the transport path along described plate body configures；
Resin-made or be coated with the resin bearing of resin, has rolling element and clamps this rolling element and in the way of can rolling House outer ring and the inner ring of this rolling element, the respective axle of described many rollers is rotatably supported；And
Fluid Supplying apparatus, to described rolling element, the orbital plane connected with described rolling element of described outer ring and described inner ring The orbital plane connected with described rolling element supplies liquid,
Described liquid is water.
Roller conveyor the most according to claim 1, wherein,
Described fluid Supplying apparatus possesses:
Support element, possesses maintaining part and the stream of described liquid that the described outer ring to described resin bearing keeps；And
Liquid circulation feed unit, supplies described liquid to the entrance of the described stream of described support element, and will be from described stream The described liquid that the outlet on road is discharged circulates supply to the entrance of described stream.
Roller conveyor the most according to claim 2, wherein,
The described stream of described support element has: be arranged on side across described maintaining part and the entrance with described stream connects Logical first flow path；And it is arranged on opposite side and the second flow path of the outlet with described stream across described maintaining part,
Described first flow path connects via described maintaining part with described second flow path.
Roller conveyor the most according to claim 3, wherein,
Between the described first flow path and described maintaining part of described support element and described maintaining part and described second flow path it Between, possess the weir dike component blocking described liquid in described maintaining part, a part for described rolling element, the rail of described outer ring respectively A part for the part in face, road and the orbital plane of described inner ring impregnated in the described liquid blocked by described maintaining part.
5. according to the roller conveyor according to any one of Claims 1 to 4, wherein,
The described axle of described roller is inserted through the described inner ring of described resin bearing,
It is provided with slip prevents component being positioned on the described axle of both sides across described inner ring,
Described slip prevents the end face of component be connected to the end face of described inner ring and utilize fastening apparatus and be fixed on described axle.
6. an inspection device for plate body, possesses: carry the cleaning part that plate body is carried out；While carrying by Described plate body after the cleaning of described cleaning part is while being dried and carrying out the dry cleansing portion cleaned；And to by described Described plate body after dry cleansing portion is dried and cleans carries out the inspection portion that checks, wherein,
Roller conveyor according to any one of Claims 1 to 5 is configured at described dry cleansing portion.
The inspection device of plate body the most according to claim 6, wherein,
Described plate body is glass plate.
8. a manufacture device for glass plate, possesses:
Forming section, moltens glass into ribbon glass plate；
Cut off chamfered section, described ribbon glass plate is cut into the glass plate of the rectangular shape of given size, and to the institute cut out The circumference stating glass plate carries out grinding；
Cleaning part, carries the described glass plate after circumference has been carried out grinding and is carried out；
Dry cleansing portion, carries the described glass plate after being cleaned by described cleaning part and is dried and is cleaned Change；And
Inspection portion, checks the described glass plate after being dried by described dry cleansing portion and cleaned,
In the manufacture device of described glass plate,
Roller conveyor according to any one of Claims 1 to 5 is configured at described dry cleansing portion.
CN201610631566.3A 2012-10-05 2013-09-30 Roller conveyor, plate-shaped body inspection device, and glass plate manufacturing device Pending CN106271957A (en)

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JP2012-222761 2012-10-05
JP2012222761 2012-10-05
CN201380052211.3A CN104703898A (en) 2012-10-05 2013-09-30 Roller conveyor, plate-shaped body inspection device, and glass plate manufacturing device

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KR20150066530A (en) 2015-06-16

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Application publication date: 20170104