CN104703898A - Roller conveyor, plate body inspecting device, and glass plate manufacturing device - Google Patents

Roller conveyor, plate body inspecting device, and glass plate manufacturing device Download PDF

Info

Publication number
CN104703898A
CN104703898A CN201380052211.3A CN201380052211A CN104703898A CN 104703898 A CN104703898 A CN 104703898A CN 201380052211 A CN201380052211 A CN 201380052211A CN 104703898 A CN104703898 A CN 104703898A
Authority
CN
China
Prior art keywords
stream
glass board
roller conveyor
rolling body
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380052211.3A
Other languages
Chinese (zh)
Inventor
中山一朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to CN201610631566.3A priority Critical patent/CN106271957A/en
Publication of CN104703898A publication Critical patent/CN104703898A/en
Pending legal-status Critical Current

Links

Classifications

    • B08B1/20—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/102—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for travelling sheets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/62—Selection of substances
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6637—Special parts or details in view of lubrication with liquid lubricant
    • F16C33/6659—Details of supply of the liquid to the bearing, e.g. passages or nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position

Abstract

The present invention pertains to a roller conveyor for transporting a plate body (30) with rollers (54), said roller conveyor comprising: a plurality of rollers (54) disposed along the transport path of the plate body (30); a plastic bearing (56) that is made of resin or coated by a resin, has a rolling body (68), and an outer ring (70) and an inner ring (74) accommodating the rolling body (68) therebetween so that the same can roll, and rotatably supports a shaft (58) of each of the plurality of rollers (54); a liquid supplying device (64) that supplies a liquid to the rolling body (68), the race face (72) of the outer ring (70) contacting the rolling body (68), and to the race face (76) of the inner ring (74) contacting the rolling body (68); and a cover (66) enclosing the plastic bearing (56).

Description

The testing fixture of roller conveyor, tabular body and the manufacturing installation of glass board
Technical field
The present invention relates to the testing fixture of roller conveyor and tabular body and the manufacturing installation of glass board.
Background technology
As FPD (Flat Panel Display: a flat-panel monitor) example of the manufacture method of glass board of Liquid Crystal Display etc., there will be a known the float glass process manufacture method employing the forming process being called as float glass process.
Float glass process manufacture method possesses: the surface to the molten metal lodging in floating trough supplies melten glass and is configured as the forming process of ribbon glass plate; Described ribbon glass plate is cut into the glass board of the rectangular shape of given size, and the cut-out chamfering process of grinding is carried out to the circumference of the glass board after cut-out; For the polished face of described glass board, carry out by the small concavo-convex or fluctuating of lapping device to this polished face the grinding step grinding removing; And inspection operation.
Described inspection operation possesses: to grinding terminate after glass board carry out brush clean after, carried out the matting of cleaning by high pressure water; Pressurized air from air knife nozzle is sprayed to glass board and glass board is carried out to the dry cleansing chemical industry sequence of dry cleansing; And the flatness of the flatness (relief height is relative to the ratio of fluctuating spacing) measuring polished face measures operation.
By via these operations, glass board is manufactured thickness 0.2 ~ 1.5mm of being suitable for FPD glass board and the high glass board of flatness.
Patent documentation 1 discloses with the lapping device of the FPD glass board batch that is object.The lapping device of patent documentation 1 possesses: absorption keeps the suction sheet of glass board; By a film body that the film frame being provided with this suction sheet is formed.According to this lapping device, pressure fluid is supplied between film body and the bracket installing film body, by the pressure of pressure fluid, the polished face of being adsorbed the glass board kept by suction sheet is pressed in grinding pad, and makes that glass board is relative with grinding pad to be rotated (rotation and/or revolution) and grind polished face.And, when grinding, slurries are supplied between grinding pad and polished face.It should be noted that, the polished face of the glass board ground by grinding pad is the face manufacturing TFT (Thin Film Transistor: thin film transistor) or CF (Color Filter: colour filter) in the Fabrication procedure of FPD, is the face of the high-precision flatness of requirement.
On the other hand, measure in operation in flatness, check whether the flatness in the polished face of the glass board after grinding is converged in the specification value of the manufacture being suitable for TFT or CF.The inspection of this flatness such as uses flatness determinator (testing fixture) disclosed in patent documentation 2 to carry out.
According to the flatness determinator of patent documentation 2, the pattern with periodic light and shade is irradiated to glass board, and accept through the pattern of glass board or the pattern of reflection, realize the equalization being subject to the light and shade in the region in light image of the size corresponding to the light and shade cycle in order to detect in the pattern that irradiates to glass board by the deviation (deviation relative to the light and shade cycle in the pattern irradiated to glass board) in the light and shade cycle in light image, and calculate the flatness of glass board based on the signal of equalization.
As described above, the glass board in polished face has been ground by checking that operation (flatness determinator) checks the flatness in polished face in grinding step (lapping device), but grind the glass board after terminating because slurries are attached to, therefore by checking that the slurries being attached to glass board wash out by the described matting of operation.Then, in flatness determinator, in order to the error detection preventing from remaining in the water droplet of glass board, dust causes, in the described dry cleansing chemical industry sequence checking operation, by the pressurized air from air knife nozzle by water droplet, dust removing, after having carried out dry cleansing to glass board, the flatness implemented based on flatness determinator measures.It should be noted that, flatness is determined in the manufacture method such as method of fusion of the glass board of non-abrading glass plate and also implements.
In addition, glass board by the roller conveyor that is made up of many rollers from lapping device to flatness determinator by continuous transport, be laid in the bearing of the roller on the drying production line with described air knife nozzle, in order to avoid the grease from bearing leakage is attached to glass board, and use the resin-made with the fluorocarbon resin of self lubricity etc. that do not use grease or by the bearing (hereinafter referred to as resin bearing) of the resin-coating such as fluorocarbon resin in bearing steel.And, also there is the resin bearing of the rolling body with pottery system.
[at first technical literature]
[patent documentation]
[patent documentation 1] Japanese Laid-Open 2004-122351 publication
[patent documentation 2] Japan's patent No. 3411829 publication
Summary of the invention
[inventing the problem that will solve]
But, even if do not use the resin bearing of grease, wearing and tearing due to resin bearing also can produce the dust of resin, when this dust disperses and is attached to glass board, in based on the inspection operation of flatness determinator, there is the problem causing error detection such.
The present invention makes in view of such situation, the roller conveyor that its object is to provide a kind of roller to be supported by resin bearing and can suppress the roller conveyor dispersed of the dust produced from resin bearing and the testing fixture of tabular body and the manufacturing installation of glass board.
[for solving the scheme of problem]
The present invention in order to realize described object, and provides a kind of roller conveyor, and utilize roller to carry tabular body, described roller conveyor possesses: many rollers, and the transport path along described tabular body configures; Resin-made or be coated with the resin bearing of resin, has rolling body and clamps this rolling body and accommodate this rolling body outer ring and inner ring in the mode that can roll, by the respective axle supporting of described many rollers for rotatable; Fluid Supplying apparatus, to the orbital plane connected with described rolling body of described rolling body, described outer ring and the orbital plane feed fluid connected with described rolling body of described inner ring; And cover cap, surround described resin bearing.
According to the present invention, from fluid Supplying apparatus to the orbital plane feed fluid connected with rolling body of the orbital plane connected with rolling body of the rolling body of resin bearing, outer ring, inner ring, therefore, it is possible to make the dust of the resin produced due to the wearing and tearing of resin be mixed into liquid, and, because resin bearing is surrounded by cover cap, therefore, it is possible to suppress dispersing of described dust.And liquid, as lubricant plays effect, therefore extends the service life of resin bearing.
Resin bearing is made up of outer ring, inner ring, rolling body and retainer, and the orbital plane of the inner ring that the orbital plane of the outer ring that the sliding surface of rolling body, rolling body and retainer, rolling body connect and rolling body connect sends out a dirt position.The situation making the dust of the resin of generation enclose liquid to this dirt position feed fluid is feature of the present invention.
(definition of resin bearing)
Resin bearing of the present invention is that at least one component in the outer ring forming bearing, inner ring, rolling body and retainer is formed as resin-made or is coated with the bearing of resin.But when the component that the bearing steel that at least one component in described component is formed as uncoated resin exposes, the self lubricity of resin bearing declines.Therefore, as the structure of preferred resin bearing, whole components is preferably resin-made or the component to bearing steel coated with resins.
The material of resin when whole component of resin bearing is resin-made is not particularly limited, but is preferably ultra-high molecular weight polyethylene (UHMW ?PE:ultra high molecularweight ?polyethylene), polytetrafluoroethylene (PTFE:polytetrafluoroethylene) or polyetheretherketone (PEEK:polyetheretherketone).The material of the resin of coating is not particularly limited, but preferably has fluorocarbon resin or the polyimide resin of self lubricity.The material of bearing (rolling body, outer ring and inner ring) is not particularly limited, but preferably hard and have pottery or the high-carbon chromium steel of abrasion test.
And, from intensity, life-span and weight-saving viewpoint, more preferably outer ring, inner ring and retainer be set to ultrahigh molecular weight polyethylene and rolling body be set to pottery system.
A scheme optimization of the present invention, described fluid Supplying apparatus possesses: support element, possesses the stream of maintaining part and the described liquid kept the described outer ring of described resin bearing; And liquid-circulating feed unit, the entrance to the described stream of described support element supplies described liquid, and the described liquid of the outlet from described stream being discharged is to the entrance circulation supply of described stream.
According to a scheme of the present invention, possessing the stream carrying out the outer ring of resin bearing keeping the support element of the maintaining part of fixing being provided with liquid, therefore without the need to stream and support element being arranged separately, parts count can be cut down thus.By liquid-circulating feed unit, entrance to stream supplies liquid, supplies in by the process of stream to the rolling body of resin bearing, the orbital plane connected with rolling body of outer ring, the orbital plane connected with rolling body of inner ring.Further, the liquid of discharging from the outlet of stream utilize liquid-circulating feed unit and to stream entrance circulation supply.It should be noted that, if arrange filter in the circulation path of liquid and caught the dust be mixed into liquid by this filter, then can all the time clean liquid be supplied to stream.
A scheme optimization of the present invention, the described stream of described support element has: be arranged on side and the first flow path be communicated with the entrance of described stream across described maintaining part; And being arranged on opposite side across described maintaining part and the second stream of outlet with described stream, described first flow path is communicated with via described maintaining part with described second stream.
According to a scheme of the present invention, the liquid supplied from the entrance of stream to first flow path flows through first flow path and flows into maintaining part.Thus, to the resin bearing feed fluid kept by maintaining part.Further, the liquid to the supply of resin bearing flows into the second stream from maintaining part and flows through the second stream, discharges from the outlet of stream.By such first flow path and the second stream are located at support element, can to resin bearing feed fluid swimmingly.
A scheme optimization of the present invention be, between the described first flow path and described maintaining part of described support element and between described maintaining part and described second stream, possess the weir dike component blocking described liquid in described maintaining part respectively, a part for a part for the rolling body of described resin bearing, a part for the orbital plane of described outer ring and the orbital plane of described inner ring impregnated in the described liquid blocked by described maintaining part.
According to a scheme of the present invention, owing to being blocked by the liquid supplied to maintaining part by weir dike component, therefore a part for a part for the rolling body of resin bearing, a part for the orbital plane of outer ring and the orbital plane of inner ring becomes the state that impregnated in liquid all the time.Thereby, it is possible to significantly suppress the dispersing of dust from resin bearing.
A scheme optimization of the present invention be, the described axle of described roller is inserted through the described inner ring of described resin bearing, the described axle being positioned at both sides across described inner ring is provided with slip and prevents component, described slip prevents the end face of component be connected to the end face of described inner ring and utilize fastening apparatus and be fixed on described axle.
According to a scheme of the present invention, prevent the restraint effect of component by sliding, the axle of roller does not slide vertically relative to inner ring, can anti-sliding stop cause send out dirt, the powder amount therefore from resin bearing can reduce than ever.Thereby, it is possible to suppress dispersing of dust further.
In addition, the present invention, in order to realize described object, provides a kind of testing fixture of tabular body, possesses: carry the cleaning part that tabular body carries out cleaning; Carry the described tabular body after being cleaned by described cleaning part while carry out drying and carry out the dry cleansing portion that cleans; And to the inspection portion that dry by described dry cleansing portion and after cleaning described tabular body checks, wherein, roller conveyor of the present invention is configured at described dry cleansing portion.
According to the testing fixture of tabular body of the present invention, due to the roller conveyor of invention is configured at dry cleansing portion, therefore, it is possible to significantly reduce the Frequency of the error detection of the testing fixture that situation that described dust is attached to tabular body causes.
A scheme optimization of the present invention, described tabular body is glass board.
According to a scheme of the present invention, because the dry cleansing portion of the testing fixture at glass board is configured with roller conveyor of the present invention, therefore the inspection precision of glass board significantly improves.
In addition, the invention provides a kind of manufacturing installation of glass board, possess:
Forming section, is configured as ribbon glass plate by melten glass;
Cut off chamfered section, described ribbon glass plate is cut into the glass board of the rectangular shape of given size, and grinding is carried out to the circumference of the described glass board cut out;
Cleaning part, carries and cleans the described glass board after circumference has carried out grinding;
Dry cleansing portion, carries the described glass board after by described cleaning part cleaning and carries out drying and clean; And
Inspection portion, checks dry by described dry cleansing portion and after cleaning described glass board, in the manufacturing installation of described glass board,
Roller conveyor of the present invention is configured at described dry cleansing portion.
According to a scheme of the present invention, because the dry cleansing portion of the testing fixture at glass board is configured with roller conveyor of the present invention, therefore, it is possible to the glass board that the inspection precision producing glass board significantly improves.
[invention effect]
According to roller conveyor of the present invention, dispersing of the dust of the resin produced from resin bearing can be suppressed.Thus, according to the testing fixture of tabular body of the present invention, the Frequency of the error detection that situation that described dust is attached to tabular body causes significantly can be reduced.
Accompanying drawing explanation
Fig. 1 is the block diagram representing the device for producing glass sheet of Liquid Crystal Display and each operation of glass board testing fixture.
Fig. 2 is the birds-eye view of the structure of the glass board testing fixture representing Fig. 1.
Fig. 3 is the lateral plan of the washing equipment of the glass board testing fixture representing Fig. 1 and the structure of dry cleansing gasifying device.
Fig. 4 is the birds-eye view of the structure representing roller conveyor in detail.
Fig. 5 is the front view of the roller conveyor observed from the A-A ' line of Fig. 4.
Fig. 6 be resin bearing and support element from top view to assembling stereogram.
Fig. 7 is the block diagram observed from below of the support element of Fig. 6.
Fig. 8 is the block diagram of the structure representing the fluid Supplying apparatus comprising support element.
Fig. 9 is the block diagram that the resin bearing being fixed on support element is surrounded by cover cap.
Figure 10 is the lateral plan of resin bearing and the support element pulled down by cover cap in fig .9.
Detailed description of the invention
Below, the testing fixture of roller conveyor of the present invention and tabular body is described with reference to the accompanying drawings in detail preferred embodiment.
In embodiments, illustrate to the applicable roller conveyor of the glass board testing fixture (testing fixture of tabular body) on the device for producing glass sheet being arranged on Liquid Crystal Display.But the device being suitable for roller conveyor of the present invention is not defined as glass board testing fixture.That is, as long as the device that the dust preventing the bearing carrying out supporting from the roller of pair roller type load transfer device from producing is attached to tabular body can both be suitable for roller conveyor of the present invention.And, although illustrate the glass board of Liquid Crystal Display as tabular body, also can be other the FPD glass board such as plasma scope, OLED display.And not being defined as glass board, also can be metal or resinous tabular body.
Fig. 1 is the block diagram representing the device for producing glass sheet 10 of Liquid Crystal Display and each operation of glass board testing fixture 12.
The Fabrication procedure of device for producing glass sheet 10 comprises: the forming process 14 of being undertaken by building mortion (forming section); The cut-out chamfering process 16 undertaken by cut-out facing attachment (cut-out chamfered section); The grinding step 18 that lapping device carries out disclosed in patent documentation 1 grade; The matting 20 of being undertaken by washing equipment (cleaning part); The dry cleansing chemical industry sequence 22 of being undertaken by dry cleansing gasifying device (dry cleansing portion); And the flatness that flatness determinator (inspection portion) carries out disclosed in patent documentation 2 etc. measures operation 24.And the inspection operation of glass board testing fixture 12 comprises matting 20, dry cleansing chemical industry sequence 22 and flatness and measures operation 24.
Forming process 14 is surface supply melten glass to the molten metal lodging in floating trough and is configured as the operation of ribbon glass plate.Cut off chamfering process 16 be described ribbon glass plate is cut into the rectangular shape of given size glass board and the circumference of the glass board cut out is carried out to the operation of grinding.Grinding step 18 is the operations of grinding the small concavo-convex or fluctuating in the polished face of glass board and removing.Matting 20, after the glass board after terminating grinding carries out brush cleaning, is cleaned by high pressure water, will be attached to the slurries of glass board, the operation of lapping rejects removing.Dry cleansing chemical industry sequence 22 pressurized air is sprayed to glass board and glass board carried out to the operation of dry cleansing.It is the operations measured the flatness in the polished face of glass board that flatness measures operation 24.By above-mentioned operation, glass board is the thickness of the glass board being suitable for Liquid Crystal Display, and can obtain the high glass board of flatness.
The manufacture method of above-mentioned glass board is based on float glass process, but present embodiment also goes for method of fusion etc.It should be noted that, when manufacture method forging plane being formed as element forming surface utilizing method of fusion etc. is to manufacture glass board, grinding step 18 omits.
Fig. 2 is the birds-eye view of the structure briefly expressing glass board testing fixture 12, and Fig. 3 is the lateral plan representing the washing equipment (matting 20: with reference to Fig. 1) 26 of glass board testing fixture 12 and the structure of dry cleansing gasifying device (dry cleansing chemical industry sequence 22: with reference to Fig. 1) 28.
As shown in Figure 2, the glass board 30 in polished face has been ground by roller conveyor 32 by grinding step 18, successively by forming brush cleaning part 34, high-pressure water jetting device 40,42 (with reference to Fig. 3) and the dry cleansing gasifying device 28 of washing equipment 26, the flatness determinator measuring operation 24 to flatness is moved into.It should be noted that, the roller conveyor 36 being layed in dry cleansing gasifying device 28 in roller conveyor 32 is the roller conveyors of the embodiment possessing resin bearing.And, in fig. 2, in order to easy understand illustrate glass board 30, be not by solid line but represented by long and two-short dash line.
Fig. 4 is the birds-eye view of the structure representing roller conveyor 36 in detail, and Fig. 5 is the front view observed from the A-A ' line of Fig. 4.
Each roller of roller conveyor 36 is by axle 58 and multiple discs 60,60 of abutting with the lower surface of glass board 30 ... form, and multiple disc 60 is configured at axle 58 with the interval of regulation.In fig. 2, in order to avoid miscellaneous and omit the diagram of disc 60, the resin bearing 56 less than the diameter of disc 60 and axle 58 is only roughly illustrated.And, as shown in Figures 4 and 5, at the peripheral part of the disc 60 abutted with the lower surface of glass board 30, rubber system or resinous ring-type buffer component 61 are installed, prevent from causing scar to the lower surface of glass board 30.
As Fig. 4 and Fig. 5, the both ends of axle 58 configure outward highlightedly from the housing 48 of dry cleansing gasifying device 28, link with drive division 59 via gear mechanism 57.The power in axle 58 self-driven portion 59 in future transmits via gear mechanism 57, thus is rotated by driving, and disc 60 rotates and moving glass plate 30 thus.
Brush cleaning part 34 shown in Fig. 2 possesses the top being configured in roller conveyor 32 and the multiple stage rotating brush 38,38 rotated in the horizontal direction for axle with the vertical in the polished face of glass board 30 ...Glass board 30 while carried by roller conveyor 32, the rotating brush 38,38 rotated by abutting with polished face ... slurries and the removing of grinding dust in polished face will be attached to.
High-pressure water jetting device 40 is configured in top as shown in Figure 3 across roller conveyor 32, high-pressure water jetting device 42 is configured in below across roller conveyor 32.As shown in the arrow in the left side of Fig. 3, glass board 30 is while carried by roller conveyor 32, while clean its polished face (upper surface) by the high pressure water ejected from the nozzle 44 of high-pressure water jetting device 40, and clean its lower surface by the high pressure water ejected from the nozzle 46 of high-pressure water jetting device 42.
The glass board 30 that have passed washing equipment 26 is moved in the housing 48 of dry cleansing gasifying device 28 by roller conveyor 32.Further, in the carrying that the roller conveyor 36 by being configured in housing 48 carries out, being attached to the water droplet of glass board 30, dust etc. and being removed by the pressurized air from multiple air knife nozzle 50,52 (being each 1 in Fig. 2 and Fig. 3).As shown in the arrow on the arrow of the downside of Fig. 2 and the right side of Fig. 3, the glass board 30 that have passed air knife nozzle 50,52 measures operation 24 to flatness and carries.It should be noted that, the dry cleansing space 49 being configured with air knife nozzle 50,52 is airtight by housing 48.Thus, the dust swum in the outside of housing 48 can not invade dry cleansing space 49.And, in Fig. 2 ~ Fig. 4, air knife nozzle 50, about 52 is configured a pair, but also can at spaced intervals by multipair air knife nozzle arrangement in housing 48.
Air knife nozzle 50 is arranged above roller conveyor 36 and along the carrying direction of glass board 30.Air knife nozzle 52 is arranged in the below of roller conveyor 36 and along the carrying direction of glass board 30.And air knife nozzle 50 and air knife nozzle 52 are arranged in the vertical direction in pairs.And air knife nozzle 50,52 is attached to the water droplet, dust etc. of glass board 30 in order to removing effectively, and as shown in Figure 2 relative to glass board 30 carrying direction inclination predetermined angular configure.
In addition, roller conveyor 36 in order to the pressurized air from air knife nozzle 52 be sprayed to the lower surface of glass board 30 efficiently, and will configure the partial cut of air knife nozzle 52 as Fig. 2, Fig. 4 and Fig. 5.
That is, when be conceived to form roller conveyor 36 many rollers in Fig. 2 label 54 shown in roller time, this roller 54 is avoided the allocation position of air knife nozzle 52 and is divided into 2 rollers 54A, 54B.Further, the left part of the roller 54A externally given prominence to from housing 48 is supported on not shown general bearing (bearing of bearing steel), and the right part being positioned at the roller 54A of housing 48 is supported on the resin bearing 56 of embodiment.And the right part of the roller 54B externally given prominence to from housing 48 is supported on not shown general bearing (bearing of bearing steel), and the left part being positioned at the roller 54B of housing 48 is supported on resin bearing 56.That is, resin bearing 56 is applicable to the bearing that configures in housing.
It should be noted that, about other the many rollers forming roller conveyor 36, substantially become the structure same with roller 54, therefore the description thereof will be omitted.
Then, basic structure and the effect of the roller conveyor 36 possessing resin bearing 56 are described.
Fig. 6 be resin bearing 56 and to the support element 62 of the roughly rectangular shape that resin bearing 56 supports from top view to assembling stereogram, Fig. 7 is the block diagram observed from below of support element 62, Fig. 8 is the block diagram of the structure representing the fluid Supplying apparatus 64 comprising support element 62, being front view at support element 62 place, in order to observe the weir dike component 100 shown in Fig. 6, a part of cutting being represented.Fig. 9 is the block diagram that the resin bearing 56 being fixed on support element 62 is surrounded by the cover cap 66 of transparent resin, and Figure 10 is the lateral plan of resin the bearing 56 and support element 62 pulled down by cover cap 66 in fig .9.
The roller conveyor 36 of the embodiment shown in Fig. 4 and Fig. 5 in order to avoid the grease spilt from bearing in housing 48 be attached to inspection before glass board 30, and use and do not use the resin bearing 56 possessing self lubricity of grease as the bearing be configured in housing 48.Further, be provided with to the outer peripheral face connected with rolling body 68 of the inner peripheral surface connected with rolling body 68 of the rolling body 68 of the such resin bearing 56 of Fig. 6, outer ring 70 and orbital plane 72, inner ring 74 and orbital plane 76 and keep the retainer of rolling body 68 (not shown) feed fluid (water such as such as pure water, municipal water or earthing water), the fluid Supplying apparatus 64 of Fig. 8.And, the cover cap 66 surrounding resin bearing 56 is set as shown in Figure 9.It should be noted that, the thick arrow shown in Fig. 6 represents the assembling direction of resin bearing 56 relative to support element 62, and thin arrow represents the flow direction of the described liquid in support element 62.
Pass through said structure, according to the roller conveyor 36 of embodiment, due to from fluid Supplying apparatus 64 to the orbital plane 76 connected with rolling body 68 of the orbital plane 72 connected with rolling body 68 of the rolling body 68 of resin bearing 56, outer ring 70, inner ring 74 and retainer feed fluid, the dust of the resin therefore produced due to the wearing and tearing of resin bearing 56 can be mixed into liquid.Thereby, it is possible to reduce the powder amount from resin bearing 56, and, because resin bearing 56 is surrounded by cover cap 66, therefore can not disperse outside cover cap 66 from the dust not being mixed into liquid the dust that resin bearing 56 produces.Therefore, according to the roller conveyor 36 of embodiment, dispersing of the dust produced from resin bearing 56 can be suppressed.
In addition, according to the glass board testing fixture 12 of roller conveyor 36 possessing embodiment, significantly can reduce the Frequency that flatness that situation that described dust is attached to glass board 30 causes measures the error detection in operation 24, the inspection precision therefore based on the glass board 30 of flatness determinator significantly improves.
It should be noted that, the resin bearing 56 of embodiment is from intensity, life-span and weight-saving viewpoint, and outer ring 70, inner ring 74 and described retainer are ultrahigh molecular weight polyethylene, and rolling body 68 is pottery systems.And, to resin bearing 56 supply liquid as lubricant plays effect, the service life therefore also with resin bearing 56 extends such advantage.
Then, the feature of fluid Supplying apparatus 64 is described.
Fluid Supplying apparatus 64 possesses support element 62 and the liquid circulating apparatus (liquid-circulating feed unit) 78 of the such roughly rectangular shape of Fig. 8.Support element 62 thereon surface possesses maintaining part 80 and possesses the stream 82 of the channel-shaped of the such liquid of Fig. 6, and this maintaining part 80 has the concave curved surface of the arc-shaped of the latter half by being fitted together to the outer ring 70 keeping resin bearing 56.And one end of the bottom of the support element 62 shown in Fig. 7 is provided with the entrance 84 of stream 82 (with reference to Fig. 6), and is provided with the outlet 86 of stream 82 at the other end.
The liquid circulating apparatus 78 of Fig. 8 has circulation path 90, the pump 88 of the supply and the liquid of the outlet 86 from stream 82 being discharged circulates to the entrance 84 of stream 82 that this circulation path 90 possesses entrance 84 feed fluid to stream 82.The liquid supplied from the entrance 84 of stream 82 supplies via the stream 82 of the rising path 92 being located at support element 62 to the upper surface of support element 62, after have passed stream 82, discharges from outlet 86 via the decline path 94 being located at support element 62.
According to the fluid Supplying apparatus 64 so formed, being provided with the stream 82 of liquid at the support element 62 of the maintaining part 80 possessing fixing resin bearing 56, therefore without the need to stream 82 and support element 62 being arranged separately, can parts count being cut down thus.
In addition, liquid supplies to the orbital plane 76 connected with rolling body 68 of the orbital plane 72 connected with rolling body 68 of the rolling body 68 of resin bearing 56, outer ring 70, inner ring 74 in the process by stream 82 by liquid circulating apparatus 78.Further, the liquid of discharging from the outlet 86 of stream 82 supplies by entrance 84 circulation of pump 88 to stream 82.It should be noted that, if arrange filter in the circulation path 90 of liquid, and caught the dust being mixed into liquid by this filter, then can all the time liquid few for the amount of dust be supplied to stream 82.
Then, the feature of stream 82 is described.
The stream 82 of support element 62 possesses first flow path 96 and the second stream 98 as shown in Figure 6.And first flow path 96 is communicated with via maintaining part 80 with the second stream 98.
First flow path 96 across the arc-shaped of maintaining part 80 concave curved surface and be arranged on a side side, and to be communicated with the entrance 84 of stream 82 via rising path 92.Second stream 98 across the arc-shaped of maintaining part 80 concave curved surface and be arranged on the opposing party side, and to be communicated with the outlet 86 of stream 82 via decline path 94.Rising path 92 is arranged on one end of first flow path 96, and decline path 94 is arranged on the other end of the second stream 98, but the position that arranges of rising path 92 and decline path 94 is not particularly limited, and also can be arranged on the central authorities of each stream.It should be noted that, the other end of the second stream 98 is sides contrary with the side set by one end of described first flow path 96.
According to the stream 82 so formed, the liquid supplied to first flow path 96 via rising path 92 from the entrance 84 of stream 82 flows through first flow path 96, flows into maintaining part 80.Thus, to resin bearing 56 feed fluid kept by maintaining part 80.Further, the liquid to resin bearing 56 supply flows into the second stream 98 from maintaining part 80 and flows through the second stream 98, discharges via the outlet 86 of decline path 94 from stream 82.By such first flow path 96 and the second stream 98 are located at support element 62, can to resin bearing 56 feed fluid swimmingly.
Then, the feature of first flow path 96 and the second stream 98 is described.
Between the first flow path 96 and maintaining part 80 of support element 62 and between maintaining part 80 and the second stream 98, possesses the weir dike component 100,102 blocking (accumulation) liquid in maintaining part 80 respectively.Thus, in the liquid blocked by maintaining part 80, be impregnated with a part for a part for the rolling body 68 of resin bearing 56, a part for the orbital plane 72 of outer ring 70 and the orbital plane 76 of inner ring 74.
According to the first flow path 96 and the second stream 98 that possess such weir dike component 100,102, the liquid supplied to maintaining part 80 can be blocked by weir dike component 100,102, be therefore positioned at the state that the rolling body 68 of the bottom of resin bearing 56, the orbital plane 72 connected with this rolling body 68 of outer ring 70 and the orbital plane 76 connected with this rolling body 68 of inner ring 74 become (impregnated in) liquid that submerges all the time.Thereby, it is possible to significantly suppress the dispersing of dust from resin bearing 56.
It should be noted that, possess the otch 104 of the concavity that liquid is flowed into from first flow path 96 to maintaining part 80 in the center upper portion of weir dike component 100, possess the otch 106 of the concavity that liquid is flowed into the second stream 98 from maintaining part 80 in the center upper portion of weir dike component 102.The height of the bottom of otch 104,106, the water surface of liquid namely blocked by maintaining part 80 are set in the lowest point 76A position by the top of the orbital plane 76 of the inner ring 74 shown in long and two-short dash line in the Fig. 8 than the resin bearing 56 being fixed on maintaining part 80.Thus, a part for a part for the rolling body 68 of resin bearing 56, a part for the orbital plane 72 connected with this rolling body 68 of outer ring 70 and the orbital plane 76 connected with this rolling body 68 of inner ring 74 impregnated in liquid all the time.
But the axle 58 of the roller of the such roller conveyor 36 of Figure 10 prevents component 108,108 via pair of sliding and is fixed on the inner ring 74 of resin bearing 56.That is, first axle 58 is inserted through inner ring 74 by this fixing means.Then, prevent component 108,108 from embedding to axle 58 slip of circle shape from the both ends of the surface direction separately of inner ring 74.Then, each slip is made to prevent the end face relative with inner ring 74 of component 108,108 and the both sides end contact of inner ring 74.That is, slip is utilized to prevent component 108,108 from being clamped by inner ring 74.It should be noted that, slide and prevent the external diameter of component 108 to be preferably below the external diameter of inner ring 74.Prevent the external diameter of component 108 from being below the external diameter of inner ring 74 if slide, then can not hinder the flowing of liquid.Further, finally, prevent the outer peripheral face of component 108 from inserting screw (fastening apparatus) 110,110 towards the through tapped bore that inner peripheral surface is arranged to from slip, prevent component 108,108 to be fixed on axle 58 2 slips.Thus, the axle 58 of the roller of roller conveyor 36 prevents component 108,108 via sliding and is fixed on the inner ring 74 of resin bearing 56.
The axle 58 of roller is relative to inner ring 74, and preventing the restraint of component 108,108 to be used for by sliding can not slip vertically.Thereby, it is possible to a dirt of the inner ring 74 from resin bearing 56 preventing described slip from causing, therefore, it is possible to further suppress dispersing of dust.
In addition, as shown in Figure 8, fluid Supplying apparatus 64 circulation path 90 possessed to liquid circulating apparatus 78 starts and the electromagnetic valve (valve) 112 of supply of stop liquid.Carry out opening and closing as required and to electromagnetic valve 112, can start thus and the supply of stop liquid.
And beginning action and the stopping action of the supply of the liquid that electromagnetic valve 112 carries out are controlled by control part 114.When not needing all the time to resin bearing 56 feed fluid, as long as carry out open and close controlling by the every specified time of control part 114 to electromagnetic valve 112, carrying out the beginning action of the supply of liquid and stopping action.And control part 114 only makes pump 88 operate where necessary in order to economize on electricity.That is, the running/stopping of control part 114 also control pump 88.
Although describe the present invention in detail and with reference to specific embodiment, do not depart from the scope of the present invention the situation that can apply various correction or change with purport self-evident to those skilled in the art.
The Japanese patent application 2012-222761 that the application filed an application based on October 5th, 2012, and its content is incorporated herein as reference.
[label declaration]
10 ... device for producing glass sheet, 12 ... glass board testing fixture, 14 ... forming process, 16 ... cut off chamfering process, 18 ... grinding step, 20 ... matting, 22 ... dry cleansing chemical industry sequence, 24 ... flatness measures operation, 26 ... washing equipment, 28 ... dry cleansing gasifying device, 30 ... glass board, 32 ... roller conveyor, 34 ... brush cleaning part, 36 ... roller conveyor, 38 ... rotating brush, 40, 42 ... high-pressure water jetting device, 44, 46 ... nozzle, 48 ... housing, 49 ... dry cleansing space, 50, 52 ... air knife nozzle, 54 ... roller, 54A, 54B, 54C ... roller, 56 ... resin bearing, 57 ... gear mechanism, 58 ... axle, 59 ... drive division, 60 ... disc, 61 ... ring-type buffer component, 62 ... support element, 64 ... fluid Supplying apparatus, 66 ... cover cap, 68 ... rolling body, 70 ... outer ring, 72 ... orbital plane, 74 ... inner ring, 76 ... orbital plane, 76A ... lowest point, 78 ... liquid circulating apparatus, 80 ... maintaining part, 82 ... stream, 84 ... the entrance of stream, 86 ... the outlet of stream, 88 ... pump, 90 ... circulation path, 92 ... rising path, 94 ... decline path, 96 ... first flow path, 98 ... second stream, 100, 102 ... weir dike component, 104, 106 ... otch, 108 ... slip prevents component, 110 ... screw, 112 ... electromagnetic valve, 114 ... control part

Claims (8)

1. a roller conveyor, utilizes roller to carry tabular body,
Described roller conveyor possesses:
Many rollers, the transport path along described tabular body configures;
Resin-made or be coated with the resin bearing of resin, has rolling body and clamps this rolling body and accommodate outer ring and the inner ring of this rolling body in the mode that can roll, by the respective axle supporting of described many rollers for rotatable;
Fluid Supplying apparatus, to the orbital plane connected with described rolling body of described rolling body, described outer ring and the orbital plane feed fluid connected with described rolling body of described inner ring; And
Cover cap, surrounds described resin bearing.
2. roller conveyor according to claim 1, wherein,
Described fluid Supplying apparatus possesses:
Support element, possesses the stream of maintaining part and the described liquid kept the described outer ring of described resin bearing; And
Liquid-circulating feed unit, the entrance to the described stream of described support element supplies described liquid, and the described liquid of the outlet from described stream being discharged is to the entrance circulation supply of described stream.
3. roller conveyor according to claim 2, wherein,
The described stream of described support element has: be arranged on side and the first flow path be communicated with the entrance of described stream across described maintaining part; And be arranged on opposite side across described maintaining part and the second stream of outlet with described stream,
Described first flow path is communicated with via described maintaining part with described second stream.
4. roller conveyor according to claim 3, wherein,
Between the described first flow path and described maintaining part of described support element and between described maintaining part and described second stream, possess the weir dike component blocking described liquid in described maintaining part respectively, a part for a part for described rolling body, a part for the orbital plane of described outer ring and the orbital plane of described inner ring impregnated in the described liquid blocked by described maintaining part.
5. the roller conveyor according to any one of Claims 1 to 4, wherein,
The described axle of described roller is inserted through the described inner ring of described resin bearing,
The described axle being positioned at both sides across described inner ring is provided with slip and prevents component,
Described slip prevents the end face of component be connected to the end face of described inner ring and utilize fastening apparatus and be fixed on described axle.
6. a testing fixture for tabular body, possesses: carry the cleaning part that tabular body carries out cleaning; Carry the described tabular body after being cleaned by described cleaning part while carry out drying and carry out the dry cleansing portion that cleans; And to the inspection portion that dry by described dry cleansing portion and after cleaning described tabular body checks, wherein,
Roller conveyor according to any one of Claims 1 to 5 is configured at described dry cleansing portion.
7. the testing fixture of tabular body according to claim 6, wherein,
Described tabular body is glass board.
8. a manufacturing installation for glass board, possesses:
Forming section, is configured as ribbon glass plate by melten glass;
Cut off chamfered section, described ribbon glass plate is cut into the glass board of the rectangular shape of given size, and grinding is carried out to the circumference of the described glass board cut out;
Cleaning part, carries and cleans the described glass board after circumference has carried out grinding;
Dry cleansing portion, carries the described glass board after by described cleaning part cleaning and carries out drying and clean; And
Inspection portion, checks dry by described dry cleansing portion and after cleaning described glass board,
In the manufacturing installation of described glass board,
Roller conveyor according to any one of Claims 1 to 5 is configured at described dry cleansing portion.
CN201380052211.3A 2012-10-05 2013-09-30 Roller conveyor, plate body inspecting device, and glass plate manufacturing device Pending CN104703898A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610631566.3A CN106271957A (en) 2012-10-05 2013-09-30 Roller conveyor, the inspection device of plate body and the manufacture device of glass plate

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-222761 2012-10-05
JP2012222761 2012-10-05
PCT/JP2013/076582 WO2014054590A1 (en) 2012-10-05 2013-09-30 Roller conveyor, plate body inspecting device, and glass plate manufacturing device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201610631566.3A Division CN106271957A (en) 2012-10-05 2013-09-30 Roller conveyor, the inspection device of plate body and the manufacture device of glass plate

Publications (1)

Publication Number Publication Date
CN104703898A true CN104703898A (en) 2015-06-10

Family

ID=50434917

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201380052211.3A Pending CN104703898A (en) 2012-10-05 2013-09-30 Roller conveyor, plate body inspecting device, and glass plate manufacturing device
CN201610631566.3A Pending CN106271957A (en) 2012-10-05 2013-09-30 Roller conveyor, the inspection device of plate body and the manufacture device of glass plate

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201610631566.3A Pending CN106271957A (en) 2012-10-05 2013-09-30 Roller conveyor, the inspection device of plate body and the manufacture device of glass plate

Country Status (5)

Country Link
JP (1) JPWO2014054590A1 (en)
KR (1) KR20150066530A (en)
CN (2) CN104703898A (en)
TW (1) TW201420525A (en)
WO (1) WO2014054590A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105905563A (en) * 2016-06-20 2016-08-31 昆山国显光电有限公司 Roller wiping device
CN108349668A (en) * 2015-11-17 2018-07-31 旭硝子株式会社 The method for carrying of lamellar body, the manufacturing method of device and glass thin plate body product
CN110178021A (en) * 2017-12-19 2019-08-27 法国圣戈班玻璃厂 Improved cleaning inspection system
CN111315695A (en) * 2018-10-12 2020-06-19 法国圣戈班玻璃厂 Roller bed for glass sheets

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN203994992U (en) * 2014-05-16 2014-12-10 日东电工株式会社 Glass substrate carrying device
CN106458459A (en) * 2014-05-21 2017-02-22 夏普株式会社 Conveyance device, and wet processing device
CN111655643B (en) * 2017-10-06 2022-08-19 康宁公司 Apparatus and method for treating glass sheets
CN108589022B (en) * 2018-07-02 2023-12-05 海安国洋机械科技有限公司 Metal fiber stretch-breaking spraying device
JP2020040757A (en) * 2018-09-07 2020-03-19 日本電気硝子株式会社 Device for producing glass plate and method for producing glass plate
KR102111370B1 (en) * 2018-10-22 2020-05-15 주식회사 모션퀘스트 Roller for transfer apparatus of glass
KR102008142B1 (en) * 2019-03-04 2019-08-08 (주)엠에스솔루션 Bearing holder
DE102019210063B4 (en) * 2019-07-09 2021-05-20 NICE Solar Energy GmbH Substrate conveying device, vacuum treatment device with a substrate conveying device and method for conveying a substrate
JP2023165241A (en) * 2022-05-02 2023-11-15 日本電気硝子株式会社 Method and device for manufacturing glass product

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2172270Y (en) * 1993-06-23 1994-07-20 张世昭 Urea-formaldehyde plastics support roller for belt conveyer
JPH0864564A (en) * 1994-08-22 1996-03-08 Dainippon Screen Mfg Co Ltd Substrate treater
CN1119704A (en) * 1994-08-19 1996-04-03 三菱重工业株式会社 Vortex compressor
JPH11108066A (en) * 1997-10-01 1999-04-20 Nippon Seiko Kk Circulation lubrication bearing device
JPH11230178A (en) * 1998-02-17 1999-08-27 Nippon Seiko Kk Cylindrical roller bearing device
JP2001341827A (en) * 2000-05-31 2001-12-11 Canon Inc Sheet type cleaner and intermediate bearing for roller conveyer used for sheet type cleaner
CN1702022A (en) * 2004-05-25 2005-11-30 三机工业株式会社 Rolling wheel type transporter
CN1815048A (en) * 2005-02-01 2006-08-09 满留安机械株式会社 Bearing device and roller feeding machine using this
JP2008082547A (en) * 2006-08-28 2008-04-10 Ntn Corp Rolling bearing lubricating method
CN101381195A (en) * 2008-08-05 2009-03-11 河南安飞电子玻璃有限公司 Fused glass flow control device and control method in glass plate production
CN202030662U (en) * 2011-03-15 2011-11-09 山东寿光第一建筑有限公司 Vertical hollow glass processing device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH081981B2 (en) * 1990-03-30 1996-01-10 株式会社芝浦製作所 Dust prevention device for board transfer device
JPH06156678A (en) * 1992-11-21 1994-06-03 Dainippon Screen Mfg Co Ltd Dust generation preventing device for substrate conveyor device
JP2002347928A (en) * 2001-05-23 2002-12-04 Sumitomo Precision Prod Co Ltd Substrate processing device
JP2003314544A (en) * 2002-04-18 2003-11-06 Hitachi Ltd Magnetic disk drive
US20070138228A1 (en) * 2005-12-16 2007-06-21 Brown James W Method and apparatus for finishing a glass sheet
JP2009083699A (en) * 2007-10-01 2009-04-23 Jtekt Corp Wheel support device
JP5444667B2 (en) * 2008-09-08 2014-03-19 日本電気硝子株式会社 Glass plate adhering liquid removing apparatus and glass plate adhering liquid removing method
JP5428811B2 (en) * 2009-12-04 2014-02-26 凸版印刷株式会社 Substrate drying method, substrate drying apparatus, substrate manufacturing method, and flat panel display

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2172270Y (en) * 1993-06-23 1994-07-20 张世昭 Urea-formaldehyde plastics support roller for belt conveyer
CN1119704A (en) * 1994-08-19 1996-04-03 三菱重工业株式会社 Vortex compressor
JPH0864564A (en) * 1994-08-22 1996-03-08 Dainippon Screen Mfg Co Ltd Substrate treater
JPH11108066A (en) * 1997-10-01 1999-04-20 Nippon Seiko Kk Circulation lubrication bearing device
JPH11230178A (en) * 1998-02-17 1999-08-27 Nippon Seiko Kk Cylindrical roller bearing device
JP2001341827A (en) * 2000-05-31 2001-12-11 Canon Inc Sheet type cleaner and intermediate bearing for roller conveyer used for sheet type cleaner
CN1702022A (en) * 2004-05-25 2005-11-30 三机工业株式会社 Rolling wheel type transporter
CN1815048A (en) * 2005-02-01 2006-08-09 满留安机械株式会社 Bearing device and roller feeding machine using this
JP2008082547A (en) * 2006-08-28 2008-04-10 Ntn Corp Rolling bearing lubricating method
CN101381195A (en) * 2008-08-05 2009-03-11 河南安飞电子玻璃有限公司 Fused glass flow control device and control method in glass plate production
CN202030662U (en) * 2011-03-15 2011-11-09 山东寿光第一建筑有限公司 Vertical hollow glass processing device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
韦军: "《高分子合成工艺学》", 28 February 2011, article "有机玻璃的生产工艺" *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108349668A (en) * 2015-11-17 2018-07-31 旭硝子株式会社 The method for carrying of lamellar body, the manufacturing method of device and glass thin plate body product
CN105905563A (en) * 2016-06-20 2016-08-31 昆山国显光电有限公司 Roller wiping device
CN105905563B (en) * 2016-06-20 2018-10-12 昆山国显光电有限公司 Roller wiping device
CN110178021A (en) * 2017-12-19 2019-08-27 法国圣戈班玻璃厂 Improved cleaning inspection system
CN111315695A (en) * 2018-10-12 2020-06-19 法国圣戈班玻璃厂 Roller bed for glass sheets

Also Published As

Publication number Publication date
TW201420525A (en) 2014-06-01
KR20150066530A (en) 2015-06-16
CN106271957A (en) 2017-01-04
WO2014054590A1 (en) 2014-04-10
JPWO2014054590A1 (en) 2016-08-25

Similar Documents

Publication Publication Date Title
CN104703898A (en) Roller conveyor, plate body inspecting device, and glass plate manufacturing device
CN1791490B (en) Substrate polishing apparatus
KR102238389B1 (en) Substrate processing apparatus
CN107962492B (en) Grinding device
CN101905205B (en) Film forming system and film forming method
KR101754855B1 (en) Real-time monitoring of retaining ring thickness and lifetime
CN102649624B (en) Apparatus for coating and coating process
CN109643675B (en) Apparatus and method for processing substrate using support roller having porous material
CN104698758A (en) Processing liquid supplying apparatus, processing liquid supplying method and storage medium
TWI399822B (en) Substrate processing apparatus
CN102229104A (en) Substrate polishing apparatus and method
TWI702114B (en) Polishing system with local area rate control
KR20200015390A (en) Top ring for holding a substrate and substrate processing apparatus
KR100670630B1 (en) Treatment solution supply apparatus
JP3217155U (en) Roller conveyor, plate-like body inspection device, and glass plate manufacturing device
KR20160005835A (en) Soaping machine for wheel
CN100582886C (en) Apparatus for treating substrates
CN102950538B (en) Plate body lapping device and grinding system
KR100803686B1 (en) Apparatus for treating substrate
KR20180071079A (en) Priming unit and Maintenance apparatus for chemical nozzle having the same
KR101300361B1 (en) Removal mechanism of rotation roller
KR20140138463A (en) Roller for panel of side supporting of panel processing device
JP2020168675A (en) Lamination membrane, substrate holding device including the same, and substrate processing device
CN107017185A (en) Processing unit (plant)
TWI830756B (en) Top ring for holding a substrate and substrate processing apparatus

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20150610

WD01 Invention patent application deemed withdrawn after publication