JPWO2014054590A1 - Roller conveyor, plate-like body inspection device, and glass plate manufacturing device - Google Patents

Abstract

The present invention relates to a roller conveyor that conveys a plate-like body (30) by a roller (54), a plurality of rollers (54) arranged along a conveyance path of the plate-like body (30), and rolling elements ( 68), and an outer ring (70) and an inner ring (74) that sandwich the rolling element (68) so as to be capable of rolling, and each shaft (58) of the plurality of rollers (54) is rotatable. A resin bearing (56) made of resin or coated with resin, the rolling element (68), the raceway surface (72) of the outer ring (70) in contact with the rolling element (68), and the rolling element (68 ) Relates to a roller conveyor provided with a liquid supply device (64) for supplying liquid to the raceway surface (76) of the inner ring (74) in contact with the inner ring (74), and a cover (66) surrounding the resin bearing (56).

Description

  The present invention relates to a roller conveyor, a plate-like body inspection apparatus, and a glass plate manufacturing apparatus.

  As an example of a method for producing a glass plate for FPD (Flat Panel Display) such as a liquid crystal display, a float producing method using a forming method called a float method is known.

  The float manufacturing method is a forming step in which molten glass is supplied to the surface of a molten metal stored in a float bath and formed into a strip-shaped glass plate, and the strip-shaped glass plate is cut into a rectangular glass plate of a predetermined size and cut. A cutting and chamfering step for grinding the peripheral edge of the glass plate, a polishing step for polishing and removing fine irregularities and undulations on the polished surface of the glass plate by a polishing apparatus, and an inspection step are provided.

  The inspection process is a cleaning process of cleaning the glass plate after polishing with a high pressure water, and a drying / cleaning process of drying / cleaning the glass plate by spraying compressed air from an air knife nozzle onto the glass plate. And a flatness measuring step for measuring the flatness of the surface to be polished (ratio of the waviness height to the waviness pitch).

  By passing through these steps, the glass plate is produced into a glass plate having a thickness of 0.2 to 1.5 mm suitable for an FPD glass plate and high flatness.

  Patent Document 1 discloses a batch-type polishing apparatus for an FPD glass plate. The polishing apparatus of Patent Document 1 includes a film body including an adsorption sheet that adsorbs and holds a glass plate, and a film frame on which the adsorption sheet is stretched. According to this polishing apparatus, the pressurized fluid is supplied between the film body and the carrier to which the film body is attached, and the surface to be polished of the glass plate adsorbed and held by the adsorption sheet is applied to the polishing pad by the pressure of the pressurized fluid. While pressing, the surface to be polished is polished by relatively rotating (spinning and / or revolving) the glass plate and the polishing pad. Also, during polishing, slurry is supplied between the polishing pad and the surface to be polished. The surface to be polished of the glass plate polished by the polishing pad is a surface on which TFT (Thin Film Transistor) or CF (Color Filter) is manufactured in the FPD manufacturing process, and high-precision flatness is required. Surface.

  On the other hand, in the flatness measurement step, it is inspected whether or not the flatness of the polished surface of the polished glass plate is within a standard value suitable for manufacturing a TFT or CF. This flatness inspection is performed using, for example, a flatness measuring device (inspection device) disclosed in Patent Document 2.

  According to the flatness measuring apparatus of Patent Document 2, a pattern having periodic brightness and darkness is irradiated onto a glass plate, a pattern transmitted through the glass plate or a reflected pattern is received, and a shift in the brightness cycle in the received light image (glass plate) In order to detect the shift of the pattern irradiated to the light and dark period), the light and dark of the region in the received light image having a size corresponding to the light and dark period in the pattern irradiated to the glass plate is averaged, and the glass is calculated based on the averaged signal. Calculate the flatness of the plate.

  As described above, the glass plate whose surface to be polished has been polished in the polishing step (polishing apparatus) is inspected for the flatness of the surface to be polished by the inspection step (flatness measuring device), but the polished glass plate Since the slurry is adhered to the slurry, the slurry adhered to the glass plate is washed away by the cleaning process of the inspection process. Thereafter, in the flatness measuring device, in order to prevent erroneous detection due to water droplets and dust remaining on the glass plate, the water droplets and dust are removed by compressed air from the air knife nozzle in the drying / cleaning process of the inspection process, and the glass After the plate is dried and cleaned, the flatness is measured by a flatness measuring device. The flatness measurement is also performed by a glass plate manufacturing method that does not polish the glass plate, for example, a fusion method.

  Further, the glass plate is continuously conveyed from the polishing device to the flatness measuring device by a roller conveyor composed of a plurality of rollers, but the roller bearing laid on the drying line having the air knife nozzle leaked from the bearing. To prevent grease from adhering to the glass plate, self-lubricating fluororesin or other bearings that do not use grease or bearings coated with resin such as fluororesin are used (hereinafter referred to as resin bearings). ing. There is also a resin bearing having a ceramic rolling element.

Japanese Unexamined Patent Publication No. 2004-122351 Japanese Patent No. 3411829

  However, even with resin bearings that do not use grease, if resin dust is generated due to wear of the resin bearings and the dust is scattered and adheres to the glass plate, it will be detected incorrectly in the inspection process using the flatness measuring device. There was a problem of inviting.

  The present invention has been made in view of such circumstances, and is a roller conveyor in which rollers are supported by a resin bearing, and a roller conveyor and a plate-shaped body inspection device that can suppress scattering of dust generated from the resin bearing. And it aims at providing the manufacturing apparatus of a glass plate.

  In order to achieve the above object, the present invention provides a roller conveyor for transporting a plate-like body by means of a roller, a plurality of rollers arranged along a transport path of the plate-like body, a rolling element, and the rolling element. A resin bearing having an outer ring and an inner ring that are accommodated so as to be sandwiched and rollable, and rotatably supporting the shafts of the plurality of rollers, or a resin bearing coated with resin, the rolling element, and the rolling element There is provided a roller conveyor including a raceway surface of the outer ring in contact, a liquid supply device for supplying a liquid to the raceway surface of the inner ring in contact with the rolling element, and a cover surrounding the resin bearing.

  According to the present invention, the liquid is supplied from the liquid supply device to the rolling element of the resin bearing, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element. Resin dust can be mixed into the liquid, and since the resin bearing is surrounded by the cover, scattering of the dust can be suppressed. Furthermore, since the liquid functions as a lubricant, the service life of the resin bearing is extended.

  The resin bearing is composed of an outer ring, an inner ring, a rolling element, and a cage. The rolling bearing, the sliding surface between the rolling element and the cage, the raceway surface of the outer ring that contacts the rolling element, and the inner ring that contacts the rolling element. The raceway is a dust spot. It is a feature of the present invention that liquid is supplied to the dust generation location and the generated resin dust is contained in the liquid.

[Definition of resin bearing]
The resin bearing of the present invention refers to one in which at least one member of the outer ring, inner ring, rolling element, and cage constituting the bearing is made of resin or coated with resin. However, if at least one of the members is exposed from bearing steel that is not coated with resin, the self-lubricating property of the resin bearing is reduced. For this reason, as a preferable structure of the resin bearing, all members are made of resin, or the bearing steel is coated with resin.

  The material of the resin when all the members of the resin bearing are made of resin is not particularly limited, but ultra high molecular weight polyethylene (UHMW-PE), polytetrafluoroethylene (PTFE), or polytetrafluoroethylene (PTFE), or polytetrafluoroethylene (PTFE), or polytetrafluoroethylene (PTFE), or polytetrafluoroethylene (PTFE), or polytetrafluoroethylene (PTFE), Ether ether ketone (PEEK: polyetheretherketone) is preferred. The material of the resin to be coated is not particularly limited, but a fluororesin or a polyimide resin having self-lubricating properties is preferable. The material of the bearings (rolling elements, outer ring, and inner ring) is not particularly limited, but is preferably hard and wear-resistant ceramic or high carbon chrome steel.

  Further, from the viewpoint of strength, life, and weight reduction, it is more preferable that the outer ring, the inner ring, and the cage are made of ultra high molecular weight polyethylene and the rolling element is made of ceramics.

  In one aspect of the present invention, the liquid supply device includes a holder member that holds the outer ring of the resin bearing, a holder member that includes the liquid flow path, and the liquid supplied to the inlet of the flow path of the holder member. It is preferable that a liquid circulation supply unit that supplies and circulates the liquid discharged from the outlet of the flow path to the inlet of the flow path is provided.

  According to one aspect of the present invention, the holder member that includes the holding portion that holds and fixes the outer ring of the resin bearing is provided with the liquid flow path, and therefore it is not necessary to provide the flow path separately from the holder member. The number of parts can be reduced. The liquid is supplied to the inlet of the flow path by the liquid circulation supply means, and is supplied to the rolling element of the resin bearing, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element while passing through the flow path. Is done. The liquid discharged from the outlet of the flow path is circulated and supplied to the inlet of the flow path by the liquid circulation supply means. In addition, if a filter is provided in the liquid circulation path and dust mixed in the liquid is captured by this filter, a clean liquid can always be supplied to the flow path.

  In one aspect of the present invention, the flow path of the holder member is provided on one side with the holding portion interposed therebetween, and the first flow path communicated with the inlet of the flow path and the holding portion sandwiched between A second flow path provided on the other side and communicated with an outlet of the flow path, and the first flow path and the second flow path are communicated via the holding portion. It is preferable.

  According to one aspect of the present invention, the liquid supplied from the inlet of the flow channel to the first flow channel flows through the first flow channel and flows into the holding unit. As a result, the liquid is supplied to the resin bearing held by the holding portion. Then, the liquid supplied to the resin bearing flows into the second flow path from the holding portion, flows through the second flow path, and is discharged from the outlet of the flow path. By providing such a first flow path and a second flow path in the holder member, the liquid can be smoothly supplied to the resin bearing.

  In one aspect of the present invention, the holder is closed with the liquid between the first flow path and the holding section and between the holding section and the second flow path. A dam member is provided, and a part of the rolling element of the resin bearing, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring are immersed in the liquid blocked by the holding part. It is preferred that

  According to one aspect of the present invention, since the liquid supplied to the holding portion is blocked by the dam member, a part of the rolling element of the resin bearing, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring Is always immersed in the liquid. Thereby, scattering of the dust from a resin bearing can be suppressed significantly.

  In one aspect of the present invention, the shaft of the roller is inserted into the inner ring of the resin bearing, and the shaft located on both sides of the inner ring is provided with a sliding prevention member, and the sliding prevention It is preferable that the end surface of the member is brought into contact with the end surface of the inner ring and fixed to the shaft by a stopper.

  According to one aspect of the present invention, the stopper action of the anti-sliding member prevents the roller shaft from sliding in the axial direction with respect to the inner ring, thereby preventing dust generation due to sliding. The amount of dust generation can be reduced compared to the conventional method. Thereby, scattering of dust can be further suppressed.

  In order to achieve the above object, the present invention provides a cleaning unit that cleans the plate-shaped body while transporting the plate-shaped body, and a drying unit that cleans the plate-shaped body cleaned by the cleaning unit while transporting the plate-shaped body. In the plate-like body inspection apparatus comprising: a cleaning unit; and an inspection unit that inspects the plate-like body that has been dried and cleaned by the drying / cleaning unit. Provided is an inspection apparatus for a plate-like body arranged in a conversion unit.

  According to the inspection apparatus for a plate-like body of the present invention, since the roller conveyor of the invention is arranged in the drying / cleaning section, the frequency of occurrence of erroneous detection of the inspection apparatus due to the dust adhering to the plate-like body is reduced. It can be greatly reduced.

  In one embodiment of the present invention, the plate-like body is preferably a glass plate.

  According to one aspect of the present invention, since the roller conveyor of the present invention is arranged in the drying / cleaning section of the glass plate inspection apparatus, the inspection accuracy of the glass plate is greatly improved.

Further, the present invention provides a molding part for molding molten glass into a strip-shaped glass plate,
Cutting the chamfered glass plate into a rectangular glass plate of a predetermined size, and cutting and chamfering to grind the peripheral edge of the cut glass plate;
A cleaning unit that cleans the peripheral edge of the glass plate while transporting, a drying / cleaning unit that cleans the glass plate cleaned by the cleaning unit while drying, and the drying / cleaning In the manufacturing apparatus of the glass plate provided with the inspection part which inspects the glass plate dried and cleaned by the chemical conversion part,
A glass plate manufacturing apparatus in which a roller conveyor of the present invention is disposed in the drying / cleaning section is provided.

  According to one aspect of the present invention, since the roller conveyor of the present invention is disposed in the drying / cleaning section of the glass plate inspection apparatus, it is possible to manufacture a glass plate with greatly improved inspection accuracy of the glass plate.

  According to the roller conveyor of the present invention, scattering of resin dust generated from the resin bearing can be suppressed. Thereby, according to the inspection apparatus of the plate-shaped object of the present invention, it is possible to greatly reduce the occurrence frequency of erroneous detection caused by the dust adhering to the plate-shaped object.

FIG. 1 is a block diagram showing each process of a glass plate manufacturing apparatus and a glass plate inspection apparatus for a liquid crystal display. FIG. 2 is a plan view showing the configuration of the glass plate inspection apparatus of FIG. FIG. 3 is a side view showing the configuration of the cleaning device and the drying / cleaning device of the glass plate inspection device of FIG. FIG. 4 is a plan view showing the configuration of the roller conveyor in detail. FIG. 5 is a front view of the roller conveyor as viewed from the line AA ′ in FIG. 4. FIG. 6 is an assembled perspective view of the resin bearing and the holder member as viewed from above. FIG. 7 is a perspective view of the holder member of FIG. 6 as viewed from below. FIG. 8 is a block diagram showing a configuration of a liquid supply apparatus including a holder member. FIG. 9 is a perspective view in which a resin bearing fixed to a holder member is surrounded by a cover. FIG. 10 is a side view of the resin bearing and the holder member with the cover removed in FIG.

  Hereinafter, preferred embodiments of a roller conveyor and a plate-shaped inspection apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

  Embodiment demonstrates the roller conveyor applied to the glass plate inspection apparatus (inspection apparatus of a plate-shaped object) installed in the glass plate manufacturing apparatus for liquid crystal displays. However, the apparatus to which the roller conveyor of the present invention is applied is not limited to the glass plate inspection apparatus. That is, the roller conveyor of the present invention can be applied as long as it is a device that prevents dust generated from the bearings that support the rollers of the roller conveyor from adhering to the plate-like body. Moreover, although the glass plate for liquid crystal displays is illustrated as a plate-shaped object, other FPD glass plates, such as a plasma display and an organic electroluminescent display, may be sufficient. Moreover, it is not limited to a glass plate, A metal or resin plate-shaped body may be sufficient.

  FIG. 1 is a block diagram showing each process of a glass plate manufacturing apparatus 10 for a liquid crystal display and a glass plate inspection apparatus 12.

  The manufacturing process of the glass plate manufacturing apparatus 10 includes a molding process 14 by a molding apparatus (molding section), a cutting / chamfering process 16 by a cutting / chamfering apparatus (cutting / chamfering section), and polishing by a polishing apparatus disclosed in Patent Document 1 Step 18, a cleaning step 20 by a cleaning device (cleaning unit), a drying / cleaning step 22 by a drying / cleaning device (drying / cleaning unit), and a flatness measuring device (inspection unit) disclosed in Patent Document 2, etc. ). The inspection process of the glass plate inspection apparatus 12 includes a cleaning process 20, a drying / cleaning process 22, and a flatness measurement process 24.

The forming step 14 is a step of supplying molten glass to the surface of the molten metal stored in the float bath and forming it into a strip-shaped glass plate. The cutting / chamfering step 16 is a step of cutting the strip-shaped glass plate into a rectangular glass plate having a predetermined size and grinding the peripheral edge of the cut glass plate. The polishing step 18 is a step of polishing and removing minute irregularities and undulations on the surface to be polished of the glass plate. The cleaning step 20 is a step of removing the slurry and polishing debris attached to the glass plate by brush cleaning the glass plate after polishing and then cleaning with high-pressure water. The drying / cleaning step 22 is a step of spraying compressed air onto the glass plate to dry / clean the glass plate. The flatness measuring step 24 is a step of measuring the flatness of the polished surface of the glass plate. By passing through these steps, a glass plate having a thickness that is suitable for a glass plate for a liquid crystal display and a high flatness can be obtained.
Although the above glass plate manufacturing method is based on the float method, this embodiment can also be applied to the fusion method and the like. In addition, when manufacturing a glass plate by the manufacturing method which uses a fire-making surface as an element formation surface, such as a fusion method, the grinding | polishing process 18 is abbreviate | omitted.

  FIG. 2 is a plan view schematically showing the configuration of the glass plate inspection apparatus 12, and FIG. 3 is a cleaning device (cleaning step 20: see FIG. 1) 26 of the glass plate inspection apparatus 12, and drying / cleaning. FIG. 2 is a side view showing the configuration of an apparatus (drying / cleaning step 22: see FIG. 1) 28;

  As shown in FIG. 2, the glass plate 30 whose surface to be polished has been polished in the polishing step 18 is cleaned by a roller conveyor 32 with a brush cleaning unit 34 and high-pressure water jets 40 and 42 (see FIG. 3) constituting the cleaning device 26. And it passes in the drying / cleaning apparatus 28 sequentially, and is carried in to the flatness measuring apparatus of the flatness measuring process 24. In addition, the roller conveyor 36 laid in the drying / cleaning apparatus 28 among the roller conveyors 32 is a roller conveyor according to the embodiment provided with a resin bearing. Moreover, in FIG. 2, in order to show the glass plate 30 in an easy-to-understand manner, the glass plate 30 is shown by a two-dot chain line instead of a solid line.

  4 is a plan view showing the configuration of the roller conveyor 36 in detail, and FIG. 5 is a front view seen from the line AA ′ of FIG.

  Each roller of the roller conveyor 36 is composed of a shaft 58 and a plurality of disc bodies 60, 60... That are in contact with the lower surface of the glass plate 30, and the plurality of disc bodies 60 are arranged on the shaft 58 at a predetermined interval. Yes. In FIG. 2, the illustration of the disk body 60 is omitted to avoid complexity, and only the resin bearing 56 and the shaft 58 having a smaller diameter than the disk body 60 are schematically illustrated. As shown in FIGS. 4 and 5, a rubber or resin ring-shaped buffer member 61 is attached to the outer periphery of the disc body 60 that contacts the lower surface of the glass plate 30. The bottom surface is prevented from being scratched.

  As shown in FIGS. 4 and 5, both end portions of the shaft 58 are disposed so as to protrude outward from the casing 48 of the drying / cleaning device 28, and are connected to the drive portion 59 via the gear mechanism 57. The shaft 58 is rotationally driven when power from the drive unit 59 is transmitted through the gear mechanism 57, whereby the disk body 60 is rotated and the glass plate 30 is conveyed.

  The brush cleaning unit 34 shown in FIG. 2 is provided above the roller conveyor 32 and includes a plurality of rotating brushes 38, 38... That rotate in the horizontal direction about the vertical direction of the surface to be polished of the glass plate 30. . Slurry and polishing dust adhering to the surface to be polished are removed by rotating brushes 38, 38... That are rotated by contacting the glass plate 30 while being conveyed by the roller conveyor 32.

  As shown in FIG. 3, the high-pressure water injection device 40 is disposed above the roller conveyor 32, and the high-pressure water injection device 42 is disposed below the roller conveyor 32. As indicated by the arrow on the left side of FIG. 3, while the glass plate 30 is being conveyed by the roller conveyor 32, the surface to be polished (upper surface) is cleaned by the high-pressure water sprayed from the nozzle 44 of the high-pressure water spray device 40, and the high-pressure water The lower surface is washed with high-pressure water jetted from the nozzle 46 of the water jet device 42.

  The glass plate 30 that has passed through the cleaning device 26 is carried into the casing 48 of the drying / cleaning device 28 by the roller conveyor 32. Then, during conveyance by the roller conveyor 36 disposed in the casing 48, water droplets, dust, etc. adhering to the glass plate 30 are discharged from the plurality of air knife nozzles 50, 52 (one in each of FIGS. 2 and 3). Is removed by compressed air. As shown by the lower arrow in FIG. 2 and the right arrow in FIG. 3, the glass plate 30 that has passed through the air knife nozzles 50 and 52 is conveyed to the flatness measurement step 24. The drying / cleaning space 49 in which the air knife nozzles 50 and 52 are arranged is sealed by a casing 48. Therefore, the dust floating outside the casing 48 does not enter the drying / cleaning space 49. 2 to 4, a pair of air knife nozzles 50 and 52 are arranged vertically, but a plurality of pairs of air knife nozzles may be arranged in the casing 48 at intervals.

  The air knife nozzle 50 is installed above the roller conveyor 36 and along the conveying direction of the glass plate 30. The air knife nozzle 52 is disposed below the roller conveyor 36 and along the conveying direction of the glass plate 30. Moreover, the air knife nozzle 50 and the air knife nozzle 52 are installed so as to make a pair in the vertical direction. Further, the air knife nozzles 50 and 52 are disposed at a predetermined angle with respect to the conveying direction of the glass plate 30 as shown in FIG. 2 in order to efficiently remove water droplets, dust and the like attached to the glass plate 30.

  Furthermore, the roller conveyor 36 has a portion where the air knife nozzle 52 is disposed as shown in FIGS. 2, 4 and 5 so that the compressed air from the air knife nozzle 52 is efficiently injected onto the lower surface of the glass plate 30. It is divided.

  That is, paying attention to the roller indicated by reference numeral 54 in FIG. 2 among the plurality of rollers constituting the roller conveyor 36, the roller 54 avoids the position where the air knife nozzle 52 is disposed, and the two rollers 54A, It is divided into 54B. The left end portion of the roller 54A protruding outward from the casing 48 is supported by a general bearing (not shown) (bearing steel bearing), and the right end portion of the roller 54A located in the casing 48 is the resin of the embodiment. It is supported by the bearing 56. Further, the right end portion of the roller 54B protruding outward from the casing 48 is supported by a general bearing (not shown) (bearing steel bearing), and the left end portion of the roller 54B located in the casing 48 is supported by the resin bearing 56. Has been. That is, the resin bearing 56 is applied to the bearing disposed in the casing.

  In addition, about the other several roller which comprises the roller conveyor 36, since it is the structure similar to the roller 54 fundamentally, the description is abbreviate | omitted.

  Next, the basic configuration and operation of the roller conveyor 36 including the resin bearing 56 will be described.

  6 is an assembled perspective view of the holder member 62 having a substantially rectangular parallelepiped shape that supports the resin bearing 56 and the resin bearing 56 as viewed from above, FIG. 7 is a perspective view of the holder member 62 as viewed from below, and FIG. FIG. 7 is a block diagram showing a configuration of a liquid supply device 64 including a member 62, which is a front view of the holder member 62, and is partially cut away to show the dam member 100 shown in FIG. 6. . 9 is a perspective view in which the resin bearing 56 fixed to the holder member 62 is surrounded by a cover 66 made of transparent resin. FIG. 10 is a perspective view of the resin bearing 56 and the holder member 62 from which the cover 66 is removed in FIG. It is a side view.

  The roller conveyor 36 according to the embodiment shown in FIG. 4 and FIG. 5 has a grease as a bearing arranged in the casing 48 so that the grease leaked from the bearing in the casing 48 does not adhere to the glass plate 30 before the inspection. A resin bearing 56 having a self-lubricating property that does not use any of the above is used. 6, the rolling element 68 of the resin bearing 56, the raceway surface 72 that is the inner peripheral surface of the outer ring 70 with which the rolling element 68 contacts, the raceway surface 76 that is the outer peripheral surface of the inner ring 74 with which the rolling element 68 contacts, and the rolling element. The liquid supply device 64 shown in FIG. 8 is provided to supply liquid (for example, water such as pure water, city water, or ground water) to a holder (not shown) that holds 68. Further, as shown in FIG. 9, a cover 66 surrounding the resin bearing 56 is provided. 6 indicates the assembly direction of the resin bearing 56 with respect to the holder member 62, and the thin arrow indicates the flow direction of the liquid in the holder member 62.

  According to the roller conveyor 36 of the embodiment with the above configuration, the rolling element 68 of the resin bearing 56, the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, the raceway surface 76 of the inner ring 74 in contact with the rolling element 68, and the cage Since the liquid is supplied from the liquid supply device 64, the resin dust generated by the abrasion of the resin bearing 56 is mixed into the liquid. As a result, the amount of dust generated from the resin bearing 56 can be reduced. Of the dust generated from the resin bearing 56, the dust that has not been mixed in the liquid is surrounded by the cover 66. Do not scatter outside 66. Therefore, according to the roller conveyor 36 of the embodiment, scattering of dust generated from the resin bearing 56 can be suppressed.

  Moreover, according to the glass plate inspection apparatus 12 provided with the roller conveyor 36 of the embodiment, the occurrence frequency of erroneous detection in the flatness measurement step 24 caused by the dust adhering to the glass plate 30 is greatly increased. Since it can reduce, the test | inspection precision of the glass plate 30 by a flatness measuring apparatus improves significantly.

  In the resin bearing 56 of the embodiment, the outer ring 70, the inner ring 74, and the cage are made of ultrahigh molecular weight polyethylene and the rolling elements 68 are made of ceramics from the viewpoint of strength, life, and weight reduction. Further, since the liquid supplied to the resin bearing 56 functions as a lubricant, there is an advantage that the service life of the resin bearing 56 is extended.

  Next, features of the liquid supply device 64 will be described.

  The liquid supply device 64 includes a substantially rectangular parallelepiped holder member 62 and a liquid circulation device (liquid circulation supply means) 78 as shown in FIG. The holder member 62 includes, on its upper surface, a holding portion 80 having an arc-shaped concave curved surface that holds the lower half of the outer ring 70 of the resin bearing 56 by fitting, and as shown in FIG. It has. Further, an inlet 84 of the flow path 82 (see FIG. 6) is provided at one end of the lower portion of the holder member 62 shown in FIG. 7, and an outlet 86 of the flow path 82 is provided at the other end.

  The liquid circulation device 78 of FIG. 8 includes a pump 88 that supplies liquid to the inlet 84 of the flow path 82 and circulates and supplies liquid discharged from the outlet 86 of the flow path 82 to the inlet 84 of the flow path 82. A circulation path 90 is provided. The liquid supplied from the inlet 84 of the flow path 82 is supplied to the flow path 82 on the upper surface of the holder member 62 via the ascending path 92 provided in the holder member 62, and after passing through the flow path 82, the holder member The gas is discharged from the outlet 86 through a descending path 94 provided in 62.

  According to the liquid supply device 64 configured as described above, the holder member 62 including the holding portion 80 to which the resin bearing 56 is fixed includes the liquid channel 82. There is no need to provide them separately, so the number of parts can be reduced.

  Further, while the liquid is passing through the flow path 82 by the liquid circulation device 78, the liquid is a rolling element 68 of the resin bearing 56, a raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and a raceway surface 76 of the inner ring 74 in contact with the rolling element 68. And supplied to. The liquid discharged from the outlet 86 of the flow path 82 is circulated and supplied to the inlet 84 of the flow path 82 by the pump 88. In addition, if a filter is provided in the liquid circulation path 90 and the dust mixed in the liquid is captured by the filter, the liquid having a small amount of dust can always be supplied to the flow path 82.

  Next, features of the flow path 82 will be described.

  The flow path 82 of the holder member 62 includes a first flow path 96 and a second flow path 98 as shown in FIG. Further, the first flow path 96 and the second flow path 98 are communicated with each other via the holding unit 80.

  The first flow path 96 is provided on one side with the arcuate concave curved surface of the holding portion 80 interposed therebetween, and is communicated with the inlet 84 of the flow path 82 via the ascending path 92. The second flow path 98 is provided on the other side across the arc-shaped concave curved surface of the holding portion 80 and communicates with the outlet 86 of the flow path 82 via the descending path 94. The ascending path 92 is provided at one end of the first channel 96, and the descending path 94 is provided at the other end of the second channel 98. It is not limited, You may provide in the center of each flow path. The other end of the second channel 98 is the side opposite to the side where the one end of the first channel 96 is provided.

  According to the flow path 82 configured in this manner, the liquid supplied from the inlet 84 of the flow path 82 to the first flow path 96 via the ascending path 92 flows through the first flow path 96 and is retained. Flows into the section 80. As a result, the liquid is supplied to the resin bearing 56 held by the holding unit 80. Then, the liquid supplied to the resin bearing 56 flows into the second flow path 98 from the holding portion 80, flows through the second flow path 98, and is discharged from the outlet 86 of the flow path 82 through the descending path 94. The By providing the holder member 62 with the first flow path 96 and the second flow path 98 as described above, the liquid can be smoothly supplied to the resin bearing 56.

  Next, features of the first channel 96 and the second channel 98 will be described.

  A dam member between the first flow path 96 and the holding section 80 of the holder member 62 and between the holding section 80 and the second flow path 98 to block (store) liquid in the holding section 80. 100 and 102 are provided. Thereby, a part of the rolling element 68 of the resin bearing 56, a part of the raceway surface 72 of the outer ring 70, and a part of the raceway surface 76 of the inner ring 74 are immersed in the liquid blocked by the holding portion 80. Yes.

  According to the first flow path 96 and the second flow path 98 including the dam members 100 and 102, the liquid supplied to the holding unit 80 by the dam members 100 and 102 can be blocked. Therefore, the rolling element 68 located below the resin bearing 56, the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and the raceway surface 76 of the inner ring 74 in contact with the rolling element 68 are always immersed in the liquid. It becomes the state. Thereby, scattering of the dust from the resin bearing 56 can be significantly suppressed.

  A concave notch 104 is provided in the upper center of the dam member 100 to allow liquid to flow from the first flow path 96 to the holding portion 80. A concave notch 106 for pouring liquid into the flow path 98 is provided. The height of the bottoms of the notches 104 and 106, that is, the water surface of the liquid blocked by the holding unit 80 is the raceway surface of the inner ring 74 indicated by a two-dot chain line in FIG. 8 of the resin bearing 56 fixed to the holding unit 80. It is set above the lowest point 76A of 76. As a result, a part of the rolling element 68 of the resin bearing 56, a part of the raceway surface 72 of the outer ring 70 in contact with the rolling element 68, and a part of the raceway surface 76 of the inner ring 74 in contact with the rolling element 68 are always in liquid. Soaked.

  By the way, as shown in FIG. 10, the roller shaft 58 of the roller conveyor 36 is fixed to the inner ring 74 of the resin bearing 56 via a pair of anti-sliding members 108, 108. That is, in the fixing method, first, the shaft 58 is inserted through the inner ring 74. Next, the ring-shaped anti-slip members 108 and 108 are fitted to the shaft 58 from the directions of the both end faces of the inner ring 74. Next, the end surfaces of the anti-sliding members 108, 108 facing the inner ring 74 are brought into contact with both end surfaces of the inner ring 74. That is, the inner ring 74 is sandwiched between the sliding prevention members 108 and 108. The outer diameter of the sliding preventing member 108 is preferably equal to or smaller than the outer diameter of the inner ring 74. If the outer diameter of the sliding preventing member 108 is equal to or smaller than the outer diameter of the inner ring 74, the liquid flow is not hindered. Finally, the screws (stoppers) 110 and 110 are inserted into the through screw holes provided from the outer peripheral surface to the inner peripheral surface of the anti-slip member 108, and the two anti-slip members 108 and 108 are attached. The shaft 58 is fixed. As a result, the roller shaft 58 of the roller conveyor 36 is fixed to the inner ring 74 of the resin bearing 56 via the anti-sliding members 108 and 108.

  The roller shaft 58 does not slide in the axial direction with respect to the inner ring 74 due to the stopper action of the sliding preventing members 108 and 108. Accordingly, dust generation from the inner ring 74 of the resin bearing 56 due to the sliding can be prevented, and the scattering of dust can be further suppressed.

  Further, as shown in FIG. 8, the liquid supply device 64 includes an electromagnetic valve (valve) 112 that starts and stops the supply of liquid to the circulation path 90 of the liquid circulation device 78. The liquid supply can be started and stopped by opening and closing the electromagnetic valve 112 as necessary.

  Further, the liquid supply start operation and stop operation by the electromagnetic valve 112 are controlled by the control unit 114. When it is not necessary to always supply the liquid to the resin bearing 56, the controller 114 may perform opening / closing control of the electromagnetic valve 112 at predetermined time intervals to start and stop the liquid supply. The control unit 114 operates the pump 88 only when necessary for power saving. That is, the control unit 114 also controls the operation / stop of the pump 88.

Although the present invention has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the scope and spirit of the invention.
This application is based on Japanese Patent Application No. 2012-222761 filed on Oct. 5, 2012, the contents of which are incorporated herein by reference.

  DESCRIPTION OF SYMBOLS 10 ... Glass plate manufacturing apparatus, 12 ... Glass plate inspection apparatus, 14 ... Molding process, 16 ... Cutting and chamfering process, 18 ... Polishing process, 20 ... Cleaning process, 22 ... Drying / cleaning process, 24 ... Flatness measurement process , 26 ... cleaning device, 28 ... drying / cleaning device, 30 ... glass plate, 32 ... roller conveyor, 34 ... brush cleaning section, 36 ... roller conveyor, 38 ... rotating brush, 40, 42 ... high pressure water injection device, 44 46 ... Nozzle, 48 ... Casing, 49 ... Drying / cleaning space, 50, 52 ... Air knife nozzle, 54 ... Roller, 54A, 54B, 54C ... Roller, 56 ... Resin bearing, 57 ... Gear mechanism, 58 ... Shaft 59... Drive unit, 60. Disk body, 61. Ring-shaped buffer member, 62. Holder member, 64. Liquid supply device, 66. Cover, 68. Inner ring, 76 ... raceway surface, 76A ... lowest point, 78 ... liquid circulation device, 80 ... holding part, 82 ... flow path, 84 ... inlet of flow path, 86 ... outlet of flow path, 88 ... pump, 90 ... circulation Road 92, ascending path 94 94 descending path 96 first channel 98 98 second channel 100, 102 dam member 104, 106 notch 108 anti-sliding member 110 ... Screw, 112 ... Electromagnetic valve, 114 ... Control part

Claims (8)

In a roller conveyor that transports plate-like bodies with rollers,
A plurality of rollers arranged along the conveying path of the plate-like body;
A resin bearing that has a rolling element and an outer ring and an inner ring that sandwich the rolling element and accommodates the rolling element, and that supports each shaft of the plurality of rollers rotatably;
A liquid supply device for supplying liquid to the rolling element, the raceway surface of the outer ring in contact with the rolling element, and the raceway surface of the inner ring in contact with the rolling element;
A cover surrounding the resin bearing;
With roller conveyor. The liquid supply device includes:
A holder member having the holding portion for holding the outer ring of the resin bearing and the liquid flow path;
Liquid circulation supply means for supplying the liquid to the inlet of the flow path of the holder member and circulatingly supplying the liquid discharged from the outlet of the flow path to the inlet of the flow path;
A roller conveyor according to claim 1. The flow path of the holder member is provided on one side across the holding portion, and is provided on the other side across the holding portion and a first flow path communicating with the inlet of the flow path and the A second flow path communicated with the outlet of the flow path,
The roller conveyor according to claim 2, wherein the first flow path and the second flow path are communicated with each other via the holding portion.   Between the first flow path and the holding section of the holder member and between the holding section and the second flow path, there are provided dam members that block the liquid in the holding section, respectively. The roller according to claim 3, wherein a part of the rolling element, a part of the raceway surface of the outer ring, and a part of the raceway surface of the inner ring are immersed in the liquid that is blocked by the holding unit. Conveyor. The shaft of the roller is inserted through the inner ring of the resin bearing,
The shaft located on both sides across the inner ring is provided with a sliding prevention member,
The roller conveyor according to any one of claims 1 to 4, wherein an end surface of the sliding prevention member is abutted against an end surface of the inner ring and is fixed to the shaft by a stopper. It is dried by the cleaning section for cleaning while transporting the plate-like body, the drying / cleaning section for drying and cleaning the board-like body cleaned by the cleaning section, and the drying / cleaning section. In a plate-shaped body inspection apparatus comprising an inspection unit that inspects the cleaned plate-shaped body,
An inspection apparatus for a plate-like body in which the roller conveyor according to any one of claims 1 to 5 is disposed in the drying / cleaning section.   The plate-shaped inspection apparatus according to claim 6, wherein the plate-shaped body is a glass plate. A molding part for molding molten glass into a strip-shaped glass plate;
Cutting the chamfered glass plate into a rectangular glass plate of a predetermined size, and cutting and chamfering to grind the peripheral edge of the cut glass plate;
A cleaning section that cleans the peripheral edge of the glass plate while conveying the glass plate;
A drying / cleaning unit for drying and cleaning while conveying the glass plate cleaned by the cleaning unit;
In an apparatus for manufacturing a glass plate, comprising: an inspection unit that inspects the glass plate that has been dried and cleaned by the drying / cleaning unit,
The manufacturing apparatus of the glass plate by which the roller conveyor of any one of Claim 1 to 5 is arrange | positioned in the said drying and cleaning part.

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