CN106226000A - 一种真空密封性能测量装置及方法 - Google Patents
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- CN106226000A CN106226000A CN201610532002.4A CN201610532002A CN106226000A CN 106226000 A CN106226000 A CN 106226000A CN 201610532002 A CN201610532002 A CN 201610532002A CN 106226000 A CN106226000 A CN 106226000A
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- 238000005259 measurement Methods 0.000 title claims abstract description 119
- 238000000034 method Methods 0.000 title claims abstract description 74
- 238000007789 sealing Methods 0.000 claims abstract description 112
- 239000001307 helium Substances 0.000 claims abstract description 54
- 229910052734 helium Inorganic materials 0.000 claims abstract description 54
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000009825 accumulation Methods 0.000 claims abstract description 17
- 230000003068 static effect Effects 0.000 claims abstract description 17
- 239000007789 gas Substances 0.000 claims description 86
- 150000002500 ions Chemical class 0.000 claims description 53
- -1 helium ion Chemical class 0.000 claims description 25
- 230000001186 cumulative effect Effects 0.000 claims description 20
- 238000009530 blood pressure measurement Methods 0.000 claims description 6
- 238000005086 pumping Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229960000935 dehydrated alcohol Drugs 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 238000010926 purge Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
Description
Claims (7)
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CN201610532002.4A CN106226000B (zh) | 2016-07-07 | 2016-07-07 | 一种真空密封性能测量装置和方法 |
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CN201610532002.4A CN106226000B (zh) | 2016-07-07 | 2016-07-07 | 一种真空密封性能测量装置和方法 |
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CN106226000A true CN106226000A (zh) | 2016-12-14 |
CN106226000B CN106226000B (zh) | 2019-01-01 |
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CN201610532002.4A Active CN106226000B (zh) | 2016-07-07 | 2016-07-07 | 一种真空密封性能测量装置和方法 |
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109154572A (zh) * | 2017-02-13 | 2019-01-04 | 株式会社爱瑞思 | 清洗性能评价系统 |
CN109323810A (zh) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | 具有连接头的质谱检漏设备 |
CN109655212A (zh) * | 2018-12-17 | 2019-04-19 | 兰州空间技术物理研究所 | 一种金属挤压密封漏率检测装置及方法 |
CN109752135A (zh) * | 2018-12-14 | 2019-05-14 | 兰州空间技术物理研究所 | 一种密封器件腔体真空度测量装置及测量方法 |
CN110927240A (zh) * | 2019-11-22 | 2020-03-27 | 南京理工大学 | 一种超高真空系统的高纯nf3进气控制装置及方法 |
CN112033608A (zh) * | 2020-09-28 | 2020-12-04 | 湖北亿纬动力有限公司 | 一种电池系统气密性检测方法 |
CN112146818A (zh) * | 2020-09-07 | 2020-12-29 | 兰州空间技术物理研究所 | 一种应用于封装电子元器件双工位超灵敏检漏方法及系统 |
CN112197912A (zh) * | 2020-10-10 | 2021-01-08 | 北京卫星环境工程研究所 | 一种检漏装置及检漏方法 |
CN112432738A (zh) * | 2020-11-24 | 2021-03-02 | 上海卫星装备研究所 | 一种用于常压多气体漏率测试的质谱分析检测装置及方法 |
CN114427938A (zh) * | 2021-12-08 | 2022-05-03 | 兰州空间技术物理研究所 | 一种多组分质谱泄漏检测装置 |
CN114459697A (zh) * | 2021-12-24 | 2022-05-10 | 兰州空间技术物理研究所 | 红外成像系统探测器封装杜瓦多工位检漏系统及方法 |
CN114624319A (zh) * | 2022-04-02 | 2022-06-14 | 中国工程物理研究院材料研究所 | 一种基于热解析-四极质谱测量原理定量获取材料中ppm级氢同位素含量的方法 |
CN114674501A (zh) * | 2021-12-25 | 2022-06-28 | 兰州空间技术物理研究所 | 一种静态漏率测量装置及方法 |
CN114753991A (zh) * | 2022-05-12 | 2022-07-15 | 之江实验室 | 可伸缩式吸气剂泵抽真空装置及应用方法 |
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JPH11153508A (ja) * | 1997-11-21 | 1999-06-08 | Ulvac Corp | 真空装置用ヘリウムリークディテクター装置 |
CN101726396A (zh) * | 2009-12-17 | 2010-06-09 | 中国航天科技集团公司第五研究院第五一○研究所 | 一种航天用o型橡胶密封圈的漏率检测装置及方法 |
CN102494741A (zh) * | 2011-12-04 | 2012-06-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | 一种静态进样正压漏孔校准装置及方法 |
CN102967527A (zh) * | 2012-11-02 | 2013-03-13 | 卢耀文 | 具有自校准功能的复合型材料放气率测试系统及方法 |
CN103335795A (zh) * | 2013-07-02 | 2013-10-02 | 中国科学院光电研究院 | 真空密封件分压漏率测量系统及其测量方法 |
US20150013473A1 (en) * | 2012-02-29 | 2015-01-15 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method and device for controlling the dynamic confinement of an enclosure |
CN105021494A (zh) * | 2015-07-20 | 2015-11-04 | 中国科学院光电研究院 | 一种材料分压放气率测试装置及方法 |
CN105092187A (zh) * | 2015-07-13 | 2015-11-25 | 兰州空间技术物理研究所 | 一种极小真空漏率测量装置及方法 |
-
2016
- 2016-07-07 CN CN201610532002.4A patent/CN106226000B/zh active Active
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JPH11153508A (ja) * | 1997-11-21 | 1999-06-08 | Ulvac Corp | 真空装置用ヘリウムリークディテクター装置 |
CN101726396A (zh) * | 2009-12-17 | 2010-06-09 | 中国航天科技集团公司第五研究院第五一○研究所 | 一种航天用o型橡胶密封圈的漏率检测装置及方法 |
CN102494741A (zh) * | 2011-12-04 | 2012-06-13 | 中国航天科技集团公司第五研究院第五一〇研究所 | 一种静态进样正压漏孔校准装置及方法 |
US20150013473A1 (en) * | 2012-02-29 | 2015-01-15 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method and device for controlling the dynamic confinement of an enclosure |
CN102967527A (zh) * | 2012-11-02 | 2013-03-13 | 卢耀文 | 具有自校准功能的复合型材料放气率测试系统及方法 |
CN103335795A (zh) * | 2013-07-02 | 2013-10-02 | 中国科学院光电研究院 | 真空密封件分压漏率测量系统及其测量方法 |
CN105092187A (zh) * | 2015-07-13 | 2015-11-25 | 兰州空间技术物理研究所 | 一种极小真空漏率测量装置及方法 |
CN105021494A (zh) * | 2015-07-20 | 2015-11-04 | 中国科学院光电研究院 | 一种材料分压放气率测试装置及方法 |
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Title |
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代彦伟等: "基于四极质谱仪O形氟橡胶圈的放气研究", 《真空与低温》 * |
罗艳等: "高精度真空材料放气测试研究", 《真空科学与技术学报》 * |
Cited By (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109154572A (zh) * | 2017-02-13 | 2019-01-04 | 株式会社爱瑞思 | 清洗性能评价系统 |
CN109154572B (zh) * | 2017-02-13 | 2022-02-15 | 株式会社爱瑞思 | 清洗性能评价系统 |
CN109323810A (zh) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | 具有连接头的质谱检漏设备 |
CN109752135A (zh) * | 2018-12-14 | 2019-05-14 | 兰州空间技术物理研究所 | 一种密封器件腔体真空度测量装置及测量方法 |
CN109655212B (zh) * | 2018-12-17 | 2021-06-04 | 兰州空间技术物理研究所 | 一种金属挤压密封漏率检测装置及方法 |
CN109655212A (zh) * | 2018-12-17 | 2019-04-19 | 兰州空间技术物理研究所 | 一种金属挤压密封漏率检测装置及方法 |
CN110927240A (zh) * | 2019-11-22 | 2020-03-27 | 南京理工大学 | 一种超高真空系统的高纯nf3进气控制装置及方法 |
CN112146818A (zh) * | 2020-09-07 | 2020-12-29 | 兰州空间技术物理研究所 | 一种应用于封装电子元器件双工位超灵敏检漏方法及系统 |
CN112033608A (zh) * | 2020-09-28 | 2020-12-04 | 湖北亿纬动力有限公司 | 一种电池系统气密性检测方法 |
CN112033608B (zh) * | 2020-09-28 | 2022-09-09 | 湖北亿纬动力有限公司 | 一种电池系统气密性检测方法 |
CN112197912A (zh) * | 2020-10-10 | 2021-01-08 | 北京卫星环境工程研究所 | 一种检漏装置及检漏方法 |
CN112432738A (zh) * | 2020-11-24 | 2021-03-02 | 上海卫星装备研究所 | 一种用于常压多气体漏率测试的质谱分析检测装置及方法 |
CN112432738B (zh) * | 2020-11-24 | 2022-12-27 | 上海卫星装备研究所 | 一种用于常压多气体漏率测试的质谱分析检测装置及方法 |
CN114427938A (zh) * | 2021-12-08 | 2022-05-03 | 兰州空间技术物理研究所 | 一种多组分质谱泄漏检测装置 |
CN114427938B (zh) * | 2021-12-08 | 2024-03-15 | 兰州空间技术物理研究所 | 一种多组分质谱泄漏检测装置 |
CN114459697A (zh) * | 2021-12-24 | 2022-05-10 | 兰州空间技术物理研究所 | 红外成像系统探测器封装杜瓦多工位检漏系统及方法 |
CN114459697B (zh) * | 2021-12-24 | 2023-12-26 | 兰州空间技术物理研究所 | 红外成像系统探测器封装杜瓦多工位检漏系统及方法 |
CN114674501A (zh) * | 2021-12-25 | 2022-06-28 | 兰州空间技术物理研究所 | 一种静态漏率测量装置及方法 |
CN114624319B (zh) * | 2022-04-02 | 2023-09-01 | 中国工程物理研究院材料研究所 | 一种基于热解析-四极质谱测量原理定量获取材料中ppm级氢同位素含量的方法 |
CN114624319A (zh) * | 2022-04-02 | 2022-06-14 | 中国工程物理研究院材料研究所 | 一种基于热解析-四极质谱测量原理定量获取材料中ppm级氢同位素含量的方法 |
CN114753991A (zh) * | 2022-05-12 | 2022-07-15 | 之江实验室 | 可伸缩式吸气剂泵抽真空装置及应用方法 |
CN114753991B (zh) * | 2022-05-12 | 2022-10-04 | 之江实验室 | 可伸缩式吸气剂泵抽真空装置及应用方法 |
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Inventor after: Zhang Luosha Inventor after: Wu Xiaobin Inventor after: Wang Kuibo Inventor after: Chen Jinxin Inventor after: Luo Yan Inventor after: Xie Wanlu Inventor after: Zhou Yi Inventor after: Wang Yu Inventor after: Cui Huirong Inventor before: Wu Xiaobin Inventor before: Zhang Luosha Inventor before: Wang Kuibo Inventor before: Chen Jinxin Inventor before: Luo Yan Inventor before: Xie Wanlu Inventor before: Zhou Yi Inventor before: Wang Yu Inventor before: Cui Huirong |
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Effective date of registration: 20200812 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200812 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |