CN106165080B - 用于加热单元的支撑系统 - Google Patents

用于加热单元的支撑系统 Download PDF

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Publication number
CN106165080B
CN106165080B CN201580018462.9A CN201580018462A CN106165080B CN 106165080 B CN106165080 B CN 106165080B CN 201580018462 A CN201580018462 A CN 201580018462A CN 106165080 B CN106165080 B CN 106165080B
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CN
China
Prior art keywords
support
heating unit
support system
support member
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580018462.9A
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English (en)
Chinese (zh)
Other versions
CN106165080A (zh
Inventor
瓦迪姆·博古斯拉夫斯基
阿尔诺·普兰肯施泰纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plansee SE
Plansee USA LLC
Original Assignee
Plansee SE
Plansee USA LLC
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Publication date
Application filed by Plansee SE, Plansee USA LLC filed Critical Plansee SE
Publication of CN106165080A publication Critical patent/CN106165080A/zh
Application granted granted Critical
Publication of CN106165080B publication Critical patent/CN106165080B/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M13/00—Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles
    • F16M13/02—Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles for supporting on, or attaching to, an object, e.g. tree, gate, window-frame, cycle
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/06—Control, e.g. of temperature, of power
    • H05B6/08—Control, e.g. of temperature, of power using compensating or balancing arrangements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0432—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7618—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Resistance Heating (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201580018462.9A 2014-04-08 2015-01-27 用于加热单元的支撑系统 Active CN106165080B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/247,427 2014-04-08
US14/247,427 US9719629B2 (en) 2014-04-08 2014-04-08 Supporting system for a heating element and heating system
PCT/EP2015/000144 WO2015154835A1 (en) 2014-04-08 2015-01-27 Supporting system for a heating element

Publications (2)

Publication Number Publication Date
CN106165080A CN106165080A (zh) 2016-11-23
CN106165080B true CN106165080B (zh) 2019-04-23

Family

ID=52473857

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580018462.9A Active CN106165080B (zh) 2014-04-08 2015-01-27 用于加热单元的支撑系统

Country Status (8)

Country Link
US (1) US9719629B2 (https=)
EP (1) EP3130003B1 (https=)
JP (1) JP6423893B2 (https=)
KR (1) KR102276520B1 (https=)
CN (1) CN106165080B (https=)
SG (1) SG11201607804TA (https=)
TW (1) TWI623965B (https=)
WO (1) WO2015154835A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101749116B1 (ko) * 2015-05-08 2017-06-20 엘지전자 주식회사 조리기기
JP1581406S (https=) * 2016-10-14 2017-07-18
USD921431S1 (en) * 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
JP1684469S (ja) * 2020-09-24 2021-05-10 基板処理装置用天井ヒータ
CN116356292B (zh) * 2021-12-27 2025-07-08 南昌中微半导体设备有限公司 一种加热器组件及气相沉积设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242719B1 (en) * 1998-06-11 2001-06-05 Shin-Etsu Handotai Co., Ltd. Multiple-layered ceramic heater
US20020106826A1 (en) * 2001-02-07 2002-08-08 Vadim Boguslavskiy Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition
CN101902941A (zh) * 2007-12-18 2010-12-01 雀巢产品技术援助有限公司 具有可调节的关闭机构的饮料制备设备

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4398064B2 (ja) * 2000-05-12 2010-01-13 日本発條株式会社 加熱装置
US7645342B2 (en) * 2004-11-15 2010-01-12 Cree, Inc. Restricted radiated heating assembly for high temperature processing
US7573004B1 (en) * 2006-02-21 2009-08-11 Structured Materials Inc. Filament support arrangement for substrate heating apparatus
DE102009023472B4 (de) * 2009-06-02 2014-10-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Beschichtungsanlage und Beschichtungsverfahren
JP5902085B2 (ja) * 2009-08-07 2016-04-13 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 処理チャンバ内で基板を位置決めするための装置及び処理チャンバ内で基板をセンタリングするための方法
JP5480723B2 (ja) * 2010-06-02 2014-04-23 助川電気工業株式会社 熱電子放出用フィラメントサポート
TWI565367B (zh) * 2010-06-25 2017-01-01 山特維克熱傳動公司 用於加熱元件線圈之支撐結構
US9594724B2 (en) * 2012-08-09 2017-03-14 International Business Machines Corporation Vector register file

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242719B1 (en) * 1998-06-11 2001-06-05 Shin-Etsu Handotai Co., Ltd. Multiple-layered ceramic heater
US20020106826A1 (en) * 2001-02-07 2002-08-08 Vadim Boguslavskiy Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition
CN101902941A (zh) * 2007-12-18 2010-12-01 雀巢产品技术援助有限公司 具有可调节的关闭机构的饮料制备设备

Also Published As

Publication number Publication date
EP3130003A1 (en) 2017-02-15
SG11201607804TA (en) 2016-10-28
TWI623965B (zh) 2018-05-11
CN106165080A (zh) 2016-11-23
TW201539530A (zh) 2015-10-16
WO2015154835A1 (en) 2015-10-15
US20150289319A1 (en) 2015-10-08
KR20160141722A (ko) 2016-12-09
JP6423893B2 (ja) 2018-11-14
JP2017516297A (ja) 2017-06-15
US9719629B2 (en) 2017-08-01
EP3130003B1 (en) 2018-05-02
KR102276520B1 (ko) 2021-07-13

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