CN106153246A - Pirani ga(u)ge - Google Patents
Pirani ga(u)ge Download PDFInfo
- Publication number
- CN106153246A CN106153246A CN201610301264.XA CN201610301264A CN106153246A CN 106153246 A CN106153246 A CN 106153246A CN 201610301264 A CN201610301264 A CN 201610301264A CN 106153246 A CN106153246 A CN 106153246A
- Authority
- CN
- China
- Prior art keywords
- support member
- terminal
- filament
- filament support
- pirani
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Devices Affording Protection Of Roads Or Walls For Sound Insulation (AREA)
Abstract
The present invention provides a kind of had structure can effectively suppress by the Pirani ga(u)ge vibrating and impacting the broken filaments caused.The Pirani ga(u)ge of the present invention has the filament (6) being arranged in shell (1)；Keep the bubble-tight the first terminal platform (2) on rear side of shell；It is electrically insulated from each other and runs through multiple connection terminals (3) of the first terminal platform；And connected terminal support, long limit the first filament support member (5) in the longitudinal direction by any one.Filament is arranged between the leading section of the first filament support member and other connection terminal.It is provided with the second terminal board (4) in the front side of the first terminal platform, connects Part II (3b) that terminal by the Part I (3a) running through the first terminal platform, runs through the second terminal board and make Part I and the interconnective Part III of Part II (3c) constitute.It is provided with the second filament support member (7) the second terminal board and the first filament support member kept together.
Description
Technical field
The present invention relates to a kind of Pirani ga(u)ge, relate more specifically to a kind of had structure and can effectively suppress by vibrating and rushing
Hit the Pirani ga(u)ge of the broken filaments caused.
Background technology
Known this Pirani ga(u)ge is the such as product shown in patent documentation 1.This product has: seal container and vacuum
Chambeies etc. may be installed the cylindrical case on object to be measured；The wire filament being arranged in this shell；It is installed to be measured with shell
Direction on object is the bubble-tight terminal board that front keeps on rear side of shell；And the also penetrating terminal platform that is electrically insulated from each other is many
Individual connection terminal.Further, this product also has is connected terminal support, long limit in the longitudinal direction by any one in the enclosure
Filament support member, filament is arranged between the leading section of filament support member and any one other connection terminal.Generally, carefully
Silk support member is made up of the wire rod of the metal material that line footpath is Φ about 1mm.
Herein, in above-mentioned past case, such as, when object to be measured applies vibration and impact, filament and filament support member are with respectively
It is the separate swing of starting point from the connection terminal connected.Its result is sometimes to have unnecessary tensile stress to act on filament,
Thus cause broken filaments.
Prior art literature
Patent documentation
[patent documentation 1] International Publication 2006/057148
Summary of the invention
Invention to solve the technical problem that
In view of the foregoing, the problem of the present invention is to provide a kind of Pirani ga(u)ge, its structure being had can effectively suppress by
The broken filaments that vibration and impact are caused.
Solve the means of this problem
For solving above-mentioned problem, the Pirani ga(u)ge of the present invention has: may be installed the cylindrical case on object to be measured；If
Put the wire filament in this shell；With shell be installed to that the direction on object to be measured keeps on rear side of shell as front airtight
The first terminal platform of property；It is electrically insulated from each other and runs through multiple connection terminals of the first terminal platform, and in the enclosure by any one
Connect terminal support, long limit the first filament support member in the longitudinal direction；Filament be arranged on the leading section of filament support member with
Between any one other connection terminal；Described Pirani ga(u)ge, it is characterised in that: the most also have and be positioned at first
Second terminal board of the front side of terminal board；Connect terminal by running through the Part I of the first terminal platform, running through the of the second terminal board
Two parts and make Part I and the interconnective Part III of Part II constitute；It is provided with the second filament support member, has
Keep the maintaining part of the leading section of the second terminal board and the first filament support member respectively and connect the connecting portion of two maintaining parts.
According to the present invention, the second terminal board and the first filament support member are kept together by the second filament support member, such as when to be measured
When amount object applies vibration and impact, the second terminal board kept due to the second filament support member and the first filament support member are with even
The Part III of connecting terminal is starting point and entirety is rocked, so preventing unnecessary tensile stress from acting on filament.Thus,
The structure that the Pirani ga(u)ge of the present invention is had can suppress effectively by vibrating and impact the broken filaments caused.
Further, in the present invention, described second filament support member is preferably made up of cylinder, and it includes integrally formed described guarantor
Hold portion and described connecting portion and receive described second terminal board and described first filament support member.Thus, can realize simply
The structure that two-terminal platform and the first filament support member keep together.And then, it is also possible to take described first filament support member and
The structure that described second filament support member is integrally formed.
Accompanying drawing explanation
Fig. 1 is the profile of the structure of the Pirani ga(u)ge that embodiment of the present invention is described.
Fig. 2 is that profile is omitted in the local of the state illustrating the vibration occurred on the Pirani ga(u)ge shown in Fig. 1.
Detailed description of the invention
Hereinafter, referring to the drawings, the Pirani ga(u)ge of embodiment of the present invention is described.Hereinafter, with Pirani ga(u)ge pair
The installation direction of the object to be measured outside figure is " front (top in Fig. 1) ", with the disassembly direction of Pirani ga(u)ge for " rear (figure
Lower section in 1) " use the word representing direction.
It is the Pirani ga(u)ge of present embodiment with reference to Fig. 1, PG.Pirani ga(u)ge PG has cylindrical case 1, before it
Mounting flange 11 is included at end.The rear end of shell 1 is clogged by the first terminal platform 2 and keeps air-tightness.It is electrically insulated from each other and keeps
Bubble-tight multiple (in Fig. 1 being two) connect terminal 31、32Part I 3a run through the first terminal platform 2.The first terminal
Platform 2 can be consisted of so-called gas-tight seal.
In shell 1, the second terminal board 4 is arranged at the front side of the first terminal platform 2.Connect terminal 31、32Part II 3b
It is electrically insulated from each other and runs through the second terminal board 4.Now, the second terminal board 4 is by the diametric(al) (side orthogonal with fore-and-aft direction
To) on extend and make Part I 3a and Part II 3b interconnective connection terminal 31、32Part III 3c support.
Further, the second terminal board 4 also can be consisted of so-called gas-tight seal.Additionally, connect terminal 31、32Each several part 3a, 3b,
3c can make the pin-shaped parts of multiple metal material be interconnected to form by welding and welding etc., further, also can be by a metal
The pin-shaped shape components of material is " Z " font and integrally formed.
In shell 1, it is provided with by the connection terminal 3 of one end1Part II 3b support, long limit is at fore-and-aft direction (Fig. 1
In be above-below direction) on the first filament support member 5.The metal that first filament support member 5 is bent in shell 1 by leading section
Shaft-like or the plate-shaped member of material is constituted.Now, it is possible to such as make the bottom of the first filament support member 5 run through the second terminal board
4, make connection terminal 31Part II 3b and Part III 3c and the first filament support member 5 integrally formed.At the first filament
The sweep 51 of support member 5 front end and the connection terminal 3 of the other end2Part II 3b between the filament 6 of wire is installed.
Use line footpath is that the wire rod of the metal material about Φ 25 μm is as filament 6.Further, it is provided with there is maintaining part 71,72 and
Second filament support member 7 of connecting portion 73, described maintaining part 71,72 keeps the second terminal board 4 and the first filament to support respectively
The sweep 51 of part 5, described connecting portion 73 connects two maintaining parts 71,72.
In the present embodiment, the second filament support member 7 is made up of the cylinder of metal material, and it includes integrally formed holding
Portion 71,72 and connecting portion 73 also receive the second terminal board 4 and the first filament support member 5.Now, cylindrical second filament
The lower ending opening of support member 7, is installed on the second terminal board 4 by this opening.On the other hand, the second filament support member 7
Upper end seals, and this upper surface is connected with sweep 51.Further, on the sidewall of the second filament support member 7, offer towards
The opening 74 of filament 6.Though additionally, be not particularly illustrated explanation, but being suitably provided with insulator on the second filament support member 7
So that from connecting terminal 32Part II 3b flow to other connection terminal 3 through filament the 6, first filament support member 51's
The electric current of Part II 3b is not short-circuited.
According to above-mentioned embodiment, the second terminal board 4 and the first filament support member 5 are kept together by the second filament support member 7,
Such as when object to be measured applies vibration and impact, as in figure 2 it is shown, the second end kept due to the second filament support member 7
Sub-platform 4 and the first filament support member 5 are to connect terminal 31、32Part III 3b be starting point and entirety is rocked, so having prevented
Unnecessary tensile stress acts on filament 6.Thus, the structure that the Pirani ga(u)ge PG of present embodiment is had can
Effectively suppress by the fracture vibrating and impacting the filament 6 caused.
Above embodiments of the present invention are illustrated, but the present invention is not limited to this.In the above-described embodiment, with
Second filament support member 7 is illustrated as a example by being become by cylindrical, but as long as the second terminal board 4 and the first filament support
The product that part 5 is kept together by the second filament support member 7, is not limited in the above, maintaining part 71,72 and company
Meet portion 73 to be also made up of other parts.Further, in the above-described embodiment, to connect terminal 31、32Part I 3a
And Part II 3b and the Part III 3c orthogonal with Part I 3a and Part II 3b be connected product as a example by said
Bright, but regardless of its form, as long as when producing vibration, the second terminal board 4 He that the second filament support member 7 is kept
First filament support member 5 product that entirety is rocked with Part III 3b as starting point.
And then, in the above-described embodiment, to form the first filament support member 5 and the second filament support member 7 respectively, and first
It is illustrated as a example by the product that filament support member 5 and the second terminal board 4 are together kept together by the second filament support member 7,
It is not limited to this, when manufacturing filament support member, it is also possible to known method makes the first filament support member 5 and the second filament prop up
Support member 7 is integrally formed.
Description of reference numerals
PG ... Pirani ga(u)ge, 1 ... shell, 2 ... the first terminal platform, 31,32 ... connect terminal, 3a ... Part I is (even
Connecting terminal), 3b ... Part II (connection terminal), 3c ... Part III (connection terminal), 4 ... the second terminal board, 5 ...
First filament support member, 6 ... filament, 7 ... the second filament support member.
Claims (3)
1. a Pirani ga(u)ge, it has: may be installed the cylindrical case on object to be measured；It is arranged in this shell
Wire filament；It is installed to the direction on object to be measured with shell and keeps the bubble-tight the first terminal platform on rear side of shell as front；
It is electrically insulated from each other and runs through multiple connection terminals of the first terminal platform；And in the enclosure by any one connect terminal support,
Long limit the first filament support member in the longitudinal direction；And filament be arranged on the leading section of the first filament support member and any one its
Between its connection terminal；
Described Pirani ga(u)ge, it is characterised in that:
The most also there is the second terminal board of the front side being positioned at the first terminal platform；Connect terminal by running through the of the first terminal platform
A part, run through the Part II of the second terminal board and make Part I and the interconnective Part III of Part II constitute；
It is provided with the second filament support member, there is maintaining part and the company of the leading section keeping the second terminal board and the first filament support member respectively
Connect the connecting portion of two maintaining parts.
Pirani ga(u)ge the most according to claim 1, it is characterised in that: described second filament support member is by cylinder structure
Becoming, it includes integrally formed described maintaining part and described connecting portion and receives described second terminal board and described first filament support
Part.
Pirani ga(u)ge the most according to claim 1, it is characterised in that: described first filament support member and described second
Filament support member is integrally formed.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015100408 | 2015-05-15 | ||
| JP2015-100408 | 2015-05-15 | ||
| JP2016073834A JP6595945B2 (en) | 2015-05-15 | 2016-04-01 | Pirani vacuum gauge |
| JP2016-073834 | 2016-04-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106153246A true CN106153246A (en) | 2016-11-23 |
| CN106153246B CN106153246B (en) | 2019-08-30 |
Family
ID=57353809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610301264.XA Active CN106153246B (en) | 2015-05-15 | 2016-05-09 | Pirani ga(u)ge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106153246B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107894300A (en) * | 2017-12-29 | 2018-04-10 | 李涛 | A kind of vacuum degree measuring equipment |
| CN107941416A (en) * | 2017-12-29 | 2018-04-20 | 李涛 | Detect the connection terminal of vacuum |
| CN110940456A (en) * | 2018-12-12 | 2020-03-31 | 株式会社爱发科 | Pressure measuring system |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1395242A (en) * | 1971-10-08 | 1975-05-21 | Interatom | Vacuum gauges |
| CN85100570A (en) * | 1985-04-01 | 1986-08-06 | 南京工学院 | Extreme high vacuum separator |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| JP4264156B2 (en) * | 1999-03-02 | 2009-05-13 | 株式会社アルバック | Pirani vacuum gauge |
| CN201270306Y (en) * | 2008-09-16 | 2009-07-08 | 苏州飞乐汽车控制系统有限公司 | Connecting terminal with cable |
| CN101568817A (en) * | 2007-09-13 | 2009-10-28 | 佳能安内华科技股份有限公司 | Pirani gauge |
| CN201765085U (en) * | 2010-07-02 | 2011-03-16 | 成都旭顺电子有限责任公司 | On-line vacuum monitoring device for vacuum switch of 27.5kV |
| CN102782470A (en) * | 2010-02-12 | 2012-11-14 | 株式会社爱发科 | Transducer-type vacuum gauge |
| CN103234692A (en) * | 2013-04-17 | 2013-08-07 | 上海祖发实业有限公司 | Sensing type vacuum degree measuring device |
| JP5371057B2 (en) * | 2010-08-05 | 2013-12-18 | キヤノンアネルバ株式会社 | Ionization gauge |
-
2016
- 2016-05-09 CN CN201610301264.XA patent/CN106153246B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1395242A (en) * | 1971-10-08 | 1975-05-21 | Interatom | Vacuum gauges |
| CN85100570A (en) * | 1985-04-01 | 1986-08-06 | 南京工学院 | Extreme high vacuum separator |
| JP4264156B2 (en) * | 1999-03-02 | 2009-05-13 | 株式会社アルバック | Pirani vacuum gauge |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| CN101568817A (en) * | 2007-09-13 | 2009-10-28 | 佳能安内华科技股份有限公司 | Pirani gauge |
| CN201270306Y (en) * | 2008-09-16 | 2009-07-08 | 苏州飞乐汽车控制系统有限公司 | Connecting terminal with cable |
| CN102782470A (en) * | 2010-02-12 | 2012-11-14 | 株式会社爱发科 | Transducer-type vacuum gauge |
| CN201765085U (en) * | 2010-07-02 | 2011-03-16 | 成都旭顺电子有限责任公司 | On-line vacuum monitoring device for vacuum switch of 27.5kV |
| JP5371057B2 (en) * | 2010-08-05 | 2013-12-18 | キヤノンアネルバ株式会社 | Ionization gauge |
| CN103234692A (en) * | 2013-04-17 | 2013-08-07 | 上海祖发实业有限公司 | Sensing type vacuum degree measuring device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107894300A (en) * | 2017-12-29 | 2018-04-10 | 李涛 | A kind of vacuum degree measuring equipment |
| CN107941416A (en) * | 2017-12-29 | 2018-04-20 | 李涛 | Detect the connection terminal of vacuum |
| CN110940456A (en) * | 2018-12-12 | 2020-03-31 | 株式会社爱发科 | Pressure measuring system |
| CN110940456B (en) * | 2018-12-12 | 2021-09-28 | 株式会社爱发科 | Pressure measuring system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106153246B (en) | 2019-08-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106153246A (en) | Pirani ga(u)ge | |
| JP6595945B2 (en) | Pirani vacuum gauge | |
| CN103268870A (en) | Packaging structure for glass sealing electronic component | |
| CN103244679A (en) | Orifice sealing element | |
| RU2013118682A (en) | ELECTRIC THROUGH CONNECTOR FOR UNDERWATER CONTAINERS | |
| CN103899607A (en) | Door frame connecting block | |
| CN209822404U (en) | Temperature safety resistor | |
| CN205762501U (en) | A kind of wire twisting machine end of incoming cables cleaning structure | |
| JP2009146731A (en) | Single base halogen bulb | |
| US7839066B2 (en) | Strengthened arc discharge lamp | |
| US2475369A (en) | Base structure for electron discharge devices | |
| CN208656325U (en) | A kind of novel single-side card | |
| NL1028601C2 (en) | Mount for metal halide arc discharge lamp. | |
| US2889169A (en) | Conveyor carrier | |
| CN208119786U (en) | solution bottle | |
| US20100176722A1 (en) | High-pressure discharge lamp | |
| US20160268707A1 (en) | Female contact comprising a spring | |
| CN207910115U (en) | A kind of structure improved terminal | |
| US1661589A (en) | Anode spacer | |
| CN206401594U (en) | The anti-routed PIN DVI interfaces of one kind | |
| CN104634052A (en) | Sucking disc for fixing refrigerator wiring harness, refrigerator comprising sucking disc, and application of sucking disc | |
| CN205749595U (en) | A kind of semiconductor chip Pin pin test material apparatus | |
| CN208481284U (en) | A kind of cleaning head and floor mop with connector | |
| CN204201721U (en) | The anti-fracture structure of front combination lamp mounting bracket | |
| CN204433923U (en) | A kind of stabilizing equipment of the banding machine for aluminium foil |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |