CN106153246B - Pirani ga(u)ge - Google Patents
Pirani ga(u)ge Download PDFInfo
- Publication number
- CN106153246B CN106153246B CN201610301264.XA CN201610301264A CN106153246B CN 106153246 B CN106153246 B CN 106153246B CN 201610301264 A CN201610301264 A CN 201610301264A CN 106153246 B CN106153246 B CN 106153246B
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- China
- Prior art keywords
- filament
- supporting element
- terminal platform
- terminal
- filament supporting
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Devices Affording Protection Of Roads Or Walls For Sound Insulation (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
The present invention provide it is a kind of possessed by structure the Pirani ga(u)ges of the broken filaments as caused by vibration and impact can be effectively suppressed.Pirani ga(u)ge of the invention has the filament (6) being arranged in shell (1)；Keep the first terminal platform (2) of the air-tightness on rear side of shell；It is electrically insulated from each other and runs through multiple connection terminals (3 of first terminal platform1、32)；And supported by any one connection terminal, the first filament supporting element (5) of long side in the longitudinal direction.Filament is mounted between the front end of the first filament supporting element and other connection terminals.It is provided on front side of first terminal platform Second terminal platform (4), connection terminal is by the first part (3a) through first terminal platform, the second part (3b) through Second terminal platform and constitutes first part and second part Part III interconnected (3c).It is provided with the second filament supporting element (7) that Second terminal platform and the first filament supporting element keep together.
Description
Technical field
The present invention relates to a kind of Pirani ga(u)ge, relate more specifically to it is a kind of possessed by structure can be effectively suppressed by shaking
The Pirani ga(u)ge of broken filaments caused by dynamic and impact.
Background technique
Known this Pirani ga(u)ge is product shown in such as patent document 1.The product include sealing container and
The mountable cylindrical case on object to be measured such as vacuum chamber；Linear filament in the shell is set；It is installed to shell
Direction on object to be measured keeps the terminal board of the air-tightness on rear side of shell for front；And it is electrically insulated from each other and runs through end
Multiple connection terminals of sub- platform.Further more, the product also has supported inside the shell by any one connection terminal, long side preceding
Filament supporting element in rear direction, filament be mounted on filament supporting element front end and any one other connection terminal it
Between.In general, filament supporting element is made of the wire rod for the metal material that line footpath is Φ 1mm or so.
Herein, in above-mentioned previous example, such as when object to be measured applies vibration and impact, filament and filament supporting element
It is swung independently of each other using the connection terminal respectively connected as starting point.It is acted on as a result, having unnecessary tensile stress sometimes
On filament, thus lead to broken filaments.
Existing technical literature
Patent document
[patent document 1] International Publication 2006/057148
Summary of the invention
Technical problems to be solved by the inivention
In view of the foregoing, the subject of the invention is to provide a kind of Pirani ga(u)ge, its structure can be effective
Inhibit by vibrating and impacting caused broken filaments.
Solve the means of this project
To solve the above subject, Pirani ga(u)ge of the invention is included outside the mountable tubular on object to be measured
Shell；Linear filament in the shell is set；The direction on object to be measured is installed to as front and after keeping shell using shell
The first terminal platform of the air-tightness of side；Multiple connection terminals of first terminal platform are electrically insulated from each other and run through, and inside the shell
The the first filament supporting element of supported by any one connection terminal, long side in the longitudinal direction；Filament is mounted on filament support
Between the front end of part and any one other connection terminal；The Pirani ga(u)ge, it is characterised in that: inside the shell also
Second terminal platform with the front side for being located at first terminal platform；Connection terminal is by running through the first part of first terminal platform, running through
The second part of Second terminal platform and constitute first part and second part Part III interconnected；It is provided with second
There is filament supporting element the maintaining part for the front end for keeping Second terminal platform and the first filament supporting element respectively and connection two to keep
The interconnecting piece in portion.
According to the present invention, Second terminal platform and the first filament supporting element are kept together by the second filament supporting element, such as
When object to be measured applies vibration and impact, the Second terminal platform kept by the second filament supporting element and the first filament branch
Support member is shaken so that the Part III of connection terminal is whole as starting point, so having prevented unnecessary tensile stress from acting on filament
On.To which structure possessed by Pirani ga(u)ge of the invention can effectively inhibit the filament as caused by vibration and impact and break
It splits.
Further more, in the present invention, the second filament supporting element is preferably made of cylindrical body comprising integrally formed institute
It states maintaining part and the interconnecting piece and stores the Second terminal platform and the first filament supporting element.It as a result, can be simply real
The structure that now Second terminal platform and the first filament supporting element keep together.In turn, it can also take first filament
Supporting element and the integrally formed structure of the second filament supporting element.
Detailed description of the invention
Fig. 1 is the sectional view for illustrating the structure of Pirani ga(u)ge of embodiment of the present invention.
Fig. 2 is that sectional view is omitted in the part for the state for showing the vibration occurred on Pirani ga(u)ge shown in FIG. 1.
Specific embodiment
Hereinafter, illustrating the Pirani ga(u)ge of embodiment of the present invention referring to attached drawing.Hereinafter, with Pi Lani vacuum
The installation direction for counting the object to be measured outside to figure is " preceding (top in Fig. 1) ", is with the disassembly direction of Pirani ga(u)ge
" rear (lower section in Fig. 1) " uses the word for indicating direction.
Referring to Fig.1, PG is the Pirani ga(u)ge of present embodiment.Pirani ga(u)ge PG has cylindrical case 1, before
It include mounting flange 11 at end.The rear end of shell 1 is clogged by first terminal platform 2 and keeps air-tightness.It is electrically insulated from each other and keeps
Multiple (being two in Fig. 1) connection terminals 3 of air-tightness1、32First part 3a run through first terminal platform 2.First terminal platform 2
So-called gas-tight seal composition can be passed through.
Second terminal platform 4 is set to the front side of first terminal platform 2 in shell 1.Connection terminal 31、32Second part 3b
It is electrically insulated from each other and runs through Second terminal platform 4.At this point, Second terminal platform 4 is by the diametrical direction (side orthogonal with front-rear direction
To) on extend and make first part 3a and second part 3b connection terminal 3 interconnected1、32Part III 3c support.Again
Have, Second terminal platform 4 can also pass through so-called gas-tight seal composition.In addition, connection terminal 31、32Each section 3a, 3b, 3c can
It is interconnected to form the pin-shaped component of multiple metal materials by welding and welding etc., further more, can also be by a metal material
The pin-shaped shape components of matter are integrally formed for " Z " font.
In shell 1, the connection terminal 3 by one end is installed1Second part 3b support, long side is in front-rear direction
The first filament supporting element 5 on (being up and down direction in Fig. 1).First filament supporting element 5 curved gold into shell 1 from front end
The rod-shaped or plate-shaped member for belonging to material is constituted.At this point, can also for example make the lower end of the first filament supporting element 5 through Second terminal
Platform 4 makes connection terminal 31Second part 3b and Part III 3c and the first filament supporting element 5 it is integrally formed.In the first filament
The bending part 51 of 5 front end of supporting element and the connection terminal 3 of the other end2Second part 3b between linear filament 6 is installed.
Use the wire rod that line footpath is 25 μm of Φ or so of metal material as filament 6.Also, it is equipped with maintaining part 71,72 and connects
Second filament supporting element 7 of socket part 73, the maintaining part 71,72 keep Second terminal platform 4 and the first filament supporting element 5 respectively
Bending part 51, the interconnecting piece 73 connect two maintaining parts 71,72.
In the present embodiment, the second filament supporting element 7 is made of the cylindrical body of metal material comprising integrally formed
Maintaining part 71,72 and interconnecting piece 73 simultaneously store Second terminal platform 4 and the first filament supporting element 5.At this point, the second filament of cylindrical body
The lower ending opening of supporting element 7 is installed on Second terminal platform 4 by the opening.On the other hand, the second filament supporting element 7 is upper
End seal is lived, which connect with bending part 51.Further more, offering on the side wall of the second filament supporting element 7 towards filament
6 opening 74.Though in addition, be not particularly illustrated explanation, be suitably provided with insulator on the second filament supporting element 7 so that from
Connection terminal 32Second part 3b flow to other connection terminals 3 by filament 6, the first filament supporting element 51Second part
Short circuit does not occur for the electric current of 3b.
According to above embodiment, Second terminal platform 4 and the first filament supporting element 5 are maintained at by the second filament supporting element 7
Together, such as when object to be measured applies vibration and impact, as shown in Fig. 2, by the second filament supporting element 7 kept the
Two-terminal platform 4 and the first filament supporting element 5 are with connection terminal 31、32Part III 3b be starting point and it is whole shake, so preventing
There is unnecessary tensile stress to act on filament 6.To which structure possessed by the Pirani ga(u)ge PG of present embodiment can
Effectively inhibit the fracture of the filament 6 as caused by vibration and impact.
Embodiments of the present invention are illustrated above, but the present invention is not limited to this.In above embodiment
In, it is illustrated by cylindrical as example with the second filament supporting element 7, as long as but Second terminal platform 4 and first thin
The product that wire support 5 is kept together by the second filament supporting element 7 is not limited in the above, maintaining part 71,72
It can also be made of other components with interconnecting piece 73.Further more, in the above-described embodiment, with connection terminal 31、32First part 3a
And it is said for the connected product of the second part 3b and Part III 3c orthogonal with first part 3a and second part 3b
It is bright, but regardless of its form, as long as when generating vibration, Second terminal platform 4 that the second filament supporting element 7 is kept and the
The product that one filament supporting element 5 is integrally shaken using Part III 3b as starting point.
In turn, in the above-described embodiment, to be respectively formed the first filament supporting element 5 and the second filament supporting element 7, and
It is said for the product that one filament supporting element 5 is kept together by the second filament supporting element 7 together with Second terminal platform 4
It is bright, it is not limited to this, when manufacturing filament supporting element, it is also possible to which known method keeps the first filament supporting element 5 and second thin
Wire support 7 is integrally formed.
Description of symbols
PG ... Pirani ga(u)ge, 1 ... shell, 2 ... first terminal platforms, 31、32... connection terminal, 3a ... first part are (even
Connecting terminal), it is 3b ... second part (connection terminal), 3c ... Part III (connection terminal), 4 ... Second terminal platforms, 5 ... first thin
Wire support, 6 ... filaments, 7 ... second filament supporting elements.
Claims (3)
1. a kind of Pirani ga(u)ge includes the mountable cylindrical case on object to be measured；It is arranged in the shell
Linear filament；The direction being installed on object to be measured using shell keeps the first terminal of the air-tightness on rear side of shell as front
Platform；It is electrically insulated from each other and runs through multiple connection terminals of first terminal platform；And inside the shell by any one connection terminal branch
Support, the first filament supporting element of long side in the longitudinal direction；And filament is mounted on the front end of the first filament supporting element and appoints
It anticipates between an other connection terminals；
The Pirani ga(u)ge, it is characterised in that:
Also there is the Second terminal platform positioned at the front side of first terminal platform inside the shell；Connection terminal is by through first terminal platform
First part, through Second terminal platform second part and make first part and second part Part III structure interconnected
At；It is provided with the second filament supporting element, there is the holding for the front end for keeping Second terminal platform and the first filament supporting element respectively
The interconnecting piece of two maintaining parts of portion and connection.
2. Pirani ga(u)ge according to claim 1, it is characterised in that: the second filament supporting element is by cylindrical body structure
At comprising the integrally formed maintaining part and the interconnecting piece simultaneously store the Second terminal platform and the first filament branch
Support member.
3. Pirani ga(u)ge according to claim 1, it is characterised in that: the first filament supporting element and described second
Filament supporting element is integrally formed.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015100408 | 2015-05-15 | ||
| JP2015-100408 | 2015-05-15 | ||
| JP2016-073834 | 2016-04-01 | ||
| JP2016073834A JP6595945B2 (en) | 2015-05-15 | 2016-04-01 | Pirani vacuum gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106153246A CN106153246A (en) | 2016-11-23 |
| CN106153246B true CN106153246B (en) | 2019-08-30 |
Family
ID=57353809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610301264.XA Active CN106153246B (en) | 2015-05-15 | 2016-05-09 | Pirani ga(u)ge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106153246B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107894300A (en) * | 2017-12-29 | 2018-04-10 | 李涛 | A kind of vacuum degree measuring equipment |
| CN107941416A (en) * | 2017-12-29 | 2018-04-20 | 李涛 | Detect the connection terminal of vacuum |
| WO2020121576A1 (en) * | 2018-12-12 | 2020-06-18 | 株式会社アルバック | Vacuum gauge and pressure measurement system comprising vacuum gauge |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1395242A (en) * | 1971-10-08 | 1975-05-21 | Interatom | Vacuum gauges |
| CN85100570A (en) * | 1985-04-01 | 1986-08-06 | 南京工学院 | Extreme high vacuum separator |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| JP4264156B2 (en) * | 1999-03-02 | 2009-05-13 | 株式会社アルバック | Pirani vacuum gauge |
| CN201270306Y (en) * | 2008-09-16 | 2009-07-08 | 苏州飞乐汽车控制系统有限公司 | Connecting terminal with cable |
| CN101568817A (en) * | 2007-09-13 | 2009-10-28 | 佳能安内华科技股份有限公司 | Pirani gauge |
| CN201765085U (en) * | 2010-07-02 | 2011-03-16 | 成都旭顺电子有限责任公司 | On-line vacuum monitoring device for vacuum switch of 27.5kV |
| CN102782470A (en) * | 2010-02-12 | 2012-11-14 | 株式会社爱发科 | Transducer-type vacuum gauge |
| CN103234692A (en) * | 2013-04-17 | 2013-08-07 | 上海祖发实业有限公司 | Sensing type vacuum degree measuring device |
| JP5371057B2 (en) * | 2010-08-05 | 2013-12-18 | キヤノンアネルバ株式会社 | Ionization gauge |
-
2016
- 2016-05-09 CN CN201610301264.XA patent/CN106153246B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1395242A (en) * | 1971-10-08 | 1975-05-21 | Interatom | Vacuum gauges |
| CN85100570A (en) * | 1985-04-01 | 1986-08-06 | 南京工学院 | Extreme high vacuum separator |
| JP4264156B2 (en) * | 1999-03-02 | 2009-05-13 | 株式会社アルバック | Pirani vacuum gauge |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| CN101568817A (en) * | 2007-09-13 | 2009-10-28 | 佳能安内华科技股份有限公司 | Pirani gauge |
| CN201270306Y (en) * | 2008-09-16 | 2009-07-08 | 苏州飞乐汽车控制系统有限公司 | Connecting terminal with cable |
| CN102782470A (en) * | 2010-02-12 | 2012-11-14 | 株式会社爱发科 | Transducer-type vacuum gauge |
| CN201765085U (en) * | 2010-07-02 | 2011-03-16 | 成都旭顺电子有限责任公司 | On-line vacuum monitoring device for vacuum switch of 27.5kV |
| JP5371057B2 (en) * | 2010-08-05 | 2013-12-18 | キヤノンアネルバ株式会社 | Ionization gauge |
| CN103234692A (en) * | 2013-04-17 | 2013-08-07 | 上海祖发实业有限公司 | Sensing type vacuum degree measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106153246A (en) | 2016-11-23 |
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