CN107894300A - A kind of vacuum degree measuring equipment - Google Patents
A kind of vacuum degree measuring equipment Download PDFInfo
- Publication number
- CN107894300A CN107894300A CN201711480130.XA CN201711480130A CN107894300A CN 107894300 A CN107894300 A CN 107894300A CN 201711480130 A CN201711480130 A CN 201711480130A CN 107894300 A CN107894300 A CN 107894300A
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- CN
- China
- Prior art keywords
- supporting mechanism
- support member
- measuring equipment
- vacuum degree
- degree measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of vacuum degree measuring equipment, it includes body, body includes the accommodating chamber that shell and shell surround, one end of accommodating chamber is provided with opening, the other end is provided with hermetic terminal, opening is provided with sealed connecting component, hot filament is installed in accommodating chamber, support the first supporting mechanism of hot filament, fix the insulating fixing piece of the first supporting mechanism, second supporting mechanism, first supporting mechanism and the electrical connection of the second supporting mechanism, second supporting mechanism electrically connects through hermetic terminal with external control circuit, shell is provided with temperature sensor, temperature sensor is connected with external control circuit.The vacuum degree measuring equipment of the present invention is by setting the first supporting mechanism to support hot filament, and first supporting mechanism is fixed by insulating fixing piece, it is connected again by the second support member being connected with external control circuit with first supporting mechanism, it can ensure in vibration, the hot filament and the first supporting mechanism synchronous vibration, prevent hot filament to be pulled off.
Description
Technical field
The present invention relates to examine detection technique field, more particularly to a kind of vacuum degree measuring equipment.
Background technology
Vacuum meter also known as vacuum meter, it is the instrument of measurement of vacuum or air pressure.Usually utilize gas under different air pressure
The change of certain physical effect carries out the measurement of air pressure.Pirani ga(u)ge is also referred to as resistance-type vacuum gauge, and its operation principle is：Very
Reciprocal of duty cycle is different, and the air molecule number in unit volume is just different, and the ability (radiating of heat is taken away for the resistance wire to generate heat
Ability) it is just different, wire temperature is just different, because the resistivity of resistance wire is the function of temperature, different vacuum
The difference of resistivity is just caused, then resistance is just different, and pressure drop of the electric current on resistance wire is just different, according to the change of voltage just
Atmospheric pressure, that is, measurement of vacuum can be conversed.Existing Pirani ga(u)ge uses the hot filament of linear pattern mostly, and
In measurement process, uncontrollable vibration is often had, the hot filament in vacuum meter can be had an impact, cause its fracture, so as to
Influence detection.
The content of the invention
In view of the shortcomings of the prior art, present invention aims at providing one kind can effectively resist external vibration, prevent hot thin
The vacuum degree measuring equipment of silk fracture.
A kind of vacuum degree measuring equipment, including body, the body include the accommodating chamber that shell and the shell surround, institute
The one end for stating accommodating chamber is provided with opening, and the other end is provided with hermetic terminal, and the opening is provided with sealed connecting component, the receiving
The insulation that intracavitary is provided with hot filament, the first supporting mechanism for supporting the hot filament, fixed first supporting mechanism is fixed
Part, the second supporting mechanism, first supporting mechanism and second supporting mechanism electrical connection, second supporting mechanism pass through
The hermetic terminal electrically connects with external control circuit, and the shell is provided with temperature sensor, the temperature sensor and institute
State external control circuit connection.
As a further improvement on the present invention, it is installed with air filter machine close to the opening in the accommodating chamber
Structure.
As a further improvement on the present invention, the air filtration mechanism is sintered filter.
As a further improvement on the present invention, first supporting mechanism includes supporting the of the hot filament both ends respectively
One support member and the second support member, second supporting mechanism include electrically connected with first support member the 3rd support member,
The 4th support member electrically connected with second support member.
As a further improvement on the present invention, the 3rd support member and the 4th supporting piece structure are identical, be arc and
It is symmetrical arranged.
As a further improvement on the present invention, the sealed connecting component is mounting flange.
As a further improvement on the present invention, the accommodating chamber is tubular.
As a further improvement on the present invention, the hot filament is helical structure.
Beneficial effects of the present invention：
(1) vacuum degree measuring equipment of the invention supports hot filament by the first supporting mechanism of setting, and solid by insulating
Determine part and fix first supporting mechanism, then the second support member by being connected with external control circuit connects with first supporting mechanism
Connect, it is ensured that in vibration, the hot filament and the first supporting mechanism synchronous vibration, prevent hot filament to be pulled off.
(2) secondly, hot filament is helical structure, can effectively prevent from vibrating, avoid being pulled off, while add contact
Area, the length of whole device is reduced, has saved cost.
(3) simultaneously, the second supporting mechanism is arranged to two curved support parts of structure identical, and arcuate structure can effectively subtract
Shake.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, and in order to allow the above and other objects, features and advantages of the present invention can
Become apparent, below especially exemplified by preferred embodiment, and coordinate accompanying drawing, describe in detail as follows.
Brief description of the drawings
Fig. 1 is the structural representation of vacuum degree measuring equipment in the embodiment of the present invention.
Description of symbols：10th, shell；20th, accommodating chamber；21st, it is open；22nd, hermetic terminal；23rd, insulating part；30th, mounting flange；
40th, sintered filter；50th, hot filament；61st, the first support member；62nd, the second support member；70th, insulating fixing piece；81st, the 3rd support
Part；82nd, the 4th support member；91st, control circuit；92nd, temperature sensor.
Embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings, so that those skilled in the art can be with
More fully understand the present invention and can be practiced, but illustrated embodiment is not as a limitation of the invention.
As shown in figure 1, being the vacuum degree measuring equipment of the present invention, the device includes the receiving that shell 10 and shell 10 surround
Chamber 20, accommodating chamber 20 are tubular.One end of accommodating chamber 20 is provided with opening 21, and the other end is provided with hermetic terminal 22, the peace of opening 21
Equipped with mounting flange 30, for being fixedly connected and sealing with space to be measured, fixed in accommodating chamber 20 at opening 21
Sintered filter 40 is installed, for preventing pollutant in space to be measured or reactant from entering in the accommodating chamber 20, accommodated
Hot filament 50, the first support member 61, the second support member 62, insulating fixing piece 70, the 3rd support member the 81, the 4th are installed in chamber 20
Support member 82, the first support member 61 and the second support member 62 are fixedly installed in the hot both ends of filament 50 respectively, for by hot filament 50
Support is fixed, and the first support member 61 and the second support member 62 are fixedly connected with insulating fixing piece 70, and the first support member 61 passes through
Insulating fixing piece 70 is fixedly connected with the 3rd support member 81, and the second support member 62 passes through the support member 82 of insulating fixing piece 70 and the 4th
It is fixedly connected, the 3rd support member 81 is identical with the structure of the 4th support member 82, is arc and is symmetrical arranged, the He of the 3rd support member 81
4th support member 82 is through hermetic terminal 22 and is electrically connected with external control circuit 91, the 3rd support member 81 and hermetic terminal 22
Between insulating part 23 is installed, insulating part 23 is also installed between the 4th support member 82 and hermetic terminal 22.Installed on shell 10
There is temperature sensor 92, temperature sensor 92 electrically connects with control circuit 91, and in the present embodiment, hot filament 50 is helical form.
In measurement, device is fixedly connected with space to be measured by mounting flange 30, the gas molecule in space to be measured
By opening 21, accommodating chamber 20 is entered after being filtered by sintered filter 40, the surface collision with hot filament 50 is thin from heat by heat
50 surface diversions of silk, and accommodating chamber 20 is transferred heat to the inwall collision of accommodating chamber 20, temperature sensor 92 detects temperature
Spend and temperature information is simultaneously transferred to control circuit 91, control circuit 91 is connected with external power source, and control circuit 91 is with by hot filament
50 remain the electricity needed for steady temperature to calculate air pressure, and obtain the vacuum in space to be measured.
Beneficial effects of the present invention：
(1) vacuum degree measuring equipment of the invention supports hot filament by the first supporting mechanism of setting, and solid by insulating
Determine part and fix first supporting mechanism, then the second support member by being connected with external control circuit connects with first supporting mechanism
Connect, it is ensured that in vibration, the hot filament and the first supporting mechanism synchronous vibration, prevent hot filament to be pulled off.
(2) secondly, hot filament is helical structure, can effectively prevent from vibrating, avoid being pulled off, while add contact
Area, the length of whole device is reduced, has saved cost.
(3) simultaneously, the second supporting mechanism is arranged to two curved support parts of structure identical, and arcuate structure can effectively subtract
Shake.
Above example is only the preferred embodiment to absolutely prove the present invention and being lifted, and protection scope of the present invention is not
It is limited to this.The equivalent substitute or conversion that those skilled in the art are made on the basis of the present invention, the guarantor in the present invention
Within the scope of shield.Protection scope of the present invention is defined by claims.
Claims (8)
- A kind of 1. vacuum degree measuring equipment, it is characterised in that：Including body, the body surrounds including shell and the shell Accommodating chamber, one end of the accommodating chamber are provided with opening, and the other end is provided with hermetic terminal, and the opening is provided with sealed connection Part, hot filament, the first supporting mechanism of the support hot filament, fixed first supporting mechanism are installed in the accommodating chamber Insulating fixing piece, the second supporting mechanism, first supporting mechanism and second supporting mechanism electrical connection, described second Support mechanism electrically connects through the hermetic terminal with external control circuit, and the shell is provided with temperature sensor, the temperature Sensor is connected with the external control circuit.
- 2. vacuum degree measuring equipment as claimed in claim 1, it is characterised in that consolidate in the accommodating chamber close to the opening Dingan County is equipped with air filtration mechanism.
- 3. vacuum degree measuring equipment as claimed in claim 2, it is characterised in that the air filtration mechanism filters for sintering Device.
- 4. vacuum degree measuring equipment as claimed in claim 1, it is characterised in that first supporting mechanism includes supporting respectively First support member and the second support member at the hot filament both ends, second supporting mechanism include and first support member electricity 3rd support member of connection, the 4th support member electrically connected with second support member.
- 5. vacuum degree measuring equipment as claimed in claim 4, it is characterised in that the 3rd support member and the 4th support member knot Structure is identical, is arc and is symmetrical arranged.
- 6. vacuum degree measuring equipment as claimed in claim 1, it is characterised in that the sealed connecting component is mounting flange.
- 7. vacuum degree measuring equipment as claimed in claim 1, it is characterised in that the accommodating chamber is tubular.
- 8. the vacuum degree measuring equipment as described in claim 1-7 is any, it is characterised in that the hot filament is spiral shape knot Structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711480130.XA CN107894300A (en) | 2017-12-29 | 2017-12-29 | A kind of vacuum degree measuring equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711480130.XA CN107894300A (en) | 2017-12-29 | 2017-12-29 | A kind of vacuum degree measuring equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107894300A true CN107894300A (en) | 2018-04-10 |
Family
ID=61808724
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711480130.XA Pending CN107894300A (en) | 2017-12-29 | 2017-12-29 | A kind of vacuum degree measuring equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN107894300A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210208016A1 (en) * | 2018-04-17 | 2021-07-08 | Mks Instruments, Inc. | Thermal Conductivity Gauge |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05281072A (en) * | 1991-04-05 | 1993-10-29 | Ulvac Japan Ltd | Pirani gauge |
| JPH07120339A (en) * | 1993-10-25 | 1995-05-12 | Ulvac Japan Ltd | Pirani gauge |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| FR3022627A1 (en) * | 2014-06-24 | 2015-12-25 | Schrader | PRESSURE AND TEMPERATURE MEASURING DEVICE |
| CN106153246A (en) * | 2015-05-15 | 2016-11-23 | 株式会社爱发科 | Pirani ga(u)ge |
| CN207991746U (en) * | 2017-12-29 | 2018-10-19 | 李涛 | A kind of vacuum degree measuring equipment |
-
2017
- 2017-12-29 CN CN201711480130.XA patent/CN107894300A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05281072A (en) * | 1991-04-05 | 1993-10-29 | Ulvac Japan Ltd | Pirani gauge |
| JPH07120339A (en) * | 1993-10-25 | 1995-05-12 | Ulvac Japan Ltd | Pirani gauge |
| CN1969175A (en) * | 2004-11-24 | 2007-05-23 | 株式会社爱发科 | Pirani gauge |
| FR3022627A1 (en) * | 2014-06-24 | 2015-12-25 | Schrader | PRESSURE AND TEMPERATURE MEASURING DEVICE |
| CN106153246A (en) * | 2015-05-15 | 2016-11-23 | 株式会社爱发科 | Pirani ga(u)ge |
| CN207991746U (en) * | 2017-12-29 | 2018-10-19 | 李涛 | A kind of vacuum degree measuring equipment |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210208016A1 (en) * | 2018-04-17 | 2021-07-08 | Mks Instruments, Inc. | Thermal Conductivity Gauge |
| CN114577392A (en) * | 2018-04-17 | 2022-06-03 | 万机仪器公司 | Heat conduction measuring instrument and method for measuring air pressure |
| US11656139B2 (en) * | 2018-04-17 | 2023-05-23 | Mks Instruments, Inc. | Thermal conductivity gauge |
| US11946823B2 (en) | 2018-04-17 | 2024-04-02 | Mks Instruments, Inc. | Thermal conductivity gauge |
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