CN106124414A - A kind of highly sensitive optical fiber EFPI sensor and preparation method thereof - Google Patents
A kind of highly sensitive optical fiber EFPI sensor and preparation method thereof Download PDFInfo
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 119
- 238000002360 preparation method Methods 0.000 title abstract description 4
- 239000000835 fiber Substances 0.000 claims abstract description 236
- 239000011248 coating agent Substances 0.000 claims abstract description 54
- 238000000576 coating method Methods 0.000 claims abstract description 54
- 230000003287 optical effect Effects 0.000 claims abstract description 41
- 238000007747 plating Methods 0.000 claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 12
- 238000005304 joining Methods 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims description 16
- 239000011241 protective layer Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 23
- 230000035945 sensitivity Effects 0.000 description 31
- 238000001228 spectrum Methods 0.000 description 31
- 239000003292 glue Substances 0.000 description 13
- 238000003466 welding Methods 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 238000010891 electric arc Methods 0.000 description 6
- 238000012544 monitoring process Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- -1 coat and covering Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000003518 caustics Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000009331 sowing Methods 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
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- 238000005260 corrosion Methods 0.000 description 1
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- 238000010168 coupling process Methods 0.000 description 1
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- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
Abstract
The invention discloses a kind of highly sensitive optical fiber EFPI sensor and preparation method thereof, belong to technical field of optical fiber sensing.It includes capillary tube, single-mode fiber and reflectance coating, wherein, single-mode fiber includes incident optical and mirror based fiber optica, incident optical and mirror based fiber optica are positioned at correspondence on one end of capillary tube and are respectively arranged with one section of fibre core I and fibre core II, between end face and the end face of fibre core II of fibre core I, gap is relative, it is equipped with reflectance coating on the end face of fibre core I and the end face of fibre core II, the surface of fibre core I and the surface of fibre core II are equipped with reflectance coating, incident optical is cross section I with the end face of fibre core I joining place, mirror based fiber optica is cross section II with the end face of fibre core II joining place, it is equipped with reflectance coating on cross section I and cross section II, also include its manufacture method.Compared with prior art, the present invention uses the reflectance improving end face at fiber end face plating last layer porpezite film, thus improves the interference effect of optical fiber EFPI.
Description
Technical field
The present invention relates to technical field of optical fiber sensing, relate generally to a kind of highly sensitive optical fiber EFPI sensor and
Its manufacture method.
Background technology
Fibre Optical Sensor is a kind of novel sensor risen in recent decades, relates to many important fields, mainly should
The bridge being used in urban construction, dam etc.；Apply in terms of power system, measure the parameters such as electric current, temperature；Also include aviation
Space flight, environmental monitoring, the aspect such as medical science and biological detection, Fibre Optical Sensor can be divided into fiber-optic grating sensor, light according to structure
Fine F-P sensor, Brillouin's backscattering distributed fiberoptic sensor etc..Wherein, optical fiber F-P sensor is with its structure letter
List, low cost, precision are high, measure the features such as scope is wide, receive increasingly extensive concern.
Intrinsic optical fiber F-P sensor (the Intrinsic Fabry-Perot that Lee and Taylor in 1988 makes
Interferometer, IFPI) it is intracavity structure, light beam all reflects at inside of optical fibre；Murph in 1991 et al. makes
Become extrinsic optical fiber F-P sensor (Extrinsic Fabry-Perot Interferometer, EFPI), deposit in EFPI
At an air chamber, monitoring of environmental parameter can be carried out by measuring the change of chamber length, and its fineness is high, have wider wavelength
Range of accommodation etc., are therefore widely used in the fields such as engineering, and traditional EFPI structure is to use ordinary optic fibre end face about 4%
Fresnel reflection make, at present, how to improve the structure of extrinsic optical fiber F-P sensor, with improve its strain, liquid
The performance of the parameter monitoring such as refractive index, temperature is by increasingly extensive concern.Liu Shen et al. has made based on bubble structure
Optical fiber F-P pressure sensor, it reaches 43.0pm/ μ ε to the sensitivity of the measurement of pressure, and temperature and strain cross sensitivity
The error of problem less than 0.046 μ ε/DEG C.Li Huidong et al. has made based on optical fiber bubble and fiber core mismatch by caustic solution
Mach-Zehnder interferometer, measures the change of environment liquid refractivity, but is making Mach-Zehnder with caustic solution
During interferometer, it is difficult to control its extent of corrosion, and the Fluohydric acid. used has extremely strong corrosivity, poisonous, makes
Dangerous property in；Open big superfine people and made diaphragm type EFPI, be used for vibration monitoring, utilize quartz diaphragm as sound wave coupling
The inverting element closed, it is achieved to the dynamic monitoring of local discharge signal in liquid-solid compound inslation medium, reflectance is 50%.
Chinese invention patent, grant number: CN 103335949 A, date of publication: 2013.10.02.Relate to optical fiber sensing technology
Field, disclose a kind of optical fiber EFPI sensor, be that the heat stability of existing EFPI Fibre Optical Sensor is the highest leads in order to solve
The degree of accuracy caused declines design.By the thermal coefficient of expansion of capillary tube is arranged between 0.25-0.99, it is achieved light line reflection
The compensation that capillary tube is expanded with heat and contract with cold by end, it also avoid overcompensation simultaneously.It is steady that this patent is merely intended to solve optical fiber EFPI heat
The highest fixed problem, does not relate to its sensitivity.
Summary of the invention
1. to solve the technical problem that
For the problem that EFPI transducer sensitivity in prior art is the highest, the invention provides a kind of highly sensitive light
Fine EFPI sensor and preparation method thereof.The sensor of the optical fiber EFPI that its remolding sensitivity is traditional is high, and ineffective to temperature
Quick, there is the function of temperature self-compensation, have a extensive future.
2. technical scheme
The purpose of the present invention is achieved through the following technical solutions:
A kind of highly sensitive optical fiber EFPI sensor, including capillary tube, single-mode fiber and reflectance coating, wherein, single-mode optics
It is each to there being one section of fibre core that fibre includes that incident optical and mirror based fiber optica, incident optical and mirror based fiber optica are positioned at one end of capillary tube
Between end face and the end face of fibre core II of I and fibre core II, fibre core I, gap is relative, on the end face of fibre core I and the end face of fibre core II all
It is provided with reflectance coating.Herein, the end face of fibre core I and the end face of fibre core II refer to end face and the fibre core II cross section of fibre core I cross section
End face.
Preferably, the surface of fibre core I and the surface of fibre core II are equipped with reflectance coating, and in EFPI sensor, light passes in a fiber
Sowing time, reflecting effect was more preferable, and the number of light beams on the one hand making reflection is many, and interference effect is obvious；On the other hand for solving EFPI light
Capillary tube outside fiber sensor expands with heat and contract with cold the temperature tender subject caused, and is reduced the impact of temperature by reflectance coating.Herein,
The surface of fibre core I and the surface of fibre core II refer to surface and the surface of fibre core II cylinder of fibre core I cylinder, corresponding
Ground, does not the most include end face and the end face of fibre core II cross section of above-described fibre core I cross section.
Preferably, the end face of fibre core I and the end face of fibre core II are all smooth.
Preferably, incident optical is cross section I with the end face of fibre core I joining place, mirror based fiber optica and fibre core II joining place
End face is cross section II, and cross section I and cross section II is equipped with reflectance coating.
Preferably, the surface of incident optical and the surface of mirror based fiber optica are equipped with reflectance coating.Temperature-compensating can be played
Effect.Herein, the surface of incident optical and the surface of mirror based fiber optica, accordingly, the most do not include cross section I and cross section II, be
Refer to surface and the surface of mirror based fiber optica cylinder of incident optical cylinder.
Preferably, the material of reflectance coating is porpezite, and reflectance coating is metal film, such as silverskin, and silverskin reflectance is high, but easily oxygen
Changing, unstable, porpezite film reflectance is only second to silverskin, but porpezite film is the most oxidizable, stable performance, and reflectance is 80%.
A kind of manufacture method of highly sensitive optical fiber EFPI sensor, step is:
A, work sheet mode fiber: remove on two single-mode fiber (corresponding to incident optical and mirror based fiber optica respectively) one end
Protective layer, coat and covering, cut flat with its end face, forms cross section I and cross section II, fibre core I and fibre core II, by fibre core I
Clean with fibre core II surface wipes；
Using wire stripper to remove protective layer, coat and covering, optical fiber is placed on above optical fiber cutter and end face is cut flat with.
B, plated film: on the end face of fibre core I and fibre core II, plate the reflectance coating that material is porpezite；
Using filming equipment HUMMER ion film plating instrument, Coating Materials is porpezite, and the reason selecting porpezite is owing to it has
Having high reflectance, the most oxidizable, easily with optical fiber adhesive bonding, the plated film time is 5min, and the plated film time is the longest, the thickness of reflectance coating
Spending the thickest, reflectance is the highest, diameter 235um after fibre core I and fibre core II plated film, and end face reflection rate is 80%.
C, selection capillary tube: select and plate the capillary tube that porpezite film single-mode fiber outside dimension matches；
Capillary tube is the thinnest, very hard, can keep level, and optical fiber can just be placed in capillary tube, and the specification of capillary tube is interior
Footpath 250um (matches with the diameter of the single-mode fiber after plated film), the external diameter 1mm of capillary tube, it is ensured that two optical fiber plating palladiums
The center of the end face of gold film can accurately be directed at；
D, alignment: by two plating porpezite films single-mode fiber end face (i.e. fibre core I and the end face of fibre core II) staggered relatively
In capillary tube, form F-P cavity；
E, adjustment F-P cavity are long: it is right that adjustment F-P cavity length (i.e. distance between the end face of fibre core I and fibre core II) in real time realizes
The regulation of sensor interferometer parameter, until meeting the required parameter set；
F, connect fixing to optical fiber and capillary tube in fixed point.
At two optical fiber away from end face about 10-15mm, i.e. coat AB glue on fixing point, by the optical fiber end of two plating porpezite films
Face is accurately directed at and lies in a horizontal plane in capillary tube, and AB glue good stability, adhesive ability is strong；Use the fixed form of AB glue, step F
Carrying out prior to step E, AB gelling needs 5min admittedly, and during this period, the chamber that can adjust F-P cavity is long；
Can also be to use electric arc welding or co2Laser instrument spot welding, identical with step E, when interference effect preferably time, determine
F-P cavity is long, no longer adjusts the distance between fibre core I and the end face of fibre core II, uses electric arc welding or co2Laser instrument spot welding is fixed
Point, is fixed together optical fiber and capillary tube.
Preferably, in step A, the length of fibre core I and fibre core II is 5-10mm；Fixing point and fibre core I and fibre in step D
The distance range of core II end face is 10-15mm, i.e. on the left of optical fiber EFPI sensor on incident optical, and fixing point and fibre core I end
The distance range in face is 10-15mm, on the right side of optical fiber EFPI sensor on mirror based fiber optica, and fixing point and the distance model of fibre core II end face
Enclose also for 10-15mm.This length determines the length of optical fiber EFPI sensor, and then influences whether optical fiber EFPI sensor
Measure sensitivity.Fixed point coating AB glue, its good stability, adhesive ability is strong.
Preferably, in step E, the outfan of light source is connected with the input of three-dB coupler, and one of three-dB coupler defeated
Going out to hold the one end outside being positioned at capillary tube with incident optical to be connected, another outfan of three-dB coupler is connected with spectrogrph.
Step E adjusts in real time the long d in chamber (i.e. distance between the end face of fibre core I and fibre core II) of F-P cavity realize right
The regulation of EFPI sensor interferometer parameter (the freest spectrum width FSR), until meeting the required parameter set (i.e. to meet interference effect
The most corresponding free spectrum width FSR scope).
Preferably, in step B, at incident optical and the surface of mirror based fiber optica, cross section I and cross section II, fibre core I and fibre
The reflectance coating that material is porpezite is the most all plated, it is possible to play the effect of temperature-compensating on the surface of core II.
3. beneficial effect
The technical scheme using the present invention to provide, compared with prior art, has the advantages that
(1) one of the present invention highly sensitive optical fiber EFPI sensor, by improving fiber end face reflectance, thus carries
The sensitivity of high optical fiber EFPI sensor, the reflectance of traditional optical fiber EFPI sensor only has 4%, and the present invention is fibre core I's
Being equipped with reflectance coating on the end face of end face and fibre core II, the optical fiber EFPI sensor reflectance after plating porpezite film is 80%；
(2) one of the present invention highly sensitive optical fiber EFPI sensor, simple in construction, is compared to other optical fiber EFPI
The manufacture method of sensor is easy；
(3) one of the present invention highly sensitive optical fiber EFPI sensor, the optical fiber EFPI sensor of proposition is because of its plated film
After, the optical fiber EFPI sensor reflectance after plating porpezite film improves, and then sensitivity significantly improves；
(4) one of the present invention highly sensitive optical fiber EFPI sensor, at the surface of incident optical and mirror based fiber optica
Surface is equipped with reflectance coating, it is possible to play the effect of temperature-compensating；
(5) one of the present invention highly sensitive optical fiber EFPI sensor, the material of reflectance coating is porpezite, and reflectance coating is gold
Belonging to film, such as silverskin, silverskin reflectance is high, but oxidizable, and unstable, porpezite film reflectance is only second to silverskin, but porpezite film is not
Oxidizable, stable performance, reflectance is 80%；
(6) one of the present invention highly sensitive optical fiber EFPI sensor, capillary tube is the thinnest, very hard, can keep level, light
Fibre can just be placed in capillary tube, and the specification of capillary tube is internal diameter 250um (the diameter phase with the single-mode fiber after plated film
Join), the external diameter 1mm of capillary tube, it is ensured that the center of the end face of two optical fiber plating porpezite films can accurately be directed at；
(7) in step D of the present invention, the distance range of fixing point and fibre core I and fibre core II end face is 10-15mm, i.e. light
On the left of fine EFPI sensor on incident optical, fixing point is 10-15mm with the distance range of fibre core I end face, and optical fiber EFPI senses
On the right side of device on mirror based fiber optica, fixing point is also 10-15mm with the distance range of fibre core II end face, and this length determines optical fiber
The length of EFPI sensor, and then influence whether the measurement sensitivity of optical fiber EFPI sensor；
(8) fixed point of the present invention coating AB glue, its good stability, adhesive ability is strong, adds this body structure of sensor
Steadiness.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of sensor of the invention；
Fig. 2 is the Making programme figure of sensor of the invention；
Fig. 3 is the monitoring schematic diagram that sensor of the invention adjusts in real time；
Fig. 4 is the relation of sensor of the invention lateral load and wavelength；
Fig. 5 is the relation of sensor of the invention change of cavity length and light intensity change；
Fig. 6 is that in prior art, reflectance is the lateral load relation with wavelength of the sensor of 4%；
Fig. 7 is that in prior art, reflectance is the change of cavity length relation with light intensity change of the sensor of 4%；
Fig. 8 is the temperature characterisitic of traditional E FPI sensor；
Fig. 9 is the temperature characterisitic of the plating porpezite film optical fiber EFPI sensor of the present invention.
Label declaration in figure:
101, incident optical；102, mirror based fiber optica；103, fibre core I；104, fibre core II；105, cross section I；106, cross section
II；2, reflectance coating；3, fixing point；4, capillary tube；5, light source；6, three-dB coupler；7, spectrogrph；8, plating porpezite film optical fiber EFPI.
Detailed description of the invention
For further appreciating that present disclosure, in conjunction with drawings and Examples, the present invention is described in detail.
A kind of highly sensitive optical fiber EFPI sensor, including capillary tube 4, single-mode fiber and reflectance coating 2, wherein, single mode
Optical fiber includes that incident optical 101 and mirror based fiber optica 102, incident optical 101 and mirror based fiber optica 102 are positioned at one end of capillary tube 4
Upper correspondence is respectively arranged with one section of fibre core I103 and fibre core II104, gap phase between end face and the end face of fibre core II104 of fibre core I103
Right, the end face of fibre core I103 and the end face of fibre core II104 are equipped with reflectance coating 2.
The surface of fibre core I103 and the surface of fibre core II104 are equipped with reflectance coating 2, and in EFPI sensor, light passes in a fiber
Sowing time, reflecting effect was more preferable.
The end face of fibre core I103 and the end face of fibre core II104 are all smooth, incident optical 101 and fibre core I103 joining place
End face be cross section I105, mirror based fiber optica 102 is cross section II106 with the end face of fibre core II104 joining place, cross section I105
Be equipped with reflectance coating 2 on the II106 of cross section.
The surface of incident optical 101 and the surface of mirror based fiber optica 102 are equipped with reflectance coating 2, it is possible to play temperature-compensating
Effect.
The material of reflectance coating 2 is porpezite, and reflectance coating 2 is metal film, such as silverskin, and silverskin reflectance is high, but oxidizable, no
Stable, porpezite film reflectance is only second to silverskin, but porpezite film is the most oxidizable, stable performance, and reflectance is 80%.
The manufacture method of a kind of highly sensitive optical fiber EFPI sensor, comprises the following steps:
A, work sheet mode fiber: remove two single-mode fibers (corresponding to incident optical 101 and mirror based fiber optica 102 respectively)
Protective layer, coat and covering on end, cuts flat with its end face, formed cross section I105 and cross section II106, fibre core I103 and
Fibre core II104, by clean to fibre core I103 and fibre core II104 surface wipes；
Using wire stripper to remove protective layer, coat and covering, optical fiber is placed on above optical fiber cutter and end face is cut flat with.
B, plated film: on the end face of fibre core I103 and fibre core II104, plate the reflectance coating 2 that material is porpezite；
Using filming equipment HUMMER ion film plating instrument, Coating Materials is porpezite, and the reason selecting porpezite is owing to it has
Having high reflectance, the most oxidizable, easily with optical fiber adhesive bonding, the plated film time is 5min, and the plated film time is the longest, reflectance coating 2
Thickness is the thickest, and reflectance is the highest, diameter 235um after fibre core I103 and fibre core II104 plated film, and end face reflection rate is 80%.
C, selection capillary tube 4: select and plate the capillary tube 4 that porpezite film single-mode fiber outside dimension matches；
Capillary tube 4 is the thinnest, very hard, can keep level, and optical fiber can just be placed in capillary tube 4, and the specification of capillary tube 4 is
Internal diameter 250um (matches with the diameter of the single-mode fiber after plated film), the external diameter 1mm of capillary tube 4, it is ensured that two optical fiber platings
The center of the end face of porpezite film can accurately be directed at；
D, alignment: by relative for the single-mode fiber end face (i.e. fibre core I103 and the end face of fibre core II104) of two plating porpezite films
It is placed in capillary tube 4, forms F-P cavity；
E, adjustment F-P cavity are long: adjust F-P cavity length (i.e. distance between the end face of fibre core I103 and fibre core II104) in real time
Realize the regulation to sensor interferometer parameter, until meeting the required parameter set；
F, connect fixing to optical fiber and capillary tube 4 at fixing point 3.
At two optical fiber away from end face about 14mm, i.e. coat AB glue on fixing point 3, by the fiber end face of two plating porpezite films
Accurately alignment lies in a horizontal plane in capillary tube 4, and AB glue good stability, adhesive ability is strong；Use the fixed form of AB glue, step F
Carrying out prior to step E, AB gelling needs 5min admittedly, and during this period, the chamber that can adjust F-P cavity is long；
Can also be to use electric arc welding or co2Laser instrument spot welding, identical with step E, when interference effect preferably time, determine
F-P cavity is long, no longer adjusts the distance between fibre core I103 and the end face of fibre core II104, uses electric arc welding or co2Laser instrument point
Solid welding fixed point 3, is fixed together optical fiber and capillary tube 4.
In step A, the length of fibre core I103 and fibre core II104 is 8mm；Fixing point 3 and fibre core I103 and fibre in step D
The distance range of core II104 end face is 14mm.This length determines the length of EFPI sensor, and then influences whether optical fiber
The measurement sensitivity of EFPI sensor.Coating AB glue at fixing point 3, its good stability, adhesive ability is strong.
In step E, the outfan of light source 5 is connected with the input of three-dB coupler 6, an outfan of three-dB coupler 6
One end outside being positioned at capillary tube 4 with incident optical 101 is connected, and another outfan of three-dB coupler 6 is connected with spectrogrph 7.
Incident optical 101 is positioned at the one end outside capillary tube 4, and correspondence is in Fig. 3, the input of plating porpezite film optical fiber EFPI8
End.
In step E, when two bundle reflection interference of light phase placesMeet following condition, i.e. during interference signal light intensity I=0,
Now in spectrum, free spectrum width FSR is:
Wherein, d is that the chamber of EFPI sensor F-P cavity is long, by above formula it is recognised that the interferometric phase of interference signalAnd
All long with the F-P cavity d of free spectrum width FSR of spectrum is relevant.
When medium refraction index n and incident wavelength λ, (incident wavelength λ does not has special requirement, and it is mainly by the ripple of light source 5
Long scope determines) fixing time, free spectrum width FSR d long with the chamber of F-P cavity becomes fixed proportion, refractive index n=1 of the present embodiment,
The i.e. refractive index of air, incident wavelength λ=1527.34nm, refer to the distance between two adjacent interference peaks, as long as observing freely
The value of spectrum width FSR i.e. can determine that the chamber of F-P cavity is long, and corresponding free spectrum width FSR scope is 3-8nm, and interference effect is best.
That is, step E adjusts the long d in chamber (i.e. distance between the end face of fibre core I103 and fibre core II104) of F-P cavity in real time
Realizing the regulation to EFPI sensor interferometer parameter (the freest spectrum width FSR), (i.e. meeting dry until meeting the required parameter set
Relate to the free spectrum width FSR scope that effect is preferably corresponding).
In step B, at incident optical 101 and the surface of mirror based fiber optica 102, cross section I105 and cross section II106, fibre core
The reflectance coating 2 that material is porpezite is the most all plated, it is possible to play the effect of temperature-compensating on the surface of I103 and fibre core II104.
Embodiment 1
In conjunction with Fig. 1, a kind of highly sensitive optical fiber EFPI sensor, including capillary tube 4, single-mode fiber and reflectance coating 2, its
In, single-mode fiber includes that incident optical 101 and mirror based fiber optica 102, incident optical 101 and mirror based fiber optica 102 are positioned at capillary tube 4
One end on correspondence be respectively arranged with one section of fibre core I103 and fibre core II104, between end face and the end face of fibre core II104 of fibre core I103 between
Gap is relative, and the end face of fibre core I103 and the end face of fibre core II104 are equipped with reflectance coating 2.
Embodiment 2
The present embodiment is similar to Example 1, and wherein difference is, the surface of fibre core I103 and the table of fibre core II104
Face is equipped with reflectance coating 2, and when in EFPI sensor, light is propagated in a fiber, reflecting effect is more preferable.
Embodiment 3
The present embodiment is similar with any one technical scheme in embodiment 1-2, and wherein difference is, the end of fibre core I103
The end face of face and fibre core II104 is all smooth, and incident optical 101 is cross section I105 with the end face of fibre core I103 joining place,
Mirror based fiber optica 102 is cross section II106 with the end face of fibre core II104 joining place, and cross section I105 and cross section II106 is all provided with
There is reflectance coating 2.
Embodiment 4
The present embodiment is similar with any one technical scheme in embodiment 1-3, and wherein difference is, incident optical 101
Surface and the surface of mirror based fiber optica 102 be equipped with reflectance coating 2, it is possible to play the effect of temperature-compensating.
Embodiment 5
The present embodiment is similar with any one technical scheme in embodiment 1-4, and wherein difference is, reflectance coating 2 is gold
Belonging to film, in the present embodiment, the material of reflectance coating 2 is porpezite, can also be such as silverskin, and silverskin reflectance is high, but oxidizable, no
Stable, porpezite film reflectance is only second to silverskin, and porpezite film is the most oxidizable, stable performance, and reflectance is 80%.
Embodiment 6
One highly sensitive optical fiber EFPI sensor in the present embodiment, with any one technical scheme in embodiment 1-5
Similar, in conjunction with Fig. 2, the manufacture method of a kind of highly sensitive optical fiber EFPI sensor, comprise the following steps:
A, work sheet mode fiber: remove two single-mode fibers (corresponding to incident optical 101 and mirror based fiber optica 102 respectively)
Protective layer, coat and covering on end, cuts flat with its end face, formed cross section I105 and cross section II106, fibre core I103 and
Fibre core II104, by clean to fibre core I103 and fibre core II104 surface wipes；
Using wire stripper to remove protective layer, coat and covering, optical fiber is placed on above optical fiber cutter and end face is cut flat with.
B, plated film: on the end face of fibre core I103 and fibre core II104, plate the reflectance coating 2 that material is porpezite；
Using filming equipment HUMMER ion film plating instrument, Coating Materials is porpezite, and the reason selecting porpezite is owing to it has
Having high reflectance, the most oxidizable, easily with optical fiber adhesive bonding, the plated film time is 5min, and the plated film time is the longest, reflectance coating 2
Thickness is the thickest, and reflectance is the highest, diameter 235um after fibre core I103 and fibre core II104 plated film, and end face reflection rate is 80%.
C, selection capillary tube 4: select and plate the capillary tube 4 that porpezite film single-mode fiber outside dimension matches；
Capillary tube 4 is the thinnest, very hard, can keep level, and optical fiber can just be placed in capillary tube 4, and the specification of capillary tube 4 is
Internal diameter 250um (matches with the diameter of the single-mode fiber after plated film), the external diameter 1mm of capillary tube 4, it is ensured that two optical fiber platings
The center of the end face of porpezite film can accurately be directed at；
D, alignment: by relative for the single-mode fiber end face (i.e. fibre core I103 and the end face of fibre core II104) of two plating porpezite films
It is placed in capillary tube 4, forms F-P cavity；
E, adjustment F-P cavity are long: adjust F-P cavity length (i.e. distance between the end face of fibre core I103 and fibre core II104) in real time
Realize the regulation to sensor interferometer parameter, until meeting the required parameter set；
F, connect fixing to optical fiber and capillary tube 4 at fixing point 3.
At two optical fiber away from end face about 10-15mm, i.e. coat AB glue on fixing point 3, by the optical fiber of two plating porpezite films
End face is accurately directed at and lies in a horizontal plane in capillary tube 4, and AB glue good stability, adhesive ability is strong；Use the fixed form of AB glue, step
Rapid F is carried out prior to step E, and AB gelling needs 5min admittedly, and during this period, the chamber that can adjust F-P cavity is long；
Can also be to use electric arc welding or co2Laser instrument spot welding, identical with step E, when interference effect preferably time, determine
F-P cavity is long, no longer adjusts the distance between fibre core I103 and the end face of fibre core II104, uses electric arc welding or co2Laser instrument point
Solid welding fixed point 3, is fixed together optical fiber and capillary tube 4.
In step A, the length of fibre core I103 and fibre core II104 is 5-10m；In the present embodiment, fibre core I103 and fibre core
The length of II104 may select the numerical value such as 5mm, 7mm, 10mm, fixing point 3 and fibre core I103 and fibre core II104 end face in step D
Distance range is 10-15mm, may be selected to be the numerical value such as 10mm, 13mm, 15mm in the present embodiment.This length determines optical fiber
The length of EFPI sensor, affects the sensitivity of optical fiber EFPI sensor, can shadow if having leaned on fibre core I103 and fibre core II104 the nearest
Ring the change of the long d of F-P cavity.Coating AB glue at fixing point 3, its good stability, adhesive ability is strong.
In step E, the outfan of light source 5 is connected with the input of three-dB coupler 6, an outfan of three-dB coupler 6
One end outside being positioned at capillary tube 4 with incident optical 101 is connected, and another outfan of three-dB coupler 6 is connected with spectrogrph 7.
Incident optical 101 is positioned at the one end outside capillary tube 4, and correspondence is to plate the input of porpezite film optical fiber EFPI8 in Fig. 3
End.
In step E, when two bundle reflection interference of light phase placesMeet following condition, i.e. during interference signal light intensity I=0,
Now in spectrum, free spectrum width FSR is:
Wherein, d is that the chamber of EFPI sensor F-P cavity is long, by above formula it is recognised that the interferometric phase of interference signalAnd
All long with the F-P cavity d of free spectrum width FSR of spectrum is relevant.
When medium refraction index n and incident wavelength λ, (incident wavelength λ does not has special requirement, and it is mainly by the ripple of light source 5
Long scope determines) fixing time, free spectrum width FSR d long with the chamber of F-P cavity becomes fixed proportion, refractive index n=1 of the present invention, i.e.
The refractive index of air, incident wavelength λ=1527.34nm, referring to the distance between two adjacent interference peaks, freely composing as long as observing
The value of wide FSR i.e. can determine that the long d in chamber of F-P cavity, corresponding free spectrum width FSR scope be this scope of 3-8nm be by reality
Test what the effect of middle viewing interference spectrum obtained, interference effect preferably time, corresponding free spectrum width FSR scope.
That is, step E adjusts the long d in chamber (i.e. distance between the end face of fibre core I103 and fibre core II104) of F-P cavity in real time
Realizing the regulation to EFPI sensor interferometer parameter (the freest spectrum width FSR), (i.e. meeting dry until meeting the required parameter set
Relate to the free spectrum width FSR scope that effect is preferably corresponding).
In step B, at incident optical 101 and the surface of mirror based fiber optica 102, cross section I105 and cross section II106, fibre core
The reflectance coating 2 that material is porpezite is the most all plated, it is possible to play the effect of temperature-compensating on the surface of I103 and fibre core II104.
Embodiment 7
One highly sensitive optical fiber EFPI sensor in the present embodiment, with any one technical scheme in embodiment 1-5
Identical, the manufacture method of a kind of highly sensitive optical fiber EFPI sensor in the present embodiment, same as in Example 6.
The sensitivity of EFPI:
Generally short cavity, the interference fringe of high-fineness, corresponding optical fiber EFPI sensor has high measurement sensitivity,
That is, the sensitivity of optical fiber EFPI sensor is relevant with the fineness of the chamber length of optical fiber EFPI and interference fringe；
1, the chamber length of EFPI and the sensitivity relation of EFPI:
In the case of the fineness of interference fringe is constant, when two bundle reflection interference of light phase placesMeet following condition,
I.e. during interference signal light intensity I=0,
Now in spectrum, free spectrum width FSR is:
Wherein, d is that the F-P cavity of optical fiber EFPI sensor is long, by above formula it is recognised that work as medium refraction index n and incidence wave
When long λ (incident wavelength λ does not has special requirement, and it is mainly determined by the wave-length coverage of light source 5) is fixing, interference signal
Interferometric phaseD all long with F-P cavity with the free spectrum width FSR of spectrum is relevant, i.e. the free spectrum width FSR d long with F-P cavity of spectrum becomes
Inverse ratio, when interference effect preferably time a corresponding spectrum free spectrum width FSR scope, in this range, the free spectrum width of spectrum
When FSR selects maximum, corresponding F-P cavity length is the shortest, i.e. on the premise of the fineness of interference fringe is constant, at interference effect
Time preferably, the F-P cavity length of optical fiber EFPI sensor is the shortest, and the sensitivity of optical fiber EFPI sensor is the highest.
2, the fineness of interference fringe and the sensitivity relation of EFPI:
On the premise of the long d of F-P cavity of optical fiber EFPI sensor is fixing, the fineness of discussion below interference fringe and optical fiber
The fineness of the sensitivity relation interference fringe of EFPI sensor and the sensitivity relation of optical fiber EFPI sensor, interference fringe
Fineness, it is simply that bright and sharp degree F of interference fringe, refers to phase contrast 2 π between adjacent two stripe and the phase width of interference fringe
The ratio of Δ δ represents:
Wherein, the phase width Δ δ of interference fringe is equal to phase contrast (the phase bit wide of the point-to-point transmission of interference fringe peak value half
Degree),
Wherein, R is end face reflection rate, then bright and sharp degree F of interference fringe is:
Bright and sharp degree F of interference fringe increases along with the increase of end face reflection rate R, i.e. end face reflection rate R is the biggest, interferes
The fineness of striped is the highest, then the sensitivity of optical fiber EFPI sensor is the highest.
In the present invention, end face reflection rate R of optical fiber EFPI sensor is 80%, improves reflectance R, and then improves dry
Relate to bright and sharp degree F of striped, the F-P cavity length of the optical fiber EFPI sensor of selection, thus there is high sensitivity.
Embodiment 8
One highly sensitive optical fiber EFPI sensor in the present embodiment, with any one technical scheme in embodiment 1-5
Similar, the manufacture method of a kind of highly sensitive optical fiber EFPI sensor in the present embodiment, similar to Example 6.
A kind of highly sensitive optical fiber EFPI sensor of the present invention and traditional optical fiber EFPI sensor is utilized to carry out right
Than test, the advantage of the optical fiber EFPI sensor of the checking present invention.The lateral load of both the above sensor is studied,
In test, the long d in chamber being coated with porpezite film reflection end face EFPI sensor is 323 μm, a length of 309 μ in chamber of traditional E FPI sensor
M, a length of 50mm, the EFPI sensor length (being the distance between the fixing point 3 on two single-mode fibers in left and right) of capillary tube 4
L=30mm.
In conjunction with Fig. 4-7, the optical fiber EFPI sensor of plating porpezite film has the reflectance of 80% due to end face, and its wavelength is to horizontal stroke
Sensitivity to load can reach 40.83pm/g, and relative to traditional optical fiber EFPI sensor, end face reflection rate is 4%, wavelength
Sensitivity to lateral load is 19.46pm/g, and sensitivity improves 2.10 times；Additionally, the optical fiber EFPI sensing of plating porpezite film
The sensitivity of lateral load is significantly improved by the optical fiber EFPI sensor light intensity that the beam intensity ratio of device is traditional, Qian Zhewei
13.42count/g, and the latter is 1.9count/g.
It addition, the strain temperature cross sensitivity problem of the high sensitivity optical fiber EFPI sensor in order to study the present invention, right
High sensitivity EFPI and traditional EFPI of the present invention have done temperature experiment, and experimental result is as Figure 8-9.
From Fig. 8-9, the sensitivity of the wavelength versus temperature of traditional optical fiber EFPI sensor is 51.87pm/ DEG C, and
The wavelength versus temperature sensitivity of plating porpezite film optical fiber EFPI sensor is only 0.7769pm/ DEG C, is held essentially constant.
From lateral load and temperature comparisons's test of the optical fiber EFPI sensor to traditional and plating porpezite film, plate porpezite
The sensitivity of the optical fiber EFPI of film is substantially high than traditional, and has the function of temperature self-compensation so that the one of the present invention
Highly sensitive EFPI has good future in fiber optic applications field.
Schematically being described the present invention and embodiment thereof above, this description does not has restricted, institute in accompanying drawing
Show is also one of embodiments of the present invention, and actual structure is not limited thereto.So, if the common skill of this area
Art personnel enlightened by it, in the case of without departing from the invention objective, designs and this technical scheme without creative
Similar frame mode and embodiment, all should belong to protection scope of the present invention.
Claims (10)
1. a highly sensitive optical fiber EFPI sensor, including capillary tube (4), it is characterised in that also include single-mode fiber and
Reflectance coating (2), wherein, single-mode fiber includes incident optical (101) and mirror based fiber optica (102), incident optical (101) and reflection light
One end that fine (102) are positioned at capillary tube (4) is each to having one section of fibre core I (103) and fibre core II (104), fibre core I's (103)
Between the end face of end face and fibre core II (104), gap is relative, and the end face of fibre core I (103) and the end face of fibre core II (104) are all provided with
There is reflectance coating (2).
One the most according to claim 1 highly sensitive optical fiber EFPI sensor, it is characterised in that fibre core I's (103)
The surface of surface and fibre core II (104) is equipped with reflectance coating (2).
One the most according to claim 1 highly sensitive optical fiber EFPI sensor, it is characterised in that fibre core I's (103)
The end face of end face and fibre core II (104) is all smooth.
One the most according to claim 1 highly sensitive optical fiber EFPI sensor, it is characterised in that incident optical
(101) end face with fibre core I (103) joining place is cross section I (105), mirror based fiber optica (102) and fibre core II (104) joining place
End face be cross section II (106), cross section I (105) and cross section II (106) is equipped with reflectance coating (2).
One the most according to claim 1 highly sensitive optical fiber EFPI sensor, it is characterised in that incident optical
(101) surface and the surface of mirror based fiber optica (102) are equipped with reflectance coating (2).
6. according to the one highly sensitive optical fiber EFPI sensor described in claim 1-5 any one, it is characterised in that anti-
The material penetrating film (2) is porpezite.
7. the manufacture method of a highly sensitive optical fiber EFPI sensor, it is characterised in that comprise the following steps:
A, work sheet mode fiber: remove two single-mode fibers (corresponding to incident optical (101) and mirror based fiber optica (102) respectively)
Protective layer, coat and covering on end, cuts flat with its end face, forms cross section I (105) and cross section II (106), fibre core I
(103) and fibre core II (104), by clean to fibre core I (103) and fibre core II (104) surface wipes；
B, plated film: on the end face of fibre core I (103) and fibre core II (104), plate the reflectance coating (2) that material is porpezite；
C, selection capillary tube (4): select and plate the capillary tube (4) that porpezite film single-mode fiber outside dimension matches；
D, alignment: by staggered relatively in capillary tube (4) for the single-mode fiber end face of two plating porpezite films, form F-P cavity；
E, adjustment F-P cavity are long: adjustment F-P cavity length realizes the regulation to sensor interferometer parameter in real time, until satisfied required setting
Parameter；
F, connect fixing to optical fiber and capillary tube (4) at fixing point (3) place.
The manufacture method of a kind of highly sensitive optical fiber EFPI sensor the most according to claim 7, it is characterised in that step
In rapid A, the length of fibre core I (103) and fibre core II (104) is 5-10mm；In step D fixing point (3) and fibre core I (103) and
The distance range of fibre core II (104) end face is 10-15mm.
The manufacture method of a kind of highly sensitive optical fiber EFPI sensor the most according to claim 7, it is characterised in that step
In rapid E, the outfan of light source (5) is connected with the input of three-dB coupler (6), an outfan of three-dB coupler (6) with enter
Penetrate optical fiber (101) and be positioned at one end connection that capillary tube (4) is outside, another outfan of three-dB coupler (6) and spectrogrph (7)
Connect.
The manufacture method of a kind of highly sensitive optical fiber EFPI sensor the most according to claim 7, it is characterised in that
In step B, at incident optical (101) and the surface of mirror based fiber optica (102), cross section I (105) and cross section II (106), fibre core
The reflectance coating (2) that material is porpezite is the most all plated on the surface of I (103) and fibre core II (104).
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| CN106442364A (en) * | 2016-11-29 | 2017-02-22 | 中国计量大学 | Concentration sensor based on F-P (fabry-perot) cavity formed by optical fiber end face coating |
| CN106645029A (en) * | 2016-12-07 | 2017-05-10 | 大连理工大学 | Weld type open-cavity optical fiber EFPI (extrinsic Farby-Perot interferometric) refractive index sensor |
| CN108413995A (en) * | 2018-02-11 | 2018-08-17 | 华北电力大学 | Micro-nano optical fiber EFPI sensors F-P cavity system makees device and method |
| CN108731840A (en) * | 2018-05-23 | 2018-11-02 | 北京东方锐择科技有限公司 | Fiber optic temperature and pressure sensor of double cavity structure and preparation method thereof |
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| CN112556595A (en) * | 2020-12-01 | 2021-03-26 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
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| CN106442364B (en) * | 2016-11-29 | 2023-04-18 | 中国计量大学 | Concentration sensor based on F-P cavity formed by coating film on end face of optical fiber |
| CN106645029A (en) * | 2016-12-07 | 2017-05-10 | 大连理工大学 | Weld type open-cavity optical fiber EFPI (extrinsic Farby-Perot interferometric) refractive index sensor |
| CN108413995A (en) * | 2018-02-11 | 2018-08-17 | 华北电力大学 | Micro-nano optical fiber EFPI sensors F-P cavity system makees device and method |
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| CN110231104A (en) * | 2019-06-03 | 2019-09-13 | 南昌大学 | It is a kind of based on the F-P High-termperature Optical Fiber Sensor and preparation method thereof being electroplated in situ |
| CN111044137A (en) * | 2019-09-10 | 2020-04-21 | 天津大学 | Optical fiber acoustic vibration sensor based on gold-plated vibration film and manufacturing method thereof |
| CN111175899A (en) * | 2019-11-28 | 2020-05-19 | 天津大学 | Single-core disturbance sensor and manufacturing method thereof |
| CN111272092A (en) * | 2020-03-16 | 2020-06-12 | 云南电网有限责任公司电力科学研究院 | Optical fiber strain sensor based on corrugated pipe spring structure and preparation method thereof |
| CN111578973A (en) * | 2020-05-25 | 2020-08-25 | 重庆冠雁科技有限公司 | Method for manufacturing Fabry-Perot sensor by using capillary tube |
| CN112556595A (en) * | 2020-12-01 | 2021-03-26 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN112556595B (en) * | 2020-12-01 | 2022-04-15 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN113064030A (en) * | 2021-03-16 | 2021-07-02 | 华北电力大学 | Optical fiber EFPI sensor, manufacturing method and measuring system |
| CN116256861A (en) * | 2023-05-09 | 2023-06-13 | 山东省科学院激光研究所 | Optical fiber F-P cavity temperature sensor and packaging protection structure |
| CN116256861B (en) * | 2023-05-09 | 2023-07-18 | 山东省科学院激光研究所 | Optical fiber F-P cavity temperature sensor and packaging protection structure |
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Application publication date: 20161116 |