CN111337060A - Hybrid sensor based on vernier effect of parallel structure and manufacturing method thereof - Google Patents
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Abstract
The invention discloses a hybrid sensor based on a vernier effect of a parallel structure and a manufacturing method thereof, and the hybrid sensor comprises a Michelson interferometer and a Fabry-Perot interferometer which are arranged in parallel, wherein the Michelson interferometer comprises a single-mode fiber a, a spherical structure and a special fiber PCF which are sequentially arranged along the fiber transmission direction, one end of the single-mode fiber a is fixedly connected with one side of the spherical structure, the other side of the spherical structure is fixedly connected with one end of the special fiber PCF, the Fabry-Perot interferometer comprises a single-mode fiber b, a silica micro-tube b and a single-mode fiber c which are sequentially arranged along the fiber transmission direction, one end of the single-mode fiber b is fixedly connected with one end of the silica micro-tube b, and the other end of the silica micro-tube b is fixedly connected with one end. The invention has the advantages of simple structure and manufacture, high sensitivity, high stability, low temperature cross sensitivity and the like.
Description
Technical Field
The invention relates to a sensor and a manufacturing method thereof, in particular to a hybrid sensor based on a vernier effect of a parallel structure and a manufacturing method thereof, belonging to the field of optical fiber sensors.
Background
The optical fiber sensor is paid much attention due to the advantages of low transmission loss, corrosion resistance, large dynamic measurement range, electromagnetic interference resistance and the like, is widely applied to bridge health monitoring, metallurgy, aerospace and military, and particularly has great advantages in sensing of inflammable, explosive and strong electromagnetic interference environments. Due to their unique advantages, they can measure a wide variety of physical quantities, such as: temperature, refractive index, strain, humidity, etc. Where temperature and refractive index play an important role in the sensing field.
The fiber Michelson interferometer sensor is a very classical fiber interferometer sensor designed based on the principle of Michelson interferometer, and belongs to a double-beam or multi-beam reflective interferometer. Photonic crystal fibers have attracted more and more attention in the field of optical fibers due to their characteristics of high birefringence, high nonlinearity, no-cutoff single-mode transmission, and the like. The optical fiber Fabry-Perot interferometer is a multi-beam reflection type sensor, mainly composed of two parallel reflection surfaces with high reflectivity in a cavity. Compared with an optical fiber transmission type interferometer and an optical fiber reflection type interferometer, the optical fiber transmission type interferometer has the advantage of being simpler and more convenient to apply. Vernier effect was originally used in vernier calipers to improve the accuracy of length measurement, but nowadays it is also increasingly used in the field of optical fiber sensing to improve the sensitivity of the sensor. By tracking the large envelope signal formed by the two superimposed signals, the sensitivity of the sensor can be greatly improved compared to a sensor that uses no vernier effect alone. However, most of the vernier effects reported at present are series structures and have problems of temperature cross sensitivity, complex structure manufacturing and the like.
Disclosure of Invention
The invention aims to provide a hybrid sensor based on a vernier effect of a parallel structure and a manufacturing method thereof, and the hybrid sensor is simple to manufacture and high in sensitivity.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a hybrid sensor based on vernier effect of parallel structure is characterized in that: the optical fiber transmission system comprises a Michelson interferometer and a Fabry-Perot interferometer which are arranged in parallel, wherein the Michelson interferometer comprises a single-mode optical fiber a, a spherical structure and a special optical fiber PCF which are sequentially arranged along an optical fiber transmission direction, one end of the single-mode optical fiber a is fixedly connected with one side of the spherical structure, the other side of the spherical structure is fixedly connected with one end of the special optical fiber PCF, the Fabry-Perot interferometer comprises a single-mode optical fiber b, a silica micro-tube b and a single-mode optical fiber c which are sequentially arranged along the optical fiber transmission direction, one end of the single-mode optical fiber b is fixedly connected with one end of the silica micro-tube b, and the other end of the silica micro-tube.
Further, the Michelson interferometer and the Fabry-Perot interferometer are connected in parallel by a coupler.
Furthermore, the Michelson interferometer also comprises a silica micro tube a, and one end of the silica micro tube a is sleeved outside the other end of the special optical fiber PCF and is fixedly connected with the other end of the special optical fiber PCF.
Further, the Michelson interferometer is a sensing part of the sensor, and the interference intensity is expressed as follows:
wherein, I1And I2The intensity of the core and cladding modes, respectively, λ is the wavelength in vacuum, L11.8cm is the cavity length of the Michelson interferometer, △ neffIs the effective index difference between the core and cladding modes.
Further, the Fabry-Perot interferometer is a reference part of the sensor, and its interference intensity is expressed as follows:
wherein, I3And I4The light intensity reflected by the two ends of the silicon dioxide micropipe b and the interface of the single-mode fiber b and the single-mode fiber c respectively, lambda is the wavelength in vacuum, and L2120 μm is the cavity length of the Fabry-Perot interferometer and n is the refractive index of the air in the microtube.
Further, the output light intensity of the Michelson interferometer and the Fabry-Perot interferometer after being connected in parallel is
I＝IS+IR(3)
Thus, the free spectral range FSR of the two interferometer interference lines can be expressed as:
the vernier effect needs small difference of free spectral range between two parallel sensors; it can be known from equations (4) and (5) that the change in FSR can be achieved by changing the cavity length of the two interferometric sensors;
the total output spectrum of two sensors with similar FSRs after being connected in parallel is the result of the joint action of two single sensors, and the output spectrum obtained after the parallel connection can generate a large envelope, and the free spectral range of the large envelope can be expressed as follows:
sensitivity amplification can be achieved by tracking the valley data of this large envelope instead of the valley data of the individual sensing lines by the following amplification factors:
a method for manufacturing a hybrid sensor based on a vernier effect of a parallel structure is characterized by comprising the following steps:
the method comprises the following steps: manufacturing a Michelson interferometer, manufacturing a spherical structure, and then sequentially splicing the special optical fiber PCF and the silicon dioxide micro-tube a on two sides of the spherical structure;
step two: manufacturing a Fabry-Perot interferometer, welding one end of a single-mode optical fiber b and one end of a silicon dioxide micro-tube b, finding a welding point to rotate a horizontal shaft of an optical fiber adjusting frame with the help of an industrial microscope to cut the required length of the micro-tube, and finally welding the other end of the silicon dioxide micro-tube b and the single-mode optical fiber c;
step three: the Michelson interferometer and the Fabry-Perot interferometer were placed in parallel.
Further, in the first step, the manufacturing process of the spherical structure comprises the steps of firstly peeling off a coating layer at a position 2cm away from the end face of a single-mode optical fiber by using an optical fiber clamp, dipping cotton in alcohol to clean the coating layer, then cutting the end face by using an optical fiber cutter, flatly placing the end face into one end of a welding machine, setting appropriate parameters, then discharging, and finishing the manufacturing of the spherical structure after discharging for several times.
And further, the second step is to firstly put one end of the cut single-mode optical fiber b and one end of the silica micro-tube b into two ends of a welding machine in sequence and then adopt an automatic mode for welding after setting appropriate parameters, then find out a welding point with the help of an industrial microscope and rotate the horizontal shaft of the optical fiber adjusting frame to cut the required length of the micro-tube, and finally put one end of the cut single-mode optical fiber c and the other end of the silica micro-tube b into two ends of the welding machine and set appropriate parameters and then adopt an automatic mode for welding.
Compared with the prior art, the invention has the following advantages and effects: the sensor has the advantages of simple structure and manufacture, high sensitivity, high stability, low temperature cross sensitivity and the like. By introducing a new structure tracking vernier effect into the optical fiber sensing system, the sensitivity and the stability of the sensing system can be greatly improved. The sensor achieves vernier effect through the parallel Michelson interferometer and the Fabry-Perot interferometer, and therefore the sensitivity of the sensor is amplified. The invention can well improve the stability of the sensing system through the parallel structure, can well sense the liquid refractive index and protect the end surface of the optical fiber from being interfered by the external environment based on the photonic crystal fiber Michelson interferometer sensor, and can well improve the sensitivity of the sensing system by tracking the envelope of the superposed signal.
Drawings
FIG. 1 is a schematic diagram of a Michelson interferometer of a hybrid sensor based on the parallel structure vernier effect of the present invention.
FIG. 2 is a schematic diagram of a parallel configuration vernier effect based hybrid sensor Fabry-Perot interferometer of the present invention.
Fig. 3 is a schematic diagram of the hybrid sensor based on the vernier effect of the parallel structure of the present invention.
Detailed Description
The present invention is further illustrated by the following examples, which are illustrative of the present invention and are not to be construed as being limited thereto.
As shown in fig. 1 and fig. 2, the hybrid sensor based on the vernier effect of the parallel structure of the present invention includes a Michelson interferometer and a Fabry-Perot interferometer, which are arranged in parallel, the Michelson interferometer includes a single-mode fiber a1, a spherical structure 2, a special fiber PCF3 and a silica micro tube a4, which are sequentially arranged along a fiber transmission direction, one end of the single-mode fiber a1 is fixedly connected with one side of the spherical structure 2, the other side of the spherical structure 2 is fixedly connected with one end of the special fiber PCF3, and one end of the silica micro tube a4 is sleeved outside the other end of the special fiber PCF3 and is fixedly connected with the other end of the special fiber PCF 3. The Fabry-Perot interferometer works on the principle that: when the incident light is transmitted along the fiber core of the single-mode fiber a1 and meets the spherical structure 2, due to the mismatch of the mode fields, a part of light in the fiber core can be coupled into the cladding for transmission, because the light in the fiber core and the cladding, which is reflected by the fresnel reflection, can be reflected back at the end of the special fiber PCF3, and because the refractive indexes of the two light transmission paths are different, when the two light beams meet again, a certain phase difference exists to generate interference.
The Fabry-Perot interferometer comprises a single-mode fiber b5, a silicon dioxide micro tube b6 and a single-mode fiber c7 which are sequentially arranged along the fiber transmission direction, wherein one end of the single-mode fiber b5 is fixedly connected with one end of the silicon dioxide micro tube b6, and the other end of the silicon dioxide micro tube b6 is fixedly connected with one end of the single-mode fiber c 7. The Fabry-Perot interferometer works on the principle that: when the incident light propagates along the core of the single-mode fiber b5, fresnel reflection occurs at the interface between the two ends of the silica microtube b6 and the single-mode fiber b5 and the single-mode fiber c7 due to the difference of medium refractive index, and interference occurs when the reflected light beams converge again at the single-mode fiber b 5.
The Michelson interferometer 8 and the Fabry-Perot interferometer 9 are connected in parallel by a coupler 10, as shown in fig. 3, and both the Michelson interferometer 8 and the Fabry-Perot interferometer 9 are reflective sensors, so that only one port thereof is active, which we refer to as the active port. The working ends of the Michelson interferometer 8 and the Fabry-Perot interferometer 9 are connected with one end of the same coupler 10 through optical fibers, and the other end of the coupler 10 is respectively connected with a light source 11 and a spectrum analyzer 12. Light from a light source 11 passes through a coupler 10 and is transmitted into a Michelson interferometer 8 and a Fabry-Perot interferometer 9, respectively, both of which are reflective, and the reflected spectra of both of which are received by a spectrum analyzer 12 through the coupler 10. The sensing part is separated from the reference part, and in the practical application of the sensor, the sensing part is placed in the sensing environment, and the reference part is not placed in the sensing environment. Compared with a series structure, the parallel structure reduces the influence of external interference on the sensing performance, improves the stability of the system and is convenient to manage.
The Michelson interferometer is the sensing portion of the sensor, and its interference intensity is expressed as follows:
wherein, I1And I2The intensity of the core and cladding modes, respectively, λ is the wavelength in vacuum, L11.8cm is the cavity length of the Michelson interferometer, △ neffIs the effective index difference between the core and cladding modes.
The Fabry-Perot interferometer is the reference part of the sensor, and its interference intensity is expressed as follows:
wherein, I3And I4The light intensity reflected by the two ends of the silicon dioxide micropipe b and the interface of the single-mode fiber b and the single-mode fiber c respectively, lambda is the wavelength in vacuum, and L2120 μm is the cavity length of the Fabry-Perot interferometer and n is the refractive index of the air in the microtube.
The output light intensity of the Michelson interferometer and the Fabry-Perot interferometer after being connected in parallel is
I＝IS+IR(3)
Thus, the free spectral range FSR of the two interferometer interference lines can be expressed as:
the vernier effect needs small difference of free spectral range between two parallel sensors; it can be known from equations (4) and (5) that the change in FSR can be achieved by changing the cavity length of the two interferometric sensors;
the total output spectrum of two sensors with similar FSRs after being connected in parallel is the result of the joint action of two single sensors, and the output spectrum obtained after the parallel connection can generate a large envelope, and the free spectral range of the large envelope can be expressed as follows:
sensitivity amplification can be achieved by tracking the valley data of this large envelope instead of the valley data of the individual sensing lines by the following amplification factors:
when the phase difference satisfies the condition of △ phi (2m +1) pi (m is 0,1,2 …), the interference lines will exhibit minimum values, and the sensing and reference portion valley wavelengths can be expressed as:
the invention utilizes a wavelength demodulation method to solve the sensitivity of the sensor, and the basic principle is that the change of external physical quantity, such as temperature, refractive index and the like, can cause the shift of the wave trough wavelength, and then the change of the measured physical quantity can be qualitatively solved by detecting the shift of the wave trough wavelength so as to achieve the purpose of sensing. The sensitivity of the wave trough wavelength is higher along with the trend of the change of the external physical quantity, and a vernier effect is proposed based on the principle to increase the sensitivity. The sensor based on vernier effect detects not the wave trough movement amount of a single sensor but the envelope movement amount after vernier superposition, and the slight movement of the wave trough wavelength of the single sensor can cause the huge movement of the wave trough wavelength of the superposed envelope thereof, thereby comparing with the movement of the wave trough wavelength of the superposed envelopeThe amount of shift of the superimposed valley wavelength is increased for a single sensor, and the sensitivity thereof is improved by detecting the amount of shift of the superimposed valley wavelength. For the purposes of this patent in particular, the sensing and reference cavity lengths are 1.8cm and 120 μm, respectively. From equations (4) and (5), it can be calculated that the free spectral ranges are: FSRS＝12.6nm，FSR R10 nm. The envelope free spectral range FSR after the superposition can be calculated according to the equations (6) and (7)CThe amplification factor was 3.8 times at 48.5 nm. That is, the sensitivity factor can be increased by a factor of 3.8 after amplification by the vernier effect compared to the sensitivity obtained by measuring the wavelength of the trough of a single MI interferometer.
The invention innovatively provides a mixed structure of a Michelson/Fabry-Perot interferometer based on a vernier effect of a parallel structure. The stable packaging of the tail end of the all-fiber Michelson interferometer is realized by welding the silicon dioxide micropipes, the tail end packaging method can well protect the tail end of the all-fiber Michelson interferometer, the interference of the external environment is not easy to occur during sensing, and the sensing of the liquid refractive index can be realized. Compared with the traditional single-mode fiber, the photonic crystal fiber has lower temperature sensitivity, so that the problem of temperature cross sensitivity can be well solved in sensing application. The system is more stable in sensing application because of the introduction of vernier effect of the parallel structure of the reference part and the sensing part which are isolated.
A manufacturing method of a hybrid sensor based on a vernier effect of a parallel structure comprises the following steps:
the method comprises the following steps: the manufacturing method comprises the steps of firstly stripping a coating layer at the position of 2cm around the end face of a single-mode optical fiber by using an optical fiber clamp, dipping cotton into alcohol to clean the coating layer, then cutting the end face by using an optical fiber cutter, flatly placing the end face into one end of a fusion machine, setting appropriate parameters, discharging, and finishing the manufacturing of a spherical structure after discharging for several times. Then the special optical fiber PCF and the silicon dioxide micro-tube a are spliced in sequence on two sides of the spherical structure.
Step two: manufacturing a Fabry-Perot interferometer, firstly, sequentially placing one end of a cut single-mode optical fiber b and one end of a silicon dioxide micro-tube b into two ends of a welding machine to be welded in an automatic mode after setting appropriate parameters, then finding out a welding point to rotate the length of the micro-tube required by cutting of a horizontal shaft of an optical fiber adjusting frame under the help of an industrial microscope, and finally placing one end of a cut single-mode optical fiber c and the other end of the silicon dioxide micro-tube b into two ends of the welding machine to be welded in the automatic mode after setting appropriate parameters.
Step three: the Michelson interferometer and the Fabry-Perot interferometer were placed in parallel.
The sensor has the advantages of simple structure and manufacture, high sensitivity, high stability, low temperature cross sensitivity and the like. By introducing a new structure tracking vernier effect into the optical fiber sensing system, the sensitivity and the stability of the sensing system can be greatly improved. The sensor achieves vernier effect through the parallel Michelson interferometer and the Fabry-Perot interferometer, and therefore the sensitivity of the sensor is amplified. The invention can well improve the stability of the sensing system through the parallel structure, can well sense the liquid refractive index and protect the end surface of the optical fiber from being interfered by the external environment based on the photonic crystal fiber Michelson interferometer sensor, and can well improve the sensitivity of the sensing system by tracking the envelope of the superposed signal.
The above description of the present invention is intended to be illustrative. Various modifications, additions and substitutions for the specific embodiments described may be made by those skilled in the art without departing from the scope of the invention as defined in the accompanying claims.
Claims (9)
1. A hybrid sensor based on vernier effect of parallel structure is characterized in that: the optical fiber transmission system comprises a Michelson interferometer and a Fabry-Perot interferometer which are arranged in parallel, wherein the Michelson interferometer comprises a single-mode optical fiber a, a spherical structure and a special optical fiber PCF which are sequentially arranged along an optical fiber transmission direction, one end of the single-mode optical fiber a is fixedly connected with one side of the spherical structure, the other side of the spherical structure is fixedly connected with one end of the special optical fiber PCF, the Fabry-Perot interferometer comprises a single-mode optical fiber b, a silica micro-tube b and a single-mode optical fiber c which are sequentially arranged along the optical fiber transmission direction, one end of the single-mode optical fiber b is fixedly connected with one end of the silica micro-tube b, and the other end of the silica micro-tube.
2. A hybrid sensor based on the vernier effect of the parallel configuration as claimed in claim 1, wherein: the Michelson interferometer and the Fabry-Perot interferometer are connected in parallel by a coupler.
3. A hybrid sensor based on the vernier effect of the parallel configuration as claimed in claim 1, wherein: the Michelson interferometer also comprises a silica micro-tube a, wherein one end of the silica micro-tube a is sleeved outside the other end of the special optical fiber PCF and is fixedly connected with the other end of the special optical fiber PCF.
4. A hybrid sensor based on the vernier effect of the parallel configuration as claimed in claim 3, wherein: the Michelson interferometer is a sensing part of a sensor, and the interference intensity of the Michelson interferometer is expressed as follows:
wherein, I1And I2The intensity of the core and cladding modes, respectively, λ is the wavelength in vacuum, L11.8cm is the cavity length of the Michelson interferometer, △ neffIs the effective index difference between the core and cladding modes.
5. A hybrid sensor based on the vernier effect of the parallel configuration as claimed in claim 4, wherein: the Fabry-Perot interferometer is the reference part of the sensor, and its interference intensity is expressed as follows:
wherein, I3And I4The light intensity reflected by the two ends of the silicon dioxide micropipe b and the interface of the single-mode fiber b and the single-mode fiber c respectively, lambda is the wavelength in vacuum, and L2120 μm is the cavity length of the Fabry-Perot interferometer and n is the refractive index of the air in the microtube.
6. A hybrid sensor based on the vernier effect of the parallel configuration as claimed in claim 5, wherein: the output light intensity of the Michelson interferometer and the Fabry-Perot interferometer after being connected in parallel is
I＝IS+IR(3)
Thus, the free spectral range FSR of the two interferometer interference lines can be expressed as:
the vernier effect needs small difference of free spectral range between two parallel sensors; it can be known from equations (4) and (5) that the change in FSR can be achieved by changing the cavity length of the two interferometric sensors;
the total output spectrum of two sensors with similar FSRs after being connected in parallel is the result of the joint action of two single sensors, and the output spectrum obtained after the parallel connection can generate a large envelope, and the free spectral range of the large envelope can be expressed as follows:
sensitivity amplification can be achieved by tracking the valley data of this large envelope instead of the valley data of the individual sensing lines by the following amplification factors:
7. the method for manufacturing the hybrid sensor based on the vernier effect of the parallel structure as claimed in any one of claims 1 to 6, comprising the steps of:
the method comprises the following steps: manufacturing a Michelson interferometer, manufacturing a spherical structure, and then sequentially splicing the special optical fiber PCF and the silicon dioxide micro-tube a on two sides of the spherical structure;
step two: manufacturing a Fabry-Perot interferometer, welding one end of a single-mode optical fiber b and one end of a silicon dioxide micro-tube b, finding a welding point to rotate a horizontal shaft of an optical fiber adjusting frame with the help of an industrial microscope to cut the required length of the micro-tube, and finally welding the other end of the silicon dioxide micro-tube b and the single-mode optical fiber c;
step three: the Michelson interferometer and the Fabry-Perot interferometer were placed in parallel.
8. The method for manufacturing a hybrid sensor based on the vernier effect of the parallel structure as claimed in claim 7, wherein: in the first step, the manufacturing process of the spherical structure comprises the steps of firstly peeling off a coating layer at a position 2cm away from the end face of a single-mode optical fiber by using an optical fiber clamp, dipping cotton in alcohol to clean the coating layer, then cutting the end face by using an optical fiber cutter, flatly placing the end face into one end of a fusion machine, setting appropriate parameters, then discharging, and completing the manufacturing of the spherical structure after discharging for a plurality of times.
9. The method for manufacturing a hybrid sensor based on the vernier effect of the parallel structure as claimed in claim 7, wherein: and step two, specifically, firstly, one end of the cut single-mode optical fiber b and one end of the silicon dioxide micro-tube b are sequentially placed at two ends of a welding machine to be welded in an automatic mode after appropriate parameters are set, then, the welding point is found with the help of an industrial microscope, the length of the micro-tube required by cutting of the horizontal shaft of the optical fiber adjusting frame is rotated, and finally, one end of the cut single-mode optical fiber c and the other end of the silicon dioxide micro-tube b are placed at two ends of the welding machine to be welded in the automatic mode after appropriate parameters are set.
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