CN113959606B - Mixed type transverse pressure sensor based on cascade enhancement vernier effect - Google Patents
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- 229920005560 fluorosilicone rubber Polymers 0.000 claims abstract description 15
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- 230000035945 sensitivity Effects 0.000 claims abstract description 9
- 239000013307 optical fiber Substances 0.000 claims description 62
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- 229910052710 silicon Inorganic materials 0.000 claims description 28
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- 238000003466 welding Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 13
- 229920000742 Cotton Polymers 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000011247 coating layer Substances 0.000 claims description 9
- 238000001228 spectrum Methods 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 7
- 230000003595 spectral effect Effects 0.000 claims description 7
- 238000007598 dipping method Methods 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 4
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- 102100029360 Hematopoietic cell signal transducer Human genes 0.000 description 8
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- 239000000523 sample Substances 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/245—Removing protective coverings of light guides before coupling
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/25—Preparing the ends of light guides for coupling, e.g. cutting
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
- G02B6/2552—Splicing of light guides, e.g. by fusion or bonding reshaping or reforming of light guides for coupling using thermal heating, e.g. tapering, forming of a lens on light guide ends
Abstract
The invention discloses a hybrid transverse pressure sensor based on cascade enhancement vernier effect, which comprises a Fabry-Perot interferometer and a Michelson interferometer; taking a Michelson interferometer as a sensing part, taking a Fabry-Perot interferometer as a reference part, cascading the Fabry-Perot interferometer and the Michelson interferometer, controlling FSRs of the Fabry-Perot interferometer and the Michelson interferometer, and superposing two interference signals to form a large interference envelope; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to the change of the external environment, the large interference envelope presents an enhanced vernier effect; the movement of the large interference envelope formed by demodulation superposition obtains the change of the external physical quantity. The pressure sensor has the advantages of simple manufacturing process, stable performance, low price, large measuring range and low temperature crosstalk, can measure transverse pressure in a complex environment, and can obtain higher transverse pressure sensitivity.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to a hybrid transverse pressure sensor based on a cascade enhanced vernier effect.
Background
The optical fiber sensor has the advantages of convenient application, corrosion resistance, electromagnetic interference resistance, compact structure, stable performance, light weight, high sensitivity and the like, and has been widely applied to various sensing fields, such as the fields of automobile, aerospace, chemical micro-detection, industry, power transmission and the like.
Measurement of lateral pressure plays an important role in building structure health monitoring. Among the fiber optic transverse pressure sensors reported so far, fiber Bragg Grating (FBG) sensors dominate transverse pressure sensing, but they are expensive to manufacture due to the use of expensive high energy lasers, such as excimer lasers or femtosecond lasers. Cascaded fiber Fabry-Perot interferometers based on air microcavities are also reported for lateral pressure sensing. These lateral pressure Fabry-Perot sensors typically have a high lateral pressure sensitivity, but their measurement range is small. Recently, sensors based on special optical fibers have also been applied to the field of lateral pressure measurement, but the reported lateral pressure sensors based on special optical fibers are either less sensitive or more complicated in the manufacturing process.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the hybrid transverse pressure sensor based on the cascade enhancement vernier effect, which has the advantages of simple manufacturing process, stable performance, low price, large measuring range and low temperature crosstalk, and can measure transverse pressure in a complex environment; while a higher lateral pressure sensitivity can be obtained by controlling the Free Spectral Range (FSR) of the Fabry-Perot interferometer and the Michelson interferometer, respectively.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
in a first aspect, an embodiment of the present invention provides a hybrid lateral pressure sensor based on a cascade enhancement vernier effect, where the hybrid lateral pressure sensor includes a Fabry-Perot interferometer and a Michelson interferometer;
the Fabry-Perot interferometer comprises a first single mode fiber, a first hollow silicon tube and a second single mode fiber which are welded in sequence;
the Michelson interferometer comprises a third single-mode optical fiber, wherein one end face of the third single-mode optical fiber is connected with the end face of the second single-mode optical fiber, which is far away from the first single-mode optical fiber, by adopting a conical structure, and the other end of the third single-mode optical fiber is an arc end face;
the method comprises the steps of taking a Michelson interferometer as a sensing part, taking a Fabry-Perot interferometer as a reference part, cascading the Fabry-Perot interferometer and the Michelson interferometer, controlling FSRs of the Fabry-Perot interferometer and the Michelson interferometer, and superposing two interference signals to form a large interference envelope; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to the change of the external environment, the large interference envelope presents an enhanced vernier effect; the movement of the large interference envelope formed by demodulation superposition obtains the change of the external physical quantity.
Further, the process of controlling FSRs of the Fabry-Perot interferometer and the Michelson interferometer to superpose two interference signals and form a large interference envelope comprises the following steps:
taking the Michelson interferometer as a sensing part and the Fabry-Perot interferometer as a reference part, the interference intensity and the optical path length of the sensing part and the reference part are expressed as follows:
wherein I is 1 And I 2 The light intensities of the core and cladding modes in the Michelson interferometer, respectively, I s The light intensity is the light intensity after two light beams interfere in the Michelson interferometer; i 3 And I 4 The light intensities of the two reflecting surfaces M1 and M2 are respectively, I R The light intensity after the interference of the light beams of the two reflecting surfaces M1 and M2; phi (phi) 0 An initial phase difference between a fiber core and a cladding mode in a Michelson interferometer; λ is the wavelength in vacuum; l (L) 2 And L 4 The cavity lengths of the Michelson interferometer and the Fabry-Perot interferometer, respectively;and->Is the effective refractive index of the Michelson interferometer core mode and cladding mode; delta s And delta R The optical path difference between the fiber core mode and the cladding mode of the Michelson interferometer and the optical path difference of the Fabry-Perot interferometer of the air cavity are respectively; n is the refractive index of air in the microtube; d represents a slave dry stateThe distance from the involved point to the end face; θ and φ represent the deflection angle and reflection angle of cladding mode light; d represents the distance between the end of the second single mode fiber section and the top of the D-shaped structure, and e represents the propagation length of the cladding mode at the micro-arc.
For Michelson interferometers, assume thatWhen the condition is satisfied: />When the interference wave trough occurs; wherein m is an integer, lambda m The wavelength corresponding to the m-th interference trough;
FSR of Michelson interferometer 1 Expressed as:wherein lambda (m-1) represents a wavelength corresponding to the (m-1) -th level interference trough, and lambda (m) is a wavelength corresponding to the m-th level interference trough. FSR of Fabry-Perot interferometer 2 Expressed as: />The change of FSR is realized by changing the cavity length of the two interferometer sensors;
the free spectral range of the large interference envelope generated by the output spectrum obtained after the Michelson interferometer and the Fabry-Perot interferometer are connected in parallel is expressed as follows:
wherein FSR is C ，FSR s And FSR (FSR) R The free spectral range of the large interference envelope, michelson interferometer and Fabry-Perot interferometer, respectively. Amplification of sensitivity is achieved by tracking the trough data of the large interference envelope.
Further, the length L of the tapered structure 1 450 μm; cavity length L of Michelson interferometer 2 1000 μm; cavity length L of first hollow silicon tube 4 85 μm; first, theDistance L of hollow silicon tube from conical structure 5 1000 μm.
Further, a second hollow silicon tube is arranged on the outer side of the arc-shaped end face.
Further, the length L of the second hollow silicon tube 3 50 μm.
In a second aspect, an embodiment of the present invention provides a method for operating a hybrid lateral pressure sensor based on a cascade enhancement vernier effect, where the method includes:
placing and fixing the hybrid lateral pressure sensor and the third hollow silicon tube used as a supporting function between two parallel glass slides horizontally; the input end and the output end of the coupler are respectively connected with a light source and a spectrum analyzer, and the other end of the coupler is connected with a hybrid transverse pressure sensor;
and applying transverse pressure on the hybrid transverse pressure sensor, recording the movement data of the large interference envelope formed by superposition, and calculating to obtain the change of the external physical quantity.
In a third aspect, an embodiment of the present invention provides a method for manufacturing a hybrid lateral pressure sensor based on cascade enhancement vernier effect as described above, where the method includes the following steps:
s1, manufacturing an optical fiber Fabry-Perot reference arm, which comprises the following steps:
welding a first hollow silicon tube with an inner diameter of 75 mu m and an outer diameter of 150 mu m at the tail end of the first single-mode optical fiber which is removed of the coating layer and wiped clean by alcohol;
fixing a first single-mode optical fiber welded with a first hollow silicon tube on an optical fiber adjusting frame, finding a welding point by adopting an industrial microscope, rotating a horizontal shaft of the optical fiber adjusting frame, rotating to a scale of the required length of the first hollow silicon tube, and cutting by using an optical fiber cutting knife;
welding one end of the first hollow silicon tube far away from the first single-mode fiber and a section of second single-mode fiber with the length of 8cm together by using an optical fiber welding machine to form a Fabry-Perot air cavity of the single-mode fiber-HCST-single-mode fiber as an optical fiber Fabry-Perot reference arm;
s2, manufacturing an optical fiber Michelson sensing arm, which comprises the following steps:
stripping a coating layer of the second single-mode fiber at a position 1cm away from the first hollow silicon tube by adopting an optical fiber pliers, dipping alcohol into cotton, wiping cleanly, finding the center of the first hollow silicon tube by adopting an industrial microscope, moving a three-dimensional adjusting frame 1050 mu m, cutting smoothly, and placing into one end of a fusion splicer;
taking the other section of the third single-mode fiber, stripping the coating layer at the position about 2cm away from the end face, dipping cotton into alcohol, wiping the cotton, cutting the end face of the third single-mode fiber by adopting an optical fiber cutting knife, and putting the end face of the third single-mode fiber into the other end of the fusion splicer;
selecting a tapering procedure, setting parameters and discharging to manufacture a conical structure;
fixing the structure part with the drawn cone on a three-dimensional adjusting frame, finding the middle point of the cone structure by adopting an industrial microscope, moving the three-dimensional adjusting frame for 1000 mu m towards the third single-mode light direction, and cutting off;
and placing the cut third single-mode optical fiber with the conical structure at one end of a fusion splicer, adjusting a motor of the optical fiber fusion splicer to place the cut flat end face at the center of a display panel of the optical fiber fusion splicer, setting parameters, discharging, and converting the end face of the third single-mode optical fiber far away from the second single-mode optical fiber into an arc end face so as to manufacture the optical fiber Michelson structure.
Further, the manufacturing method further comprises the following steps:
and welding a section of second hollow silicon tube with the length of 50 mu m outside the arc-shaped end face.
The beneficial effects of the invention are as follows:
(1) According to the invention, through cascading the Fabry-Perot interferometer and the Michelson interferometer, two interference signals can be overlapped to form a large interference envelope, and the movement of the large interference envelope formed by demodulation and overlapping can obtain the change of external physical quantity. The transverse pressure sensor has the advantages of simple manufacturing process, stable performance and low price, and can measure transverse pressure in a complex environment; meanwhile, cascading enhanced vernier effect is introduced into the optical fiber sensing system, and high transverse pressure sensitivity can be obtained by controlling FSRs of the Fabry-Perot interferometer and the Michelson interferometer.
(2) Since the Fabry-Perot interferometer and Michelson interferometer of the present invention are insensitive to temperature, such a lateral pressure sensor has very low temperature cross talk.
(3) The sensor only uses a Single Mode Fiber (SMF) and a hollow silicon tube (HCST), and has a simple structure, so that the performance of the sensor is stable, and the cost of the sensor is greatly reduced.
Drawings
FIG. 1 is a schematic diagram of the structure of a fiber Fabry-Perot reference arm in accordance with an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a Michelson sensor arm according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of an end of an optical fiber Michelson sensor arm according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a hybrid lateral pressure sensor based on cascade enhancement vernier effect according to an embodiment of the present invention.
Fig. 5 is a structural diagram of a transverse pressure experimental device according to an embodiment of the present invention.
Detailed Description
The invention will now be described in further detail with reference to the accompanying drawings.
It should be noted that the terms like "upper", "lower", "left", "right", "front", "rear", and the like are also used for descriptive purposes only and are not intended to limit the scope of the invention in which the invention may be practiced, but rather the relative relationship of the terms may be altered or modified without materially altering the teachings of the invention.
Example 1
Fig. 4 is a schematic structural diagram of a hybrid lateral pressure sensor based on cascade enhancement vernier effect according to an embodiment of the present invention. Referring to fig. 4, the hybrid lateral pressure sensor includes a Fabry-Perot interferometer and a Michelson interferometer.
The Fabry-Perot interferometer comprises a first single mode fiber, a first hollow silicon tube and a second single mode fiber which are welded in sequence.
The Michelson interferometer comprises a third single mode fiber, wherein one end face of the third single mode fiber is connected with the end face of the second single mode fiber, which is far away from the first single mode fiber, by adopting a conical structure, and the other end of the third single mode fiber is an arc-shaped end face.
The method comprises the steps of taking a Michelson interferometer as a sensing part, taking a Fabry-Perot interferometer as a reference part, cascading the Fabry-Perot interferometer and the Michelson interferometer, controlling FSRs of the Fabry-Perot interferometer and the Michelson interferometer, and superposing two interference signals to form a large interference envelope; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to the change of the external environment, the large interference envelope presents an enhanced vernier effect; the movement of the large interference envelope formed by demodulation superposition obtains the change of the external physical quantity.
In the present embodiment, the Michelson interferometer is taken as the sensing portion, the Fabry-Perot interferometer is taken as the reference portion, and the interference intensity and the optical path difference of the sensing portion and the reference portion can be expressed as follows, respectively:
wherein I is 1 And I 2 The light intensities of the core and cladding modes in a Michelson interferometer, respectively; i 3 And I 4 The light intensities of the two reflecting surfaces M1 and M2; λ is the wavelength in vacuum; l (L) 2 =1500 μm and L 4 The length of a single mode fiber of =85 μm is the cavity length of the Michelson interferometer and Fabry-Perot interferometer, respectively;and->Is the effective refractive index of the Michelson interferometer core mode and cladding mode; delta s And delta R The optical path difference between the fiber core mode and the cladding mode of the Michelson interferometer and the optical path difference of the Fabry-Perot interferometer of the air cavity are respectively; n is the refractive index of air in the microtube. Other parameters of the Michelson interferometer tip are shown in FIG. 3.
For Michelson interferometers, assume thatWhen the condition is satisfied:
interference valleys will occur. Wherein m is an integer, lambda m Is the wavelength corresponding to the m-th interference trough.
FSR of Michelson interferometer of this embodiment 1 Can be expressed as:
FSR of Fabry-Perot interferometer of the present embodiment 2 Can be expressed as:
the generation of the vernier effect requires a small difference in free spectral range between the two cascaded sensors. From equations (6) and (7), it is known that the change in FSR can be achieved by changing the cavity lengths of the two interferometer sensors.
The total output spectrum of two sensors with similar FSRs connected in parallel is the result of the combined action of the two individual sensors. The output spectrum obtained after this parallel connection will produce a large envelope whose free spectral range can be expressed as follows:
amplification of sensitivity can be achieved by tracking the trough data of this large envelope rather than the trough data of the individual sensor lines. The traditional cursor effect implementation mode is as follows: only the sensing arm is made sensitive to the measured physical quantity, and the reference arm is not sensitive to the measured physical quantity, so its magnification factor is:
the embodiment breaks through the limitation of the traditional vernier effect and proposes a method for enhancing the vernier effect. When the external environment changes to enable the two sensor interference fringes to move in opposite directions, the large envelope presents a vernier effect enhancement, and the vernier effect enhancement can obtain a larger amplification factor. The working mechanism of the vernier effect enhancement of the embodiment is as follows: when the external lateral pressure is increased, the optical path difference of the Michelson interferometer is reduced, and the reflection spectrum line has blue shift. The optical path difference of the Fabry-Perot interferometer is increased, and the reflection spectrum line is blue-shifted, so that the vernier effect can be enhanced.
The embodiment innovatively provides a Michelson/Fabry-Perot hybrid transverse pressure sensor based on a cascade vernier effect. The vernier effect is realized by cascading one Fabry-Perot interferometer and one Michelson interferometer, the air cavity Fabry-Perot interferometer is used as a reference, the Michelson interferometer manufactured at the tail end of the sensor is used as transverse pressure sensing, and FSR of the two interferometers is adjusted to obtain higher temperature sensitivity.
Example two
In the transverse pressure sensing experiment, the input end and the output end of a coupler (3 dB coupler) are respectively connected with a light source (BBS) and a spectrum analyzer (OSA), and the other end of the coupler is connected with a sensing probe. In lateral pressure measurement, to ensure that precisely applied lateral pressure is uniformly applied to the sensing fiber, we place the sensing probe horizontally with another HCST (supporting HCST) between two parallel slides and fix it, as shown in fig. 5. Experimental data were recorded as the lateral pressure on each single mode fiber increased from 0N to 5.5N (step size 0.5N).
Example III
The embodiment provides a manufacturing method of a hybrid transverse pressure sensor based on cascade enhancement vernier effect, which comprises the following steps:
1. fabrication of fiber Fabry-Perot reference arm
And welding a section of HCST with the inner diameter of 75 mu m and the outer diameter of 150 mu m at the tail end of the SMF which is removed from the coating layer and wiped clean by alcohol, fixing the structure on an optical fiber adjusting frame, finding a welding point with the help of an industrial microscope, rotating a horizontal shaft of the optical fiber adjusting frame, rotating to the scale of the required HCST length, cutting by an optical fiber cutting knife, finally welding the structure of the manufactured HCST at the tail end of the single-mode optical fiber with a section of single-mode optical fiber with the aid of an optical fiber welding machine, and finally forming a Fabry-Perot air cavity of the single-mode optical fiber-HCST-single-mode optical fiber. L we make here 4 I.e. the reference cavity length is 85 μm and the Fabry-Perot reference arm is shown in fig. 1.
2. Fabrication of optical fiber Michelson sensor arm
At a distance from the air cavity L 5 The specific manufacturing process of the locating cone is as follows: firstly, stripping a coating layer of SMF (surface Mount fiber) from an air cavity by using an optical fiber clamp, dipping alcohol into cotton, wiping the cotton, finding the center of the air cavity under a microscope, moving a three-dimensional adjusting frame 1050 mu m, cutting the three-dimensional adjusting frame to be flat, and placing the three-dimensional adjusting frame into one end of a fusion splicer. And (3) taking another section of SMF with proper length, stripping the coating layer at the position about 2cm away from the end face, dipping the cotton into alcohol, wiping the cotton clean, and then cutting the end face by using an optical fiber cutting knife to be flat and putting the end face into the other end of the fusion splicer. And selecting a tapering procedure, setting proper parameters, and discharging to finish the manufacture of a conical structure. Fixing the tapered SMF on a three-dimensional adjusting frame, finding the center of the tapered structure under a microscope, moving the three-dimensional adjusting frame for 1000 μm, cutting off, placing the cut SMF with the tapered structure at one end of a fusion splicer, and adjusting the optical fiberThe motor of the fusion splicer is used for placing the cut flat end face in the center of the display panel of the optical fiber fusion splicer, discharging after setting proper parameters, manufacturing an optical fiber Michelson structure after several times of discharging, and finally fusing a section of length L after the arc structure 3 50 μm HCST, wherein the HCST is used for protecting the arc-shaped end face, and the whole sensor is manufactured. Here we make a cone L 1 Length of Michelson sensor arm cavity L of 450 μm 2 1000 μm, air cavity pitch cone L 5 The Michelson sensor arm structure is shown in FIG. 2 at 1000 μm. Fig. 3 is a schematic diagram of the end of a fiber optic Michelson sensor arm. Fig. 4 is a diagram of the entire sensor structure.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the invention without departing from the principles thereof are intended to be within the scope of the invention as set forth in the following claims.
Claims (7)
1. A cascade-enhanced vernier effect-based hybrid transverse pressure sensor, which is characterized by comprising a Fabry-Perot interferometer and a Michelson interferometer;
the Fabry-Perot interferometer comprises a first single mode fiber, a first hollow silicon tube and a second single mode fiber which are welded in sequence;
the Michelson interferometer comprises a third single-mode optical fiber, wherein one end face of the third single-mode optical fiber is connected with the end face of the second single-mode optical fiber, which is far away from the first single-mode optical fiber, by adopting a conical structure, and the other end of the third single-mode optical fiber is an arc end face;
the method comprises the steps of taking a Michelson interferometer as a sensing part, taking a Fabry-Perot interferometer as a reference part, cascading the Fabry-Perot interferometer and the Michelson interferometer, controlling FSRs of the Fabry-Perot interferometer and the Michelson interferometer, and superposing two interference signals to form a large interference envelope; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to the change of the external environment, the large interference envelope presents an enhanced vernier effect; demodulating and superposing the movement of the large interference envelope to obtain the change of external physical quantity;
the process of controlling FSR of Fabry-Perot interferometer and Michelson interferometer to superpose two interference signals and form large interference envelope comprises the following steps:
taking the Michelson interferometer as a sensing part and the Fabry-Perot interferometer as a reference part, the interference intensity and the optical path length of the sensing part and the reference part are expressed as follows:
wherein I is 1 And I 2 The light intensities of the core and cladding modes in the Michelson interferometer, respectively, I s The light intensity is the light intensity after two light beams interfere in the Michelson interferometer; i 3 And I 4 The light intensities of the two reflecting surfaces M1 and M2 are respectively, I R The light intensity after the interference of the light beams of the two reflecting surfaces M1 and M2; phi (phi) 0 An initial phase difference between a fiber core and a cladding mode in a Michelson interferometer; λ is the wavelength in vacuum; l (L) 2 And L 4 The cavity lengths of the Michelson interferometer and the Fabry-Perot interferometer, respectively;and->Is the effective refractive index of the Michelson interferometer core mode and cladding mode; delta s And delta R The optical path difference between the fiber core mode and the cladding mode of the Michelson interferometer and the optical path difference of the Fabry-Perot interferometer of the air cavity are respectively; n is the refractive index of air in the microtube; d represents the distance from the interference point to the end face; θ and->Respectively representing the deflection angle and the reflection angle of cladding mode light; d represents the distance between the tail end of the third single-mode fiber part and the top end of the arc-shaped end surface, and e represents the propagation length of the cladding mode at the micro arc;
for Michelson interferometers, assume thatWhen the condition is satisfied: />When the interference wave trough occurs; wherein m is an integer, lambda m The wavelength corresponding to the m-th interference trough;
FSR of Michelson interferometer 1 Expressed as:wherein lambda (m-1) represents a wavelength corresponding to the (m-1) -th level interference trough, lambda (m) is a wavelength corresponding to the m-th level interference trough; FSR of Fabry-Perot interferometer 2 Expressed as: />The change of FSR is realized by changing the cavity length of the two interferometer sensors;
the free spectral range of the large interference envelope produced by the output spectrum obtained after cascading the Michelson interferometer and the Fabry-Perot interferometer is expressed as:
wherein FSR is C ，FSR S And FSR (FSR) R The free spectral ranges of the large interference envelope, michelson interferometer and Fabry-Perot interferometer, respectively; amplification of sensitivity is achieved by tracking the trough data of the large interference envelope.
2. The cascade-enhanced vernier effect based hybrid lateral pressure sensor of claim 1, wherein the length L of the tapered structure 1 450 μm; cavity length L of Michelson interferometer 2 1000 μm; cavity length L of first hollow silicon tube 4 85 μm; distance L of first hollow silicon tube from conical structure 5 1000 μm.
3. The cascade-enhanced vernier effect based hybrid transverse pressure sensor of claim 1, wherein a second hollow silicon tube is provided outside the arcuate end face.
4. The cascade-enhanced vernier effect based hybrid lateral pressure sensor of claim 3, wherein the length L of the second hollow silicon tube 3 50 μm.
5. The working method of the hybrid transverse pressure sensor based on the cascade enhancement vernier effect is characterized by comprising the following steps of:
placing and fixing the hybrid transverse pressure sensor according to any of claims 1-4 and a third hollow silicon tube for support horizontally between two parallel slides; the input end and the output end of the coupler are respectively connected with a light source and a spectrum analyzer, and the other end of the coupler is connected with a hybrid transverse pressure sensor;
and applying transverse pressure on the hybrid transverse pressure sensor, recording the movement data of the large interference envelope formed by superposition, and calculating to obtain the change of the external physical quantity.
6. A method of manufacturing a cascade-enhanced vernier effect based hybrid lateral pressure sensor as claimed in any of claims 1-4, characterized in that the method of manufacturing comprises the steps of:
s1, manufacturing an optical fiber Fabry-Perot reference arm, which comprises the following steps:
welding a first hollow silicon tube with an inner diameter of 75 mu m and an outer diameter of 150 mu m at the tail end of the first single-mode optical fiber which is removed of the coating layer and wiped clean by alcohol;
fixing a first single-mode optical fiber welded with a first hollow silicon tube on an optical fiber adjusting frame, finding a welding point by adopting an industrial microscope, rotating a horizontal shaft of the optical fiber adjusting frame, rotating to a scale of the required length of the first hollow silicon tube, and cutting by using an optical fiber cutting knife;
welding one end of the first hollow silicon tube far away from the first single-mode fiber and a section of second single-mode fiber with the length of 8cm together by using an optical fiber welding machine to form a Fabry-Perot air cavity of the single-mode fiber-HCST-single-mode fiber as an optical fiber Fabry-Perot reference arm;
s2, manufacturing an optical fiber Michelson sensing arm, which comprises the following steps:
stripping a coating layer of the second single-mode fiber at a position 1cm away from the first hollow silicon tube by adopting an optical fiber pliers, dipping alcohol into cotton, wiping cleanly, finding the center of the first hollow silicon tube by adopting an industrial microscope, moving a three-dimensional adjusting frame 1050 mu m, cutting smoothly, and placing into one end of a fusion splicer;
taking the other section of the third single-mode fiber, stripping the coating layer at the position about 2cm away from the end face, dipping cotton into alcohol, wiping the cotton, cutting the end face of the third single-mode fiber by adopting an optical fiber cutting knife, and putting the end face of the third single-mode fiber into the other end of the fusion splicer;
selecting a tapering procedure, setting parameters and discharging to manufacture a conical structure;
fixing the structure part with the drawn cone on a three-dimensional adjusting frame, finding the middle point of the cone structure by adopting an industrial microscope, moving the three-dimensional adjusting frame for 1000 mu m towards the third single-mode light direction, and cutting off;
and placing the cut third single-mode optical fiber with the conical structure at one end of a fusion splicer, adjusting a motor of the optical fiber fusion splicer to place the cut flat end face at the center of a display panel of the optical fiber fusion splicer, setting parameters, discharging, and converting the end face of the third single-mode optical fiber far away from the second single-mode optical fiber into an arc end face so as to manufacture the optical fiber Michelson structure.
7. The method for manufacturing a hybrid lateral pressure sensor based on cascade enhancement vernier effect as claimed in claim 6, wherein the manufacturing method further comprises:
and welding a section of second hollow silicon tube with the length of 50 mu m outside the arc-shaped end face.
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| CN114739285B (en) * | 2022-04-01 | 2023-06-06 | 厦门大学 | Fabry-Perot cavity length accurate measurement method based on digital virtual reference cavity and vernier effect |
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