CN113959606A - Hybrid transverse pressure sensor based on cascade enhancement vernier effect - Google Patents
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Abstract
The invention discloses a hybrid transverse pressure sensor based on a cascade enhanced vernier effect, which comprises a Fabry-Perot interferometer and a Michelson interferometer; the method comprises the steps that a Michelson interferometer is used as a sensing part, a Fabry-Perot interferometer is used as a reference part, the Fabry-Perot interferometer and the Michelson interferometer are cascaded, FSRs of the Fabry-Perot interferometer and the Michelson interferometer are controlled, two interference signals are superposed, and a large interference envelope is formed; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to external environment changes, the large interference envelope presents an enhanced vernier effect; the movement of the large interference envelope formed by demodulation superposition obtains the change of the external physical quantity. The pressure sensor has the advantages of simple manufacturing process, stable performance, low price, large measurement range and low temperature crosstalk, can measure the transverse pressure in a complex environment, and can obtain higher transverse pressure sensitivity.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to a hybrid transverse pressure sensor based on a cascade enhanced vernier effect.
Background
The optical fiber sensor has the advantages of convenient application, corrosion resistance, electromagnetic interference resistance, compact structure, stable performance, light weight, high sensitivity and the like, and is widely applied to various sensing fields, such as the fields of vehicle, aerospace, chemical micro-detection, industry, power transmission and the like.
Measurement of lateral pressure plays an important role in building structure health monitoring. Among the currently reported fiber transverse pressure sensors, Fiber Bragg Grating (FBG) sensors dominate in transverse pressure sensing, but they are expensive due to the use of expensive high-energy lasers such as excimer lasers or femtosecond lasers. Cascaded fiber Fabry-Perot interferometers based on air microcavities are also reported for lateral pressure sensing. These transverse pressure Fabry-Perot sensors generally have a high transverse pressure sensitivity, but their measurement range is small. Recently, special optical fiber based sensors are also applied to the field of transverse pressure measurement, but the special optical fiber based transverse pressure sensors have been reported to be either low in sensitivity or complicated in manufacturing process.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a hybrid transverse pressure sensor based on a cascade enhanced vernier effect, which has the advantages of simple manufacturing process, stable performance, low price, large measuring range and low temperature crosstalk, and can measure transverse pressure in a complex environment; while a higher lateral pressure sensitivity can be obtained by controlling the Free Spectral Range (FSR) of the Fabry-Perot interferometer and the Michelson interferometer, respectively.
In order to achieve the purpose, the invention adopts the following technical scheme:
in a first aspect, an embodiment of the present invention provides a hybrid lateral pressure sensor based on a cascade enhanced vernier effect, where the hybrid lateral pressure sensor includes a Fabry-Perot interferometer and a Michelson interferometer;
the Fabry-Perot interferometer comprises a first single-mode fiber, a first hollow-core silicon tube and a second single-mode fiber which are sequentially welded;
the Michelson interferometer comprises a third single-mode fiber, wherein one end face of the third single-mode fiber is connected with the end face, far away from the first single-mode fiber, of the second single-mode fiber in a tapered structure, and the other end of the third single-mode fiber is an arc-shaped end face;
the method comprises the following steps that a Michelson interferometer is used as a sensing part, a Fabry-Perot interferometer is used as a reference part, the Fabry-Perot interferometer and the Michelson interferometer are cascaded, FSRs of the Fabry-Perot interferometer and the Michelson interferometer are controlled, two interference signals are superposed, and a large interference envelope is formed; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to external environment changes, the large interference envelope presents an enhanced vernier effect; the movement of the large interference envelope formed by demodulation superposition obtains the change of the external physical quantity.
Further, the process of controlling the FSR of the Fabry-Perot interferometer and the Michelson interferometer to superpose the two interference signals to form a large interference envelope comprises the following steps:
the Michelson interferometer is taken as a sensing part, the Fabry-Perot interferometer is taken as a reference part, and the interference intensity and the optical path difference of the sensing part and the reference part are respectively expressed as follows:
wherein I1And I2The intensity of the core and cladding modes, I, respectively, in the Michelson interferometersThe light intensity of two beams in the Michelson interferometer after interference; i is3And I4The light intensities, I, of the two reflecting surfaces M1 and M2, respectivelyRThe light intensity of the M1 and M2 two reflecting surface light beams after interference; phi is a0The initial phase difference of a fiber core mode and a cladding mode in the Michelson interferometer; λ is the wavelength in vacuum; l is2And L4The cavity lengths of the Michelson interferometer and the Fabry-Perot interferometer, respectively;
and
effective refractive indexes of a core mode and a cladding mode of the Michelson interferometer; deltasAnd deltaRRespectively Michelson interferometerThe optical path difference between the core mode and the cladding mode and the optical path difference of the air cavity Fabry-Perot interferometer; n is the refractive index of the air in the microtube; d represents a distance from the interference point to the end face; θ and φ represent the deflection angle and reflection angle of the cladding mode light; d represents the distance between the end of the second single-mode fiber part and the top end of the D-shaped structure, and e represents the propagation length of the cladding mode at the micro-arc.
For the Michelson interferometer, assume
When the condition is satisfied:
then interference valleys will appear; wherein m is an integer, λmThe wavelength is corresponding to the mth interference wave trough;
FSR of Michelson interferometer1Expressed as:
wherein, λ (m-1) represents the wavelength corresponding to the (m-1) th order interference trough, and λ (m) is the wavelength corresponding to the mth order interference trough. FSR of Fabry-Perot interferometer2Expressed as:
the change of the FSR is realized by changing the cavity lengths of the two interferometer sensors;
the free spectral range of the large interference envelope generated by the output spectrum obtained after the Michelson interferometer and the Fabry-Perot interferometer are connected in parallel is expressed as follows:
wherein FSRC，FSRsAnd FSRRThe free spectral ranges of the large interference envelope, the Michelson interferometer and the Fabry-Perot interferometer, respectively. Amplification of sensitivity is achieved by tracking the valley data of the large interference envelope.
Further, the length L of the conical structure1450 μm; michelson interferometer cavity length L2Is 1000 μm; cavity length L of first hollow silicon tube485 μm; distance L between the first hollow silicon tube and the conical structure5And 1000 μm.
Furthermore, a second hollow silicon tube is arranged on the outer side of the arc-shaped end face.
Further, the length L of the second hollow-core silicon tube3Is 50 μm.
In a second aspect, an embodiment of the present invention provides a working method of a hybrid lateral pressure sensor based on a cascade enhanced vernier effect, where the working method includes:
horizontally placing and fixing the hybrid transverse pressure sensor and a third hollow silicon tube used as a support between two parallel glass slides; the input end and the output end of the coupler are respectively connected with the light source and the spectrum analyzer, and the other end of the coupler is connected with the hybrid transverse pressure sensor;
and applying transverse pressure on the hybrid transverse pressure sensor, recording the movement data of the large interference envelope formed by superposition, and calculating to obtain the change of the external physical quantity.
In a third aspect, an embodiment of the present invention provides a method for manufacturing a hybrid lateral pressure sensor based on a cascaded enhanced vernier effect as described above, where the method includes the following steps:
s1, manufacturing a fiber Fabry-Perot reference arm, comprising:
welding a section of first hollow silicon tube with the inner diameter of 75 micrometers and the outer diameter of 150 micrometers at the tail end of the first single-mode optical fiber, wherein the coating layer is removed and the tail end of the first single-mode optical fiber is wiped clean by alcohol;
fixing the first single-mode optical fiber after welding the first hollow silicon tube on an optical fiber adjusting frame, finding a welding point by adopting an industrial microscope, rotating a horizontal shaft of the optical fiber adjusting frame to a scale of the required length of the first hollow silicon tube, and cutting by using an optical fiber cutting knife;
welding one end of the first hollow silicon tube, which is far away from the first single-mode fiber, and a section of second single-mode fiber with the length of 8cm together by using an optical fiber fusion splicer to form a Fabry-Perot air cavity of the single-mode fiber-HCST-single-mode fiber, wherein the Fabry-Perot air cavity is used as a fiber Fabry-Perot reference arm;
s2, fabricating a fiber Michelson sensing arm, including:
stripping a coating layer of the second single mode fiber at a position 1cm away from the first hollow silicon tube by using an optical fiber clamp, dipping cotton in alcohol to clean the coating layer, finding the center of the first hollow silicon tube by using an industrial microscope, moving a three-dimensional adjusting frame 1050 mu m, then cutting the coating layer flat, and putting the coating layer into one end of a fusion splicer;
taking another section of the third single mode fiber, peeling off a coating layer at a position 2cm away from the end face, dipping cotton with alcohol, wiping the coated layer clean, and cutting the end face of the third single mode fiber by using a fiber cutter, and placing the cut end face of the third single mode fiber into the other end of the fusion splicer;
selecting a tapering program, setting parameters and then discharging to manufacture a tapered structure;
fixing the tapered structural part on a three-dimensional adjusting frame, finding the middle point of the tapered structure by adopting an industrial microscope, moving the three-dimensional adjusting frame to the direction of a third single-mode light ray for 1000 mu m, and then cutting off the tapered structural part;
and placing the cut third single-mode optical fiber with the conical structure into one end of a fusion splicer, adjusting a motor of the fusion splicer to place the flattened end face in the center of a display panel of the fusion splicer, setting parameters, discharging, and converting the end face, far away from the second single-mode optical fiber, of the third single-mode optical fiber into an arc end face to manufacture an optical fiber Michelson structure.
Further, the manufacturing method further comprises the following steps:
and a second hollow silicon tube with the length of 50 mu m is welded on the outer side of the arc end face.
The invention has the beneficial effects that:
(1) according to the invention, two interference signals can be superposed to form a large interference envelope through cascading a Fabry-Perot interferometer and a Michelson interferometer, and the movement of the large interference envelope formed by demodulation and superposition obtains the change of an external physical quantity. The transverse pressure sensor has simple manufacturing process, stable performance and low price, and can measure the transverse pressure in a complex environment; meanwhile, a cascade enhanced vernier effect is introduced into the optical fiber sensing system, and higher transverse pressure sensitivity can be obtained by controlling the FSR of the Fabry-Perot interferometer and the Michelson interferometer.
(2) Since the Fabry-Perot interferometer and the Michelson interferometer of the present invention are not sensitive to temperature, such a lateral pressure sensor has extremely low temperature cross talk.
(3) The sensor only uses a Single Mode Fiber (SMF) and a hollow silicon tube (HCST), and has simple structure, thereby not only ensuring the stable performance of the sensor, but also greatly reducing the cost of the sensor.
Drawings
FIG. 1 is a schematic structural diagram of a fiber Fabry-Perot reference arm according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a Michelson sensing arm according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of the end of the optical fiber Michelson sensing arm according to the embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a hybrid lateral pressure sensor based on a cascade enhanced vernier effect according to an embodiment of the present invention.
Fig. 5 is a structural diagram of a lateral pressure experiment apparatus according to an embodiment of the present invention.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings.
It should be noted that the terms "upper", "lower", "left", "right", "front", "back", etc. used in the present invention are for clarity of description only, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not limited by the technical contents of the essential changes.
Example one
Fig. 4 is a schematic structural diagram of a hybrid lateral pressure sensor based on a cascade enhanced vernier effect according to an embodiment of the present invention. Referring to fig. 4, the hybrid lateral pressure sensor includes a Fabry-Perot interferometer and a Michelson interferometer.
The Fabry-Perot interferometer comprises a first single-mode fiber, a first hollow-core silicon tube and a second single-mode fiber which are sequentially welded.
The Michelson interferometer comprises a third single-mode fiber, one end face of the third single-mode fiber is connected with the end face, far away from the first single-mode fiber, of the second single-mode fiber through a tapered structure, and the other end of the third single-mode fiber is an arc-shaped end face.
The method comprises the following steps that a Michelson interferometer is used as a sensing part, a Fabry-Perot interferometer is used as a reference part, the Fabry-Perot interferometer and the Michelson interferometer are cascaded, FSRs of the Fabry-Perot interferometer and the Michelson interferometer are controlled, two interference signals are superposed, and a large interference envelope is formed; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to external environment changes, the large interference envelope presents an enhanced vernier effect; the movement of the large interference envelope formed by demodulation superposition obtains the change of the external physical quantity.
In this embodiment, taking the Michelson interferometer as the sensing part and the Fabry-Perot interferometer as the reference part, the interference intensities and optical path differences of the sensing part and the reference part can be expressed as follows:
wherein I1And I2The light intensities of the core and cladding modes in the Michelson interferometer respectively; i is3And I4The light intensity of the two reflecting surfaces M1 and M2 respectively; λ is the wavelength in vacuum; l is21500 μm and L4The lengths of 85 μm single-mode fibers are respectively MichelCavity lengths for son and Fabry-Perot interferometers;
and
effective refractive indexes of a core mode and a cladding mode of the Michelson interferometer; deltasAnd deltaRThe optical path difference between a fiber core mode and a cladding mode of the Michelson interferometer and the optical path difference of the air cavity Fabry-Perot interferometer are respectively obtained; n is the refractive index of the air in the microtube. Other parameters of the end of the Michelson interferometer are shown in figure 3.
For the Michelson interferometer, assume
When the condition is satisfied:
interference valleys will appear. Wherein m is an integer, λmThe wavelength corresponding to the m-th interference wave trough.
FSR of Michelson interferometer of the present embodiment1Can be expressed as:
FSR of Fabry-Perot interferometer of the present embodiment2Can be expressed as:
the generation of the vernier effect requires a small difference in free spectral range between the two cascaded sensors. It can be appreciated from equations (6) and (7) that the change in FSR can be achieved by changing the cavity length of the two interferometric sensors.
The total output frequency spectrum of two sensors with similar FSRs connected in parallel is the result of the joint action of the two single sensors. The output spectrum obtained after parallel connection can generate a large envelope, and the free spectral range of the large envelope can be expressed as follows:
sensitivity amplification can be achieved by tracking the trough data of this large envelope rather than the trough data of a single sensing line. The traditional vernier effect implementation is as follows: only the sensing arm is made sensitive to the physical quantity measured, the reference arm is not sensitive to the physical quantity measured, and therefore its amplification factor is:
the present embodiment breaks through the limitation of the conventional vernier effect, and provides an enhanced vernier effect. When the external environment changes to make the two sensor interference fringes move towards opposite directions, the large envelope presents an enhanced vernier effect, and the enhanced vernier effect can obtain a larger amplification factor. The working mechanism of the enhanced vernier effect of the embodiment is as follows: when the external transverse pressure is increased, the optical path difference of the Michelson interferometer is reduced, and the reflection spectral line appears blue shift. The Fabry-Perot interferometer has increased optical path difference, and blue shift of reflection spectral lines occurs, so that the vernier effect can be enhanced.
The embodiment innovatively provides a Michelson/Fabry-Perot hybrid lateral pressure sensor based on a cascade vernier effect. The vernier effect is realized by cascading a Fabry-Perot interferometer and a Michelson interferometer, the air cavity Fabry-Perot interferometer is used as a reference, the Michelson interferometer made at the tail end of the sensor is used as a transverse pressure sensor, and the FSRs of the two interferometers are adjusted to obtain higher temperature sensitivity.
Example two
In the transverse pressure sensing experiment, the input end and the output end of the coupler (3dB coupler) are respectively connected with a light source (BBS) and an Optical Spectrum Analyzer (OSA), and the other end of the coupler is connected with a sensing probe. In lateral pressure measurement, to ensure that the accurately applied lateral pressure is uniformly applied to the sensing fiber, we place the sensing probe and another HCST (support HCST) horizontally between two parallel slides and fix them, as shown in fig. 5. Experimental data were recorded as the lateral pressure on each single mode fiber increased from 0N to 5.5N (step size of 0.5N).
EXAMPLE III
The embodiment provides a manufacturing method of a hybrid transverse pressure sensor based on a cascade enhanced vernier effect, which comprises the following steps:
first, manufacture of fiber Fabry-Perot reference arm
Removing a coating layer, wiping the clean SMF tail end by alcohol, welding a section of HCST with the inner diameter of 75 micrometers and the outer diameter of 150 micrometers, fixing the structure on an optical fiber adjusting frame, finding a welding point with the help of an industrial microscope, rotating a horizontal shaft of the optical fiber adjusting frame to scale the required HCST length, cutting by using an optical fiber cutting knife, and finally welding the manufactured structure of the single-mode optical fiber tail end welded HCST and a section of single-mode optical fiber of about 8cm by using an optical fiber welding machine to form a Fabry-Perot air cavity of the single-mode optical fiber-HCST-single-mode optical fiber. L we make here4I.e. a reference cavity length of 85 μm, the Fabry-Perot reference arm is shown in figure 1.
Second, manufacture of optical fiber Michelson sensing arm
In the air space L5The manufacturing process of the taper comprises the following steps: firstly, stripping a coating layer of SMF (small surface field) 1cm away from an air cavity by using an optical fiber pliers, dipping cotton into alcohol to clean the coating layer, finding the center of the air cavity under a microscope, moving a three-dimensional adjusting frame 1050 mu m, then cutting the coating layer flat, and putting the coating layer into one end of a welding machine. And taking another segment of SMF with proper length, peeling off the coating layer at a position about 2cm away from the end face, dipping cotton in alcohol to clean the coating layer, and then cutting the end face by using an optical fiber cutter to be flat and putting the end face into the other end of the fusion splicer. And selecting a tapering program, setting appropriate parameters, and discharging to complete the manufacture of a tapered structure. Fixing the tapered SMF on a three-dimensional adjusting frame, finding the center of the tapered structure under a microscope,moving a three-dimensional adjusting frame for 1000 micrometers, cutting, placing the cut SMF with a conical structure into one end of a fusion splicer, adjusting a motor of the optical fiber fusion splicer to place a flattened end face in the center of a display panel of the optical fiber fusion splicer, discharging after setting proper parameters, manufacturing an optical fiber Michelson structure after discharging for several times, and finally welding a section of length L behind an arc-shaped structure3HCST of 50 μm, wherein the HCST serves to protect the curved end face, so far the entire sensor is completed. Here we make a cone L1450 μm long, Michelson sensing arm cavity length L21000 μm, air cavity distance cone L51000 μm, and the Michelson sensor arm structure is shown in FIG. 2. Fig. 3 is a schematic view of the end of a fiber Michelson sensing arm. Fig. 4 is a view showing the structure of the entire sensor.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention.
Claims (8)
1. A hybrid lateral pressure sensor based on a cascade enhanced vernier effect, comprising a Fabry-Perot interferometer and a Michelson interferometer;
the Fabry-Perot interferometer comprises a first single-mode fiber, a first hollow-core silicon tube and a second single-mode fiber which are sequentially welded;
the Michelson interferometer comprises a third single-mode fiber, wherein one end face of the third single-mode fiber is connected with the end face, far away from the first single-mode fiber, of the second single-mode fiber in a tapered structure, and the other end of the third single-mode fiber is an arc-shaped end face;
the method comprises the following steps that a Michelson interferometer is used as a sensing part, a Fabry-Perot interferometer is used as a reference part, the Fabry-Perot interferometer and the Michelson interferometer are cascaded, FSRs of the Fabry-Perot interferometer and the Michelson interferometer are controlled, two interference signals are superposed, and a large interference envelope is formed; when the interference fringes of the Fabry-Perot interferometer and the Michelson interferometer move in opposite directions due to external environment changes, the large interference envelope presents an enhanced vernier effect; the movement of the large interference envelope formed by demodulation superposition obtains the change of the external physical quantity.
2. The hybrid lateral pressure sensor based on the cascade enhanced vernier effect according to claim 1, wherein the process of controlling the FSR of the Fabry-Perot interferometer and the Michelson interferometer to superpose two interference signals to form a large interference envelope comprises the following steps:
the Michelson interferometer is taken as a sensing part, the Fabry-Perot interferometer is taken as a reference part, and the interference intensity and the optical path difference of the sensing part and the reference part are respectively expressed as follows:
wherein I1And I2The intensity of the core and cladding modes, I, respectively, in the Michelson interferometersThe light intensity of two beams in the Michelson interferometer after interference; i is3And I4The light intensities, I, of the two reflecting surfaces M1 and M2, respectivelyRThe light intensity of the M1 and M2 two reflecting surface light beams after interference; phi is a0The initial phase difference of a fiber core mode and a cladding mode in the Michelson interferometer; λ is trueThe wavelength in air; l is2And L4The cavity lengths of the Michelson interferometer and the Fabry-Perot interferometer, respectively;
and
effective refractive indexes of a core mode and a cladding mode of the Michelson interferometer; deltasAnd deltaRThe optical path difference between a fiber core mode and a cladding mode of the Michelson interferometer and the optical path difference of the air cavity Fabry-Perot interferometer are respectively obtained; n is the refractive index of the air in the microtube; d represents a distance from the interference point to the end face; θ and φ represent the deflection angle and reflection angle of the cladding mode light; d represents the distance between the tail end of the second single-mode fiber part and the top end of the D-shaped structure, and e represents the propagation length of the cladding mode at the micro-arc position;
for the Michelson interferometer, assume
When the condition is satisfied:
then interference valleys will appear; wherein m is an integer, λmThe wavelength is corresponding to the mth interference wave trough;
FSR of Michelson interferometer1Expressed as:
wherein, λ (m-1) represents the wavelength corresponding to the (m-1) th interference wave trough, and λ (m) is the wavelength corresponding to the mth interference wave trough; FSR of Fabry-Perot interferometer2Expressed as:
the change of the FSR is realized by changing the cavity lengths of the two interferometer sensors;
the free spectral range of the large interference envelope generated by the output spectrum obtained after the Michelson interferometer and the Fabry-Perot interferometer are connected in parallel is expressed as follows:
wherein FSRC，FSRSAnd FSRRThe free spectral ranges of the large interference envelope, the Michelson interferometer and the Fabry-Perot interferometer are respectively; amplification of sensitivity is achieved by tracking the valley data of the large interference envelope.
3. The hybrid lateral pressure sensor based on cascade-enhanced vernier effect as claimed in claim 1, wherein the length L of the tapered structure1450 μm; michelson interferometer cavity length L2Is 1000 μm; cavity length L of first hollow silicon tube485 μm; distance L between the first hollow silicon tube and the conical structure5And 1000 μm.
4. The hybrid lateral pressure sensor based on the cascade enhanced vernier effect as claimed in claim 1, wherein a second hollow silicon tube is disposed outside the arc end surface.
5. The hybrid lateral pressure sensor based on cascade-enhanced vernier effect as claimed in claim 4, wherein the length L of the second hollow-core silicon tube3Is 50 μm.
6. A working method of a hybrid transverse pressure sensor based on a cascade enhanced vernier effect is characterized by comprising the following steps:
placing and fixing the hybrid lateral pressure sensor of any of claims 1-5 and a third hollow silicon tube serving as a support horizontally between two parallel glass slides; the input end and the output end of the coupler are respectively connected with the light source and the spectrum analyzer, and the other end of the coupler is connected with the hybrid transverse pressure sensor;
and applying transverse pressure on the hybrid transverse pressure sensor, recording the movement data of the large interference envelope formed by superposition, and calculating to obtain the change of the external physical quantity.
7. A method for manufacturing a hybrid transverse pressure sensor based on a cascade enhanced vernier effect as claimed in any one of claims 1 to 5, wherein the method comprises the following steps:
s1, manufacturing a fiber Fabry-Perot reference arm, comprising:
welding a section of first hollow silicon tube with the inner diameter of 75 micrometers and the outer diameter of 150 micrometers at the tail end of the first single-mode optical fiber, wherein the coating layer is removed and the tail end of the first single-mode optical fiber is wiped clean by alcohol;
fixing the first single-mode optical fiber after welding the first hollow silicon tube on an optical fiber adjusting frame, finding a welding point by adopting an industrial microscope, rotating a horizontal shaft of the optical fiber adjusting frame to a scale of the required length of the first hollow silicon tube, and cutting by using an optical fiber cutting knife;
welding one end of the first hollow silicon tube, which is far away from the first single-mode fiber, and a section of second single-mode fiber with the length of 8cm together by using an optical fiber fusion splicer to form a Fabry-Perot air cavity of the single-mode fiber-HCST-single-mode fiber, wherein the Fabry-Perot air cavity is used as a fiber Fabry-Perot reference arm;
s2, fabricating a fiber Michelson sensing arm, including:
stripping a coating layer of the second single mode fiber at a position 1cm away from the first hollow silicon tube by using an optical fiber clamp, dipping cotton in alcohol to clean the coating layer, finding the center of the first hollow silicon tube by using an industrial microscope, moving a three-dimensional adjusting frame 1050 mu m, then cutting the coating layer flat, and putting the coating layer into one end of a fusion splicer;
taking another section of the third single mode fiber, peeling off a coating layer at a position 2cm away from the end face, dipping cotton with alcohol, wiping the coated layer clean, and cutting the end face of the third single mode fiber by using a fiber cutter, and placing the cut end face of the third single mode fiber into the other end of the fusion splicer;
selecting a tapering program, setting parameters and then discharging to manufacture a tapered structure;
fixing the tapered structural part on a three-dimensional adjusting frame, finding the middle point of the tapered structure by adopting an industrial microscope, moving the three-dimensional adjusting frame to the direction of a third single-mode light ray for 1000 mu m, and then cutting off the tapered structural part;
and placing the cut third single-mode optical fiber with the conical structure into one end of a fusion splicer, adjusting a motor of the fusion splicer to place the flattened end face in the center of a display panel of the fusion splicer, setting parameters, discharging, and converting the end face, far away from the second single-mode optical fiber, of the third single-mode optical fiber into an arc end face to manufacture an optical fiber Michelson structure.
8. The method for manufacturing a hybrid lateral pressure sensor based on a cascade enhanced vernier effect as claimed in claim 7, further comprising:
and a second hollow silicon tube with the length of 50 mu m is welded on the outer side of the arc end face.
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