CN105043588A - High-temperature Fabry-Perot (FP) composite micro/nano fiber temperature and pressure sensor - Google Patents
High-temperature Fabry-Perot (FP) composite micro/nano fiber temperature and pressure sensor Download PDFInfo
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Abstract
The invention relates to a high-temperature Fabry-Perot composite micro/nano fiber temperature and pressure sensor, and belongs to the technical field of fiber sensors. The sensor comprises a fiber access segment, a pressure sensor segment and a temperature sensor segment, wherein the fiber access segment includes a solid fiber, the pressure sensor includes a hollow thin-wall fiber, and the temperature sensor includes another solid fiber. Cylindrical holes are formed in the end portions of the two solid fibers respectively in a femtosecond second processing method, and then welded to form an FP interference type pressure cavity, one fiber serves as the fiber access segment, the other fiber is cut and ground to the solid fiber of certain thickness, a temperature sensor is thus formed, and the difference between the cavities lengths of the temperature sensor and the pressure sensor is controlled to decouple double-parameter measurement. Compared with the prior art, the sensor of the invention is small in structural size, resistant to high temperature, capable of measure the temperature and pressure at the same time, and free of cross sensitivity of the two parameters.
Description
Technical field
The present invention relates to a kind of micro-nano sensor, particularly a kind of high-temperature temperature and pressure Fiber Optic Sensor FP (method amber) composite micro-nano sensor, belong to fiber optic sensor technology field.
Background technology
The detection of temperature, pressure is widely applied to the every field of national economy, and monitor temperature, the pressure and other parameters while of in hot environment, can make comprehensive evaluation to the operation of system.In a lot of high temperature (being greater than 800 DEG C), strong electromagnetic, minute sized applied environment, current sensor still can not meet these extreme demands, and Fibre Optical Sensor is because this quality high-temperature, electromagnetism interference, size be little etc., and advantage can effectively address these problems.
Existing hot environment application fibre optic compression sensor mainly fabry perot interferometer type sensor, Yizheng etc. and Frederik etc. were respectively at 2005 and within 2009, manufactured the Fiber Optic Sensor FP pressure transducer of laminate structure, achieve the pressure survey of the highest 600 DEG C, 2011, the undoped pure quartzy photonic crystal fiber of the use such as Chuang substitutes ordinary optic fibre and achieves more than the pressure survey under 700 DEG C of environment, and the measuring tempeature limit determines primarily of layer material and syndeton.The problems such as the low and Temperature cross-over of the Joint failure that this kind of physical dimension of pressure transducer own is excessive, material connects difficulty, different materials high-temperature hot mismatch causes, sensor resistance to extreme temperature is responsive, seriously limit optical fiber FPI pressure transducer and expand to higher temperature scope.
2011, Ma Jun etc. utilize together with single-mode fiber is fused to hollow glass tube by the method for melt discharge, micro-FP chamber is formed as pressure transducer after molten ball, the highest probe temperature can reach 600 DEG C, 2013, this seminar and the cooperation of Missouri University of Science and Technology adopt femtosecond laser micro-nano technology technology and melting interconnection technique, general single mode fiber machined closed inner chamber formula optical fiber FP pressure transducer, reduce the cross sensitivity of temperature, in experiment, achieve the pressure survey of 0 ~ 0.65MPa under 700 DEG C of hot environments.This integral type Fabry Perot fibre optic compression sensor mainly contains two kinds of deficiencies, is first the high-temperature capability that can reduce optical fiber after the fibre core of general single mode fiber mixes germanium, can only below 800 DEG C normal transmission light signal; Next is that common interferometer type Fibre Optical Sensor is all responsive to pressure and temperature two kinds of physical parameters, there will be the problem of cross sensitivity when measuring pressure or temperature, and measures while temperature and pressure under can not realizing hot environment.2013, the Zhang Huijun etc. of Beijing Great Wall metrological testing technology research institute utilizes semiconductor silicon thermometric layer and optical fiber to form fabry perot fiber optic sensor, be a kind of fibre optic compression sensor with temperature measurement function, this sensor shortcoming is that physical dimension is large, and the high temperature resistant limit is low.Photonic crystal fiber and sapphire fiber can tolerate the high temperature of more than 1200 DEG C, but sapphire fiber does not have fibre core, long-distance transmissions light signal cannot be realized, and also comparatively difficult with the connection of general single mode fiber, and photonic crystal fiber does not have the problem of this respect; For single fabry perot interferometer pressure transducer, reflectance coating thickness is directly proportional to temperature control, be inversely proportional to pressure sensitivity, utilize this rule can reduce the problem of pressure and temperature cross sensitivity, but the problem that pressure and temperature measures simultaneously cannot be solved.
Summary of the invention
The object of the invention is, for the problem of low, the two-parameter cross sensitivity of resistance to extreme temperature in solution Fibre Optical Sensor in high temperature environments temperature and pressure duplex measurement, to provide a kind of high-temperature temperature and pressure Fiber Optic Sensor FP composite micro-nano sensor.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of high-temperature temperature and pressure Fiber Optic Sensor FP composite micro-nano sensor, be made up of the intelligent acess section connected successively, pressure transducer section and temperature sensor section; Intelligent acess section 1 is for continuing to introduce Multifunction Sensor in hot environment and by the signal feedback after modulation by broadband optical signal; Pressure transducer section 2 is at high moderate pressure effect modulated light signal, and temperature sensor section 3 is at high temperature action modulated light signal.
Described intelligent acess Duan Weishi core fibre, described pressure transducer section is the thin-walled optical fiber of hollow, and described temperature sensor section is another section of real core fibre; Micro-cavity structure in the thin-walled optical fiber of hollow and fiber-coaxial.
Described pressure transducer hollow-core fiber internal diameter is 10 μm ~ 120 μm, and external diameter is 125 μm, and length is 10 μm ~ 2000 μm; The real core fibre external diameter of temperature sensor is 125 μm, and length is 10 μm ~ 2000 μm; The length of pressure transducer and the length of temperature sensor should have marked difference.
Described intelligent acess section adopts single-mode fiber, comprises the photonic crystal fiber of general single mode fiber or full quartz; Pressure transducer section and temperature sensor section adopt single-mode fiber or other resistant to elevated temperatures optical fiber.
The job operation of a kind of high-temperature temperature and pressure Fiber Optic Sensor FP composite micro-nano sensor is as follows:
When described sensor each section of optical fiber adopts identical material, with laser at two sections of fiber end faces along axis processing column shape microcavity, cylindrical microcavity and fiber-coaxial;
Two optical fiber of the cylindrical microcavity of band are connected, the cylindrical hermetic chamber mechanics Fabry-Parot interferent type pressure transducer section of formation; Determine that wherein one section of optical fiber is intelligent acess section, cuts the redundance of another section of optical fiber, remaining fiber lengths is machined to Len req, i.e. mechanics Fabry-Parot interferent type temperature sensor section;
When described sensor each section of optical fiber adopts unlike material, first processing column shape microcavity in a manner described, and cut excess fiber and obtain method Fabry-Parot interferent type pressure transducer section, then pressure transducer section is connected with intelligent acess section and temperature sensor section respectively, and cut the redundance of temperature sensor section optical fiber, remaining fiber lengths is machined to Len req.
Described connection can adopt welding to carry out.
A kind of high-temperature temperature of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor, the chamber of its temperature sensor and pressure transducer is long marked difference, by gathering the spectrum of back reflected laser, and analyze the peak of spectrum or the wavelength of paddy, or optical fibre fourier transformation white light interferometric method (patent No.: CN200710177837) is used to realize measuring while temperature, pressure.
Beneficial effect
The present invention devises a kind of high-temperature temperature and pressure Fiber Optic Sensor FP composite micro-nano sensor, the structure of complete quartzy photonic crystal fiber can improve the high temperature resistant limit of sensor effectively, still normally work in hot environment more than 1200 DEG C, also can use in the environment of common single-mode fiber below 800 DEG C and use; The temperature sensor of sensor is only by the impact of environment temperature, the change of temperature and pressure under hot environment can be measured by the change of cavity length measuring pressure transducer section and temperature sensor section simultaneously simultaneously, solve the problem of cross sensitivity during two-parameter measurement, it is little, high temperature resistant and without the advantage of two-parameter cross sensitivity that this sensor has physical dimension.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of high-temperature temperature of the embodiment of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor;
Fig. 2 is the equal strength Three-beam Interfere spectrogram of a kind of high-temperature temperature of the embodiment of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor;
Fig. 3 is the spatial frequency domain interference light spectrogram of a kind of high-temperature temperature of the embodiment of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor;
Reference numeral:
1-intelligent acess section, 2-pressure transducer section, 3-temperature sensor section, 4-light reflection surface a, 5-light reflection surface b, 6-light reflection surface c.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in detail, also describe technical matters and the beneficial effect of technical solution of the present invention solution simultaneously, it is pointed out that described embodiment is only intended to be convenient to the understanding of the present invention, and any restriction effect is not play to it.
Embodiment
A kind of high-temperature temperature of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor, its structure as shown in Figure 1, comprises the intelligent acess section 1, pressure transducer section 2 and the temperature sensor section 3 that connect successively, is made up of the single mould photon crystal optical fiber without cut-off; Intelligent acess section 1 is for continuing to introduce Multifunction Sensor in hot environment and by the signal feedback after modulation by broadband optical signal; Pressure transducer section 2 is at high moderate pressure effect modulated light signal, and temperature sensor section 3 is at high temperature action modulated light signal;
Job operation:
Get the single mould photon crystal optical fiber without cut-off of two sections of suitable lengths, with laser respectively at an end face of two sections of optical fiber along axis processing column shape microcavity, cylindrical microcavity and fiber-coaxial, its diameter is 100 μm, and its degree of depth is 100 μm; Its diameter or degree of depth pressure sensitivity is as required determined;
Two sections of optical fiber of the cylindrical microcavity of band are carried out welding, the cylindrical hermetic chamber mechanics Fabry-Parot interferent type pressure transducer section of formation; Selecting wherein one section of optical fiber to be intelligent acess section, is then temperature sensor section by other end optical fiber processing: cut unnecessary optical fiber, remaining fiber lengths is machined to 400 μm, residue optical fiber and mechanics Fabry-Parot interferent type temperature sensor section.The length temperature control as required of temperature sensor section is determined.
The course of work
After the intelligent acess section of the micro-nano sensor shown in Fig. 1 and single-mode fiber welding, by fiber coupler or optical fiber circulator by sensor incoming fiber optic (FBG) demodulator, the spectral range of (FBG) demodulator is greater than 10 times of sensor Free Spectral Ranges, three reflectings surface (4 that the broadband light sent from (FBG) demodulator is formed by pressure transducer section and temperature sensor section, 5,6) reflect respectively, three beams reflected light returns (FBG) demodulator through intelligent acess section.The three-beam returned interferes, and obtains Three-beam Interfere spectrum, as shown in Figure 2.
The temperature and pressure of a kind of high-temperature temperature of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor measures and decoupling principle is:
When environment temperature changes, the temperature sensor section of a kind of high-temperature temperature of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor be heated occur along fiber axis to expansion; The pressure transducer section of sensor is hollow-core fiber chamber, and light is propagated in air chamber, and when environment temperature changes, remaining covering has certain expansion and build-up of pressure sensor segments optical fiber cavity extends.
When environmental pressure changes, the clad film of the pressure transducer section of a kind of high-temperature temperature of the present invention and pressure Fiber Optic Sensor FP composite micro-nano sensor is bending in chamber because of pressurized, pressure suffered by film is divided into two parts, radially perpendicular to membrane wall with vertically perpendicular to the pressure of temperature sensor section outer face, when the clad film of pressure transducer section is because being pressed to bending in chamber, the cavity length of pressure transducer section shortens; The temperature sensor section of sensor is the real core photonic crystal fiber of one end pressurized, and when environmental pressure changes, temperature sensor section global displacement can occur under pressure, and the chamber length of temperature sensor section itself can not change.
The pressure change of pressure transducer section and temperature sensor section can be measured, Δ L with Fourier transform white light interferometric method simultaneously
pressure stagefor pressure transducer section (Δ L under temperature action
t presses) and pressure effect under (Δ L
p) change of cavity length amount, Δ L
temperature sectionfor temperature sensor section (Δ L under temperature action
t temperature) change of cavity length amount, pressure transducer section is the same with the material of temperature sensor section, and both when there is identical temperature change, change of cavity length amount exists linear relationship (being determined by length), namely
use Fourier white light interferometric method can measure Δ L simultaneously
pressure stagewith Δ L
temperature section, utilize Δ L
temperature sectionand then can calculate
remove temperature variation to tonometric cross sensitivity, and change of cavity length is with the change of temperature direct proportion, with the change of pressure inverse proportion, uses same optical fiber micro-nano sensor to achieve under hot environment and measures while temperature and pressure.
The multi-functional micro-nano sensor of photonic crystal is in sum used to measure the temperature and pressure change under hot environment simultaneously.
Test findings
Simulation method is used to simulate the equal strength Three-beam Interfere spectrum of above-mentioned high-temperature temperature and pressure Fiber Optic Sensor FP composite micro-nano sensor, the length of its pressure transducer section is 200 μm, the length of temperature sensor section is 400 μm, interference light spectrogram as shown in Figure 2, its Fourier trasform spectroscopy as shown in Figure 3, window function is used to take out first and second frequency content spectrum in Fig. 3 respectively, using Fourier transform white light interferometric method to measure its chamber length is 200.695 μm and 400.025 μm, illustrate that Fourier transform white light interferometric method can ideally distinguish long for two chambeies.
Above-described specific descriptions; the object of inventing, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; the protection domain be not intended to limit the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. high-temperature temperature and a pressure Fiber Optic Sensor FP composite micro-nano sensor, is characterized in that: be made up of the intelligent acess section connected successively, pressure transducer section and temperature sensor section; Intelligent acess section 1 is for continuing to introduce Multifunction Sensor in hot environment and by the signal feedback after modulation by broadband optical signal; Pressure transducer section 2 is at high moderate pressure effect modulated light signal, and temperature sensor section 3 is at high temperature action modulated light signal.
2. a kind of high-temperature temperature according to claim 1 and pressure Fiber Optic Sensor FP composite micro-nano sensor, it is characterized in that: described intelligent acess Duan Weishi core fibre, described pressure transducer section is the thin-walled optical fiber of hollow, and described temperature sensor section is another section of real core fibre; Micro-cavity structure in the thin-walled optical fiber of hollow and fiber-coaxial.
3. a kind of high-temperature temperature according to claim 2 and pressure Fiber Optic Sensor FP composite micro-nano sensor, it is characterized in that: described pressure transducer hollow-core fiber internal diameter is 10 μm ~ 120 μm, and external diameter is 125 μm, length is 10 μm ~ 2000 μm; The real core fibre external diameter of temperature sensor is 125 μm, and length is 10 μm ~ 2000 μm.
4. according to the arbitrary described a kind of high-temperature temperature of claim 1-3 and pressure Fiber Optic Sensor FP composite micro-nano sensor, it is characterized in that: described intelligent acess section adopts single-mode fiber, comprise the photonic crystal fiber of general single mode fiber or full quartz; Pressure transducer section and temperature sensor section adopt single-mode fiber or other resistant to elevated temperatures optical fiber.
5. the job operation of a high-temperature temperature and pressure Fiber Optic Sensor FP composite micro-nano sensor, it is characterized in that: when described sensor each section of optical fiber adopts identical material, with laser at two sections of fiber end faces along axis processing column shape microcavity, cylindrical microcavity and fiber-coaxial; Two optical fiber of the cylindrical microcavity of band are connected, the cylindrical hermetic chamber mechanics Fabry-Parot interferent type pressure transducer section of formation; Determine that wherein one section of optical fiber is intelligent acess section, cuts the redundance of another section of optical fiber, remaining fiber lengths is machined to Len req, i.e. mechanics Fabry-Parot interferent type temperature sensor section;
When described sensor each section of optical fiber adopts unlike material, first processing column shape microcavity in a manner described, and cut excess fiber and obtain method Fabry-Parot interferent type pressure transducer section, then pressure transducer section is connected with intelligent acess section and temperature sensor section respectively, and cut the redundance of temperature sensor section optical fiber, remaining fiber lengths is machined to Len req.
6. the job operation of a kind of high-temperature temperature according to claim 5 and pressure Fiber Optic Sensor FP composite micro-nano sensor, is characterized in that: described connection can adopt welding mode to carry out.
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