CN109974759A - With cascade Fabry-Perot-type cavity sensor in optical fiber cable of the femtosecond laser induction based on cursor effect - Google Patents

With cascade Fabry-Perot-type cavity sensor in optical fiber cable of the femtosecond laser induction based on cursor effect Download PDF

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Publication number
CN109974759A
CN109974759A CN201910328951.4A CN201910328951A CN109974759A CN 109974759 A CN109974759 A CN 109974759A CN 201910328951 A CN201910328951 A CN 201910328951A CN 109974759 A CN109974759 A CN 109974759A
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China
Prior art keywords
perot
fabry
optical fiber
type cavity
cascade
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CN201910328951.4A
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Chinese (zh)
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王东宁
邓军
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China Jiliang University
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China Jiliang University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot

Abstract

The present invention provides one kind based on interferometer made of being cascaded in optical fiber cable as two Fabry-Perot-type cavities, including wideband light source, circulator, sensing head, spectroanalysis instrument.Wherein sensing head is made of single mode optical fiber or multimode fibre, fibre core and equal-sized four mirror surfaces are passed perpendicularly through it is characterized by: being inscribed in optical fiber with femtosecond laser, fiber end face cuts wedgewise, to eliminate end face reflection interference, all reflecting mirrors and optical fiber constitute cascade Fabry-Perot-type cavity interferometer sensing head.Light from wideband light source is received by circulator and is transmitted to sensing head, light is back to circulator again by sensing head, then is transmitted to spectroanalysis instrument via circulator, forms cascade Fabry-Perot-type cavity interferometer.The present invention have the characteristics that it is compact-sized, be simple to manufacture, be low in cost, high sensitivity.

Description

It is induced in the optical fiber cable based on cursor effect with femtosecond laser and cascades Fabry-Perot Cavity sensor
Technical field
The present invention provides Fabry-Perot-type cavity interferometer is cascaded in a kind of optical fiber cable based on cursor effect, belong to light Fine field of sensing technologies.
Background technique
Fibre optic strain sensor has light weight, small in size, durable, electromagnetism interference, flexible operation, stability good The advantages that, in the fields such as aerospace, environmental monitoring, civil engineering extensive application.The structure kind of fibre optic strain sensor Class has: Bragg grating (FBG), Hollow-Core Photonic Crystal Fibers (PCF), dislocation welding, draws cone, is interior long-period gratings (LFBG) Empty chamber and optical waveguide etc..However, it is relatively low by the strain transducer sensitivity that single structure makes, usually less than 10 pm/με.Cursor effect can effectively improve sensitivity, and this method does not track the offset of single striped in spectrum instead of, passes through The drift of dual interferometer spectral envelopes is tracked to realize the monitoring to strain, has occurred a variety of grades based on cursor effect at present Join interference structure, such as: cascading Mach-Zehnder (M-ZI) interferometer;Cascade plug lattice nanogram (Sagnac) interferometer;Cascade method Fabry-Perot-type (F-P) chamber interferometer;And mixed type cascades interferometer.But these structures have some limitations: cascading Mach- Zeng Deer interferometer generallys use transmission mode work, is not easy to remote sensing;Cascade plug lattice nanogram interferometer is not suitable for measurement along one Tie up the physical quantity of Axial changes;Mixed type cascades the comparatively laborious complicated difficult of structure of interferometer with processing and fabricating;And it is more prevailing Cascade Fabry-Perot-type cavity interferometer be usually different types of optical fiber or capillary are welded together, although structure phase To simple, but the position of Fabry-Perot-type cavity can change in fusion process, cause to can not achieve expected Cascaded amplification effect Fruit.
The cascade Fabry-Perot-type cavity system based on cursor effect that this paper presents a kind of, it is by a sensing method cloth In-Perot cavity and one collectively constitutes with reference to Fabry-Perot-type cavity.The reflection of the internal Fabry-Perot-type cavity of single mode optical fiber (SMF) Mirror is made of femtosecond laser parallel micromachining platform precise positioning, it can be accurately between the length and two cavitys of control chamber Distance, and optical fiber is not damaged in process, so this sensor is unusually strong and very sensitive to strain and temperature.
Summary of the invention
The present invention in view of the shortcomings of the prior art, provide it is a kind of based in optical fiber cable by two Fabry-Perot-type cavities cascades and At interferometer, the mirror surface of chamber is so that optical fibre refractivity is changed generation under femtosecond laser induction.Present invention tool Have it is compact-sized, be simple to manufacture, be low in cost, high sensitivity the features such as.
The technical solution adopted for solving the technical problem of the present invention are as follows: one kind is interior by a sensing method cloth based on optical fiber cable In-Perot cavity and one with reference to Fabry-Perot-type cavity is combined into cascade interferometer, including wideband light source, sensing head, circulator, Spectroanalysis instrument.Wherein sensing head is made of single mode optical fiber, it is characterised in that: is focused on inside of optical fibre with femtosecond laser and is carved It writes, obtains four parallel reflecting mirrors, and reflecting mirror all passes perpendicularly through fiber core.Wherein sense Fabry-Perot-type cavity length 30-1000 μm of variation range of (two mirror surface spacing);It senses Fabry-Perot-type cavity and refers to Fabry-Perot-type cavity spacing Greater than 3 centimetres and two cavity lengths differ 1-30 μm of range;Fiber end face cuts wedgewise, is interfered with eliminating end face reflection, four A mirror surface and optical fiber collectively form cascade Fabry-Perot-type cavity interference sensing head.
Compared with the prior art, the invention has the advantages that:
1, sensing head selects cheap general single mode fiber or multimode fibre preparation, has at low cost, and production is simple excellent Point.
2, the distance between the length of energy exact controllability Fabry-Perot-type cavity and two cavitys, to preferably realize Preset Cascaded amplification effect.
3, sensing device is big to strain and temperature measuring range, and high sensitivity, stability is good, reusable.
Detailed description of the invention
In order to illustrate the embodiments of the present invention more clearly or technical solution, the present invention is made with reference to the accompanying drawings and examples It further illustrates.
Fig. 1 practices system schematic for of the invention.
Fig. 2 is sensing head schematic diagram of the present invention.
In figure, 1. wideband light sources, 2. circulators, 3. sensing heads, 4. spectroanalysis instruments, 5. optical fiber, 5a. optical fiber fibre Core, 5b. fibre cladding, 6. mirror surfaces, 7. mirror surfaces, 8. mirror surfaces, 9. mirror surfaces, 10. wedge-shaped end faces.
Specific embodiment
With reference to the accompanying drawing and embodiment the invention will be further described:
Fig. 1 show the system schematic that practices of the invention, including wideband light source 1, circulator 2, sensing head 3, spectrum point Analyzer 4.Its connection type are as follows: there are three interface ends for circulator 2, are respectively as follows: light source input end, light source outlet end, feedback end.Into Mouth end is connect with wideband light source 1, and outlet end is connect with sensing head 3, and feedback end is connected with spectroanalysis instrument 4.
Fig. 2 show the structural schematic diagram of sensing head 3 of the present invention, the sensing head 3, by 5, first reflecting mirrors of optical fiber 6, second, face mirror surface 7, third mirror surface 8, the 4th mirror surface 9 and wedge-shaped end face 10 are constituted, and optical fiber 5 wraps Include fiber core 5a, fibre cladding 5b.
The production method and step of the sensing head are: step 1: being cut into a wedge-shaped end face 10 using cutter;The Two steps: first mirror surface 6 for passing perpendicularly through fibre core is inscribed out in optical fiber using femtosecond laser;Step 3: along fibre core Direction translate a distance, inscribe out second mirror surface 7 for being parallel to first mirror surface 6;Step 4: along The direction of fibre core translates a big section distance, inscribes out the third mirror surface 8 for being parallel to mirror surface 7;Step 5: along The direction of fibre core translates a distance again, inscribes out the 4th mirror surface 9 for being parallel to mirror surface 8, and four of inscription are anti- It is completely the same with size to penetrate mirror shape.In the production process, we can change the distance between mirror surface to change sensing The reflectance spectrum of head.The energy that wherein femtosecond laser is inscribed is 500nJ, and inscription speed is 10 μm/s.The optical fiber of different materials can Reach optimum efficiency by adjusting energy size and inscribing speed.
In conjunction with Fig. 1,2, it introduces specific working principle: reaching sensing head 3 through circulator 2 by the light that wideband light source 1 issues, The light beam is in 3, and when arriving first at first mirror surface 6, light is divided into two parts: a part reflected by mirror surface 6 and Backtracking;Rest part continuation propagates along fiber core and reaches second mirror surface 7.Second mirror surface 7 occurs The case where it is identical as first mirror surface 6, light is divided into two parts again: a part reflected and backtracking by mirror surface 7; Rest part continuation propagates along fiber core and reaches third mirror surface 8.There is a situation where with for third mirror surface 8 One mirror surface 6 is also identical, and light is divided into two parts again: a part is reflected and backtracking by mirror surface 8;Rest part Continuation propagates along fiber core and reaches the 4th mirror surface 9.When light beam reaches the 4th mirror surface 9, light is divided into Two parts: a part is reflected and backtracking by mirror surface 9;Rest part continues to propagate along fiber core but does not return again to fibre Core.First mirror surface 6 and second mirror surface 7 form a Fabry-Perot-type cavity;Third mirror surface 8 and Four mirror surfaces 9 form a Fabry-Perot-type cavity;To form cascade Fabry-Perot-type cavity interference.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects It describes in detail bright, it should be appreciated that, the above is only a specific embodiment of the present invention, is not intended to restrict the invention, all Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention Within the scope of shield.

Claims (5)

1. a kind of cascade Fabry-Perot-type cavity interferometer based in optical fiber cable, including wideband light source, circulator, sensing head, light Spectrum analysis instrument, connection type are as follows: circulator input terminal connects wideband light source, and circulator feedback end connects spectroanalysis instrument, ring Shape device output end connects sensing head, and the sensing head is inscribed in optical fiber with femtosecond laser, obtain four it is parallel and vertical Across the mirror surface of fibre core, four mirror surfaces and optical fiber and end face constitute cascade Fabry-Perot-type cavity interferometer sensing head.
2. a kind of cascade Fabry-Perot-type cavity interferometer based in optical fiber cable according to claim 1, it is characterized in that: Fiber end face cuts wedgewise, to eliminate end face reflection interference.
3. a kind of cascade Fabry-Perot-type cavity interferometer based in optical fiber cable according to claim 1, it is characterized in that: It is greater than 3 centimetres with reference to Fabry-Perot-type cavity and sensing Fabry-Perot-type cavity spacing.
4. a kind of cascade Fabry-Perot-type cavity interferometer based in optical fiber cable according to claim 1, it is characterized in that: Wherein 30-1000 μm of variation range of sensing Fabry-Perot-type cavity length (two mirror surface spacing).
5. a kind of cascade Fabry-Perot-type cavity interferometer based in optical fiber cable according to claim 1, it is characterized in that: Sensing Fabry-Perot-type cavity differs 1-30 μm of range with reference to two cavity length of Fabry-Perot-type cavity.
CN201910328951.4A 2019-04-23 2019-04-23 With cascade Fabry-Perot-type cavity sensor in optical fiber cable of the femtosecond laser induction based on cursor effect Pending CN109974759A (en)

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Cited By (8)

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CN110333016A (en) * 2019-07-19 2019-10-15 陕西高速公路工程咨询有限公司 Stress sensing device and demodulation method based on Mixed cascading fibre optic interferometer
CN110887515A (en) * 2019-11-28 2020-03-17 杭州光飞秒科技有限公司 Parallel Fabry-Perot interferometer based on parallel reflectors in optical fiber
CN111678540A (en) * 2020-06-10 2020-09-18 杭州光飞秒科技有限公司 Strain optical fiber sensor based on vernier effect and parallel F-P interferometer
CN111812350A (en) * 2020-07-22 2020-10-23 中国计量大学 FBG (fiber Bragg Grating) tapered optical fiber flow velocity sensor based on femtosecond laser writing
CN112179537A (en) * 2020-10-10 2021-01-05 中国计量大学 Fabry-Perot interferometer optical fiber sensor based on optical fiber surface waveguide
CN112414597A (en) * 2020-11-05 2021-02-26 中国计量大学 Ultra-high sensitivity optical fiber stress sensor based on conical waist embedded convex bubble
CN113686460A (en) * 2021-03-17 2021-11-23 广东工业大学 Fiber grating temperature sensor and sensing device based on vernier effect
CN113790678A (en) * 2021-09-10 2021-12-14 广东工业大学 Multi-core optical fiber vector bending sensor with optical vernier effect

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Publication number Priority date Publication date Assignee Title
CN110333016A (en) * 2019-07-19 2019-10-15 陕西高速公路工程咨询有限公司 Stress sensing device and demodulation method based on Mixed cascading fibre optic interferometer
CN110887515A (en) * 2019-11-28 2020-03-17 杭州光飞秒科技有限公司 Parallel Fabry-Perot interferometer based on parallel reflectors in optical fiber
CN111678540A (en) * 2020-06-10 2020-09-18 杭州光飞秒科技有限公司 Strain optical fiber sensor based on vernier effect and parallel F-P interferometer
CN111812350A (en) * 2020-07-22 2020-10-23 中国计量大学 FBG (fiber Bragg Grating) tapered optical fiber flow velocity sensor based on femtosecond laser writing
CN112179537A (en) * 2020-10-10 2021-01-05 中国计量大学 Fabry-Perot interferometer optical fiber sensor based on optical fiber surface waveguide
CN112414597A (en) * 2020-11-05 2021-02-26 中国计量大学 Ultra-high sensitivity optical fiber stress sensor based on conical waist embedded convex bubble
CN113686460A (en) * 2021-03-17 2021-11-23 广东工业大学 Fiber grating temperature sensor and sensing device based on vernier effect
CN113686460B (en) * 2021-03-17 2024-01-23 广东工业大学 Fiber bragg grating temperature sensor and sensing device based on vernier effect
CN113790678A (en) * 2021-09-10 2021-12-14 广东工业大学 Multi-core optical fiber vector bending sensor with optical vernier effect

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Application publication date: 20190705