CN206618528U - A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro-cavities - Google Patents
A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro-cavities Download PDFInfo
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- CN206618528U CN206618528U CN201720247593.0U CN201720247593U CN206618528U CN 206618528 U CN206618528 U CN 206618528U CN 201720247593 U CN201720247593 U CN 201720247593U CN 206618528 U CN206618528 U CN 206618528U
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- capillary
- circulator
- air pressure
- sensing head
- optical fiber
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Abstract
The utility model provides a kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro-cavities, including wideband light source, circulator, sensing head, spectroanalysis instrument.Wherein sensing head is made up of capillary, single-mode fiber, it is characterized in that：Single-mode fiber and capillary are subjected to continuous discharge welding in the case where discharge power is 45bit, the welding pattern that discharge time is 3000ms, until a part for capillary is expanded to hollow spherical cavity, and in the weld formation capillary thin layer of single-mode fiber capillary.This structure is formed multiple Fabry Perot chambers.The light from wideband light source is received by circulator and is transmitted to sensing head, sensing head reflects light back into circulator again, transmitted again via circulator to spectroanalysis instrument, form similar fabry perot interferometer, measure the wavelength shift of reflection spectrum characteristic trough, you can calculate the numerical value of test environment parameter.The utility model has the advantages that small volume, prepares simple, can be applied to the measurement of air pressure and temperature.
Description
Technical field
The utility model provides a kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers, belongs to light
Fine field of sensing technologies.
Background technology
Atmospheric pressure is a very important parameter in the field such as meteorological remote measurement, aircraft fixed height, field work.
Especially in recent years, with the revolutionary development in unmanned plane during flying device field, by remote measurement atmospheric pressure, to the height of unmanned plane
Carry out quick, real-time, accurate monitoring and seem very urgent.In traditional atmospheric pressure measurement field, more using force balance type, humorous
The air pressure sensing technology of formula of shaking and pressure resistance type.By comparison, optical fiber air pressure sensor because its have small volume, electromagnetism interference,
High temperature resistant, chemical stability are strong, these many advantages of adjustable parameter, increasingly by the extensive concern of in the market.
In the configuration of the optical fiber air pressure sensor of numerous kinds, the optical fiber air pressure sensing based on Fabry-Perot micro chamber
The features such as utensil has high sensitive, small volume and the ease of Use to reflective-mode, has special attraction in research field
Power.Sensors with auxiliary electrode, which is divided to, two kinds of different operation mechanisms：Variations in refractive index type in cavity length change type and chamber.Based on cavity
The Fabry-Perot interferometer gas pressure sensor gas pressure susceptibility of length change type is relatively low.In fiber end face
It is upper to add after ultra-thin membrane, although sensors with auxiliary electrode can realize highest 100nm/MPa hypersensitivity, only have several
Ten kPa definite measured scope.What is more important, the robustness of the sensing head of the optical fiber with ultra-thin membrane is poor, and
It is difficult to maintain under hazardous environment.For the Fabry-Perot interferometer gas pressure sensor based on variations in refractive index in chamber
For, although can realize it is larger range of measurement and more preferable robustness, however, its sensitivity be usually as low as tens μm/
MPa。
In summary, fiber-optic fiber gas pressure sensor has very big DEVELOPMENT PROSPECT, be most potential research direction it
One.Although still suffering from many problems demands at present and solving, for example, sensitivity is improved, measurement range, enhancing robustness is increased and examines
Consider Temperature cross-over etc..
Utility model content
The utility model aims to solve the problem that the defect of above-mentioned prior art is based on multiple Fabry-Perot micro chambers there is provided one kind
Optical fiber air pressure sensing device, its manufacturing process is simple, and small volume, cost is low, and with sensitivity is high, measurement range is relatively wide,
The advantages of robustness is strong.
1. the utility model technical solution adopted for solving the technical problem is：One kind is micro- based on multiple Fabry-Perots
The optical fiber air pressure sensing device of chamber, including wideband light source, circulator, sensing head, spectroanalysis instrument, its connected mode is：Annular
Device entrance point is connected with wideband light source, and the circulator port of export is connected with sensing head, and circulator feedback end is connected with spectroanalysis instrument
Connect；It is characterized in that：Described sensing head, is made up of quartz capillary with single-mode fiber.Under heat sealing machine continuous discharge effect,
A part in its capillary is expanded to hollow spherical cavity, and in the face of weld formation capillary thin layer of single-mode fiber-capillary.
The single-mode fiber core diameter is 8.2 μm, and fibre diameter is 125 μm.
The quartz capillary is length about 0.8mm, is attached to the capillary tube segment on single-mode fiber.Its internal diameter is 50 μm,
External diameter is 150 μm.
The preparation method of the sensing head is：It is 45bit in discharge power, discharge time is 400ms's using heat sealing machine
Under welding pattern, the capillary tube segment for being about first 0.8mm by length is fused on single-mode fiber.The two ends stress provided in heat sealing machine
Under effect, then by the other end of capillary and another single-mode fiber in discharge power it is 45bit, discharge time is the molten of 3000ms
Connect and continuous discharge is carried out under pattern carry out welding, until a part for capillary is expanded to hollow spherical cavity, and single-mode fiber-
The weld formation thin layer of capillary.Finally in capillary side, about 410 μm of the weld away from single-mode fiber-capillary
Cut capillary in position.
The beneficial effect of the utility model compared with prior art is：
1st, the material selection single-mode fiber and quartz capillary of sensing head, with preparation method is simple, material price is cheap,
The advantages of stable chemical performance.
2nd, sensing head all has sensitiveness to air pressure and temperature, can be used for temperature and the two-parameter of air pressure measures simultaneously.
3rd, the air pressure sensitivity of sensing head is higher (4.067nm/MPa), and barometric surveying scope is larger.
Brief description of the drawings
In order to illustrate more clearly of the utility model embodiment or technical scheme, with reference to the accompanying drawings and examples to this reality
It is described further with new.
Fig. 1 practices system schematic to be of the present utility model.
Fig. 2 is optical fiber sensor head structure chart of the present utility model.
In figure, 1. wideband light sources, 2. circulators, 3. sensing heads, 4. spectroanalysis instruments, 5. single-mode fibers, 5a. single-mode fibers
Fibre core, 5b. single-mode fiber coverings, 6. capillary thin layers, 6a. capillary thin layer antethecas, 6b. capillary thin layer rear walls, 7. ball-types
Air chamber, 7a. ball-type air chamber rear walls, 8. capillaries, 8a. capillaries cutting end face.
Embodiment
Below in conjunction with the accompanying drawings and embodiment is further described to the utility model：
Fig. 1, which is shown, of the present utility model practices system schematic, including wideband light source 1, circulator 2, sensing head
3rd, spectroanalysis instrument 4.Its connected mode is：Circulator 2 has three interface ends, is respectively：Light source entrance point, the light source port of export,
Feedback end.Entrance point is connected with wideband light source 1, and the port of export is connected with being connected sensing head 3, and feedback end is connected with spectroanalysis instrument 4
Connect.
Fig. 2 show the structural representation of optical fiber sensor head 3 of the present utility model, described sensing head 3, by single-mode fiber
5th, capillary thin layer 6, ball-type air chamber 7 and capillary 8 are constituted, and single-mode fiber 5 includes single-mode fiber fibre core 5a and single-mode fiber
Covering 5b, the fibre core and fibre diameter of single-mode fiber are respectively 8.2 μm and 125 μm；Capillary thin layer 6 in sensing head 3 includes
Capillary thin layer antetheca 6a and capillary thin layer rear wall 6b, its thickness is about 27 μm；Ball-type air chamber 7 in sensing head 3 is included
Ball-type air chamber rear wall 7a, ball-type air cavity length is about 118.5 μm.Capillary 8 in sensing head 3 is formed after cutting
Capillary cutting end face 8a；Capillary 8 in sensing head 3 is made up of pure quartz, and its internal diameter is 50 μm, and external diameter is 150 μm.
The preparation method of the sensing head is：Single-mode fiber 5 and capillary 8 are placed on to the two ends of optical fiber splicer,
Under the two ends stress that heat sealing machine is provided, capillary end surface is close to single-mode fiber end face.It is 45bit, electric discharge in discharge power
Time is carries out continuous discharge under 3000ms welding pattern, until a part for capillary 8 is expanded to hollow spherical cavity 7, and
In the weld formation capillary thin layer 6 of single-mode fiber-capillary, this capillary thin layer 6, ball-type air chamber 7 are cut with capillary
Cut node face 8a collectively forms multiple Fabry-Perot micro chamber structures.
With reference to Fig. 1,2, introduce specific operation principle：Sensing head 3 receive from wideband light source 1 send via circulator
The light of 2 transmission, occurs multiple-beam interference when the side of light from single-mode fiber is incident.Due to from the fibre core of single-mode fiber to capillary
The variations in refractive index of pipe, occurs first reflection at capillary thin layer antetheca 6a, then again because capillary thin layer 6 arrives air
Refractive index change, at capillary thin layer rear wall 6b occur second reflect.Fractional transmission light enters spherical air chamber 7 and quilt
Ball-type air chamber rear wall 7a is reflected, and thin-walled of another part light along capillary is propagated and reflected by capillary cut end face 8a.
Therefore, sensor 3 is by capillary thin layer antetheca 6a, capillary thin layer rear wall 6b, ball-type air chamber rear wall 7a and capillary cutting
Reflecting surface main end face 8a this 4 is constituted, light 6 different interference patterns of formation that 4 reflection end faces are reflected, wherein by
3 kinds of interference patterns that 3 pairs of reflectings surface are constituted play a major role, and this 3 pairs of reflectings surface are respectively：
1st, capillary thin layer antetheca 6a and capillary thin layer rear wall 6b.
2nd, capillary thin layer rear wall 6b and ball-type air chamber rear wall 7a.
3rd, ball-type air chamber rear wall 7a and capillary cutting end face 8a.
This 3 pairs of reflectings surface form main interference fringe.When sensor head is by gas pressure or temperature change, chamber is long
Degree or chamber medium refraction index will change, and this causes the change of the optical path difference of Fabry-Perot-type cavity and causes output spectrum pattern to float
Move.Due to there are multiple troughs in output spectrum, gas pressure can be realized by tracking the drift of two trough wavelength
Detected while with temperature.
Particular embodiments described above, has carried out entering one to the purpose of this utility model, technical scheme and beneficial effect
Step is described in detail, it should be appreciated that, specific embodiment of the utility model is the foregoing is only, this is not limited to
Utility model, all within spirit of the present utility model and principle, any modification, equivalent substitution and improvements done etc. all should be wrapped
It is contained within protection domain of the present utility model.
Claims (3)
1. a kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers, including wideband light source, circulator, sensing
Head, fibre optic spectral analyzer, its connected mode is：Circulator entrance point is connected with wideband light source, the circulator port of export and optical fiber
Sensing head is connected, and circulator feedback end is connected with fiber spectrometer；It is characterized in that：Described sensing head, by quartzy capillary
Pipe is constituted with single-mode fiber；Under heat sealing machine continuous discharge effect, the part in its capillary is expanded to hollow spherical cavity, and
The face of weld formation quartz capillary thin layer of single-mode fiber-capillary.
2. a kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers according to claim 1, its feature
It is：The single-mode fiber core diameter is 8.2 μm, and fibre diameter is 125 μm.
3. a kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers according to claim 1, its feature
It is：The quartz capillary is length about 0.8mm, is attached to the capillary tube segment on single-mode fiber；Its internal diameter is 50 μm, and external diameter is
150μm。
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720247593.0U CN206618528U (en) | 2017-03-10 | 2017-03-10 | A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro-cavities |
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| CN201720247593.0U CN206618528U (en) | 2017-03-10 | 2017-03-10 | A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro-cavities |
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| CN108033669A (en) * | 2017-12-28 | 2018-05-15 | 深圳市光子传感技术有限公司 | A kind of micron order quartz thin film preparation facilities and preparation method thereof |
| CN108375348A (en) * | 2018-05-23 | 2018-08-07 | 深圳大学 | A kind of preparation method of optical fibre bending sensor and optical fibre bending sensor |
| CN108572047A (en) * | 2017-03-10 | 2018-09-25 | 中国计量大学 | A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers |
| CN109330565A (en) * | 2018-10-29 | 2019-02-15 | 山东大学 | A kind of optical fiber sensing probe measuring alveolar air pressure |
| CN109596243A (en) * | 2018-11-06 | 2019-04-09 | 天津大学 | Sapphire fiber Fabry-Perot sensor and preparation method thereof based on femtosecond laser etching |
| CN110793710A (en) * | 2019-11-15 | 2020-02-14 | 山东大学 | Double-resolution optical fiber air pressure measuring sensor and method |
| CN111238554A (en) * | 2020-03-30 | 2020-06-05 | 南京信息工程大学 | Multi-parameter sensing bin for ocean, monitoring method and manufacturing method of sensing bin |
| CN112556595A (en) * | 2020-12-01 | 2021-03-26 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN112629744A (en) * | 2020-12-03 | 2021-04-09 | 国网黑龙江省电力有限公司电力科学研究院 | Atmospheric pressure sensor based on cascade fiber Fabry-Perot interferometer |
| CN113701915A (en) * | 2021-09-03 | 2021-11-26 | 西安石油大学 | Preparation method of polymer-filled optical fiber temperature sensor embedded with air bubbles |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108572047A (en) * | 2017-03-10 | 2018-09-25 | 中国计量大学 | A kind of optical fiber air pressure sensing device based on multiple Fabry-Perot micro chambers |
| CN108572047B (en) * | 2017-03-10 | 2024-04-05 | 中国计量大学 | Optical fiber air pressure sensing device based on multiple Fabry-Perot microcavities |
| CN108033669A (en) * | 2017-12-28 | 2018-05-15 | 深圳市光子传感技术有限公司 | A kind of micron order quartz thin film preparation facilities and preparation method thereof |
| CN108033669B (en) * | 2017-12-28 | 2024-02-27 | 深圳市光子传感技术有限公司 | Micron-sized quartz film preparation device and preparation method thereof |
| CN108375348A (en) * | 2018-05-23 | 2018-08-07 | 深圳大学 | A kind of preparation method of optical fibre bending sensor and optical fibre bending sensor |
| CN108375348B (en) * | 2018-05-23 | 2024-05-03 | 深圳大学 | Optical fiber bending sensor and preparation method thereof |
| CN109330565A (en) * | 2018-10-29 | 2019-02-15 | 山东大学 | A kind of optical fiber sensing probe measuring alveolar air pressure |
| CN109596243A (en) * | 2018-11-06 | 2019-04-09 | 天津大学 | Sapphire fiber Fabry-Perot sensor and preparation method thereof based on femtosecond laser etching |
| CN110793710A (en) * | 2019-11-15 | 2020-02-14 | 山东大学 | Double-resolution optical fiber air pressure measuring sensor and method |
| CN111238554A (en) * | 2020-03-30 | 2020-06-05 | 南京信息工程大学 | Multi-parameter sensing bin for ocean, monitoring method and manufacturing method of sensing bin |
| CN111238554B (en) * | 2020-03-30 | 2022-02-11 | 南京信息工程大学 | Multi-parameter sensing bin for ocean, monitoring method and manufacturing method of sensing bin |
| CN112556595A (en) * | 2020-12-01 | 2021-03-26 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN112556595B (en) * | 2020-12-01 | 2022-04-15 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN112629744A (en) * | 2020-12-03 | 2021-04-09 | 国网黑龙江省电力有限公司电力科学研究院 | Atmospheric pressure sensor based on cascade fiber Fabry-Perot interferometer |
| CN113701915B (en) * | 2021-09-03 | 2023-06-23 | 西安石油大学 | Preparation method of polymer filled optical fiber temperature sensor embedded with air bubbles |
| CN113701915A (en) * | 2021-09-03 | 2021-11-26 | 西安石油大学 | Preparation method of polymer-filled optical fiber temperature sensor embedded with air bubbles |
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Granted publication date: 20171107 Termination date: 20180310 |