CN108375348B - Optical fiber bending sensor and preparation method thereof - Google Patents

Optical fiber bending sensor and preparation method thereof Download PDF

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Publication number
CN108375348B
CN108375348B CN201810498326.XA CN201810498326A CN108375348B CN 108375348 B CN108375348 B CN 108375348B CN 201810498326 A CN201810498326 A CN 201810498326A CN 108375348 B CN108375348 B CN 108375348B
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optical fiber
micro
lens
tube
lens optical
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CN108375348A (en
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何俊
徐锡镇
王义平
侯茂祥
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Shenzhen University
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Shenzhen University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
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Abstract

The invention discloses an optical fiber bending sensor and a preparation method of the optical fiber bending sensor, wherein the optical fiber bending sensor comprises a transmission optical fiber, a micro-lens optical fiber, a micro-tubule and a reflection optical fiber, one end of the transmission optical fiber is connected with a system to be tested, the other end of the transmission optical fiber is connected with one end of the micro-lens optical fiber, the other end of the micro-lens optical fiber is connected with one end of the micro-tube, the other end of the micro-tube is connected with the reflection optical fiber, the transmission optical fiber, the micro-lens optical fiber, the micro-tubule and the reflection optical fiber have the same coaxiality, the interfaces of the micro-lens optical fiber and the micro-tubule are parallel, the interfaces of the micro-tubule and the reflection optical fiber are parallel, so that a Fabry-Perot cavity is formed, the micro-Perot cavity is subjected to light beam collimation operation and is injected into the micro-tube, the light beam is reflected back from the micro-tube to the reflection optical fiber, and light beam interference is carried out in the Fabry-Perot cavity, so that the prepared Fabry-Perot cavity has high contrast, and the measurement accuracy.

Description

Optical fiber bending sensor and preparation method thereof
Technical Field
The invention relates to the technical field of optical fibers, in particular to an optical fiber bending sensor and a preparation method of the optical fiber bending sensor.
Background
With the development of technology, various optical fiber bending sensors have been developed to address different needs in various fields. The optical fiber bending sensor has numerous advantages, such as small volume, easy integration, strong high temperature resistance, strong electromagnetic interference resistance, no influence of environmental dust, linearity of response, high sensitivity and the like, and is applied to various fields: the method comprises the following steps of carrying out health state and safety pre-warning on a large building, enabling a stressed structure of an aerospace vehicle to sense deformation and bending in real time in a flight state, sensing the movement direction of an intelligent mechanical arm in the automatic industry, and sensing the movement state of a detection head in real time when detecting the inside of a human tissue structure in biomedical treatment.
However, the existing optical fiber bending sensor for measuring bending mainly comprises a long-period optical fiber grating, a corroded Bragg optical fiber grating and an optical fiber Fabry-Perot interferometer, wherein the long-period optical fiber grating is interfered when the external refractive index and the temperature change, and the sensitivity of the long-period optical fiber grating is affected; the corroded Bragg fiber bragg grating can also be used for bending sensing, but the strength of the Bragg fiber bragg grating is greatly reduced, the Bragg fiber bragg grating is more easily damaged, and the sensitivity of a microbending range is low; the optical fiber Fabry-Perot interferometer is directly used for measuring bending, the contrast ratio of the optical fiber Fabry-Perot interferometer is too low to influence sensitivity, demodulation accuracy is influenced under the condition of wavelength demodulation, a resonant cavity medium of the optical fiber Fabry-Perot interferometer is air, the contrast ratio is sharply reduced along with the increase of the cavity length, because the emergence angle of a single-mode fiber is larger, the cavity length is increased, most of energy cannot be coupled back into the single-mode fiber after passing through a second reflecting surface, the contrast ratio is sharply reduced along with the increase of the cavity length, and the sensitivity is not high.
Therefore, the existing optical fiber bending sensor mainly has the technical problems of low measurement sensitivity and inaccurate measurement.
Disclosure of Invention
The invention mainly aims to provide an optical fiber bending sensor and a preparation method of the optical fiber bending sensor, and aims to solve the technical problems of low measurement sensitivity and inaccurate measurement of the existing optical fiber bending sensor.
To achieve the above object, a first aspect of the present invention provides an optical fiber bending sensor comprising: transmission optical fiber, microlens optical fiber, micro tube and reflection optical fiber;
one end of the transmission optical fiber is connected with a system to be tested, the other end of the transmission optical fiber is connected with one end of the micro-lens optical fiber, the other end of the micro-lens optical fiber is connected with one end of the micro-tube, and the other end of the micro-tube is connected with the reflecting optical fiber;
The transmission optical fiber, the micro-lens optical fiber, the micro-tubule and the reflection optical fiber have the same coaxiality, the interface of the micro-lens optical fiber is parallel to the interface of the micro-tubule, and the interface of the micro-tubule is parallel to the interface of the reflection optical fiber to form a Fabry-Perot cavity;
The system to be tested emits light beams to the transmission optical fiber and the light beams are incident to the micro-lens optical fiber through the transmission optical fiber, the micro-lens optical fiber is used for carrying out light beam collimation operation on the light beams and injecting the light beams into the micro-tubule, the light beams are injected into the reflection optical fiber from the micro-tubule and reflected back to the micro-tubule from the reflection optical fiber, and light beam interference is carried out in the Fabry-Perot cavity. Further, the transmission optical fiber is a quartz optical fiber.
To achieve the above object, a second aspect of the present invention provides a method for manufacturing an optical fiber bending sensor according to the first aspect, comprising:
connecting one end of a transmission optical fiber with one end of a micro-lens optical fiber;
connecting the other end of the micro-lens optical fiber with one end of a micro-tubule;
And connecting the other end of the micro-tubule with a reflective optical fiber.
Further, the connecting the other end of the micro-lens optical fiber with one end of the micro-tubule, before further includes:
And cutting the other end of the micro-lens optical fiber to obtain the micro-lens optical fiber with the 1/4 focusing period length.
Further, the cutting operation is performed on the other end of the micro-lens optical fiber to obtain a micro-lens optical fiber with a 1/4 focusing period length, including:
And installing an optical fiber clamping device on a precise displacement platform, placing the micro-lens optical fiber on the optical fiber clamping device, observing the distance between the connection point of the micro-lens optical fiber and the transmission optical fiber and the optical fiber precise cutting knife through a microscope, and performing cutting operation at the position reaching 1/4 of the focusing period of the micro-lens optical fiber to obtain the micro-lens optical fiber with the 1/4 focusing period length.
Further, the connecting the other end of the micro-lens optical fiber with one end of the micro-tubule includes:
and (3) biasing the discharge position regulation and control to one end of the micro-lens optical fiber subjected to the cutting operation by using an optical fiber fusion splicer, and connecting one end of the micro-lens optical fiber subjected to the cutting operation with one end of the micro-tube by adopting discharge quantity and discharge time which are lower than those of a conventional single-mode optical fiber subjected to fusion splicing.
Further, the connecting the other end of the micro tubule with the reflective optical fiber includes:
And (3) deflecting the discharge position regulation to one end of the reflecting optical fiber, adopting the discharge amount and the discharge time which are lower than those of a welded conventional single-mode optical fiber, connecting the other end of the micro-tube with one end of the reflecting optical fiber, maintaining the coaxiality of the transmission optical fiber, the micro-lens optical fiber, the micro-tube and the reflecting optical fiber, maintaining the interface of the micro-lens optical fiber and the interface of the micro-tube to be parallel, and maintaining the interface of the micro-tube and the interface of the reflecting optical fiber to be parallel.
The present invention provides an optical fiber bending sensor, comprising: the system comprises a transmission optical fiber, a micro-lens optical fiber, a micro-tubule and a reflection optical fiber, wherein one end of the transmission optical fiber is connected with a system to be tested, the other end of the transmission optical fiber is connected with one end of the micro-lens optical fiber, the other end of the micro-lens optical fiber is connected with one end of the micro-tubule, the other end of the micro-tubule is connected with the reflection optical fiber, the transmission optical fiber, the micro-lens optical fiber, the micro-tubule and the reflection optical fiber have the same coaxiality, the interface of the micro-lens optical fiber is parallel to the interface of the micro-tubule, the interface of the micro-tubule is parallel to the interface of the reflection optical fiber so as to form a Fabry-Perot cavity, the system to be tested emits light beams to the micro-lens optical fiber, the system to be tested emits light beams to the transmission optical fiber, and the micro-lens optical fiber is incident to the micro-lens optical fiber through the transmission optical fiber, the micro-lens optical fiber is used for carrying out light beam collimation operation and incident into the micro-tubule, and the light beams are emitted into the reflection optical fiber from the micro-tube, and reflected back into the micro-tube from the reflection optical fiber so as to carry out light beam interference in the Fabry-Perot cavity. Compared with the prior art, in the prepared optical fiber bending sensor, the transmission optical fiber, the micro-lens optical fiber, the micro-tubule and the reflection optical fiber have the same coaxiality, the interface of the micro-lens optical fiber is parallel to the interface of the micro-tubule, and the interface of the micro-tubule is parallel to the interface of the reflection optical fiber, so that the prepared Fabry-Perot cavity has higher contrast, and the prepared optical fiber bending sensor has high sensitivity and more accurate measurement.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are necessary for the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention and that other drawings may be obtained from them without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an optical fiber bending sensor according to a first embodiment of the present invention;
FIG. 2 is a schematic flow chart of a method for manufacturing an optical fiber bending sensor according to a second embodiment of the present invention;
fig. 3 is another flow chart of a method for manufacturing an optical fiber bending sensor according to a second embodiment of the present invention.
Detailed Description
In order to make the objects, features and advantages of the present invention more comprehensible, the technical solutions in the embodiments of the present invention will be clearly described in conjunction with the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In order to illustrate the technical scheme of the invention, the following description is made by specific examples.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an optical fiber bending sensor according to a first embodiment of the present invention, where the optical fiber bending sensor includes: transmission fiber 10, microlens fiber 20, micro tube 30, and reflection fiber 40;
One end of the transmission optical fiber 10 is connected with a system to be tested, the other end of the transmission optical fiber 10 is connected with one end of the micro lens optical fiber 20, the other end of the micro lens optical fiber 20 is connected with one end of the micro tube 30, and the other end of the micro tube 30 is connected with the reflection optical fiber 40;
The transmission optical fiber 10, the micro-lens optical fiber 20, the micro-tube 30 and the reflection optical fiber 40 have the same coaxiality, the interface of the micro-lens optical fiber 20 is parallel to the interface of the micro-tube 30, and the interface of the micro-tube 30 is parallel to the interface of the reflection optical fiber 40 to form a fabry-perot cavity;
The system to be tested emits light beams to the transmission optical fiber 10 and enters the micro-lens optical fiber 20 through the transmission optical fiber 10, the micro-lens optical fiber 20 is used for carrying out light beam collimation operation on the light beams and entering the micro-tubule 30, the light beams enter the reflection optical fiber 40 from the micro-tubule 30 and are reflected back to the micro-tubule 30 from the reflection optical fiber 40, and light beam interference is carried out in the Fabry-Perot cavity.
Wherein the transmission fiber 10 is a quartz fiber. The micro-lens fiber 20 is a quartz fiber having a micro-lens function. The microtube 30 is a quartz tube having a hollow structure. The reflective optical fiber 40 is a quartz optical fiber.
The transmission fiber 10, the microlens fiber 20, the micro tube 30, and the reflection fiber 40 are made of the same material.
In the process of fusion-bonding the transmission optical fiber 10, the microlens optical fiber 20, the fine tube 30, and the reflection optical fiber 40, it is necessary to maintain high mechanical strength and reduce the deformation amount of the fine tube 30.
The broken line in fig. 1 is for distinguishing the transmission fiber 10, the microlens fiber 20, the fine tube 30, and the reflection fiber 40, and has no other meaning.
In an embodiment of the present invention, there is provided an optical fiber bending sensor including: the system comprises a transmission optical fiber 10, a micro lens optical fiber 20, a micro tube 30 and a reflection optical fiber 40, wherein one end of the transmission optical fiber 10 is connected with a system to be tested, the other end of the transmission optical fiber 10 is connected with one end of the micro lens optical fiber 20, the other end of the micro lens optical fiber 20 is connected with one end of the micro tube 30, the other end of the micro tube 30 is connected with the reflection optical fiber 40, the transmission optical fiber 10, the micro lens optical fiber 20, the micro tube 30 and the reflection optical fiber 40 have the same coaxiality, the interface of the micro lens optical fiber 20 and the interface of the micro tube 30 are parallel, the interface of the micro tube 30 and the interface of the reflection optical fiber 40 are parallel to form a Fabry-Perot cavity, the system to be tested emits light beams to the transmission optical fiber 10 and enters the micro lens optical fiber 20 through the transmission optical fiber 10, the micro lens optical fiber 20 is used for performing light beam collimation operation and is injected into the micro tube 30, and light beams are injected into the reflection optical fiber 40 from the micro tube 30 and reflected back from the reflection optical fiber 40 to the micro tube 30, and light beam interference is performed in the Fabry-Perot cavity. Compared with the prior art, in the prepared optical fiber bending sensor, the transmission optical fiber 10, the micro-lens optical fiber 20, the micro-tube 30 and the reflection optical fiber 40 have the same coaxiality, the interface of the micro-lens optical fiber 20 is parallel to the interface of the micro-tube 30, and the interface of the micro-tube 30 is parallel to the interface of the reflection optical fiber 40, so that the prepared Fabry-Perot cavity has higher contrast, and the prepared optical fiber bending sensor has high sensitivity and more accurate measurement.
Referring to fig. 2 and 3, fig. 2 is a schematic flow chart of a method for manufacturing an optical fiber bending sensor according to a second embodiment of the present invention, and fig. 3 is another schematic flow chart of a method for manufacturing an optical fiber bending sensor according to a second embodiment of the present invention, including:
step 201, connecting one end of the transmission optical fiber 10 with one end of the micro-lens optical fiber 20;
in the embodiment of the present invention, as shown in fig. 3, one end b of the transmission optical fiber 10 and one end c of the microlens optical fiber 20 are connected.
Step 202, performing cutting operation on the other end of the micro-lens optical fiber 20 to obtain the micro-lens optical fiber 20 with the 1/4 focusing period length;
In the embodiment of the present invention, as shown in fig. 3, the other end d-end of the micro-lens fiber 20 is cut by using the fiber finishing cutter 50, so as to obtain the micro-lens fiber 20 with a 1/4 focusing period length.
Specifically, the optical fiber clamping device is mounted on a precision displacement platform, the micro-lens optical fiber 20 is placed on the optical fiber clamping device, the distance between the connection point of the b end of the micro-lens optical fiber 20 and the c end of the transmission optical fiber 10 and the optical fiber precision cutter 50 is observed through a microscope, and cutting operation is performed at the position reaching 1/4 of the focusing period of the micro-lens optical fiber 20, so that the micro-lens optical fiber 20 with the length of 1/4 of the focusing period is obtained. At this time, the other end d-end of the microlens fiber 20 becomes the d 1-end.
Step 203, connecting the other end d1 end of the micro-lens optical fiber 20 with one end e end of the micro-tube 30;
In the embodiment of the present invention, as shown in fig. 3, the other end d1 of the micro-lens fiber 20 is connected to the one end e of the micro-pipe 30.
Specifically, the end d1 of the microlens fiber 20 after the cutting operation is connected to the end e of the micro tube 30 by using a fiber fusion splicer to bias the discharge position control to the end d1 of the microlens fiber 20 after the cutting operation, and by using a discharge amount and a discharge time lower than those of the fusion spliced conventional single mode fiber.
Step 204, the other end f of the fine tube 30 is connected to the reflection optical fiber 40.
In the embodiment of the present invention, as shown in fig. 3, the other end f of the fine tube 30 is connected to the g end of the reflection optical fiber 40.
Specifically, the discharge position is controlled to be biased toward the end g of the reflective optical fiber 40, the discharge amount and the discharge time lower than those of the conventional single-mode optical fiber are adopted, the end f of the micro tube 30 is connected with the end g of the reflective optical fiber 40, the coaxiality of the transmission optical fiber 10, the micro lens optical fiber 20, the micro tube 30 and the reflective optical fiber 40 is maintained, the interface of the micro lens optical fiber 20 and the interface of the micro tube 30 are maintained to be parallel, and the interface of the micro tube 30 and the interface of the reflective optical fiber 40 are maintained to be parallel.
The broken line in fig. 3 is only for distinguishing the transmission fiber 10, the microlens fiber 20, the fine tube 30, and the reflection fiber 40, and has no other meaning.
In the embodiment of the present invention, one end of the transmission optical fiber 10 is connected to one end of the micro lens optical fiber 20, the other end of the micro lens optical fiber 20 is connected to one end of the micro tube 30, and the other end of the micro tube 30 is connected to the reflection optical fiber 40. Because the transmission optical fiber 10, the micro-lens optical fiber 20, the micro-tube 30 and the reflection optical fiber 40 in the prepared optical fiber bending sensor have the same coaxiality, the interface of the micro-lens optical fiber 20 is parallel to the interface of the micro-tube 30, and the interface of the micro-tube 30 is parallel to the interface of the reflection optical fiber 40, the prepared Fabry-Perot cavity has higher contrast, and the prepared optical fiber bending sensor has high sensitivity and more accurate measurement.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and for parts of one embodiment that are not described in detail, reference may be made to the related descriptions of other embodiments.
The foregoing is a description of an optical fiber bending sensor and a method for manufacturing the same provided by the present invention, and it should be understood that the present invention is not limited thereto, since modifications may be made by those skilled in the art in light of the concepts of the embodiments of the present invention, both in terms of the specific embodiments and the application scope.

Claims (5)

1. An optical fiber bending sensor, the optical fiber bending sensor comprising: transmission optical fiber, microlens optical fiber, micro tube and reflection optical fiber;
one end of the transmission optical fiber is connected with a system to be tested, the other end of the transmission optical fiber is connected with one end of the micro-lens optical fiber, the other end of the micro-lens optical fiber is connected with one end of the micro-tube, and the other end of the micro-tube is connected with the reflecting optical fiber;
The transmission optical fiber, the micro-lens optical fiber, the micro-tubule and the reflection optical fiber have the same coaxiality, the interface of the micro-lens optical fiber is parallel to the interface of the micro-tubule, and the interface of the micro-tubule is parallel to the interface of the reflection optical fiber to form a Fabry-Perot cavity;
The system to be tested emits light beams to the transmission optical fiber and the light beams are incident to the micro-lens optical fiber through the transmission optical fiber, the micro-lens optical fiber is used for carrying out light beam collimation operation on the light beams and injecting the light beams into the micro-tubule, the length of the micro-lens optical fiber is 1/4 of the focusing period of the micro-lens optical fiber, the light beams are injected into the reflection optical fiber from the micro-tubule and reflected back to the micro-tubule from the reflection optical fiber, and light beam interference is carried out in the Fabry-Perot cavity.
2. A method of manufacturing an optical fiber bending sensor according to claim 1, comprising:
connecting one end of a transmission optical fiber with one end of a micro-lens optical fiber;
Cutting the other end of the micro-lens optical fiber to obtain a micro-lens optical fiber with a 1/4 focusing period length;
connecting the other end of the micro-lens optical fiber with one end of a micro-tubule;
And connecting the other end of the micro-tubule with a reflective optical fiber.
3. The method of manufacturing according to claim 2, wherein the cutting operation is performed on the other end of the microlens optical fiber to obtain a microlens optical fiber having a 1/4 focusing period length, comprising:
And installing an optical fiber clamping device on a precise displacement platform, placing the micro-lens optical fiber on the optical fiber clamping device, observing the distance between the connection point of the micro-lens optical fiber and the transmission optical fiber and the optical fiber precise cutting knife through a microscope, and performing cutting operation at the position reaching 1/4 of the focusing period of the micro-lens optical fiber to obtain the micro-lens optical fiber with the 1/4 focusing period length.
4. The method of claim 2, wherein connecting the other end of the lensed fiber to one end of a microcapillary, comprises:
and (3) biasing the discharge position regulation and control to one end of the micro-lens optical fiber subjected to the cutting operation by using an optical fiber fusion splicer, and connecting one end of the micro-lens optical fiber subjected to the cutting operation with one end of the micro-tube by adopting discharge quantity and discharge time which are lower than those of a conventional single-mode optical fiber subjected to fusion splicing.
5. The method of claim 2, wherein connecting the other end of the microcapillary tube with a reflective optical fiber, comprises:
And (3) deflecting the discharge position regulation to one end of the reflecting optical fiber, adopting the discharge amount and the discharge time which are lower than those of a welded conventional single-mode optical fiber, connecting the other end of the micro-tube with one end of the reflecting optical fiber, maintaining the coaxiality of the transmission optical fiber, the micro-lens optical fiber, the micro-tube and the reflecting optical fiber, maintaining the interface of the micro-lens optical fiber and the interface of the micro-tube to be parallel, and maintaining the interface of the micro-tube and the interface of the reflecting optical fiber to be parallel.
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Publication number Priority date Publication date Assignee Title
CN109141292A (en) * 2018-09-14 2019-01-04 重庆三峡学院 A kind of fibre cladding SPR microbend sensor and its caliberating device
CN110986819B (en) * 2019-12-16 2021-04-06 西安工业大学 Fabry-Perot cavity type optical fiber curvature sensing probe and manufacturing method thereof

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