CN109596243A - Sapphire fiber Fabry-Perot sensor and preparation method thereof based on femtosecond laser etching - Google Patents
Sapphire fiber Fabry-Perot sensor and preparation method thereof based on femtosecond laser etching Download PDFInfo
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- CN109596243A CN109596243A CN201811315399.7A CN201811315399A CN109596243A CN 109596243 A CN109596243 A CN 109596243A CN 201811315399 A CN201811315399 A CN 201811315399A CN 109596243 A CN109596243 A CN 109596243A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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Abstract
The invention discloses a kind of sapphire fiber Fabry-Perot sensors and preparation method thereof based on femtosecond laser etching, the sensor structure includes sapphire fiber (1), silica fibre (5) and the heterogeneous optical fiber fusion welding point (6) for connecting both optical fiber, sapphire fiber (1) tail end has the method amber microcavity (2) by femtosecond laser lithography, and the two beam reflected lights that the first reflecting surface (3) possessed by method amber microcavity (2) and the second reflecting surface (4) generate interfere and generate interference signal (11)；When locating environment temperature changes, the chamber of the method amber microcavity (2) is long and Refractive Index of Material changes, and the optical path difference between two beam reflected lights changes therewith, so as to cause the variation of interference signal (11)；Method amber optical path difference is obtained by demodulated interferential signal, and then obtains dut temperature.The present invention has theory innovation, the feature that size is small, environment-adapting ability is strong, and the high temperature that can be used under narrow measurement environment accurately senses.
Description
Technical field
The present invention relates in technical field of optical fiber sensing, femtosecond laser precision etching technics system is based on more particularly to one kind
The micromation sapphire fiber pyrostat of work.
Background technique
High temp sensitive technology based on sapphire fiber is with spies such as its resistance to oxidation, high-precision, electromagnetism interference, miniaturizations
Property, it is played an important role in high temperature monitoring field.
In recent years it has been proposed that a plurality of types of sapphire fiber sensors realize excessive temperature (1000 DEG C or more)
Measurement, such as grating type optical fiber, black body radiation type and Fabry-perot optical fiber type.Wherein: (1) sapphire fiber grating sensor is limited to indigo plant
The biggish numerical aperture of jewel optical fiber, Pattern perturbation is serious, and measurement accuracy is lower with respect to other methods.(2) black body radiation type is blue
Jewel fibre optical sensor is based on Planck blackbody radiation law, has good temperature measurement accuracy for (600-1600 DEG C) in high-temperature region,
But since low temperature radiation power significantly reduces, in 600 DEG C or less the very fast decaying of signal-to-noise ratio, temperature-measuring range is limited, Zhi Nengyong
In the temperature monitoring of high temperature section.(3) sapphire fiber Fabry-Perot sensor has extremely wide measurement range, can be according to requiring flexibly to set
Meter is made of traditional grinding technics and laser etching techniques, be can be mass, cost is relatively low, therefore has a wide range of applications
Range.
It since sapphire fiber is made of crystal growth pattern, is limited in length, in the world generally by blue precious
The mode of stone optical fiber and silica fibre welding realizes remote recording, i.e. high-temperature region uses sapphire fiber, room temperature area uses
Silica fibre lengthens transmission range.During heterogeneous fiber coupling, in order to reach coupling efficiency as high as possible, need to indigo plant
Jewel optical fiber and silica fibre end face are processed by shot blasting to reduce the scattering loss of fusion point.
Summary of the invention
For the deficiency that traditional sapphire fiber sensor size is big, response speed is slow, the invention proposes one kind to be based on
The sapphire fiber Fabry-Perot sensor and preparation method thereof of femtosecond laser etching is made micro- based on femtosecond laser precision etching technics
Type sapphire fiber pyrostat is realized that sensing probe is miniature, sensor structure is succinctly integrated, is rung to sensor is improved
It answers speed and realizes that the real-time monitoring of temperature under complex environment is significant.
A kind of sapphire fiber Fabry-Perot sensor based on femtosecond laser etching of the invention, including sapphire fiber (1),
Silica fibre (5) and the heterogeneous optical fiber fusion welding point (6) for connecting both optical fiber, sapphire fiber (1) tail end, which has, to be passed through
The method amber microcavity (2) of femtosecond laser lithography, the first reflecting surface (3) and the second reflecting surface (4) possessed by method amber microcavity (2)
The two beam reflected lights generated interfere and generate interference signal (11)；When locating environment temperature changes, the method
The chamber of amber microcavity (2) is long and Refractive Index of Material changes, and the optical path difference between two beam reflected lights changes therewith, to lead
Cause the variation of interference signal (11)；Method amber optical path difference is obtained by demodulated interferential signal, and then obtains dut temperature.
A kind of production method of sapphire fiber method amber pyrostat based on femtosecond laser etching of the invention, the party
Method specifically includes the following steps:
Step 1: the sapphire fiber of preparation Double End polishing is as sensor material, concrete operations include:
One section that the sapphire fiber that diameter is 100 microns is cut into 15 centimeter lengths is fixed by optic fiber polishing machine spindle,
Fixed 0.2 to 0.5 millimeter of ferrule endface is exposed into one end therein, adjusts optic fiber polishing machine spindle axis and abrasive disk angle
Degree is vertical in 90 °；Before polishing to it, the diamond lap paper of 10um fineness is selected to do patterning process to fiber end face:
First abrasive disk is drenched with water, it will be on pouncing paper Rotary adsorption to abrasive disk；Check the compactness between pouncing paper and abrasive disk,
It is processed after smooth bubble-free；Grinder spindle is bonded by five dimension displacement angle adjustment frame elevating controls to fiber end face
Onto pouncing paper, but ceramic insertion core and pouncing paper are contactless, open grinder rotary disk shutter, adjustment revolving speed is 50 revs/min, right
Fiber end face carries out first time processing；Then rough polishing fiber end face is observed fiber end face, found under the microscope to smooth
End face is in nearly circle hexagon, the smooth zero defect in surface；Successively change polishing paper into 7 μm, 3 μm, 1 μm, to fiber end face into
Row polishing operation, step are same as above；After completing grinding sizing, finally high-precision polishing grinding is carried out to fiber end face, will ground
Mill paper changes the diamond polishing paper that fineness is 0.3 μm into, sprays clean water to optical fiber and pouncing paper contact position in process of lapping, protects
Hold it is wet, adjust revolving speed be 30 revs/min, grind 15 minutes；
Step 2: using heterogeneous optical fiber fusion welding technology structure sensor system, that is, the sapphire that Double End is polished
One end of optical fiber and silica fibre constitute a complete transmission waveguide by optical fiber splicer progress manual weld, specific to grasp
Work includes:
Silica fibre is cut flat with into end face with optical fiber cutter, under optical fiber splicer microscope, adjusts silica fibre end face
With sapphire fiber end face to coaxial, end distance between the surface control at 10-20 μm, setting heat sealing machine optical fiber clamp the advance of motor away from
From being 30-35 μm, heterogeneous fused fiber splice is carried out；After welding, silica fibre one end passes through optical patchcord and fiber coupler
Connection, the input terminal of coupler are connected on LED light source, and receiving end is connected to micro spectrometer；
Step 3: progress femto-second laser calibration and sapphire fiber method amber microcavity etching, concrete operations include:
Sapphire fiber is fixed on a piece of clean glass slide, glass slide is fixed on femtosecond laser processing platform,
Femto-second laser beam path alignment is adjusted first, tests femto-second laser machining accuracy, chooses processing focal plane；Processing platform is controlled,
The focus of femto-second laser focusing objective len is set to fall in glass slide on the outer surface of object lens, on same light path visible light microscope
Observe slide surface sharply defined image, it was demonstrated that focus alignment；Horizontal, the mobile processing platform of vertical direction, until image planes are clear
Prove that processing platform Uprightness adjusting is completed, glass slide outer surface is overlapped with femto-second laser focusing objective len focal plane, and femto-second laser is opened
Machine, repetition rate select 500KHz, power selection 4W, available machine time to select 100ms, carry out examination processing to print；Shutdown, observation
Sample surface: if glass slide outer surface is processed one 10-20 μm of diameter of black aperture, illustrate to process focal position choosing
It selects correct；If processing bore dia is excessive or print on there is not the black holes of calcination, illustrate also to need trim locations again
Find focal plane；After completing focusing, femto-second laser is focused in slide surface；At this moment it is mobile to control automatically controlled displacement platform, by rigid
The blank slide positions of ability are displaced to the sapphire fiber endface of clamping, and adjustment position centering is placed；After movement, femtosecond swashs
Light device focus is still aligned on glass slide outer surface, is sapphire fiber to be processed between object lens and glass slide, is adjusted
Automatically controlled displacement platform makes print vertically retreat the distance of a sapphire fiber diameter, micro- when print no longer shakes under microscope
The picture presented under adjusted position to microscope is clear；Sapphire fiber is a bright line at object lens position at this time, and processing is burnt
Away from being aligned on the side of sapphire fiber outer most edge；Femto-second laser is opened, setting femto-second laser repetition rate is 500kHz,
Power setting is 2W, starts to process sapphire fiber Fabry-Perot sensor, setting processing platform presses program vertical displacement, and optical fiber is passing through
It is processed shaping rib when overfocus, repeats to process a rib, the width of each rib is determined by spot diameter；Process rib
Afterwards, processing platform is moved horizontally, continues to process, completes the shallow slot processing of 70 μm of width, then 5 μm of vertical thrust, repeat above-mentioned
Manufacturing procedure；Successively deeply promote, until working depth reaches 50 μm or so, so far, sapphire fiber Fabry-Perot sensor blank
Completion of processing, next, to remaining section after optical-fibre precise lithography half of cylinder of excision, that is, the first reflection
Face is processed by shot blasting；Sapphire fiber adjustment is rotated by 90 °, and normal line of butt end direction is parallel with femto-second laser outgoing light direction,
Processing platform is adjusted, the second polished reflecting surface is moved at femto-second laser focal plane, opens femto-second laser, setting flies
Second laser repetition rate is 50MHz, power setting 2W, is polished to the second reflecting surface processed, by sensor
It being connected in demodulating system by optical patchcord, observation signal variation stops processing until interference fringe occurs in signal spectrum,
Sensor production finishes.
A kind of sapphire fiber Fabry-Perot sensor system based on femtosecond laser etching of the invention, the sensing system packet
Include wideband light source 9,2*1 fiber coupler 8, spectrometer 12 and be made of sapphire fiber 1, silica fibre 5 and Fa Po microcavity
Sapphire fiber Fabry-Perot sensor；Wherein:
When the sapphire fiber Fabry-Perot sensor works, 5 end of silica fibre is passed through into optical patchcord 7 and 2*1 optical fiber coupling
The output end of clutch 8 is connected, spectrometer 12 is connected.Fiber coupler input termination 850nm LED light source (9) mentions for sensor
For original optical signal, coupler returns to termination micro spectrometer 10.The original letter of Gauss light source issued from 850nm LED light source 9
Numbers 10, which pass sequentially through 2*1 fiber coupler 8, enters optical patchcord 7, silica fibre 5, heterogeneous optical fiber fusion welding point 6, sapphire fiber
1, the method amber microcavity 2 by femtosecond laser lithography is entered, is interfered；When locating environment temperature changes,
The chamber of the method amber microcavity 2 is long and Refractive Index of Material changes, and the optical path difference between two beam reflected lights changes therewith, from
And lead to the variation of interference signal 11, method amber optical path difference is obtained by demodulated interferential signal, and then obtain dut temperature；Interference letter
Numbers 11 carry temperature informations, successively pass through heterogeneous optical fiber fusion welding point 6, silica fibre 5, optical patchcord 7,2*1 from sapphire fiber 1
Fiber coupler 8 is received by micro spectrometer 12.
Compared with prior art, the sapphire fiber pyrostat and its production of the invention based on femtosecond laser etching
Method has the positive effect that:
1, using femtosecond laser, the lithographic method directly on optical fiber is made the present invention, does not need other accessories, and structure is simple,
Reliable performance, it is economical and practical；The feature that size is small, environment-adapting ability is strong, the high temperature that can be used under narrow measurement environment accurately pass
Sense.
2, temperature sensing principle of the invention is to realize interference light path using the thermo-optic effect and thermal expansion effects of optical fiber
The conversion of temperature to interference optical path difference is realized in the change of difference；Compared to traditional method amber or Mach Zehnder temperature sensing, this hair
It is bright that there is theory innovation.
3, the present invention overcomes large-numerical aperture fiber mode complexity, mode by optimization amber sensor light line structure
The influence of interference, structural theory have general applicability.
Detailed description of the invention
Fig. 1 is that sapphire fiber end face polishes micro- (photo) schematic diagram under different finenesses；
Fig. 2 is micro- (photo) schematic diagram at sapphire fiber and multimode silica fibre fusion point；
Fig. 3 is different capacity in the sapphire fiber femtosecond laser etching process of the invention based on femtosecond laser etching
The rib figure of lower etching；
Fig. 4 is the sapphire fiber pyrostat structural schematic diagram of the invention based on femtosecond laser etching；
Fig. 5 is the optic path schematic diagram of the sapphire fiber pyrostat of the invention based on femtosecond laser etching；
Fig. 6 is is formed using the sapphire fiber pyrostat based on femtosecond laser etching of the embodiment of the present invention one
Sensor-based system schematic diagram；
Appended drawing reference: 1, sapphire fiber, 2, method amber microcavity, the 3, first reflecting surface, the 4, second reflecting surface, 5, quartzy light
Fibre, 6, heterogeneous optical fiber fusion welding point, 7, optical patchcord, 8,2*1 fiber coupler, 9, LED light source, 10, original signal, 11, interference
Signal, 12, spectrometer.
Specific embodiment
Technical solution of the present invention is described in further detail below in conjunction with example.
Embodiment one:
In conjunction with shown in Fig. 4 and Fig. 6, for by 850nm LED wideband light source 9 go out original signal 10 through optical patchcord 7, multimode
Silica fibre 5, heterogeneous optical fiber fusion welding point 6,1 introductory technique amber microcavity 2 of sapphire fiber, 11 light of interference signal successively pass through sapphire
Optical fiber 1, heterogeneous optical fiber fusion welding point 6, silica fibre 5, optical patchcord 7 are received by spectrometer 12.Pyrostat is placed on high temperature
The tubular type of Muffle furnace 13 is intracavitary, is that sensor applies a temperature variable by adjusting Muffle furnace chamber temperature, measurement range is
100-1080℃.The variation of temperature causes 2 light refractive index of method amber microcavity and material dilation, causes the change of method amber optical path difference
Change, by calculating the received interference spectrum information of spectrometer 12, so that it may obtain the sensor under measurement environment temperature
Optical path difference.Since sensor light path difference and sapphire wafer refractive index and chip thermal expansion length have fixed relationship Δ=2n
(T) L (T) is obtained with sensing real time temperature by counter push away.
A kind of sapphire fiber Fabry-Perot sensor production method based on femtosecond laser etching, this method specifically includes following
Step:
Step 1: the sapphire fiber of preparation Double End polishing is as sensor material.
The sapphire fiber that diameter is 100 microns is cut into one section of 15 centimeter lengths, is fixed by optic fiber polishing machine spindle,
Fixed 0.2 to 0.5 millimeter of ferrule endface is exposed into one end therein, adjusts optic fiber polishing machine spindle axis and abrasive disk angle
Degree is vertical in 90 °.Since sapphire fiber hardness is high, so selecting the diamond of 10 μm of finenesses to grind before polishing to it
Mill paper does patterning process to fiber end face.First abrasive disk is drenched with water, it will be on pouncing paper Rotary adsorption to abrasive disk.Inspection is ground
The compactness between paper and abrasive disk is ground, smooth bubble-free can be processed.Grinder spindle is passed through into five dimension displacement angles
Adjustment frame elevating control fits on pouncing paper to fiber end face, but ceramic insertion core and pouncing paper are contactless.Grinder is opened to turn
Disk switch, adjustment revolving speed are 50 revs/min, carry out first time processing to fiber end face.Rough polishing fiber end face is to smooth, so
Observe fiber end face under the microscope afterwards, discovery end face is in nearly circle hexagon, the smooth zero defect in surface.
Since 10um pouncing paper grinding precision is lower, observes, can exist more under high magnification microscope after fiber end face processing
Road rib.End finish deficiency can all cause deleterious effect to sensor signal quality and heterogeneous optical fiber fusion quality.Cause
After this obtains smooth fiber end face by rough lapping, the polishing of more high-fineness is carried out to end face.Successively change polishing paper into 7
μm, 3 μm, 1 μm, polishing operation is carried out to fiber end face, step is same as above.Complete grinding sizing after, finally will to fiber end face into
The high-precision polishing grinding of row changes pouncing paper into diamond polishing paper that fineness is 0.3 μm.In process of lapping to optical fiber with
Clean water is sprayed in pouncing paper contact position, keeps wet, and adjusting revolving speed is 30 revs/min, grinds 15 minutes.
Step 2: heterogeneous fused fiber splice structure sensor system.
One end of the sapphire fiber of Double End polishing and silica fibre are subjected to manual weld, structure by optical fiber splicer
At a complete transmission waveguide.Silica fibre is cut flat with into end face with optical fiber cutter, under optical fiber splicer microscope, is adjusted
Silica fibre end face and sapphire fiber end face are to coaxial, and end distance between the surface control is at 10-20 μm.It is heterogeneous to adjust heat sealing machine progress
The parameter of fused fiber splice, the forward travel distance that setting heat sealing machine optical fiber clamps motor is 30-35 μm, carries out heterogeneous fused fiber splice.It is molten
After connecing, silica fibre one end is connect by optical patchcord with fiber coupler, and the input terminal of coupler is connected to LED light source
On, receiving end is connected to micro spectrometer.So far, complete sensing system is tentatively established.
Step 3: femto-second laser calibration and sapphire fiber method amber microcavity etching technics.
Sapphire fiber is fixed on a clean glass slide, glass slide is fixed on femtosecond laser processing platform.
Processing platform is combined and is constituted by the automatically controlled Bit andits control platform of three-dimensional manometer and angular adjustment frame, and control processing platform can be played
Position and angle function.Femto-second laser beam path alignment is adjusted first, tests femto-second laser machining accuracy, and it is suitable to choose
Processing focal plane.Control processing platform, the outer surface for making the focus of femto-second laser focusing objective len fall in glass slide close to object lens
On.It is observed on same light path visible light microscope, it can be observed that slide surface sharply defined image, it was demonstrated that focus alignment.It is horizontal, perpendicular
Histogram is to mobile processing platform, and image planes clearly prove that processing platform Uprightness adjusting is completed, glass slide outer surface and femto-second laser
Focusing objective len focal plane is overlapped.Femto-second laser booting, repetition rate select 500KHz, power selection 4W, available machine time selection
100ms carries out examination processing to print.Sample surface is observed in shutdown.If glass slide outer surface is processed a diameter 10-
20 μm of black aperture illustrates to process focal position selection correctly.If processing bore dia is excessive or print on do not occur
The black holes of calcination illustrates that trim locations is also needed again to find focal plane.
After completing focusing, we focus on femto-second laser in slide surface.At this moment automatically controlled displacement platform is controlled
It is mobile, by blank slide positions just now, it is displaced to the sapphire fiber endface of clamping, adjustment position centering is placed.Note
It is intended in moving process, guarantees that print moves horizontally on laser focal plane, mobile whole process never changed glass slide and laser
Vertical range between device.After movement, femto-second laser focus is still aligned on glass slide outer surface, only object lens with
More sapphire fibers to be processed between glass slide.Due to the nearly cylindrical structure of sapphire fiber, the meeting on viewing microscope
A vague image is presented.At this moment, automatically controlled displacement platform is adjusted, print is made vertically to retreat the distance of a sapphire fiber diameter, to
When print no longer shakes under microscope, the picture presented under trim locations to microscope is clear.Sapphire fiber is near object at this time
Jing Weizhichu is a bright line, and processing focal length is aligned on the side of sapphire fiber outer most edge.
Femto-second laser is opened, setting femto-second laser repetition rate is 500kHz, power setting 2W, and it is blue to start processing
Jewel optical fiber Fabry-Perot sensor.Processing platform is set and presses program vertical displacement, optical fiber is processed shaping rib when through overfocus.Weight
It is added with work rib, the width of each rib is determined by spot diameter.In actual processing, rib width outline is less than spot diameter.
After processing rib, processing platform is moved horizontally, continues to process.Complete the shallow slot processing of 70 μm of width.Then it vertically pushes away
Into 5 μm, above-mentioned manufacturing procedure is repeated.It successively deeply promotes, until working depth reaches 50um or so.So far, sapphire fiber
Fabry-Perot sensor blank completion of processing, next will be processed by shot blasting two semicircle end faces of optical fiber.Two semicircles
End face, one be by polishing after reflecting surface, which has been shaved half in process, but remaining half is still
So remain finish.So the center of gravity of polishing is remaining section after accurate lithography cuts off half of cylinder, also
It is the second reflecting surface.
Sapphire fiber adjustment is rotated by 90 °, and normal line of butt end direction is parallel with femto-second laser outgoing light direction.Adjust processing
The second polished reflecting surface is moved at femto-second laser focal plane by platform.Femto-second laser is opened, femto-second laser is set
Repetition rate is 50MHz, power setting 2W, starts to polish the second reflecting surface processed.Pay attention to avoiding two
A semicircle reflecting surface intersection is repeatedly processed, and prevents from damaging the first polished reflecting surface.It is generated in process
Clast is cleaned with supersonic wave cleaning machine.Sensor is connected in demodulating system by optical patchcord, observation signal variation.Directly
There is interference fringe to signal spectrum, stop processing, sensor production finishes.
When working sensor, silica fibre (5) end is passed through to the output end of optical patchcord (7) and 2*1 fiber coupler (8)
It is connected, spectrometer (12) is connected.Fiber coupler input termination 850nm LED light source (9) provides primary light letter for sensor
Number, coupler returns to termination micro spectrometer (10).The Gauss light source original signal (10) issued from 850nm LED light source (9)
2*1 fiber coupler (8) are passed sequentially through into optical patchcord (7), silica fibre (5), heterogeneous optical fiber fusion welding point (6), sapphire
Optical fiber (1) enters the method amber microcavity (2) by femtosecond laser lithography, interferes.Interference signal (11) carries temperature
Information successively passes through heterogeneous optical fiber fusion welding point (6), silica fibre (5), optical patchcord (7), 2*1 optical fiber from sapphire fiber (1)
Coupler (8) is received by micro spectrometer (12).When the environment temperature locating for the sensor changes, method amber microcavity (2)
Chamber is long and Refractive Index of Material changes, and the optical path difference between two beam reflected lights will change, so as to cause interference signal
(11) variation.Pass through the information of the available method amber optical path difference of demodulated interferential signal.It is counter in turn to push back sapphire fiber method amber
Temperature information locating for sensor.
Claims (3)
1. a kind of sapphire fiber Fabry-Perot sensor based on femtosecond laser etching, which is characterized in that the sensor structure includes
Sapphire fiber (1), silica fibre (5) and the heterogeneous optical fiber fusion welding point (6) for connecting both optical fiber, the sapphire fiber
(1) tail end has the method amber microcavity (2) by femtosecond laser lithography, the first reflecting surface (3) possessed by method amber microcavity (2)
The two beam reflected lights generated with the second reflecting surface (4) interfere and generate interference signal (11)；When locating environment temperature is sent out
When changing, the chamber of the method amber microcavity (2) is long and Refractive Index of Material changes, and the optical path difference between two beam reflected lights is therewith
It changes, so as to cause the variation of interference signal (11)；Obtain method amber optical path difference by demodulated interferential signal, so obtain by
Testing temperature.
2. a kind of production method of the sapphire fiber method amber pyrostat based on femtosecond laser etching, which is characterized in that should
Method specifically includes the following steps:
Step 1: the sapphire fiber of preparation Double End polishing is as sensor material, concrete operations include:
One section that the sapphire fiber that diameter is 100 microns is cut into 15 centimeter lengths is fixed by optic fiber polishing machine spindle, by it
In one end expose fixed 0.2 to 0.5 millimeter of ferrule endface, adjusting optic fiber polishing machine spindle axis with abrasive disk angle is in
90 ° vertical；Before being polished to it, selects the diamond lap paper of 10um fineness to do patterning process to fiber end face: first using
Water drenches abrasive disk, will be on pouncing paper Rotary adsorption to abrasive disk；Check the compactness between pouncing paper and abrasive disk, it is smooth
It is processed after bubble-free；Grinder spindle is fitted to by five dimension displacement angle adjustment frame elevating controls to fiber end face and is ground
It grinds on paper, but ceramic insertion core and pouncing paper are contactless, opens grinder rotary disk shutter, adjustment revolving speed is 50 revs/min, to optical fiber
End face carries out first time processing；Then rough polishing fiber end face is observed fiber end face, finds end face under the microscope to smooth
In nearly circle hexagon, the smooth zero defect in surface；It successively changes polishing paper into 7 μm, 3 μm, 1 μm, fiber end face is thrown
Light operation, step are same as above；After completing grinding sizing, finally high-precision polishing grinding is carried out to fiber end face, by pouncing paper
It changes the diamond polishing paper that fineness is 0.3 μm into, clean water is sprayed to optical fiber and pouncing paper contact position in process of lapping, is kept wet
Profit, adjusting revolving speed is 30 revs/min, is ground 15 minutes；
Step 2: using heterogeneous optical fiber fusion welding technology structure sensor system, that is, the sapphire fiber that Double End is polished
One end and silica fibre by optical fiber splicer carry out manual weld, composition one complete transmission waveguide, concrete operations packet
It includes:
Silica fibre is cut flat with into end face with optical fiber cutter, under optical fiber splicer microscope, adjusts silica fibre end face and indigo plant
Jewel fiber end face is to coaxial, and at 10-20 μm, the forward travel distance that setting heat sealing machine optical fiber clamps motor is for end distance between the surface control
30-35 μm, carry out heterogeneous fused fiber splice；After welding, silica fibre one end is connect by optical patchcord with fiber coupler,
The input terminal of coupler is connected on LED light source, and receiving end is connected to micro spectrometer；
Step 3: progress femto-second laser calibration and sapphire fiber method amber microcavity etching, concrete operations include:
Sapphire fiber is fixed on a piece of clean glass slide, glass slide is fixed on femtosecond laser processing platform, first
Femto-second laser beam path alignment is adjusted, femto-second laser machining accuracy is tested, chooses processing focal plane；Processing platform is controlled, makes to fly
The second focus of laser focusing objective len falls in glass slide on the outer surface of object lens, observes on same light path visible light microscope
To slide surface sharply defined image, it was demonstrated that focus alignment；Horizontal, the mobile processing platform of vertical direction, until image planes clearly prove
Processing platform Uprightness adjusting is completed, and glass slide outer surface is overlapped with femto-second laser focusing objective len focal plane, femto-second laser booting, weight
Complex frequency selects 500KHz, power selection 4W, available machine time to select 100ms, carries out examination processing to print；Print is observed in shutdown
Surface: if glass slide outer surface is processed one 10-20 μm of diameter of black aperture, illustrate processing focal position selection just
Really；If processing bore dia is excessive or print on there is not the black holes of calcination, illustrate also to need again trim locations searching
Focal plane；After completing focusing, femto-second laser is focused in slide surface；At this moment control that automatically controlled displacement platform is mobile, by just now
Blank slide positions are displaced to the sapphire fiber endface of clamping, and adjustment position centering is placed；After movement, femto-second laser
Focus is still aligned on glass slide outer surface, is sapphire fiber to be processed between object lens and glass slide, is adjusted automatically controlled
Displacement platform makes print vertically retreat the distance of a sapphire fiber diameter, when print no longer shakes under microscope, finely tunes position
The picture presented under setting to microscope is clear；Sapphire fiber is a bright line at object lens position at this time, processes focal length pair
Standard is on the side of sapphire fiber outer most edge；Femto-second laser is opened, setting femto-second laser repetition rate is 500kHz, power
It is set as 2W, starts to process sapphire fiber Fabry-Perot sensor, setting processing platform presses program vertical displacement, and optical fiber is through overfocus
It is processed shaping rib when point, repeats to process a rib, the width of each rib is determined by spot diameter；After processing rib,
Processing platform is moved horizontally, continues to process, completes the shallow slot processing of 70 μm of width, then 5 μm of vertical thrust, repeat above-mentioned processing
Process；It successively deeply promotes, until working depth reaches 50 μm or so, so far, sapphire fiber Fabry-Perot sensor blank is
Completion of processing, next, to optical-fibre precise lithography cut off half of cylinder after remaining section, that is, the first reflecting surface into
Row polishing treatment；Sapphire fiber adjustment is rotated by 90 °, and normal line of butt end direction is parallel with femto-second laser outgoing light direction, is adjusted
The second polished reflecting surface is moved at femto-second laser focal plane by processing platform, opens femto-second laser, and setting femtosecond swashs
It is 50MHz, power setting 2W that light, which thinks highly of complex frequency, polishes to the second reflecting surface processed, sensor is passed through
Optical patchcord is connected in demodulating system, observation signal variation, until interference fringe occurs in signal spectrum, stops processing, sensing
Device production finishes.
3. a kind of sapphire fiber Fabry-Perot sensor system based on femtosecond laser etching, which is characterized in that the sensing system
Including wideband light source (9), 2*1 fiber coupler (8), spectrometer (12) and by sapphire fiber (1), silica fibre (5) and
The sapphire fiber Fabry-Perot sensor that method amber microcavity is constituted；Wherein:
When the sapphire fiber Fabry-Perot sensor works, silica fibre (5) end is passed through into optical patchcord (7) and 2*1 optical fiber coupling
The output end of clutch (8) is connected, spectrometer (12) is connected.Fiber coupler input termination 850nm LED light source (9) is sensing
Device provides original optical signal, and coupler returns to termination micro spectrometer (10)；The Gauss light issued from 850nm LED light source (9)
Source original signal (10) passes sequentially through 2*1 fiber coupler (8) into optical patchcord (7), silica fibre (5), heterogeneous optical fiber welding
Contact (6), sapphire fiber (1) enter the method amber microcavity (2) by femtosecond laser lithography, interfere；When locating
Environment temperature when changing, the chamber of the method amber microcavity (2) is long and Refractive Index of Material changes, between two beam reflected lights
Optical path difference change therewith, so as to cause the variation of interference signal (11), method amber light path is obtained by demodulated interferential signal
Difference, and then obtain dut temperature；Interference signal (11) carries temperature information, successively passes through heterogeneous optical fiber from sapphire fiber (1)
Fusion point (6), silica fibre (5), optical patchcord (7), 2*1 fiber coupler (8) are received by micro spectrometer (12).
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