CN110926646A - Micro-nano optical fiber method-amber sensor for high-speed dynamic temperature measurement and manufacturing method - Google Patents
Micro-nano optical fiber method-amber sensor for high-speed dynamic temperature measurement and manufacturing method Download PDFInfo
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- CN110926646A CN110926646A CN201911105646.5A CN201911105646A CN110926646A CN 110926646 A CN110926646 A CN 110926646A CN 201911105646 A CN201911105646 A CN 201911105646A CN 110926646 A CN110926646 A CN 110926646A
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- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
- G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
Abstract
The invention discloses a micro-nano optical fiber method-Peltier sensor for high-speed dynamic temperature measurement and a manufacturing method thereof, wherein the micro-nano optical fiber method-Peltier sensor comprises a bracket and micro-nano optical fibers; a micro-nano optical fiber Fabry-Perot cavity is engraved in the micro-nano optical fiber; a metal layer is plated on the outer wall of the micro-nano optical fiber; the bracket is a cylinder; the column body is provided with a through groove penetrating through the side wall of the column body; one end of the column body is provided with a right end fixing area, and the other end of the column body is provided with a left end fixing area corresponding to the right end fixing area; the micro-nano optical fiber with the metal layer is arranged in the right end fixing area and the left end fixing area, and the micro-nano optical fiber Fabry-Perot cavity is positioned in the through groove; the invention can realize high-speed dynamic temperature measurement, and has better structural strength and high temperature resistance.
Description
Technical Field
The invention relates to the field of temperature sensing measurement, in particular to a micro-nano optical fiber method-Peltier sensor for high-speed dynamic temperature measurement and a manufacturing method thereof.
Background
The transient temperature is an important parameter for thermodynamic analysis of high-temperature flow fields and temperature-resistant devices in the application occasions of combustion, high-speed heat transfer and the like, and plays a vital role in high-speed dynamic accurate measurement of the transient temperature in various fields of aviation, national defense, industry and the like. If the temperature of the combustion chamber of the aircraft engine exceeds 1600 ℃, the temperature measurement response time of the high-mobility warplane engine needs less than 10ms for facilitating flight control; transient temperature measurement is also involved in the research of weapons such as missile gas jet, ammunition explosion, gun barrel inner and outer walls and the like, the temperature measurement range reaches thousands of ℃, and the transient response requirement is even lower in mu s. The device has the characteristics of high temperature, large temperature change range, high change speed, severe measurement environment, difficulty in repetition and the like, and has extremely high measurement requirements and great difficulty. The thermocouple temperature measurement mode commonly adopted at present has shortcomings in the aspects of electromagnetic interference resistance, size, response speed and the like. The upper limit of temperature measurement is only 150 ℃ by adopting a hot wire heating mode, and the requirement of high-temperature measurement cannot be met. The optical fiber sensing technology has the advantages of interference resistance, small size, high precision, high reliability and the like, and can meet the requirements of temperature measurement under severe environmental conditions. However, since the diameter of a general optical fiber is 125 μm, when a high-speed dynamic temperature measurement is performed, the response time can be only 10ms due to the limit of the self heat capacity, and a higher speed temperature measurement cannot be performed.
Therefore, there is a need in the art for a thermometric sensor that solves the above problems.
Disclosure of Invention
The technical scheme adopted for achieving the purpose of the invention is that the micro-nano optical fiber Fabry-Perot sensor for high-speed dynamic temperature measurement comprises a bracket and micro-nano optical fibers.
The micro-nano optical fiber is internally engraved with a micro-nano optical fiber Fabry-Perot cavity. And a metal layer is plated on the outer wall of the micro-nano optical fiber.
The support is a cylinder. The column body is provided with a through groove penetrating through the side wall of the column body. One end of the column body is provided with a right end fixing area, and the other end of the column body is provided with a left end fixing area corresponding to the right end fixing area.
The micro-nano optical fiber with the metal layer is arranged in the right end fixing area and the left end fixing area. The micro-nano optical fiber Fabry-Perot cavity is positioned in the through groove.
When the micro-nano fiber Fabry-Perot cavity works, the micro-nano fiber generates a thermo-optic effect due to the change of the temperature field, the degree of the thermo-optic effect is changed due to the change of the temperature, and the refractive index modulation degree of the micro-nano fiber Fabry-Perot cavity is changed.
Further, the micro-nano optical fiber Fabry-Perot cavity is formed by ultraviolet mask photoetching, femtosecond laser or focused plasma etching.
Furthermore, through holes for the micro-nano optical fibers with the metal layers to penetrate through are formed in the right end fixing area and the left end fixing area.
Furthermore, the micro-nano optical fiber with the metal layer penetrates through the through hole in the right end fixing area and the through hole in the left end fixing area and is fixed through electroplating.
Further, the support is made of stainless steel.
The invention also discloses a sensing system of the micro-nano optical fiber method-Peltier sensor based on high-speed dynamic temperature measurement, and the micro-nano optical fiber method-Peltier sensor is connected with a measuring instrument. The measuring instrument comprises a light source, a coupler, a spectrometer and a computer.
The input end of the coupler is connected with the light source through an optical fiber. And the coupling end of the coupler is connected with the micro-nano optical fiber Fabry-Perot sensor through an optical fiber. The output end of the coupler is connected with the spectrometer through an optical fiber. The spectrometer is connected with a computer network.
During measurement, the micro-nano optical fiber Fabry-Perot sensor is placed in a temperature measurement environment. The incident light is output from the light source, enters the input end of the coupler and then is transmitted to the micro-nano optical fiber Fabry-Perot sensor through the coupling end of the coupler. Light is reflected and refracted by the micro-nano optical fiber Fabry-Perot cavity, and then a spectrum is output to the coupler. The output of the coupler outputs a spectrum to a spectrometer. And the spectrometer converts the spectrum information into temperature data after demodulation and transmits the temperature data to the computer.
The invention also discloses a manufacturing method of the micro-nano optical fiber method-Peltier sensor for high-speed dynamic temperature measurement, which comprises the following steps:
1) a right end fixing area and a left end fixing area are arranged at two ends of the support. Wherein, the support is a cylinder. The column body is provided with a through groove penetrating through the side wall of the column body.
2) And placing the common quartz optical fiber on an optical fiber tapering machine, heating, melting and tapering, and drawing the common quartz optical fiber to be below 10 mu m magnitude order to form the micro-nano optical fiber.
3) And (4) carrying out grid carving treatment on the micro-nano optical fiber area, and forming a micro-nano optical fiber Fabry-Perot cavity in the micro-nano optical fiber.
4) And carrying out plating treatment on the micro-nano optical fiber to form a metal layer on the outer wall of the micro-nano optical fiber.
5) And penetrating the micro-nano optical fiber plated with the metal layer into the right end fixing area and the left end fixing area to enable the micro-nano optical fiber grating to be positioned in the through groove.
6) And electroplating the matching positions of the micro-nano optical fiber plated with the metal layer and the left end fixing area and the right end fixing area.
Further, in the step 4), the coating treatment of the micro-nano optical fiber is performed by evaporation or magnetron sputtering.
The technical effects of the invention are undoubted, not only can high-speed dynamic temperature measurement be realized, but also the invention has better structural strength and high temperature resistance, and the invention specifically comprises the following steps:
1) carrying out tapering and micro-nano treatment on the optical fiber: the volume of the sensing area is reduced, the heat capacity can be reduced, and the heat conduction process is accelerated, so that the response speed is effectively improved;
2) through grid etching treatment: when the temperature changes, the refractive index of the optical fiber material is changed due to the thermo-optic effect, and compared with the cavity length change caused by the thermal expansion effect, the response time of the thermo-optic effect is faster, so that the quick response of temperature measurement is realized;
3) through the metal coating: the structural strength of the optical fiber is improved, and the optical fiber has environmental tolerance and applicability; the diameter of the micro-nano optical fiber is small, evanescent waves are easy to generate, light intensity output can be influenced, and when the concentration of surface air changes, optical signals in the optical fiber can be influenced; the metal layer is added, so that the metal layer can be isolated from air, and the influence of evanescent waves is effectively avoided; the metal material on the surface is tightly connected with the optical fiber body, so that quick real-time response to quick temperature rise change is facilitated; the thermal expansion coefficient of the metal material is larger than that of the quartz material of the body, so that the sensitivity of the sensor can be effectively improved; the surface conductivity of the optical fiber is increased, and a subsequent electroplating process is padded;
4) the right end fixing area and the left end fixing area are arranged on the support, so that the micro-nano optical fiber is convenient to limit and mount;
5) through electroplating treatment, the metalized bonding of the optical fiber and the bracket is realized, so that the sensor and the bracket are firmly combined, and the reliability of the sensor is improved.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a manufacturing process of the present invention;
FIG. 3 is a schematic diagram of the working principle of the present invention;
fig. 4 is a schematic diagram of the signal front and back variation during the operation of the present invention.
In the figure: the device comprises a support 1, a through groove 101, a micro-nano optical fiber Fabry-Perot cavity 2, a metal layer 3, a micro-nano optical fiber 4, a right end fixing area 5, a left end fixing area 6, a light source 7, a coupler 8, a spectrometer 9 and a computer 10.
Detailed Description
The present invention is further illustrated by the following examples, but it should not be construed that the scope of the above-described subject matter is limited to the following examples. Various substitutions and alterations can be made without departing from the technical idea of the invention and the scope of the invention is covered by the present invention according to the common technical knowledge and the conventional means in the field.
Example 1:
the embodiment discloses a micro-nano optical fiber method-Peltier sensor for high-speed dynamic temperature measurement, which comprises a bracket 1 and micro-nano optical fibers 4, and is shown in figure 1.
The micro-nano optical fiber 4 is internally engraved with a micro-nano optical fiber Fabry-Perot cavity 2. The micro-nano optical fiber method-Peltier cavity 2 is formed by etching through an ultraviolet mask photolithography method. And a metal layer 3 is plated on the outer wall of the micro-nano optical fiber 4. In this embodiment, the metal layer 3 is a copper layer.
The support 1 is a rectangular cylinder made of stainless steel, and a through groove 101 is formed in the middle of the rectangular cylinder. The four side walls of the bracket 1 are sequentially marked as a first side wall, a second side wall, a third side wall and a fourth side wall. The third side wall is provided with a hole communicated with the through groove 101, a right end fixing area 5 is fixed in the hole, the first side wall is provided with a hole communicated with the through groove 101, and a left end fixing area 6 corresponding to the right end fixing area 5 is fixed in the hole. And through holes for the micro-nano optical fibers 4 with the metal layers 3 to pass through are formed in the right end fixing area 5 and the left end fixing area 6.
The micro-nano optical fiber 4 with the metal layer 3 penetrates through the through hole of the right end fixing area 5 and the through hole of the left end fixing area 6, and the micro-nano optical fiber 4 with the metal layer 3 is firmly combined on the right end fixing area 5 and the left end fixing area 6 through electroplating and fixing. The micro-nano optical fiber Fabry-Perot cavity 2 is positioned in the through groove 101.
When the micro-nano optical fiber Fabry-Perot sensor works, the micro-nano optical fiber Fabry-Perot sensor is placed in a temperature measuring environment, the micro-nano optical fiber 4 generates a thermo-optic effect due to the change of a temperature field, the heat conduction time from the surface to the fiber core can reach microsecond level due to the adoption of the micro-nano optical fiber 4 for processing, the degree of the thermo-optic effect is changed due to the change of the temperature, the refractive index modulation degree of the micro-nano optical fiber Fabry-Perot cavity 2 is changed, and when the temperature1Up to T2In this case, the degree of density of the signal waveform (i.e., the waveform period) changes, and thus the amount of change in the ambient temperature can be known.
According to the micro-nano optical fiber method-amber sensor for high-speed dynamic temperature measurement, high-speed dynamic temperature measurement is realized through grating carving, micro-nano optical fibers are isolated from air through the metal-plated layer 3, influence of evanescent waves is effectively avoided, meanwhile, metal materials on the surface are tightly connected with an optical fiber body, and quick real-time response to quick temperature rise change is facilitated. The right end fixing area 5 and the left end fixing area 6 are arranged on the support 1, so that the micro-nano optical fiber 4 is conveniently limited and mounted; through electroplating, the metalized bonding of the optical fiber and the bracket 1 is realized, so that the optical fiber and the bracket 1 are firmly combined, and the reliability of the optical fiber and the bracket is improved.
Example 2:
the embodiment provides a basic implementation manner, and provides a micro-nano optical fiber Fabry-Perot sensor for high-speed dynamic temperature measurement, which is shown in FIG. 1 and comprises a bracket 1 and a micro-nano optical fiber 4.
The micro-nano optical fiber 4 is internally engraved with a micro-nano optical fiber Fabry-Perot cavity 2. And a metal layer 3 is plated on the outer wall of the micro-nano optical fiber 4. In this embodiment, the metal layer 3 is a copper layer.
The support 1 is a cylinder, and a through groove 101 penetrating through the whole side wall is machined in the side wall of the cylinder. Holes communicated with the through grooves 101 are processed in the two bottom surfaces of the cylinder, and a right end fixing area 5 and a left end fixing area 6 are fixed in the holes in the two bottom surfaces respectively.
The micro-nano optical fiber 4 with the metal layer 3 is arranged in a right end fixing area 5 and a left end fixing area 6. The micro-nano optical fiber Fabry-Perot cavity 2 is positioned in the through groove 101.
When the micro-nano optical fiber Fabry-Perot sensor works, the micro-nano optical fiber Fabry-Perot sensor is placed in a temperature measuring environment, the micro-nano optical fiber 4 generates a thermo-optic effect due to the change of a temperature field, the heat conduction time from the surface to the fiber core can reach microsecond level due to the adoption of the micro-nano optical fiber 4 for processing, the degree of the thermo-optic effect is changed due to the change of the temperature, the refractive index modulation degree of the micro-nano optical fiber Fabry-Perot cavity 2 is changed, and when the temperature1Up to T2In this case, the degree of density of the signal waveform (i.e., the waveform period) changes, and thus the amount of change in the ambient temperature can be known.
Example 3:
the main structure of the embodiment is the same as that of embodiment 2, and further, the micro-nano optical fiber method-amber cavity 2 is formed by etching through a femtosecond laser etching method.
Example 4:
the main structure of the embodiment is the same as that of embodiment 2, and further, the micro-nano optical fiber Fabry-Perot cavity 2 is formed by etching through a flying focus plasma method.
Example 5:
the main structure of this embodiment is the same as embodiment 2, and further, the material of the bracket 3 is stainless steel.
Example 6:
the main structure of this embodiment is the same as that of embodiment 2, and further, through holes for the micro-nano optical fibers 4 with the metal layers 3 to pass through are formed in the right end fixing region 5 and the left end fixing region 6.
Example 7:
the main structure of the embodiment is the same as that of embodiment 6, further, the micro-nano optical fiber 4 with the metal layer 3 penetrates through the through hole of the right end fixing area 5 and the through hole of the left end fixing area 6, and the micro-nano optical fiber 4 with the metal layer 3 is firmly combined on the right end fixing area 5 and the left end fixing area 6 through electroplating and fixing.
Example 8:
the embodiment discloses a micro-nano optical fiber method-Peltier sensor sensing system based on high-speed dynamic temperature measurement, wherein the micro-nano optical fiber method-Peltier sensor is connected with a measuring instrument. Referring to fig. 3, the meter includes a light source 7, a coupler 8, a spectrometer 9 and a computer 10.
The input end of the coupler 8 is connected with the light source 7 through an optical fiber. And the coupling end of the coupler 8 is connected with the micro-nano optical fiber Fabry-Perot sensor through an optical fiber. The output end of the coupler 8 is connected with the spectrometer 9 through an optical fiber. The spectrometer 9 is networked to a computer 10.
During measurement, the micro-nano optical fiber Fabry-Perot sensor is placed in a temperature measuring environment, and the change of a temperature field enables an optical fiber material to generate a thermo-optic effect. Due to the adoption of the micro-nano optical fiber 4 for treatment, the heat conduction time from the surface to the fiber core can reach microsecond level. Incident light is output from the light source 7, enters the input end of the coupler 8, and then is transmitted to the micro-nano optical fiber Fabry-Perot sensor through the coupling end of the coupler 8. Light is reflected and refracted by the micro-nano optical fiber Fabry-Perot cavity 2, and then a spectrum is output to the coupler 8. The output of the coupler 8 outputs a spectrum to a spectrometer 9. The spectrometer 9 converts the spectrum information into temperature data after demodulation, and transmits the temperature data to the computer 10. Because the temperature change will cause the degree of the thermo-optic effect to change, the refractive index modulation degree of the micro-nano optical fiber Fabry-Perot cavity 2 will be different, so that the spectrum reflected and refracted by the micro-nano optical fiber Fabry-Perot cavity 2 changes, the spectrum information is converted into temperature data in real time through the spectrometer 7, and the current environment temperature can be obtained in real time.
Example 9:
the embodiment discloses a method for manufacturing a micro-nano optical fiber method-Peltier sensor for high-speed dynamic temperature measurement, which comprises the following steps of:
1) a right end fixing area 5 and a left end fixing area 6 are installed on the side wall of the bracket 1. Wherein, the middle part of the rectangular column body is provided with a through groove 101. The four side walls of the bracket 1 are sequentially marked as a first side wall, a second side wall, a third side wall and a fourth side wall. The third side wall is provided with a hole communicated with the through groove 101, a right end fixing area 5 is fixed in the hole, the first side wall is provided with a hole communicated with the through groove 101, and a left end fixing area 6 corresponding to the right end fixing area 5 is fixed in the hole. And through holes for the micro-nano optical fibers 4 with the metal layers 3 to pass through are formed in the right end fixing area 5 and the left end fixing area 6.
2) Referring to fig. 2, a common silica fiber is placed on an optical fiber tapering machine, and the common silica fiber with a diameter of 125 μm is drawn to a magnitude of 10 μm or thinner by a heating melting tapering method, so as to form a micro-nano optical fiber 4.
3) And (3) carrying out grating etching treatment on the area of the micro-nano optical fiber 4, and forming a micro-nano optical fiber Fabry-Perot cavity 2 in the micro-nano optical fiber 4. The micro-nano optical fiber method-Peltier cavity 2 is manufactured by ultraviolet mask photoetching, femtosecond laser or focused plasma etching. In this embodiment, an ultraviolet mask lithography method is used.
4) And (3) carrying out plating treatment on the micro-nano optical fiber 4, and forming a metal layer 3 in a sensing area on the outer wall of the micro-nano optical fiber 4. In this embodiment, the metal layer 3 plated on the micro-nano optical fiber 4 is a copper layer.
5) And penetrating the micro-nano optical fiber 4 plated with the metal layer 3 into the right end fixing area 5 and the left end fixing area 6, so that the micro-nano optical fiber Fabry-Perot cavity 2 is positioned in the through groove 101.
6) And electroplating the matching positions of the micro-nano optical fiber 4 plated with the metal layer 3 and the left end fixing area 6 and the right end fixing area 5, so that the micro-nano optical fiber 4 plated with the metal layer 3 is tightly combined with the right end fixing area 5, the micro-nano optical fiber 4 and the left end fixing area 6 to form a firm structure.
The manufacturing method of the micro-nano optical fiber method-amber sensor for high-speed dynamic temperature measurement provided by the embodiment has the following advantages:
I) carrying out tapering and micro-nano treatment on the optical fiber: the volume of the sensing area is reduced, the heat capacity can be reduced, and the heat conduction process is accelerated, so that the response speed is effectively improved;
II) through grid etching treatment: when the temperature changes, the refractive index of the optical fiber material is changed due to the thermo-optic effect, and compared with the cavity length change caused by the thermal expansion effect, the response time of the thermo-optic effect is faster, so that the quick response of temperature measurement is realized;
III) by means of a metallisation layer 3: the structural strength of the optical fiber is improved, and the optical fiber has environmental tolerance and applicability; the diameter of the micro-nano optical fiber is small, evanescent waves are easy to generate, light intensity output can be influenced, and when the concentration of surface air changes, optical signals in the optical fiber can be influenced; the metal layer 3 is added, so that the metal layer can be isolated from air, and the influence of evanescent waves is effectively avoided; the metal material on the surface is tightly connected with the optical fiber body, so that quick real-time response to quick temperature rise change is facilitated; the thermal expansion coefficient of the metal material is larger than that of the quartz material of the body, so that the sensitivity of the sensor can be effectively improved; the surface conductivity of the optical fiber is increased, and a subsequent electroplating process is padded;
IV) realizing the metallized bonding of the optical fiber and the bracket through electroplating treatment, so that the sensor is firmly combined with the bracket, and the reliability of the sensor is improved.
Example 10:
the main structure of this embodiment is the same as that of embodiment 9, and further, in step 4), the plating treatment of the micro-nano optical fiber 4 is vapor deposition. And forming a metal layer 3 on the outer wall of the micro-nano optical fiber 4 by evaporation.
Example 11:
the main structure of this embodiment is the same as that of embodiment 9, and further, in step 4), the plating treatment of the micro-nano optical fiber 4 is performed by magnetron sputtering. And forming a metal layer 3 on the outer wall of the micro-nano optical fiber 4 by magnetron sputtering.
Claims (8)
1. A micro-nano optical fiber method-Peltier sensor for high-speed dynamic temperature measurement is characterized in that: the device comprises a bracket (1) and a micro-nano optical fiber (4);
the micro-nano optical fiber Fabry-Perot cavity (2) is engraved in the micro-nano optical fiber (4); the outer wall of the micro-nano optical fiber (4) is plated with a metal layer (3);
the bracket (1) is a cylinder; a through groove (101) penetrating through the side wall of the column body is arranged on the column body; one end of the column body is provided with a right end fixing area (5), and the other end of the column body is provided with a left end fixing area (6) corresponding to the right end fixing area (5).
The micro-nano optical fiber (4) with the metal layer (3) is arranged in the right end fixing area (5) and the left end fixing area (6); the micro-nano optical fiber Fabry-Perot cavity (2) is positioned in the through groove (101);
when the micro-nano fiber Fabry-Perot cavity works, the micro-nano fiber (4) generates a thermo-optic effect due to the change of the temperature field, the degree of the thermo-optic effect is changed due to the change of the temperature, and the refractive index modulation degree of the micro-nano fiber Fabry-Perot cavity (2) is changed.
2. The micro-nano fiber Fabry-Perot sensor for high-speed dynamic temperature measurement according to claim 2, characterized in that: the micro-nano optical fiber method-Peltier cavity (2) is formed by ultraviolet mask photoetching, femtosecond laser or focused plasma etching.
3. The micro-nano fiber Fabry-Perot sensor for high-speed dynamic temperature measurement according to claim 1, characterized in that: and through holes for the micro-nano optical fibers (4) with the metal layers (3) to pass through are formed in the right end fixing area (5) and the left end fixing area (6).
4. The micro-nano fiber Fabry-Perot sensor for high-speed dynamic temperature measurement according to claim 3, wherein: the micro-nano optical fiber (4) with the metal layer (3) penetrates through the through hole of the right end fixing area (5) and the through hole of the left end fixing area (6) and is fixed through electroplating.
5. The micro-nano fiber Fabry-Perot sensor for high-speed dynamic temperature measurement according to claim 1, characterized in that: the bracket (1) is made of stainless steel.
6. A micro-nano optical fiber method-amber sensor sensing system based on high-speed dynamic temperature measurement is characterized in that: the micro-nano optical fiber Fabry-Perot sensor is connected with the measuring instrument; the measuring instrument comprises a light source (7), a coupler (8), a spectrometer (9) and a computer (10);
the input end of the coupler (8) is connected with the light source (7) through an optical fiber; the coupling end of the coupler (8) is connected with the micro-nano optical fiber Fabry-Perot sensor through an optical fiber; the output end of the coupler (8) is connected with a spectrometer (9) through an optical fiber; the spectrometer (9) is connected with a computer (10) through a network;
during measurement, the micro-nano optical fiber Fabry-Perot sensor is placed in a temperature measurement environment; incident light is output from the light source (7), enters the input end of the coupler (8), and then is transmitted to the micro-nano optical fiber Fabry-Perot sensor through the coupling end of the coupler (8); light is reflected and refracted by the micro-nano optical fiber Fabry-Perot cavity (2), and then a spectrum is output to the coupler (8); the output end of the coupler (8) outputs the spectrum to a spectrometer (9); the spectrometer (9) converts the spectral information into temperature data after demodulation, and transmits the temperature data to the computer (10).
7. A manufacturing method of a micro-nano optical fiber Fabry-Perot sensor for high-speed dynamic temperature measurement is characterized by comprising the following steps:
1) a right end fixing area (5) and a left end fixing area (6) are arranged at two ends of the bracket (1); wherein the bracket (1) is a cylinder; a through groove (101) penetrating through the side wall of the column body is arranged on the column body;
2) placing the common quartz optical fiber on an optical fiber tapering machine, heating, melting and tapering the common quartz optical fiber, and drawing the common quartz optical fiber to be below 10 mu m magnitude order to form a micro-nano optical fiber (4);
3) carrying out grid carving treatment on the micro-nano optical fiber (4) area, and forming a micro-nano optical fiber Fabry-Perot cavity (2) in the micro-nano optical fiber (4);
4) plating treatment is carried out on the micro-nano optical fiber (4), and a metal layer (3) is formed on the outer wall of the micro-nano optical fiber (4);
5) penetrating the micro-nano optical fiber (4) plated with the metal layer (3) into the right end fixing area (5) and the left end fixing area (6) to enable the micro-nano optical fiber grating (2) to be located in the through groove (101);
6) and electroplating the matching positions of the micro-nano optical fiber (4) plated with the metal layer (3) and the left end fixing area (6) and the right end fixing area (5).
8. The manufacturing method of the micro-nano fiber grating sensor for high-speed dynamic temperature measurement according to claim 7, which is characterized by comprising the following steps: in the step 4), the plating treatment of the micro-nano optical fiber (4) is evaporation or magnetron sputtering.
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