CN104776954A - Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor - Google Patents
Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于光纤传感器技术领域，特别涉及一种用于测量真空度的光纤光栅(FBG：Fiber Bragg Grat ing)悬臂梁谐振子传感器。The invention belongs to the technical field of optical fiber sensors, in particular to a fiber grating (FBG: Fiber Bragg Grating) cantilever beam resonator sensor for measuring vacuum.
背景技术Background technique
真空度测量是真空技术的重要组成部分，对于在恶劣的狭小空间(如有毒、易燃、易爆、高温高压等场合)的真空度检测是目前真空度测量技术的关键应用之一，现有可以满足的技术选择为硅微机械探头方法，硅微机械探头制作的真空传感器具有微型化、易集成、高灵敏度、成本低等优点。但硅微机械探头检测方法也存在缺点：(1)硅微机械传感器的激励方式有压电激励、静电激励、或电热激励等，均需要在硅微悬臂梁上制作附加激励元件，激励效率低；(2)硅微机械探头方法需要电信号激励和输出，抗电磁干扰能力差，不便于实现分布式多点监测(3)硅微机械传感器一体化封装比较困难。因此设计一种全光传输的光激励光纤光栅悬臂梁谐振子真空度传感器具有迫切的技术需求。Vacuum degree measurement is an important part of vacuum technology. It is one of the key applications of current vacuum degree measurement technology for vacuum degree detection in harsh and narrow spaces (such as toxic, flammable, explosive, high temperature and high pressure, etc.). The satisfactory technology choice is silicon micro-mechanical probe method. The vacuum sensor made of silicon micro-mechanical probe has the advantages of miniaturization, easy integration, high sensitivity and low cost. However, the silicon micromechanical probe detection method also has disadvantages: (1) The excitation methods of silicon micromechanical sensors include piezoelectric excitation, electrostatic excitation, or electrothermal excitation, etc., all of which need to make additional excitation elements on the silicon micro-cantilever beam, and the excitation efficiency is low. (2) The silicon micromechanical probe method requires electrical signal excitation and output, and has poor anti-electromagnetic interference ability, which is not convenient for realizing distributed multi-point monitoring. (3) The integrated packaging of silicon micromechanical sensors is relatively difficult. Therefore, there is an urgent technical demand to design an optically excited fiber Bragg grating cantilever beam resonator vacuum sensor with all-optical transmission.
光纤光栅悬臂梁谐振子真空度传感器的突出特点：(1)光激励的方式，激励光由光纤直接耦合进光纤谐振子结构中，不需在悬臂梁上制作附加激励元件，光激励效率高；(2)光纤光栅悬臂梁谐振子真空度传感器为全光器件，抗电磁干扰能力强，便于在线分布式多点监测；(3)一体化封装，精度高，可靠性强，特别适合于狭小空间的高精度传感测量，在物理、化学、生物医学和生命科学等多个研究领域具有广泛的应用前景。The outstanding features of the fiber grating cantilever beam resonator vacuum sensor: (1) The way of optical excitation, the excitation light is directly coupled into the fiber resonator structure by the optical fiber, no additional excitation elements need to be made on the cantilever beam, and the optical excitation efficiency is high; (2) The fiber grating cantilever beam resonator vacuum sensor is an all-optical device, which has strong anti-electromagnetic interference ability and is convenient for online distributed multi-point monitoring; (3) integrated packaging, high precision and strong reliability, especially suitable for small spaces High-precision sensing measurement has broad application prospects in many research fields such as physics, chemistry, biomedicine, and life sciences.
本发明直接在在单模光纤的光栅结构基础上制作悬臂梁谐振子器件，或者先在单模光纤上制作D型悬臂梁再写入光栅结构的FBG悬臂梁谐振子器件，实现了光路与器件的光纤一体化，即一种光激励光纤光栅悬臂梁谐振子真空度传感器，这种一体化结构提高了器件的工作精度和稳定性。The invention directly fabricates the cantilever beam resonator device on the basis of the grating structure of the single-mode optical fiber, or first fabricates the D-shaped cantilever beam on the single-mode fiber and then writes it into the FBG cantilever beam resonator device of the grating structure, realizing the optical path and the device The optical fiber integration, that is, a light-excited fiber grating cantilever beam resonator vacuum sensor, this integrated structure improves the working accuracy and stability of the device.
发明内容Contents of the invention
本发明针对现有硅微机械真空度传感器技术的不足，设计了一种光激励光纤光栅悬臂梁谐振子真空度传感器。The invention aims at the deficiency of the existing silicon micromachined vacuum degree sensor technology, and designs a vacuum degree sensor of a light-excited fiber grating cantilever beam resonant oscillator.
本发明所采取的传感器技术方案为：The sensor technical scheme that the present invention takes is:
一种光激励光纤光栅悬臂梁谐振子真空度传感器，包括LD光源(1)、光纤定向耦合器(2)、光电探测器(3)、传感探头(4)、匹配液(5)、微加工的光纤光栅(6)、金属镀膜(7)、匹配滤波FBG(8)；所述的LD光源(1)与光纤定向耦合器的一端口(100)连接，定向耦合器的二端口(101)连接匹配滤波FBG(8)，光电探测器(3)连接匹配滤波FBG(8)的另一端，光纤定向耦合器的三端口(102)与传感探头(4)连接，光纤定向耦合器的四端口(103)浸入匹配液(5)组成完整的真空度探测系统。A light-excited fiber grating cantilever beam resonator vacuum sensor, comprising an LD light source (1), an optical fiber directional coupler (2), a photodetector (3), a sensing probe (4), a matching liquid (5), a micro Processed fiber grating (6), metal coating (7), matched filter FBG (8); the LD light source (1) is connected to one port (100) of the fiber directional coupler, and the two ports (101) of the directional coupler ) is connected to the matched filter FBG (8), the photodetector (3) is connected to the other end of the matched filter FBG (8), the three ports (102) of the optical fiber directional coupler are connected to the sensing probe (4), and the optical fiber directional coupler The four ports (103) are immersed in the matching liquid (5) to form a complete vacuum detection system.
所述的光纤光栅悬臂梁谐振子直接在单模光纤的光栅结构基础上，去光栅结构处上半部分包层和部分纤芯(光纤光栅结构偏离器件轴心位置)，形成截面为D型的光纤光栅悬臂梁谐振子器件结构，如图2所示。The fiber grating cantilever beam resonator is directly on the basis of the grating structure of the single-mode optical fiber, and the upper half of the cladding and part of the fiber core at the grating structure are removed (the fiber grating structure deviates from the axis of the device), forming a D-shaped cross-section The structure of the fiber grating cantilever beam resonator device is shown in Figure 2.
所述的光纤光栅悬臂梁谐振子表面镀有金属薄膜，镀膜材料为金和铬，镀膜厚度根据悬臂梁厚度优化选择。The surface of the fiber grating cantilever beam resonator is coated with a metal thin film, the coating material is gold and chromium, and the thickness of the coating film is optimally selected according to the thickness of the cantilever beam.
所述的光纤光栅悬臂梁长度为0.5mm至3mm，悬臂梁厚度10μm至50μm，宽度100μm至125μm。The length of the fiber grating cantilever beam is 0.5 mm to 3 mm, the thickness of the cantilever beam is 10 μm to 50 μm, and the width is 100 μm to 125 μm.
作为另一种光纤光栅悬臂梁谐振子的可选微加工方案，所述的光纤光栅悬臂梁谐振子首先基于单模光纤端面加工出一段D型悬臂梁，然后再在D型悬臂梁上微加工写入光栅结构，形成光纤光栅悬臂梁谐振子器件结构。As another optional micromachining solution for the fiber grating cantilever resonator, the fiber grating cantilever resonator first processes a section of D-shaped cantilever based on the end face of the single-mode fiber, and then micromachines and writes on the D-shaped cantilever The grating structure forms a fiber grating cantilever beam resonator device structure.
所述的光纤光栅悬臂梁谐振子结构为光纤一体化结构。The fiber grating cantilever beam resonator structure is an optical fiber integrated structure.
本发明相对于现有技术具有以下有益效果：Compared with the prior art, the present invention has the following beneficial effects:
直接在单模光纤的光栅结构基础上制作FBG悬臂梁谐振子器件，或者先在单模光纤上制作D型悬臂梁再写入光栅结构的FBG悬臂梁谐振子器件，实现了光路与器件的光纤一体化，具有如下优点：(1)器件结构简单，光路与器件合二为一，光耦合自对准增强了谐振器件工作的可靠性；(2)由于谐振敏感器件直接制作在单模光纤光栅结构上，因此敏感器件的尺寸可以满足传感器微型化的要求。The FBG cantilever beam resonator device is directly fabricated on the basis of the grating structure of the single-mode fiber, or the D-shaped cantilever beam is first fabricated on the single-mode fiber and then written into the FBG cantilever beam resonator device of the grating structure, which realizes the optical path and the optical fiber of the device. Integration has the following advantages: (1) The structure of the device is simple, the optical path and the device are combined into one, and the optical coupling self-alignment enhances the reliability of the resonant device; (2) Since the resonant sensitive device is directly fabricated on the single-mode fiber grating Structurally, the size of the sensitive device can meet the requirements of sensor miniaturization.
附图说明Description of drawings
图1为本发明系统结构示意图；Fig. 1 is a schematic structural diagram of the system of the present invention;
图2为本发明中第一实施例的光纤光栅悬臂梁谐振子结构示意图；Fig. 2 is a schematic diagram of the structure of a fiber grating cantilever beam resonator according to the first embodiment of the present invention;
图3为本发明中第二实施例的光纤光栅悬臂梁谐振子结构示意图。Fig. 3 is a schematic diagram of the structure of the fiber grating cantilever beam resonator according to the second embodiment of the present invention.
具体实施方式Detailed ways
以下结合附图对本发明作进一步说明：The present invention will be further described below in conjunction with accompanying drawing:
图1所示，一种光激励光纤光栅悬臂梁谐振子真空度传感器，包括LD光源(1)、光纤定向耦合器(2)、光电探测器(3)、传感探头(4)、匹配液(5)、微加工的光纤光栅(6)、金属镀膜(7)、匹配滤波FBG(8)；所述的LD光源(1)与光纤定向耦合器的一端口(100)连接，定向耦合器的二端口(101)连接匹配滤波FBG(8)，光电探测器(3)连接匹配滤波FBG(8)的另一端，光纤定向耦合器的三端口(102)与传感探头(4)连接，光纤定向耦合器的四端口(103)浸入匹配液(5)组成完整的真空度探测系统。As shown in Figure 1, an optically excited fiber grating cantilever beam resonator vacuum sensor includes an LD light source (1), an optical fiber directional coupler (2), a photodetector (3), a sensing probe (4), and a matching liquid (5), microprocessed fiber grating (6), metal coating (7), matched filter FBG (8); described LD light source (1) is connected with a port (100) of the fiber directional coupler, and the directional coupler The two ports (101) of the optical fiber directional coupler are connected to the matched filter FBG (8), the photodetector (3) is connected to the other end of the matched filter FBG (8), and the three ports (102) of the optical fiber directional coupler are connected to the sensing probe (4), The four ports (103) of the optical fiber directional coupler are immersed in the matching liquid (5) to form a complete vacuum degree detection system.
图2所示，光纤光栅悬臂梁谐振子探头结构直接在单模光纤的光栅结构基础上腐蚀上半部分包层和部分纤芯(长度为0.5mm至3mm，悬臂梁厚度10μm至50μm，宽度100μm至125μm)，使光纤光栅结构偏离器件轴心位置，当激励光激励微悬臂谐振器件时，谐振器件的振动方向被控制在上下谐振。所述的悬梁端面镀有金属敏感膜。As shown in Figure 2, the fiber grating cantilever beam resonator probe structure directly corrodes the upper half of the cladding and part of the core on the basis of the grating structure of the single-mode fiber (the length is 0.5 mm to 3 mm, the thickness of the cantilever beam is 10 μm to 50 μm, and the width is 100 μm. to 125 μm), the fiber grating structure is deviated from the axis of the device, and when the excitation light excites the micro-cantilever resonator device, the vibration direction of the resonator device is controlled to resonate up and down. The end face of the cantilever beam is coated with a metal sensitive film.
图3所示，作为另一种可选器件微加工方案，所述的光纤光栅悬臂梁谐振子首先基于单模光纤端面加工出一段D型悬臂梁，然后再在D型悬臂梁上微加工写入光栅结构，形成光纤光栅悬臂梁谐振子器件结构。As shown in Figure 3, as another optional device micromachining scheme, the fiber grating cantilever beam resonator first processes a section of D-shaped cantilever beam based on the end face of the single-mode fiber, and then writes the grating on the D-shaped cantilever beam by micromachining structure to form a fiber grating cantilever beam resonator device structure.
本发明提出的一种光激励光纤光栅悬臂梁谐振子传感器测试器件的真空度时，主要考虑振幅A和微悬梁的品质因数Q。品质因数Q取决于固有频率f0(谐振频率)和阻尼系数λ。When the optically excited fiber grating cantilever resonator sensor proposed by the present invention tests the vacuum degree of the device, the amplitude A and the quality factor Q of the microcantilever are mainly considered. The quality factor Q depends on the natural frequency f 0 (resonance frequency) and the damping factor λ.
FBG悬臂梁品质因数Q与阻尼系数λ和固有频率的关系：The relationship between the quality factor Q of the FBG cantilever beam and the damping coefficient λ and natural frequency:
Q ∝ f0／λQ ∝ f 0 /λ
品质因数Q与阻尼系数成反比，与固有频率成正比。The quality factor Q is inversely proportional to the damping coefficient and directly proportional to the natural frequency.
振幅A与品质因数Q的关系：The relationship between amplitude A and quality factor Q:
A=QF／KA=QF／K
F为激励力，k为微悬梁的弹性系数，振幅A与Q成正比。F is the excitation force, k is the elastic coefficient of the micro-cantilever beam, and the amplitude A is proportional to Q.
FBG中心波长定义：Definition of FBG center wavelength:
λB=2neffΛλ B =2n eff Λ
λB是光纤布拉格光栅反射回来的入射光在自由空间中的中心波长；neff为有效折射率；Λ为光纤布拉格光栅的周期。λ B is the center wavelength of the incident light reflected by the fiber Bragg grating in free space; n eff is the effective refractive index; Λ is the period of the fiber Bragg grating.
真空度越高，空气阻尼越小，光纤光栅悬臂梁谐振子传感器的品质因数Q越高，因为振幅A与品质因数Q成正比，则悬臂梁谐振子的振幅A越大，进而悬臂梁谐振子上的光栅栅距受到的拉伸和挤压程度越大，光栅的周期Λ变化越大，反射信号的中心波长λB的变化范围越宽。反之，中心波长变化范围越窄。The higher the vacuum degree, the smaller the air damping, the higher the quality factor Q of the fiber grating cantilever beam resonator sensor, because the amplitude A is proportional to the quality factor Q, the larger the amplitude A of the cantilever beam resonator, and then the cantilever beam resonator The greater the degree of stretching and extrusion on the grating pitch, the greater the change of the period Λ of the grating, and the wider the change range of the central wavelength λ B of the reflected signal. Conversely, the narrower the center wavelength range is.
FBG光纤光栅悬臂梁谐振子器件的真空度检测范围为10-1～102Pa。The vacuum detection range of the FBG fiber grating cantilever beam resonator device is 10 -1 ~ 10 2 Pa.
本发明的两种可选方案中的光纤光栅悬臂梁结构均为光纤一体化结构，该型器件具有抗电磁干扰能力强、光激励效率高和微型化等优点，可以突破现有硅微机械谐振敏感器件的技术缺陷。The fiber grating cantilever structure in the two alternatives of the present invention is an integrated optical fiber structure. This type of device has the advantages of strong anti-electromagnetic interference, high optical excitation efficiency and miniaturization, and can break through the existing silicon micromechanical resonance. Technical defects of sensitive devices.
本发明的光纤光栅悬臂梁谐振子采用RIE(反应离子刻蚀)技术，在腐蚀过程中用石英玻璃毛细管作为光纤包层腐蚀的掩膜板。The optical fiber grating cantilever beam resonator of the present invention adopts RIE (reactive ion etching) technology, and uses a quartz glass capillary as a mask plate for optical fiber cladding corrosion during the corrosion process.
一种光激励光纤光栅悬臂梁谐振子真空度传感器工作原理：An optically excited fiber grating cantilever beam resonator vacuum sensor works:
经频率调制的红外激光由光纤定向耦合器的一端口(100)进入，由光纤定向耦合器三端口(102)耦合传输到光纤光栅悬臂梁谐振子器件中，光纤光栅悬臂梁谐振敏感头将由于“双膜热效应”出现光热激励谐振，光纤光栅微悬臂梁发生谐振时，光纤光栅的中心波长由于光纤光栅周期变化而变化(光栅结构向下振动受到应力，向上振动受到拉力，周期发生变化)，被光纤光栅调制的反射信号沿光纤光路返回，反射信号光通过光纤定向耦合器二端口(101)入射到匹配滤波FBG，透射光被光电探测器(3)接收。光纤光栅悬臂梁谐振器探头对真空度参量很敏感：真空度变化时，空气阻尼发生变化，悬臂梁谐振子振幅随之发生变化，悬臂梁谐振子上的光栅栅距受到的拉伸和挤压程也会发生变化，最终反射信号的中心波长变化范围也发生变化。真空度越高，空气阻尼越小，悬臂梁谐振子的振幅越大，悬臂梁谐振子上的光栅栅距受到的拉伸和挤压程度越大，光栅的，反射信号的中心波长的变化范围越宽。反之，中心波长变化范围越窄。中心波长变化的反射信号入射到匹配滤波FBG(8)中，匹配滤波FBG的透射光强被光电探测器(3)接收，匹配滤波FBG(8)将光纤光栅悬臂梁中心波长的变化量转化为光强信号的变化进而来测量真空度。The frequency-modulated infrared laser enters from one port (100) of the fiber directional coupler, and is coupled and transmitted to the fiber grating cantilever beam resonator device by the fiber directional coupler three ports (102), and the fiber grating cantilever beam resonance sensitive head will be due to "Double film thermal effect" appears photothermal excitation resonance. When the fiber grating micro-cantilever resonates, the center wavelength of the fiber grating changes due to the periodic change of the fiber grating (the grating structure is subject to stress when vibrating downward and pulling force when vibrating upward, and the period changes) , the reflected signal modulated by the fiber grating returns along the optical fiber path, the reflected signal light enters the matched filter FBG through the second port (101) of the fiber directional coupler, and the transmitted light is received by the photodetector (3). The fiber grating cantilever beam resonator probe is very sensitive to the vacuum degree parameter: when the vacuum degree changes, the air damping changes, the amplitude of the cantilever beam resonator changes accordingly, and the grating pitch on the cantilever beam resonator is stretched and squeezed The range will also change, and the center wavelength range of the final reflected signal will also change. The higher the vacuum degree, the smaller the air damping, the larger the amplitude of the cantilever beam resonator, the greater the stretching and extrusion of the grating pitch on the cantilever beam resonator, the range of the center wavelength of the grating and the reflected signal wider. Conversely, the narrower the center wavelength range is. The reflected signal with the change of the central wavelength is incident on the matched filter FBG (8), the transmitted light intensity of the matched filter FBG is received by the photodetector (3), and the matched filter FBG (8) converts the change of the central wavelength of the fiber grating cantilever beam into The change of the light intensity signal is then used to measure the degree of vacuum.
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