CN104776954A - Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor - Google Patents
Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor Download PDFInfo
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- CN104776954A CN104776954A CN201410014276.5A CN201410014276A CN104776954A CN 104776954 A CN104776954 A CN 104776954A CN 201410014276 A CN201410014276 A CN 201410014276A CN 104776954 A CN104776954 A CN 104776954A
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Abstract
The invention relates to an optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor, and belongs to the technical field of fiber sensors. The optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor comprises an LD light source, a directional fiber coupler, a photoelectric detector, a sensing probe, coupling liquid, a micro-machined fiber grating, a metal plated film, and a coupling filtering FBG. The quality factors of the fiber grating cantilever beam harmonic oscillator sensor are influenced by air damping so as to influence the resonance amplitude of a fiber grating cantilever beam and finally change the wavelength of the reflection signal center of the FBG cantilever beam harmonic oscillator sensor, and thus the vacuum degree can be measured. The optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor has the advantages of simple structure and strong anti-electromagnetic interference performance, and can satisfy the requirement of micro, real-time on-line distributed and multi-point monitoring.
Description
Technical field
The invention belongs to fiber optic sensor technology field, particularly a kind of fiber grating for measurement of vacuum (FBG:Fiber Bragg Grat ing) semi-girder harmonic oscillator sensor.
Background technology
Vacuum measurement is the important component part of vacuum technique, one of key application of current vacuum measurement technology for the vacuum degree measurement at severe small space (as occasions such as poisonous, inflammable, explosive, High Temperature High Pressure), the existing satisfiable choice of technology is silicon micro mechanical probe method, and the vacuum transducer that silicon micro mechanical probe makes has microminiaturization, easy of integration, high sensitivity, low cost and other advantages.But also there is shortcoming in silicon micro mechanical probe detection method: the energisation mode of (1) silicon micro mechanical sensor has piezoelectric excitation, static excitation or electric heating excitation etc., and all need to make additional incentive element on silicon micro-cantilever, launching efficiency is low; (2) silicon micro mechanical probe method needs electric signal to encourage and exports, and anti-electromagnetic interference capability is poor, is not easy to realize Distributed Multi monitoring (3) silicon micro mechanical sensor integrative packaging more difficult.Therefore the light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor designing a kind of all-optical transmission has urgent technical need.
The outstanding feature of fiber grating semi-girder harmonic oscillator vacuum sensor: the mode of (1) light stimulus, exciting light enters in optical fiber harmonic oscillator structure by Direct couple, and do not need to make additional incentive element on a cantilever beam, light stimulus efficiency is high; (2) fiber grating semi-girder harmonic oscillator vacuum sensor is all-optical device, and anti-electromagnetic interference capability is strong, is convenient to the monitoring of distribution on line formula multiple spot; (3) integrative packaging, precision is high, and reliability is strong, and the high-precision sensing being particularly suitable for small space is measured, and is with a wide range of applications in multiple research fields such as physics, chemistry, biomedicine and life sciences.
The present invention is directly making semi-girder harmonic oscillator device on the optical grating construction basis of single-mode fiber, or first on single-mode fiber, make the FBG semi-girder harmonic oscillator device that D type semi-girder writes optical grating construction again, achieve the optical fiber integration of light path and device, an i.e. light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor, this integral structure improves operating accuracy and the stability of device.
Summary of the invention
The present invention is directed to the deficiency of existing silicon micro mechanical vacuum sensor technology, devise a kind of light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor.
The sensor technology scheme that the present invention takes is:
A kind of light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor, comprises LD light source (1), optical fiber directional coupler (2), photodetector (3), sensing probe (4), matching fluid (5), micro-machined fiber grating (6), metal coating (7), matched filtering FBG (8); Described LD light source (1) is connected with the Single port (100) of optical fiber directional coupler, Two-port netwerk (101) matching connection filtering FBG (8) of directional coupler, the other end of photodetector (3) matching connection filtering FBG (8), three ports (102) of optical fiber directional coupler are connected with sensing probe (4), and four ports (103) of optical fiber directional coupler immerse matching fluid (5) and form complete vacuum tightness detection system.
Described fiber grating semi-girder harmonic oscillator is directly on the optical grating construction basis of single-mode fiber, remove optical grating construction place the first half covering and segment core (optical fiber grating structure departs from device shaft core position), Formation cross-section is the fiber grating semi-girder harmonic oscillator device architecture of D type, as shown in Figure 2.
Described fiber grating semi-girder harmonic oscillator surface is coated with metallic film, and Coating Materials is Jin Hege, and coating film thickness is selected according to semi-girder thickness optimization.
Described fiber grating semi-girder length is 0.5mm to 3mm, semi-girder thickness 10 μm to 50 μm, width 100 μm to 125 μm.
As the optional micro Process scheme of another kind of fiber grating semi-girder harmonic oscillator, first described fiber grating semi-girder harmonic oscillator processes one section of D type semi-girder based on single-mode fiber end face, and then micro Process writes optical grating construction on D type semi-girder, form fiber grating semi-girder harmonic oscillator device architecture.
Described fiber grating semi-girder harmonic oscillator structure is optical fiber integration structure.
The present invention has following beneficial effect relative to prior art:
Directly on the optical grating construction basis of single-mode fiber, make FBG semi-girder harmonic oscillator device, or first on single-mode fiber, make the FBG semi-girder harmonic oscillator device that D type semi-girder writes optical grating construction again, achieve the optical fiber integration of light path and device, tool has the following advantages: (1) device architecture is simple, light path and device unite two into one, and optically-coupled autoregistration enhances the reliability of resonating device work; (2) because resonance Sensitive Apparatus is directly produced on single-mode fiber optical grating construction, therefore the size of Sensitive Apparatus can meet the requirement of sensor microminiaturization.
Accompanying drawing explanation
Fig. 1 is present system structural representation;
Fig. 2 is the fiber grating semi-girder harmonic oscillator structural representation of the first embodiment in the present invention;
Fig. 3 is the fiber grating semi-girder harmonic oscillator structural representation of the second embodiment in the present invention.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described:
Shown in Fig. 1, a kind of light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor, comprises LD light source (1), optical fiber directional coupler (2), photodetector (3), sensing probe (4), matching fluid (5), micro-machined fiber grating (6), metal coating (7), matched filtering FBG (8); Described LD light source (1) is connected with the Single port (100) of optical fiber directional coupler, Two-port netwerk (101) matching connection filtering FBG (8) of directional coupler, the other end of photodetector (3) matching connection filtering FBG (8), three ports (102) of optical fiber directional coupler are connected with sensing probe (4), and four ports (103) of optical fiber directional coupler immerse matching fluid (5) and form complete vacuum tightness detection system.
Shown in Fig. 2, fiber grating semi-girder harmonic oscillator sonde configuration directly corrodes the first half covering and segment core on the optical grating construction basis of single-mode fiber, and (length is 0.5mm to 3mm, semi-girder thickness 10 μm to 50 μm, width 100 μm to 125 μm), optical fiber grating structure is made to depart from device shaft core position, when exciting light excitation micro-cantilever resonating device, the direction of vibration of resonating device is controlled in upper and lower resonance.Described overarm end face is coated with metallic sensing film.
Shown in Fig. 3, as another kind of Alternative devices micro Process scheme, first described fiber grating semi-girder harmonic oscillator processes one section of D type semi-girder based on single-mode fiber end face, and then micro Process writes optical grating construction on D type semi-girder, forms fiber grating semi-girder harmonic oscillator device architecture.
During a kind of vacuum tightness of light stimulus fiber grating semi-girder harmonic oscillator sensor test device that the present invention proposes, the main quality factor q considering amplitude A and micro-overarm.Quality factor q depends on natural frequency f
0(resonance frequency) and ratio of damping λ.
The relation of FBG semi-girder quality factor q and ratio of damping λ and natural frequency:
Q ∝ f
0／λ
Quality factor q and ratio of damping are inversely proportional to, and are directly proportional to natural frequency.
The relation of amplitude A and quality factor q:
A=QF／K
F is exciting force, and k is the elasticity coefficient of micro-overarm, and amplitude A is directly proportional to Q.
FBG centre wavelength defines:
λ
B=2n
effΛ
λ
bthe incident light centre wavelength in free space that Fiber Bragg Grating FBG reflects; n
efffor effective refractive index; Λ is the cycle of Fiber Bragg Grating FBG.
Vacuum tightness is higher, air damping is less, the quality factor q of fiber grating semi-girder harmonic oscillator sensor is higher, because amplitude A is directly proportional to quality factor q, then the amplitude A of semi-girder harmonic oscillator is larger, and then the stretching that is subject to of the grating pitch in semi-girder harmonic oscillator and extruding degree larger, the periods lambda change of grating greatly, the central wavelength lambda of reflected signal
bvariation range wider.Otherwise center wavelength variation scope is narrower.
The vacuum degree measurement scope of FBG fiber grating semi-girder harmonic oscillator device is 10
-1~ 10
2pa.
Fiber grating cantilever beam structure in two kinds of possibilities of the present invention is optical fiber integration structure, this type device has the advantages such as anti-electromagnetic interference capability is strong, light stimulus efficiency is high and microminiaturized, can break through the technological deficiency of existing silicon micro-mechanical resonate Sensitive Apparatus.
Fiber grating semi-girder harmonic oscillator of the present invention adopts RIE (reactive ion etching) technology, with the mask plate that quartz glass capillary corrodes as fibre cladding in corrosion process.
A kind of light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor principle of work:
Enter through the Single port (100) of warbled infrared laser by optical fiber directional coupler, by optical fiber directional coupler three port (102) coupled transfer in fiber grating semi-girder harmonic oscillator device, photothermal excitation resonance will be there is in fiber grating semi-girder resonance sensing head due to " two film thermal effect ", during fiber grating micro-cantilever generation resonance, the centre wavelength of fiber grating changes due to fiber grating mechanical periodicity that (optical grating construction vibrates and is subject to stress downwards, upwards vibrate under tension, cycle changes), returned along optic fibre light path by the reflected signal that fiber grating is modulated, reflected signal light incides matched filtering FBG by optical fiber directional coupler Two-port netwerk (101), transmitted light is received by photodetector (3).Fiber grating cantilever beam resonator probe is very sensitive to vacuum tightness parameter: during vacuum tightness change, air damping changes, semi-girder harmonic oscillator amplitude changes thereupon, the stretching that grating pitch in semi-girder harmonic oscillator is subject to and extruding Cheng Yehui change, and the center wavelength variation scope of final reflected signal also changes.Vacuum tightness is higher, and air damping is less, and the amplitude of semi-girder harmonic oscillator is larger, the stretching that the grating pitch in semi-girder harmonic oscillator is subject to and extruding degree larger, grating, the variation range of the centre wavelength of reflected signal is wider.Otherwise center wavelength variation scope is narrower.The reflected signal of center wavelength variation incides in matched filtering FBG (8), the transmitted light intensity of matched filtering FBG is received by photodetector (3), and the variable quantity of fiber grating semi-girder centre wavelength is converted into the change of light intensity signal and then carrys out measurement of vacuum by matched filtering FBG (8).
Claims (4)
1. a light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor, comprises LD light source (1), optical fiber directional coupler (2), photodetector (3), sensing probe (4), matching fluid (5), micro-machined fiber grating (6), metal coating (7), matched filtering FBG (8); Described LD light source (1) is connected with the Single port (100) of optical fiber directional coupler, Two-port netwerk (101) matching connection filtering FBG (8) of directional coupler, the other end of photodetector (3) matching connection filtering FBG (8), three ports (102) of optical fiber directional coupler are connected with sensing probe (4), and four ports (103) of optical fiber directional coupler immerse matching fluid (5) and form complete vacuum tightness detection system.
2. a kind of light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor according to claim 1, it is characterized in that, described fiber grating semi-girder harmonic oscillator is directly on the optical grating construction basis of single-mode fiber, remove optical grating construction place the first half covering and segment core (optical fiber grating structure departs from device shaft core position), Formation cross-section is the fiber grating semi-girder harmonic oscillator device architecture of D type.
3. a kind of light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor according to claim 1, it is characterized in that, first described fiber grating semi-girder harmonic oscillator processes one section of D type semi-girder based on single-mode fiber end face, and then micro Process writes optical grating construction on D type semi-girder, form fiber grating semi-girder harmonic oscillator device architecture.
4. a kind of light stimulus fiber grating semi-girder harmonic oscillator vacuum sensor according to claim 1, it is characterized in that, described fiber grating semi-girder harmonic oscillator surface is coated with metallic film, and Coating Materials is Jin Hege, and coating film thickness is selected according to semi-girder thickness optimization.
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Cited By (5)
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| CN107607889A (en) * | 2017-09-07 | 2018-01-19 | 于盟盟 | A kind of all-optical transmission magnetic field sensing system based on Li Fi |
| CN108036726A (en) * | 2017-12-05 | 2018-05-15 | 中国科学院合肥物质科学研究院 | It is a kind of to use polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines |
| CN108801438A (en) * | 2018-06-15 | 2018-11-13 | 山东理工大学 | A kind of vibration displacement measuring device based on optical interference |
| CN113008453A (en) * | 2021-03-09 | 2021-06-22 | 中国科学院空天信息创新研究院 | Vacuum degree detection method, system and device based on resonator |
| CN115575026A (en) * | 2022-10-10 | 2023-01-06 | 深圳大学 | Optical fiber resonator, preparation method thereof and vacuum degree detection method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107607889A (en) * | 2017-09-07 | 2018-01-19 | 于盟盟 | A kind of all-optical transmission magnetic field sensing system based on Li Fi |
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| CN108801438A (en) * | 2018-06-15 | 2018-11-13 | 山东理工大学 | A kind of vibration displacement measuring device based on optical interference |
| CN113008453A (en) * | 2021-03-09 | 2021-06-22 | 中国科学院空天信息创新研究院 | Vacuum degree detection method, system and device based on resonator |
| CN115575026A (en) * | 2022-10-10 | 2023-01-06 | 深圳大学 | Optical fiber resonator, preparation method thereof and vacuum degree detection method |
| CN115575026B (en) * | 2022-10-10 | 2024-01-30 | 深圳大学 | Optical fiber resonator, preparation method thereof and vacuum degree detection method |
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