CN108036726A - It is a kind of to use polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines - Google Patents
It is a kind of to use polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines Download PDFInfo
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- CN108036726A CN108036726A CN201711268230.6A CN201711268230A CN108036726A CN 108036726 A CN108036726 A CN 108036726A CN 201711268230 A CN201711268230 A CN 201711268230A CN 108036726 A CN108036726 A CN 108036726A
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- micro lens
- optical fibre
- polarization maintaining
- maintaining optical
- double micro
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02011—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal polarization variation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines are used the invention discloses a kind of, the linearly polarized light produced by laser diode enters fiber coupler from the one arm of the input terminal of fiber coupler, output 10% laser pass sequentially through fiber coupler output terminal one arm and double micro lens structure after formed with minimum waist radius Gaussian beam, nano wire in Gaussian beam is positioned at the Effect on Detecting that acquisition is optimal at waist radius, the photodetector and another arm of the input terminal of fiber coupler connect, another arm of the output terminal of the fiber coupler is with being immersed in liquid immersion device.The present invention utilizes polarization maintaining optical fibre and double micro lens structure, and the signal-to-noise ratio and signal stabilization of detection greatly improved, while has benefited from the parameter matching of double micro lens, reduces the waist radius of outgoing Gaussian beam, improves the spatial resolution of detection.
Description
Technical field
The present invention relates to quantum optices technical field, more particularly to one kind to use polarization maintaining optical fibre and double micro lens measurement nanometer
The device of displacement of the lines.
Background technology
Displacement that can be to tiny samplers such as nano wires using the interference effect of laser carries out accurate measurement with vibration, because
This has been widely used in minute mechanical and electrical system, in necks such as Tiny Mass sensing, the detection of sensitive power and biological medicines
Domain all plays an important role.Compared to free space, more preferable outgoing can be obtained using optical fiber total internal reflection transmission laser
Gaussian beam mode and the spot diameter of smaller (about several microns), are particularly suitable for studying micro-nano sample sizes.In addition, optical fiber
There is flexible, the small and electromagnetism interference of loss, help to obtain reliable and stable, the experiment condition of low-maintenance cost.
Existing ordinary optic fibre is broadly divided into single mode optical fiber and multimode fibre, wherein waveguide of the single mode optical fiber as light, only
The single-mode for allowing Poynting vector parallel with optical fiber axial direction transmits wherein, therefore has smaller compared with multimode fibre
Dispersion, it means that the bandwidth of higher and farther transmission range, therefore be not only widely used in communication field, current optical fiber
Interferometer is also all measured using single mode optical fiber.But with deepening continuously for research, the performance of existing single mode optical fiber has been got over
Required to be more difficult to meet detection, the design of more highly sensitive fibre optic interferometer become one there is an urgent need to.
Measurement sensitivity can be significantly improved using the polarization state of laser.What common lasers produced is non-polarized light,
Single mode optical fiber allows single-mode by the way that but to polarization direction and insensitive, random birefringence or optical fiber is curved in optical fiber
Song, can all change the polarization direction of light, therefore the polarization direction of emergent light is also random.Fibre optic interferometer collect except receiving
The light of nanowire surface reflection further includes the optical signal of environment, i.e. background noise.The characteristics of due to single mode optical fiber, these different polarizations
The signal in direction can be received by optical fiber, so as to improve noise level, the signal measured can also become unstable, this
A little detectivities that can all influence fibre optic interferometer.Importantly, when the diameter of nano wire is less than or can with spot size
Than when, the scattering efficiency of the polarization direction laser vertical with nano wire can become very low, influence the intensity of measuring signal, and inclined
The direction laser parallel with nano wire that shakes then is barely affected, therefore will be aobvious using the displacement of linearly polarized laser detection nano wire
Write and improve sensitivity.
Another characteristic parameter related with detectivity is the waist radius for being emitted Gaussian beam, it is directly related to
The spatial resolution of fibre optic interferometer, is the basic parameter for detecting micro/nano-scale sample, only when spatial resolution parameter approaches
Or less than nano wire size when, detect its displacement or vibration just become feasible.Directly from the Gaussian beam of single mode optical fiber outgoing
Waist radius is larger, can further be reduced using the matched lenticule of parameter.In addition, lenticule is installed additional in optical fiber front end
Also the numerical aperture of system can be significantly increased, is to improve detection light intensity and the important means of signal-to-noise ratio.
The content of the invention
The defects of the object of the invention is exactly to make up prior art, there is provided one kind is surveyed using polarization maintaining optical fibre and double micro lens
Measure the device of nanometer displacement of the lines.
The present invention is achieved by the following technical solutions：
A kind of device that nanometer displacement of the lines is measured using polarization maintaining optical fibre and double micro lens, includes the nanometer in Gaussian beam
Line, double micro lens structure, liquid immersion device, polarization-maintaining fiber coupler, the fabry-Perot laser diode with polarization-maintaining tail optical fiber and
Four arms, the outgoing tail optical fiber of laser diode and the input terminal light of photodetector of photodetector, wherein fiber coupler
Fibre is polarization maintaining optical fibre, and the linearly polarized light produced by laser diode enters optical fiber from the one arm of the input terminal of fiber coupler
Coupler, 10% laser of output pass sequentially through the output terminal of fiber coupler one arm and double micro lens structure after formed
Gaussian beam with minimum waist radius, the detection that acquisition is optimal at waist radius is positioned at by the nano wire in Gaussian beam
The input terminal of effect, the photodetector and fiber coupler another arm connection, the fiber coupler it is defeated
Another arm of outlet is with being immersed in liquid immersion device.By controlling the nano-precision displacement being included in nano wire fixed component
Platform, can obtain photodetector measurement light intensity and the relation of nanometer line position, may thereby determine that the relative displacement of nano wire.
Can be to nanowire Oscillation Amplitude and angle in addition, carrying out the obtained power spectral density function of spectrum analysis to measurement light intensity
Information.
The laser center wavelength that the laser diode produces is from 785nm to 2000nm；The polarization maintaining optical fibre coupling
Device is 2 × 2 types, centre wavelength 780nm, 1064nm, 1310nm and 1550nm, splitting ratio 50:50、75:25、90:10
Or 99:1, there is bidirectional couple characteristic and the narrow key FC/APC connectors of 2.0mm；The operating wavelength range of the polarization maintaining optical fibre is
350nm-2200nm, has panda type or butterfly structure stress rods.
The laser center wavelength that the laser diode produces is 1550nm, and polarization-maintaining fiber coupler centre wavelength is
1550nm, splitting ratio 90:10, the operation wavelength of polarization maintaining optical fibre is 1550nm, has panda type stress rods.
The double micro lens structure is fixed in front of fiber end face using supporting member, in double micro lens in lenticule one
The center three of the heart, two center of lenticule and polarization maintaining optical fibre is conllinear, and lenticule one is opposite with the convex surface of lenticule two.
The numerical aperture of the lenticule one is 0.15, focal length 5.00mm, outside diameter 2.00mm, and operating distance is
4.37mm；The numerical aperture of lenticule two is 0.58, focal length 1.45mm, outside diameter 2.40mm, operating distance 0.81mm.
The distance of the fiber end face and lenticule one is 4.44mm, and lenticule one and the spacing of lenticule two are
3.3mm。
The characteristics of for institute's detected object, using polarization maintaining optical fibre and double micro lens structure, by linearly polarized light characteristic and
The parameter designing of double micro lens, significantly improves the stability and contrast of detectable signal, while improves detection nano wire position
The spatial resolution of shifting, so as to greatly improve the detectivity of system, can apply in the occasion higher to measurement request.
Experimental data shows that the signal-to-noise ratio of measurement result at least improves a magnitude, and spatial resolution improves about 5
Times, therefore, fibre optic interferometer device provided by the invention can significantly improve the working performance of existing detector, realize more highly sensitive
Degree detection nanometer displacement of the lines.
It is an advantage of the invention that：The present invention utilizes polarization maintaining optical fibre and double micro lens structure, and the noise of detection greatly improved
Than and signal stabilization, while have benefited from double micro lens parameter matching, reduce outgoing Gaussian beam waist radius, improve
The spatial resolution of detection.
Brief description of the drawings
Fig. 1 is the index path of the present invention.
Fig. 2 is the cross-sectional view of polarization maintaining optical fibre.
Fig. 3 is double micro lens structure proposed by the present invention.
Fig. 4 is change in location relation of the detectable signal with nano wire in two dimensional surface in the embodiment of the present invention 4.
Fig. 5 is to be contrasted under the same terms using the thermal noise spectrum density measured before and after apparatus of the present invention.
Embodiment
As shown in Figure 1, it is a kind of using polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines, include Gauss light
Nano wire 1, double micro lens structure 2, liquid immersion device 3, polarization-maintaining fiber coupler 4, the Fabry-Perot with polarization-maintaining tail optical fiber in beam
The outgoing tail optical fiber and light of laser diode 5 and photodetector 6, wherein the four of fiber coupler 4 arm, laser diode 5
The input end fiber of electric explorer 6 is polarization maintaining optical fibre 7, by the linearly polarized light that laser diode 5 produces from fiber coupler 4
The one arm of input terminal enters fiber coupler 4, and 10% laser of output passes sequentially through the one of the output terminal of fiber coupler 4
The Gaussian beam with minimum waist radius is formed after arm and double micro lens structure 2, the nano wire 1 in Gaussian beam is positioned
Another of the input terminal of the optimal Effect on Detecting of acquisition at waist radius, the photodetector 6 and fiber coupler 4
Arm connects, and another arm of the output terminal of the fiber coupler 4 is with being immersed in liquid immersion device 3.
The laser center wavelength that the laser diode 5 produces is from 785nm to 2000nm；The polarization maintaining optical fibre coupling
Device 4 is 2 × 2 types, centre wavelength 780nm, 1064nm, 1310nm and 1550nm, splitting ratio 50:50、75:25、90:10
Or 99:1, there is bidirectional couple characteristic and the narrow key FC/APC connectors of 2.0mm；The operating wavelength range of the polarization maintaining optical fibre 7 is
350nm-2200nm, has panda type or butterfly structure stress rods.
The laser center wavelength that the laser diode 5 produces is 1550nm, and 4 centre wavelength of polarization-maintaining fiber coupler is
1550nm, splitting ratio 90:10, the operation wavelength of polarization maintaining optical fibre 7 is 1550nm, has panda type stress rods.
2 structure of double micro lens knot is fixed in front of fiber end face using supporting member, lenticule 1 in double micro lens
The center three at center, 29 center of lenticule and polarization maintaining optical fibre 7 is conllinear, and lenticule 1 is opposite with the convex surface of lenticule 29.
The numerical aperture of the lenticule 1 is 0.15, focal length 5.00mm, outside diameter 2.00mm, and operating distance is
4.37mm；The numerical aperture of lenticule 29 is 0.58, focal length 1.45mm, outside diameter 2.40mm, operating distance 0.81mm.
The distance of the fiber end face and lenticule 1 is 4.44mm, and lenticule 1 and the spacing of lenticule 29 are
3.3mm。
Polarization maintaining optical fibre 7 has panda type structure, its cross section is as shown in Figure 2.1440-1625nm wave-length coverages are operated in,
8.5 μm of core diameter, 125 μm of clad diameter, nominal mode field diameter and numerical aperture are respectively 10.1 μm and 0.125,
The decay of 1550nm is less than 1.0dB/km.Panda type stress structure can keep polarization state, and when long distance transmission has ultra-low loss
And there is good antijamming capability to radiation-induced infringement.
It is as shown in Figure 3 to improve the double micro lens structure that spatial resolution and numerical aperture design in the present invention.Fig. 3
(a) locus of polarization maintaining optical fibre and two lenticules is given, the distance of wherein fiber end face and lenticule 1 is denoted as l1, two
A lenticule spacing is denoted as l2, l1With l2Numerical value can be adjusted within the specific limits according to numerical aperture matching principle, Fig. 3 (b) and
3 (c) is one group of preferable geometric parameter of two lenticules.
It to a kind of method of nano wire dynamic respond is scanned in the plane of vertical nano-wire to characterize detection system
Measurement, as shown in Figure 4.Fig. 4 (a) and 4 (b) be respectively using the scanning survey measured before and after apparatus of the present invention as a result,
Can significantly it find out, the signal-to-noise ratio and spatial resolution of test are all largely increased, and background signal unstability obtains effectively
Suppress.
As shown in figure 5, (such as Fig. 5 (a)) is not used under the same conditions and uses (such as Fig. 5 (b)) apparatus of the present invention to obtain
Thermal noise spectrum density data, it can be seen that the latter can cause vibration mode peak intensity improve 2 to 3 orders of magnitude.
Claims (6)
1. a kind of use polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines, it is characterised in that：Include Gauss light
Nano wire, double micro lens structure, liquid immersion device, polarization-maintaining fiber coupler, the Fabry-Perot lasor with polarization-maintaining tail optical fiber in beam
Four arms of diode and photodetector, wherein fiber coupler, the outgoing tail optical fiber and photodetector of laser diode
Input end fiber be polarization maintaining optical fibre, by the linearly polarized light that laser diode produces from one of the input terminal of fiber coupler
Arm enters fiber coupler, and 10% laser of output passes sequentially through the one arm and double micro lens of the output terminal of fiber coupler
The Gaussian beam with minimum waist radius is formed after structure, the nano wire in Gaussian beam is positioned at waist radius, institute
Another arm of the photodetector stated and the input terminal of fiber coupler connects, the output terminal of the fiber coupler it is another
One arm is with being immersed in liquid immersion device.
2. according to claim 1 a kind of using polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines, it is special
Sign is：The laser center wavelength that the laser diode produces is from 785 nm to 2000 nm；The polarization maintaining optical fibre coupling
Device is 2 × 2 types, centre wavelength 780nm, 1064nm, 1310nm and 1550nm, splitting ratio 50:50、75:25、90:10
Or 99:1, there is bidirectional couple characteristic and the narrow key FC/APC connectors of 2.0 mm；The operating wavelength range of the polarization maintaining optical fibre is
350nm-2200nm, has panda type or butterfly structure stress rods.
3. according to claim 2 a kind of using polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines, it is special
Sign is：The laser center wavelength that the laser diode produces is 1550nm, and polarization-maintaining fiber coupler centre wavelength is
1550nm, splitting ratio 90:10, the operation wavelength of polarization maintaining optical fibre is 1550nm, has panda type stress rods.
4. according to claim 1 a kind of using polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines, it is special
Sign is：The double micro lens structure is fixed in front of fiber end face using supporting member, in double micro lens in lenticule one
The center three of the heart, two center of lenticule and polarization maintaining optical fibre is conllinear, and lenticule one is opposite with the convex surface of lenticule two.
5. according to claim 4 a kind of using polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines, it is special
Sign is：The numerical aperture of the lenticule one is 0.15, focal length 5.00mm, outside diameter 2.00mm, and operating distance is
4.37mm；The numerical aperture of lenticule two is 0.58, focal length 1.45mm, outside diameter 2.40mm, operating distance 0.81mm.
6. according to claim 4 a kind of using polarization maintaining optical fibre and the device of double micro lens measurement nanometer displacement of the lines, it is special
Sign is：The distance of the fiber end face and lenticule one is 4.44mm, and lenticule one and the spacing of lenticule two are
3.3mm。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711268230.6A CN108036726B (en) | 2017-12-05 | 2017-12-05 | Device for measuring nanowire displacement by using polarization maintaining optical fiber and double micro lenses |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711268230.6A CN108036726B (en) | 2017-12-05 | 2017-12-05 | Device for measuring nanowire displacement by using polarization maintaining optical fiber and double micro lenses |
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| CN108036726A true CN108036726A (en) | 2018-05-15 |
| CN108036726B CN108036726B (en) | 2020-12-22 |
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Citations (4)
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| CN1639539A (en) * | 2002-01-11 | 2005-07-13 | 通用医疗公司 | Apparatus for OCT imaging with axial line focus for improved resolution and depth of field |
| CN1975341A (en) * | 2006-12-08 | 2007-06-06 | 东华大学 | All-optical fiber grating multi-parameter sensing system |
| CN104215607A (en) * | 2014-09-18 | 2014-12-17 | 中国科学院合肥物质科学研究院 | Optical fiber cantilever beam sensor for food pathogenic bacteria and detection method |
| CN104776954A (en) * | 2014-01-09 | 2015-07-15 | 中国计量学院 | Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor |
-
2017
- 2017-12-05 CN CN201711268230.6A patent/CN108036726B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1639539A (en) * | 2002-01-11 | 2005-07-13 | 通用医疗公司 | Apparatus for OCT imaging with axial line focus for improved resolution and depth of field |
| CN1975341A (en) * | 2006-12-08 | 2007-06-06 | 东华大学 | All-optical fiber grating multi-parameter sensing system |
| CN104776954A (en) * | 2014-01-09 | 2015-07-15 | 中国计量学院 | Optically-excited fiber grating cantilever beam harmonic oscillator vacuum degree sensor |
| CN104215607A (en) * | 2014-09-18 | 2014-12-17 | 中国科学院合肥物质科学研究院 | Optical fiber cantilever beam sensor for food pathogenic bacteria and detection method |
Non-Patent Citations (2)
| Title |
|---|
| CHENGHUA FU ET AL: "Determining the direction of a nanowire’s flexural vibrations by micro-lens optical fiber interferometer", 《谷歌学术》 * |
| CHENGHUA FU: "Readout of the vibration of nanowires using fibre optics: Combining light scattering and the interference effect", 《PHYSICS LETTERS A》 * |
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