1272383 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種光纖生化感測方法及系統，其包括採用光 纖感測器、將待檢物放置於該光纖感測器上、將光源導入光纖感 測器後以一光偵測元件測量出所需的干涉信號或光強度信號，再 由相位法或是強度法量測出待測物的折射率或是其他與待測物有 關所需的參數，俾能作為生物醫學、化學、光電等領域微小檢體 容量之檢測者。 【先前技術】 按表面電漿共振技術（surface plasmon resonance ; 57货） 在近幾十年來受到國内外研究之矚目（參考文獻：jifiHomola， Sinclair S. Yee, Gunter Gauglitz, "Surface plasmon resonance sensors: review，” Sens· Actuators B 54,3-15(1999))，尤其在 1993 年，£ 6：1272383 IX. Description of the Invention: [Technical Field] The present invention relates to a fiber biochemical sensing method and system, which comprises using a fiber optic sensor, placing a test object on the fiber optic sensor, and introducing the light source After the optical fiber sensor, the required interference signal or light intensity signal is measured by a light detecting component, and then the phase index or the intensity method is used to measure the refractive index of the object to be tested or other related to the object to be tested. The parameters can be used as a detector for micro-sample volume in biomedical, chemical, and optoelectronic fields. [Prior Art] Surface plasmon resonance (57 ware) has attracted attention from domestic and foreign research in recent decades (References: jifiHomola, Sinclair S. Yee, Gunter Gauglitz, "Surface plasmon resonance sensors: Review,” Sens· Actuators B 54, 3-15 (1999), especially in 1993, £6:
Tbr供/^/?等人提出SPR光纖感測器之後（參考文獻：r.c. Jorguenson, S.S. Yee,66A fiber-optic chemical sensor based on surface plasmon resonance，” Sens· Actuators B 12, 213-220(1993))，使用光 纖利用67货技術在材料上的量測，更加引起大家的注意。例如：D 型光纖（參考文獻· W· V· Sorin and Η· Shaw，“Single-mode-fiber ring dye laser，” Opt· Lett.10, 550-552 (1985))、貼覆型單膜光線 (single-mode taped fiber)(參考文獻：A. Diez，M.V.Andr6s， and J· L· Cmz，“In-line fiber-optic sensors based on the excitation of surface plasma modes in metal-coated tapered fibers；5 Sens. Actuators 1272383 B 73,95-99(2001))。其係採用去除光纖被覆（ciadding)，然後鑛 上金層薄膜（如：金、銀），測量的方法，惟，該技術係採用測量 頻譜的方式量測各波長在光纖感測段内傳播的光強度，找出產生 共振的波長，作為測量待測材料的折射率或濃度。由於該量測技 術僅採用測量頻譜的方式，因此，其所量測出之各種數值的精確 度及靈敏度較低，因而較不具有產業上之利用性。 另有一種習用方法及裝置如中華民國專利公告第434429號 「光纖感測器」，其包含一偏極光源以傳送具有中央波長的訊號； 第一保持偏極光纖連接至偏極光源，該第一保持偏極光纖包含第 一橢圓形心蕊，第一包層以及第一組多條光纖區段；第二保持偏 極光纖以耦合該光線訊號並放置於相鄰第一保持偏極光纖以及包 含第二橢圓形心蕊，第二包層，以及第二組多條光纖區段；感測 元件置放於第一及第二保持偏極光纖以及第一預先決定比率在第 一保持偏極光纖中以及以第二在預先決定比率在第二保持偏極光 纖中偏移光線訊號之中央波長以反應出一組多個環境參數；咸測 器組件依據第一預先決定比率以及第二預先決定比率以獨立地決 定每一組多個環境參數。以及’中華民國專利公開第200306167 號「光纖生物感測器」專利案’係包含至少一光纖構件，其具備 至少一處非包覆部位；一層膜彼覆於至少一處該非包覆部位；一 連結於該模層的前驅物，該前驅物可受至少一種微生物所轉形， 其中，該前驅物的轉形產生一光譜可偵測指標之至少一種特性。 1272383 上述前案都是利用光纖感測的方式，來測得待測物的資訊。 惟，兩案的技術細節上仍有些微的不同。而本發明也是利用光纖 感測，本發明因為是經過詳細研究，在整體技術上更為具體，尤 其是本發明特別是採用Kretchmann, s結構為主的光纖生化感測 器搭配相關元件及利用外差式作法測量其相位變化或是測量其光 強度變化而達成感測之目的，其與該兩前案確實為不同的技術内 容特徵，而且本發明所具體記載於說明書中的技術内容可供熟習 該項技術者據以實施，而且確實能供產業充份利用。 【發明内容】 本發明之主要目的在於提供一種具有較高的檢測精確度及靈 敏度’並具有體積小、可遙測及不受輻射影響的光纖感測器之量 滅方法’其係採用可產生電漿共振效果之光纖感測器，將待檢物 放置於該光纖感測器上，再將光源導入光纖感測器後以一光偵測 元件測量出所需的數值，再由相位法或是強度法量測出待測物的 折射率或是其他與待測物有關所需的參數者。 本發明之另一主要目的在於提供一種具有較高的檢測精確度 及靈敏度’並具有體積小、可遙測及不受輻射影響的光纖感測器 之相位量測裝置，其包含有可產生電漿共振效果之光纖感測器、 可產生外差光源的光源裝置、介置於該光源裝置與該光纖輸入端 間’可將光源集束後導入該光纖輸入端的第一耦合透鏡、介置於 該光纖輪入端與一偏極板之間，可將光源導出至該偏極板的第二 搞合透鏡、光偵測元件、可提供一參考訊號的參考訊號產生器以 1272383 及用以比較干涉訊號與參考訊號的相位的鎖相放大器者。 本發明之另一主要目的在於提供一種具有較高的檢測精確度 及靈敏度’並具有體積小'可遙測及不受輻射影響的光纖感測器 之強度量測裝置包括有可產生電漿共振效果之光纖感測器、可產 生線性偏極光的光源裝置、介置於該光源裝置與該光纖感測器輸 入端間，可將光源集束後導入該光纖感測器輸入端的第一耦合透 鏡、介置於該光纖感測器輸入端與一光偵測元件間，可將光源導 出至一光偵測元件的第二耦合透鏡以及可測出射出光的強度變化 的光偵測元件者。 【實施方式】 請配合參看第一至七圖所示，本發明較佳實施例之量測方法 實施時，其包括： 採用一可產生電漿共振效果之光纖感測器(10)，該光纖感測器 (10)包含有光纖蕊心(11)，該蕊心(11)端部外露而具有供光源進出 且同位在該蕊心(11)同一轴線上的入射端(11〇)與出射端(m)(其 中，本發明一種實施中，該蕊心(11)可於兩端部外露而具有供光源 · 進出之入射端(110)與出射端(111)，使光源由蕊心(H)一端之入射 端(no)導入，再由另端出射端(m)導出。另種實施例，請配合參 看第六圖所示，亦可該蕊心(π)只有一端部外露而使入射端(11〇) 與出射端(ill)為同一，並於蕊心(11)另端面具有反射膜(112)，該 光源之光線由該蕊心(11)一端之入射端(110)導入，經另端反射膜 (Π2)反射後，再由該蕊心(11)之出射端(111)導出，再經一光纖柄 · 8 1272383 合器(80)耦合後再導至該第二耦合透鏡(41)。），該蕊心(11)周面 具有包覆層(12)，該包覆層(12)局部具有透孔(120)，使蕊心(11)周 面局部外露而為感測部(112)，並於蕊心(11)的感測部(112)覆設至 少一層金屬薄膜(13); 將待檢物放置於該光纖感測器(10)之該感測部(112)的金屬薄 膜(13)上； 將光源導向該光纖感測器(10); 使光源經一第一耦合透鏡(40)後由該光纖感測器（1〇)之入射 端（110)導入該光纖感測器（10)之蕊心（11)内，並與該光纖感測器 (10)之感測部（112)的金屬薄膜(13)與待測物交互作用後，再由出 射端（111)導出； 再以一第二耦合透鏡(41)粞合後以一光偵測元件(2〇)測得光 之干涉信號或光的強度，再利用干涉信號以相位法求得待測物的 折射率或疋其他與待測物有關所需的參數’或是利用光之強度以 強度法求得待測物的折射率或是其他與待測物有關所需的參數。 其中，本發明較佳實施例中，該光纖感測器之蕊心可為D型 光纖或貼覆型單膜光纖（single-mode taped fiber)。 請參看第一、三圖所示，本發明較佳之相位量測方法實施時， 其中，係將出射光經一片檢偏板(50)與該光偵測元件(20)得到不同 入射角度之干涉信號，並將該干涉信號與另一個相同頻率的參考 4吕號輸入一個相位比較器（6 0 )(該相位比較器可為相位計或鎖相 9 1272383 放大器）做相位的比較，即可得到相對應的相位差值，且該參考信 號可由驅動外差干涉光源的信號提供，並由所量測出的相位差值 即可推導待測物的折射率或其他參數。 請參看第二、五圖所示，本發明較佳之強度量測方法實施時， 其中，使用的光源為雷射線性偏極光，以P偏極光入射該光纖感 測器（10)，該強度法係將出射光由該光偵測元件(20)接收其光源 強度，並由所計算出的穿透率即可得到待測物的折射率或其他參 數。 請參看第一、三圖所示，本發明提供相位法感測的量測系統， 包括有： 一可產生電漿共振效果之光纖感測器(10),該光纖感測器(1⑺包含 光纖微心(11)，該蕊心(11)端部外露而具有供光源進出且同位在該 微心(11)同一轴線上的入射端(110)與出射端(111)(其中，本發明一 種實施中，該蕊心(11)可於兩端部外露而具有供光源進出之入射端 (11〇)與出射端(ill)。另種實施例，請參看第六圖所示，亦可該蕊 心(11)只有一端部外露而使入射端(11〇)與出射端(ill)為同一，並 於蕊心(11)另端面具有反射膜(113)，該光源之光線由該蕊心⑼一 端之入射端(110)導入，經另端反射膜⑽)反射後，再由該蕊心⑼ 之出射端(111)導出，再經-光纖耦合器(8_合後再導至該第二輛 石透鏡(41)。）’该蕊心(11)周面具有包覆層(12)，該包覆層⑽ 局L、有透孔(i2〇)，使微心(η)周面局部外露而為感測部(η2)， 1272383 並於蕊心(11)的感測部(112)覆設至少一層金屬薄膜(13)(其金屬可 為金或銀，或其他金屬）； 一可產生外差光源的光源裝置(30a); 一介置於該光源裝置(30a)與該光纖感測器（1〇)之入射端 (110)間，可將光源集束後導入該光纖感測器（10)之蕊心αι)内部 的第一辆合透鏡(40); 一置於該光纖感測器（10)之出射端（ln)用以聚集出射光的 第二耦合透鏡(41); 一置於該第二辆合透鏡(41) 一側用以接收穿經該第二耦合透 鏡(41)之出射光的檢偏板(5〇); 一置於該檢偏板(50)—侧用以接收穿經該檢偏板(50)之出射 光的光偵測元件(20); 一可提供一參考訊號的參考訊號產生器（7〇);及 一用以比較干涉訊號與參考訊號的相位比較器（6〇)，俾使該 相位比較器（60)藉由所獲得的量測值進而推導待測物的折射率及 其他的參數值者。 請參看第三圖所示，本發明較佳例實施時，其中，該相位比 較斋（60)可為相位計或鎖相放大器。 請參看第五圖所示，本發明提供光強度法感測的量測系統， 包括有： 一可產生電漿共振效果之光纖感測器(1〇)，該光纖感測器(1〇) 11 1272383 包含有光纖蕊心(li)，該蕊心(11)端部外露而具有供光源進出且同 位在該蕊心(11)同一轴線上的入射端(110)與出射端(111)(其中，本 發明一種實施中，該蕊心(11)可於兩端部外露而具有供光源進出之 入射端(110)與出射端(111)。另種實施例，請參看第七圖所示，亦 可該蕊心(11)只有一端部外露而使入射端(110)與出射端(111)為同 一，並於蕊心(11)另端面具有反射膜(113) ’該光源之光線由該蕊心 (11)一端之入射端(110)導入，經另端反射膜(113)反射後，再由該 蕊心(11)之出射端(111)導出，再經一光纖叙合器(8〇)编合後再導至 φ 該第二搞合透鏡(41)。），該蕊心(11)周面具有包覆層(12)，該包 覆層(12)局部具有透孔(120)，使蕊心(11)周面局部外露而為感測部 (112)，於蕊心(11)的感測部(112)覆設至少一層金屬薄膜(13); 一可產生雷射線性偏極光的光源裝置(30b); 一介置於該光源裝置(30b)與該光纖感測器（1〇)之入射端 (110)間，可將光源集束後導入該光纖感測器（1〇)之蕊心（11)内部 的第一耦合透鏡(40) ; φ 一置於該光纖感測器（1〇)之出射端（Π1)用以聚集出射光的 第二耦合透鏡(41);及 一可測出射出光的強度變化的光偵測元件(2〇)。 請參看第四、五圖所示，本發明較佳例於操作實施時，係先 在刨光成單模光纖上鍍上至少一層金屬薄膜(13)，當外差光源装置 (30a)入射此光纖感測器(10)時，其界面上的入射角為0，因此， ， 12 1272383 對於二層結構（光纖私（11) +金屬細(13)+待嶋）而言其户 (水平）與垂直）偏極在此感測器⑽内部傳播，所得到的反 射係數可表示成 〆 _jj2±rj3ei2k^ 123 一 ⑴ 其中為第1層至第J·層的反射係數，尖：為金屬薄膜的 厚度，ί可代表51偏極或户偏極， pt 一 ί Aijr / t = p ，Ί l …，iJ、，巧和。·=ι,2,3 (層）…⑵，Tbr for /^/? et al. proposed SPR fiber optic sensor (Reference: rc Jorguenson, SS Yee, 66A fiber-optic chemical sensor based on surface plasmon resonance," Sens· Actuators B 12, 213-220 (1993) ), the use of fiber optics using 67 cargo technology on the material measurement, more attention to everyone. For example: D-type fiber (References · W · V · Sorin and Η Shaw, "Single-mode-fiber ring dye laser," Opt· Lett. 10, 550-552 (1985)), single-mode taped fiber (Reference: A. Diez, MVAndr6s, and J·L·Cmz, “In-line”) Fiber-optic sensors based on the excitation of surface plasma modes in metal-coated tapered fibers; 5 Sens. Actuators 1272383 B 73, 95-99 (2001)). It adopts a method of removing ciadding and then depositing gold film (such as gold and silver) on the ore. However, the technique measures the frequency of each wavelength in the sensing section of the fiber by measuring the spectrum. Light intensity, find the wavelength at which resonance occurs, as the refractive index or concentration of the material to be tested. Since the measurement technique only uses the method of measuring the spectrum, the various values measured by the measurement have lower accuracy and sensitivity, and thus are less industrially usable. Another conventional method and apparatus, such as the "Fiber Optic Sensor" of the Republic of China Patent No. 434429, which comprises a polarized light source for transmitting a signal having a central wavelength; the first maintaining polarized optical fiber is connected to a polarized light source, the first a polarization maintaining fiber comprising a first elliptical core, a first cladding layer and a first plurality of fiber segments; a second polarization maintaining fiber for coupling the light signal and placed adjacent to the first polarization maintaining fiber and The second elliptical core, the second cladding, and the second plurality of fiber segments; the sensing element disposed on the first and second polarization-maintaining fibers and the first predetermined ratio being at the first retention bias A plurality of environmental parameters are reflected in the optical fiber and at a predetermined ratio in the second polarization-maintaining fiber to reflect a set of a plurality of environmental parameters; the analyzer component is based on the first predetermined ratio and the second predetermined The ratio determines each set of multiple environmental parameters independently. And a 'fiber optic biosensor patent' of the Republic of China Patent Publication No. 200306167, comprising at least one fiber optic member having at least one uncoated portion; a film covering at least one of the uncoated portions; A precursor attached to the mold layer, the precursor being transformable by at least one microorganism, wherein the transformation of the precursor produces at least one characteristic of a spectrally detectable index. 1272383 The above previous cases all use the fiber sensing method to measure the information of the object to be tested. However, the technical details of the two cases are still slightly different. The present invention also utilizes fiber optic sensing. The present invention is more specific in overall technology because it has been studied in detail, and in particular, the present invention particularly uses a Kretchmann, s structure-based fiber biochemical sensor with associated components and utilization. The differential method measures the phase change or measures the change of the light intensity to achieve the purpose of sensing, which is different from the technical contents of the two previous cases, and the technical content specifically described in the specification is familiar to the present invention. The technology is implemented by the technology and can be fully utilized by the industry. SUMMARY OF THE INVENTION The main object of the present invention is to provide a fiber optic sensor with high detection accuracy and sensitivity, and which has a small volume, can be telemetry and is not affected by radiation, and is capable of generating electricity. The fiber-sense sensor of the slurry resonance effect, the object to be inspected is placed on the fiber-optic sensor, and then the light source is introduced into the fiber-optic sensor, and the required value is measured by a light detecting component, and then the phase method is used. The intensity method measures the refractive index of the object to be tested or other parameters related to the object to be tested. Another main object of the present invention is to provide a phase measuring device for a fiber optic sensor having high detection accuracy and sensitivity, and having a small volume, which is telemetry and free from radiation, and includes a plasma generating device. a resonance effect optical fiber sensor, a light source device capable of generating a heterodyne light source, and a first coupling lens disposed between the light source device and the input end of the optical fiber to be bundled and introduced into the optical fiber input end, and disposed in the optical fiber Between the wheel end and a polarizing plate, the light source can be led to the second lens of the polarizing plate, the light detecting component, the reference signal generator capable of providing a reference signal for 1272383, and for comparing the interference signal A phase-locked amplifier with the phase of the reference signal. Another main object of the present invention is to provide a fiber measuring device with high detection accuracy and sensitivity 'having a small volume' that can be telemetry and is not affected by radiation, and includes a plasma resonance effect. a fiber optic sensor, a light source device capable of generating linear polarized light, a first coupling lens disposed between the light source device and the input end of the optical fiber sensor, and the light source is bundled and introduced into the input end of the optical fiber sensor The light source is connected between the input end of the optical fiber sensor and a light detecting component, and the light source is exported to a second coupling lens of a light detecting component and a light detecting component capable of detecting a change in intensity of the emitted light. [Embodiment] Please refer to the first to seventh embodiments. When the measuring method of the preferred embodiment of the present invention is implemented, the method includes: adopting a fiber optic sensor (10) capable of generating a plasma resonance effect, the optical fiber The sensor (10) comprises an optical fiber core (11), the end of the core (11) being exposed and having an incident end (11〇) for the light source to enter and exit and co-located on the same axis of the core (11) End (m) (wherein, in an implementation of the invention, the core (11) can be exposed at both ends and has an incident end (110) and an exit end (111) for the light source to enter and exit, so that the light source is from the core ( H) The incident end (no) of one end is introduced, and then the other end of the exit end (m) is derived. For another embodiment, please refer to the sixth figure, or the core (π) may be exposed only at one end. The incident end (11〇) is identical to the exit end (ill), and has a reflective film (112) on the other end surface of the core (11), and the light of the light source is introduced from the incident end (110) of one end of the core (11). After being reflected by the other end reflection film (Π2), it is then led out from the exit end (111) of the core (11), and then coupled via a fiber holder 8 1272383 (80) to the second coupling. through a mirror (41).), the core (11) has a coating layer (12) on its circumferential surface, and the coating layer (12) partially has a through hole (120) for partially exposing the core surface of the core (11). a sensing portion (112), and covering at least one metal film (13) on the sensing portion (112) of the core (11); placing the object to be in the sensing portion of the fiber sensor (10) (112) on the metal film (13); directing the light source to the fiber sensor (10); passing the light source through a first coupling lens (40) from the incident end of the fiber sensor (1) Introduced into the core (11) of the fiber sensor (10), and interacts with the metal film (13) of the sensing portion (112) of the fiber sensor (10) and the object to be tested, and then It is derived from the exit end (111); after being coupled by a second coupling lens (41), the interference signal or the intensity of the light is measured by a light detecting element (2〇), and then the interference signal is used to obtain the phase method. The refractive index of the object to be tested or other parameters required for the object to be tested is determined or the intensity of the light is used to determine the refractive index of the object to be tested or other parameters related to the object to be tested. In the preferred embodiment of the present invention, the core of the optical fiber sensor may be a D-type optical fiber or a single-mode taped fiber. Referring to the first and third figures, when the preferred phase measurement method of the present invention is implemented, the emitted light is interfered with by different incident angles by the one of the analyzers (50) and the photodetecting element (20). Signal and compare the phase of the interference signal with another reference frequency of the same frequency into a phase comparator (60) (the phase comparator can be a phase meter or a phase-locked 9 1272383 amplifier) Corresponding phase difference value, and the reference signal can be provided by a signal driving the heterodyne interference source, and the refractive index or other parameters of the object to be tested can be derived from the measured phase difference value. Referring to the second and fifth figures, when the preferred intensity measurement method of the present invention is implemented, the light source used is a thunder-ray polarized light, and the P-polarized light is incident on the optical fiber sensor (10). The light emitted by the light detecting element (20) is received by the light detecting element (20), and the refractive index or other parameters of the object to be tested are obtained from the calculated transmittance. Referring to the first and third figures, the present invention provides a phase sensing system for measuring, comprising: a fiber optic sensor (10) capable of generating a plasma resonance effect, the fiber sensor (1 (7) comprising an optical fiber a microcenter (11), the end of the core (11) being exposed and having an incident end (110) and an exit end (111) for the light source to enter and exit on the same axis of the microcenter (11) (wherein the present invention In practice, the core (11) can be exposed at both ends and has an incident end (11〇) and an exit end (ill) for the light source to enter and exit. For another embodiment, please refer to the sixth figure, or The core (11) has only one end exposed to make the incident end (11〇) and the exit end (ill) the same, and has a reflective film (113) on the other end surface of the core (11), and the light of the light source is from the core (9) The incident end (110) of one end is introduced, reflected by the other end reflection film (10), and then led out from the exit end (111) of the core (9), and then passed through the fiber coupler (8_ combined and then redirected to the first Two stone lenses (41).) The core (11) has a cladding layer (12) on its circumference, and the cladding layer (10) has a through hole (i2〇) to make the center of the micro-center (η) Local exposure is the sensing part (η2), 1272383 and the sensing portion (112) of the core (11) is covered with at least one metal film (13) (the metal may be gold or silver, or other metal); a light source device (30a) capable of generating a heterodyne light source Between the light source device (30a) and the incident end (110) of the optical fiber sensor (1), the light source can be bundled and introduced into the inner core of the optical fiber sensor (10) a combined lens (40); a second coupling lens (41) disposed at an exit end (ln) of the fiber optic sensor (10) for collecting light; and a second coupling lens (41) One side is for receiving an analyzer (5〇) that passes through the second coupling lens (41); and one side is disposed on the side of the analyzer (50) for receiving the inspection board ( 50) a light detecting component (20) for emitting light; a reference signal generator (7〇) for providing a reference signal; and a phase comparator (6〇) for comparing the interference signal with the reference signal, The phase comparator (60) is used to derive the refractive index of the object to be tested and other parameter values by using the obtained measured values. Referring to the third embodiment, in the preferred embodiment of the present invention, the phase comparison (60) may be a phase meter or a lock-in amplifier. Referring to FIG. 5, the present invention provides a measurement system for light intensity sensing, comprising: a fiber optic sensor (1〇) capable of generating a plasma resonance effect, the fiber optic sensor (1〇) 11 1272383 comprises an optical fiber core (li), the core (11) end being exposed and having an incident end (110) and an exit end (111) for the light source to enter and exit on the same axis of the core (11) ( In an implementation of the present invention, the core (11) can be exposed at both ends and has an incident end (110) and an exit end (111) for the light source to enter and exit. For another embodiment, please refer to the seventh figure. Alternatively, the core (11) has only one end exposed so that the incident end (110) and the exit end (111) are identical, and the other end surface of the core (11) has a reflective film (113). The incident end (110) of one end of the core (11) is introduced, reflected by the other end reflection film (113), and then led out from the exit end (111) of the core (11), and then passed through a fiber reconciler ( 8〇) Coupling and then leading to φ the second lens (41).), the core (11) has a coating layer (12) on its circumference, and the coating layer (12) has a through hole ( 120), make the core (11) partial surface The exposed portion (112) is provided with at least one metal film (13) on the sensing portion (112) of the core (11); a light source device (30b) capable of generating thunder ray polarized light; Between the light source device (30b) and the incident end (110) of the optical fiber sensor (1), the light source can be bundled and introduced into the first inside the core (11) of the optical fiber sensor (1) a coupling lens (40); φ a second coupling lens (41) disposed at an exit end (Π1) of the fiber sensor (1〇) for collecting the emitted light; and a measurable change in intensity of the emitted light Light detecting element (2〇). Referring to the fourth and fifth figures, in the preferred embodiment of the present invention, at least one metal film (13) is first plated on the single-mode fiber after the planing, when the heterodyne light source device (30a) is incident thereon. In the fiber sensor (10), the incident angle at the interface is 0. Therefore, 12 1272383 is the household (horizontal) for the two-layer structure (fiber optic (11) + metal thin (13) + waiting) And the vertical polarization propagates inside the sensor (10), and the obtained reflection coefficient can be expressed as 〆_jj2±rj3ei2k^ 123 (1) where is the reflection coefficient of the first layer to the Jth layer, and the tip is a metal film The thickness, ί can represent 51 poles or household poles, pt a ί Aijr / t = p, Ί l ..., iJ,, Qiaohe. ·=ι,2,3 (layer)...(2),
其中^是代表在介質心·)中z方向上的波數。根據電磁理論推導 kzi(j—0(nKsin、)0.5........................................ 其中％為光纖蕊心（core )之折射率，〜為光在真空中的波數（贿e number)。若將S及P偏極光在光纖感測器傳播而得的反射係數分 成大小與相位，可各別表示如下 #3=卜斗外’’’23=|广’23|#........................................... 因此兩者之間，在某—細時的相位差為㈣十"⑸，Where ^ is the wave number in the z direction in the medium heart. Deriving kzi according to electromagnetic theory (j-0(nKsin,)0.5.................................... ....% is the refractive index of the core of the fiber, and ~ is the wave number of the light in the vacuum. The reflection coefficient of the S and P polarized light propagating in the fiber sensor Divided into size and phase, can be expressed as follows #3=卜斗外'''23=|广'23|#....................... .................... Therefore, between the two, the phase difference at a certain time is (four) ten " (5),
若要求出此光強度，則令邱3=μ2，％=μ2 .··…⑹， 由於光纖感測器⑽的長度為ζ，其视蕊心的高度為Λ，金屬薄 膜的厚度為ώ所累加的相位差應為卜^............⑺， 八中m,疋在入射角為0時的衰減全反射（attenuated切_^1 reflection)次數， 當長度Z越長時，則 ⑻， 即 m.=---- 2hxtm0i %的大小越大，且穿透光纖之穿透率應為 13 1272383 τ：^τ ^ .......................................(9)， 由以上可知武、7；皆為％之函數，％是z、々、0之函數，而$又 是心、η〆4的函數。假設介質i、2之折射率已知，且^ z、心 A皆已知，由尺或7；可求出待測物折射率〜值。 請參看第四圖所示，本發明以相位法做量測推導時，需使用 外差光源(30a)包含51偏極與户偏極以及入射光纖感測器（1〇)，其 中厶、厶為第一耦合透鏡(4〇)及第二耦合透鏡(41)，其出射光經一 片檢偏板(5〇)與-個線狀的光勤j元件(2〇)得到不同入射角度仪 鲁 干涉托號。這些干涉信號與另一個相同頻率的參考信號輸入一個 相位比較器（60)(相位計或鎖相放大器）做相位的比較，即可得到 相對應的祕，此參考信射Φ軸外差干涉絲的錢提供，由 所量測的A值代入（3〜8)式，可進而推導待測物的折射率（〜） 或其他參數。 3 請參看第五圖所示，本發明以強度法做量測推導時，需使用 一般的雷射線性偏極光，以P偏極入射此光纖感測器(1〇);出射光 _ 由一個線性的光偵測元件(2〇)接收其光強度，並計算其穿透率v， 根據上述原理，可知^與待測物之折射率有關。因此，可以得到 待測物的折射率或其他參數。 因此，藉由上述之結構設計，可歸納本發明確實具有下列所 述之優點： 1·本發明以光纖感測器並配合相位法及強度法的推導，因而可使 14 1272383 該感測器之體積縮小，具遠端遙測且不受輻射影響以及僅需少 量之待檢物即可量測··等之優點。 2·本發明以光纖感測器並配合相位法及強度法的推導，因而可提 升光纖感測器之準確度靈敏度，並且具有精密的即時量測可運 用於生物及醫學上的量測，因此，本發明確實深具產業之利用 性。 以上所述，僅為本發明之一可行實施例，並非用以限定本發 明之專利範圍，凡舉依據下列申請專利範圍所述之内容、雛以 # 及其精神而為之其他變化的等效實施，皆應包含於本發明之專利 範圍内。 綜上所述’本發明之方法及系統，具有體積縮小，具遠端遙 測且不^:輻娜響以及僅需少量之概物即可制及推導並深 具產業之利用性等功效，可有效改善習用所產生之缺失；本發明 所具體界定於申請專利範圍之結構特徵，未見於醜物品，^且 實用性與進步性，已符合發明專利要件，爰依法具文提㈣請，、 謹請鈞局依法核予專利，以維護本申請人合法之權益。月 【圖式簡單說明】 第一圖係本發明相位量測方法之方塊示意圖； 第二圖係本發明之強度量測之方塊示意圖； 第三圖係本發明之相位量測裝置示意圖； 第四圖係本發明之光纖感測器局部斷面放大示意圖 第五圖係本發明之強度量測裝置示意圖； 15 1272383 第六圖係本發明之相位量測裝置另—實施例示意圖；及 第七圖係本發明之強度量測裝置另一實施例示意圖。 【主要元件符號說明】 (10)光纖感測器 （11)蕊心 （110)入射端 (111)出射端 （112)感測部 （113)反射膜 (12)包覆層 (20)光偵測元件 (41)第二搞合透鏡 C70)訊號產生器 (120)透孔 （13)金屬膜To find the light intensity, let Qiu 3 = μ2, % = μ2 . . . (6), since the length of the fiber sensor (10) is ζ, the height of the core is Λ, and the thickness of the metal film is ώ The accumulated phase difference should be the number of times of attenuated total reflection (attenuated cut _^1 reflection) when the incident angle is 0, and the length Z The longer the time, the greater the size of (8), ie m.=--- 2hxtm0i %, and the penetration rate of the penetrating fiber should be 13 1272383 τ:^τ ^ ........... ............................(9), from the above, we can see that Wu, 7; are all functions of %, % is z, 々 , a function of 0, and $ is a function of the heart, η〆4. It is assumed that the refractive indices of the media i and 2 are known, and both the z and the heart A are known, and the refractive index value of the object to be tested can be obtained from the ruler or the seventh value. Referring to the fourth figure, when the present invention uses the phase method to measure and derive, it is necessary to use a heterodyne light source (30a) including 51 polarized and household polarized electrodes and an incident optical fiber sensor (1〇), wherein 厶 and 厶 are used. The first coupling lens (4〇) and the second coupling lens (41), the emitted light is obtained by a plurality of analyzers (5〇) and a linear optical component (2〇) to obtain different incident angles. Interference with the number. These interference signals are input to a phase comparator (60) (phase meter or lock-in amplifier) for phase comparison with another reference signal of the same frequency to obtain a corresponding secret. This reference signal Φ axis heterodyne interference wire The money is provided, and the measured value of A is substituted into (3~8), and the refractive index (~) or other parameters of the object to be tested can be further derived. 3 Please refer to the fifth figure. When the invention is deduced by the intensity method, it is necessary to use general lightning ray polarized light, and the P-polarization is incident on the fiber sensor (1〇); the outgoing light _ The linear light detecting element (2〇) receives its light intensity and calculates its transmittance v. According to the above principle, it can be known that it is related to the refractive index of the object to be tested. Therefore, the refractive index or other parameters of the object to be tested can be obtained. Therefore, with the above structural design, it can be concluded that the present invention does have the following advantages: 1. The present invention utilizes a fiber optic sensor in conjunction with a phase method and a strength method to derive 14 1272383. It has the advantages of reduced volume, remote telemetry and no radiation influence, and only a small amount of the object to be tested can be measured. 2. The invention adopts the fiber optic sensor and the derivation of the phase method and the intensity method, thereby improving the accuracy sensitivity of the fiber optic sensor, and having precise real-time measurement for biological and medical measurement, The invention is indeed highly industrially usable. The above is only one of the possible embodiments of the present invention, and is not intended to limit the scope of the patents of the present invention, and the equivalents of the other contents of the following claims and the spirit of the invention. Implementations are intended to be included in the scope of the invention. In summary, the method and system of the present invention have the advantages of reduced size, remote telemetry, and no need for: a whirlwind and only a small amount of objects can be produced and derived, and the utility of the industry can be utilized. Effectively improve the lack of the use of the application; the structure of the invention is specifically defined in the scope of the patent application, not found in ugly items, and practical and progressive, has met the requirements of the invention patent, 具 具 提 提 (4), please The bureau shall be required to grant a patent in accordance with the law to protect the lawful rights and interests of the applicant. The first figure is a block diagram of the phase measurement method of the present invention; the second figure is a block diagram of the intensity measurement of the present invention; the third figure is a schematic diagram of the phase measurement device of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 5 is a schematic view showing a portion of an intensity measuring device of the present invention; 15 1272383 FIG. 6 is a schematic view showing another embodiment of the phase measuring device of the present invention; A schematic diagram of another embodiment of the strength measuring device of the present invention. [Main component symbol description] (10) Fiber sensor (11) Core (110) Incident end (111) Exit end (112) Sensing part (113) Reflective film (12) Cladding layer (20) Optical detection Measuring element (41) second lens L70) signal generator (120) through hole (13) metal film
(30a)(30b)光源裝置（40)第一耦合透鏡 (50)檢偏板 （60)相位比較器 (80)光纖耦合器(30a) (30b) Light source device (40) First coupling lens (50) Analyzer (60) Phase comparator (80) Fiber coupler
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