CN203178030U - Optical fiber harmonic oscillator vacuum sensor - Google Patents
Optical fiber harmonic oscillator vacuum sensor Download PDFInfo
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- CN203178030U CN203178030U CN 201320045398 CN201320045398U CN203178030U CN 203178030 U CN203178030 U CN 203178030U CN 201320045398 CN201320045398 CN 201320045398 CN 201320045398 U CN201320045398 U CN 201320045398U CN 203178030 U CN203178030 U CN 203178030U
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Abstract
The utility model provides an optical fiber intrinsic harmonic oscillator vacuum sensor. A micro-over-beam harmonic oscillator is directly machined on a fiber end face. The utility model belongs to the technical field of optical fiber sensors. The vacuum sensor is characterized by comprising a laser light source, a detector, an optical fiber directional coupler, matching liquid and a sensing probe. The vacuum sensor enables optical fiber intrinsic structure integration, and measures in an all-optical manner. A single light source enables excitation of the harmonic oscillator, detection of resonance signals, and online distributed multi-point monitoring at the same time. A Fabry-Perot optical resonant cavity is formed on the fiber end face and the micro-beam. Reflected light signals of the F-P cavity are modulated by the resonant cavity, and then get back along a fiber light path, and are received by a photoelectric detector PD on an output end of the optical fiber coupler. The vacuum sensor also realizes measurement of vacuum degree of narrow spaces in consideration of quality factors of the micro-over-beam.
Description
Technical field
The invention belongs to the fiber optic sensor technology field, relate to a kind of for the optical fiber intrinsic harmonic oscillator sensor of measuring small space vacuum tightness.
Background technology
Vacuum measurement when vacuum transducer is applied to semiconductor packages usually.Vacuum measurement for small space is one of key application of present vacuum measurement technology, existing satisfiable method mostly is the micromechanics probe method, many advantages such as the vacuum transducer that micromechanics probe is made has, and volume is little, in light weight, but the low batch making of cost and monolithic are integrated, but the micromechanics probe method needs electric signal excitation and output, be not easy to realize the Distributed Multi monitoring, and can not be applicable to inflammable and explosive environmental testing, the optical fiber vacuum transducer that therefore designs a kind of full light transmission has urgent technical need.
At present, about optical fiber at the bibliographical information of vacuum tightness context of detection seldom, bibliographical information has been arranged a kind of gas vacuum degree measuring equipment (list of references: Sui Chenghua of reflection-type optical fibre sensor, Feng Mingkun. a kind of Fibre Optical Sensor for vacuum measurement. semiconductor optoelectronic, 2003, the 5th phase: 350-353), its measuring principle is to utilize with reference to metallic film in the chamber to produce linear deformation with the variation of system vacuum degree, adopt the optical fibers of a pair of 450 μ m core diameters to do emission respectively and receive optical fiber, by measuring based on the relative displacement of optical fiber and the metallic film modulation voltage to the reflective light intensity signal, determine the variation of vacuum tightness.
The outstanding feature of Fibre Optical Sensor is that little, the anti-electromagnetic interference (EMI) of volume, anticorrosive and full light signal are measured, particularly sensing head can be put into the narrow and small environment in abominable space (as occasions such as poisonous, inflammable, explosive, High Temperature High Pressure), be convenient to remote measuring and controlling, realize online, multiple spot Distributed Detection gas vacuum tightness size.This class sensor is taken into account the technical characterstic that resonant transducer and optical sensor have, and have technical advantages such as full light transmission, microminiaturization, high sensitivity, easy of integration and low cost, the high-precision sensing that is particularly suitable for small space is measured, and is with a wide range of applications in a plurality of research fields such as physics, chemistry, biomedicine and life sciences.
The present invention directly in the little beam harmonic oscillator of fiber end face processing, realizes that the optical fiber intrinsic is structure-integrated, is used for measuring the vacuum tightness of small space, i.e. optical fiber harmonic oscillator vacuum transducer.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, a kind of optical fiber intrinsic harmonic oscillator vacuum transducer is provided.
The sensor technology scheme that the present invention takes is:
The present invention includes LASER Light Source, detector, optical fiber directional coupler, matching fluid and sensing probe.LASER Light Source is connected with a fiber port light of optical fiber directional coupler one side, detector is connected with another fiber port light of optical fiber directional coupler one side, a fiber port of optical fiber directional coupler opposite side is connected with little beam harmonic oscillator light, and another port of optical fiber directional coupler opposite side immerses matching fluid by optical fiber.
Described little beam harmonic oscillator is the suspension beam structure based on optical fiber (standard single-mode fiber) end face, this suspension beam structure is positioned at fiber end face, comprise solid Zhi Duan and overarm, Gu an end and the optical fiber of Zhi Duan are fixed, the other end is fixing with overarm, described solid Zhi Duan hangs oneself from a beam perpendicular to light, fiber end face and overarm mechanics Fabry-Perot-type optical resonator; Be coated with metallic sensing film on the described overarm lateral surface.
Described overarm lateral surface metallic sensing film material selection Au or Cr.
Described solid end highly is 0.5 μ m～5 μ m, and length is 20 μ m～40 μ m.
Described overarm length is 80 μ m～100 μ m, and thickness is 5 μ m～10 μ m.
The width of described solid Zhi Duanyu overarm is identical, is 20 μ m～40 μ m.
As alternative dispensing means, suspension beam structure can be both-end and props up admittedly, and namely Xuan Liang two ends all are fixedly connected with solid Zhi Duan, fixes by solid Zhi Duanyu fiber end face, and the whole total length of the overarm of this moment is identical with fibre diameter.
Described suspension beam structure is optical fiber intrinsic integral structure.
The present invention has following beneficial effect with respect to prior art:
Directly in the little beam harmonic oscillator of fiber end face processing, realize the integrated smooth integrated morphology of resonance Sensitive Apparatus, had following technological merit: the first, device architecture is simple, light path and device unite two into one, and the optically-coupled autoregistration has strengthened the reliability of resonating device work; The second, owing to the resonance Sensitive Apparatus is directly processed on the standard single-mode fiber end face, so the size of Sensitive Apparatus is suitable with fiber end face, can satisfy the requirement of sensor microminiaturization; The 3rd, because little beam and fiber end face forming method Fabry-Perot-type optical resonator, thereby can improve the accuracy of detection of little beam resonance signal; The 4th, this structural design can realize that single light source realizes the excitation of harmonic oscillator and detecting of resonance signal simultaneously, therefore can reduce system cost.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is the little beam harmonic oscillator stereographic map of first embodiment among the present invention;
Fig. 3 is the little beam harmonic oscillator stereographic map of second embodiment among the present invention;
Fig. 4 is the processing technology synoptic diagram of the little overarm resonance of fiber end face sensor:
(a) fiber end face polishing and cleaning; (b) keep along diametric resonator;
(c) optical fiber is turned over vertically 90 ° of angles; (d) micro-resonator F-P cavity configuration;
(e) micro-bridge structure resonator; (f) micro-cantilever resonator structure.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 1, optical fiber intrinsic harmonic oscillator vacuum sensor comprises LASER Light Source, detector, optical fiber directional coupler, matching fluid and sensing probe.LASER Light Source is connected with a fiber port light of optical fiber directional coupler one side, detector is connected with another fiber port light of optical fiber directional coupler one side, a fiber port of optical fiber directional coupler opposite side is connected with little beam harmonic oscillator light, and another port of optical fiber directional coupler opposite side immerses matching fluid by optical fiber.
As shown in Figure 2, little beam harmonic oscillator is the suspension beam structure based on optical fiber (standard single-mode fiber) end face, this suspension beam structure is positioned at fiber end face, comprise solid Zhi Duan and overarm, Gu an end and the optical fiber of Zhi Duan are fixed, the other end and overarm are fixing, hold respectively perpendicular to fiber end face and overarm fiber end face and overarm mechanics Fabry-Perot-type optical resonator for described solid; Be coated with metallic sensing film on the described overarm lateral surface.
As shown in Figure 3, as alternative dispensing means, suspension beam structure can be both-end and props up admittedly, and namely Xuan Liang two ends all are fixedly connected with solid Zhi Duan, fixes by solid Zhi Duanyu fiber end face, and the overarm length of this moment is identical with fibre diameter.
Vacuum Package can make the performance of device be able to better performance, but the vacuum tightness of the performance of device and its encapsulation of not sum is directly proportional.Gas will produce damping to device in the vacuum degree deficiency, device cavity, and device sensitivity is not high, and performance is bad; Too high " vibration " phenomenon that can take place again of vacuum tightness, this detects and controls the vacuum tightness of device encapsulation with regard to requiring.During the vacuum tightness of the little overarm sensor test of the optical fiber harmonic oscillator device that the present invention proposes, mainly consider the quality factor of its little overarm.Quality factor are to describe the parameter of micro-cantilever resonance characteristics (be 20～40 as the quality factor of MEMS micro-mechanical gyroscope under atmospheric environment, when being operated in vacuum environment following time, its quality factor can reach 1000～50000).
The quality factor q definition of micro-cantilever
Q＝m
*ω
0/r
Wherein, m
*Be the effective mass of micro-cantilever, ω
0Be the resonant frequency of little overarm, r is the system damping coefficient of little overarm and surrounding environment.The value of Q and the size of ratio of damping are inversely proportional to.The change of Q reflects the variation of response amplitude, and amplitude is defined as
A＝QF/k
F is exciting force, and k is the elasticity coefficient of little overarm.
Suspension beam structure is optical fiber intrinsic integral structure in two kinds of possibilities of the present invention.
For this reason, the present invention proposes the little overarm resonance of a kind of novel optical fiber sensitive device structure method, this type device have single light source excitation, light stimulus efficient height, optical fiber integration processing, microminiaturized, device architecture is simple and advantage such as strong anti-interference performance, can break through the technical bottleneck of existing silicon micro-mechanical resonate Sensitive Apparatus, promote the practicability exploitation of such sensor.
Based on the little overarm resonance of optical fiber Sensitive Apparatus technology, can develop microminiaturization, high precision and Full-optical resonance sensing detector cheaply, this class sensing detector is particularly suitable for narrow and small test occasion, small space as semi-conductor industry is measured, biomedical high resolving power biochemical component measure or human body in biomedical Wicresoft sensitive measurement etc., have important academic values and application prospect widely.
The little overarm resonance of the novel optical fiber Sensitive Apparatus that the present invention proposes is based on the optical fiber integration micromachining technology, directly little overarm resonator is produced on the standard traffic fiber end face, little overarm is arranged along the radially processing of fiber end face, cover and aim at the fibre core position of optical fiber, and be in parallel position with fiber end face.Surface deposition at the little overarm resonator of optical fiber generates layer of metal film (as: Au or Cr) then, and the little overarm of optical fiber has just formed double-deck resonance sensitive structure like this.The little overarm resonance of optical fiber Sensitive Apparatus structurally has two kinds of forms, and a kind of is optical fiber micro-cantilever resonator, and another kind is the optical fiber micro-bridge resonator of two fixed ends.
The little overarm resonance of optical fiber Sensitive Apparatus is operated in full light stimulus mode, motivational techniques adopt infrared LD LASER Light Source, imported by the coupling of the optical fiber other end through warbled infrared LD laser, incide on the little overarm resonator of optical fiber from the device end output of optical fiber then, then optical fiber semi-girder resonance sensing head will photothermal excitation resonance occur owing to " two film thermal effect ", if apply different sensitive membrane again then can realize sensitive detection to respective physical or biochemical component on optical fiber micro-cantilever metal coating.Another technical characteristic of this device invention is: just can utilize the Fabry-Perot interference chamber (F-P chamber) that constitutes between the little overarm of optical fiber and the fiber end face as the resonance detection means, the reflected light signal in this F-P chamber is modulated by resonator cavity, return along optic fibre light path then, accepted by the photoelectric detector PD of fiber coupler output terminal again.The F-P resonator cavity is multiple-beam interference micrometric displacement detection architecture ripe in the optics, and its detection sensitivity can reach inferior nano-precision, Figure 1 shows that detection system sketch and the device architecture sketch of the little overarm resonator of light stimulus fiber end face.
Be not difficult to find out by Fig. 1, directly in the little overarm harmonic oscillator of fiber end face processing, realized the integral structure of resonance Sensitive Apparatus, has following technological merit: first, simplified device architecture, light path and device unite two into one, and do optically-coupled aligning and position adjustment between not needing, and have strengthened the reliability of resonating device work; The second, owing to resonating device is directly processed on the standard traffic fiber end face, so the size of Sensitive Apparatus and fiber end face suitable (standard traffic fibre cladding diameter is 125 microns), can satisfy the requirement of sensor microminiaturization; The 3rd, because the little overarm of fiber end face and fiber end face form F-P multiple-beam interference resonator cavity, thereby can improve the accuracy of detection of little overarm resonator resonance signal greatly; The 4th, this structural design can realize that single lasing light emitter realizes the excitation of resonator and detecting of resonance signal simultaneously, therefore can simplied system structure and reduce system cost greatly.From above 4 as can be seen, the fiber end face resonator structure that invention proposes can overcome the technical difficulty that existing silicon micro-suspension girder resonance structure exists, as system complex, the integrated coupling difficulty of light path, interference free performance difference etc., can break through the technical bottleneck of silicon micro-suspension girder resonating device practicability exploitation.
Optical fiber micro fabrication and traditional silicon micro mechanical plane processing technology are different, such as: traditional plane mask, photoetching and etching process can not adapt to three-dimensional optical fiber micromachined requirement.The present invention adopts and focuses on beam-plasma job operation (FIB:focused ion beam), finishes the processes process of device, as shown in Figure 2.Technological process is as follows: (a) fiber end face polishing and cleaning; (b) the fiber end face bilateral is parallel to the end face direction and focuses on beam-plasma milling processing, keeps along diametric resonator width and suitable height; (c) optical fiber is turned over vertically 90 ° of angles; (d) carry out again forming the micro-resonator F-P cavity configuration that suspends along the processing of fiber end face parallel direction localization focused ion beam sapping; (e) the focused ion beam milling of the little overarm of fiber end face is thinned to required resonator thickness, forms the micro-bridge structure resonator; (f) if solid part of micro-bridge resonator one end removed with focusing on the beam-plasma abrasion, then form the micro-cantilever resonator structure.Then, can be optimized design according to surveying needs to (e) and (f) two kinds of resonator structures: by plating metal on surface film and the infrared absorption membrane to resonator, improve optics fineness and the light stimulus efficient in F-P chamber, thereby improve the resolution of sensor; By applying bio-sensitive film in resonator surface, structure biological substance sensing detector.Be illustrated in figure 4 as the processing technology synoptic diagram of the little overarm resonance of fine end face sensor.
Claims (3)
1. optical fiber harmonic oscillator vacuum transducer, comprise: LASER Light Source, detector, optical fiber directional coupler, matching fluid and sensing probe, it is characterized in that: LASER Light Source is connected with a fiber port light of optical fiber directional coupler one side, detector is connected with another fiber port light of optical fiber directional coupler one side, a fiber port of optical fiber directional coupler opposite side is connected with little beam harmonic oscillator light, and another port of optical fiber directional coupler opposite side immerses matching fluid by optical fiber.
2. optical fiber harmonic oscillator vacuum transducer according to claim 1, it is characterized in that: the micro girder construction of little beam harmonic oscillator is positioned at fiber end face, comprise solid Zhi Duan and little overarm, Gu an end and the optical fiber of Zhi Duan are fixed, the other end and little overarm are fixed, described solid Zhi Duan is perpendicular to little overarm, Gu the width of the little overarm of Zhi Duanyu is identical.
3. optical fiber harmonic oscillator vacuum transducer according to claim 1, it is characterized in that: little overarm and fiber end face are in parallel position, and mechanics Fabry-Perot-type interference cavity (F-P chamber) is as the resonance detection means between little overarm and the fiber end face.
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| CN 201320045398 CN203178030U (en) | 2013-01-22 | 2013-01-22 | Optical fiber harmonic oscillator vacuum sensor |
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| CN 201320045398 CN203178030U (en) | 2013-01-22 | 2013-01-22 | Optical fiber harmonic oscillator vacuum sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103134636A (en) * | 2013-01-22 | 2013-06-05 | 中国计量学院 | Optical fiber harmonic oscillator vacuum sensor |
| CN106124028A (en) * | 2016-06-15 | 2016-11-16 | 北京理工大学 | A kind of micro-nano fiber vibrating sensor based on femtosecond laser parallel micromachining |
| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
-
2013
- 2013-01-22 CN CN 201320045398 patent/CN203178030U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103134636A (en) * | 2013-01-22 | 2013-06-05 | 中国计量学院 | Optical fiber harmonic oscillator vacuum sensor |
| CN103134636B (en) * | 2013-01-22 | 2016-05-18 | 中国计量学院 | Optical fiber harmonic oscillator vacuum transducer |
| CN106124028A (en) * | 2016-06-15 | 2016-11-16 | 北京理工大学 | A kind of micro-nano fiber vibrating sensor based on femtosecond laser parallel micromachining |
| CN106124028B (en) * | 2016-06-15 | 2018-12-18 | 北京理工大学 | A kind of micro-nano fiber vibrating sensor based on femtosecond laser parallel micromachining |
| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
| CN107271546B (en) * | 2017-07-04 | 2023-07-21 | 滨州学院 | Photoacoustic spectrum gas detection system based on silicon cantilever beam and matched resonance tube thereof |
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Granted publication date: 20130904 Termination date: 20140122 |