CN207096273U - A kind of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration - Google Patents
A kind of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration Download PDFInfo
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- CN207096273U CN207096273U CN201720411125.2U CN201720411125U CN207096273U CN 207096273 U CN207096273 U CN 207096273U CN 201720411125 U CN201720411125 U CN 201720411125U CN 207096273 U CN207096273 U CN 207096273U
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Abstract
The utility model discloses a kind of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration.Including optical fiber, the end face of optical fiber is provided with speculum；The clad of optical fiber is provided with a Fabry Perot chamber；Etching is processed to fibre cladding using Ps Laser Pulse and obtains optical fiber micro-cantilever and acceleration sensitive mass；It is an optical fiber micro-cantilever in Fabry Perot chamber side；The acceleration sensitive mass of one shaping surface of optical fiber micro-cantilever one；Acceleration sensitive mass forms interferometric optical fiber sensor with speculum.The utility model senses by using a telecommunication optical fiber collection and is transmitted in one, realizes acceleration signal detection and transmission, realizes remote real time monitoring；Also, the size sensor is small, and volume is light, suitable for the acceleration monitoring demand under the limited environment of space；Manufactured using laser processing technology for optic fibre cantilev, speed is fast, is easy to scale, can reduce manufacturing cost.
Description
Technical field
The utility model belongs to sensor technical field, micro- outstanding more particularly to a kind of highly sensitive optical fiber for detecting acceleration
Arm beam sensor and processing method, for industrial production, the real-time monitoring of the field to acceleration signal such as military and public safety
Demand.
Background technology
Acceleration transducer is to utilize a kind of conventional sensing of one kind of the inertial property measurement object of which movement situation of object
Device, it is widely used in the fields such as earthquake, bridge health situation, industrial machinery safety monitoring.Output and the motion of carrier
Acceleration is proportional or has the signal of certain relation.Its sensing principle is based on Newtonian mechanics second theorem：Work of the object in external force
Acceleration will be produced under, its size is directly proportional to added external force, is inversely proportional with mass of object, is inversely proportional with mass of object, side
To consistent with the direction of active force.The species of acceleration transducer is various, can be divided into from test philosophy piezoelectric type, condenser type,
Inductance type, pressure resistance type, tunnel current formula, resonant mode etc..Most acceleration transducers are the principles according to piezo-electric effect come work
Make, have condenser type and piezoresistive accelerometer using comparative maturity at present.Fibre optic accelerometers then use optical fiber sensing technology
Measure inertia force or the displacement of mass.Compared with the former, the not only particular advantages with electromagnetism interference, and the small matter of body
Gently, wide dynamic range, precision is high, can work in the presence of a harsh environment.Optical fiber acceleration is in respect of many kinds, such as intensity modulation type, phase
Position modulation type, wavelength modulation type.The wherein most study of intensity modulation type and phase modulation-type, using also most extensive.Intensity is adjusted
Cantilever beam type accelerometer in type processed due to the features such as integrated level is high, and fast response time is adapted to the application of adverse circumstances, by
Increasing concern.But detected for high sensitivity, the acceleration signal of Larger Dynamic scope, ordinary optic fibre accelerometer
Seem helpless.High acceleration detection in finite spatial extent, under adverse circumstances turns into acceleration transducer and developed
A direction.
Cantilever beam is that one end is fixed, and the free beam type flexible member of the other end, is characterized in simple in construction, is easy to paste and answers
Become piece, therefore be widely used in the traditional sensors of mechanical measurement.Fiber grating is combined with cantilever beam structure can be real
Existing cantilever beam causes that many scholars are interested in the cantilever beam sensor of fiber grating to the tunning effect of grating.But due to being ripple
Long measurement, sensor cost are higher.Sensor based on fiber microbending loss is J.N.Fields in 1980 and J.H.Cole first
Secondary proposition, hereafter microbending optical fiber sensor obtains faster development.Microbending optical fiber sensor has been used to detect pressure, position
Shifting, liquid level, temperature and strain etc..Optical fiber micro-bending sensor have high sensitivity with because of ionization meter and measurement cost it is low wait spy
Point.
The design and manufacture of micro-cantilever：, it is necessary to which the parameter that emphasis considers is sensitivity, noise, bullet when designing cantilever beam
Property coefficient, response frequency etc..One high performance cantilever beam usually require have still sensitivity, low noise, high response frequency and
Low elastic coefficient.These parameters depend on the geometry, the engineering properties of material and the technique for making cantilever beam of cantilever beam
Condition etc..These requirements can not all meet, for example reduce coefficient of elasticity while can reduce response frequency, and root is wanted in design
Dig the comprehensive consideration of use occasion.
In the prior art, the manufacture of cantilever beam is realized by bulk silicon process, and conventional processing technology has photoetching, carved
Erosion, thin-film technique etc., an existing technological process are as follows：1st, SNx films, about 1.5 μm of thickness are grown；2nd, back side photoetching, quarter
Lose window；3rd, positive photoetching, etching cantilever beam figure；4th, surface evaporation deposits gold thin film and peeled off；5th, corroded using KOH
Silicon substrate, discharge beam.
The key and difficult point of micro-cantilever sensing technology are the fixations of biochemical sensitive material and beam.This fixation should
Consider reliability and the sensitivity of detection, it is impossible to inactivate biomolecule；It is also contemplated that desorption and the recycling problem of beam.
Fixing means has absorption method, investment, cross-linking method, covalently bonded legal, and these methods respectively have advantage and disadvantage, such as conventional absorption method
It is simple to operate, but adhesion is weak；Covalently bonded is legal to be connected firmly, reusable, is most active one kind in current research
Method, but this method is more violent than other method reaction, biomolecule activity loss is more serious.
Existing parent U.S.Patent No US10140491 discloses one kind《MIP micro-cantilever beam sensors and its application method》Adopt
It polymerize micro-cantilever beam sensor (MIP) technology, and its application method with molecular engram.MIP micro-cantilever beam sensor, which is inserted, leads
Pipe, in process water or environment flow, or other body fluid.The flow that MIP micro-cantilever beam sensor provides continuously is monitored on-line, its
Middle MIP preparation attracts the Sensor monitoring of any target analytes.Above-mentioned technical proposal is applied in detection organic molecule, is being believed
Number lack technical support between transmission and sensing, it is also, complicated, it is not easy to scale.
Existing patent CN03109491.0《A kind of micro-cantilever beam sensor and preparation method thereof》It includes a chip, described
At least one set of sensing unit is provided with chip, the sensing unit is quick by four identical power for forming Wheatstone bridge
Resistance and two cantilever beam compositions, resistance described in two of which are located on the substrate of the chip, and two other is located at institute respectively
State on two cantilever beams, one of as measurement cantilever beam, another has as cantilever beam is referred on each cantilever beam
One window, the cantilever beam is set to take the shape of the letter U setting on the chip, the measurement cantilever beam surface is provided with sensitive layer.It is above-mentioned
Technical scheme enters the design of line sensor using various structures and composite bed, and structure processing and manufacturing requires high, in signal transmission and
Lack technical support between sensing.
Utility model content
The purpose of this utility model is to provide a kind of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration and added
Work method, by laser machine prepare miniaturization accelerometer, improve acceleration signal detection sensitivity and device it is total
Body integrated level, solve the problems, such as that the sensor integration degree of prior art is not high.The acceleration transducer can pass through optical interference
Mode is demodulated, and can be integrated in the acquisition of transducing signal and transmission on a piece optical fiber and be completed.It is adapted to industry, military, peace
Complete the multi-field application such as to take precautions against, while have that device volume is small, detection is sensitive, the advantages that essential safety.
In order to solve the above technical problems, the utility model is achieved through the following technical solutions：
The utility model is a kind of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration, including optical fiber, the light
Fine fibre core end face is provided with speculum；The clad of the optical fiber is provided with a Fabry-Perot-type cavity；Using Ps Laser Pulse
Etching is processed to fibre cladding and obtains optical fiber micro-cantilever and acceleration sensitive mass.
Wherein, the Fabry-Perot-type cavity side is an optical fiber micro-cantilever；The shaping surface of optical fiber micro-cantilever one
One acceleration sensitive mass；The acceleration sensitive mass forms interferometric optical fiber sensor with speculum.
Further, the optical fiber is the telecommunication optical fiber of standard, including single-mode fiber and multimode fibre.
Further, scope of the thickness of the optical fiber micro-cantilever at 2-5 μm, the acceleration sensitive mass weight
In 2-5mg scope；To meet the needs of acceleration sensing.
Further, the angle of the end face of the minute surface of the speculum and fiber core is 45 °；In detection cantilever beam vibration
While, ensure that enough light energies are coupled into optical fiber.
Further, the speculum is at least 20 μm of squares for multiplying 20 μm, and the minute surface area of the speculum is more than
The face area of fibre core, the minute surface area of the speculum are less than the face area of optical fiber, to be passed by a telecommunication optical fiber collection
Feel and be transmitted in one, realize that acceleration signal detects, transmission, remote real time monitoring can be achieved；Machining angle need to ensure error
In the range of 0-0.1 degree, to meet to pass through the light echo coupling of mirror-reflection and enter the efficiency maximum of optical fiber.
A kind of processing method for the highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration, comprises the following steps：
Step 1, optical fiber to be processed is placed in machine table, by focused ion beam FIB in end centre of optic fibre position
Carry out the etching of 45 degree of mirror mirrors；
Step 2, the optical fiber horizontal with 45 degree of specular reflective mirrors processed is placed, and Ps laser alignments is to be added
The cladding regions of work, fibre cladding material is quickly peeled off by laser, form acceleration sensitive mass and optical fiber micro-cantilever
Structure；
Step 3, the structure of step 2 is carried out using FIB ion beams it is precise polished, with ensure 45 degree fiber reflectors with
Sensitive-mass block end can form stable Fabry-Perot-type cavity.
Further, the pulse width of Ps laser is 6ps in the step 2, repetition rate 20KHz to 100KHz it
Between it is adjustable.
The utility model has the advantages that：
1st, the utility model senses by using a telecommunication optical fiber collection and is transmitted in one, realizes that acceleration signal is visited
Survey, transmission, remote real time monitoring can be achieved.
2nd, the utility model is full earth silicon material by the sensor after processing, adhesion without adhesiver part, temperature dependency
It is small, suitable for the acceleration analysis of hot environment.
3rd, size sensor of the present utility model is small, and volume is light, is needed suitable for the acceleration monitoring under the limited environment of space
Ask.
4th, laser processing technology of the present utility model manufactures for optic fibre cantilev, and speed is fast, is easy to scale, can drop
Low manufacturing cost.
5th, the utility model uses full optical detection, essential safety, is adapted to the application of inflammable and explosive environment.
Certainly, implement any product of the present utility model to it is not absolutely required to reach all the above advantage simultaneously.
Brief description of the drawings
In order to illustrate more clearly of the technical scheme of the utility model embodiment, make required for being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the utility model,
For those of ordinary skill in the art, on the premise of not paying creative work, can also be obtained according to these accompanying drawings
Other accompanying drawings.
Fig. 1 is a kind of structural representation of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration of the present utility model
Figure；
Fig. 2 is Fig. 1 structure top view；
Fig. 3 is Fig. 1 structure axial direction sectional drawing；
Fig. 4 is Laser Processing platform schematic diagram；
Fig. 5 is a kind of flow chart of the processing method for the highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration；
Fig. 6 is the vibration signal comparison diagram of the utility model optical fiber micro-cantilever beam sensor and electronic acceleration meter；
Fig. 7 is that DFB laser demodulates spectral schematic.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The all other embodiment obtained, belong to the scope of the utility model protection.
In description of the present utility model, it is to be understood that term " perforate ", " on ", " under ", " thickness ", " top ",
" in ", " length ", " interior ", indicating position or the position relationship such as " surrounding ", be for only for ease of description the utility model and simplification
Description, rather than the component or element of instruction or hint meaning must have specific orientation, with specific azimuth configuration and behaviour
Make, therefore it is not intended that to limitation of the present utility model.
Referring to shown in Fig. 1-3, the utility model is a kind of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration,
Including optical fiber 1, the end face of fibre core 102 of optical fiber 1 is provided with speculum 106；The clad 101 of optical fiber 1 is provided with a Fabry-Perot
Sieve chamber 104；Etching is processed to fibre cladding using Ps Laser Pulse and obtains optical fiber micro-cantilever 103, acceleration sensitive
Mass 105.Extraneous acceleration signal, which acts on, can cause shaking for optical fiber micro-cantilever 103 on acceleration sensitive mass 105
It is dynamic, thus cause the length change of Fabry-Perot-type cavity 104；Extraneous acceleration signal can be demodulated by detecting the change of cavity length.
Wherein, the side of Fabry-Perot-type cavity 104 is an optical fiber micro-cantilever 103；The surface of optical fiber micro-cantilever 103 1 into
The acceleration sensitive mass 105 of shape one；Wherein, acceleration sensitive mass 105 forms interference-type optical fiber sensing with speculum 106
Device.Tunable Fabry-Perot cavity can be used for frequency division multiplexing, be a kind of weight among wavelength-division multiplex and soliton communication system
The optics wanted, English：Fabry-P é rot interferometer, be it is a kind of be made up of two pieces of parallel glass plates it is more
Beam-interferometer, wherein the relative inner surface of two pieces of glass plates all has high reflectance.Fabry-Perot interferometer is also frequent
Referred to as Fabry-Perot cavity, and when between two pieces of glass plates with the hollow spacer thing of regular length to be spaced fixed when,
It is also referred to as Fabry-Perot etalon or is directly referred to as etalon.
Wherein, optical fiber 1 is the telecommunication optical fiber of standard.Optical fiber 1 can be the telecommunication optical fiber of standard, or multimode fibre；
Optical fiber 1 is one, and collection senses and is transmitted in one, realizes full optical detection.
Wherein, scope of the thickness of optical fiber micro-cantilever 103 at 2-5 μm, the weight of acceleration sensitive mass 105 is in 2-
5mg scope；To meet the needs of acceleration sensing.The shape of polymer cantilever beam 103 can be rectangle or circle, or other can
Produce the structure of vibration.The thickness of polymer cantilever beam 103 is uniform, typically at 3 μm to 5 μm, while higher sensitivity is ensured,
Improve the ability of cantilever beam anti-vibration interference.
Wherein, the minute surface of speculum 106 and the angle of the end face of the fibre core of optical fiber 1 are 45 °, in the same of detection cantilever beam vibration
When, ensure that enough light energies are coupled into optical fiber.
The optical fiber micro-cantilever accelerometer fabricated using ultrashort pulse laser under microscope, the thickness of cantilever beam
Spend for 5 μm, can adjust.
As shown in figure 5, a kind of processing method for the highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration, including it is as follows
Step：
Step 1, optical fiber to be processed is placed in machine table, by focused ion beam FIB in fiber core end face center
Position carries out the etching of 45 degree of mirror mirrors；
Step 2, the optical fiber horizontal with 45 degree of specular reflective mirrors processed is placed, and Ps laser alignments is to be added
The cladding regions of work, fibre cladding material is quickly peeled off by laser, form acceleration sensitive mass and optical fiber micro-cantilever
Structure；
Step 3, the structure of step 2 is carried out using FIB ion beams it is precise polished, with ensure 45 degree fiber reflectors with
Sensitive-mass block end can form stable Fabry-Perot-type cavity.
Wherein, the pulse width of Ps laser is 6ps in step 2, and repetition rate is adjustable between 20KHz to 100KHz.
Wherein, speculum uses 20 μm of squares for multiplying 20 μm, and the minute surface area of speculum 106 is more than the end of fibre core 102
Face area, the minute surface area of speculum 106 are less than the face area of optical fiber 1, and machining angle need to ensure error in 0-0.1 degree scopes
It is interior, to meet to pass through the light echo coupling of mirror-reflection and enter the efficiency maximum of optical fiber.
Micro cantilever structure is etched on 125um optical fiber by ultrashort Ps Laser Pulse, realized to the quick of acceleration
Measurement in real time, there is khz detection bandwidth.Monitored available for industrial environment, the acceleration of the environment such as military aerial vehicle is high
Speed measurement.
As shown in figure 4, optical fiber is fixed on Laser Processing platform, ps pulsed laser and ns pulsed laser is added according to the program set
Work, obtain polymer cantilever beam.The laser repetition rate that processing uses is generally 40kHz, and mean power is less than 1mW.Polymer
The shape of cantilever beam can be controlled by software, generally rectangular cross-section.Preparation method is logical by the way of picosecond pulse laser etching
Believe that processing forms micro-cantilever on the covering of optical fiber, then the inner surface of cantilever beam is carried out by the processing mode of focused ion beam
Polishing is modified, while etches the speculum at 45 degree of angles on fiber core by focused ion beam.Into optical fiber light by 45 degree
Corner reflection mirror-reflection, the direction of propagation changes 90 degree and the cantilever beam face of covering forms stable Fabry-Perot-type cavity.According to adding
Velocity measuring is required to need, and optic fibre cantilev and sensitive-mass block size can be adjusted, to adapt to the application of different measuring environments.
Laser Processing has a rapid shaping, and precision is high, the advantages that suitable large-scale industrial production, the device particularly suitable for micro-meter scale
Manufacture.
As shown in fig. 6, it is the utility model optical fiber micro-cantilever beam sensor and the vibration signal pair of electronic acceleration meter
Than figure, the vibration signal frequency of measurement is 100 hertz.The sensitivity of optical fiber micro-cantilever beam sensor accelerates apparently higher than electronic type
Spend the sensitivity of meter.
As shown in fig. 7, traditional number wave number and the method for Fourier transformation are suitable only for the demodulation of low speed stationary singnal.It is right
In high speed sound vibration signal, want to realize highly sensitive detection, it is necessary to control laser stabilization to work.Here it is adjustable using optimizing
Humorous laser spectrum Q points, reach control laser works interference spectrum maximum slope section, because the spectrum of laser is by temperature shadow
Sound is larger, therefore the power output of laser is corrected in real time by the way of feedback control, to reach stable laser
The purpose of operating point.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
It is contained in reference to specific features, structure, material or the feature that the embodiment or example describe of the present utility model at least one
In embodiment or example.In this manual, the schematic representation of above-mentioned term is not necessarily referring to identical embodiment or
Example.Moreover, specific features, structure, material or the feature of description can be in any one or more embodiments or example
In combine in an appropriate manner.
The utility model preferred embodiment disclosed above is only intended to help and illustrates the utility model.Preferred embodiment is simultaneously
There is no the details that detailed descriptionthe is all, it is only described embodiment also not limit the utility model.Obviously, according to this theory
The content of bright book, it can make many modifications and variations.This specification is chosen and specifically describes these embodiments, is in order to preferably
Principle and practical application of the present utility model is explained, so that skilled artisan can be best understood by and utilize this
Utility model.The utility model is only limited by claims and its four corner and equivalent.
Claims (5)
1. a kind of highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration, including optical fiber (1), it is characterised in that：
Fibre core (102) end face of the optical fiber (1) is provided with speculum (106)；
The clad (101) of the optical fiber (1) is provided with a Fabry-Perot-type cavity (104)；
Wherein, Fabry-Perot-type cavity (104) side is an optical fiber micro-cantilever (103)；
Wherein, the acceleration sensitive mass (105) of (103) one shaping surface of optical fiber micro-cantilever one；
Wherein, the acceleration sensitive mass (105) forms interferometric optical fiber sensor with speculum (106).
A kind of 2. highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration according to claim 1, it is characterised in that
The optical fiber (1) is the telecommunication optical fiber of standard, including single-mode fiber and multimode fibre.
A kind of 3. highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration according to claim 1, it is characterised in that
Scope of the thickness of the optical fiber micro-cantilever (103) at 2-5 μm, acceleration sensitive mass (105) weight is in 2-5mg
Scope.
A kind of 4. highly sensitive optical fiber micro-cantilever beam sensor for detecting acceleration according to claim 1, it is characterised in that
The speculum (106) is at least 20 μm of squares for multiplying 20 μm, and the minute surface area of the speculum (106) is more than fibre core
(102) face area, the minute surface area of the speculum (106) are less than the face area of optical fiber (1).
5. a kind of highly sensitive optical fiber micro-cantilever beam sensor of detection acceleration according to claim 1 or 4, its feature exist
In the minute surface of the speculum (106) and the angle of the end face of optical fiber (1) fibre core are 45 °.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077113A (en) * | 2019-12-16 | 2020-04-28 | 深圳大学 | Optical fiber end surface micro-cantilever sensor and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111077113A (en) * | 2019-12-16 | 2020-04-28 | 深圳大学 | Optical fiber end surface micro-cantilever sensor and preparation method thereof |
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