CN206618529U - A kind of simple reflective interference-type optical fiber baroceptor - Google Patents
A kind of simple reflective interference-type optical fiber baroceptor Download PDFInfo
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- CN206618529U CN206618529U CN201720337952.1U CN201720337952U CN206618529U CN 206618529 U CN206618529 U CN 206618529U CN 201720337952 U CN201720337952 U CN 201720337952U CN 206618529 U CN206618529 U CN 206618529U
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Abstract
The utility model is related to technical field of optical fiber sensing, especially a kind of simple reflective interference-type optical fiber baroceptor, it includes single-mode fiber, glass capillary and the multimode fibre sequentially coaxially arranged, the two ends correspondence of glass capillary and the end melting welding of single-mode fiber, multimode fibre are integrated；Micropore is offered on the tube wall of glass capillary；The cladding diameter of single-mode fiber and multimode fibre is 125 μm, and the core diameter of single-mode fiber is 8~10 μm, and a diameter of 50~62.5 μm of multimode fibre fibre core, the length of multimode fibre is more than 10cm；The length of glass capillary is 200~500 μm, 60~120 μm of internal diameter, 100~1000 μm of external diameter, and the aperture of micropore is 16~100 μm;The utility model small volume, manufacturing process are simple, low manufacture cost, sensitivity are high, measurement range is wide, are not easily susceptible to the influence of Temperature cross-over infection, it is adaptable to the barometric surveying under varying environment.
Description
Technical field
The utility model is related to technical field of optical fiber sensing, especially a kind of simple reflective interference-type optical fiber air pressure sensing
Device.
Background technology
Optical fiber air pressure sensor is as a kind of new sensor for being used to detect air pressure, relative to traditional sensor
Speech, in addition to simple in construction, small volume, lightweight feature, is also equipped with advantages below：(1) anti-electromagnetic interference capability is strong, due to
Frequency of light wave is significantly larger than electromagnetic frequency, when optical signal is transmitted in a fiber, is not easily susceptible to electromagnetic interference;(2) electrical insulation capability
Good, optical fiber belongs to insulating materials, and optical signal transmission fiber is comparatively safe reliable, and optical signal is propagated without power supply in a fiber
Driving, suitable for being used inflammable and explosive environment;(3) optical fiber is made up of earth silicon material, corrosion-resistant, chemical property ten
Divide stable, therefore, optical fiber air pressure sensor is suitable for using in compared with adverse circumstances;(4) small, optical fiber is lost in optical fiber transmission signal
Baroceptor can be applied to distant signal transmission and telemonitoring air pressure；(5) optical fiber transport information capacity is big, available for many
The distributed barometric surveying of point.
In recent years, optical fiber air pressure sensor application is very wide, can be used in a variety of occasions and carry out barometric surveying.Interference
Type optical fiber air pressure sensor mainly has following a few classes：
1. based on Fabry-Perot（Fabry-Perot FP）The interference-type optical fiber baroceptor that chamber chamber length changes
Change to carry out the interferometric sensor of barometric surveying based on FP chamber chambers length, mainly use the change of air pressure to cause
The change of interference cavity length carries out the measurement of air pressure.The operation principle of the sensor is：Air pressure change is measured by experiment to be drawn
The change of cavity length of the interference cavity risen, the resonance peak wavelength change and the relation of air pressure change of the interference fringe thus transmitted,
The atmospheric pressure value of required measurement is obtained by demodulating the variable quantity of resonance spike length.
A kind of typical structure of the optical fiber air pressure sensor is the FP interferometers being made up of film, the interferometer one of them
Typical structure is that FP chambers are made up of capillary and thin film, and another typical structure is that FP chambers are poly- by capillary and internal filling
Compound is constituted.When ambient pressure changes, film can be caused（Or polymer）Generation Flexible change, grows up so as to change chamber
It is small, so that the atmospheric pressure value of external environment can be measured according to the variable quantity of interference cavity chamber length.The optical fiber air pressure sensor spirit of the structure
Sensitivity is higher, and air pressure sensitivity is with diaphragm（Or polymer）The reduction of thickness and increase.However, the sensor exist it is following
Problem：(1) complicated, manufacturing technology requires high；(2), can be because air pressure change is too big and damages if film thickness is too small
Bad film, thus too high air pressure can not be measured；(3) if film or polymer are also sensitive to temperature change, it there is gas
Pressure and the cross sensitivity problem of temperature survey;(4) because capillary diameter is smaller, easily cause polymer and be difficult filling, property
Can be unstable the problems such as.
2. based on Fabry-Perot（FP）The interference-type optical fiber baroceptor of chamber intracavitary variations in refractive index
The optical fiber air pressure sensor of barometric surveying is carried out based on FP chamber intracavitary variations in refractive index, two classes can be divided into again：
One class is that FP chambers are directly made up of optical fiber, according to optical fiber variations in refractive index itself（Caused by air pressure change）Realize barometric surveying,
This structure sensor is simple in construction, make easy, but is due to that fiber optic materials have larger Young's modulus and smaller bullet in itself
Backscatter extinction logarithmic ratio, thus, the air pressure sensitivity of sensors with auxiliary electrode is generally relatively low；Another kind of is that FP chambers are made up of cavity（Capillary pipe structure
Chamber）, full of measurement gas in chamber, according to FP intracavity gas variations in refractive index（Caused by air pressure change）Barometric surveying is realized, by
It is obvious in gas refracting index change caused by air pressure change, therefore the air pressure sensitivity of sensor is higher, but structure is more complicated, makes
Technical requirements are high.
The content of the invention
The purpose of this utility model seeks to solve the above mentioned problem present in existing interference-type optical fiber baroceptor,
The simple reflective interference-type that a kind of simple in construction, easy to make, sensitivity is high, can eliminate Temperature cross-over infects is provided for this
Optical fiber air pressure sensor.
Concrete scheme of the present utility model is：A kind of simple reflective interference-type optical fiber baroceptor, it is characterized in that：Bag
Include the single-mode fiber sequentially coaxially arranged, glass capillary and multimode fibre, the two ends correspondence of glass capillary and single-mode fiber,
The end melting welding of multimode fibre is integrated；Micropore is offered on the tube wall of glass capillary so that its inner chamber is connected with the external world
It is logical；The cladding diameter of the single-mode fiber and multimode fibre is 125 μm, and the core diameter of single-mode fiber is 8~10 μm, multimode
A diameter of 50~62.5 μm of fiber core, the length of multimode fibre is more than 10cm；The length of the glass capillary be 200~
500 μm, 60~120 μm of internal diameter, 100~1000 μm of external diameter, on glass capillary the aperture of micropore be 16~100 μm.
The two ends of glass capillary described in the utility model pass through optical fiber welding with single-mode fiber, the end of multimode fibre
Welding machine welding is integrated；The micropore is processed by femto-second laser.
The core diameter of single-mode fiber described in the utility model is 9 μm, the core diameter of multimode fibre for 50 μm or
62.5μm。
The length of glass capillary described in the utility model is 240 μm, internal diameter is 68 μm, external diameter is 125 μm；It is described micro-
The aperture in hole is 16 μm.
The utility model is simple in construction, ingenious in design, and the free-air chamber constituted by using glass capillary is distinguished
It is integrated with single-mode fiber, multimode fibre welding, so as to form a reflecting interferometer, realizes the sensing survey to air pressure
Amount, with higher air pressure sensitivity, not only small volume, manufacturing process are simple, low manufacture cost, measurement range are wide, Er Qieyou
Do not influenceed in glass capillary by variation of ambient temperature, so that testing result of the present utility model is not easily susceptible to Temperature cross-over sense
The influence of dye, it is adaptable to the barometric surveying under varying environment.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation that the utility model is detected to air pressure.
In figure：1-single-mode fiber, 2-capillary glass, 3-multimode fibre, 4-micropore, 5-wideband light source, 6-annular
Device, 7-fiber spectrometer, 8-pressure intensity controllable.
Embodiment
Referring to Fig. 1, a kind of simple reflective interference-type optical fiber baroceptor, including the single-mode fiber sequentially coaxially arranged
1st, glass capillary 2 and multimode fibre 3, two ends correspondence and single-mode fiber 1, the end melting welding of multimode fibre 3 of glass capillary 2
It is integrated；Micropore 4 is offered on the tube wall of glass capillary 2 so that its inner chamber is connected with the external world；The single-mode fiber 1
Cladding diameter with multimode fibre 3 is 125 μm, and the core diameter of single-mode fiber is 8~10 μm, the fibre core of multimode fibre 3 it is straight
Footpath is 50~62.5 μm, and the length of multimode fibre 3 is more than 10cm, to prevent light source from occurring reflection from the tail end of multimode fibre 3
Test structure to optical fiber air pressure sensor is impacted；The length of the glass capillary 2 be 200~500 μm, internal diameter 60~
The aperture of micropore 4 is 16~100 μm on 120 μm, 100~1000 μm of external diameter, glass capillary 2.
The preparation process of optical fiber air pressure sensor is as follows in the present embodiment：
The first step：It is 240 μm, the glass capillary that internal diameter is 68 μm, external diameter is 125 μm to take a segment length, is swashed with femtosecond
Light device opens up the micropore that an aperture is 16 μm on the side wall of glass capillary so that extraneous air can enter to capillary glass
In glass pipe, wherein the two ends of glass capillary must cut it is smooth, micropore be by femto-second laser energy be 50mw when irradiate
10min formation；
Second step：One section is taken to cut smooth single-mode fiber with optical fiber cutter, the cladding diameter of single-mode fiber is 125 μ
M, core diameter are 9 μm, and wherein one end of the single-mode fiber and above-mentioned glass capillary is integrated with optical fiber splicer welding,
Less strength of discharge is set in welding so that the profile of glass capillary will not change after welding is complete；
3rd step：One section is taken to cut smooth multimode fibre with optical fiber cutter, the length of multimode fibre is 10cm, it
Cladding diameter is 125 μm, core diameter is 62.5 μm, using second step identical method by multimode fibre and above-mentioned capillary glass
The other end of pipe is integrated with optical fiber splicer welding；
One open Fabry-Perot-type cavity is made by above three step, so as to obtain optical fiber gas as shown in Figure 1
Pressure sensor.
Referring to Fig. 2, adopt and obtained optical fiber air pressure sensor is completed to calibrate with the following method.
Wideband light source 5, circulator 6 and fiber spectrometer 7 are equipped with first, and optical fiber air pressure sensor is placed in pressure intensity controllable
In 8.Single-mode fiber 1 in optical fiber air pressure sensor as input, by itself and wideband light source 5 and fiber spectrometer 7 respectively with
Circulator 6 is connected；
Then the air pressure pressure in pressure intensity controllable 8 is changed, you can obtain a series of optical fiber air pressure transmission under known pressures
The reflectance spectrum of sensor, records the resonance peak wavelength value of reflectance spectrum.Analyzed by applied mathematics, obtain resonance peak wavelength value
With the respective function relation of air pressure, that is, complete the calibration of optical fiber air pressure sensor.
When carrying out air pressure detection, scaled optical fiber air pressure sensor need only be placed in field of pressure to be measured, according to survey
Resonance peak wavelength value and scaling function relation in the reflectance spectrum measured, you can know the air pressure of field of pressure to be measured.
The utility model realizes that pressure measurement is to be based on following principle：When light source is entered in glass capillary, it can wear
The end face that glass capillary is connected with single-mode fiber is crossed, because the end face of single-mode fiber is very smooth, therefore some light is understood
Reflected in this end face, another part light reaches glass capillary through the inner chamber that this end face is transferred through glass capillary
The end face being connected with multimode fibre, because the end face is also very smooth, so that also some light reflects on this end face, this
The light that reflects back of part in single-mode fiber can be internally formed interference with the light that is reflected back in single-mode fiber end face, be formed stably
Interference fringe.
Air pressure inside glass capillary can make the effective refractive index inside glass capillary when changing
Change, according to formulaUnderstand, the position of corresponding interference peak wavelength can also change therewith, in formulaLFor
The length of capillary glass tube cavity, Φ is the phase difference between cladding mode and core mode.
When phase difference Φ meets Φ=(2m+1) π or Φ=2m π, stable interference fringe just occurs.If phase difference
For π odd-multiple, i.e. Φ=(2m+1) π, then the trough in interferometer reflection spectrum is corresponded to；If phase difference is π even-multiple,
That is Φ=2m π, then correspond to the crest in interferometer reflection spectrum.When the corresponding wavelength of crest or trough of interferometer reflection spectrum
When occurring linear change with the change of ambient pressure, we can measure air pressure using the interferometer accordingly.In addition, by
It is insensitive in the temperature change reaction of glass capillary environment to external world, therefore temperature can be ignored in barometric surveying to experiment
As a result influence, the problem of can thus eliminating physical quantity cross sensitivity in measurement.
Claims (4)
1. a kind of simple reflective interference-type optical fiber baroceptor, it is characterized in that：Including sequentially coaxially arrange single-mode fiber,
Glass capillary and multimode fibre, the two ends correspondence of glass capillary and the end melting welding of single-mode fiber, multimode fibre are integrated；
Micropore is offered on the tube wall of glass capillary so that its inner chamber is connected with the external world；The single-mode fiber and multimode fibre
Cladding diameter be 125 μm, the core diameter of single-mode fiber is 8~10 μm, a diameter of 50~62.5 μ of multimode fibre fibre core
M, the length of multimode fibre is more than 10cm；The length of the glass capillary is 200~500 μm, 60~120 μm of internal diameter, external diameter
100~1000 μm, the aperture of micropore is 16~100 μm on glass capillary.
2. a kind of simple reflective interference-type optical fiber baroceptor according to claim 1, it is characterized in that：The capillary
The two ends of glass tube and the end of single-mode fiber, multimode fibre are integrated by optical fiber fusing soldering welder welding；The micropore is logical
Femto-second laser is crossed to process.
3. a kind of simple reflective interference-type optical fiber baroceptor according to claim 1, it is characterized in that：The single mode
The core diameter of optical fiber is 9 μm, and the core diameter of multimode fibre is 50 μm or 62.5 μm.
4. a kind of simple reflective interference-type optical fiber baroceptor according to claim 1 or 2 or 3, it is characterized in that：Institute
The length for stating glass capillary is 240 μm, internal diameter is 68 μm, external diameter is 125 μm；The aperture of the micropore is 16 μm.
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| CN201720337952.1U CN206618529U (en) | 2017-04-01 | 2017-04-01 | A kind of simple reflective interference-type optical fiber baroceptor |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108120460A (en) * | 2018-02-28 | 2018-06-05 | 中国科学技术大学 | Optical fiber Fabry Perot sensor and preparation method thereof, test device |
| CN109459164A (en) * | 2018-12-20 | 2019-03-12 | 深圳大学 | A kind of fibre optic compression sensor and preparation method thereof |
| CN109507149A (en) * | 2018-11-13 | 2019-03-22 | 荆门博谦信息科技有限公司 | A kind of fibre optic interferometer and preparation method thereof |
| CN110346308A (en) * | 2018-04-02 | 2019-10-18 | 中国计量大学 | A kind of electronic speckle spectrometer of intermode interference |
| EP3673796A1 (en) * | 2018-12-31 | 2020-07-01 | SDS Optic Spolka Akcyjna | Use of a flexible capillary for the sensor detecting biologically active molecules |
| CN113029429A (en) * | 2021-03-30 | 2021-06-25 | 武汉理工大学 | Air pressure sensor with temperature compensation function |
| CN113029428A (en) * | 2021-03-30 | 2021-06-25 | 武汉理工大学 | FP (Fabry-Perot) air pressure sensor based on gas-sensitive film in optical fiber and preparation method thereof |
| CN113049181A (en) * | 2021-03-25 | 2021-06-29 | 大连理工大学 | Method for manufacturing optical fiber Fabry-Perot vacuum gauge |
| CN113865773A (en) * | 2021-09-30 | 2021-12-31 | 云南师范大学 | High-sensitivity optical fiber surface plasmon atmospheric pressure detector |
| CN114088284A (en) * | 2021-11-16 | 2022-02-25 | 哈尔滨工程大学 | Reflection type air pressure sensor and manufacturing method thereof |
| CN116608891A (en) * | 2023-07-20 | 2023-08-18 | 山东省科学院激光研究所 | Optical fiber F-P cavity sensor and manufacturing method thereof |
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2017
- 2017-04-01 CN CN201720337952.1U patent/CN206618529U/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108120460A (en) * | 2018-02-28 | 2018-06-05 | 中国科学技术大学 | Optical fiber Fabry Perot sensor and preparation method thereof, test device |
| CN110346308B (en) * | 2018-04-02 | 2021-12-14 | 中国计量大学 | Electronic speckle spectrograph for intermode interference |
| CN110346308A (en) * | 2018-04-02 | 2019-10-18 | 中国计量大学 | A kind of electronic speckle spectrometer of intermode interference |
| CN109507149A (en) * | 2018-11-13 | 2019-03-22 | 荆门博谦信息科技有限公司 | A kind of fibre optic interferometer and preparation method thereof |
| CN109459164A (en) * | 2018-12-20 | 2019-03-12 | 深圳大学 | A kind of fibre optic compression sensor and preparation method thereof |
| EP3673796A1 (en) * | 2018-12-31 | 2020-07-01 | SDS Optic Spolka Akcyjna | Use of a flexible capillary for the sensor detecting biologically active molecules |
| CN113049181A (en) * | 2021-03-25 | 2021-06-29 | 大连理工大学 | Method for manufacturing optical fiber Fabry-Perot vacuum gauge |
| CN113029428A (en) * | 2021-03-30 | 2021-06-25 | 武汉理工大学 | FP (Fabry-Perot) air pressure sensor based on gas-sensitive film in optical fiber and preparation method thereof |
| CN113029429A (en) * | 2021-03-30 | 2021-06-25 | 武汉理工大学 | Air pressure sensor with temperature compensation function |
| CN113029428B (en) * | 2021-03-30 | 2022-07-08 | 武汉理工大学 | FP (Fabry-Perot) air pressure sensor based on gas-sensitive film in optical fiber and preparation method thereof |
| CN113029429B (en) * | 2021-03-30 | 2022-07-08 | 武汉理工大学 | Air pressure sensor with temperature compensation function |
| CN113865773A (en) * | 2021-09-30 | 2021-12-31 | 云南师范大学 | High-sensitivity optical fiber surface plasmon atmospheric pressure detector |
| CN113865773B (en) * | 2021-09-30 | 2024-02-02 | 云南师范大学 | High-sensitivity optical fiber surface plasmon air pressure detector |
| CN114088284A (en) * | 2021-11-16 | 2022-02-25 | 哈尔滨工程大学 | Reflection type air pressure sensor and manufacturing method thereof |
| CN116608891A (en) * | 2023-07-20 | 2023-08-18 | 山东省科学院激光研究所 | Optical fiber F-P cavity sensor and manufacturing method thereof |
| CN116608891B (en) * | 2023-07-20 | 2023-11-03 | 山东省科学院激光研究所 | Optical fiber F-P cavity sensor and manufacturing method thereof |
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Granted publication date: 20171107 Termination date: 20180401 |