CN105181191A - Tunable optical fiber miniature Fabry-Perot pressure sensing device - Google Patents
Tunable optical fiber miniature Fabry-Perot pressure sensing device Download PDFInfo
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- CN105181191A CN105181191A CN201510566104.3A CN201510566104A CN105181191A CN 105181191 A CN105181191 A CN 105181191A CN 201510566104 A CN201510566104 A CN 201510566104A CN 105181191 A CN105181191 A CN 105181191A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 41
- 239000004005 microsphere Substances 0.000 claims abstract description 26
- 238000005260 corrosion Methods 0.000 claims abstract description 17
- 230000007797 corrosion Effects 0.000 claims abstract description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000010453 quartz Substances 0.000 claims abstract description 10
- 239000000835 fiber Substances 0.000 claims description 52
- 239000003708 ampul Substances 0.000 claims description 8
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 2
- 229910002113 barium titanate Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000008859 change Effects 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 238000000985 reflectance spectrum Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
The invention provides a tunable optical fiber miniature Fabry-Perot pressure sensing device which is composed of a quartz tube (6), a corrosion single-mode optical fiber (7) and a microsphere (8). The device is characterized in that one end of the quartz tube (6) is inserted into the corrosion single-mode optical fiber (7); the other end is inserted into the microsphere (8); and the end face of the corrosion single-mode optical fiber (7) and the rear surface of the microsphere (8) form a Fabry-Perot cavity. Compared with the prior art, the device provided by the invention has the advantages that the length of the cavity can be adjusted; compared with other Fabry-Perot pressure sensors, the cavity length of the device does not change with pressure, but can be adjusted; the distance between the single-mode optical fiber and the microsphere is controlled to change the cavity length; and the device has the advantages of miniature structure, simple manufacture, small size, low cost, high sensitivity and low temperature cross-sensitivity, and can be used to measure the refractive index of air and other gases.
Description
Technical field
The invention belongs to Fibre Optical Sensor field, relate to the miniature Fabry-Perot pressure sensor device of a kind of tunable fiber.
Background technology
In recent years, developing rapidly of optical fibre Fabry-perot (F-P) sensor, makes it the important branch becoming Fibre Optical Sensor research field, has been applied to the rugged surroundings such as strong electromagnetic, high temperature.Fibre Optical Sensor has high sensitivity and resolution relative to traditional sensors, frequency band range is very wide, dynamic range is very large, not by advantages such as the interference of electromagnetic field, and all obtain practical application in the field of scientific studies such as national defense and military portion, scientific research department and process industry, energy industry, medical treatment.The development trend of sensor be sensitive, accurate, applicability is strong, small and exquisite and intelligent.Optical fibre Fabry-perot (F-P) sensor can be used for the safety detection real-time continuously of the physical quantitys such as smart architecture internal strain, stress, temperature, pressure, distortion, vibration and displacement, also can be used for the monitoring etc. of the solid state of compound substance, the detection for the safe handlings such as aircraft, naval vessel, buildings and integrality is significant.In the past few years, the fibre optic compression sensor based on the use in optical fibre Fabry-perot (F-P) chamber gets more and more.Fabry-Pérot sensor can be made into minor diameter, and with low cost manufacture, because they can use microfabrication techniques to produce (microelectromechanical systems=MEMS).
Based on the pressure transducer of Fabry-Perot because be regarded as the pressure transducer with best potentiality that can be used for multiple application, and belong to and be most suitable for catheter and the tonometric pressure transducer of wire tips.Optical fiber FP interfere type pressure sensor structure simply more easily realizes, and is interference-type optical fiber pressure transducer the most frequently used at present.It not only has general Fibre Optical Sensor good reliability, electromagnetism interference, the feature such as anticorrosive, also has the good characteristics such as measuring accuracy is high, dynamic range is large, the linearity is good.According to the difference of interferometer structure, optical fiber FP sensor is broadly divided into two classes: Intrinsical Fabry-perot optical fiber interference sensor (IntrinsicFabry-Perotinterferometric, and extrinsic type Fabry-perot optical fiber interference sensor (ExtrinsicFabry-Perotinterferometrie, EFPI) IFPI).In Intrinsical optical fiber FP sensor, the interferometer between two reflectings surface is made up of single-mode fiber or multimode optical fiber; And in extrinsic optical fiber FP sensor, interferometer is made up of the solid dielectric (quartz glass tube as hollow) of air or other non-optical fiber.The measuring principle of above optical fiber FPI is all the change utilizing change to be measured to cause chamber length, thus optical path difference is changed, change interference signal into electric signal via detector again to process, obtain the long variable quantity in chamber thus draw change to be measured.
Summary of the invention
The present invention proposes the miniature Fabry-Perot pressure sensor device of a kind of tunable fiber.
Technical scheme of the present invention is as follows: the miniature Fabry-Perot pressure sensor device of a kind of tunable fiber, device adopts extrinsic type optical fibre Fabry-perot interferometer, comprise wideband light source (1), fiber coupler (2), optical fiber sensor head (3), photodetector (4), tunable optic filter (5), its connected mode is that wideband light source (1) tunable optic filter (5) is connected with one end of fiber coupler (2) respectively, optical fiber sensor head (3) is connected with the other end of fiber coupler (2), the other end of tunable optic filter (5) is connected with photodetector (4).
The present invention proposes the miniature Fabry-Perot pressure transducer of a kind of tunable fiber, be made up of quartz ampoule (6), corrosion single-mode fiber (7), microsphere (8), it is characterized in that: corrosion single-mode fiber (7) is inserted in one end of quartz ampoule (6), the other end inserts microsphere (8), after fixing by glue, the end face of corrosion single-mode fiber (7) and the rear surface of microsphere (8) just define Fabry-Perot-type cavity.Structure of the present invention can form three end faces, first end face is made up of the air corroding cavity the end of single-mode fiber (7) and single-mode fiber (7) to microsphere (8), second end face forms by corroding the air of cavity and the front end face of microsphere (8) single-mode fiber (7) to microsphere (8), and the 3rd end face is made up of the rear end face of microsphere (8) and air.It is long that three end faces can form 3 chambeies, because the light path between end face one and end face three is the longest, can form the striated structure that spacing is minimum.Prove in experiment of the present invention, being determined by end face one and end face three really of topmost striated structure.
The coupling mechanism that described fiber coupler (2) is 2*1.
The parameter of affiliated optical fiber sensor head (3) is as follows: the inner and outer diameter of quartz ampoule (6) is respectively 75 and 127um; The overall diameter of corrosion single-mode fiber (7) is 72um; The diameter of microsphere (8) is 63 ~ 75um, and material is barium titanate, and refractive index is 1.9;
The chamber length of described optical fiber sensor head (3) is adjustable.Chamber is changed long by the distance between control corrosion rate single-mode fiber (7) and microsphere (8).
Described corrosion single-mode fiber (7) will be in the HF solution of 40% corrodes 28 minutes.
The present invention's beneficial effect is compared with prior art:
1, the length that adjustable chamber is long, compared with other optical fiber Fabry-Perot pressure sensors, chamber of the present invention length can not change along with pressure, but adjustable.Chamber is changed long by the distance controlled between single-mode fiber and microsphere.
2, structure mini, manufacture is simple, volume is little, low cost, high sensitivity
3, low Temperature cross-over sensitivity
4, the present invention also can be used for measuring air and other gas refracting indexes.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the present invention is further described.
Fig. 1 is experimental provision figure of the present invention;
1: wideband light source 2: fiber coupler 3: optical fiber sensor head 4: photodetector
5: tunable optic filter
Fig. 2 is the structural representation of optical fiber sensor head of the present invention
6: quartz ampoule 7: corrosion single-mode fiber 8: microsphere
Fig. 3 is the present invention's reflectance spectrum that different cavity is long at ambient pressure.
Fig. 4 is that the present invention is in the long reflectance spectrum for 550um of different air pressure cavity of resorption.
Specific implementation method
Figure 1 shows that experiment measuring figure of the present invention, comprise wideband light source 1, fiber coupler 2, optical fiber sensor head 3, photodetector 4, its connected mode is wideband light source 1, tunable optic filter 5 is connected with one end of fiber coupler 2 respectively, optical fiber sensor head 3 is connected with the other end of fiber coupler 2, and the other end of tunable optic filter 5 is connected with photodetector 4.
Figure 1 shows that experiment measuring figure of the present invention, its working method is: the flashlight input optical fibre coupling mechanism 2 that wideband light source 1 sends, fiber coupler 2 other end is connected to optical fiber sensor head 3, when being acted on above optical fiber sensor head 3 by measuring pressure, light multiple reflections between the both sides end face of fibre core (F-P cavity), to be formed after multiple-beam fringe after tunable optic filter 5 detected by photodetector 4.
The structural representation of the optical fiber sensor head of the present invention 3 shown in Fig. 2, be made up of quartz ampoule 6, corrosion single-mode fiber 7, microsphere 8, it is characterized in that: corrosion single-mode fiber 7 is inserted in one end of quartz ampoule 6, the other end inserts microsphere 8, after fixing by glue, the corrosion end face of single-mode fiber 7 and the rear surface of microsphere 8 just define Fabry-Perot-type cavity.Structure of the present invention can form three end faces, first end face is made up of the air corroding cavity the end of single-mode fiber and single-mode fiber to microsphere, second end face is made up of the air of cavity single-mode fiber to microsphere and the front end face of microsphere, and the 3rd end face is made up of the rear end face of microsphere and air.It is long that three end faces can form 3 chambeies, because the light path between end face one and end face three is the longest, can form the striated structure that spacing is minimum.Prove in experiment of the present invention, being determined by end face one and end face three really of topmost striated structure.When being acted on above optical fiber sensor head 3 by measuring pressure, the light that wideband light source 1 sends arrives in optical fiber sensor head 3 through fiber coupler 2, when measuring light wave transmissions to corrosion single-mode fiber 7 left end face, portion of incident light is directly reflected by the left end face of fibre core (F-P cavity), after all the other incident light transmission to its right end face of microsphere 8, measure light multiple reflections and form multiple-beam fringe between the end face of both sides, thus realize F-P and interfere.
Embodiment 1
The miniature Fabry-Perot pressure sensor device of a kind of tunable fiber, shown in Fig. 3 is the reflectance spectrum that different cavity is long at ambient pressure.Figure 4 shows that in the long reflectance spectrum for 550um of different air pressure cavity of resorption.
Form below lists the relation of different chamber length, Free Spectral Range and sensitivity:
It should be noted that, the above-mentioned definition to each element is not limited in the various concrete structure or shape mentioned in embodiment, those skilled in the art can to its carry out simple who replace with knowing.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; should be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. the miniature Fabry-Perot pressure sensor device of tunable fiber, device adopts extrinsic type optical fibre Fabry-perot interferometer, comprise wideband light source (1), fiber coupler (2), optical fiber sensor head (3), photodetector (4), tunable optic filter (5), its connected mode is that wideband light source (1) tunable optic filter (5) is connected with one end of fiber coupler (2) respectively, optical fiber sensor head (3) is connected with the other end of fiber coupler (2), the other end of tunable optic filter (5) is connected with photodetector (4).
2. the miniature Fabry-Perot pressure sensor device of a kind of tunable fiber according to claim 1, it is characterized in that, described optical fiber sensor head (3), is made up of quartz ampoule (6), corrosion single-mode fiber (7), microsphere (8).
3. the miniature Fabry-Perot pressure sensor device of a kind of tunable fiber according to claim 1, is characterized in that, the parameter of affiliated optical fiber sensor head (3) is as follows: the inner and outer diameter of quartz ampoule (6) is respectively 75 and 127um; The overall diameter of corrosion single-mode fiber (7) is 72um; The diameter of microsphere (8) is 63 ~ 75um, and material is barium titanate, and refractive index is 1.9.
4. the miniature Fabry-Perot pressure sensor device of a kind of tunable fiber according to claim 1, is characterized in that, the chamber length of described optical fiber sensor head (3) is adjustable.Chamber is changed long by the distance between control corrosion rate single-mode fiber (7) and microsphere (8).
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| CN201510566104.3A CN105181191A (en) | 2015-09-08 | 2015-09-08 | Tunable optical fiber miniature Fabry-Perot pressure sensing device |
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| CN201510566104.3A CN105181191A (en) | 2015-09-08 | 2015-09-08 | Tunable optical fiber miniature Fabry-Perot pressure sensing device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105953958A (en) * | 2016-07-13 | 2016-09-21 | 中北大学 | All-silica fiber Fabry-Perot pressure sensor |
| CN106052913A (en) * | 2016-07-11 | 2016-10-26 | 中国计量大学 | Pressure sensing device with high sensitivity |
| CN106052912A (en) * | 2016-07-11 | 2016-10-26 | 中国计量大学 | Optical fiber stress sensing device based on Fabry-Perot microcavity structure |
| CN106052727A (en) * | 2016-05-26 | 2016-10-26 | 中国计量大学 | Senor device based on fiber miniature Fabry-Perot cavity |
| CN107843367A (en) * | 2017-09-29 | 2018-03-27 | 上海理工大学 | Optical pressure sensor |
| CN110044398A (en) * | 2019-04-03 | 2019-07-23 | 西北工业大学 | High-temp strain test device and its installation method based on F-P fibre optical sensor |
| CN110987229A (en) * | 2019-12-20 | 2020-04-10 | 西安工业大学 | Optical fiber end face type Fabry-Perot cavity temperature sensor |
| CN112697339A (en) * | 2020-11-26 | 2021-04-23 | 桂林电子科技大学 | High-strength high-temperature-resistant quick-response optical fiber air pressure sensing probe |
| CN112903688A (en) * | 2021-02-05 | 2021-06-04 | 中国科学院上海微系统与信息技术研究所 | Diamond NV color center magnetic field sensor probe device and sensor |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101034028A (en) * | 2007-02-09 | 2007-09-12 | 南京师范大学 | Fabry-Perotw fiber-optic pressure sensor and manufacture method therefor |
| CN101655353A (en) * | 2009-06-26 | 2010-02-24 | 南京师范大学 | Miniature extrinsic Fabry-Perot type optical fiber pressure transducer and manufacturing method thereof |
| CN102384809A (en) * | 2011-08-09 | 2012-03-21 | 天津大学 | High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method |
| CN103528735A (en) * | 2013-10-31 | 2014-01-22 | 南京信息工程大学 | Miniature optical fiber Fabry-Perot pressure sensor and manufacturing method thereof |
| RU2012130071A (en) * | 2012-07-17 | 2014-01-27 | Научная организация "Центр лазерной технологии и материаловедения" (Автономная некоммерческая организация) | FIBER OPTICAL PRESSURE METER |
| CN103994851A (en) * | 2014-05-15 | 2014-08-20 | 香港理工大学深圳研究院 | Resonant type Fabry-Perot optical fiber sensor, manufacturing method and air pressure detecting method |
| CN104215368A (en) * | 2014-09-15 | 2014-12-17 | 江苏昂德光电科技有限公司 | F-P cavity optical fiber pressure sensing device and demodulation method thereof |
| CN104880267A (en) * | 2015-05-28 | 2015-09-02 | 北京理工大学 | Fiber micro-nano Fabry-Perot interference type pressure sensor and manufacturing method thereof |
-
2015
- 2015-09-08 CN CN201510566104.3A patent/CN105181191A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101034028A (en) * | 2007-02-09 | 2007-09-12 | 南京师范大学 | Fabry-Perotw fiber-optic pressure sensor and manufacture method therefor |
| CN101655353A (en) * | 2009-06-26 | 2010-02-24 | 南京师范大学 | Miniature extrinsic Fabry-Perot type optical fiber pressure transducer and manufacturing method thereof |
| CN102384809A (en) * | 2011-08-09 | 2012-03-21 | 天津大学 | High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method |
| RU2012130071A (en) * | 2012-07-17 | 2014-01-27 | Научная организация "Центр лазерной технологии и материаловедения" (Автономная некоммерческая организация) | FIBER OPTICAL PRESSURE METER |
| CN103528735A (en) * | 2013-10-31 | 2014-01-22 | 南京信息工程大学 | Miniature optical fiber Fabry-Perot pressure sensor and manufacturing method thereof |
| CN103994851A (en) * | 2014-05-15 | 2014-08-20 | 香港理工大学深圳研究院 | Resonant type Fabry-Perot optical fiber sensor, manufacturing method and air pressure detecting method |
| CN104215368A (en) * | 2014-09-15 | 2014-12-17 | 江苏昂德光电科技有限公司 | F-P cavity optical fiber pressure sensing device and demodulation method thereof |
| CN104880267A (en) * | 2015-05-28 | 2015-09-02 | 北京理工大学 | Fiber micro-nano Fabry-Perot interference type pressure sensor and manufacturing method thereof |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106052727A (en) * | 2016-05-26 | 2016-10-26 | 中国计量大学 | Senor device based on fiber miniature Fabry-Perot cavity |
| CN106052727B (en) * | 2016-05-26 | 2024-04-02 | 中国计量大学 | Sensor device based on optical fiber miniature Fabry-Perot cavity |
| CN106052912B (en) * | 2016-07-11 | 2023-12-26 | 中国计量大学 | Optical fiber stress sensing device based on Fabry-Perot microcavity structure |
| CN106052913A (en) * | 2016-07-11 | 2016-10-26 | 中国计量大学 | Pressure sensing device with high sensitivity |
| CN106052912A (en) * | 2016-07-11 | 2016-10-26 | 中国计量大学 | Optical fiber stress sensing device based on Fabry-Perot microcavity structure |
| CN106052913B (en) * | 2016-07-11 | 2024-02-20 | 中国计量大学 | High-sensitivity pressure sensing device |
| CN105953958B (en) * | 2016-07-13 | 2018-08-21 | 中北大学 | All-silica fiber enamel amber pressure sensor |
| CN105953958A (en) * | 2016-07-13 | 2016-09-21 | 中北大学 | All-silica fiber Fabry-Perot pressure sensor |
| CN107843367A (en) * | 2017-09-29 | 2018-03-27 | 上海理工大学 | Optical pressure sensor |
| CN110044398A (en) * | 2019-04-03 | 2019-07-23 | 西北工业大学 | High-temp strain test device and its installation method based on F-P fibre optical sensor |
| CN110987229A (en) * | 2019-12-20 | 2020-04-10 | 西安工业大学 | Optical fiber end face type Fabry-Perot cavity temperature sensor |
| CN112697339A (en) * | 2020-11-26 | 2021-04-23 | 桂林电子科技大学 | High-strength high-temperature-resistant quick-response optical fiber air pressure sensing probe |
| CN112903688A (en) * | 2021-02-05 | 2021-06-04 | 中国科学院上海微系统与信息技术研究所 | Diamond NV color center magnetic field sensor probe device and sensor |
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