CN111678540A - Strain optical fiber sensor based on vernier effect and parallel F-P interferometer - Google Patents
Strain optical fiber sensor based on vernier effect and parallel F-P interferometer Download PDFInfo
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- CN111678540A CN111678540A CN202010523619.6A CN202010523619A CN111678540A CN 111678540 A CN111678540 A CN 111678540A CN 202010523619 A CN202010523619 A CN 202010523619A CN 111678540 A CN111678540 A CN 111678540A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 21
- 230000000694 effects Effects 0.000 title claims abstract description 16
- 239000000835 fiber Substances 0.000 claims abstract description 32
- 238000001228 spectrum Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 3
- 238000010183 spectrum analysis Methods 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 16
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000005530 etching Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000002474 experimental method Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 238000000985 reflectance spectrum Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
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Abstract
The invention provides a strain optical fiber sensor based on a vernier effect and a parallel F-P interferometer, which is a parallel Fabry-Perot interferometer for etching parallel reflectors in an optical fiber core by using femtosecond laser. The method is characterized in that: the femtosecond laser etches four parallel reflectors in a single-mode fiber core to form two groups of mutually parallel, mutually independent, different-size Fabry-Perot cavities with accurately controlled sizes, respectively positioned at the upper side and the lower side in the fiber core and having a certain distance. Incident light of the broadband light source is transmitted into the sensing head in the fiber core and generates interference through two groups of Fabry-Perot cavities in the sensing head respectively. And the reflected light of the interference cavity in the sensing head is received by the circulator and transmitted to the spectrum analyzer to form a parallel Fabry-Perot interferometer. The invention has the advantages of simple manufacture, high mechanical strength, low cost, extremely high strain sensitivity, extremely low temperature sensitivity and the like.
Description
Technical Field
The invention provides an ultra-sensitive strain optical fiber sensor based on a vernier effect, which is a parallel Fabry-Perot interferometer of parallel reflectors in optical fibers and belongs to the technical field of optical fiber sensing.
Background
The optical fiber strain sensor has wide application in various fields such as civil engineering, aerospace, national defense industry and the like. The main types of fiber strain sensors are typically based on Fiber Bragg Gratings (FBGs) and interferometers. The fiber strain sensor based on the FBG is compact and convenient to manufacture. However, the sensitivity obtained is very low, typically about 1 pm/me. A relatively large strain sensitivity can be achieved by using an interferometer based fibre optic sensor. Among the various types of fiber optic interferometers that have been explored for strain sensing, fabry-perot interferometers (FPIs) have a highly compact and simple reflection mode. However, the strain sensitivity obtained is still limited, typically also in the order of pm/me. To further improve the strain sensitivity, two cascaded on-fiber FPIs are used and the two cascaded FP cavities have a smaller Optical Path Difference (OPD), so that the sensitivity can be improved by the vernier effect. Most FPI devices, utilizing the vernier effect, are made by using two cavities of different types, different fibers or fiber materials, which makes the device difficult to manufacture and relatively costly to use. More importantly, it is difficult to control the optical path difference between the two FPs accurately, which results in instability of the amplification factor and low repeatability of device fabrication. Recently, a mirror in which a femtosecond laser writes in an optical fiber has been used in the construction of a high-sensitivity strain sensor based on a vernier effect, and the OPD between two FPIs can be precisely controlled due to a high-precision moving platform employing a femtosecond laser micro-machining system. However, since the two FPIs must be separated by a long distance to avoid any mutual interference, the size of the device becomes large and a strain sensitivity of around 28pm/me is obtained.
Here we propose and demonstrate a compact fiber strain sensor with ultra-high sensitivity fabricated by femtosecond lasers. The system consists of two FP cavities connected in parallel, the cavities are connected in cascade, and the difference of the cavity lengths is accurately controlled. The size of the sensor head is less than 7000 um, the strain sensitivity is 235.14pm/me, and the amplification effect of 300 times is realized by using the vernier effect. Such devices are robust, easy to operate, and play an important role in areas where extremely high strain sensitivity is required.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the strain optical fiber sensor based on the vernier effect and the parallel F-P interferometer, and the strain optical fiber sensor has the advantages of compact structure, simplicity in manufacturing, high mechanical strength, low cost and the like, and can be used for strain sensing.
The technical scheme adopted by the invention for solving the technical problem is as follows: a strain optical fiber sensor based on vernier effect and parallel F-P interferometer is a parallel Fabry-Perot interferometer with parallel reflectors in optical fibers, and comprises a broadband light source, a circulator, a sensing head and a spectrum analyzer. The method is characterized in that: four parallel reflectors are etched in a single-mode optical fiber core by femtosecond laser to form two groups of mutually parallel, mutually independent, different-size and accurately-controlled Fabry-Perot cavities which are respectively positioned at the upper side and the lower side in the fiber core and have the distance of 1 mu m. Incident light of the broadband light source is transmitted into the sensing head in the fiber core and generates interference through two groups of Fabry-Perot cavities in the sensing head respectively. And the reflected light from the interference cavity in the sensing head is received by the circulator and transmitted to the spectrum analyzer to form a parallel Fabry-Perot interferometer.
The fiber core diameter and the fiber diameter of the single-mode fiber are respectively 9 μm and 125 μm.
Compared with the prior art, the invention has the beneficial effects that:
1. the sensor head has extremely high sensitivity to stress, and the experimental result reaches 235.14 pm/me.
2. The size of the sensing head is accurately controlled, and the amplification factor of the sensing sensitivity can be flexibly designed and adjusted.
3. The optical fiber is prepared by using the common single-mode optical fiber with low price, and has the advantages of low cost and simple manufacture.
4. The sensing head is a reflection type structure and can be used for sensing measurement in narrow space.
5. Has low sensitivity to temperature, and the experimental result is 6.89 pm/DEG C.
Drawings
In order to more clearly illustrate the embodiments or technical solutions of the present invention, the present invention is further described below with reference to the accompanying drawings and embodiments.
FIG. 1 is a schematic diagram of an application system of the present invention.
FIG. 2 is a schematic view of a sensor head of the present invention.
FIG. 3 is a graph of the reflectance spectrum of a sensor of the present invention.
FIG. 4 is a schematic diagram of the sensor of the present invention showing the relationship between the wavelength of a given trough of the upper envelope of the spectrum and the stress during a stress sensing experiment.
FIG. 5 is a schematic diagram of the temperature sensing experiment measurement performed by the sensor of the present invention, showing the relationship between the wavelength of a specified trough of the upper envelope of the spectrum and the temperature.
In the figure, 1 is a broadband light source, 2 is a circulator, 3 is a sensing head, 4 is a spectrum analyzer, 5 is a single-mode fiber, 5a is a single-mode fiber core, 5b is a single-mode fiber cladding, and 6, 7, 8 and 9 are reflecting mirrors.
Detailed Description
The invention is further described below with reference to the accompanying drawings and examples:
fig. 1 is a schematic diagram of an application system of the present invention, which includes a broadband light source 1, a circulator 2, a sensor head 3, and a spectrum analyzer 4. The connection mode is as follows: the circulator 2 has three interface ends, which are respectively: light source inlet end, light source outlet end, feedback end. The entrance end is connected with broadband light source 1, and the exit end is connected with sensing head 3, and the feedback end is connected with spectral analysis appearance 4.
Fig. 2 is a schematic structural diagram of a sensing head 3 according to the present invention, where the sensing head 3 is composed of a single-mode fiber 5 and mirrors 6, 7, 8, and 9, and the single-mode fiber 5 includes a single-mode fiber core 5a and a single-mode fiber cladding 5b.
The manufacturing method and the steps of the sensing head are as follows: four reflectors 6, 7, 8 and 9 with the height and the width respectively being 3 microns and 1 micron are etched in a single mode fiber core by femtosecond laser, wherein 6 and 7 form an A Fabry-Perot resonant cavity, 8 and 9 form a B Fabry-Perot resonant cavity, the two resonant cavities are parallel to each other, independent from each other, have different sizes and are accurately controlled, and are respectively positioned on the upper side and the lower side of the fiber core, and the distance is 1 micron. The energy of the femtosecond laser etching is 500nJ, and the scanning speed is 2 μm/s.
With reference to fig. 1 and 2, a specific working principle is described: light emitted by the broadband light source 1 reaches the sensing head 3 through the circulator 2, and the light beam passes through four parallel reflectors 6, 7, 8 and 9 in the sensing head 3 to form two groups of parallel Fabry-Perot cavities which are independent from each other and have different sizes, so that incident light propagating in a fiber core respectively passes through the two groups of Fabry-Perot cavities to generate interference. And returning the light to the circulator, and transmitting the light to the spectrum analyzer through the circulator to form the parallel Fabry-Perot interferometer. The reflectance spectrum of the structure as shown in fig. 3 was observed, while we captured and observed the upper envelope of the reflectance spectrum.
And the sensor is placed in a stress system, stress is applied to the B Fabry-Perot resonant cavity, and the A Fabry-Perot resonant cavity is not influenced. In the experiment, the stress change range of 0-400me is recorded, the reflection spectrum is recorded once every 40me, the upper envelope of the reflection spectrum on the spectrometer generates drift along with the application of the stress, the relation between the wavelength of the specified wave trough of the envelope and the stress is recorded, the stress sensing schematic diagram shown in figure 4 is obtained, and the stress sensitivity is 235.14 pm/me. Similarly, the sensor is placed in the temperature control device, the temperature control device acts on A, B two Fabry-Perot resonant cavities simultaneously, in the experiment, the temperature change range of 0-80 ℃ is recorded, the relation between the observation wavelength and the temperature is shown in figure 5, and the temperature sensitivity can be 6.89 pm/DEG C.
The above-mentioned embodiments, which further illustrate the objects, technical solutions and advantages of the present invention, should be understood that the above-mentioned embodiments are only examples of the present invention, and should not be construed as limiting the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. The utility model provides a strain optical fiber sensor based on vernier effect and parallel F-P interferometer which constitutes including broadband light source, circulator, sensing head, spectral analysis appearance, its connected mode is: the input end of the circulator is connected with the broadband light source, the feedback end of the circulator is connected with the spectrum analyzer, and the output end of the circulator is connected with the sensing head; the method is characterized in that: the sensing head is composed of two groups of Fabry-Perot cavities which are parallel to each other, independent from each other, have different sizes and are accurately controlled, are respectively positioned on the upper side and the lower side in a fiber core and have certain intervals, and are formed by writing four parallel reflectors in a single-mode fiber core by femtosecond laser.
2. The strain optical fiber sensor based on vernier effect and parallel type F-P interferometer according to claim 1, wherein: the fiber core diameter and the fiber diameter of the single-mode fiber are respectively 9 μm and 125 μm.
3. The strain optical fiber sensor based on vernier effect and parallel type F-P interferometer according to claim 1, wherein: the length and the width of each lens of the four reflecting mirrors are respectively 3 mu m and 1 mu m.
4. The strain optical fiber sensor based on vernier effect and parallel type F-P interferometer according to claim 1, wherein: the two groups of Fabry-Perot cavities are respectively positioned at the upper side and the lower side in the fiber core and have a certain distance, and are connected in a staggered way end to end, and the parallel distance is 1 mu m.
5. The strain optical fiber sensor based on vernier effect and parallel type F-P interferometer according to claim 1, wherein: the two groups of Fabry-Perot cavities are parallel to each other, independent from each other, different in size and accurately controlled, are respectively positioned on the upper side and the lower side of the fiber core, and have certain spacing, and the lengths of the Fabry-Perot cavities are 3000 micrometers and 3010 micrometers respectively.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113790678A (en) * | 2021-09-10 | 2021-12-14 | 广东工业大学 | Multi-core optical fiber vector bending sensor with optical vernier effect |
| CN114705349A (en) * | 2022-03-31 | 2022-07-05 | 黑龙江大学 | Vernier sensitization optical fiber pressure sensor combined with film coating technology and preparation method thereof |
| WO2022156298A1 (en) * | 2021-01-25 | 2022-07-28 | 广东海洋大学 | High-sensitivity air pressure sensor based on suspended-core optical fiber and side-hole optical fiber |
| CN116972890A (en) * | 2023-09-22 | 2023-10-31 | 之江实验室 | Optical fiber sensor and modulation method thereof |
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| CN109974759A (en) * | 2019-04-23 | 2019-07-05 | 中国计量大学 | With cascade Fabry-Perot-type cavity sensor in optical fiber cable of the femtosecond laser induction based on cursor effect |
| CN110887515A (en) * | 2019-11-28 | 2020-03-17 | 杭州光飞秒科技有限公司 | Parallel Fabry-Perot interferometer based on parallel reflectors in optical fiber |
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- 2020-06-10 CN CN202010523619.6A patent/CN111678540A/en active Pending
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2022156298A1 (en) * | 2021-01-25 | 2022-07-28 | 广东海洋大学 | High-sensitivity air pressure sensor based on suspended-core optical fiber and side-hole optical fiber |
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| CN116972890B (en) * | 2023-09-22 | 2024-01-09 | 之江实验室 | Optical fiber sensor and modulation method thereof |
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Application publication date: 20200918 |