CN106124027A - A kind of micro-nano fiber vibrating sensor based on hollow-core fiber - Google Patents
A kind of micro-nano fiber vibrating sensor based on hollow-core fiber Download PDFInfo
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- CN106124027A CN106124027A CN201610423867.7A CN201610423867A CN106124027A CN 106124027 A CN106124027 A CN 106124027A CN 201610423867 A CN201610423867 A CN 201610423867A CN 106124027 A CN106124027 A CN 106124027A
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- 239000000835 fiber Substances 0.000 title claims abstract description 161
- 239000002121 nanofiber Substances 0.000 title claims abstract description 18
- 238000003466 welding Methods 0.000 claims abstract description 18
- 239000013307 optical fiber Substances 0.000 claims abstract description 17
- 238000002679 ablation Methods 0.000 claims abstract description 6
- 238000012545 processing Methods 0.000 claims abstract description 4
- 230000004323 axial length Effects 0.000 claims abstract description 3
- 238000000608 laser ablation Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000007788 roughening Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003628 erosive effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 7
- 230000001953 sensory effect Effects 0.000 abstract description 2
- 238000012544 monitoring process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The present invention relates to a kind of micro-nano fiber vibrating sensor based on hollow-core fiber, belong to sensory field of optic fibre.Single-mode fiber, hollow-core fiber and real core fibre order welding；Described hollow-core fiber is hollow circular cylinder, and offers notch in cylindrical sides center；The axial length of this notch need to be less than the length of hollow circular cylinder；Described notch is by being formed from the ablation of hollow-core fiber side with femtosecond laser.Present invention, avoiding the low problem even without reflection of reflectance of femtosecond laser processing the formed reflecting surface of optical fiber, and there is the features such as volume is little, resonant frequency is high, high temperature resistant, electromagnetism interference, can be used for the vibration measurement under hot environment.
Description
Technical field
The present invention relates to a kind of micro-nano fiber vibrating sensor based on hollow-core fiber, belong to sensory field of optic fibre.
Background technology
In recent years, the vibration monitoring under hot environment has been had to the prison of increasing demand, such as aero-engine
Survey, the electromotor of main equipment, electromotor, motor monitoring etc., operating temperature is up to 1200 DEG C.
Traditional high-temperature vibrating sensor, can be divided into current vortex according to the principle that mechanical oscillation signal is converted into the signal of telecommunication
Type, electromagnetic induction type and piezoelectric effect type.The commercial high-temperature vibrating sensor being made up of these principles, such as Beijing Institute of Aeronautics technique institute
8310 types of SHQ-80, B.K company, the 6237M69A type of ENDVCO company and 6237M70 type, volume is relatively big, and can not realize
High-temperature vibrating monitoring higher than 700 DEG C.
In recent years, in order to reduce the volume of vibrating sensor further, and the operating temperature of vibrating sensor, people are promoted
Sight is turned to field fiber.Fiber grating is widely used in vibration measurement, it is common practice to grating is fixed on cantilever beam
On, detect vibration signal by the drift of wavelength.But owing to fiber grating can not be survived in the high temperature more than 300 DEG C, institute
The high-temperature vibrating monitoring of more than 300 DEG C can not be realized with the vibrating sensor made based on fiber grating.Perrone G et al. carries
Go out a kind of contactless intensity modulation type optical fibre vibration sensor, but the fluctuation of light source output and the change of fiber distance vibration source position
Change and all can bring bigger error to sensor, and due to the restriction of the reasons such as encapsulation, the high temperature that can not realize more than 300 DEG C shakes
Dynamic measurement (Perrone G, Vallan A.A low-cost optical sensor for noncontact vibration
measurements[J].Instrumentation and Measurement,IEEE Transactions on,2009,58
(5):1650-1656.).Gangopadhyay et al. proposes a kind of external cavity type Fabry-Perot type vibrating sensor, works as the external world
When there is vibration, the chamber that the vibration of flexible mirror can change fabry perot interferometer is long, changes by detecting its phase place, real
Existing vibration detecting, but owing to reflecting mirror and lens make the restriction of material, the program can not hot environment more than 500 DEG C
Lower use (Gangopadhyay T K, Chakravorti S, Bhattacharya K, et al.Wavelet analysis
ofoptical signal extracted from a non-contact fibre-optic vibration sensor
using an extrinsic Fabry–Perot interferometer[J].Measurement Science and
Technology,2005,16(5):1075.).Rines et al. proposes transmission-type based on single-mode fiber natural resiliency and transfers to other localities
Type optical fibre vibration sensor processed, but due to problems such as encapsulation, this sensor can not use in the hot environment more than 800 DEG C
(Rines G A.Fiber-optic accelerometer with hydrophone applications[J].Applied
optics,1981,20(19):3453-3459.).Berthold et al. is to multimode graded-index optical fiber and multimode stepped-index optical fiber
Microbend characteristic is analyzed, and is applied to vibration measurement, but restriction based on optical fiber, can not height more than 800 DEG C
Vibration detecting (Berthold III J W.Historical review ofmicrobend fiber is carried out under temperature environment
optic sensors[C]//10th Optical Fibre Sensors Conference.International Society
for Optics and Photonics,1994:182-186.).Ricardo et al. utilizes focused ion beam technology, makes
All-fiber high-temperature vibrating sensor (Andr é R M, Pevec S, Becker M, et al.Focused ion beam post-
processing of optical fiber Fabry-Perot cavities for sensing applications[J]
.Optics express,2014,22(11):13102-13108.).This sensor bulk is little, be resistant to 1000 DEG C of high temperature, but
Processing equipment needed thereby is expensive, and optical reflection face is formed by ion beam bombardment, is difficult to accomplish the most smooth, causes reflectance relatively
Low, signal is more weak.
Summary of the invention
It is an object of the invention to provide a kind of micro-nano fiber vibrating sensor based on femtosecond laser parallel micromachining, this sensor
Volume little (φ 125 μ m 7mm), can work under 1200 DEG C of hot environments.
It is an object of the invention to be achieved through the following technical solutions.
A kind of micro-nano fiber vibrating sensor based on hollow-core fiber, including: single-mode fiber, hollow-core fiber, real core fibre；
Single-mode fiber, hollow-core fiber and real core fibre order welding；Described hollow-core fiber is hollow circular cylinder, and at cylinder
Notch is offered in body side surface center；The axial length of this notch need to be less than the length of hollow circular cylinder；Described notch be by with
Femtosecond laser is formed from the ablation of hollow-core fiber side.
A length of 100 μm-2000 μm of hollow-core fiber, external diameter is identical with single-mode fiber external diameter or close, internal diameter be 10 μm-
100μm；A length of 100 μm-5000 μm of described real core fibre.
Ablation vertical depth is the 10%-90% of hollow-core fiber diameter.
Processing method:
Step one, single-mode fiber and hollow-core fiber welding.；
Step 2, excise unnecessary hollow-core fiber；
Step 3, hollow-core fiber and real core fibre welding；
Step 4, excise unnecessary real core fibre；
Step 5, end face roughening process；
Step 6, femtosecond laser ablation hollow-core fiber.
Work process:
Detection light is imported by single-mode fiber, forms Fresnel for the first time at single-mode fiber and the face of weld of hollow-core fiber anti-
Penetrate, form second time Fei Nier reflection at hollow-core fiber and real core fibre face of weld, reflect to form two-beam interference for twice, reflection
Light is derived to (FBG) demodulator by single-mode fiber.When described sensor is vibrated by being perpendicular to cantilever beam direction, real core fibre
Drive cantilever beam to produce as mass micro-bend, thus change the optical path difference of interferometer, thus form interference-type optical fiber vibration and pass
Sensor.
Beneficial effect
1, a kind of based on hollow-core fiber the micro-nano fiber vibrating sensor of the present invention, described vibrating sensor volume is little,
A diameter of 125 μm, length is less than 7mm, and resistance to 1200 DEG C of high temperature；
2, a kind of based on hollow-core fiber the micro-nano fiber vibrating sensor of the present invention, described vibrating sensor interference signal
Quality is good, is conducive to demodulating vibration signal.
3, the present invention uses femtosecond laser ablation hollow-core fiber to form cantilever beam structure, substantially reduces the anti-of hollow-core fiber
Curved rigidity, and use the 3rd section of longer optical fiber as mass so that vibration signal intensity one timing of input, hollow light
The bending that fine generation is bigger, causes the chamber length of Fabry-Perot interference instrument that bigger change occurs, thus improves this vibrating sensor
Sensitivity.
4, it is the cantilever beam structure formed after femtosecond laser ablation hollow-core fiber due to the vibrating sensing part of the present invention.Empty
Core fibre is made up of pure quartz, and quartz fusing point is up to 1650 DEG C, and thermal coefficient of expansion is only 0.55 × 10-6/ DEG C, temperature is failed to understand
Sense, so the present invention can be used for the vibration detecting under hot environment, and the cross sensitivity for temperature is little.
Accompanying drawing explanation
Fig. 1 is the side view of micro-nano fiber vibrating sensor based on hollow-core fiber of the present invention；
Fig. 2 is the top view of micro-nano fiber vibrating sensor based on hollow-core fiber of the present invention；
Fig. 3 is the axonometric chart of micro-nano fiber vibrating sensor based on hollow-core fiber of the present invention.
Wherein, 1 single-mode fiber, 2 hollow-core fibers, 3 real core fibres, 4 cantilever beams, 5 single modes
Optical fiber and the face of weld of hollow-core fiber, 6 hollow-core fibers and the face of weld of real core fibre, the end face of 7 real core fibres.
Detailed description of the invention
With specific embodiments, technical scheme is further described in detail below in conjunction with the accompanying drawings.
Embodiment 1
A kind of micro-nano fiber vibrating sensor based on femtosecond laser parallel micromachining, including: single-mode fiber 1, hollow-core fiber 2,
Real core fibre 3；Wherein, femtosecond laser ablation reality core fibre 3 forms cantilever beam 4, and real core fibre 3 is as mass；
Single-mode fiber 1, hollow-core fiber 2 and real core fibre 3 order welding；Described hollow-core fiber 2 is through femtosecond laser ablation shape
Becoming cantilever beam 4, real core fibre 3 is as mass.
A length of 1000 μm of described hollow-core fiber 2, external diameter is identical with single-mode fiber 1 external diameter, is 125 μm, and internal diameter is 93 μ
M, the femtosecond laser ablation degree of depth is 90 μm；A length of 3000 μm of described real core fibre 3.
Processing method:
Step one, single-mode fiber 1 and hollow-core fiber 2 welding.Wherein, single-mode fiber 1 is general commercial single-mode fiber, covering
A diameter of 125 μm, core diameter is 8 μm, and the internal diameter of hollow-core fiber 2 is 93 μm, and external diameter is 125 μm.Single-mode optics is removed before welding
Fibre 1 and the coat of hollow-core fiber 2, welding uses the manual mode of commercial heat sealing machine, arranges discharge current and discharge time, make
Firmly and hollow-core fiber 2 occurs without and subsides with hollow-core fiber 2 welding to obtain single-mode fiber 1.；
Step 2, excise unnecessary hollow-core fiber 2.Under microscopical observation, stay the hollow-core fiber 2 of 1000 μm length, many
Remaining part cutter excise；
Step 3, hollow-core fiber 2 and real core fibre 3 welding.Removing the coat of real core fibre 3 before welding, welding uses
The manual mode of commercial heat sealing machine, arranges discharge current and discharge time so that hollow-core fiber 2 and real core fibre 3 welding are firm
And hollow-core fiber 2 occurs without and subsides.Wherein, real core fibre 3 uses coreless fiber, i.e. quartz glass cylinder, the diameter of real core fibre 3
It is 125 μm；
Step 4, excise unnecessary real core fibre 3.Under microscopical observation, stay the real core fibre 2 of 3000 μm length, many
Remaining part cutter excise；
Step 5, end face roughening process.End face 7 femtosecond laser ablation of described real core fibre so that it is roughening, with
Reduce end face reflection；
Step 6, femtosecond laser ablation hollow-core fiber 2.By described hollow-core fiber 2 from side femtosecond laser ablation, becoming
As, under the observation of system, being controlled the track of laser ablation by computer programming, forming cantilever beam 4, wherein, ablated area is along empty
Core fibre axial direction length 600 μm, width is 125 μm, and the degree of depth is 90 μm, and ablation does not destroy hollow-core fiber 2 and single-mode fiber 1
Face of weld and the face of weld of hollow-core fiber 2 and real core fibre 3.
Work process:
The operation principle of the present invention is: detection light is imported by single-mode fiber 1, at the face of weld of single-mode fiber Yu hollow-core fiber
Fresnel reflection, a part of luminous reflectance receipt mode fiber 1, another part light transmission for the first time is formed at 5.Transmission optical transport is to empty
Second time Fei Nier reflection, some luminous reflectance receipt mode fiber 1 again is formed at core fibre and the face of weld 6 of real core fibre.
Reflect light at two and form two-beam interference, derived by single-mode fiber 1, constitute external cavity type optical fibre Fabry-perot interferometer.When
When sensor is vibrated, the cantilever beam 4 that real core fibre 3 is formed after driving femtosecond laser ablation hollow-core fiber as mass produces
Raw micro-bend, cause the chamber length of Fabry-Perot interference instrument to change, cause the phase place interfering light to change, thus realize shaking
Dynamic sensing.
Described second segment hollow-core fiber, from side femtosecond laser ablation, removes a part, forms cantilever beam structure.Described
Femtosecond laser ablation district, should be less than the length of second segment hollow-core fiber, thus ensures processing along hollow-core fiber axial direction length
Time the face of weld of first paragraph optical fiber and second segment hollow-core fiber and the 3rd section of optical fiber and second segment hollow-core fiber face of weld not
Contaminated, therefore two optical reflection faces that reflectance is the highest can be obtained；Ablation width is hollow-core fiber external diameter, i.e. 125 μm；Burn
The erosion degree of depth is 90 μm.Described 3rd section of optical fiber connector end face should be roughened, to reduce end face reflection.
Described vibrating sensor volume is little and high temperature resistant.High-temperature vibrating sensor bulk described in embodiment 1 is only φ
125 μ m 4000 μm, can work under the hot environment of 1200 DEG C.
Described vibrating sensor interference signal quality is good.Micro-nano fiber vibrating sensing based on hollow-core fiber of the present invention
Device, utilizes two real core fibres to form Fresnel reflection with hollow-core fiber face of weld, and the reflection light of two fusion points interferes,
And then form external cavity type Fabry-Perot interferometer.Owing to forming two optical reflection faces (single-mode fiber and the hollow light interfered
The face of weld 6 of fine face of weld 5 and hollow-core fiber and real core fibre) it is that optical fiber cutter cuts and forms before welding, and due to sky
Core fibre internal diameter (93 μm) is more than single mode reality core fibre fibre core core diameter (10 μm), therefore single mode reality core fibre and hollow-core fiber welding
Time, the cleanliness factor of single mode reality core fibre core end surface can't be affected, again because not to the two light during femtosecond laser ablation
Learn reflecting surface and produce impact, therefore can ensure that the flatness in the two optical reflection face, so that the Fabry-Perot formed
Interferometer has obvious interference fringe, it is easy to demodulate vibration signal.
It should be noted last that, above detailed description of the invention only in order to technical scheme to be described and unrestricted,
Although the present invention being described in detail with reference to preferred embodiment, it will be understood by those within the art that, to this
Bright technical scheme is modified or equivalent, and without deviating from the spirit and scope of technical solution of the present invention, it all should be contained
Cover in the middle of scope of the presently claimed invention.
Claims (5)
1. a micro-nano fiber vibrating sensor based on hollow-core fiber, it is characterised in that: including: single-mode fiber (1), hollow light
Fine (2), real core fibre (3)；Single-mode fiber (1), hollow-core fiber (2) and real core fibre (3) sequentially welding；Described hollow-core fiber
(2) it is hollow circular cylinder, and offers notch in cylindrical sides center；The axial length of this notch need to be less than hollow circular cylinder
Length；Described notch is by being formed from the ablation of hollow-core fiber (2) side with femtosecond laser.
A kind of micro-nano fiber vibrating sensor based on hollow-core fiber, it is characterised in that: described sky
A length of 100 μm-2000 μm of core fibre (2), external diameter is identical or close with single-mode fiber (1) external diameter, and internal diameter is 10 μm-100 μ
m；A length of 100 μm-5000 μm of described real core fibre (3).
A kind of micro-nano fiber vibrating sensor based on hollow-core fiber, it is characterised in that: described burning
Erosion vertical depth is the 10%-90% of hollow-core fiber (2) diameter.
4. a kind of method processing micro-nano fiber vibrating sensor based on hollow-core fiber, its feature
It is: concretely comprise the following steps:
Step one, single-mode fiber (1) and hollow-core fiber (2) welding；；
Step 2, excise unnecessary hollow-core fiber (2)；
Step 3, hollow-core fiber (2) and real core fibre (3) welding；
Step 4, excise unnecessary real core fibre (3)；
Step 5, end face roughening process；
Step 6, femtosecond laser ablation hollow-core fiber (2).
5. a kind of based on hollow-core fiber the micro-nano fiber vibrating sensor as described in claims 1 to 3 any one, its feature
It is: work process is: detection light is imported by single-mode fiber (1), at the face of weld (5) of single-mode fiber (1) Yu hollow-core fiber (2)
Form Fresnel reflection for the first time, form second time Fei Nier reflection hollow-core fiber (2) and real core fibre (3) face of weld (6),
Reflecting to form two-beam interference for twice, reflection light is derived to (FBG) demodulator by single-mode fiber (1)；When described sensor is by vertical
When the vibration in cantilever beam (4) direction, real core fibre (3) drives cantilever beam (4) to produce micro-bend as mass, thus changes dry
The optical path difference of interferometer, thus form interference-type optical fiber vibrating sensor.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107247037A (en) * | 2017-07-28 | 2017-10-13 | 中国工程物理研究院激光聚变研究中心 | Molecular state organic pollutant monitoring sensor based on single mode multimode coreless fiber structure |
| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
| CN108168449A (en) * | 2017-12-31 | 2018-06-15 | 西北大学 | Miniature Fiber optic displacement sensor with high resolution |
| CN108332654A (en) * | 2018-01-25 | 2018-07-27 | 东北大学 | A kind of chamber grows controllable mini optical fibre Fabry-platinum Luo Gan's interferometer production method |
| CN108680767A (en) * | 2018-03-27 | 2018-10-19 | 蚌埠学院 | A kind of fiber grating accelerometer in a fiber |
| CN109633810A (en) * | 2019-01-25 | 2019-04-16 | 武汉理工大学 | A kind of photonic crystal fiber and optical fibre vibration sensor for vibration measurement |
| CN110207806A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of oblique angle end face optical fibre vibration sensor and its method of measurement vibration |
| CN110514233A (en) * | 2019-10-10 | 2019-11-29 | 中国计量大学 | Mach-Zehnder interferometer on a kind of cavity suspension channel-style optical fiber cable |
| CN111928937A (en) * | 2020-08-25 | 2020-11-13 | 安徽大学 | Optical fiber vibration sensing probe and optical fiber microseismic monitoring system |
| CN116931174A (en) * | 2023-09-15 | 2023-10-24 | 中国航天三江集团有限公司 | Fusion-bonding integrated packaging method and product of solid fiber-hollow anti-resonance fiber |
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| CN107271546A (en) * | 2017-07-04 | 2017-10-20 | 滨州学院 | Photoacoustic spectroscopy gas detecting system based on silicon cantilever and its matching resonantron |
| CN107271546B (en) * | 2017-07-04 | 2023-07-21 | 滨州学院 | Photoacoustic spectrum gas detection system based on silicon cantilever beam and matched resonance tube thereof |
| CN107247037B (en) * | 2017-07-28 | 2023-06-02 | 中国工程物理研究院激光聚变研究中心 | Molecular organic pollutant monitoring sensor based on single-mode-multimode-coreless optical fiber structure |
| CN107247037A (en) * | 2017-07-28 | 2017-10-13 | 中国工程物理研究院激光聚变研究中心 | Molecular state organic pollutant monitoring sensor based on single mode multimode coreless fiber structure |
| CN108168449A (en) * | 2017-12-31 | 2018-06-15 | 西北大学 | Miniature Fiber optic displacement sensor with high resolution |
| CN108332654A (en) * | 2018-01-25 | 2018-07-27 | 东北大学 | A kind of chamber grows controllable mini optical fibre Fabry-platinum Luo Gan's interferometer production method |
| CN108680767A (en) * | 2018-03-27 | 2018-10-19 | 蚌埠学院 | A kind of fiber grating accelerometer in a fiber |
| CN109633810A (en) * | 2019-01-25 | 2019-04-16 | 武汉理工大学 | A kind of photonic crystal fiber and optical fibre vibration sensor for vibration measurement |
| CN110207806A (en) * | 2019-07-10 | 2019-09-06 | 国网上海市电力公司 | A kind of oblique angle end face optical fibre vibration sensor and its method of measurement vibration |
| CN110514233A (en) * | 2019-10-10 | 2019-11-29 | 中国计量大学 | Mach-Zehnder interferometer on a kind of cavity suspension channel-style optical fiber cable |
| CN110514233B (en) * | 2019-10-10 | 2024-04-26 | 中国计量大学 | Mach-Zehnder interferometer on cavity suspension channel type optical fiber line |
| CN111928937B (en) * | 2020-08-25 | 2022-06-24 | 安徽大学 | Optical fiber vibration sensing probe and optical fiber microseismic monitoring system |
| CN111928937A (en) * | 2020-08-25 | 2020-11-13 | 安徽大学 | Optical fiber vibration sensing probe and optical fiber microseismic monitoring system |
| CN116931174A (en) * | 2023-09-15 | 2023-10-24 | 中国航天三江集团有限公司 | Fusion-bonding integrated packaging method and product of solid fiber-hollow anti-resonance fiber |
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