CN106124027A - A kind of micro-nano fiber vibrating sensor based on hollow-core fiber - Google Patents
A kind of micro-nano fiber vibrating sensor based on hollow-core fiber Download PDFInfo
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Abstract
本发明涉及一种基于空芯光纤的微纳光纤振动传感器，属于光纤传感领域。单模光纤、空芯光纤和实芯光纤顺序熔接；所述空芯光纤为中空圆柱体，且在圆柱体侧面中心处开设槽口；该槽口的轴向长度需小于中空圆柱体的长度；所述槽口是通过用飞秒激光从空芯光纤侧面烧蚀形成的。本发明避免了飞秒激光加工光纤所形成反射面的反射率低甚至没有反射的问题，且具有体积小、共振频率高、耐高温、抗电磁干扰等特点，可用于高温环境下的振动测量。
The invention relates to a micro-nano optical fiber vibration sensor based on a hollow-core optical fiber, which belongs to the field of optical fiber sensing. The single-mode optical fiber, the hollow-core optical fiber and the solid-core optical fiber are sequentially fused; the hollow-core optical fiber is a hollow cylinder, and a notch is provided at the center of the side of the cylinder; the axial length of the notch needs to be less than the length of the hollow cylinder; The notch is formed by ablation from the side of the hollow core fiber with a femtosecond laser. The invention avoids the problem of low reflectivity or even no reflection on the reflective surface formed by femtosecond laser processing optical fiber, and has the characteristics of small size, high resonance frequency, high temperature resistance, anti-electromagnetic interference, etc., and can be used for vibration measurement in high temperature environment.
Description
技术领域technical field
本发明涉及一种基于空芯光纤的微纳光纤振动传感器，属于光纤传感领域。The invention relates to a micro-nano optical fiber vibration sensor based on a hollow-core optical fiber, which belongs to the field of optical fiber sensing.
背景技术Background technique
近年来，对于高温环境下的振动监测有了越来越多的需求，例如航空发动机的监测、大型设备的发电机、发动机、电动机监测等，工作温度可达1200℃。In recent years, there has been an increasing demand for vibration monitoring in high-temperature environments, such as monitoring of aero-engines, generators, engines, and motors of large-scale equipment, etc., and the working temperature can reach 1200°C.
传统的高温振动传感器，依据将机械振动信号转换成电信号的原理可分为电涡流型、电磁感应型和压电效应型。由这些原理制成的商用高温振动传感器，如北航工艺所的SHQ-80、B.K公司的8310型、ENDVCO公司的6237M69A型和6237M70型，体积较大，且不能实现高于700℃的高温振动监测。Traditional high-temperature vibration sensors can be divided into eddy current type, electromagnetic induction type and piezoelectric effect type according to the principle of converting mechanical vibration signals into electrical signals. Commercial high-temperature vibration sensors made of these principles, such as SHQ-80 of Beihang Technology Institute, 8310 of B.K Company, 6237M69A and 6237M70 of ENDVCO Company, are large in size and cannot realize high-temperature vibration monitoring above 700 °C .
近年来，为了进一步缩小振动传感器的体积，并提升振动传感器的工作温度，人们将目光转向光纤领域。光纤光栅广泛应用于振动测量，通常的做法是将光栅固定在悬臂梁上，通过波长的漂移检测出振动信号。但由于光纤光栅不能在300℃以上的高温中存活，所以基于光纤光栅制作的振动传感器不能实现300℃以上的高温振动监测。Perrone G等人提出一种非接触式强度调制型光纤振动传感器，但光源输出的波动和光纤距离振源位置的变化都会给传感器带来较大误差，且由于封装等原因的限制，也不能实现300℃以上的高温振动测量(Perrone G,Vallan A.A low-cost optical sensor for noncontact vibrationmeasurements[J].Instrumentation and Measurement,IEEE Transactions on,2009,58(5):1650-1656.)。Gangopadhyay等人提出一种外腔式法布里-珀罗型振动传感器，当外界发生振动时，弹性反射镜的振动会改变法布里珀罗干涉仪的腔长，通过检测其相位变化，实现振动探测，但由于反射镜和透镜制作材料的限制，该方案也不能在500℃以上的高温环境下使用(Gangopadhyay T K,Chakravorti S,Bhattacharya K,et al.Wavelet analysisofoptical signal extracted from a non-contact fibre-optic vibration sensorusing an extrinsic Fabry–Perot interferometer[J].Measurement Science andTechnology,2005,16(5):1075.)。Rines等人提出了基于单模光纤自身弹性的透射式外调制型光纤振动传感器，但由于封装等问题，该传感器并不能在800℃以上的高温环境中使用(Rines G A.Fiber-optic accelerometer with hydrophone applications[J].Appliedoptics,1981,20(19):3453-3459.)。Berthold等人对渐变型多模光纤和阶跃型多模光纤的微弯曲特性进行了分析，并应用于振动测量，但基于光纤的限制，并不能在800℃以上的高温环境下进行振动探测(Berthold III J W.Historical review ofmicrobend fiberoptic sensors[C]//10th Optical Fibre Sensors Conference.International Societyfor Optics and Photonics,1994:182-186.)。Ricardo等人利用聚焦离子束技术，制作了全光纤高温振动传感器(André R M,Pevec S,Becker M,et al.Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications[J].Optics express,2014,22(11):13102-13108.)。该传感器体积小、可耐1000℃高温，但是加工所需设备昂贵，且光学反射面由离子束轰击而成，很难做到十分平整，导致反射率较低，信号较弱。In recent years, in order to further reduce the volume of the vibration sensor and increase the operating temperature of the vibration sensor, people have turned their attention to the field of optical fiber. Fiber gratings are widely used in vibration measurement. The usual practice is to fix the grating on the cantilever beam and detect the vibration signal through the shift of wavelength. However, since fiber Bragg gratings cannot survive in high temperatures above 300°C, vibration sensors based on fiber Bragg gratings cannot achieve high temperature vibration monitoring above 300°C. Perrone G and others proposed a non-contact intensity modulation optical fiber vibration sensor, but the fluctuation of the light source output and the change of the position of the optical fiber from the vibration source will bring a large error to the sensor, and due to the limitations of packaging and other reasons, it cannot be realized. High-temperature vibration measurement above 300°C (Perrone G, Vallan A. A low-cost optical sensor for noncontact vibration measurements [J]. Instrumentation and Measurement, IEEE Transactions on, 2009, 58(5): 1650-1656.). Gangopadhyay et al. proposed an external-cavity Fabry-Perot vibration sensor. When the outside world vibrates, the vibration of the elastic mirror will change the cavity length of the Fabry-Perot interferometer. By detecting its phase change, the Vibration detection, but due to the limitations of mirror and lens materials, this solution cannot be used in high temperature environments above 500 °C (Gangopadhyay T K, Chakravorti S, Bhattacharya K, et al. Wavelet analysis of optical signal extracted from a non-contact fiber -optic vibration sensoruring an extrinsic Fabry–Perot interferometer[J].Measurement Science and Technology,2005,16(5):1075.). Rines et al. proposed a transmissive externally modulated optical fiber vibration sensor based on the elasticity of the single-mode optical fiber, but due to packaging and other issues, the sensor cannot be used in a high temperature environment above 800 °C (Rines G A. Fiber-optic accelerometer with Hydrophone applications [J]. Applied Optics, 1981, 20(19): 3453-3459.). Berthold et al. analyzed the micro-bending characteristics of graded multimode fiber and step-type multimode fiber, and applied it to vibration measurement. However, due to the limitation of optical fiber, vibration detection cannot be performed in a high temperature environment above 800 °C ( Berthold III J W. Historical review of microbend fiberoptic sensors [C]//10th Optical Fiber Sensors Conference. International Society for Optics and Photonics, 1994:182-186.). Ricardo et al. used focused ion beam technology to make an all-fiber high-temperature vibration sensor (André R M, Pevec S, Becker M, et al. Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications[J]. Optics express, 2014, 22(11): 13102-13108.). The sensor is small in size and can withstand high temperatures of 1000°C, but the equipment required for processing is expensive, and the optical reflective surface is bombarded by ion beams, so it is difficult to make it very flat, resulting in low reflectivity and weak signal.
发明内容Contents of the invention
本发明的目的是提供一种基于飞秒激光微加工的微纳光纤振动传感器，该传感器体积小(φ125μm×7mm)，可在1200℃高温环境下工作。The object of the present invention is to provide a micro-nano optical fiber vibration sensor based on femtosecond laser micromachining, which has a small volume (φ125μm×7mm) and can work in a high temperature environment of 1200°C.
本发明的目的是通过下述技术方案实现的。The purpose of the present invention is achieved through the following technical solutions.
一种基于空芯光纤的微纳光纤振动传感器，包括：单模光纤，空芯光纤，实芯光纤；A micro-nano optical fiber vibration sensor based on hollow-core optical fiber, including: single-mode optical fiber, hollow-core optical fiber, and solid-core optical fiber;
单模光纤、空芯光纤和实芯光纤顺序熔接；所述空芯光纤为中空圆柱体，且在圆柱体侧面中心处开设槽口；该槽口的轴向长度需小于中空圆柱体的长度；所述槽口是通过用飞秒激光从空芯光纤侧面烧蚀形成的。The single-mode optical fiber, the hollow-core optical fiber and the solid-core optical fiber are sequentially fused; the hollow-core optical fiber is a hollow cylinder, and a notch is provided at the center of the side of the cylinder; the axial length of the notch needs to be less than the length of the hollow cylinder; The notch is formed by ablation from the side of the hollow core fiber with a femtosecond laser.
空芯光纤的长度为100μm-2000μm，外径与单模光纤外径相同或接近，内径为10μm-100μm；所述实芯光纤长度为100μm-5000μm。The length of the hollow-core fiber is 100 μm-2000 μm, the outer diameter is the same as or close to that of the single-mode fiber, and the inner diameter is 10 μm-100 μm; the length of the solid-core fiber is 100 μm-5000 μm.
烧蚀垂直深度为空芯光纤直径的10％-90％。The vertical depth of ablation is 10%-90% of the diameter of the hollow-core fiber.
加工方法：processing methods:
步骤一、单模光纤和空芯光纤熔接。；Step 1. Fusion splicing of single mode fiber and hollow core fiber. ;
步骤二、切除多余的空芯光纤；Step 2, cutting off excess hollow-core optical fiber;
步骤三、空芯光纤和实芯光纤熔接；Step 3. Fusion splicing of hollow-core fiber and solid-core fiber;
步骤四、切除多余的实芯光纤；Step 4. Cut off excess solid core optical fiber;
步骤五、端面粗糙化处理；Step five, end surface roughening treatment;
步骤六、飞秒激光烧蚀空芯光纤。Step six, femtosecond laser ablation of the hollow core fiber.
工作过程：work process:
探测光由单模光纤导入，在单模光纤与空芯光纤的熔接面形成第一次菲涅尔反射，在空芯光纤与实芯光纤熔接面形成第二次菲尼尔反射，两次反射形成双光束干涉，反射光通过单模光纤导出至解调仪。当所述传感器受到垂直于悬臂梁方向的振动时，实芯光纤作为质量块带动悬臂梁产生微弯，从而改变干涉仪的光程差，从而形成干涉型光纤振动传感器。The probe light is introduced from the single-mode fiber, and the first Fresnel reflection is formed on the fusion surface of the single-mode fiber and the hollow-core fiber, and the second Fresnel reflection is formed on the fusion surface of the hollow-core fiber and the solid-core fiber. A double-beam interference is formed, and the reflected light is exported to the demodulator through a single-mode fiber. When the sensor is subjected to vibration perpendicular to the direction of the cantilever beam, the solid-core optical fiber acts as a mass block to drive the cantilever beam to produce microbends, thereby changing the optical path difference of the interferometer, thereby forming an interferometric optical fiber vibration sensor.
有益效果Beneficial effect
1、本发明的一种基于空芯光纤的微纳光纤振动传感器，所述振动传感器体积小，直径为125μm，长度不到7mm，且耐1200℃高温；1. A micro-nano optical fiber vibration sensor based on a hollow-core optical fiber of the present invention, the vibration sensor has a small volume, a diameter of 125 μm, a length of less than 7 mm, and a high temperature resistance of 1200 ° C;
2、本发明的一种基于空芯光纤的微纳光纤振动传感器，所述振动传感器干涉信号质量好，有利于解调出振动信号。2. A micro-nano optical fiber vibration sensor based on a hollow-core optical fiber of the present invention. The vibration sensor has good interference signal quality and is beneficial to demodulate the vibration signal.
3、本发明采用飞秒激光烧蚀空芯光纤形成悬臂梁结构，大大减小了空芯光纤的抗弯刚度，并且采用较长的第三段光纤作为质量块，使得输入的振动信号强度一定时，空芯光纤产生更大的弯曲，导致布里-珀罗干涉仪的腔长发生更大的变化，从而提高本振动传感器的灵敏度。3. The present invention adopts femtosecond laser ablation of the hollow-core fiber to form a cantilever beam structure, which greatly reduces the bending stiffness of the hollow-core fiber, and uses the longer third-section fiber as the mass block, so that the input vibration signal intensity is Timing, the hollow-core fiber produces greater bending, resulting in a greater change in the cavity length of the Brie-Perot interferometer, thereby improving the sensitivity of the vibration sensor.
4、由于本发明的振动传感部分为飞秒激光烧蚀空芯光纤后形成的悬臂梁结构。空芯光纤由纯石英制成，石英熔点高达1650℃，热膨胀系数仅为0.55×10-6/℃，对于温度不明感，所以本发明可用于高温环境下的振动探测，且对于温度的交叉灵敏度小。4. Since the vibration sensing part of the present invention is a cantilever beam structure formed after femtosecond laser ablation of a hollow-core optical fiber. The hollow core optical fiber is made of pure quartz, the melting point of which is as high as 1650°C, and the coefficient of thermal expansion is only 0.55×10 -6 /°C. The temperature is unknown, so the invention can be used for vibration detection in high temperature environments, and has cross-sensitivity to temperature Small.
附图说明Description of drawings
图1为本发明所述基于空芯光纤的微纳光纤振动传感器的侧视图；Fig. 1 is the side view of the micro-nano optical fiber vibration sensor based on hollow-core optical fiber according to the present invention;
图2为本发明所述基于空芯光纤的微纳光纤振动传感器的俯视图；Fig. 2 is the top view of the micro-nano optical fiber vibration sensor based on hollow-core optical fiber according to the present invention;
图3为本发明所述基于空芯光纤的微纳光纤振动传感器的立体图。Fig. 3 is a perspective view of the micro-nano optical fiber vibration sensor based on the hollow-core optical fiber of the present invention.
其中，1——单模光纤，2——空芯光纤，3——实芯光纤，4——悬臂梁，5——单模光纤与空芯光纤的熔接面，6——空芯光纤与实芯光纤的熔接面，7——实芯光纤的端面。Among them, 1—single-mode fiber, 2—hollow-core fiber, 3—solid-core fiber, 4—cantilever beam, 5—fusion surface of single-mode fiber and hollow-core fiber, 6—hollow-core fiber and Fusion surface of solid-core optical fiber, 7—end face of solid-core optical fiber.
具体实施方式detailed description
下面结合附图和具体实施方案对本发明的技术方案作进一步具体说明。The technical scheme of the present invention will be further specifically described below in conjunction with the accompanying drawings and specific embodiments.
实施例1Example 1
一种基于飞秒激光微加工的微纳光纤振动传感器，包括：单模光纤1，空芯光纤2，实芯光纤3；其中，飞秒激光烧蚀实芯光纤3形成悬臂梁4，实芯光纤3作为质量块；A micro-nano optical fiber vibration sensor based on femtosecond laser micromachining, comprising: a single-mode optical fiber 1, a hollow-core optical fiber 2, and a solid-core optical fiber 3; wherein, the femtosecond laser ablates the solid-core optical fiber 3 to form a cantilever 4, and the solid-core The optical fiber 3 is used as a mass block;
单模光纤1、空芯光纤2和实芯光纤3顺序熔接；所述空芯光纤2经飞秒激光烧蚀形成悬臂梁4，实芯光纤3作为质量块。The single-mode optical fiber 1, the hollow-core optical fiber 2 and the solid-core optical fiber 3 are sequentially fused; the hollow-core optical fiber 2 is ablated by a femtosecond laser to form a cantilever beam 4, and the solid-core optical fiber 3 is used as a mass block.
所述空芯光纤2的长度为1000μm，外径与单模光纤1外径相同，为125μm，内径为93μm，飞秒激光烧蚀深度为90μm；所述实芯光纤3长度为3000μm。The length of the hollow-core fiber 2 is 1000 μm, the outer diameter is the same as that of the single-mode fiber 1, which is 125 μm, the inner diameter is 93 μm, and the femtosecond laser ablation depth is 90 μm; the length of the solid-core fiber 3 is 3000 μm.
加工方法：processing methods:
步骤一、单模光纤1和空芯光纤2熔接。其中，单模光纤1为普通商用单模光纤，包层直径为125μm，纤芯直径为8μm，空芯光纤2的内径为93μm，外径为125μm。熔接前去除单模光纤1和空芯光纤2的涂覆层，熔接采用商用熔接机的手动模式，设置放电电流和放电时间，使得单模光纤1与空芯光纤2熔接牢固且空芯光纤2不出现塌陷。；Step 1, the single-mode fiber 1 and the hollow-core fiber 2 are fused. Among them, the single-mode fiber 1 is a common commercial single-mode fiber, the cladding diameter is 125 μm, the core diameter is 8 μm, the inner diameter of the hollow-core fiber 2 is 93 μm, and the outer diameter is 125 μm. Remove the coating layer of single-mode fiber 1 and hollow-core fiber 2 before welding, use the manual mode of a commercial fusion splicer, set the discharge current and discharge time, so that the fusion of single-mode fiber 1 and hollow-core fiber 2 is firm and the hollow-core fiber 2 No collapse occurs. ;
步骤二、切除多余的空芯光纤2。在显微镜的观测下，留1000μm长的空芯光纤2，多余的部分用切割刀切除；Step 2: cutting off excess hollow-core optical fiber 2 . Under microscope observation, leave a 1000 μm long hollow-core fiber 2, and cut off the excess with a cutter;
步骤三、空芯光纤2和实芯光纤3熔接。熔接前去除实芯光纤3的涂覆层，熔接采用商用熔接机的手动模式，设置放电电流和放电时间，使得空芯光纤2和实芯光纤3熔接牢固且空芯光纤2不出现塌陷。其中，实芯光纤3采用无芯光纤，即石英玻璃柱，实芯光纤3的直径为125μm；Step 3, the hollow-core optical fiber 2 and the solid-core optical fiber 3 are fused. The coating layer of the solid-core optical fiber 3 is removed before fusion, and the fusion splicing adopts the manual mode of a commercial fusion splicer, and the discharge current and discharge time are set so that the hollow-core optical fiber 2 and the solid-core optical fiber 3 are welded firmly and the hollow-core optical fiber 2 does not collapse. Wherein, the solid-core optical fiber 3 adopts a coreless optical fiber, that is, a quartz glass column, and the diameter of the solid-core optical fiber 3 is 125 μm;
步骤四、切除多余的实芯光纤3。在显微镜的观测下，留3000μm长的实芯光纤2，多余的部分用切割刀切除；Step 4: Cut off excess solid core optical fiber 3 . Under the observation of a microscope, leave a 3000 μm long solid-core optical fiber 2, and cut off the excess part with a cutter;
步骤五、端面粗糙化处理。所述实芯光纤的端面7用飞秒激光烧蚀，使其粗糙化，以减小端面反射；Step five, end surface roughening treatment. The end face 7 of the solid-core optical fiber is ablated by a femtosecond laser to make it rough, so as to reduce the end face reflection;
步骤六、飞秒激光烧蚀空芯光纤2。将所述空芯光纤2从侧面用飞秒激光烧蚀，在成像系统的观测下，通过计算机编程控制激光烧蚀的轨迹，形成悬臂梁4，其中，烧蚀区域沿空芯光纤轴向方向长600μm，宽度为125μm，深度为90μm，且烧蚀不破坏空芯光纤2与单模光纤1的熔接面以及空芯光纤2与实芯光纤3的熔接面。Step six, femtosecond laser ablation of the hollow-core optical fiber 2 . The hollow-core fiber 2 is ablated with a femtosecond laser from the side, and under the observation of the imaging system, the trajectory of the laser ablation is controlled by computer programming to form a cantilever beam 4, wherein the ablation area is along the axial direction of the hollow-core fiber The length is 600 μm, the width is 125 μm, and the depth is 90 μm, and the ablation does not damage the fusion surface of the hollow-core fiber 2 and the single-mode fiber 1 and the fusion surface of the hollow-core fiber 2 and the solid-core fiber 3 .
工作过程：work process:
本发明的工作原理是：探测光由单模光纤1导入，在单模光纤与空芯光纤的熔接面5处形成第一次菲涅尔反射，一部分光反射回单模光纤1，另一部分光透射。透射光传输至空芯光纤与实芯光纤的熔接面6处形成第二次菲尼尔反射，又有一部分光反射回单模光纤1。两处反射光形成双光束干涉，通过单模光纤1导出，构成外腔式光纤法布里-珀罗干涉仪。当传感器受到振动时，实芯光纤3作为质量块带动飞秒激光烧蚀空芯光纤后形成的悬臂梁4产生微弯，引起布里-珀罗干涉仪的腔长发生变化，导致干涉光的相位发生变化，从而实现振动传感。The working principle of the present invention is: the detection light is introduced by the single-mode optical fiber 1, and the first Fresnel reflection is formed at the welding surface 5 of the single-mode optical fiber and the hollow-core optical fiber, part of the light is reflected back to the single-mode optical fiber 1, and the other part of the light is transmission. The transmitted light is transmitted to the fusion joint 6 of the hollow-core fiber and the solid-core fiber to form a second Fresnel reflection, and part of the light is reflected back to the single-mode fiber 1 . The two reflected lights form a double-beam interference, which is exported through the single-mode fiber 1 to form an external-cavity fiber-optic Fabry-Perot interferometer. When the sensor is vibrated, the solid-core fiber 3 acts as a mass to drive the cantilever beam 4 formed by the femtosecond laser ablation of the hollow-core fiber to produce microbends, which causes the cavity length of the Bry-Perot interferometer to change, resulting in the interference of light The phase changes, enabling vibration sensing.
所述第二段空芯光纤从侧面用飞秒激光烧蚀，去掉一部分，形成悬臂梁结构。所述飞秒激光烧蚀区，沿空芯光纤轴向方向长度应小于第二段空芯光纤的长度，从而保证加工时第一段光纤与第二段空芯光纤的熔接面以及第三段光纤与第二段空芯光纤的熔接面不被污染，故可以得到反射率很高的两个光学反射面；烧蚀宽度为空芯光纤外径，即125μm；烧蚀深度为90μm。所述第三段光纤末端端面应进行粗糙化处理，以减小端面反射。The second section of the hollow-core fiber is ablated by a femtosecond laser from the side, and a part is removed to form a cantilever beam structure. The length of the femtosecond laser ablation zone along the axial direction of the hollow-core fiber should be less than the length of the second section of the hollow-core fiber, so as to ensure the fusion surface of the first section of the fiber and the second section of the hollow-core fiber and the third section of the hollow-core fiber during processing. The fusion surface between the optical fiber and the second section of hollow-core fiber is not polluted, so two optical reflection surfaces with high reflectivity can be obtained; the ablation width is the outer diameter of the hollow-core fiber, that is, 125 μm; the ablation depth is 90 μm. The end face of the third section of optical fiber should be roughened to reduce end face reflection.
所述振动传感器体积小且耐高温。实施例1中所述的高温振动传感器体积仅为φ125μm×4000μm，可在1200℃的高温环境下工作。The vibration sensor is small in size and resistant to high temperature. The high-temperature vibration sensor described in Example 1 has a volume of only φ125 μm×4000 μm, and can work in a high-temperature environment of 1200° C.
所述振动传感器干涉信号质量好。本发明所述基于空芯光纤的微纳光纤振动传感器，利用两根实芯光纤与空芯光纤熔接面形成菲涅尔反射，两个熔接点的反射光发生干涉，进而形成外腔式法布里-珀罗干涉仪。由于形成干涉的两个光学反射面(单模光纤与空芯光纤的熔接面5和空芯光纤与实芯光纤的熔接面6)是熔接前光纤切割刀切割而成，且由于空芯光纤内径(93μm)大于单模实芯光纤纤芯芯径(10μm)，故单模实芯光纤与空芯光纤熔接时，并不会影响单模实芯光纤纤芯端面的洁净度，又因为飞秒激光烧蚀时并不对这两个光学反射面产生影响，故可以保证这两个光学反射面的平整度，从而使得形成的法布里-珀罗干涉仪有明显的干涉条纹，易于解调出振动信号。The interference signal quality of the vibration sensor is good. The micro-nano optical fiber vibration sensor based on the hollow-core optical fiber of the present invention uses two solid-core optical fibers and the fusion surface of the hollow-core optical fiber to form Fresnel reflection, and the reflected light of the two fusion points interferes to form an external cavity type sensor. Ry-Perot interferometer. Because the two optical reflection surfaces that form interference (the fusion surface 5 between the single-mode fiber and the hollow-core fiber and the fusion surface 6 between the hollow-core fiber and the solid-core fiber) are cut by an optical fiber cutter before fusion, and because the inner diameter of the hollow-core fiber (93μm) is larger than the single-mode solid-core fiber core diameter (10μm), so when the single-mode solid-core fiber and the hollow-core fiber are welded, it will not affect the cleanliness of the single-mode solid-core fiber core end face, and because femtosecond Laser ablation does not affect the two optical reflective surfaces, so the flatness of the two optical reflective surfaces can be guaranteed, so that the formed Fabry-Perot interferometer has obvious interference fringes, which is easy to demodulate. vibration signal.
最后所应说明的是，以上具体实施方式仅用以说明本发明的技术方案而非限制，尽管参照较佳实施例对本发明进行了详细说明，本领域的普通技术人员应当理解，对本发明的技术方案进行修改或者等同替换，而不脱离本发明技术方案的精神和范围，其均应涵盖在本发明的权利要求范围当中。Finally, it should be noted that the above specific embodiments are only used to illustrate the technical solutions of the present invention and not limit them. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention Modifications or equivalent replacements of the technical solutions without departing from the spirit and scope of the technical solutions of the present invention shall be covered by the scope of the claims of the present invention.
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