CN106289504A - A kind of Fabry-perot optical fiber sonic probe device and preparation method thereof - Google Patents
A kind of Fabry-perot optical fiber sonic probe device and preparation method thereof Download PDFInfo
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- CN106289504A CN106289504A CN201610709537.4A CN201610709537A CN106289504A CN 106289504 A CN106289504 A CN 106289504A CN 201610709537 A CN201610709537 A CN 201610709537A CN 106289504 A CN106289504 A CN 106289504A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
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Abstract
The present invention relates to optical fiber technology, optical engineering and field of material engineering technology, be specifically related to a kind of Fabry-perot optical fiber sonic probe device and preparation method thereof.The present invention realizes the exiting parallel to outgoing beam and reflection by gradual change multimode fibre, improves the acceptance rate to graphene film reflection light;Metal-doped graphene film improves the reflectance to light.Solve and prior art increases for improving the reflectance of graphene film the problem that sensor sensitivity that film thickness causes is relatively low, it is achieved that the more high sensitivity detection to acoustic signals.The present invention has the advantages such as simple, little, highly sensitive, the electromagnetism interference of volume of making, can be applicable to safety deploy troops on garrison duty monitoring, water listen, the field such as medical science and biomedical engineering.
Description
Technical field
The present invention relates to optical fiber technology, optical engineering and field of material engineering technology, be specifically related to a kind of Fabry-perot optical fiber sound
Ripple probe apparatus and preparation method thereof, based on metal-doped graphene film.
Background technology
Fabry-perot optical fiber chamber, can as a kind of highly important optical texture, owing to its volume is little, low cost, it is easy to integrated
The plurality of advantages of long-distance transmissions signal be widely used in precision instrument, commercial production, communicate, the field such as sensing.
Traditional Fabry-perot optical fiber sonic probe is usually and is made up of glass capillary, single-mode fiber and vibrating diaphragm, capillary
Glass tubing one end plates vibrating diaphragm, and the other end inserts optical fiber, fiber end face and two reflections of vibrating diaphragm composition Fa-Po cavity
Face, air is as cavity medium.For the optical fiber sonic probe of this structure, just affect two key factors of detectivity
It is reflectance and the thickness of vibrating diaphragm.Selection currently for vibrating diaphragm generally has organic membrane and metal film etc..But this
It is the thinnest that the vibrating diaphragm thickness of a little types is all difficult to do, and complex manufacturing process, technological requirement is high.This is to a great extent
The sensitivity limiting sonic probe improves and batch production.Graphene is led as the thinnest, maximum intensity, the conduction having now been found that
A kind of novel nano-material that hot property is the strongest, has been widely used in every field.Pressure sensing for Graphene
Device, Jin Wei et al. made Intrinsical graphene film Fabry-perot optical fiber interference sensor and (has seen: Jun Ma, Wei in 2012
Jin, Hoi Lut Ho, etal.High-sensitivity fiber-tip pressure sensor withgraphene
Diaphragm [J] .Optics letters, 2012,13 (37): 2493-2495.), and made extrinsic in 2014 years
Type graphene film Fabry-perot optical fiber interference sensor (sees: Jun Ma, Wei Jin, HaifengXuan, etal.Fiber-optic
ferrule-top nanomechanical resonator with multilayer graphene film[J].Optics
Letters, 2014,16 (39): 4769-4772.), single-mode fiber end face that they are and graphene film as reflecting surface,
Emergent light has the biggest outgoing angle of divergence at the end face of single-mode fiber so that the light that graphene film reflects only has sub-fraction
Can return in single-mode fiber, cause converge two reflected light beam intensities unequal and make intetference-fit strengthening not
Height, in order to improve the contrast of interference fringe, employing multi-layer graphene thin film is to improve the reflectance of graphene film, but is as
The increase of graphene film thickness, necessarily causes pressure or the reduction of acoustic signals detectivity to external world.The number of applying for a patent be
201310564209.6, application publication number be Chinese invention patent " a kind of optical fiber based on graphene film of CN103557929A
Method amber sound pressure sensor manufacture method and measuring method, device " disclose a kind of Fabry-perot optical fiber acoustic pressure based on graphene film
Sensor, structure therein there is also same problem.
Summary of the invention
For above-mentioned existing problems or deficiency, for solving: how to improve the acceptance rate to graphene film reflection light and
Improve the reflectance of graphene film so that intetference-fit strengthening increases, thus the thickness reducing graphene film improves
Detectivity.The invention provides a kind of Fabry-perot optical fiber sonic probe device and preparation method thereof.
A kind of Fabry-perot optical fiber sonic probe device, including quartz glass sleeve, single-mode fiber, gradual change multimode fibre and graphite
Alkene thin film.
Described single-mode fiber and gradual change multimode fibre are fused into an entirety and are inserted in quartz glass sleeve pipeline, quartz
Glass bushing duct size adapts with fibre diameter size;One end of quartz glass sleeve covers a layer graphene thin film, separately
Optical fiber is inserted in one end, and the fiber end face being inserted in pipeline is formed with graphene film and interferes Fa-Po cavity;This fiber end face is
Gradual change multimode fibre, gradual change multimode fibre length 1200-1300 micron.The thickness of graphene film is 1-10 nanometer.
Described graphene film is single-layer metal doped graphene thin film.
Described single-mode fiber core diameter 9 microns, cladding diameter 125 microns;Gradual change multimode fibre core diameter 62.5 is micro-
Rice, cladding diameter 125 microns, the self-focusing cycle of gradual change multimode fibre is 500 microns.
Its manufacture method, comprises the following steps:
Step 1, by one section of gradual change multimode fibre of single-mode fiber one end welding;Single-mode fiber core diameter 9 microns, covering is straight
125 microns of footpath, gradual change multimode fibre core diameter 62.5 microns, cladding diameter 125 microns, the self-focusing cycle is 500 microns;
Step 2, light pricker step 1 obtained, cut flat with at gradual change multimode fibre length 1200-1300 micron, makes one
Individual reflecting surface, is then inserted from quartz glass sleeve one end with fiber reflection face;
Step 3, quartz glass sleeve other end step 2 obtained cover last layer graphene film, make fiber end face
Formed with graphene film and interfere Fa-Po cavity.
In the present invention, gradual change multimode fibre and metal-doped graphene film serve most important effect, and gradual change is many
Mode fiber realizes the exiting parallel to outgoing beam and reflection, improves the acceptance rate to graphene film reflection light;Metal-doped
Graphene film improve the reflectance to light.
The graphene film of the present invention has higher reflectance by metal-doped achieving to optical signal, and reflectance carries
High more than one times, the fiber end face in this device uses gradual change multimode fibre end face, utilizes the self-focusing of gradual change multimode fibre
Effect realizes the exiting parallel to light and reflection, improves the acceptance rate to graphene film reflection light, and acceptance rate improves two
More than Bei.This device passes through this improvement of 2, it is achieved that the enhancing to graphene film reflected light signal, with not improvement
Conventional apparatus is compared, and the method Fabry-Parot interferent fringe contrast of this device improves more than 10dB, solves in prior art as improving
The reflectance of graphene film and increase the problem that sensor sensitivity that film thickness causes is relatively low, it is achieved that to acoustic signals more
High sensitivity detection.
In sum, the present invention has the advantages such as simple, little, highly sensitive, the electromagnetism interference of volume of making, can be applicable to peace
Entirely deploy troops on garrison duty monitoring, water listen, the field such as medical science and biomedical engineering.
Accompanying drawing explanation
Fig. 1 is the structural representation that the present invention pops one's head in;
Fig. 2 is that the fiber end face of the present invention makes structural representation;
Fig. 3 is the structure chart of the present invention;
Fig. 4 is conventional junction composition;
Fig. 5 is the fabrication processing of present configuration;
Fig. 6 is that metal-silver-doped Graphene and the tradition of the present invention undopes Graphene contrast schematic diagram;
Fig. 7 is that two-beam interference striped experimental result of the present invention contrasts schematic diagram with traditional structure experimental result;
Fig. 8 is signal demodulating system figure based on acoustic detector of the present invention;
Fig. 9 is that the present invention pops one's head in acoustic detection experimental result schematic diagram;
Reference: 1-single-mode fiber, 2-gradual change multimode fibre, 3-optical fiber splicer, 4-optical fiber cutter, 5-argent
Doped graphene thin film, 6-undopes graphene film, 7-quartz glass sleeve, 8-ultraviolet glue, 9-metallic, 10-light source,
11-circulator, 12-wavelength division multiplexer, 13-bonder, 14-photodetector, 15-data collecting card, 16-computer, 17-sound
Ripple is popped one's head in.
Detailed description of the invention
Below in conjunction with the accompanying drawings and specific embodiment the invention will be further described:
Fig. 1 is the installation drawing of our sonic probe, single-mode fiber and one section of gradual change multimode fibre welding, gradual change multimode fibre
End face forms two light reflection surfaces with graphene film, forms method Fabry-Parot interferent chamber, and quartz glass sleeve plays fixing and collimated light
Fine effect.Wherein, single-mode fiber core diameter 9 microns, cladding diameter 125 microns.Gradual change multimode fibre core diameter 62.5
Micron, cladding diameter 125 microns, the self-focusing cycle of gradual change multimode fibre is 500 microns, and gradual change multimode fibre length 1250 is micro-
Rice.Fig. 2 is the manufacture method figure of this device fiber end face, first many with 4 section single-mould fibers 1 of optical fiber cutter and one section of gradual change
Mode fiber 2 end face cuts flat with, and gets up with 3 two sections of fused fiber splices of heat sealing machine, cuts at gradual change multimode fibre other end cutter 4
Flat, retain a length of 1250 microns of gradual change multimode fibre so that the end face of gradual change multimode fibre is placed exactly in a cycle
Centre, as shown in Figure 2.
Fig. 3 is the structure chart of the present invention, and it compares with Fig. 4 conventional junction composition, it will be seen that traditional structure
In, emergent light, when outgoing single-mode fiber end face, has the biggest angle of divergence, so that fiber end face is anti-to graphene film
The optical signal acceptance rate being emitted back towards is the lowest, causes intetference-fit strengthening the least, is unfavorable for the raising of detectivity.At this
In bright structure, during light outgoing gradual change multimode fibre, with parallel light emergence, there is no the angle of divergence, so that fiber end face is to stone
Ink alkene light reflecting thin film has the highest acceptance rate, adds the contrast of interference fringe.With traditional graphene film, single-mode optics
The method Fabry-Parot interferent chamber of fine end face composition is compared, and optical signal is had by the graphene film in this device by metal-silver-doped achieving
Having higher reflectance, reflectance is more than doubled, and the fiber end face in this device uses gradual change multimode fibre end face, profit
Realize the exiting parallel to light and reflection with the self-focusing effect of gradual change multimode fibre, improve and graphene film reflection light is connect
By rate, compared with traditional single-mode fiber, accept efficiency and double.This device passes through this improvement of 2, it is achieved
Enhancing to graphene film reflected light signal, compared with there is no the conventional apparatus improved, the method Fabry-Parot interferent striped of this device
Contrast improves more than 10dB, solves in prior art and increases film thickness cause for improving the reflectance of graphene film
The relatively low problem of sensor sensitivity, it is achieved that the more high sensitivity detection to acoustic signals.
Fig. 5 is the fabrication processing of present configuration.Single-mode fiber 1 and gradual change multimode fibre 2 are cut flat with welding, gradually
Become multimode fibre 2 other end and cut flat with in the quartz glass sleeve 7 that insertion is clean, in one end that optical fiber inserts, make list by ultraviolet glue 8
Mode fiber 1 and quartz glass sleeve 7 seal fixing, then metal-silver-doped on the other end of quartz glass sleeve 7 covers
Graphene film 5.
Fig. 6 is that metal-silver-doped Graphene and the tradition of the present invention undopes Graphene contrast schematic diagram.By high temperature also
Former graphene oxide silver ammonia mixed solution, makes metallic silver corpuscle be evenly distributed in graphene film surface.After metal-silver-doped
Graphene film light is had higher reflectance.Compared to not having the conventional apparatus improved to compare, the method amber of this device is done
Relate to fringe contrast and improve more than 10dB, as shown in Figure 7.
Fig. 8 gives the three wavelength signals demodulating systems for the demodulation of this structure probe signal.This system by light source 10,
Circulator 11, wavelength division multiplexer 12, bonder 13, photodetector 14, data collecting card 15, computer 16, sonic probe 17
Deng composition.Light source 10 exports optical signal, is reflected back circulator 11 through probe 17 and enters wavelength division multiplexer 12, then through bonder
13 are reflected back three specific wavelength by three FBG, and the phase place of these three wavelength is mutually 120 degree.Receive through photodetector 14
Signal is sent in data collecting card 15 and is carried out phase sensitive detection, carries out phase change analysis with simulation software Labview, the most available
The fibre-optical probe 17 detection information to sound wave.It is the measurement result to different frequency of sound waves of popping one's head in as shown in Figure 9.
Claims (6)
1. a Fabry-perot optical fiber sonic probe device, including quartz glass sleeve, single-mode fiber, gradual change multimode fibre and Graphene
Thin film, it is characterised in that: single-mode fiber and gradual change multimode fibre are fused into an entirety and are inserted in quartz glass sleeve pipeline,
Quartz glass sleeve duct size adapts with fibre diameter size;It is thin that one end of quartz glass sleeve covers a layer graphene
Film, the other end inserts optical fiber, and the fiber end face being inserted in pipeline is formed with graphene film and interferes Fa-Po cavity;This optical fiber end
Face is gradual change multimode fibre, gradual change multimode fibre length 1200-1300 micron, and graphene film thickness is 1-10 nanometer.
2. Fabry-perot optical fiber sonic probe device as claimed in claim 1, it is characterised in that: described graphene film is metal-doped
Graphene film.
3. Fabry-perot optical fiber sonic probe device as claimed in claim 2, it is characterised in that: described graphene film doping metals is
Silver.
4. Fabry-perot optical fiber sonic probe device as claimed in claim 1, it is characterised in that: described graphene film is mono-layer graphite
Alkene thin film.
5. Fabry-perot optical fiber sonic probe device as claimed in claim 1, it is characterised in that: described single-mode fiber core diameter 9 is micro-
Rice, cladding diameter 125 microns;Gradual change multimode fibre core diameter 62.5 microns, cladding diameter 125 microns, gradual change multimode fibre
The self-focusing cycle be 500 microns.
6. the manufacture method of Fabry-perot optical fiber sonic probe device as claimed in claim 1, comprises the following steps:
Step 1, by one section of gradual change multimode fibre of single-mode fiber one end welding;Single-mode fiber core diameter 9 microns, cladding diameter
125 microns, gradual change multimode fibre core diameter 62.5 microns, cladding diameter 125 microns, the self-focusing cycle is 500 microns;
Step 2, light pricker step 1 obtained, cut flat with at gradual change multimode fibre length 1200-1300 micron, makes one instead
Penetrate face, be then inserted from quartz glass sleeve one end with fiber reflection face;
Step 3, quartz glass sleeve other end step 2 obtained cover last layer graphene film, make fiber end face and stone
Ink alkene thin film is formed interferes Fa-Po cavity.
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Cited By (8)
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CN106908092A (en) * | 2017-04-12 | 2017-06-30 | 北京航空航天大学 | A kind of graphene film Fabry-perot optical fiber resonator and its exciting/pick-up detection method |
CN108151866A (en) * | 2017-12-22 | 2018-06-12 | 电子科技大学 | A kind of Fabry-perot optical fiber sonic probe and signal demodulating system |
CN110057438A (en) * | 2019-04-16 | 2019-07-26 | 中国地质大学(武汉) | Embedded double-layer sensitive film and preparation method for FP chamber optical fiber acoustic sensor |
WO2019186448A1 (en) * | 2018-03-29 | 2019-10-03 | Khalifa University of Science and Technology | Optical fiber sensor for salinity and temperature measurement |
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63302328A (en) * | 1987-06-03 | 1988-12-09 | Matsushita Electric Ind Co Ltd | Acoustic sensor |
JP2005241431A (en) * | 2004-02-26 | 2005-09-08 | Tokyo Gas Co Ltd | Optical fiber interference type sensor |
CN101825479A (en) * | 2010-04-15 | 2010-09-08 | 电子科技大学 | Method for manufacturing composite fiber F-P sensor based on self-focusing effect |
CN103234620A (en) * | 2013-04-28 | 2013-08-07 | 哈尔滨理工大学 | Extrinsic optical-fiber F-B (fabry-perot) acoustic-emission sensor, ultrasonic detector containing sensor and use method of detector |
CN103471701A (en) * | 2013-09-04 | 2013-12-25 | 华中科技大学 | Optical fiber acoustic sensor and optical fiber acoustic detection method |
CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
CN103647210A (en) * | 2013-12-13 | 2014-03-19 | 复旦大学 | Gradual change waveguide based graphene saturable absorber and preparation method thereof |
CN105180980A (en) * | 2015-10-14 | 2015-12-23 | 南京信息工程大学 | Symmetrical all-fiber Fabry-Perot sensor and manufacturing method thereof |
-
2016
- 2016-08-24 CN CN201610709537.4A patent/CN106289504B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63302328A (en) * | 1987-06-03 | 1988-12-09 | Matsushita Electric Ind Co Ltd | Acoustic sensor |
JP2005241431A (en) * | 2004-02-26 | 2005-09-08 | Tokyo Gas Co Ltd | Optical fiber interference type sensor |
CN101825479A (en) * | 2010-04-15 | 2010-09-08 | 电子科技大学 | Method for manufacturing composite fiber F-P sensor based on self-focusing effect |
CN103234620A (en) * | 2013-04-28 | 2013-08-07 | 哈尔滨理工大学 | Extrinsic optical-fiber F-B (fabry-perot) acoustic-emission sensor, ultrasonic detector containing sensor and use method of detector |
CN103471701A (en) * | 2013-09-04 | 2013-12-25 | 华中科技大学 | Optical fiber acoustic sensor and optical fiber acoustic detection method |
CN103528665A (en) * | 2013-09-29 | 2014-01-22 | 中国电子科技集团公司第二十七研究所 | Novel Fabry-Perot interference MEMS (Micro Electro Mechanical System) sound wave sensor |
CN103557929A (en) * | 2013-11-14 | 2014-02-05 | 北京航空航天大学 | Optical fiber Fabry-Perot sound pressure sensor manufacturing method based on graphene membrane and measuring method and device thereof |
CN103647210A (en) * | 2013-12-13 | 2014-03-19 | 复旦大学 | Gradual change waveguide based graphene saturable absorber and preparation method thereof |
CN105180980A (en) * | 2015-10-14 | 2015-12-23 | 南京信息工程大学 | Symmetrical all-fiber Fabry-Perot sensor and manufacturing method thereof |
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CN106908092A (en) * | 2017-04-12 | 2017-06-30 | 北京航空航天大学 | A kind of graphene film Fabry-perot optical fiber resonator and its exciting/pick-up detection method |
CN108151866A (en) * | 2017-12-22 | 2018-06-12 | 电子科技大学 | A kind of Fabry-perot optical fiber sonic probe and signal demodulating system |
WO2019186448A1 (en) * | 2018-03-29 | 2019-10-03 | Khalifa University of Science and Technology | Optical fiber sensor for salinity and temperature measurement |
US11346770B2 (en) | 2018-03-29 | 2022-05-31 | Khalifa University of Science and Technology | Optical fiber sensor for salinity and temperature measurement |
CN110553713A (en) * | 2018-05-30 | 2019-12-10 | 中国科学院电子学研究所 | Optical fiber ultrasonic sensor |
CN110057438A (en) * | 2019-04-16 | 2019-07-26 | 中国地质大学(武汉) | Embedded double-layer sensitive film and preparation method for FP chamber optical fiber acoustic sensor |
CN110057438B (en) * | 2019-04-16 | 2023-08-29 | 中国地质大学(武汉) | Embedded double-layer sensitive film for FP cavity optical fiber acoustic sensor and preparation method |
CN111239909A (en) * | 2020-02-14 | 2020-06-05 | 北京航空航天大学 | Graphene film optical fiber F-P resonator with photo-thermal stress regulation and control function and manufacturing method thereof |
CN111239909B (en) * | 2020-02-14 | 2020-11-27 | 北京航空航天大学 | Graphene film optical fiber F-P resonator with photo-thermal stress regulation and control function and manufacturing method thereof |
CN111366233A (en) * | 2020-04-17 | 2020-07-03 | 云南电网有限责任公司电力科学研究院 | Optical fiber Fabry-Perot acoustic sensor and preparation method thereof |
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