CN105136336B - A kind of optical fiber air ring cavity temperature sensor based on femto-second laser - Google Patents
A kind of optical fiber air ring cavity temperature sensor based on femto-second laser Download PDFInfo
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Abstract
Description
技术领域technical field
本发明提供了基于飞秒激光器的光纤空气环腔温度传感器,属于光纤传感技术领域。The invention provides an optical fiber air ring cavity temperature sensor based on a femtosecond laser, belonging to the technical field of optical fiber sensing.
背景技术Background technique
马赫曾德干涉仪广泛应用于传感领域中,它是运用双光束干涉原理制作而成。传统的马赫曾德干涉仪需要两根长度相同的单模光纤,除了需要测量的物理量以外容易受到如湿度等其他物理量的影响。由此可见,传统的马赫曾德干涉仪制作困难。于是,全光纤马赫曾德干涉仪被提出来。目前的全光纤马赫曾德干涉仪主要是基于FBG,LPFG,PCF,光纤拉椎,光纤错位连接等结构构成,虽然灵敏度很高,但是这些马赫曾德干涉仪构成的温度传感器尺寸大,不易于重复利用。为了解决以上的问题,一种新型的全光纤马赫曾德干涉仪被提出,这种温度传感器的制作使用到了飞秒激光器,飞秒激光器用于精密微纳加工,它在与物质相互作用时,可实现超高分辨率,超高精度,从而达到纳米尺度的加工制造。这种全光纤的马赫曾德干涉仪具有灵敏度高,结构微小等优点。The Mach-Zehnder interferometer is widely used in the field of sensing, and it is made by using the principle of double-beam interference. The traditional Mach-Zehnder interferometer requires two single-mode optical fibers of the same length, which are easily affected by other physical quantities such as humidity in addition to the physical quantities that need to be measured. It can be seen that the traditional Mach-Zehnder interferometer is difficult to manufacture. Therefore, the all-fiber Mach-Zehnder interferometer was proposed. The current all-fiber Mach-Zehnder interferometer is mainly based on the structure of FBG, LPFG, PCF, optical fiber puller, optical fiber dislocation connection, etc. Although the sensitivity is high, the temperature sensor composed of these Mach-Zehnder interferometers is large in size and difficult to reuse. In order to solve the above problems, a new type of all-fiber Mach-Zehnder interferometer is proposed. The fabrication of this temperature sensor uses a femtosecond laser, which is used for precision micro-nano processing. When it interacts with matter, It can realize ultra-high resolution and ultra-high precision, so as to achieve nanoscale processing and manufacturing. This all-fiber Mach-Zehnder interferometer has the advantages of high sensitivity and tiny structure.
基于飞秒激光器的光纤空气环腔温度传感器中的空气环腔结构使得原来仅在纤芯中传输的光分别以纤芯模和空气环腔模的形式进行传输并发生干涉。当使用该传感器对外界环境温度进行测量时,每次改变温度都会使干涉条纹发生漂移。这是由于空气环腔模和纤芯模对温度变化的响应程度不同,从而导致原来的光程差发生改变。随着光程差的改变,干涉条纹就会有所改变。当温度经过一系列的变化之后,即可以在光谱仪上观察到与之相对应的一系列的干涉条纹。在干涉条纹的某些特征位置,比如干涉峰或干涉谷,可以看到极值所位于的波长发生漂移,通过监测干涉光谱的漂移量可以实现温度测量。The air ring cavity structure in the fiber air ring cavity temperature sensor based on the femtosecond laser makes the light that originally only transmitted in the fiber core transmit and interfere in the form of the core mode and the air ring cavity mode respectively. When the sensor is used to measure the temperature of the external environment, the interference fringes will drift every time the temperature is changed. This is because the air ring cavity mode and the fiber core mode respond differently to temperature changes, which causes the original optical path difference to change. As the optical path difference changes, the interference fringes will change. After a series of temperature changes, a series of corresponding interference fringes can be observed on the spectrometer. In some characteristic positions of the interference fringes, such as interference peaks or interference valleys, it can be seen that the wavelength where the extreme value is located has shifted, and temperature measurement can be realized by monitoring the drift of the interference spectrum.
发明内容Contents of the invention
本发明的目的在于提供一种基于飞秒激光器的光纤空气环腔温度传感器。该装置能够将待测温度的变化量转化为探测信号的波长漂移量。具有高灵敏度,结构微小,易于重复使用等优点。The object of the present invention is to provide an optical fiber air ring cavity temperature sensor based on a femtosecond laser. The device can convert the variation of the temperature to be measured into the wavelength drift of the detection signal. It has the advantages of high sensitivity, small structure and easy repeated use.
本发明通过以下技术方案实现:The present invention is realized through the following technical solutions:
一种基于飞秒激光器的光纤空气环腔温度传感器,由入射光纤(1)、空气环腔结构(2)、出射光纤(3)组成;空气环腔结构(2)的两端分别与入射光纤(1)和出射光纤(3)相连接;入射光纤(1)和空气环腔结构(2)与出射光纤(3)共同构成全光纤马赫曾德干涉仪。A fiber optic air ring cavity temperature sensor based on a femtosecond laser, consisting of an incident optical fiber (1), an air ring cavity structure (2), and an outgoing fiber optic (3); the two ends of the air ring cavity structure (2) are respectively connected to the incident optical fiber (1) is connected to the outgoing optical fiber (3); the incoming optical fiber (1), the air ring cavity structure (2) and the outgoing optical fiber (3) together constitute an all-fiber Mach-Zehnder interferometer.
所述的一种基于飞秒激光器的光纤空气环腔温度传感器,其特征在于:入射光纤(1)、出射光纤(3)均可采用G.652单模光纤,入射光纤(1)和出射光纤(5)长度为20~40cm。A kind of optical fiber air ring cavity temperature sensor based on femtosecond laser is characterized in that: the incident optical fiber (1) and the outgoing optical fiber (3) can all adopt G.652 single-mode optical fiber, and the incident optical fiber (1) and the outgoing optical fiber (5) The length is 20-40 cm.
所述的一种基于飞秒激光器的光纤空气环腔温度传感器,其特征在于:空气环腔结构(2)所使用的光纤为可采用G.652单模光纤,长度为50um~100um,空气环腔结构(2)的环腔外圆半径为4um~7um,内圆半径为2um~5um。A kind of optical fiber air ring cavity temperature sensor based on femtosecond laser is characterized in that: the optical fiber used in the air ring cavity structure (2) can adopt G.652 single-mode fiber, the length is 50um~100um, the air ring cavity The outer circle radius of the cavity structure (2) is 4um-7um, and the inner circle radius is 2um-5um.
本发明的工作原理是:当宽带光源发出的光经过入射光纤到达空气环腔时,由于入射光纤的纤芯直径比空气环腔结构的这段光纤的纤芯直径粗。这样原本在纤芯中传输的光被分成两部分,有一部分光进入空气环腔中,另一部分光将继续沿着纤芯传输,当到达空气环腔结构终点时,在空气环腔中传输的光将与在纤芯中传输的光发生干涉,最后经过出射光纤到达光谱仪。The working principle of the present invention is: when the light emitted by the broadband light source reaches the air ring cavity through the incident fiber, the core diameter of the incident fiber is thicker than that of the section of the fiber in the air ring cavity structure. In this way, the light originally transmitted in the fiber core is divided into two parts, one part of the light enters the air ring cavity, and the other part of the light will continue to transmit along the fiber core. When reaching the end of the air ring cavity structure, the light transmitted in the air ring cavity The light will interfere with the light propagating in the core, and finally travel through the exit fiber to the spectrometer.
其中纤芯与空气环腔之间传输的光发生了干涉,简单地说,纤芯和空气环腔之间的干涉可以用已知的公式得:The light transmitted between the fiber core and the air ring cavity interferes. Simply put, the interference between the fiber core and the air ring cavity can be obtained by a known formula:
其中Icore和Icavity分别是从纤芯和空气环腔结构中传出光的光强,λ为入射光波长,L是空气环腔的长度,是纤芯模与空气环腔模之间的有效折射率差,是干涉的初始相位。由于L是常数,那么这个马赫曾德干涉仪的温度灵敏度的公式为Among them, I core and I cavity are the light intensity of the light transmitted from the fiber core and the air ring cavity structure respectively, λ is the wavelength of the incident light, L is the length of the air ring cavity, is the effective refractive index difference between the core mode and the air ring cavity mode, is the initial phase of the interference. Since L is a constant, the formula for the temperature sensitivity of this Mach-Zehnder interferometer is
其中和分别是纤芯和空气介质折射率的温度系数,不同的温度下空气环腔的有效折射率保持不变,因此纤芯折射率的温度系数决定了马赫曾德干涉仪的温度灵敏度。in and are the temperature coefficients of the refractive index of the fiber core and the air medium, respectively. The effective refractive index of the air ring cavity remains unchanged at different temperatures, so the temperature coefficient of the fiber core refractive index determines the temperature sensitivity of the Mach-Zehnder interferometer.
当使用该传感器对外界温度进行测量时,每次改变外界温度,由于空气环腔模和纤芯模对温度的响应程度不同,使得空气环腔模与纤芯模的光程差发生改变,从而改变了空气环腔模与纤芯模之间的相位差,干涉条纹发生漂移,通过监测干涉光谱波长漂移量可以还原待测信号。When the sensor is used to measure the external temperature, every time the external temperature is changed, the optical path difference between the air ring cavity mode and the fiber core mode changes due to the different response degrees of the air ring cavity mode and the fiber core mode to the temperature, thus The phase difference between the air ring cavity mode and the fiber core mode is changed, and the interference fringe drifts, and the signal to be measured can be restored by monitoring the wavelength drift of the interference spectrum.
本发明的有益效果是:该温度传感器是基于空气环腔结构的内连马赫-曾德干涉仪制作而成的。纤芯中传输的光被分成两部分,一部分光进入空气环腔,另一部分光将继续沿着烧损的纤芯传输,当到达空气环腔结构终点时,在空气环腔中传输的光将与在纤芯中传输的光发生干涉。当改变传感器的外界温度时,对应的干涉光谱将会漂移。该传感器采用内连的马赫-曾德干涉仪,稳定性更好,灵敏度更高,并且不易受到外界折射率变化的影响。The beneficial effect of the present invention is that: the temperature sensor is manufactured based on an interconnected Mach-Zehnder interferometer with an air ring cavity structure. The light transmitted in the fiber core is divided into two parts, one part of the light enters the air ring cavity, and the other part of the light will continue to transmit along the burnt fiber core. When reaching the end of the air ring cavity structure, the light transmitted in the air ring cavity will Interference with light propagating in the core. When changing the ambient temperature of the sensor, the corresponding interference spectrum will drift. The sensor uses an internally connected Mach-Zehnder interferometer, which has better stability, higher sensitivity, and is less susceptible to external refractive index changes.
附图说明Description of drawings
图1是本发明的基于飞秒激光器的光纤空气环腔温度传感器示意图;Fig. 1 is the schematic diagram of the fiber-optic air ring cavity temperature sensor based on femtosecond laser of the present invention;
具体实施方式Detailed ways
下面结合附图及实施实例对本发明作进一步描述:Below in conjunction with accompanying drawing and embodiment example, the present invention will be further described:
参见附图1,一种基于飞秒激光器的光纤空气环腔温度传感器,由入射光纤(1)、空气环腔结构(2)、出射光纤(3)组成;空气环腔结构(2)的两端分别与入射光纤(1)和出射光纤(3)相连接;入射光纤(1)与空气环腔结构(2)与出射光纤(3)构成全光纤马赫曾德干涉仪。空气环腔结构(2)的制作过程如下:用飞秒激光器在光纤端面进行打孔,将激光光斑直径调到2um左右,在包层里沿着纤芯打一圈小孔,每个小孔之间有交叉。同时调节飞秒激光器的强度和聚焦点远近从而控制小孔的深度。因此,在纤芯与包层交界处形成环形空气腔。打完孔后,由于环形空气腔的内表面不够光滑,于是使用HF腐蚀光纤,使其平滑。接着将空气环腔结构(2)的端面分别与入射光纤(1)和出射光纤(3)相连。Referring to accompanying drawing 1, a kind of fiber-optic air ring cavity temperature sensor based on femtosecond laser is made up of incident optical fiber (1), air ring cavity structure (2), outgoing optical fiber (3); two of air ring cavity structure (2) The ends are respectively connected with the incident optical fiber (1) and the outgoing optical fiber (3); the incident optical fiber (1), the air ring cavity structure (2) and the outgoing optical fiber (3) form an all-fiber Mach-Zehnder interferometer. The manufacturing process of the air ring cavity structure (2) is as follows: use a femtosecond laser to drill holes on the end face of the optical fiber, adjust the laser spot diameter to about 2um, and drill a circle of small holes along the fiber core in the cladding, each small hole There is a cross in between. At the same time, the intensity of the femtosecond laser and the distance of the focal point are adjusted to control the depth of the small hole. Therefore, an annular air cavity is formed at the interface between the core and the cladding. After the hole is drilled, because the inner surface of the annular air cavity is not smooth enough, HF is used to corrode the optical fiber to make it smooth. Next, the end faces of the air ring cavity structure (2) are respectively connected with the incident optical fiber (1) and the outgoing optical fiber (3).
本发明装置的工作方式为:将温度传感器的一端接宽带光源,另一端接光谱仪。当宽带光源发出的光经入射光纤到达空气环腔结构时,原本在纤芯中传输的光被分为两部分,一部分进入空气环腔,另一部分光将继续沿着纤芯传输,当到达空气环腔结构终点时,在空气环腔中传播的光将与在烧损纤芯中传输的光发生干涉。当改变传感器的外界温度时,对应的干涉光谱将会漂移,从而可以得出该传感器的灵敏度。The working mode of the device of the invention is as follows: one end of the temperature sensor is connected to a broadband light source, and the other end is connected to a spectrometer. When the light emitted by the broadband light source reaches the air ring cavity structure through the incident fiber, the light originally transmitted in the fiber core is divided into two parts, one part enters the air ring cavity, and the other part will continue to transmit along the fiber core. At the end of the ring cavity structure, the light propagating in the air ring cavity will interfere with the light propagating in the burned core. When changing the external temperature of the sensor, the corresponding interference spectrum will drift, so that the sensitivity of the sensor can be obtained.
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