CN107247037A - Molecular state organic pollutant monitoring sensor based on single mode multimode coreless fiber structure - Google Patents
Molecular state organic pollutant monitoring sensor based on single mode multimode coreless fiber structure Download PDFInfo
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- CN107247037A CN107247037A CN201710631796.4A CN201710631796A CN107247037A CN 107247037 A CN107247037 A CN 107247037A CN 201710631796 A CN201710631796 A CN 201710631796A CN 107247037 A CN107247037 A CN 107247037A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
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Abstract
The invention discloses a kind of molecular state organic pollutant monitoring sensor based on single mode multimode coreless fiber structure, including：Single-mode fiber；Multimode fibre, its welding with single-mode fiber；The eccentric welding of the input of the coreless fiber of Surface coating sol-gel silica film, its one end and multimode fibre；Coreless fiber at the non-overlapping position after the eccentric welding of multimode fibre with coating the first metallic diaphragm, and the second metallic diaphragm is adhered in its other end.On-line monitoring sensor is placed in monitored environment, when molecular state organic pollution concentration changes, surface film refractive index can be caused to change, condition of resonance is caused to change so as to cause whole waveguiding structure effective refractive index to change, an interfere arm light path is changed causes whole Waveguide interference condition to change, last spectrometer monitoring output signal wavelength, by the way that external environment condition molecular state organic pollution concentration counter can be pushed away to output signal progress processing.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, and in particular to a kind of point based on single mode-multimode-coreless fiber structure
Sub- state organic pollution monitors sensor on-line.
Background technology
With the fast development of modern technologies, to the environmental requirement more and more higher tested and produced.Molecular state pollutant pair
Semiconductor production, medical treatment, space industry particularly device of high power laser etc. has quite very big influence.One side molecule
State organic pollution has a strong impact on semiconductor yield；Another aspect molecular state organic pollution produces poly- under light laser effect
Collection, causes the reduction of optical element surface damage threshold, so as to influence the load capacity of whole device.Therefore to optical element
Manufacture, cleaning, installation and material have carried out strict regulation, to ensure laser aid in installation, running as far as possible
Reduce molecular state organic pollution.In selection, cleaning, installation and running clean control be it is far from being enough, mainly due to
Device of high power laser is huge and complicated vacuum system, it is necessary to substantial amounts of adhesive, lubricant, high polymer material, packing ring
Etc..In the case of low vacuum, these materials can produce volatilizable molecular state organic pollution, can aggravate under strong illumination
On the one hand these volatilizations, these pollutants are deposited on optical element surface formation film, influence beam quality, and an another aspect absorbs
Light energy produces microburst, causes optical element threshold value to decline.To ensure the continual and steady work of high power laser system, it is necessary to
Molecular state organic pollution in laser aid is monitored on-line.The measuring method of current organic pollution mainly has following several
The mode of kind：(1) gas chromatography-mass spectrometry.This method needs to use the degree of accuracy high, but needs first with clean gas production tank to quilt
Measuring environment carries out gas collecting, and needs professional to be measured using gas chromatograph-mass spectrometer (GC-MS), and this kind of method is taken
When, it is laborious, analysis time is longer, while on-line monitoring and vacuum environment monitoring requirements can not be realized.(2) quartz crystal microbalance
Method.This method is a kind of resonant mode measuring instrument, coordinates sensitive material to carry out the measurement of micro- quality, with low cost.But by
It is body resonant mode sensing in this method, is limited to resonant frequency, its precision is nanogram magnitude, while this method realizes distributed pass
Sense is more difficult.(3) surface acoustic wave method.This method resonant frequency is hundred MHz magnitudes, can obtain comparing quartz crystal microbalance
Fa Genggao precision, the surface area larger (several square millimeters) of this method and high to lithography requirement.With other detection sides
Method is compared, and this kind of detection method, which has, avoids secondary pollution, can monitor on-line, sensitivity is higher, be easy to extend, be easy to it is integrated and
The advantages of being easily attached with ordinary optic fibre, is particularly suitable in sensory field application.
The content of the invention
It is an object of the invention to solve at least the above and/or defect, and provide at least will be described later excellent
Point.
Single mode-multimode-centreless is based on there is provided one kind according to object of the present invention and further advantage in order to realize
The molecular state organic pollution on-line monitoring sensor of optical fiber structure, including：
Single-mode fiber, it is used for the input and output of optical signal；
Multimode fibre, the output end welding without acceptance of persons of its input and the single-mode fiber；
Coreless fiber, its one end and the eccentric welding of output end of the multimode fibre；The surface attachment of the coreless fiber
Sol-gel silica film layer；
Wherein, at the non-overlapping position after the eccentric welding of the coreless fiber and multimode fibre the first metallic diaphragm of attachment with
The optical signal reflected in multimode fibre；The other end of the coreless fiber adheres to the second metallic diaphragm to reflect in coreless fiber
Optical signal.
Preferably, the diameter of the single-mode fiber be 125 μm, core diameter be 8~10 μm.
Preferably, the length of the multimode fibre be 3~10mm, a diameter of 125 μm, core diameter be 50~125 μm.
Preferably, the length of the coreless fiber be 3~10mm, a diameter of 20~100 μm.
Preferably, the sol-gel silica film layer is terbium dysprosium ferrum sol-gel silica film layer.
Preferably, the thickness of the sol-gel silica film layer is 1~10 μm；The colloidal sol-gel dioxy
SiClx film layer is attached to the surface of coreless fiber using lifting coating method.
Preferably, the sol-gel silica film layer is hollow ball silica coating；The lifting coating method
Process be：Compound concentration is 3~5wt% hollow ball silicon dioxide colloid, will draw small core single-mode fiber and is fixed on lifting
On the support of coating machine, in the case where pull rate is 300~500mm/min, the surface for drawing small core single-mode fiber is lifted
Plated film；The preparation method of the hollow ball silicon dioxide colloid is：By weight, 0.1~0.5 part of polyacrylic acid is taken to be dissolved in 5
In~10 parts of ammonia spirit, it is then added in 150~200 parts of ethanol, then by 1~3 part of positive silicic acid in 3~5 hours
Ethyl ester is added, and is continued to stir 3~5 hours, is stood 1~3 day, obtain hollow ball silicon dioxide colloid.
Preferably, the single-mode fiber carries out welding without acceptance of persons with multimode fibre using optical fiber fusion welding technology；The nothing
Core fibre carries out eccentric welding with multimode fibre using optical fiber fusion welding technology.
Preferably, the thickness of first metallic diaphragm is more than 50nm, and it uses vacuum sputtering methods to be attached to multimode
On optical fiber and the nonoverlapping end face of coreless fiber；The thickness of second metallic diaphragm is more than 50nm, and it uses vacuum sputtering side
Method is attached on another end face of coreless fiber.
Preferably, the sol-gel silica film layer is coated on the surface of coreless fiber using method of electrostatic spinning；
The process of the electrostatic spinning is：Concentration is injected into the injection with stainless steel shower nozzle for 0.5~5wt% silicon dioxide colloid to hold
In device, then applied the voltage on stainless steel shower nozzle, and will be sprayed using the propulsion pump being connected with spray containers with high voltage power supply
Penetrate the silicon dioxide colloid in container to spray to the coreless fiber reception device of rotation by stainless steel shower nozzle, the Static Spinning
Silk injection conditions be：Environment temperature is 40~60 DEG C, the output voltage of high voltage power supply be 15~25kv, coreless fiber with it is stainless
Between steel shower nozzle distance be 15~20cm, flow velocity be 10~20mL/h, the rotary speed of coreless fiber reception device be 50~
150r/min。
The present invention at least includes following beneficial effect：The molecular state organic pollution on-line monitoring sensor of the present invention, when
The light that super-radiance light emitting diode is sent is transmitted in single-mode fiber, and enters transmission in multimode fibre, at the end of multimode fibre
Face, optical signal is divided into two parts, and Part I is reflected in end by the first metallic diaphragm, and Part II enters coreless fiber
Middle transmission, and being reflected in the end of coreless fiber by the second metallic diaphragm, reflected light enter in multimode fibre with coreless fiber
Reflected light interfered, interference light is exported by single-mode fiber；When the molecular state organic pollution in monitored environment causes
The sol-gel silica thin-film refractive index on coreless fiber surface changes, and then influences the resonance wavelength position of interference light
Move, molecular state organic pollution concentration is pushed away by the way that wavelength shift is counter.
Further advantage, target and the feature of the present invention embodies part by following explanation, and part will also be by this
The research and practice of invention and be understood by the person skilled in the art.
Brief description of the drawings：
Fig. 1 monitors sensor on-line for molecular state organic pollution of the present invention based on single mode-multimode-coreless fiber structure
Structural representation；
Fig. 2 shows response light spectrogram of the sensor of the invention structure to pollutant.
Embodiment：
The present invention is described in further detail below in conjunction with the accompanying drawings, to make those skilled in the art with reference to specification text
Word can be implemented according to this.
It should be appreciated that such as " having ", "comprising" and " comprising " term used herein do not allot one or many
The presence or addition of individual other elements or its combination.
Fig. 1 shows that a kind of molecular state organic pollution based on single mode-multimode-coreless fiber structure of the present invention is online
Sensor is monitored, including：Single-mode fiber 1, it is used for the input and output of optical signal；Multimode fibre 2, its input and the list
The welding without acceptance of persons of the output end of mode fiber 1；Coreless fiber 3, its one end and the eccentric welding of output end of the multimode fibre 2；Institute
State surface attachment colloidal sol-gel silicas film layer 4 of coreless fiber 3；
Wherein, the coreless fiber 3 at the non-overlapping position after the eccentric welding of multimode fibre 2 with adhering to the first metallic diaphragm
5 to reflect the optical signal in multimode fibre；The other end of the coreless fiber 3 adheres to the second metallic diaphragm 6 to reflect centreless light
Optical signal in fibre.
Wherein, the diameter of the single-mode fiber be 125 μm, core diameter be 8~10 μm, the length of the multimode fibre is
3~10mm, a diameter of 125 μm, core diameter be 50~125 μm, the length of the coreless fiber is 3~10mm, a diameter of 20~100
μm。
In this technical scheme, when the light that super-radiance light emitting diode is sent is transmitted in single-mode fiber, and enter many
Transmitted in mode fiber, in the end of multimode fibre, optical signal is divided into two parts, and Part I is in end by the first metal film
Layer reflection, Part II, which enters in coreless fiber, to be transmitted, and is reflected in the end of coreless fiber by the second metallic diaphragm, reflected light
Interfered into multimode fibre with the reflected light in multimode fibre, interference light is exported by single-mode fiber；When will be attached with
The molecular state organic pollution on-line monitoring sensor of sol-gel silica film layer is placed in monitored environment, molecular state
Organic pollution concentration can cause have coreless fiber refractive index to change, and make an interfere arm light in Mach-Ze De mixed interferences
Journey, which changes, causes whole Waveguide interference condition to change, and last signal is simultaneously received by spectrometer, by docking the collection of letters number
Progress processing counter can push away external environment condition molecular state organic pollution concentration；Fig. 2 shows sensor of the invention structure to dirt
Contaminate the response light spectrogram of thing；
In the above-mentioned technical solutions, the thickness of the sol-gel silica film layer is 1~10 μm, the sensitive membrane
Layer is sol-gel silica film layer；Using this material layer, organic pollution can be made to be produced on coreless fiber surface rich
Collection, influences the refractive index of waveguiding structure.
In the above-mentioned technical solutions, the sol-gel silica film layer is attached to coreless fiber using czochralski method
Surface.In this way, sol-gel silica film layer can be securely attached to the surface of multimode fibre, and energy
Enough improve molecular state organic pollution on-line monitoring precision.
In the above-mentioned technical solutions, the sol-gel silica film layer is hollow ball silica coating；It is described
Lifting coating method process be：Compound concentration is 3wt% hollow ball silicon dioxide colloid, will draw small core single-mode fiber and fix
On the support of lifting coating machine, in the case where pull rate is 300mm/min, the surface for drawing small core single-mode fiber is carried
Draw plated film；The preparation method of the hollow ball silicon dioxide colloid is：By weight, 0.1 part of polyacrylic acid is taken to be dissolved in 5 parts
In ammonia spirit, it is then added in 150 parts of ethanol, then added 1 part of tetraethyl orthosilicate in 3 hours, continues to stir 3
Hour, 1 day is stood, hollow ball silicon dioxide colloid is obtained.
In another technical scheme, the sol-gel silica film layer is hollow ball silica coating；It is described
Lifting coating method process be：Compound concentration is 5wt% hollow ball silicon dioxide colloid, will draw small core single-mode fiber and fix
On the support of lifting coating machine, in the case where pull rate is 500mm/min, the surface for drawing small core single-mode fiber is carried
Draw plated film；The preparation method of the hollow ball silicon dioxide colloid is：By weight, 0.5 part of polyacrylic acid is taken to be dissolved in 10 parts
Ammonia spirit in, be then added in 200 parts of ethanol, then added 3 parts of tetraethyl orthosilicates in 5 hours, continue to stir 5
Hour, 3 days are stood, hollow ball silicon dioxide colloid is obtained.
In the above-mentioned technical solutions, the single-mode fiber is melted without acceptance of persons with multimode fibre using optical fiber fusion welding technology
Connect；The coreless fiber carries out eccentric welding with multimode fibre using optical fiber fusion welding technology.In this way, light can be believed
Number being divided into two parts is transmitted, and improves molecular state organic pollution on-line monitoring precision.
In the above-mentioned technical solutions, the thickness of first metallic diaphragm is more than 50nm, and it uses vacuum sputtering methods attached
On multimode fibre and the nonoverlapping end face of coreless fiber；The thickness of second metallic diaphragm is more than 50nm, and it is used very
Empty sputtering method is attached on another end face of coreless fiber, using this adhering mode, enables metallic diaphragm firm
Connection, and accurately optical signal is reflected, improve molecular state organic pollution on-line monitoring precision.
In another technical scheme, the sol-gel silica film layer is attached to centreless using method of electrostatic spinning
The surface of optical fiber；The process of the electrostatic spinning is：By silicon dioxide colloid injection band stainless steel shower nozzle of the concentration for 0.5wt%
Spray containers in, then applied the voltage to high voltage power supply on stainless steel shower nozzle, and utilize pushing away of being connected with spray containers
Enter pump to spray the silicon dioxide colloid in spray containers to the coreless fiber reception device of rotation by stainless steel shower nozzle, make
Coreless fiber surface attachment silicon dioxide fibrous membrane layer；The injection conditions of the electrostatic spinning is：Environment temperature is 40 DEG C, high pressure
The output voltage of power supply is that distance is that 15cm, flow velocity are 10mL/h, coreless fiber between 15kv, coreless fiber and stainless steel shower nozzle
The rotary speed of reception device is 50r/min.
In another technical scheme, the sol-gel silica film layer is attached to centreless using method of electrostatic spinning
The surface of optical fiber；The process of the electrostatic spinning is：Concentration is injected with stainless steel shower nozzle for 5wt% silicon dioxide colloid
In spray containers, then applied the voltage to high voltage power supply on stainless steel shower nozzle, and utilize the propulsion being connected with spray containers
Pump sprays the silicon dioxide colloid in spray containers to the coreless fiber reception device of rotation by stainless steel shower nozzle, makes drawing
Make small core single-mode fiber surface attachment silicon dioxide fibrous membrane layer；The injection conditions of the electrostatic spinning is：Environment temperature is 60
DEG C, the output voltage of high voltage power supply be between 25kv, coreless fiber and stainless steel shower nozzle distance be 20cm, flow velocity be 20mL/h,
The rotary speed of coreless fiber reception device is 150r/min.
In another technical scheme, the sol-gel silica film layer is attached to centreless using method of electrostatic spinning
The surface of optical fiber；The process of the electrostatic spinning is：Concentration is injected with stainless steel shower nozzle for 3wt% silicon dioxide colloid
In spray containers, then applied the voltage to high voltage power supply on stainless steel shower nozzle, and utilize the propulsion being connected with spray containers
The small core single-mode fiber of drawing that silicon dioxide colloid in spray containers is sprayed to rotation by stainless steel shower nozzle is received and filled by pump
Put, make coreless fiber surface attachment silicon dioxide fibrous membrane layer；The injection conditions of the electrostatic spinning is：Environment temperature is 50
DEG C, the output voltage of high voltage power supply be between 20kv, coreless fiber and stainless steel shower nozzle distance be 18cm, flow velocity be 15mL/h,
The rotary speed of coreless fiber reception device is 100r/min.
Coreless fiber is attached in the form of the electrospinning process of the present invention makes silicon dioxide gel with micro-nano fiber
Surface, the specific surface area of silicon dioxide fibrous membrane layer is big, more preferable to the adsorption effect of organic pollution, makes the inspection of organic pollution
Survey effect more excellent.
Although embodiment of the present invention is disclosed as above, it is not restricted in specification and embodiment listed
With it can be applied to various suitable the field of the invention completely, can be easily for those skilled in the art
Other modification is realized, therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited
In specific details and shown here as the legend with description.
Claims (10)
1. a kind of molecular state organic pollutant monitoring sensor based on single mode-multimode-coreless fiber structure, it is characterised in that
Including：
Single-mode fiber, it is used for the input and output of optical signal；
Multimode fibre, the output end welding without acceptance of persons of its input and the single-mode fiber；
Coreless fiber, its one end and the eccentric welding of output end of the multimode fibre；The surface attachment colloidal sol of the coreless fiber-
Gel silicas film；
Wherein, at the non-overlapping position after the eccentric welding of the coreless fiber and multimode fibre the first metallic diaphragm of attachment to reflect
Optical signal in multimode fibre；The other end of the coreless fiber adheres to the second metallic diaphragm to reflect the letter of the light in coreless fiber
Number.
2. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 1
Device, it is characterised in that the diameter of the single-mode fiber is 125 μm, core diameter is 8~10 μm.
3. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 1
Device, it is characterised in that the length of the multimode fibre be 3~10mm, a diameter of 125 μm, core diameter be 50~125 μm.
4. the molecular state organic pollution on-line monitoring based on single mode-multimode-coreless fiber structure is passed as claimed in claim 1
Sensor, it is characterised in that the length of the coreless fiber be 3~10mm, a diameter of 20~100 μm.
5. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 1
Device, it is characterised in that the sensitive material film layer is sol-gel silica film layer.
6. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 1
Device, it is characterised in that the thickness of the sol-gel silica film layer is 1~10 μm；The sol-gel silica
Film layer is coated on coreless fiber surface by film layer using lifting film plating process.
7. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 7
Device, it is characterised in that the sol-gel silica film layer is hollow ball silica coating；The lifting coating method
Process is：Compound concentration is 3~5wt% hollow ball silicon dioxide colloid, will draw small core single-mode fiber and is fixed on lifting plating
On the support of film machine, in the case where pull rate is 300~500mm/min, lifting plating is carried out to the surface for drawing small core single-mode fiber
Film；The preparation method of the hollow ball silicon dioxide colloid is：By weight, take 0.1~0.5 part of polyacrylic acid be dissolved in 5~
In 10 parts of ammonia spirit, it is then added in 150~200 parts of ethanol, then by 1~3 part of positive silicic acid second in 3~5 hours
Ester is added, and is continued to stir 3~5 hours, is stood 1~3 day, obtain hollow ball silicon dioxide colloid.
8. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 1
Device, it is characterised in that the single-mode fiber carries out welding without acceptance of persons with multimode fibre using optical fiber fusion welding technology；The centreless light
It is fine that eccentric welding is carried out using optical fiber fusion welding technology with multimode fibre.
9. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 1
Device, it is characterised in that the thickness of first metallic diaphragm is more than 50nm, and it uses vacuum sputtering methods to be attached to multimode fibre
With on the nonoverlapping end face of coreless fiber；The thickness of second metallic diaphragm is more than 50nm, and it uses vacuum sputtering methods attached
On another end face of coreless fiber.
10. the molecular state organic pollutant monitoring based on single mode-multimode-coreless fiber structure is sensed as claimed in claim 1
Device, it is characterised in that the sol-gel silica film layer is coated on the surface of coreless fiber using method of electrostatic spinning；Institute
The process for stating electrostatic spinning is：Concentration is injected into the spray containers with stainless steel shower nozzle for 0.5~5wt% silicon dioxide colloid
It is interior, then applied the voltage to high voltage power supply on stainless steel shower nozzle, and will be sprayed using the propulsion pump being connected with spray containers
Silicon dioxide colloid in container is sprayed to the coreless fiber reception device of rotation by stainless steel shower nozzle, the electrostatic spinning
Injection conditions be：Environment temperature is 40~60 DEG C, the output voltage of high voltage power supply is 15~25kv, coreless fiber and stainless steel
Distance is that 15~20cm, flow velocity are that 10~20mL/h, the rotary speed of coreless fiber reception device are 50~150r/ between shower nozzle
min。
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| CN109738373A (en) * | 2019-01-22 | 2019-05-10 | 北京信息科技大学 | PH sensor and preparation method thereof based on photonic crystal fiber |
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| CN112730271A (en) * | 2020-12-15 | 2021-04-30 | 哈尔滨工程大学 | Liquid crystal optical fiber sensor for detecting VOC gas concentration and temperature and preparation method thereof |
| CN114813571A (en) * | 2021-01-22 | 2022-07-29 | 西安电子科技大学 | Peanut-shaped optical fiber humidity sensor and preparation method thereof |
| CN114812661A (en) * | 2021-01-22 | 2022-07-29 | 西安电子科技大学 | Multipoint monitoring optical fiber temperature and humidity sensing probe and preparation method thereof |
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