CN106124027B - A kind of micro-nano fiber vibrating sensor based on hollow-core fiber - Google Patents
A kind of micro-nano fiber vibrating sensor based on hollow-core fiber Download PDFInfo
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- CN106124027B CN106124027B CN201610423867.7A CN201610423867A CN106124027B CN 106124027 B CN106124027 B CN 106124027B CN 201610423867 A CN201610423867 A CN 201610423867A CN 106124027 B CN106124027 B CN 106124027B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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Abstract
The present invention relates to a kind of micro-nano fiber vibrating sensor based on hollow-core fiber, belongs to sensory field of optic fibre.Single mode optical fiber, hollow-core fiber and solid core optical fiber sequence welding；The hollow-core fiber is hollow cylinder, and opens up notch at cylindrical sides center；The axial length of the notch need to be less than the length of hollow cylinder；The notch is by being formed with femtosecond laser from the ablation of hollow-core fiber side.The invention avoids the reflectivity of femtosecond laser processing the formed reflecting surface of optical fiber it is low even without reflecting the problem of, and have the characteristics that small in size, resonant frequency is high, high temperature resistant, electromagnetism interference, the vibration measurement that can be used under hot environment.
Description
Technical field
The present invention relates to a kind of micro-nano fiber vibrating sensor based on hollow-core fiber, belongs to sensory field of optic fibre.
Background technique
In recent years, there are more and more demands, such as the prison of aero-engine for the vibration monitoring under hot environment
Survey, the monitoring of the generator of large scale equipment, engine, motor etc., operating temperature is up to 1200 DEG C.
The principle that mechanical oscillation signal is converted into electric signal can be divided into current vortex by traditional high-temperature vibrating sensor, foundation
Type, electromagnetic induction type and piezoelectric effect type.The commercialization high-temperature vibrating sensor made of these principles, as Beijing Institute of Aeronautics technique
8310 types of SHQ-80, B.K company, the 6237M69A type of ENDVCO company and 6237M70 type, volume is larger, and can not achieve
High-temperature vibrating monitoring higher than 700 DEG C.
In recent years, in order to further reduce the volume of vibrating sensor, and the operating temperature of vibrating sensor, people are promoted
Sight is turned into field fiber.Fiber grating is widely used in vibration measurement, it is common practice to which grating is fixed on cantilever beam
On, vibration signal is detected by the drift of wavelength.But since fiber grating cannot survive in 300 DEG C or more of high temperature, institute
Can not achieve 300 DEG C or more of high-temperature vibrating monitoring based on the vibrating sensor that fiber grating makes.Perrone G et al. is mentioned
A kind of contactless intensity modulation type optical fibre vibration sensor out, but the fluctuation of light source output and the change of fiber distance vibration source position
Change can all bring large error, and the limitation due to encapsulation etc. to sensor, can not realize 300 DEG C or more of high temperature vibration
Dynamic measurement (Perrone G, Vallan A.A low-cost optical sensor for noncontact vibration
measurements[J].Instrumentation and Measurement,IEEE Transactions on,2009,58
(5):1650-1656.).Gangopadhyay et al. proposes a kind of external cavity type Fabry-Perot type vibrating sensor, works as the external world
When vibrating, the chamber that the vibration of flexible mirror can change fabry perot interferometer is long, real by detecting its phase change
Existing vibration detecting, but due to the limitation of reflecting mirror and lens making material, the program can not be in 500 DEG C or more of hot environments
Lower use (Gangopadhyay T K, Chakravorti S, Bhattacharya K, et al.Wavelet analysis
ofoptical signal extracted from a non-contact fibre-optic vibration sensor
using an extrinsic Fabry–Perot interferometer[J].Measurement Science and
Technology,2005,16(5):1075.).Rines et al. proposes the transferring of the transmission-type based on single mode optical fiber natural resiliency
Type optical fibre vibration sensor processed, but due to the problems such as encapsulating, which can not use in 800 DEG C or more of hot environment
(Rines G A.Fiber-optic accelerometer with hydrophone applications[J].Applied
optics,1981,20(19):3453-3459.).Berthold et al. is to multimode graded-index optical fiber and multimode stepped-index optical fiber
Microbend characteristic is analyzed, and is applied to vibration measurement, but the limitation based on optical fiber, can not be in 800 DEG C or more of height
Vibration detecting (Berthold III J W.Historical review ofmicrobend fiber is carried out under warm environment
optic sensors[C]//10th Optical Fibre Sensors Conference.International Society
for Optics and Photonics,1994:182-186.).Ricardo et al. utilizes focused ion beam technology, production
All -fiber high-temperature vibrating sensor (Andr é R M, Pevec S, Becker M, et al.Focused ion beam post-
processing of optical fiber Fabry-Perot cavities for sensing applications[J]
.Optics express,2014,22(11):13102-13108.).The sensor bulk is small, is resistant to 1000 DEG C of high temperature, still
Equipment needed for processing is expensive, and optical reflection face is formed by ion beam bombardment, be difficult to accomplish it is very smooth, cause reflectivity compared with
Low, signal is weaker.
Summary of the invention
The object of the present invention is to provide a kind of micro-nano fiber vibrating sensor based on femtosecond laser parallel micromachining, the sensor
(125 μ m 7mm of φ) small in size, can work under 1200 DEG C of hot environments.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of micro-nano fiber vibrating sensor based on hollow-core fiber, comprising: single mode optical fiber, hollow-core fiber, solid core optical fiber；
Single mode optical fiber, hollow-core fiber and solid core optical fiber sequence welding；The hollow-core fiber is hollow cylinder, and in cylinder
Body side surface opens up notch at center；The axial length of the notch need to be less than the length of hollow cylinder；The notch is to pass through use
Femtosecond laser is formed from the ablation of hollow-core fiber side.
The length of hollow-core fiber be 100 μm -2000 μm, outer diameter is identical or close with single mode optical fiber outer diameter, internal diameter for 10 μm -
100μm；The solid core fiber lengths are 100 μm -5000 μm.
Ablation vertical depth is the 10%-90% of hollow-core fiber diameter.
Processing method:
Step 1: single mode optical fiber and hollow-core fiber welding.；
Step 2: the hollow-core fiber that excision is extra；
Step 3: hollow-core fiber and solid core fused fiber splice；
Step 4: the solid core optical fiber that excision is extra；
Step 5: end face roughening treatment；
Step 6: femtosecond laser ablation hollow-core fiber.
The course of work:
Detection light is imported by single mode optical fiber, and it is anti-to form first time Fresnel in the face of weld of single mode optical fiber and hollow-core fiber
It penetrates, forms second of Fei Nier in hollow-core fiber and solid core optical fiber welding junction and reflect, reflect to form two-beam interference twice, reflect
Light is exported by single mode optical fiber to (FBG) demodulator.When the sensor is by vibration perpendicular to cantilever beam direction, solid core optical fiber
It drives cantilever beam to generate as mass block micro-bend, to change the optical path difference of interferometer, is passed to form interference-type optical fiber vibration
Sensor.
Beneficial effect
1, a kind of micro-nano fiber vibrating sensor based on hollow-core fiber of the invention, the vibrating sensor is small in size,
Diameter is 125 μm, and length is less than 7mm, and resistance to 1200 DEG C of high temperature；
2, a kind of micro-nano fiber vibrating sensor based on hollow-core fiber of the invention, the vibrating sensor interference signal
It is high-quality, be conducive to demodulate vibration signal.
3, the present invention forms cantilever beam structure using femtosecond laser ablation hollow-core fiber, substantially reduces the anti-of hollow-core fiber
Curved rigidity, and using longer third section optical fiber as mass block, so that one timing of vibration signal intensity of input, hollow light
Fibre generates bigger bending, causes the chamber of Fabry-Perot interferometer is long bigger variation occurs, to improve this vibrating sensor
Sensitivity.
4, the cantilever beam structure due to vibrating sensing part of the invention to be formed after femtosecond laser ablation hollow-core fiber.It is empty
Core fibre is made of pure quartz, and quartzy fusing point is up to 1650 DEG C, and thermal expansion coefficient is only 0.55 × 10-6/ DEG C, it is unknown for temperature
Sense, so the vibration detecting that the present invention can be used under hot environment, and it is small for the cross sensitivity of temperature.
Detailed description of the invention
Fig. 1 is the side view of the micro-nano fiber vibrating sensor of the present invention based on hollow-core fiber；
Fig. 2 is the top view of the micro-nano fiber vibrating sensor of the present invention based on hollow-core fiber；
Fig. 3 is the perspective view of the micro-nano fiber vibrating sensor of the present invention based on hollow-core fiber.
Wherein, 1 --- single mode optical fiber, 2 --- hollow-core fiber, 3 --- solid core optical fiber, 4 --- cantilever beam, 5 --- single mode
The face of weld of optical fiber and hollow-core fiber, 6 --- the face of weld of hollow-core fiber and solid core optical fiber, 7 --- the end face of solid core optical fiber.
Specific embodiment
Technical solution of the present invention is further described in detail with specific embodiment with reference to the accompanying drawing.
Embodiment 1
A kind of micro-nano fiber vibrating sensor based on femtosecond laser parallel micromachining, comprising: single mode optical fiber 1, hollow-core fiber 2,
Solid core optical fiber 3；Wherein, femtosecond laser ablation solid core optical fiber 3 forms cantilever beam 4, and solid core optical fiber 3 is used as mass block；
The 3 sequence welding of single mode optical fiber 1, hollow-core fiber 2 and solid core optical fiber；The hollow-core fiber 2 is through femtosecond laser ablation shape
At cantilever beam 4, solid core optical fiber 3 is used as mass block.
The length of the hollow-core fiber 2 is 1000 μm, and outer diameter is identical as 1 outer diameter of single mode optical fiber, is 125 μm, and internal diameter is 93 μ
M, femtosecond laser ablation depth are 90 μm；3 length of solid core optical fiber is 3000 μm.
Processing method:
Step 1: 2 welding of single mode optical fiber 1 and hollow-core fiber.Wherein, single mode optical fiber 1 is general commercial single mode optical fiber, covering
Diameter is 125 μm, and core diameter is 8 μm, and the internal diameter of hollow-core fiber 2 is 93 μm, and outer diameter is 125 μm.Single-mode optics are removed before welding
The coat of fibre 1 and hollow-core fiber 2, welding are arranged discharge current and discharge time, are made using the manual mode of commercial heat sealing machine
Single mode optical fiber 1 and 2 welding of hollow-core fiber are secured and hollow-core fiber 2 does not collapse.；
Step 2: the hollow-core fiber 2 that excision is extra.Under microscopical observation, 1000 μm long of hollow-core fiber 2 is stayed, it is more
Remaining part is cut off with cutter；
Step 3: 3 welding of hollow-core fiber 2 and solid core optical fiber.The coat of solid core optical fiber 3 is removed before welding, welding uses
Discharge current and discharge time is arranged, so that hollow-core fiber 2 and 3 welding of solid core optical fiber are secured in the manual mode of commercial heat sealing machine
And hollow-core fiber 2 does not collapse.Wherein, solid core optical fiber 3 uses coreless fiber, i.e. quartz glass cylinder, the diameter of solid core optical fiber 3
It is 125 μm；
Step 4: the solid core optical fiber 3 that excision is extra.Under microscopical observation, 3000 μm long of solid core optical fiber 2 is stayed, it is more
Remaining part is cut off with cutter；
Step 5: end face roughening treatment.The femtosecond laser ablation of end face 7 of the solid core optical fiber, makes its roughening, with
Reduce end face reflection；
Step 6: femtosecond laser ablation hollow-core fiber 2.By the hollow-core fiber 2 from side femtosecond laser ablation, at
As system observation under, pass through the track that computer programming controls laser ablation, form cantilever beam 4, wherein ablated area is along empty
Core fibre axial direction is 600 μm long, and width is 125 μm, and depth is 90 μm, and ablation does not destroy hollow-core fiber 2 and single mode optical fiber 1
Face of weld and hollow-core fiber 2 and solid core optical fiber 3 face of weld.
The course of work:
The working principle of the invention is: detection light is imported by single mode optical fiber 1, in the face of weld of single mode optical fiber and hollow-core fiber
First time Fresnel reflection is formed at 5, a part of light is reflected back single mode optical fiber 1, another part light transmission.Transmitted light is transmitted to sky
It forms second of Fei Nier at the face of weld 6 of core fibre and solid core optical fiber to reflect, and some light is reflected back single mode optical fiber 1.
Reflected light forms two-beam interference at two, is exported by single mode optical fiber 1, constitutes external cavity type optical fibre Fabry-perot interferometer.When
When sensor is vibrated, solid core optical fiber 3 drives the cantilever beam 4 formed after femtosecond laser ablation hollow-core fiber to produce as mass block
Life is micro-bend, causes the chamber length of Fabry-Perot interferometer to change, causes the phase of interference light to change, to realize vibration
Dynamic sensing.
The second segment hollow-core fiber removes a part from side femtosecond laser ablation, forms cantilever beam structure.It is described
Femtosecond laser ablation area should be less than the length of second segment hollow-core fiber along hollow-core fiber axial direction length, to guarantee to process
When first segment optical fiber and second segment hollow-core fiber face of weld and third section optical fiber and second segment hollow-core fiber face of weld not
It is contaminated, therefore the very high two optical reflection faces of available reflectivity；Ablation width be hollow-core fiber outer diameter, i.e., 125 μm；It burns
Losing depth is 90 μm.The third section optical fiber connector end face should be roughened, to reduce end face reflection.
The vibrating sensor is small in size and high temperature resistant.High-temperature vibrating sensor bulk described in embodiment 1 is only φ
125 4000 μm of μ ms, can work under 1200 DEG C of hot environment.
The vibrating sensor interference signal is high-quality.Micro-nano fiber vibrating sensing of the present invention based on hollow-core fiber
Device forms Fresnel reflection using two solid core optical fiber and hollow-core fiber face of weld, and the reflected light of two fusion points interferes,
And then form external cavity type Fabry-Perot interferometer.Due to forming two optical reflection faces (single mode optical fiber and the hollow light of interference
The face of weld 6 of fine face of weld 5 and hollow-core fiber and solid core optical fiber) it is that optical fiber cutter is cut before welding, and due to sky
(93 μm) of core fibre internal diameter are greater than single mode solid core fiber core core diameter (10 μm), therefore single mode solid core optical fiber and hollow-core fiber welding
When, it will not influence the cleanliness of single mode solid core fiber core end face, and because not to the two light when femtosecond laser ablation
It learns reflecting surface to have an impact, therefore can guarantee the flatness in the two optical reflection faces, so that the Fabry-Perot formed
Interferometer has apparent interference fringe, is easy to demodulate vibration signal.
It should be noted last that the above specific embodiment is only used to illustrate the technical scheme of the present invention and not to limit it,
Although being described the invention in detail referring to preferred embodiment, those skilled in the art should understand that, to this hair
Bright technical solution is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be contained
Lid is in the scope of the claims of the present invention.
Claims (5)
1. a kind of micro-nano fiber vibrating sensor based on hollow-core fiber, it is characterised in that: include: single mode optical fiber (1), hollow light
Fine (2), solid core optical fiber (3)；Single mode optical fiber (1), hollow-core fiber (2) and solid core optical fiber (3) sequence welding；The hollow-core fiber
(2) it is hollow cylinder, and opens up notch at cylindrical sides center；The axial length of the notch need to be less than hollow cylinder
Length；The notch is by being formed with femtosecond laser from hollow-core fiber (2) side ablation.
2. a kind of micro-nano fiber vibrating sensor based on hollow-core fiber as described in claim 1, it is characterised in that: the sky
The length of core fibre (2) is 100 μm -2000 μm, and outer diameter is identical or close as single mode optical fiber (1) outer diameter, and internal diameter is 10 μm of -100 μ
m；Solid core optical fiber (3) length is 100 μm -5000 μm.
3. a kind of micro-nano fiber vibrating sensor based on hollow-core fiber as described in claim 1, it is characterised in that: the burning
Erosion vertical depth is the 10%-90% of hollow-core fiber (2) diameter.
4. processing a kind of method of the micro-nano fiber vibrating sensor based on hollow-core fiber as described in claim 1, feature
It is: specific steps are as follows:
Step 1: single mode optical fiber (1) and hollow-core fiber (2) welding；
Step 2: the hollow-core fiber (2) that excision is extra；
Step 3: hollow-core fiber (2) and solid core optical fiber (3) welding；
Step 4: the solid core optical fiber (3) that excision is extra；
Step 5: to the end face roughening treatment of the solid core optical fiber (3) after excision；
Step 6: femtosecond laser ablation hollow-core fiber (2).
5. a kind of micro-nano fiber vibrating sensor based on hollow-core fiber as described in claims 1 to 3 any one, feature
It is: the course of work are as follows: detection light is imported by single mode optical fiber (1), the face of weld (5) in single mode optical fiber (1) and hollow-core fiber (2)
First time Fresnel reflection is formed, second of Fei Nier is formed in hollow-core fiber (2) and solid core optical fiber (3) face of weld (6) and reflects,
Two-beam interference is reflected to form twice, and reflected light is exported by single mode optical fiber (1) to (FBG) demodulator；When the sensor is by vertical
When the vibration in cantilever beam (4) direction, solid core optical fiber (3) drives cantilever beam (4) generation micro-bend as mass block, to change dry
The optical path difference of interferometer, to form interference-type optical fiber vibrating sensor.
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| CN110207806B (en) * | 2019-07-10 | 2021-10-26 | 国网上海市电力公司 | Oblique end face optical fiber vibration sensor and vibration measuring method thereof |
| CN110514233B (en) * | 2019-10-10 | 2024-04-26 | 中国计量大学 | Mach-Zehnder interferometer on cavity suspension channel type optical fiber line |
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| CN116931174B (en) * | 2023-09-15 | 2023-12-08 | 中国航天三江集团有限公司 | Fusion-bonding integrated packaging method and product of solid fiber-hollow anti-resonance fiber |
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