CN209310742U - A kind of gradual change multimode fibre fluorescent effect micro-displacement sensor - Google Patents
A kind of gradual change multimode fibre fluorescent effect micro-displacement sensor Download PDFInfo
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- CN209310742U CN209310742U CN201920319578.1U CN201920319578U CN209310742U CN 209310742 U CN209310742 U CN 209310742U CN 201920319578 U CN201920319578 U CN 201920319578U CN 209310742 U CN209310742 U CN 209310742U
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Abstract
The utility model proposes a kind of gradual change multimode fibre fluorescent effect micro-displacement sensors, can be realized the micro-displacement precision monitor to exterior environment;It include: light source, first Optic transmission fiber, displacement module, second Optic transmission fiber, fluorescent solutions, fluorescence analysis module, computer, the light source is connected with the first Optic transmission fiber by naked fibre adapter, first Optic transmission fiber and the second Optic transmission fiber are individually fixed in displacement module, the second Optic transmission fiber interlude strips coat and erodes covering 2cm, exposed fibre core section level is immersed in fluorescent solutions, the fluorescent solutions are placed in objective lens surface in fluorescence analysis module, the utility model has the beneficial effects that: electromagnetic interference performance is good, electrical insulating property is strong, it is small in size, shape-plastic, transmission loss is small etc., furthermore the information carrier of Fibre Optical Sensor is light, its transmission speed and the speed of response are quickly, and structure flexible design multiplicity, simply it is easy to make, performance is stablized.
Description
Technical field
The utility model belongs to fibre optical sensor field, and in particular to a kind of gradual change multimode fibre fluorescent effect micro-displacement biography
Sensor.
Background technique
Increasingly higher demands are proposed to testing accuracy in modern precision and super hot investment casting field, conventional inspection method is
The requirement of high-volume, on-line measurement is not adapted to.Displacement sensor includes potentiometric displacement transducer, resistance-strain type position
Displacement sensor, capacitive displacement transducer, Mageneto-sensitive type displacement sensor, optical displacement sensor, their course of work, peace
Dress mode, measuring principle are different, and applicable measured object also has very big differentiation.Fibre optical sensor has light weight, volume
It is small, price is low, not by electromagnetic interference, no current electric discharge and the advantages that lightning phenomenon, become an important side of sensor research
To.Microminiature ultraprecise optical fiber micro-displacement sensor not only can be directly used for measuring in high-speed & precise progressive die and measurement process
Micro- linear displacement, micro angular displacement, vibration and various Part Surface Roughness can also pass through the displacement application of switching to pressure diaphragm
It is applied in pressure measurement, by the displacement of inversion temperature deformation sheet applied to temperature measurement, by the displacement of conversion quality block
Quality or acceleration analysis.Therefore, optical fibre displacement sensor occupies critically important status in sensory field of optic fibre.Fiber optics displacement passes
Sensor is broadly divided into method using in optic fiber displacement sensor and is broadly divided into conduction type, interference-type and grating type etc..
(1) conduction type optical displacement sensing mainly includes reflective optical fiber displacement sensor, transmission-type method using in optic fiber displacement sensor
Device or micro-bend formula optical fibre displacement sensor etc., the most commonly used is reflective optical fiber displacement sensors.Optical fiber probe is by emitting
Optical fiber and reception optical fiber are arranged side by side composition.The emitted fiber exit of light source, some light can be returned to and be connect after reflecting surface
It receives optical fiber and is transmitted to optical detector.When the distance between optical fiber probe and reflecting surface change, what reception optical fiber received
Light intensity can also change therewith.The sensing of displacement is realized in such a way that light intensity demodulates.The structure simple, cost with structure
The advantages that cheap and easy to use, but sensitivity is very low simultaneously, therefore measurement accuracy is also very low, and stability is not high.
(2) interference-type displacement sensor is mainly with the interferometers knot such as Mach-Zehnder, Sagnac, Fabry-Perot
Manufactured sensor based on structure is then to pass through observation in fibre optical sensor by interference fringe measure of the change change in displacement
The variation of interference spectrum measures change in displacement.Although the structure different from of these fibre optic interferometers, measurement displacement
Principle is all the interference of light.Fibre optic interferometer displacement sensor is simple, highly integrated with structure, comparison is simple, measurement
The advantages that precision is high, but its be affected by temperature it is larger.
(3) grating type displacement sensor includes that fiber bragg grating displacement sensor and long-period fiber grating displacement pass
Sensor, the basic principle of both displacement sensors are all the bendings or strain generated by displacement, to change grating week
Phase finally makes transmitted spectrum change and the displacement sensing realized.Grating type displacement sensor has easy to make, stability
Good advantage, however, in this configuration, generally requiring biggish displacement could make screen periods that lesser change occur,
Therefore sensitivity is relatively low.Meanwhile it also needing to be unfavorable for integrating using instruments such as overarm arms in measurement.
To sum up, there is also respective problems for current each type optical fiber micro-displacement sensor, develop the light of new principle, new construction
Fine micro-displacement sensor is still hot spot.
The track of meridional beam in parabolic type graded index multimode fiber is a SIN function, amplitude and week
Phase determines by the incidence angle on light beam in a fiber axis, nevertheless, due to the propagation angle very little in optical fiber, propagate away from
From it is shorter when, the light that same point is transmitted on optical axis with different angle after one cycle again can converge again, which is claimed
For the self-focusing effect of graded index multimode fiber.Through emulating, when the transmission light in single mode optical fiber is incident to graded index
When optical fiber, when radial offset is 0 μm, light beam keeps straight line along optical axis;When offset is greater than 0 μm, light beam
Track is sine curve, and amplitude is equal to offset.In addition, no matter offset be it is how many, the period of beam propagation path protects
It holds constant.In this way, the incident offset (i.e. micro-displacement) occurred by single mode optical fiber and graded index multimode fiber, Ji Ke
A series of different propagation light beam of amplitudes is obtained in gradual change multimode fibre core, when removing gradual change multimode covering and fibre core is immersed fluorescence
When solution, the sinusoidal light beam of propagating of various amplitude can be in the evanscent field of fibre core and solution interface leakage varying strength, and then excites
The fluorescent intensity of varying strength.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of chemical property stable, small in size, shape-plastic, biography
A kind of small gradual change multimode fibre fluorescent effect micro-displacement sensor of defeated loss, is implemented for the microbit of exterior environment
Move monitoring.
In order to achieve the above objectives, the utility model provides the following technical solutions:
A kind of gradual change multimode fibre fluorescent effect micro-displacement sensor, comprising: for generating the light source of fixed wave length light, using
The second Optic transmission fiber of light is revealed, for making the first Optic transmission fiber in the first Optic transmission fiber of propagation light, for propagating simultaneously side
The displacement module for generating relative displacement with the second Optic transmission fiber is excited to generate the fluorescent solutions of fluorescence, is used for acquisition and analysis of fluorescence
The fluorescence analysis module of intensity, for handling the computer of simultaneously output data;The fluorescence analysis module is by being arranged successively setting
Object lens, optical filter, lens, photoelectric converter, hardware collection plate composition;The light source and the first Optic transmission fiber passes through naked fibre
Adapter is connected, and the first Optic transmission fiber and the second Optic transmission fiber are separately fixed on displacement module, the first Optic transmission fiber and
The end kernel of section of two Optic transmission fibers is mutually aligned, and separated by a distance, is stripped in the portion of the second Optic transmission fiber
Coat and etch away parts covering, exposed fibre core section level are immersed in fluorescent solutions, and the fluorescent solutions are placed in fluorescence point
Objective lens surface in module is analysed, the computer is connect with photoelectric converter, the hardware collection plate in analysis module using data line;
The light of fixed wave length is injected into the first Optic transmission fiber by light source, by adjusting displacement module, changes the first Optic transmission fiber and the
Two Optic transmission fiber fibre core relative displacement sizes, to change propagation path of the light in the second Optic transmission fiber, so that second passes light
Optical fiber is placed in the light wave evanscent field that fibre core naked section in fluorescent solutions leaks out varying strength, and difference can be excited in fluorescent solutions
The fluorescence of light intensity, the fluorescence excited are sent into computer demodulation calibration, can be derived that and excited by fluorescence analysis module collection
Fluorescence intensity calibrates the first Optic transmission fiber according to the fluorescence intensity difference excited and opposite position occurs for the second Optic transmission fiber
The size of shifting.
Optionally, the end kernel of section of the first Optic transmission fiber and the second Optic transmission fiber is mutually aligned, and is separated by 1-3cm.
Optionally, coat is stripped in the portion of the second Optic transmission fiber and erode covering 2cm.
Optionally, the light source uses 532nm narrow band laser, and optical power is adjustable, maximum power 300mw, hair
It dissipates angle and is less than 1mrad, output light can be coupled into single mode optical fiber, and 4 one-hour rating stability are less than ± 3%.
Optionally, first Optic transmission fiber uses single mode optical fiber, and fibre diameter is 125 μm, and core diameter is
9μm。
Optionally, the displacement module uses T40-65JC manual displacement platform, by adjusting manual displacement platform three
A vernier knob realizes the movement to displacement platform platform x, y, z axis, and displacement module is equipped with groove and tabletting, and groove diameter is
125μm。
Optionally, second Optic transmission fiber uses graded index multimode fiber, 105 μm of core diameter, wraps
Layer diameter μm, 250 μm of coat diameter, numerical aperture 0.3, interlude Miller pincers strip coat and corrode light with hydrofluoric acid
For fibre to 50 μm of diameter or so, exposed fibre core section level is immersed in fluorescent solutions.
Optionally, it is 7 × 10 that the fluorescent solutions, which are concentration,-3The rhodamine liquor of g/L.
Optionally, the object lens in the fluorescence analysis module are 20 times of object lens of Olympus infinity apochromatism.
Optionally, the optical filter in the fluorescence analysis module is bandpass filter, central wavelength 620nm, half peak value
Bandwidth 65nm.
The utility model has the beneficial effects that:
The electromagnetic interference performance of the utility model is good, electrical insulating property is strong, chemical property is stable, small in size, shape-plastic, biography
Defeated loss is small.In addition, the information carrier of Fibre Optical Sensor is light in the utility model, transmission speed and the speed of response are quickly.And
And structure flexible design multiplicity, simply it is easy to make, performance is stablized.It is transmitted using graded index multimode fiber self-focusing special
Property, when to its different displacement core shift note light, the period of beam propagation path is remained unchanged, and sinusoidal transmitting beam amplitude is not
Together, it is equal to core shift amount;And the sinusoidal transmitting beam of various amplitude, part is stripped in fibre cladding, varying strength can be revealed suddenly
Die field, the evanscent field of varying strength, and can be in the fluorescence of rhodamine fluorescent solutions excitation varying strength, and then ingenious realization passes through
Fluorescence intensity may be up to micron dimension to the sensing of micro-displacement, displacement resolution.
Other advantages, target and feature of the utility model will be explained in the following description to a certain extent
It states, and to a certain extent, based on will be apparent to those skilled in the art to investigating hereafter, or
Person can be instructed from the practice of the utility model.The target of the utility model and other advantages can be said by following
Bright book is achieved and obtained.
Detailed description of the invention
It is practical to this below in conjunction with attached drawing in order to keep the purpose of this utility model, technical solution and advantage clearer
It is novel to be preferably described in detail, in which:
Fig. 1 is the utility model overall structure diagram.
Fig. 2 is single mode optical fiber along multimode fibre center note light index path.
Fig. 3 is that single mode optical fiber and multimode fibre core shift infuse light index path.
Specific embodiment
Illustrate the embodiments of the present invention below by way of specific specific example, those skilled in the art can be by this theory
Content disclosed by bright book understands other advantages and effect of the utility model easily.The utility model can also be by addition
Different specific embodiments are embodied or practiced, and the various details in this specification can also be based on different viewpoints and answer
With carrying out various modifications or alterations under the spirit without departing from the utility model.It should be noted that institute in following embodiment
The diagram of offer only illustrates the basic conception of the utility model in a schematic way, in the absence of conflict, following embodiment and
Feature in embodiment can be combined with each other.
Wherein, the drawings are for illustrative purposes only and are merely schematic diagrams, rather than pictorial diagram, should not be understood as to this
The limitation of utility model;In order to better illustrate the utility model embodiment, the certain components of attached drawing have omission, amplification or contracting
It is small, do not represent the size of actual product;It will be understood by those skilled in the art that certain known features and its explanation may in attached drawing
Omission will be understood by.
The same or similar label correspond to the same or similar components in the attached drawing of the utility model embodiment;It is practical at this
In novel description, it is to be understood that if having the instructions such as term " on ", "lower", "left", "right", "front", "rear" orientation or
Positional relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of describing the present invention and simplifying the description,
Rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, because
The terms describing the positional relationship in the drawings are only for illustration for this, should not be understood as limiting the present invention, for
For those skilled in the art, the concrete meaning of above-mentioned term can be understood as the case may be.
Please refer to Fig. 1-Fig. 3, the element numbers in attached drawing respectively indicate: light source 1, the first Optic transmission fiber 2, displacement module 3,
It is second Optic transmission fiber 4, fluorescent solutions 5, fluorescence analysis module 6, object lens 61, optical filter 62, lens 63, photoelectric converter 64, hard
Part collection plate 65, computer 7.
The utility model relates to a kind of gradual change multimode fibre fluorescent effect micro-displacement sensors, comprising: for generating fixation
The light source 1 of wavelength light, the displacement module 3 for making optical fiber generation relative displacement, is used the first Optic transmission fiber 2 for propagating light
In the second Optic transmission fiber 4 of propagation and side leakage light, the fluorescent solutions 5 for being excited generation fluorescence, for acquisition and analysis of fluorescence
The fluorescence analysis module 6 of intensity, the fluorescence analysis module 6 is by object lens 61, optical filter 62, lens 63, photoelectric converter 64, hard
Part collection plate 65 forms, for handling the computer 7 of simultaneously output data;The light source 1 and the first Optic transmission fiber 2 passes through naked fibre
Adapter is connected, and the first Optic transmission fiber 2 and the second Optic transmission fiber 4 are individually fixed in displacement module 3, the first Optic transmission fiber and
Two Optic transmission fiber end kernel of section are mutually aligned, and end distance is 1-3mm, and 4 interlude of the second Optic transmission fiber strips painting
Coating simultaneously erodes covering 2cm, and exposed fibre core section level is immersed in fluorescent solutions 5, and the fluorescent solutions 5 are placed in fluorescence analysis
Objective lens surface in module 6, the computer 7 use data line with photoelectric converter 64, the hardware collection plate 65 in analysis module
Connection;When the utility model at work, the light of fixed wave length is injected into the first Optic transmission fiber 2 by light source 1, by adjusting displacement
Module 3 changes the first Optic transmission fiber 2 and 4 fibre core relative displacement size of the second Optic transmission fiber, passes light light second to change light
Propagation path in fibre 4, so that the second Optic transmission fiber 4 is placed in the light wave that fibre core naked section in fluorescent solutions leaks out varying strength
Evanscent field, can excite the fluorescence of different light intensity in fluorescent solutions 5, and the fluorescence excited is collected by fluorescence analysis module 6, sent
Enter the demodulation calibration of computer 7, can be derived that excited fluorescence intensity, calibrates first according to the fluorescence intensity difference excited
The size of relative displacement occurs for Optic transmission fiber and the second Optic transmission fiber.
Specifically, taking the single mode optical fiber of one section of long 2m, fibre diameter is 125 μm, and core diameter is 9 μm, both ends Miller
Peeling optical fibre coat and covering 2cm are clamped, dips alcohol using non-woven fabrics, is wiped repeatedly at naked fibre position until cleaning, is used up
Fine cutter cut both ends smooth, and optical fiber one end is placed in three-dimensional precise displacement platform metal flat groove, and end is stretched out recessed
Slot 5mm long is covered in above displacement platform metal flat using magnetic sheet, can be fixed optical fiber in displacement platform, be adjusted position
Moving stage can realize the change to optic fibre end relative position;Connect in another end insertion naked fibre adapter of single mode optical fiber with light source
It connects, concrete operations mode are as follows: open naked fibre adapter switch, single mode optical fiber end naked fibre position is inserted from naked fibre adapter tail portion
Enter, until closing naked fibre adapter switch when naked fibre adapter head is just parallel with single mode optical fiber end, it made to fix optical fiber,
Naked fibre adapter is inserted into light source jack again, the connection of optical fiber and light source can be realized, this section of optical fiber is the first Optic transmission fiber 2.
The graded index multimode fiber of a length of 2m or so is intercepted, the parameter of optical fiber is GI105/125-30/250, two
Peeling optical fibre covering about 2cm is held, dips alcohol using non-woven fabrics, is wiped repeatedly at naked fibre position until clean, wherein one end is naked
Fibre is smooth by ends cutting using optical fiber cutter, and optical fiber is cut flat with end and is placed in displacement platform groove, and groove 5mm is stretched out in end
It is long, it is covered in above displacement platform metal flat using magnetic sheet, optical fiber can be fixed on to displacement platform, adjusting displacement platform can realize
Change to optic fibre end relative position;Graded index multimode fiber interlude Miller pincers are stripped into coat and are fixed on
The nail polish of certain area is coated in plastic slide, in plastic slide, optical fiber strips section two sides and uv-curable glue is added dropwise, and prevents
Only hydrofluoric acid drop spreads out into the optical fiber for not peelling off coating layer region.It is molten in the hydrofluoric acid that suitable 40% concentration is dripped at naked fibre position
Liquid is totally submerged naked fibre in a solution of hydrofluoric acid, corrodes 20-30 minutes at room temperature, observes the diameter of optical fiber under the microscope.
When the diameter of corrosion region fibre core becomes 50 μm or so, stop corrosion immediately, this section of optical fiber is the second Optic transmission fiber 4.
Coverslip is placed in 61 top of inverted microscope object lens, instilling 3ml concentration on the cover slip is 7 × 10-3Sieve of g/L
Red bright solution enables solution that corrosion section naked fibre is completely covered in gradual change multimode fibre corrosion section naked fibre end merging solution.
Three-dimensional adjustable shelf is adjusted, the first Optic transmission fiber is controlled and the second Optic transmission fiber fibre core is located at same horizontal line, slowly
The core shift amount for changing the first Optic transmission fiber and the second Optic transmission fiber is able to observe that rhodamine liquor inspires the glimmering of different light intensity
Light, the fluorescence of generation pass through fluorescence analysis module collection and are sent into computer disposal, and the intensity by calculating fluorescence extrapolates light
Fine relative shift monitors the micro-displacement of optical fiber to realize.
The electromagnetic interference performance of the utility model is good, electrical insulating property is strong, chemical property is stable, small in size, shape-plastic, biography
Defeated loss is small.In addition, the information carrier of Fibre Optical Sensor is light in the utility model, transmission speed and the speed of response are quickly.And
And structure flexible design multiplicity, simply it is easy to make, performance is stablized.It is transmitted using graded index multimode fiber self-focusing special
Property, when to its different displacement core shift note light, the period of beam propagation path is remained unchanged, and sinusoidal transmitting beam amplitude is not
Together, it is equal to core shift amount;And the sinusoidal transmitting beam of various amplitude, part is stripped in fibre cladding, varying strength can be revealed suddenly
Die field, the evanscent field of varying strength, and can be in the fluorescence of rhodamine fluorescent solutions excitation varying strength, and then ingenious realization passes through
Fluorescence intensity may be up to micron dimension to the sensing of micro-displacement, displacement resolution.
Finally, it is stated that above embodiments are merely intended for describing the technical solutions of the present application, but not for limiting the present application, although ginseng
The utility model is described in detail according to preferred embodiment, those skilled in the art should understand that, it can be to this
The technical solution of utility model is modified or replaced equivalently, should all without departing from the objective and range of the technical program
Cover in the scope of the claims of the utility model.
Claims (10)
1. a kind of gradual change multimode fibre fluorescent effect micro-displacement sensor characterized by comprising
For generating the light source of fixed wave length light, the first Optic transmission fiber for propagating light, revealing light for propagating simultaneously side
Second Optic transmission fiber, for make the first Optic transmission fiber and the second Optic transmission fiber generate relative displacement displacement module be excited to generate it is glimmering
The fluorescent solutions of light, for acquire with the fluorescence analysis module of analysis of fluorescence intensity, for handle simultaneously output data computer;
The fluorescence analysis module acquires board group by object lens, optical filter, lens, photoelectric converter, the hardware for being arranged successively setting
At;
The light source is connected with the first Optic transmission fiber by naked fibre adapter, the first Optic transmission fiber and the second Optic transmission fiber point
It is not fixed on displacement module, the end kernel of section of the first Optic transmission fiber and the second Optic transmission fiber is mutually aligned, and is separated by one
Set a distance strips coat and etch away parts covering, exposed fibre core section level submergence in the portion of the second Optic transmission fiber
In fluorescent solutions, the fluorescent solutions are placed in objective lens surface in fluorescence analysis module, in the computer and analysis module
Photoelectric converter, hardware collection plate are connected using data line;
The light of fixed wave length is injected into the first Optic transmission fiber by light source, by adjusting displacement module, changes the first Optic transmission fiber
With the second Optic transmission fiber fibre core relative displacement size, to change propagation path of the light in the second Optic transmission fiber, so that second
Optic transmission fiber is placed in the light wave evanscent field that fibre core naked section in fluorescent solutions leaks out varying strength, can excite in fluorescent solutions
The fluorescence of different light intensity, the fluorescence excited are sent into computer demodulation calibration, can be derived that institute by fluorescence analysis module collection
Fluorescence intensity is excited, the first Optic transmission fiber is calibrated according to the fluorescence intensity difference excited and phase occurs for the second Optic transmission fiber
To the size of displacement.
2. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that first passes light
The end kernel of section of optical fiber and the second Optic transmission fiber is mutually aligned, and is separated by 1-3cm.
3. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that passed second
The portion of light optical fiber strips coat and erodes covering 2cm.
4. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that the light
Source uses 532nm narrow band laser, and optical power is adjustable, maximum power 300mw, and the angle of divergence is less than 1mrad, and output light can coupling
It closes and enters single mode optical fiber, 4 one-hour rating stability are less than ± 3%.
5. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that described
One Optic transmission fiber uses single mode optical fiber, and fibre diameter is 125 μm, and core diameter is 9 μm.
6. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that the position
Shifting formwork block uses T40-65JC manual displacement platform, is realized by adjusting three vernier knobs of manual displacement platform to displacement platform
The movement of platform x, y, z axis, displacement module are equipped with groove and tabletting, and groove diameter is 125 μm.
7. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that described
Two Optic transmission fibers, use graded index multimode fiber, and 105 μm of core diameter, cladding diameter μm, 250 μ of coat diameter
M, numerical aperture 0.3, interlude Miller pincers strip coat and corrode optical fiber to 50 μm of diameter or so with hydrofluoric acid, exposed fibre
Core section level is immersed in fluorescent solutions.
8. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that described is glimmering
Light solution is that concentration is 7 × 10-3The rhodamine liquor of g/L.
9. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that described is glimmering
Object lens in light analysis module are 20 times of object lens of Olympus infinity apochromatism.
10. gradual change multimode fibre fluorescent effect micro-displacement sensor as described in claim 1, which is characterized in that described
Optical filter in fluorescence analysis module is bandpass filter, central wavelength 620nm, half-peak band width 65nm.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111141221A (en) * | 2019-12-16 | 2020-05-12 | 西安交通大学 | Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application |
CN114136210A (en) * | 2021-11-29 | 2022-03-04 | 重庆四联特种装备材料有限公司 | But angle regulation's optical measurement support |
-
2019
- 2019-03-13 CN CN201920319578.1U patent/CN209310742U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111141221A (en) * | 2019-12-16 | 2020-05-12 | 西安交通大学 | Preparation method of optical fiber probe for micro-displacement sensor, micro-displacement sensor and application |
CN114136210A (en) * | 2021-11-29 | 2022-03-04 | 重庆四联特种装备材料有限公司 | But angle regulation's optical measurement support |
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