CN106116589A - 一种氮化铝陶瓷基板的制备方法 - Google Patents

一种氮化铝陶瓷基板的制备方法 Download PDF

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CN106116589A
CN106116589A CN201610507018.XA CN201610507018A CN106116589A CN 106116589 A CN106116589 A CN 106116589A CN 201610507018 A CN201610507018 A CN 201610507018A CN 106116589 A CN106116589 A CN 106116589A
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邱基华
付君宇
童文欣
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Chaozhou Three Circle Group Co Ltd
Nanchong Three Circle Electronics Co Ltd
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Abstract

本发明涉及一种氮化铝陶瓷基板的制备方法,属于电子陶瓷制备技术领域。本发明的制备方法包括以下步骤:(1)配制流延浆料;(2)流延成型:步骤(1)配制的流延浆料经过真空脱泡后进入流延机,经流延得到流延坯体;(3)冲压:将流延坯体冲压成单片坯体;(4)溶剂涂覆:在单片坯体的正反两面均涂覆有机溶剂;(5)叠层:将步骤(4)中已涂覆有机溶剂的单片坯体叠在一起后进行真空封装;(6)等静压压制;(7)排胶;(8)烧结,得到氮化铝陶瓷基板。本发明通过在叠层坯体的接触面涂覆溶剂,使制成的坯体均匀,烧结后的产品致密性好(流延工艺决定),外观均匀,性能均匀。

Description

一种氮化铝陶瓷基板的制备方法
技术领域
本发明属于电子陶瓷制备技术领域,具体涉及一种氮化铝陶瓷基板的制备方法,尤其是一种氮化铝陶瓷厚尺寸基板的制备方法。
背景技术
目前氮化铝基板制备技术主要有流延成及干压两种成型工艺。一般厚基板采用干压成型制备,具体是将氮化铝粉料与添加剂混合后加粘结剂,喷雾造粒,将造粒好的粉体装入干压模具进行压制,排胶后烧结,或者经过等静压处理后排胶烧结,由于压制坯体均匀性问题,成瓷基板往往需要后加工,以达到所需要的尺寸及精度要求。干压成型存在以下缺点:1、需要专门制做模具;2、由于压制的坯体不太均匀,易造成烧结后尺寸收缩不均匀,产品往往需要后续切割加工,太厚加工难度较大,成本较高;3、干压成型往往存在气孔等缺陷,影响产品强度与导热率等性能;4、同时压制不均匀也易造成烧结后的产品外观及不同部位性能存在差异;5、生产效率低。
氮化铝厚基板的另一种制备方法是采用流延叠层方式增加基板厚度,普通流延叠层存在以下缺点:1.叠层间由于空气未排净容易出现气泡;2.坯片在叠层过程中容易出现错位现象。采用流延成型制备氮化铝厚基板需要对坯体表面进行特殊处理,否则易出现分层及产品外观及性能等问题。
发明内容
本发明的目的在于克服上述现有技术中的不足之处而提供一种氮化铝陶瓷基板的制备方法,该方法可以防止产品分层、不均。
为实现上述目的,本发明采取的技术方案为:一种氮化铝陶瓷基板的制备方法,其包括以下步骤:
(1)配制流延浆料;
(2)流延成型:步骤(1)配制的流延浆料经过真空脱泡后进入流延机,经流延得到流延坯体;
(3)冲压:将流延坯体冲压成单片坯体;
(4)溶剂涂覆:在单片坯体的正反两面均涂覆有机溶剂;
(5)叠层:将步骤(4)中已涂覆有机溶剂的单片坯体叠在一起后进行真空封装;
(6)等静压压制;
(7)排胶;
(8)烧结,得到氮化铝陶瓷基板。
本发明是采用流延成型的方法制作氮化铝陶瓷基板,制备过程中,通过在叠层坯体的接触面涂覆有机溶剂,保证坯体之间的结合力,以防止坯体之间结合不均,造成烧结后产品不均或分层等问题。采用本发明方法制成的坯体均匀,烧结后的产品,致密性好,外观均匀,性能均匀。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(4)中,有机溶剂由甲苯和丁醇组成,所述甲苯与丁醇的质量比为1~1.25:1。甲苯和丁醇挥发速度有差异,选择特定比例的甲苯与丁醇,可以保证溶剂挥发的同时也有残留,防止挥发过快造成表面开裂和分层。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(3)和步骤(4)之间还包括步骤(3a):将单片坯体的正反两面分别喷砂粗化处理。表面进行喷砂粗化处理,可使坯体具有足够的强度。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述流延浆料的配制方法为:将970份氮化铝粉体、30~50份稀土氧化物、150~180份甲苯和100~120份丁醇加入到球磨罐中,混合20~24小时;再加入由100~120份聚乙烯醇缩丁醛、150~180份甲苯、100~120份丁醇和30~50份邻苯二甲酸二丁酯组成的混合物,继续混合15~18小时后出料,得到流延浆料;其中,所述份为重量份。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(2)中,流延坯体的厚度为0.7~0.8mm。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(3)中,单片坯体的长和宽均为150mm。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(5)中,将4-5片单片坯体叠在一起。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(6)中,在压力为80~100MPa、温度为80℃的条件下,等静压压制30分钟。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(7)中,于550~600℃排胶3~5小时。
作为本发明所述氮化铝陶瓷基板的制备方法的优选实施方式,所述步骤(8)中,在真空石墨炉中,在氮气的保护下于1700~1800℃烧结3~5小时。
与现有技术相比,本发明的有益效果为:本发明通过在叠层坯体的接触面涂覆溶剂,使制成的坯体均匀,烧结后的产品致密性好(流延工艺决定),外观均匀,性能均匀。并且,本发明通过冲压可将坯体制成所需要的尺寸规格,制得的产品外围尺寸精度高,无需对长宽尺寸进行切割加工,降低成本。此外,本发明的方法生产效率高,可实现自动化处理。
具体实施方式
为更好地说明本发明的目的、技术方案和优点,下面将结合具体实施例对本发明作进一步说明。
实施例1
本发明氮化铝陶瓷基板的制备方法的一种实施例,本实施例所述氮化铝陶瓷基板的制备方法包括以下步骤:
(1)配制流延浆料:将970份氮化铝粉体、30份稀土氧化物、150份甲苯和120份丁醇加入到球磨罐中,混合20小时;再加入由100份聚乙烯醇缩丁醛、150份甲苯、120份丁醇和40份邻苯二甲酸二丁酯组成的混合物,继续混合16.5小时后出料,得到流延浆料;其中,所述份为重量份;
(2)流延成型:步骤(1)配制的流延浆料经过真空脱泡后进入流延机,流延成厚度为0.7mm的流延坯体;
(3)冲压:将流延坯体冲压成长和宽均为150mm的单片坯体;
(4)喷砂粗化:将单片坯体的正反两面分别喷砂粗化处理;
(5)溶剂涂覆:在单片坯体的正反两面均涂覆有机溶剂;有机溶剂由甲苯和丁醇组成,且甲苯与丁醇的质量比为1:1;
(6)叠层:将步骤(5)中已涂覆有机溶剂的4片单片坯体叠在一起后进行真空封装;
(7)等静压压制:在压力为80MPa、温度为80℃的条件下,等静压压制30分钟;
(8)排胶:将压制后所得坯体置于空气气氛的排胶炉中,于550℃排胶5小时;
(9)烧结:在真空石墨炉中,在氮气的保护下于1700℃烧结5小时,得到氮化铝陶瓷基板。
实施例2
本发明氮化铝陶瓷基板的制备方法的一种实施例,本实施例所述氮化铝陶瓷基板的制备方法包括以下步骤:
(1)配制流延浆料:将970份氮化铝粉体、50份稀土氧化物、180份甲苯和100份丁醇加入到球磨罐中,混合24小时;再加入由120份聚乙烯醇缩丁醛、160份甲苯、100份丁醇和50份邻苯二甲酸二丁酯组成的混合物,继续混合18小时后出料,得到流延浆料;其中,所述份为重量份;
(2)流延成型:步骤(1)配制的流延浆料经过真空脱泡后进入流延机,流延成厚度为0.8mm的流延坯体;
(3)冲压:将流延坯体冲压成长和宽均为150mm的单片坯体;
(4)喷砂粗化:将单片坯体的正反两面分别喷砂粗化处理;
(5)溶剂涂覆:在单片坯体的正反两面均涂覆有机溶剂;有机溶剂由甲苯和丁醇组成,且甲苯与丁醇的质量比为1.25:1;
(6)叠层:将步骤(5)中已涂覆有机溶剂的5片单片坯体叠在一起后进行真空封装;
(7)等静压压制:在压力为100MPa、温度为80℃的条件下,等静压压制30分钟;
(8)排胶:将压制后所得坯体置于空气气氛的排胶炉中,于570℃排胶4小时;
(9)烧结:在真空石墨炉中,在氮气的保护下于1750℃烧结4小时,得到氮化铝陶瓷基板。
实施例3
本发明氮化铝陶瓷基板的制备方法的一种实施例,本实施例所述氮化铝陶瓷基板的制备方法包括以下步骤:
(1)配制流延浆料:将970份氮化铝粉体、40份稀土氧化物、165份甲苯和110份丁醇加入到球磨罐中,混合22小时;再加入由110份聚乙烯醇缩丁醛、180份甲苯、110份丁醇和30份邻苯二甲酸二丁酯组成的混合物,继续混合15小时后出料,得到流延浆料;其中,所述份为重量份;
(2)流延成型:步骤(1)配制的流延浆料经过真空脱泡后进入流延机,流延成厚度为0.75mm的流延坯体;
(3)冲压:将流延坯体冲压成长和宽均为150mm的单片坯体;
(4)喷砂粗化:将单片坯体的正反两面分别喷砂粗化处理;
(5)溶剂涂覆:在单片坯体的正反两面均涂覆有机溶剂;有机溶剂由甲苯和丁醇组成,且甲苯与丁醇的质量比为1.1:1;
(6)叠层:将步骤(5)中已涂覆有机溶剂的4片单片坯体叠在一起后进行真空封装;
(7)等静压压制:在压力为90MPa、温度为80℃的条件下,等静压压制30分钟;
(8)排胶:将压制后所得坯体置于空气气氛的排胶炉中,于600℃排胶3小时;
(9)烧结:在真空石墨炉中,在氮气的保护下于1800℃烧结3小时,得到氮化铝陶瓷基板。
最后所应当说明的是,以上实施例仅用以说明本发明的技术方案而非对本发明保护范围的限制,尽管参照较佳实施例对本发明作了详细说明,本领域的普通技术人员应当理解,可以对本发明的技术方案进行修改或者等同替换,而不脱离本发明技术方案的实质和范围。

Claims (10)

1.一种氮化铝陶瓷基板的制备方法,其特征在于:包括以下步骤:
(1)配制流延浆料;
(2)流延成型:步骤(1)配制的流延浆料经过真空脱泡后进入流延机,经流延得到流延坯体;
(3)冲压:将流延坯体冲压成单片坯体;
(4)溶剂涂覆:在单片坯体的正反两面均涂覆有机溶剂;
(5)叠层:将步骤(4)中已涂覆有机溶剂的单片坯体叠在一起后进行真空封装;
(6)等静压压制;
(7)排胶;
(8)烧结,得到氮化铝陶瓷基板。
2.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(4)中,有机溶剂由甲苯和丁醇组成,所述甲苯与丁醇的质量比为1~1.25:1。
3.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(3)和步骤(4)之间还包括步骤(3a):将单片坯体的正反两面分别喷砂粗化处理。
4.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述流延浆料的配制方法为:将970份氮化铝粉体、30~50份稀土氧化物、150~180份甲苯和100~120份丁醇加入到球磨罐中,混合20~24小时;再加入由100~120份聚乙烯醇缩丁醛、150~180份甲苯、100~120份丁醇和30~50份邻苯二甲酸二丁酯组成的混合物,继续混合15~18小时后出料,得到流延浆料;其中,所述份为重量份。
5.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(2)中,流延坯体的厚度为0.7~0.8mm。
6.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(3)中,单片坯体的长和宽均为150mm。
7.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(5)中,将4-5片单片坯体叠在一起。
8.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(6)中,在压力为80~100MPa、温度为80℃的条件下,等静压压制30分钟。
9.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(7)中,于550~600℃排胶3~5小时。
10.如权利要求1所述的氮化铝陶瓷基板的制备方法,其特征在于:所述步骤(8)中,在真空石墨炉中,在氮气的保护下于1700~1800℃烧结3~5小时。
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