CN106098966A - A kind of thin film and restorative procedure, display base plate and preparation method thereof - Google Patents
A kind of thin film and restorative procedure, display base plate and preparation method thereof Download PDFInfo
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- CN106098966A CN106098966A CN201610500519.5A CN201610500519A CN106098966A CN 106098966 A CN106098966 A CN 106098966A CN 201610500519 A CN201610500519 A CN 201610500519A CN 106098966 A CN106098966 A CN 106098966A
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- thin film
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- film
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present invention relates to Display Technique field, disclose a kind of thin film and restorative procedure, display base plate and preparation method thereof.Described forming thin film heterogeneity, described restorative procedure includes: first determine an area to be repaired, described out-of-flatness region is made to fall completely within described area to be repaired, then the thin film in described area to be repaired is removed, the last material again filling the described thin film of making in described area to be repaired, form restoring area, and the difference in height of the second surface of the thin film of the first surface of the thin film of the described restoring area neighboring area peripheral with being positioned at described restoring area is in preset range, improve film forming homogeneity, it is ensured that the display quality of product.
Description
Technical field
The present invention relates to Display Technique field, particularly relate to a kind of thin film and restorative procedure, display base plate and system thereof
Make method.
Background technology
In the manufacturing process of display device, the fabricating quality of each display thin film directly affects the display quality of final products.
When utilizing nozzle to pass through InkJet printing processes preparation display thin film, can be because the reason such as granule or material residual causes film forming to lack
Fall into.
In prior art, for having the thin film 1 of depression defect (in the dotted line frame in Fig. 1), nozzle typically can be utilized to enter
Row repair, but the thin film volume of defect area is generally less than 5pL, and a diameter of 5um of nozzle, minimum inkjet volume exists
About 10pL, can cause bump defects after reparation, as shown in the dotted line frame in Fig. 2, it is impossible to reach to repair purpose so that film forming
Homogeneity is poor.If changing the diameter nozzle less than 5um, making precision and being not easily accomplished, and asking of blocking easily occurs
Inscribing thus frequently result in the machine of delaying, impact produces production capacity.
Summary of the invention
The present invention provides a kind of thin film and restorative procedure, display base plate and preparation method thereof, in order to provide a kind of thin film
Restorative procedure, it is ensured that the homogeneity of thin film on display base plate.
For solving above-mentioned technical problem, providing the restorative procedure of a kind of thin film in the embodiment of the present invention, described thin film is arranged
In a substrate, described thin film has out-of-flatness region, and the thin film in described out-of-flatness region is not away from the surface of described substrate
Burnishing surface, described restorative procedure includes:
Determine an area to be repaired, make described out-of-flatness region fall completely within described area to be repaired；
Remove the thin film in described area to be repaired；
In described area to be repaired, fill the material making described thin film, form restoring area, and described restoring area
The difference in height of second surface of thin film of the first surface of the thin film neighboring area peripheral with being positioned at described restoring area in advance
If scope, described difference in height is described first surface and second surface distance on the direction being perpendicular to described second surface.
The embodiment of the present invention also provides for the manufacture method of a kind of display base plate, including formed packaging film step, when
When described packaging film has out-of-flatness region, use restorative procedure as above that described packaging film is repaired.
Also providing for a kind of thin film in the embodiment of the present invention, described thin film includes restoring area and is positioned at outside described restoring area
The neighboring area enclosed, described restoring area uses restorative procedure as above to prepare.
Also providing for a kind of display base plate in the embodiment of the present invention, including packaging film, described packaging film uses as above institute
The thin film stated.
Having the beneficial effect that of the technique scheme of the present invention:
In technique scheme, when forming thin film heterogeneity, it is first determined an area to be repaired, make described uneven main plot
Territory falls completely within described area to be repaired, then removes the thin film in described area to be repaired, the most again described to be repaired
Fill the material making described thin film in multiple region, form restoring area, and the first surface of the thin film of described restoring area and
It is positioned at the difference in height of second surface of the thin film of the peripheral neighboring area of described restoring area in preset range, improves film forming homogeneous
Property, it is ensured that the display quality of product.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, also may be used
To obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 represents that the surface of thin film has the structural representation of depression defect；
Fig. 2 represents the structural representation after using reparation of the prior art to repair the depression defect in Fig. 1；
Fig. 3 represents the restorative procedure flow chart of thin film in the embodiment of the present invention；
Fig. 4-Fig. 6 represents the repair process figure of the thin film to surface in the embodiment of the present invention with depression defect；
Fig. 7-Fig. 9 represents the repair process figure of the thin film to surface in the embodiment of the present invention with bump defects；
Figure 10 represents the procedure chart of the thin film removing area to be repaired in the embodiment of the present invention；
Figure 11 represents the procedure chart filling the material making thin film in the embodiment of the present invention in area to be repaired；
Figure 12 represents the structural representation of display base plate in the embodiment of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the detailed description of the invention of the present invention is described in further detail.Following reality
Execute example for the present invention is described, but be not limited to the scope of the present invention.
Embodiment one
In the preparation process of display device, it may appear that forming thin film homogeneity is poor, reduce the skill of the display quality of product
Art problem.
In order to solve above-mentioned technical problem, the present embodiment provides the restorative procedure of a kind of thin film, for thin film is carried out
Repair, improve the homogeneity of thin film.Described thin film is arranged in a substrate, and described thin film has out-of-flatness region, described injustice
The thin film in territory, main plot is out-of-flatness face away from the surface of described substrate.As it is shown on figure 3, described restorative procedure includes:
Determine an area to be repaired, make described out-of-flatness region fall completely within described area to be repaired；
Remove the thin film in described area to be repaired；
In described area to be repaired, fill the material making described thin film, form restoring area, and described restoring area
The difference in height of second surface of thin film of the first surface of the thin film neighboring area peripheral with being positioned at described restoring area in advance
If scope, described difference in height is described first surface and second surface distance on the direction being perpendicular to described second surface.
After thin film being repaired by above-mentioned restorative procedure, it is possible to be effectively improved the flatness of film surface.Improve thin
The homogeneity of film, it is ensured that the display quality of product.
It should be noted that unless specified or limited otherwise, in the present invention, the surface of thin film is the thin film surface away from substrate.Institute
State out-of-flatness region be surface be depression (as shown in Figure 1), surface be protruding (as shown in Figure 7), or both combinations, by
The technical scheme of invention all can realize repairing.
Shown in Fig. 4 and Fig. 7, first the thin film restorative procedure of the present invention determines an area to be repaired 100, makes thin film 1
Out-of-flatness region fall completely within area to be repaired 100, the purpose of this step is to ensure that follow-up fills out in area to be repaired 100
When filling material, it is possible to reach repair purpose, i.e. in area to be repaired 100 packing material formed restoring area 101, its with
The difference in height on the surface of the thin film 1 of neighboring area, in preset range, is effectively improved the surface smoothness of thin film, in conjunction with Fig. 6 and
Shown in Fig. 9.Preferably, the thickness of the thickness of the thin film 1 of restoring area 101 and the thin film 1 of the neighboring area being positioned at restoring area 101
Spend completely the same.Owing to the thin film of restoring area 101 and described neighboring area is prepared by same material, and same layer, therefore with same
One labelling represents.
Wherein, the determination of area to be repaired 100 is relevant with the pad parameter of pad device in subsequent technique, and described filling sets
It is ready for use in area to be repaired 100 and fills the material making thin film 1, form restoring area 101 (shown in Fig. 5 and Fig. 6),
And the second table of the first surface of the thin film 1 of restoring area 101 and the thin film 1 of the neighboring area being positioned at restoring area 101 periphery
The difference in height in face is in preset range.Particularly as follows: the material volume that described pad device was filled within the unit interval is less than repairing district
The volume of the thin film 1 in territory 101.
The described pad device of the present embodiment is ink jet printing device, utilizes nozzle 3 ink-jet in area to be repaired 100 to beat
Print the material making described thin film, form restoring area 101, shown in Figure 11 and Fig. 6.Owing to ink jet printing device can be
Ink-jet printing material in setting regions, default patterning processes, simplify processing technology.
Further, the volume of the thin film arranging described restoring area is more than the minimum spray within the unit interval of the described nozzle
Ink volume, effectively reaches the purpose repaired.Because if the volume of the thin film of described restoring area is less than described nozzle in unit
Minimum inkjet volume in time, then, utilize described nozzle area to be repaired canopy film printed material formed restoring area time, institute
The first surface of the thin film stating restoring area is much higher than the second surface on the surface of neighboring area, forms projection, it is impossible to enough reach
To the purpose repaired.
Before filling the material of the described thin film of making in described area to be repaired, also need to remove in described area to be repaired
Thin film, to remove the surface of surface irregularity.Laser sintering process specifically can be used to remove in described area to be repaired
Thin film.Wherein, laser sintering process is the technology being sintered thin film for thermal source with laser, owing to the energy of laser is higher,
A lot of materials can be sintered.And laser beam collection neutralization penetration capacity is little, is suitable to little area, the sintering of thin film.
Owing to the area of described area to be repaired is relatively big, in order to only the thin film of described area to be repaired be carried out selectivity burning
Knot, optionally, as shown in Figure 10, the step using laser sintering process to remove the thin film in described area to be repaired includes:
Thering is provided one to block 2, shutter 2 has window, described window is corresponding with the position of area to be repaired 100, and institute
State window projection on the substrate 10 and be positioned at the projection on the substrate 10 of described area to be repaired；
Laser beam scans thin film 1 by described window, removes the thin film in area to be repaired 100.
Shutter 2 can stop that laser light sinters the thin film 1 in other regions.
In above-mentioned steps, limited the sweep limits of laser by shutter, thus realize selective sintering, control surface
The removal of smooth thin film, shortens repair time, improves production capacity.Scope due to sintering is more than the model of laser beam actual scanning
Enclose, it is therefore desirable to the projection on the substrate 10 of described window is set and is positioned at the projection on the substrate 10 of described area to be repaired.
Shown in Fig. 4-Fig. 6, Figure 10 and Figure 11, in a specific embodiment, to having out-of-flatness region
The method that thin film carries out repairing includes:
Determine an area to be repaired 100, make described out-of-flatness region fall completely within area to be repaired 100, such as Fig. 4 institute
Show；
Laser sintering process is used to remove the thin film of area to be repaired 100, shown in Fig. 5 and Figure 10；
Utilize nozzle 3 to fill the material making described thin film in area to be repaired 100, form restoring area 101, in conjunction with
Shown in Fig. 6 and Figure 11, and the first surface of the thin film 1 of restoring area 101 and the neighboring area being positioned at restoring area 101 periphery
The difference in height of the second surface of thin film 1 is in preset range, and described difference in height is described first surface and second surface is being perpendicular to
Distance on the direction of described second surface.Preferably, the first surface of the thin film 1 of restoring area 101 be positioned at restoring area
The difference in height of the second surface of the thin film 1 of the neighboring area of 101 peripheries is zero, and the thickness of the thin film 1 of restoring area 101 is with described
The thickness of the thin film 1 of neighboring area is completely the same.
In above-mentioned detailed description of the invention, the volume of the thin film arranging restoring area 101 is more than nozzle 3 within the unit interval
Minimum inkjet volume such that it is able to effectively reach the purpose repaired.Further, the window on laser beam transparent one shutter 2
The thin film of scanning area to be repaired 100, the thin film in sintering area to be repaired 100, control sintering region with effective.
Shown in Fig. 6 and Fig. 9, also providing for a kind of thin film 1 in the present embodiment, thin film 1 includes restoring area 101 and is positioned at
The neighboring area of restoring area 101 periphery, restoring area 101 uses above-mentioned restorative procedure to prepare, and the restoring area 101 prepared
The difference in height of second surface of thin film 1 of first surface and neighboring area of thin film 1 in preset range, be effectively improved thin film table
The flatness in face, improves the homogeneity of thin film, it is ensured that the display quality of product.Wherein, described difference in height is described first surface
With second surface distance on the direction being perpendicular to described second surface.
Embodiment two
Based on same inventive concept, the present embodiment provides the manufacture method of a kind of display base plate, including forming thinner package
The step of film, when described packaging film has out-of-flatness region, uses the restorative procedure in embodiment one to described thinner package
Film is repaired, and improves the homogeneity of packaging film, plays obstruct water oxygen effect, the property of protection display base plate semiconductor-on-insulator device
Energy.
Wherein, the step forming packaging film includes:
InkJet printing processes is utilized to form organic packaging film；
Specifically, when described organic packages thin film has out-of-flatness region, use the restorative procedure pair in embodiment one
Described organic packages thin film is repaired.
In above-mentioned steps, for organic packages thin film, generally prepared by InkJet printing processes, air spots easily occurs
Whole defect, can realize repairing by the restorative procedure in embodiment one.Organic packages thin film can improve display base plate
Flexible, it is adaptable to flexible base board.
In actual application, described packaging film also needs to include inorganic encapsulated thin film, and it primarily serves obstruct water oxygen
Effect.In the present embodiment, the step forming packaging film also includes:
Forming the first inorganic encapsulated thin film and the second inorganic encapsulated thin film, described organic packages thin film is positioned at described first nothing
Between machine packaging film and the second inorganic encapsulated thin film.
The packaging film formed by above-mentioned steps includes that the first inorganic encapsulated thin film of sandwich structure, organic packages are thin
Film and the second inorganic encapsulated thin film, double-deck inorganic encapsulated thin film can improve the effect intercepting water oxygen.Described organic packages thin film
Between described first inorganic encapsulated thin film and the second inorganic encapsulated thin film, it is possible to the thickness of thinning every layer of inorganic encapsulated thin film
Degree, increases the flexibility of inorganic encapsulated thin film, improves the flexibility of substrate further.
Also providing for a kind of display base plate in the present embodiment, including packaging film, described packaging film uses in embodiment one
Thin film, including restoring area be positioned at the neighboring area that described restoring area is peripheral, described restoring area uses embodiment one
In restorative procedure prepare, and the packaging film of first surface and the described neighboring area of the packaging film of the restoring area prepared
The difference in height of second surface in preset range, be effectively improved the flatness on packaging film surface, improve the homogeneous of packaging film
Property, it is ensured that the display quality of product.Wherein, described difference in height is described first surface and second surface is being perpendicular to described second
Distance on the direction on surface.The surface of packaging film is the surface of the substrate 10 away from display base plate.
For flexible display substrates, as shown in figure 12, described packaging film includes the organic packages prepared by organic material
Thin film 1；It is specially organic packages thin film 1 and uses the thin film in embodiment one, it is ensured that the homogeneity of organic packages thin film 1.
In order to ensure the performance of the semiconductor device 13 on display base plate, described packaging film also includes by inorganic material system
The inorganic encapsulated thin film obtained, for intercepting the water oxygen in environment.Optionally, described inorganic encapsulated thin film includes the first inorganic encapsulated
Thin film 11 and the second inorganic encapsulated thin film 12, organic packages thin film 1 is positioned at the first inorganic encapsulated thin film 11 and the second inorganic encapsulated
Between thin film 12, increase the flexibility of display base plate further.
Described display base plate can be liquid crystal display substrate, oled display substrate or other kinds of display base plate.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For Yuan, on the premise of without departing from the technology of the present invention principle, it is also possible to make some improvement and replacement, these improve and replace
Also should be regarded as protection scope of the present invention.
Claims (12)
1. a restorative procedure for thin film, described thin film is arranged in a substrate, and described thin film has an out-of-flatness region, described not
The thin film of flattened region is out-of-flatness face away from the surface of described substrate, it is characterised in that described restorative procedure includes:
Determine an area to be repaired, make described out-of-flatness region fall completely within described area to be repaired；
Remove the thin film in described area to be repaired；
In described area to be repaired, fill the material making described thin film, form restoring area, and described restoring area is thin
The difference in height of the second surface of the thin film of the neighboring area that the first surface of film is peripheral with being positioned at described restoring area is at default model
Enclosing, described difference in height is described first surface and second surface distance on the direction being perpendicular to described second surface.
Restorative procedure the most according to claim 1, it is characterised in that utilize nozzle ink-jet in described area to be repaired to beat
Print the material making described thin film, form described restoring area.
Restorative procedure the most according to claim 2, it is characterised in that the volume of the thin film of described restoring area is more than described
The nozzle minimum inkjet volume within the unit interval.
Restorative procedure the most according to claim 1, it is characterised in that use laser sintering process to remove described district to be repaired
Thin film in territory.
Restorative procedure the most according to claim 4, it is characterised in that use laser sintering process to remove described district to be repaired
The step of the thin film in territory includes:
Thering is provided a shutter, described shutter has window, described window is corresponding with the position of described area to be repaired, and institute
State window projection on the substrate and be positioned at the projection on the substrate of described area to be repaired；
Laser beam scans described thin film by described window, removes the thin film in described area to be repaired.
Restorative procedure the most according to claim 1, it is characterised in that the thickness of the thin film of described restoring area and described week
The consistency of thickness of the thin film of edge regions.
7. a manufacture method for display base plate, including the step forming packaging film, it is characterised in that when described packaging film
When having out-of-flatness region, use the restorative procedure described in any one of claim 1-6 that described packaging film is repaired.
Manufacture method the most according to claim 7, it is characterised in that the step forming packaging film includes:
InkJet printing processes is utilized to form organic packaging film；
Specifically, when described organic packages thin film has out-of-flatness region, use the reparation described in any one of claim 1-6
Described organic packages thin film is repaired by method.
Manufacture method the most according to claim 8, it is characterised in that the step forming packaging film also includes:
Forming the first inorganic encapsulated thin film and the second inorganic encapsulated thin film, described organic packages thin film is positioned at described first inorganic envelope
Between dress thin film and the second inorganic encapsulated thin film.
10. a thin film, it is characterised in that described thin film includes restoring area and is positioned at the surrounding zone that described restoring area is peripheral
Territory, described restoring area uses the restorative procedure described in any one of claim 1-6 to prepare.
11. 1 kinds of display base plates, including packaging film, it is characterised in that described packaging film uses described in claim 10
Thin film.
12. display base plates according to claim 11, it is characterised in that described packaging film includes being prepared by organic material
Organic packages thin film；
It is specially described organic packages thin film and uses the thin film described in claim 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610500519.5A CN106098966B (en) | 2016-06-29 | 2016-06-29 | A kind of film and its restorative procedure, display base plate and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610500519.5A CN106098966B (en) | 2016-06-29 | 2016-06-29 | A kind of film and its restorative procedure, display base plate and preparation method thereof |
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| CN106098966A true CN106098966A (en) | 2016-11-09 |
| CN106098966B CN106098966B (en) | 2018-04-24 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108520916A (en) * | 2018-05-21 | 2018-09-11 | 武汉华星光电半导体显示技术有限公司 | A kind of flexible base board and its bubble repair structure |
| CN110034246A (en) * | 2018-01-04 | 2019-07-19 | 帆宣系统科技股份有限公司 | The polyimide film method for repairing and mending of Organic Light Emitting Diode |
| CN111564557A (en) * | 2019-02-13 | 2020-08-21 | 上海和辉光电有限公司 | Flexible substrate, preparation method thereof, display panel and display device |
| CN114631050A (en) * | 2019-10-29 | 2022-06-14 | 三星显示有限公司 | Panel repairing device and panel repairing method |
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| CN110034246A (en) * | 2018-01-04 | 2019-07-19 | 帆宣系统科技股份有限公司 | The polyimide film method for repairing and mending of Organic Light Emitting Diode |
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| CN111564557A (en) * | 2019-02-13 | 2020-08-21 | 上海和辉光电有限公司 | Flexible substrate, preparation method thereof, display panel and display device |
| CN114631050A (en) * | 2019-10-29 | 2022-06-14 | 三星显示有限公司 | Panel repairing device and panel repairing method |
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| Publication number | Publication date |
|---|---|
| CN106098966B (en) | 2018-04-24 |
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