CN104493366A - Laser repair system - Google Patents
Laser repair system Download PDFInfo
- Publication number
- CN104493366A CN104493366A CN201410783128.XA CN201410783128A CN104493366A CN 104493366 A CN104493366 A CN 104493366A CN 201410783128 A CN201410783128 A CN 201410783128A CN 104493366 A CN104493366 A CN 104493366A
- Authority
- CN
- China
- Prior art keywords
- laser
- repair system
- optical facilities
- sideboard
- blocking mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention discloses a laser repair system comprising a laser unit and a laser blocking mechanism. The laser unit is used for generating and outputting laser for repair; the laser blocking mechanism comprises multiple laser blocking components, each laser blocking component comprises multiple adjacent movable baffles arranged in the laser propagation direction, and the movable baffles of the laser blocking components form a shape-adjustable laser passing area. By the laser repair system, different positions of the movable baffles can be changed so as to form the laser transmitting areas of different shapes, and laser can transmit from the laser transmitting areas prior to repairing a substrate. A photomask is omitted, repair patterns of different shapes are formed by moving and combining of the movable baffles, repair of complicated patterns can be performed by the simple structure, the repair process is simple, and cost is low.
Description
Technical field
The present invention relates to laser cutting field, particularly a kind of laser repair system.
Background technology
Along with the development of electronic technology, liquid crystal display has become common display device.Substrate in liquid crystal display comprises electrode layer, is specifically divided into grid layer, source layer and drain electrode layer etc.After electrode layer completes, often have excessive residual, destroy normal electrode pattern.For this situation, usually adopt the method for laser cutting to repair, namely utilize laser cutting to fall excessive residual, and this part is cut into normal electrode pattern.
Reparation for complex pattern is normally undertaken repairing by light masking process.But in photomask technique, need to use the mask drawn and have pattern to be repaired, and transferred on substrate, and then carry out laser cutting to substrate, whole process is complicated, and repair time increases, thus adds rehabilitation cost.
Summary of the invention
Based on this, be necessary to provide a kind of simple laser repair system being applicable to complex pattern and repairing.
A kind of laser repair system, it comprises: laser instrument, in order to produce and to export the laser repaired; Laser blocking mechanism, comprise multiple laser stop member, described laser stop member comprises the multiple sideboards be disposed adjacent be arranged on laser propagation direction, and the laser that multiple sideboards of described multiple laser stop member form a reconfigurable passes through region.
Wherein in an embodiment, multiple sideboard be disposed adjacent staggers setting on described laser propagation direction.
Wherein in an embodiment, the activity direction of described sideboard is crossing with described laser propagation direction.
Wherein in an embodiment, the quantity of described multiple laser stop member is four, and described multiple laser stop member is cross distribution.
Wherein in an embodiment, described laser is by area square or rectangle or triangle or trapezoidal or polygon or porous design.
Wherein in an embodiment, described laser blocking mechanism also comprises driving mechanism, and described driving mechanism changes the position of described sideboard.
Wherein in an embodiment, described driving mechanism comprises motor.
Wherein in an embodiment, described laser instrument comprises laser amplifier or laser oscillator.
Wherein in an embodiment, also comprise: the first optical facilities, in order to regulate described laser intensity; And second optical facilities, in order to regulate the characteristic of the laser exported from described first optical facilities; Described first optical facilities and the second optical facilities are successively set between described laser instrument and laser blocking mechanism.
Wherein in an embodiment, also comprise: the 3rd optical facilities, be arranged on the side in the Laser output direction of described laser blocking mechanism, in order to regulate the characteristic of the laser exported from described laser blocking mechanism.
Above-mentioned laser repair system, can form difform laser transmission region by changing the position of sideboard, laser can from laser transmission region through, then substrate is repaired.This system does not need to utilize photomask, is combined into difform reparation pattern by the movement of stir yourself baffle plate, and simple structure just can carry out the reparation of complex pattern, and repair process is simple, with low cost.
Sideboard has error and produces in process, and the sideboard in same laser blocking mechanism staggers setting on laser propagation direction, can reduce the error in repair process.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of laser repair system of the present invention;
Fig. 2 is the top view of laser blocking mechanism of the present invention;
Fig. 3 is the sectional view along A-A in Fig. 2.
Wherein, 110. laser instruments, 120. first optical facilities, 130. second optical facilities, 140. laser blocking mechanisms, 1401. first laser blocking mechanisms, 1402. second laser blocking mechanisms, 1403. the 3rd laser blocking mechanisms, 1404. the 4th laser blocking mechanisms, 141. sideboards, 142. laser pass through region, 143. driving mechanisms, 150. the 3rd optical facilities, 160. substrates.
Detailed description of the invention
Please refer to Fig. 1, Fig. 1 is the laser repair system in the present invention.Laser repair system comprises laser instrument 110, laser blocking mechanism 140.
Laser instrument 110 is in order to produce and to export the laser repaired, and laser instrument 110 can be laser amplifier or laser oscillator.The excited species that excites laser amplifier arrives the higher state of energy, and excited species produces amplification to the light radiation of response wave length, and laser amplifier output intensity is amplified and the light radiation consistent with incident light wave phase place, frequency and direction.Laser oscillator is, in resonant cavity, places excited species, light radiation reflections propagate in the axial direction in resonant cavity, Multiple through then out excited species, and light radiation is exaggerated, and forms that a beam intensity is large, light beam in direction set, and this light beam is laser, and Output of laser.
The laser that laser instrument 110 exports is irradiated on laser blocking mechanism 140, and laser blocking mechanism 140 comprises multiple laser stop member, limits laser by region 142 by the relative position changing laser stop member.Laser blocking mechanism 140 not transmission is irradiated to the laser on it, and laser can be transmitted through laser by region 142, and is irradiated to by laser on substrate 160, repairs substrate 160.By the relative position of mobile laser blocking mechanism 140, change the shape of laser by region 142, thus change the pattern that laser-transmitting to substrate is formed, so just can carry out the reparation of various different pattern.
In the present embodiment, please refer to Fig. 2, laser blocking mechanism 140 comprises four laser stop members, is respectively the first laser stop member 1401, second laser stop member 1402, the 3rd laser stop member 1403, the 4th laser stop member 1404.Laser stop member is oppositely arranged between two, and along the direction of propagation observation of the laser that laser instrument 110 exports, they present cross distribution, and centre is formed with laser by region 142 wherein.The quantity of certain laser stop member can be arranged according to actual conditions.
Each laser stop member comprises multiple sideboard 141 and driving mechanism 143, and driving mechanism 143 drives sideboard 141 to move, and the activity direction of sideboard 141 is crossing with laser propagation direction.In the present embodiment, driving mechanism 143 comprises motor.Certainly can not need driving mechanism 143, mode manually moves sideboard 141.
The activity direction of sideboard 141 is crossing with laser propagation direction comprises the activity direction of sideboard 141 and laser propagation direction intersects vertically, and sideboard 141 moves up at above-mentioned Vertical Square, thus limits laser by region 142.
Above-mentionedly return non-perpendicular crossing in the activity direction that comprises sideboard 141 and laser propagation direction mutually, sideboard 141 moves in the direction in which, limits laser by region 142.
The above-mentioned activity direction that simultaneously can comprise sideboard 141 and the laser propagation direction of intersecting intersects vertically and non-perpendicular crossing of the activity direction of sideboard 141 and laser propagation direction, in multiple sideboard 141, some sideboard 141 moves along the vertical direction of the direction of propagation with laser, and a part of sideboard 141 moves up in the side non-perpendicular with the direction of propagation of laser.
The quantity of sideboard 141 can be arranged by actual conditions such as the sizes in region 142 according to the thickness of sideboard 141 and laser.
Please refer to Fig. 3, the sideboard 141 in same laser stop member staggers setting on the direction of propagation of laser.In the present embodiment, adjacent sideboard 141 vertical direction in figure 3 staggers setting at a certain distance, presents stepped distribution.Produce because sideboard 141 has error in process, have a certain distance with the specification of the sideboard 141 of setting, when mobile sideboard 141, the laser of formation, by the error of region 142 with setting shape, reduces the error in repair process.
Certainly, the layout of sideboard 141 is not limited to above-mentioned set-up mode, is crisscross arranged between adjacent activities baffle plate 141, and multiple sideboard 141 presents zigzag distribution.As long as ensure that the error of sideboard 141 in process does not affect the accuracy of laser by the shape in region 142.
The laser formed at laser blocking mechanism 140 can be square by the shape in region 142 or rectangle or triangle or trapezoidal or polygon or porous.As long as controlling organization 143 drives sideboard to suitable position that laser just can be made to form corresponding shape and size by region 142.Certainly, above-mentioned various shape is not limited to.
Laser repair system can also comprise the first optical facilities 120, second optical facilities 130, the 3rd optical facilities 150.The laser that laser instrument 110 exports by the first optical facilities 120, second optical facilities 130, laser blocking mechanism 140 and the 3rd optical facilities 150, is finally transmitted to substrate 160, repairs successively.
First optical facilities 120 and the second optical facilities 130 are successively set between laser instrument 110 and laser blocking mechanism 140.3rd optical facilities 150 are arranged between laser blocking mechanism 140 and substrate 160.
The laser intensity that first optical facilities 120 export for regulating laser instrument 110.First optical facilities 110 can comprise the attenuator of Attenuated laser intensity.
Second optical facilities 130 are for changing the characteristic from the first optical facilities 120 Output of laser.Second optical facilities 130 can comprise the beam expander of collector lens for improving laser uniformity or expansion of laser light light beam.
3rd optical facilities 150 for changing the characteristic of the laser transmitted from laser blocking mechanism 140, to reach projection and the laser intensity of the pattern needed for reparation.3rd optical facilities 150 can comprise converges laser and the light-collecting lens improving energy density.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a laser repair system, is characterized in that, comprising:
Laser instrument, in order to produce and to export the laser repaired;
Laser blocking mechanism, comprise multiple laser stop member, described laser stop member comprises the multiple sideboards be disposed adjacent be arranged on laser propagation direction, and the laser that multiple sideboards of described multiple laser stop member form a reconfigurable passes through region.
2. laser repair system according to claim 1, is characterized in that, multiple sideboard be disposed adjacent staggers setting on described laser propagation direction.
3. laser repair system according to claim 1, is characterized in that, the activity direction of described sideboard is crossing with described laser propagation direction.
4. laser repair system according to claim 1, is characterized in that, the quantity of described multiple laser stop member is four, and described multiple laser stop member is cross distribution.
5. laser repair system according to claim 1, is characterized in that, described laser is by area square or rectangle or triangle or trapezoidal or polygon or porous design.
6. laser repair system according to claim 1, is characterized in that, described laser blocking mechanism also comprises driving mechanism, and described driving mechanism changes the position of described sideboard.
7. laser repair system according to claim 6, is characterized in that, described driving mechanism comprises motor.
8. laser repair system according to claim 1, is characterized in that, described laser instrument comprises laser amplifier or laser oscillator.
9. laser repair system according to claim 1, is characterized in that, also comprises:
First optical facilities, in order to regulate described laser intensity; And
Second optical facilities, in order to regulate the characteristic of the laser exported from described first optical facilities;
Described first optical facilities and the second optical facilities are successively set between described laser instrument and laser blocking mechanism.
10. laser repair system according to claim 1, is characterized in that, also comprises:
3rd optical facilities, are arranged on the side in the Laser output direction of described laser blocking mechanism, in order to regulate the characteristic of the laser exported from described laser blocking mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410783128.XA CN104493366A (en) | 2014-12-16 | 2014-12-16 | Laser repair system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410783128.XA CN104493366A (en) | 2014-12-16 | 2014-12-16 | Laser repair system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104493366A true CN104493366A (en) | 2015-04-08 |
Family
ID=52934866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410783128.XA Pending CN104493366A (en) | 2014-12-16 | 2014-12-16 | Laser repair system |
Country Status (1)
| Country | Link |
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| CN (1) | CN104493366A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098966A (en) * | 2016-06-29 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of thin film and restorative procedure, display base plate and preparation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5400170A (en) * | 1990-10-26 | 1995-03-21 | Toyo Ink Manufacturing Co., Ltd. | Method of controlling size of light beam pulses used to form respective plural pixels on a print medium |
| JP2008200749A (en) * | 2007-02-22 | 2008-09-04 | Samsung Electronics Co Ltd | Laser repair system |
-
2014
- 2014-12-16 CN CN201410783128.XA patent/CN104493366A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5400170A (en) * | 1990-10-26 | 1995-03-21 | Toyo Ink Manufacturing Co., Ltd. | Method of controlling size of light beam pulses used to form respective plural pixels on a print medium |
| JP2008200749A (en) * | 2007-02-22 | 2008-09-04 | Samsung Electronics Co Ltd | Laser repair system |
| US20080218833A1 (en) * | 2007-02-22 | 2008-09-11 | Dong Il Son | Laser repair system |
| CN101265022A (en) * | 2007-02-22 | 2008-09-17 | 三星电子株式会社 | Laser repair system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098966A (en) * | 2016-06-29 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of thin film and restorative procedure, display base plate and preparation method thereof |
| CN106098966B (en) * | 2016-06-29 | 2018-04-24 | 京东方科技集团股份有限公司 | A kind of film and its restorative procedure, display base plate and preparation method thereof |
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Application publication date: 20150408 |
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