CN104492656A - Thin film pattern repairing device and method as well as washing method - Google Patents
Thin film pattern repairing device and method as well as washing method Download PDFInfo
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- CN104492656A CN104492656A CN201510023988.8A CN201510023988A CN104492656A CN 104492656 A CN104492656 A CN 104492656A CN 201510023988 A CN201510023988 A CN 201510023988A CN 104492656 A CN104492656 A CN 104492656A
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- repaired
- reparation
- bottle
- working chamber
- reparation portion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
- B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
- B05D3/065—After-treatment
- B05D3/067—Curing or cross-linking the coating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
Abstract
The embodiment of the invention provides a thin film pattern repairing device and method as well as a washing method, relates to the technical field of display, and aims at solving the problem in the prior art that the thickness of a repaired thin film is not uniform when a pigment repairing method is adopted. The thin film pattern repairing device comprises a material supplying controller, at least one material bottle, at least one repairing part and a repairing driver. Under the driving of the repairing driver, the repairing part moves in a direction parallel to a surface to be repaired, and a material supplied to the repairing part from the material bottle coats a region to be repaired under the control of the material supplying controller.
Description
Technical field
The present invention relates to Display Technique field, particularly relate to a kind of Thinfilm pattern prosthetic device and restorative procedure, cleaning method.
Background technology
TFT-LCD (Thin Film Transistor Liquid Crystal Display, thin film transistor-liquid crystal display) as a kind of panel display apparatus, because it has the features such as little, low in energy consumption, the radiationless and cost of manufacture of volume is relatively low, and be applied to more and more in the middle of high-performance display field.
TFT-LCD is formed by the shaping array base palte of box and color membrane substrates.Wherein, array base palte and color membrane substrates are made up of the thin layer pattern of multiple-level stack.But, in the process making above-mentioned thin layer pattern, the impact of the factor such as production environment, manufacture craft can be subject to and produce patterning defects.Concrete, for color membrane substrates, forming the black matrix of color membrane substrates, chromatic filter layer and OC layer (Over Coat, protective layer) etc. can be made by the mode of coating, exposure, development.But, in above-mentioned preparation process, on the one hand, if be subject to the pollutant effects such as the particle in dust, greasy dirt, fiber and the production raw material in production environment, can make to be enclosed with above-mentioned pollutant in the thin layer formed, thus make thin layer pattern produce black defect; On the other hand, when being mixed with bubble in the photoresist applied, the thin layer pattern formed can be caused, the partially thin or excalation of such as chromatic filter layer, thus form white defect.The existence of above-mentioned defect can cause display floater in procedure for displaying, occur bright spot or color point, thus has a strong impact on display effect and product quality.
In prior art, in order to solve the problem, can adopt and can grind repairing method (Tape), laser repairing method (Lase Repair) and pigment repairing method (Ink Repair) above-mentioned defect is repaired.Wherein, the most frequently used is pigment repairing method, is applied to area to be repaired particular by by the Paint Drip in dropper, to complete the reparation to thin layer pattern.But, above-mentioned pigment repairing method is, based on pigment, initiatively diffusion occurs in area to be repaired, realize the filling to area to be repaired, therefore, the in uneven thickness of the thin layer after repairing easily is caused when the area of area to be repaired is larger, produce aberration, thus reduce repairing effect and product quality.
Summary of the invention
Embodiments of the invention provide a kind of Thinfilm pattern prosthetic device and restorative procedure, cleaning method, can solve in prior art when adopting pigment repairing method, the problem that the thin film layer thickness after reparation is uneven.
For achieving the above object, embodiments of the invention adopt following technical scheme:
The one side of the embodiment of the present invention, provides a kind of Thinfilm pattern prosthetic device, comprising:
Material supply controller, its output connects one end of at least one the first Compressed Gas carrier pipe;
At least one bottle for material, the air inlet of described bottle for material is connected with the other end of described first Compressed Gas carrier pipe;
At least one reparation portion, the charging aperture in described reparation portion, is connected with the discharging opening of a described bottle for material by a flexible material carrier pipe, drips painting for carrying out material;
Repair driver, be connected with described reparation portion, mobile for driving described reparation portion to be parallel to surface to be repaired, so that described material is coated on area to be repaired.
The another aspect of the embodiment of the present invention, provides a kind of method that Thinfilm pattern is repaired, and adopt any one Thinfilm pattern prosthetic device as above to carry out the reparation of Thinfilm pattern, described method comprises:
Reparation portion is moved to area to be repaired;
Material supply controller provides Compressed Gas to bottle for material, and so that the material in described bottle for material is transported to reparation portion, described reparation portion carries out material on surface to be repaired and drips painting;
It is mobile that reparation portion described in driver drives of repairing is parallel to described surface to be repaired, so that described material is coated on described area to be repaired.
The another aspect of the embodiment of the present invention, providing a kind of method for cleaning any one Thinfilm pattern prosthetic device as above, comprising:
Reparation portion is moved to the top of cleaning slot;
Using at least one bottle for material as washer bottle, for containing washing liquid;
Material supply controller provides Compressed Gas to described washer bottle, with by the cleaning fluid in described washer bottle, is transported to reparation portion by flexible material carrier pipe, to clean described flexible material carrier pipe and described reparation portion.
The embodiment of the present invention provides a kind of Thinfilm pattern prosthetic device and restorative procedure, cleaning method.Wherein, described Thinfilm pattern prosthetic device can comprise material supply controller, at least one bottle for material, at least one reparation portion and repair driver.Concrete, material feeder is connected with bottle for material by the first Compressed Gas carrier pipe, for the first Compressed Gas carrier pipe transporting compressed gas body, can extrude to make the material in bottle for material from the discharging opening of bottle for material.Reparation portion is connected with bottle for material by a flexible material carrier pipe, makes the material gone out from bottle for material impact extrusion can be delivered to reparation portion, and the material being delivered to reparation portion drips and is applied to area to be repaired by described reparation portion.Repair driver to be connected with reparation portion, be parallel to be repaired surperficial mobile by repairing driver drives reparation portion, to be applied to the material for position to be repaired to be coated on area to be repaired uniformly by dripping, thus make the thin film layer thickness after repairing homogeneous, avoid the generation of aberration, improve repairing effect and product quality.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The structural representation of a kind of Thinfilm pattern prosthetic device that Fig. 1 a provides for the embodiment of the present invention;
The location of a kind of Thinfilm pattern prosthetic device that Fig. 1 b provides for the embodiment of the present invention;
The structural representation of a kind of support for installing reparation portion that Fig. 1 c provides for the embodiment of the present invention;
The one reparation portion repair process schematic diagram that Fig. 1 d provides for the embodiment of the present invention;
A kind of structural representation repairing portion that Fig. 2 provides for the embodiment of the present invention;
The structural representation in the another kind reparation portion that Fig. 3 a provides for the embodiment of the present invention;
The structural representation of a kind of porous permeable dividing plate that Fig. 3 b provides for the embodiment of the present invention;
The structural representation in another reparation portion that Fig. 4 provides for the embodiment of the present invention;
The structural representation of the another kind of Thinfilm pattern prosthetic device that Fig. 5 provides for the embodiment of the present invention;
A kind of Thinfilm pattern restorative procedure flow chart that Fig. 6 provides for the embodiment of the present invention;
The another kind of Thinfilm pattern restorative procedure flow chart that Fig. 7 provides for the embodiment of the present invention;
Another Thinfilm pattern restorative procedure flow chart that Fig. 8 provides for the embodiment of the present invention;
A kind of method flow diagram for cleaning Thinfilm pattern prosthetic device that Fig. 9 provides for the embodiment of the present invention.
Accompanying drawing illustrates:
01-Thinfilm pattern prosthetic device; 02-substrate; 10-material supply controller; 100-guide rail; 101,101 '-air pressure valve; 11-support; 12-bottle for material; 120-supply mouth; 121-washer bottle; The black matrix bottle for material of 122-; 123-red pigment bottle; 124-viridine green bottle; 125-blue pigment bottle; 126-protective layer bottle for material; 13-reparation portion; 130,130 '-working chamber; 131-brush; 132-baffle plate; 133-porous permeable dividing plate; 1330-permeability hole; 134-piston; The sidewall of 135-working chamber; 14-repairs driver; 15-light shield; 20-first Compressed Gas carrier pipe; 21-flexible material carrier pipe; 22-second Compressed Gas carrier pipe; A-surface to be repaired; B-area to be repaired; 30-rotation motor; 31-fixed head; 32-first axis of guide; 33-second axis of guide.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The embodiment of the present invention provides a kind of Thinfilm pattern prosthetic device 01, as shown in Figure 1a, can comprise:
Material supply controller 10, its output connects one end of at least one the first Compressed Gas carrier pipe 20;
At least one bottle for material 12, the air inlet of described bottle for material is connected with the other end of the first Compressed Gas carrier pipe 20;
At least one reparation portion 13, the charging aperture in reparation portion 13, is connected with the discharging opening of a bottle for material 12 by a flexible material carrier pipe 21, drips painting for carrying out material;
Repair driver 14, be connected with reparation portion 13, be parallel to surface A to be repaired for driving reparation portion 13 and move, so that material is coated on area to be repaired B.
It should be noted that, first, described surface A to be repaired can refer to substrate 02, such as, on the substrate of array base palte or color film, there is defect and need the surface of repairing in thin layer pattern.And area to be repaired B can refer to, in the surface A to be repaired of substrate 02, the position of above-mentioned defect.
The second, the present invention does not limit the material taken up in bottle for material 12.According to the difference of material variety in bottle for material 12, the effect of described Thinfilm pattern prosthetic device 01 is also different.Such as, when there is defect (white defect or black defect) in the pattern of the chromatic filter layer formed on color membrane substrates or on array base palte, above-mentioned multiple bottle for material 12 can be taken up the pigment of different colours, such as form trichromatic redness, green or blue pigment, can repair the colored filter film layer pattern of different colours to make described Thinfilm pattern prosthetic device 01.Again such as, when there is above-mentioned defect in the pattern of the pixel electrode layer that array base palte is made up of transparent conductive material, in above-mentioned multiple bottle for material 12 one can be taken up above-mentioned transparent conductive material, such as tin indium oxide, tin indium oxide etc., can repair the pattern of pixel electrode layer to make described Thinfilm pattern prosthetic device 01.Again or, when needs clean described Thinfilm pattern prosthetic device 01, can by a containing washing liquid in above-mentioned multiple bottle for material 12, when this cleaning fluid can carry out Thinfilm pattern repair with described Thinfilm pattern prosthetic device 01, the organic solvent that the material taken up in bottle for material 12 dissolves each other.The organic solvent be made up of gamma-butyrolacton that such as can dissolve each other with the trichromatic pigment of formation, to make described Thinfilm pattern prosthetic device 01 can be cleaned by the bottle for material 12 of pigment and reparation portion 13 and flexible material carrier pipe 21 taking up, there is the phenomenon of mass transport blocking to prevent pigment from solidifying.
Certainly, above-mentioned is only illustrating described Thinfilm pattern prosthetic device 01 effect, and this is no longer going to repeat them in other effect, but all should belong to protection scope of the present invention.
In addition, when above-mentioned Thinfilm pattern prosthetic device 01 is for repairing the thin layer pattern on color membrane substrates, the range of capacity of above-mentioned bottle for material 12 can be 0.1ml ~ 1.5ml.When the capacity of bottle for material 12 is less than 0.1ml, due to the material that it can take up, such as pigment very little, and the time that can continue to repair will shorten, and so, need repeatedly to shut down to add the pigment in bottle for material 12, thus will reduce production efficiency.When the capacity of bottle for material 12 is greater than 1.5ml, the pigment that can take up due to it is more, and in the process used, unemployed pigment easily solidifies, thus causes the blocking of pigment transfer pipeline, and the waste of pigment.
Three, Thinfilm pattern prosthetic device 01 is before carrying out repair, needs pattern prosthetic device 01 to move, to make the position in reparation portion 13 can be corresponding with area to be repaired B.Concrete, as shown in Figure 1 b, can be slidably mounted on guide rail 100 by Thinfilm pattern prosthetic device 01, Thinfilm pattern prosthetic device 01 can move left and right along first direction X on guide rail 100, and guide rail 100 can move forward and backward along second direction Y.So, can according to the coordinate (X, Y) at B place, concrete area to be repaired, by corresponding with area to be repaired B for the position in the reparation portion 13 of pattern prosthetic device 01.
Wherein, first direction X and second direction Y is parallel to described surface A to be repaired, and first direction X and second direction Y are mutually vertical.
Four, after pattern prosthetic device 01 moves to the region at B place, area to be repaired, need to drive reparation portion 13 to be parallel to surface A to be repaired by reparation driver 14 and move.Concrete, as illustrated in figure 1 c, can be installed on dismountable for reparation portion 13 on support 11.So, repairing driver 14 can carry out being parallel to surface A to be repaired and moves by driving arm 11, thus drives the reparation portion 13 on support 11 to carry out action.
In addition, when area to be repaired B shape as shown in Figure 1 d, there is angle α, when repairing along the first repair path O-O ' (shown in dotted arrow), cannot repair the defect at angle α place, therefore, carry out being parallel to before surface A to be repaired moves at reparation driver 14 driving arm 11, also need reparation portion 13 to rotate, thus make reparation portion along the second repair path O
1-O
1' (solid arrow shown in) repair, repair to complete to the defect at angle α place.
Concrete, support 11 can be fixed on rotation motor 30, thus can according to the concrete shape of area to be repaired B, to repair in the process that driver 14 drives rotation motor 30 to rotate, reparation portion 13 is rotated, thus the actual repair path in adjustment reparation portion 13.Wherein, the slewing area in reparation portion 13 can be set smaller than and equal 90 °.Thus reparation portion 13 can be rotated along a direction (clockwise or counterclockwise).
In addition, be fixed on first axis of guide 32 by rotation motor 30 by fixed head 31, first axis of guide 32 can be magnetically-actuated guide rail, realizes reparation portion 13 along the elevating movement of moving (namely moving along third direction Z) perpendicular to surface A to be repaired.Further, first axis of guide 32 can be fixed on second axis of guide 33, and by magnetically-actuated, first axis of guide 32 can use along first direction X or second direction Y-direction, thus realizes reparation portion 13 and be parallel to surface A to be repaired and move.
Wherein, all reparation portions 13 in pattern prosthetic device 01 can be installed on same support 11, although support 11 move time, all reparation portions 13 all can action, but controller 10 can be supplied by material, controlling bottle for material 12 and do not provide material to the reparation portion 13 not carrying out repair, even if the reparation portion 13 therefore not carrying out repair moves, also can not repair not having defective thin layer pattern.Different reparation portions 13 can be installed on different supports 11 in addition, thus conveniently the movement in each reparation portion 13 be controlled.
Certainly, above-mentioned is only drive illustrating of reparation portion 13 movement to reparation driver 14, and this is no longer going to repeat them for other driving method, but all should belong to protection scope of the present invention.
Five, because reparation portion 13 is under the driving of repairing driver 14, can be parallel to surface A to be repaired and move, the flexible material carrier pipe 21 be therefore connected with reparation portion 13 can have flexible material, and such as flexiplast is formed.So, can prevent reparation portion 13 in the process of motion, cause flexible material carrier pipe 21 to fracture.In addition, flexible material carrier pipe 21 can also adopt amber transparent plastics to form.So, when the material in bottle for material is photo-curing material, brown flexible material carrier pipe 21 can prevent from, in the process of convey materials, owing to being subject to illumination, material being solidified, blocking flexible material carrier pipe 21.And; because flexible material carrier pipe 21 is transparent; can the conveying situation of handled easily personal observations material; when there is bubble in flexible material carrier pipe 21; Thinfilm pattern prosthetic device can be shut down; and carry out cleaning treatment to flexible material carrier pipe 21, thus the thin layer after the reparation that causes due to bubble of surface occurs that the phenomenon of white defect produces.
The embodiment of the present invention provides a kind of Thinfilm pattern prosthetic device.Wherein, described Thinfilm pattern prosthetic device can comprise material supply controller, at least one bottle for material, at least one reparation portion and repair driver.Concrete, material feeder is connected with bottle for material by the first Compressed Gas carrier pipe, for the first Compressed Gas carrier pipe transporting compressed gas body, can extrude to make the material in bottle for material from the discharging opening of bottle for material.Reparation portion is connected with bottle for material by a flexible material carrier pipe, makes the material gone out from bottle for material impact extrusion can be delivered to reparation portion, and the material being delivered to reparation portion drips and is applied to area to be repaired by described reparation portion.Repair driver to be connected with reparation portion, be parallel to be repaired surperficial mobile by repairing driver drives reparation portion, to be applied to the material for position to be repaired to be coated on area to be repaired uniformly by dripping, thus make the thin film layer thickness after repairing homogeneous, avoid the generation of aberration, improve repairing effect and product quality.
The display effect of display device is relevant with PPI (Pixels Per Inch, the number of pixels that per inch has) numerical value.PPI numerical value is higher, and namely representing display device can with higher density display image.Therefore, the density of display is higher, and degree of verisimilitude is higher, and picture is finer and smoother.But for the display device of high PPI, the live width of the thin layer pattern on its array base palte or color membrane substrates is less, therefore occurs that the size of the area to be repaired B of defect is also less.So the reparation portion 13 the needing size less area to be repaired B less to above-mentioned size repairs.But for the display device of low PPI, the live width of the thin layer pattern on its array base palte or color membrane substrates is larger, therefore occurs that the size of the area to be repaired B of defect is also larger.If use the reparation portion 13 that size is less, repair time being increased, so in order to improve remediation efficiency, needing larger-size reparation portion 13 to repair above-mentioned larger-size area to be repaired B.But; if for different PPI; prepare the reparation portion 13 of different size; greatly can increase production cost; and in the process in Replacement and Repair portion 13; need to shut down (Down machine) process to Thinfilm pattern prosthetic device, therefore can extend the time of repair, reduce production efficiency.
In order to make the reparation portion 13 of Thinfilm pattern prosthetic device can repair the defect of the Thinfilm pattern on the display device of different PPI, the invention provides following scheme.
Embodiment one
As shown in Figure 2, reparation portion 13 can comprise at least two working chambers 130.Repair driver 14 (not shown in Fig. 2) to be connected with working chamber 130 by the second Compressed Gas carrier pipe 22, carry out material for driving at least one working chamber 130 and drip painting.
So, according to the size of area to be repaired B, can select needing the quantity of the working chamber 130 carrying out repair by repairing driver 14.Such as, for the display device of high PPI, because the live width of the thin layer pattern of its inside is less, one or two working chamber 130 therefore can be selected to carry out repair simultaneously.For the display device of low PPI, because the live width of the thin layer pattern of its inside is comparatively large, the working chamber 130 of more than three therefore can be selected to carry out repair simultaneously.By the reparation portion 13 of said structure, when without the need to Replacement and Repair portion 13, just can realize the reparation of the thin layer pattern to different live width.Therefore, it is possible to reduction production cost, enhance productivity.
Below by way of the structure of specific embodiment to working chamber 130, and the detailed process that reparation driver 14 drives at least one working chamber 130 to carry out repair is illustrated.
Embodiment two
Can be provided with brush 131 in described working chamber 130, as shown in Figure 3 a, be the explanation that the portion of repairing 13 comprises that two working chambers 130 carry out for example.Wherein, a brush 131 is provided with in each working chamber 130.
The air inlet of each working chamber 130 is connected with reparation driver phase 14 (not shown in Fig. 3 a) by the second Compressed Gas carrier pipe 22; Wherein, the air inlet place of working chamber 130 is provided with air pressure valve 101.
Brush 131, under the control of repairing driver 14, moves (namely moving along third direction Z) perpendicular to surface A to be repaired.So, according to the size of area to be repaired B, can select needing the quantity of the working chamber 130 carrying out repair by repairing driver 14.As shown in Figure 3 a, the size of the area to be repaired B in surface A to be repaired is less, namely can complete reparation by a working chamber 130.
Concrete, in the process of repairing, the air pressure valve 101 ' at the right working chamber 130 ' air inlet place can be opened, repair driver 14 by working chamber 130 ' the input negative sense air pressure of the second Compressed Gas carrier pipe 22 to the right, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, the brush 131 ' being arranged in the right working chamber 130 ' is moved in third direction Z-direction, away from surface A to be repaired, the brush 131 ' in the working chamber 130 ' of the right is made to enter off working state.So, when the material in bottle for material 12 is transported to reparation portion 13 by flexible material carrier pipe 21, can flow in the working chamber 130 on the left side, and be applied to B place, area to be repaired by the brush 131 being positioned at left side working chamber 130, and under the driving of repairing driver 14, reparation portion 13 is parallel to surface A to be repaired and moves, be coated on area to be repaired B with the material making the brush 131 in left side working chamber 130 above-mentioned is applied to B place, area to be repaired, thus complete the reparation of thin layer pattern.
Above-mentioned repair process is positioned at for the initial position of hairbrush 131 explanation that working chamber 130 carries out near the side of surface A to be repaired.When the initial position of hairbrush 131 is when the air inlet of working chamber 130, in the process of repairing, the air pressure valve 101 at left side working chamber 130 air inlet place can be opened, repair driver 14 by working chamber 130 ' the input positive air pressure of the second Compressed Gas carrier pipe 22 to the left side, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, the brush 131 being arranged in left side working chamber 130 is moved under third direction Z-direction, near surface A to be repaired, the brush 131 in left side working chamber 130 is entered and treats duty.Ensuing repair process is same as above, repeats no more herein.
It should be noted that, first, above-mentioned two left and right two working chambers 130,130 ' can be separated by baffle plate 132.To prevent the air pressure in two working chambers 130 from ganging up mutually, and make mistakes when causing the quantity of repairing driver 14 pairs of working chambers 130 to be selected.
The second, in order to realize the reparation to the thin layer pattern in high PPI display device, such as, for the display device of about 500PPI, the width range of brush 131 on first direction X or second direction Y can be 3 μm ~ 5 μm.When the width on first direction X or second direction Y of brush 131 is less than 3 μm, because the size of brush 131 is too little, higher to the technological requirement making brush, manufacture difficulty is comparatively large, and cost is higher.When the width on first direction X or second direction Y of brush 131 is greater than 5 μm, because the size of brush 131 is too large, in repair process, can because film to repair the live width of pattern less and cause and repair pattern covers other do not occur the thin layer pattern of defect causing film to become the pollution of pattern.In sum, for the display device of about 500PPI, the areal extent in the preferred single recoverable region of brush 131 is between 9 μm ~ 5 μm.
Three, at brush 131 when applying material, in order to improve the homogeneity of repairing rear film layer thickness, avoid brush 131 destruction to the thin layer around the B of area to be repaired in repair process.Above-mentioned brush 131 can be made up of fiber cluster, and the diameter range of the fiber in described fiber cluster is 0.1 μm ~ 0.3 μm, and length range is 3mm ~ 5mm.When the diameter of fiber is less than 0.1 μm, the difficulty manufacturing fiber is comparatively large, and make precision higher, production cost is higher.And when the diameter of fiber is greater than 0.3 μm, the fiber cluster defective tightness of formation, there is not the surface of the thin layer of defect in the comparatively hard easily scuffing of quality.And when the length of fiber is less than 3mm, the fiber cluster of formation is soft not, scratch the surface not occurring the thin layer of defect.When the length of fiber is greater than 5mm, the fiber cluster of formation is too soft, reduces the reparation dynamics of brush 131, extends repair time.
Therefore, the preferred diameter range of the fiber in described fiber cluster is 0.1 μm ~ 0.3 μm, and preferred length scope is 3mm ~ 5mm.So, being evenly distributed for the surface fiber applying material of the brush 131 of formation, compact, brush 131 quality softness is moderate, has the ability of stronger absorption material.And not easily produce the phenomenon of fibre shedding, improve brush easy cleaning, durable performance.
Four, can be absorbed by brush 131 uniformly from the material of flexible material carrier pipe 21 the supply system working chamber 130 to make, at described brush 131, porous permeable dividing plate 133 can be set away from the side of surface A to be repaired.On described porous permeable dividing plate 133 as shown in Figure 3 b, for being provided with multiple equally distributed permeability hole 1330, thus make material can from equally distributed permeability hole 1330 through, thus absorbed uniformly by brush 131, and then make the thickness being applied the reparation thin layer pattern formed by brush 131 even.
Embodiment three
As shown in Figure 4, reparation portion 13 can also comprise the piston 134 covering working chamber 130 feeding mouth surface.
Piston 134 is positioned at the air inlet place in reparation portion 13, and the air inlet in described reparation portion 13 is connected with reparation driver 14 (not shown in Fig. 4) by the second Compressed Gas carrier pipe 22.Wherein, the air inlet place in reparation portion 13 is provided with air pressure valve 101.
Piston 134, under the control of repairing driver 14, can be parallel to surface A to be repaired and move.So, according to the size of area to be repaired B, can select needing the quantity of the working chamber 130 carrying out repair by repairing driver 14.As shown in Figure 4, the size of the area to be repaired B in surface A to be repaired is less, namely can complete reparation by a working chamber 130.
Concrete, in the process of repairing, the air pressure valve 101 the right can being repaired air inlet place of portion 13 is opened, repair driver 14 and input negative sense air pressure by the second Compressed Gas carrier pipe 22 to reparation portion 13, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, makes piston 134 be parallel to surface A to be repaired and moves right.In the process of piston 134 movement, can by the upper end of the working chamber 130 of high order end, namely feeding mouth is opened, and the working chamber 130 of high order end is in and treats duty.So, when the material in bottle for material 12 is transported to reparation portion 13 by flexible material carrier pipe 21, can flow in the working chamber 130 of left end, drip and be applied to B place, area to be repaired, and under the driving of repairing driver 14, reparation portion 13 is parallel to surface A to be repaired and moves, and is coated on area to be repaired B, thus completes the reparation of thin layer pattern with the material making the sidewall 135 of left end working chamber 130 above-mentioned is applied to B place, area to be repaired.
Above-mentioned repair process to move right the explanation carried out for piston 134.When the left end of piston 134 is reserved with mobile space, in the process of repairing, when the air pressure valve 101 at air inlet place of reparation portion 13 is opened, repair driver 14 and input positive air pressure by the second Compressed Gas carrier pipe 22 to reparation portion 13, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, makes piston 134 be parallel to surface A to be repaired and is moved to the left.In the process of piston 134 movement, can by the upper end of the working chamber 130 ' of low order end, namely feeding mouth is opened, and the working chamber 130 ' of low order end is in and treats duty.Ensuing repair process is same as above, repeats no more herein.
It should be noted that, first, the width range of working chamber 130 on first direction X or second direction Y can be 10 μm ~ 100 μm.For the reparation portion 13 in embodiment two, although working chamber 130 larger-size in the present embodiment, in terms of existing technologies, still can meet the requirement of the reparation to the thin layer pattern in high PPI display device.Wherein, when the width of working chamber 130 on first direction X or second direction Y is less than 10 μm, because the size of working chamber 130 is too little, higher to the requirement of machining accuracy, be therefore unfavorable for the reduction of cost.When the width of working chamber 130 on first direction X or second direction Y is greater than 100 μm, because the size of working chamber 130 is too large in repair process, can because film to repair the live width of pattern less and cause and repair pattern covers other do not occur the thin layer pattern of defect causing film to become the pollution of pattern.
The second, be applied to area to be repaired B to make can drip uniformly from the material of flexible material carrier pipe 21 the supply system working chamber 130, can above-mentioned porous permeable dividing plate 133 be set between the feeding mouth of working chamber 130 and piston 134.Identical with the function of the porous permeable dividing plate 133 in embodiment two, can make material can from equally distributed permeability hole 1330 through, thus be applied to area to be repaired B by uniform the dripping of working chamber 130, and then make the thickness of the reparation thin layer pattern formed by reparation portion 13 even.
Above-described embodiment two, embodiment three are all the portions of reparation when comprising two working chambers, select the repair of carrying out of one of them working chamber 130 to be the explanation that example is carried out by repairing driver 14.When reparation portion comprises plural working chamber, same as above to the method needing the quantity of the working chamber 130 carrying out repair to select by repairing driver 14, repeat no more herein but all should belong to protection scope of the present invention.
In addition, no matter for embodiment one, embodiment two or embodiment three, when the material in bottle for material 12 is photo-curing material, in order to the material in mode bottle for material be subject to illumination after solidify, thus blocking material conveying pipe, therefore above-mentioned Thinfilm pattern prosthetic device 01 as shown in Figure 5, can also comprise the light shield 15 covering bottle for material 12.Above-mentioned light shield 15 can adopt black hard material to make, and adopts removably to install, thus can conveniently install bottle for material 12, replace and observe.
In addition, conveniently supply is carried out to the material in bottle for material 12, supply mouth 120 can be provided with on bottle for material 12.
Further, the air inlet place of bottle for material 12, and air pressure valve 101 can be provided with the discharge outlet of adjacent two bottle for material 12, therefore by above-mentioned air pressure valve 101, controlled by above-mentioned air pressure valve 101 pairs of mass transport paths.
Concrete, when above-mentioned Thinfilm pattern prosthetic device 01 is for repairing the thin layer pattern on color membrane substrates, as shown in Figure 5, Thinfilm pattern prosthetic device 01 can arrange 6 bottle for material, and the bottle for material 121 of low order end does not connect reparation portion 13.Therefore, this bottle for material 121 can be used for containing washing liquid.In the process of cleaning, opened by the air pressure valve 101 at bottle for material 121 air inlet place, the air pressure valve 101 at other bottle for material (122 ~ 126) air inlet place cuts out.Next, all air pressure valves 101 that the discharge outlet of adjacent two bottle for material 12 is arranged are opened, so, the cleaning fluid exported from bottle for material 121 can flow into all flexible material carrier pipes 21 be connected with bottle for material (122 ~ 126), and reparation portion 13.Thus whole Thinfilm pattern prosthetic device 01 is cleaned.
In addition, bottle for material (122 ~ 126) can be taken up successively black matrix material, red pigment, viridine green, blue pigment and protective layer (Over Coat is called for short OC) material.Next, by all bottle for material 12 air inlet places, and the air pressure valve 101 of the discharge outlet of adjacent two bottle for material 12 cuts out.In repair process, when needs are repaired red color filter thin layer pattern, the air pressure valve 101 at bottle for material 123 air inlet place can be opened, making material supply controller 10 can as the Compressed Gas providing positive air pressure in bottle for material 123, red pigment in bottle for material 123 is delivered in the reparation portion 13 be connected with bottle for material 123, thus realizes the reparation to red color filter thin layer pattern.The repair process of other thin layer pattern is same as above, repeats no more herein.
A kind of method that the embodiment of the present invention provides Thinfilm pattern to repair, adopt any one Thinfilm pattern prosthetic device 01 as above to carry out the reparation of Thinfilm pattern, described method as shown in Figure 6, can comprise:
S101, reparation portion 13 is moved to area to be repaired B.
S102, material supply controller 10 provides Compressed Gas to bottle for material 12, and so that the material in bottle for material 12 is transported to reparation portion 13, reparation portion 13 carries out material in surface A to be repaired and drips painting.
S103, reparation driver 14 drive reparation portion 13 to be parallel to surface A to be repaired and move, so that material is coated on area to be repaired B.
It should be noted that, when area to be repaired B shape as shown in Figure 1 d, there is angle α, when repairing along the first repair path O-O ' (shown in dotted arrow), cannot repair the defect at angle α place, therefore drive before reparation portion 13 is parallel to the step of surface A movement to be repaired at reparation driver 14, said method can also comprise:
Repairing driver 14 drives rotation motor 30 to rotate, and rotates, thus make reparation portion along the second repair path O to make the being fixed on reparation portion 13 rotated on flourishing 30
1-O
1' (solid arrow shown in) repair, thus complete the defect at angle α place is repaired.
A kind of method that the embodiment of the present invention provides Thinfilm pattern to repair, comprises, and first, reparation portion is moved to area to be repaired, enters state to be repaired to make reparation portion.Next, material supply controller provides Compressed Gas to bottle for material, and so that the material in bottle for material is transported to reparation portion, reparation portion carries out material on surface to be repaired and drips painting.Finally, repairing driver drives reparation portion is parallel to be repaired surperficial mobile, so that material is coated on area to be repaired.By the movement in reparation portion, the thin film layer thickness after repairing can be made homogeneous, avoid the generation of aberration, improve repairing effect and product quality.
The display effect of display device is relevant with PPI (Pixels Per Inch, the number of pixels that per inch has) numerical value.PPI numerical value is higher, and namely representing display device can with higher density display image.Therefore, the density of display is higher, and degree of verisimilitude is higher, and picture is finer and smoother.But for the display device of high PPI, the live width of the thin layer pattern on its array base palte or color membrane substrates is less, therefore occurs that the size of the area to be repaired B of defect is also less.So the reparation portion 13 the needing size less area to be repaired B less to above-mentioned size repairs.But for the display device of low PPI, the live width of the thin layer pattern on its array base palte or color membrane substrates is larger, therefore occurs that the size of the area to be repaired B of defect is also larger.If use the reparation portion 13 that size is less, repair time being increased, so in order to improve remediation efficiency, needing larger-size reparation portion 13 to repair above-mentioned larger-size area to be repaired B.But; if for different PPI; prepare the reparation portion 13 of different size; greatly can increase production cost; and in the process in Replacement and Repair portion 13; need to shut down (Down machine) process to Thinfilm pattern prosthetic device, therefore can extend the time of repair, reduce production efficiency.
In order to make the reparation portion 13 of Thinfilm pattern prosthetic device can repair the defect of the Thinfilm pattern on the display device of different PPI, the invention provides following scheme.
Embodiment four
As shown in Figure 2, when reparation portion 13 can comprise at least two working chambers 130, repair driver 14 and drive the method in reparation portion 13 to comprise:
Repair driver 14 to drive at least one working chamber 130 to carry out material at area to be repaired B to drip painting.
So, according to the size of area to be repaired B, can select needing the quantity of the working chamber 130 carrying out repair by repairing driver 14.Such as, for the display device of high PPI, because the live width of the thin layer pattern of its inside is less, one or two working chamber 130 therefore can be selected to carry out repair simultaneously.For the display device of low PPI, because the live width of the thin layer pattern of its inside is comparatively large, the working chamber 130 of more than three therefore can be selected to carry out repair simultaneously.By the reparation portion 13 of said structure, when without the need to Replacement and Repair portion 13, just can realize the reparation of the thin layer pattern to different live width.Therefore, it is possible to reduction production cost, enhance productivity.
Below by way of specific embodiment, for different working chamber 130 structures, the detailed process that reparation driver 14 drives at least one working chamber 130 to carry out repair is illustrated.
Embodiment five
When reparation portion 13 structure as shown in Figure 3 a time, be simple and easy to reparation portion 13 comprise two working chambers 130 for example is to being described to describe.Described restorative procedure as shown in Figure 7, can comprise:
S201, open the air pressure valve 101 at a working chamber 130 air inlet place.
Concrete, as shown in Figure 3 a, the air pressure valve 101 ' at working chamber 130 ' air inlet place, the right can be opened.
S202, reparation driver provide the Compressed Gas of negative sense air pressure to a working chamber 130, the brush in a described working chamber is mobile away from described surface to be repaired.
Concrete, repair driver 14 by working chamber 130 ' the input negative sense air pressure of the second Compressed Gas carrier pipe 22 to the right, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, the brush 131 ' being arranged in the right working chamber 130 ' is moved in third direction Z-direction, away from surface A to be repaired, the brush 131 ' in the working chamber 130 ' of the right is made to enter off working state.
S203, another working chamber is moved to area to be repaired.
Concrete, under the driving of repairing driver 14, the working chamber 130 on the left side is moved to area to be repaired B.
S204, material supply controller 10 provide Compressed Gas to bottle for material 12, with by bottle for material 12 material be transported to another working chamber (i.e. the working chamber 130 on the left side).
S205, repair driver 14 and drive another working chamber (i.e. the working chamber 130 on the left side) to carry out material to drip painting.
S206, reparation driver 14 drive reparation portion 13 to be parallel to surface A to be repaired and move, so that material is coated on area to be repaired B, thus complete the reparation of thin layer pattern.
Above-mentioned repair process is positioned at for the initial position of hairbrush 131 explanation that working chamber 130 carries out near the side of surface A to be repaired.When the initial position of hairbrush 131 is when the air inlet of working chamber 130, in the process of repairing, the air pressure valve 101 at left side working chamber 130 air inlet place can be opened, repair driver 14 by working chamber 130 ' the input positive air pressure of the second Compressed Gas carrier pipe 22 to the left side, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, the brush 131 being arranged in left side working chamber 130 is moved under third direction Z-direction, near surface A to be repaired, the brush 131 in left side working chamber 130 is entered and treats duty.Ensuing repair process is same as above, repeats no more herein.
Embodiment six
When reparation portion 13 structure as shown in Figure 4 time, described restorative procedure as shown in Figure 8, can comprise:
S301, open the air pressure valve 101 at air inlet place of reparation portion 13.
Concrete, the air pressure valve 101 the right can being repaired air inlet place of portion 13 is opened.
S302, reparation driver 14 provide Compressed Gas to described reparation portion 13, and driven plunger 134 moves along being parallel to surface A to be repaired, to be opened by the feeding mouth of at least one working chamber 130.
Concrete, repair driver 14 and input negative sense air pressure by the second Compressed Gas carrier pipe 22 to reparation portion 13, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, makes piston 134 be parallel to surface A to be repaired and moves right.In the process of piston 134 movement, can by the upper end of the working chamber 130 of high order end, namely feeding mouth is opened, and the working chamber 130 of high order end is in and treats duty.
S303, material supply controller 10 provides Compressed Gas to bottle for material 12, to be transported to by the material in bottle for material 12 in working chamber (i.e. the working chamber 130 of high order end) that feeding mouth opens.
The working chamber (i.e. the working chamber 130 of high order end) that S304, reparation driver 14 drive feeding mouth to open carries out material and drips painting.
S305, reparation driver 14 drive reparation portion 13 to be parallel to surface A to be repaired and move, so that material is coated on area to be repaired B, thus complete the reparation of thin layer pattern.
Above-mentioned repair process to move right the explanation carried out for piston 134.When the left end of piston 134 is reserved with mobile space, in the process of repairing, when the air pressure valve 101 at air inlet place of reparation portion 13 is opened, repair driver 14 and input positive air pressure by the second Compressed Gas carrier pipe 22 to reparation portion 13, the absolute value of such as air pressure range is the Compressed Gas of 0.5 ~ 2Mpa, makes piston 134 be parallel to surface A to be repaired and is moved to the left.In the process of piston 134 movement, can by the upper end of the working chamber 130 ' of low order end, namely feeding mouth is opened, and the working chamber 130 ' of low order end is in and treats duty.Ensuing repair process is same as above, repeats no more herein.
Above-described embodiment five, embodiment six are all the portions of reparation when comprising two working chambers, select the repair of carrying out of one of them working chamber 130 to be the explanation that example is carried out by repairing driver 14.When reparation portion comprises plural working chamber, same as above to the method needing the quantity of the working chamber 130 carrying out repair to select by repairing driver 14, repeat no more herein but all should belong to protection scope of the present invention.
In addition, no matter for embodiment four, embodiment five or embodiment six, before startup Thinfilm pattern prosthetic device 01, described restorative procedure can also comprise:
Laser is adopted to carry out ashing process to area to be repaired B.Thus make the regular shape of area to be repaired B, be conducive to controlling the movement in reparation portion 13, with formed thickness repair uniformly after thin layer pattern.
In addition, described restorative procedure can also comprise:
Ultraviolet light polymerization process is carried out to the area to be repaired B after reparation portion 13 applies.So, can shorten the time of repairing the solidification of rear film layer pattern, surperficial uncured reparation rear film layer pattern is by secondary pollutions such as the impurity in working environment, dusts.
The embodiment of the present invention provides a kind of method for cleaning any one Thinfilm pattern prosthetic device 01 as above, as shown in Figure 9, can comprise:
S401, reparation portion 13 is moved to the top of cleaning slot.
Wherein, cleaning slot, can be a groove, or can also be made up of multiple rectangular channel.The quantity of rectangular channel is identical with the quantity in reparation portion 13.So, in the process of cleaning, each reparation portion 13 can be corresponding with a rectangular channel, and the expense liquid phase preventing different reparation portion 13 from getting rid of after cleaning mixes mutually, pollutes reparation portion 13.
S402, using at least one bottle for material 12 as washer bottle, for containing washing liquid.
S403, material supply controller 10 provides Compressed Gas to washer bottle 12, with by the cleaning fluid in washer bottle 12, is transported to reparation portion 13 by flexible material carrier pipe 21, to clean flexible material carrier pipe 21 and reparation portion 13.
Concrete, as shown in Figure 5, Thinfilm pattern prosthetic device 01 can arrange 6 bottle for material, and the bottle for material 121 of low order end does not connect reparation portion 13.Therefore, this bottle for material 121 can be used for containing washing liquid.In the process of cleaning, opened by the air pressure valve 101 at bottle for material 121 air inlet place, the air pressure valve 101 at other bottle for material (122 ~ 126) air inlet place cuts out.Next, all air pressure valves 101 that the discharge outlet of adjacent two bottle for material 12 is arranged are opened, so, the cleaning fluid exported from bottle for material 121 can flow into all flexible material carrier pipes 21 be connected with bottle for material (122 ~ 126), and reparation portion 13.Thus whole Thinfilm pattern prosthetic device 01 is cleaned.
In addition, when Thinfilm pattern prosthetic device 01 is in off working state, a certain amount of cleaning fluid can be injected rinse bath, and store a certain amount of cleaning fluid in flexible material carrier pipe 21.Just reparation portion 13 is immersed in rinse bath, thus prevents material limit residual in flexible material carrier pipe 21 and reparation portion 13 from doing, and blocks material intake line.
The embodiment of the present invention provides a kind of method for cleaning Thinfilm pattern prosthetic device, reparation portion is moved to the top of cleaning slot; Using at least one bottle for material as washer bottle, for containing washing liquid; Material supply controller provides Compressed Gas to washer bottle, with by the cleaning fluid in washer bottle, is transported to reparation portion by flexible material carrier pipe, to clean flexible material carrier pipe and described reparation portion.So, without the need to providing other cleaning devices, directly just can realize the cleaning to reparation portion and flexible material carrier pipe by Thinfilm pattern prosthetic device self, thus improve production efficiency, reducing production cost.
In addition, when the air inlet place of bottle for material 12 is provided with air pressure valve 101, before material supply controller 10 provides the step of Compressed Gas to washer bottle (as shown in Figure 5 121), described clean method can also comprise:
First, the air pressure valve 101 at the air inlet place of bottle for material (bottle for material 122 ~ 126 as shown in Figure 5) is opened.
Then, material supply controller 10 provides the Compressed Gas of negative sense to the air inlet of bottle for material (122 ~ 126), deviate to make the material in bottle for material (122 ~ 126) have the trend flowed in reparation portion 13.Thus can prevent in the process of cleaning, the material in bottle for material (122 ~ 126) flows in reparation portion 13, reduces cleaning performance.
One of ordinary skill in the art will appreciate that: all or part of step realizing said method embodiment can have been come by the hardware that programmed instruction is relevant, aforesaid program can be stored in a computer read/write memory medium, this program, when performing, performs the step comprising said method embodiment; And aforesaid storage medium comprises: ROM, RAM, magnetic disc or CD etc. various can be program code stored medium.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (23)
1. a Thinfilm pattern prosthetic device, is characterized in that, comprising:
Material supply controller, its output connects one end of at least one the first Compressed Gas carrier pipe;
At least one bottle for material, the air inlet of described bottle for material is connected with the other end of described first Compressed Gas carrier pipe;
At least one reparation portion, the charging aperture in described reparation portion, is connected with the discharging opening of a described bottle for material by a flexible material carrier pipe, drips painting for carrying out material;
Repair driver, be connected with described reparation portion, mobile for driving described reparation portion to be parallel to surface to be repaired, so that described material is coated on area to be repaired.
2. Thinfilm pattern prosthetic device according to claim 1, is characterized in that, also comprise the rotation motor be connected with described reparation driver, described reparation portion is fixed on described rotation motor.
3. Thinfilm pattern prosthetic device according to claim 1 and 2, is characterized in that, described reparation portion comprises at least two working chambers;
Described reparation driver is connected with described working chamber by the second Compressed Gas carrier pipe, carries out material drip painting for driving working chamber described at least one.
4. Thinfilm pattern prosthetic device according to claim 3, is characterized in that, is provided with brush in described working chamber;
The air inlet of described working chamber is connected with described reparation driver by described second Compressed Gas carrier pipe; Wherein, the air inlet place of described working chamber is provided with air pressure valve;
Described brush is under the control of described reparation driver, mobile perpendicular to described surface to be repaired.
5. Thinfilm pattern prosthetic device according to claim 4, is characterized in that, the width range of described brush on first direction or second direction is 3 μm ~ 5 μm;
Wherein, described first direction and described second direction are all parallel to described surface to be repaired, and mutually vertical.
6. Thinfilm pattern prosthetic device according to claim 4, is characterized in that, described brush is made up of fiber cluster, and the diameter range of the fiber in described fiber cluster is 0.1 μm ~ 0.3 μm, and length range is 3mm ~ 5mm.
7. Thinfilm pattern prosthetic device according to claim 4, is characterized in that, is also provided with in described working chamber:
Porous permeable dividing plate, is positioned at the side of described brush away from described surface to be repaired.
8. Thinfilm pattern prosthetic device according to claim 3, is characterized in that, described reparation portion also comprises the piston covering described working chamber feeding mouth surface;
Described piston is positioned at the air inlet place in described reparation portion, and the air inlet in described reparation portion is connected with described reparation driver by the second Compressed Gas carrier pipe; Wherein, the air inlet place in described reparation portion is provided with air pressure valve;
Described piston, under the control of described reparation driver, is parallel to described surface to be repaired mobile.
9. Thinfilm pattern prosthetic device according to claim 8, is characterized in that, the width range of described working chamber on described first direction or described second direction is 10 μm ~ 100 μm.
10. Thinfilm pattern prosthetic device according to claim 8, is characterized in that, described reparation portion also comprises: the porous permeable dividing plate between institute's working chamber feeding mouth and described piston.
11. Thinfilm pattern prosthetic devices according to claim 1, is characterized in that, also comprise: the light shield covering described bottle for material.
12. Thinfilm pattern prosthetic devices according to claim 1, is characterized in that,
The air inlet place of described bottle for material, and the discharge outlet of described adjacent two described bottle for material is provided with air pressure valve.
13. Thinfilm pattern prosthetic devices according to claim 1, is characterized in that, described bottle for material are provided with the supply mouth for supply material.
14. Thinfilm pattern prosthetic devices according to claim 1, is characterized in that, the range of capacity of described bottle for material is 0.1ml ~ 1.5ml.
The method that 15. 1 kinds of Thinfilm patterns are repaired, it is characterized in that, adopt the Thinfilm pattern prosthetic device as described in any one of claim 1-14 to carry out the reparation of Thinfilm pattern, described method comprises:
Reparation portion is moved to area to be repaired;
Material supply controller provides Compressed Gas to bottle for material, and so that the material in described bottle for material is transported to reparation portion, described reparation portion carries out material on surface to be repaired and drips painting;
It is mobile that reparation portion described in driver drives of repairing is parallel to described surface to be repaired, so that described material is coated on described area to be repaired.
The method that 16. Thinfilm patterns according to claim 15 are repaired, is characterized in that, be parallel to the step of described surface movement to be repaired in reparation portion described in driver drives of repairing before, described method also comprises:
Repair driver drives rotation motor to rotate, rotate to make the described reparation portion be fixed in described rotation prosperity.
The method that 17. Thinfilm patterns according to claim 15 or 16 are repaired, it is characterized in that, when described reparation portion comprises at least two working chambers, described in described reparation driver drives, the method in reparation portion comprises:
Described reparation driver drives working chamber described at least one carries out material in described area to be repaired and drips painting.
The method that 18. Thinfilm patterns according to claim 17 are repaired, it is characterized in that, comprise two working chambers, be provided with brush in described working chamber in described reparation portion, when described working chamber air inlet place is provided with air pressure valve, described method comprises:
Open the described air pressure valve at a described working chamber air inlet place;
Described reparation driver provides the Compressed Gas of negative sense air pressure to a described working chamber, and the described brush in a described working chamber is mobile away from described surface to be repaired;
Working chamber described in another is moved to area to be repaired;
Described material supply controller provides Compressed Gas to bottle for material, the material in described bottle for material to be transported to another working chamber described;
Another working chamber described in described reparation driver drives carries out material and drips painting;
It is mobile that reparation portion described in driver drives of repairing is parallel to surface to be repaired, so that described material is coated on described area to be repaired.
The method that 19. Thinfilm patterns according to claim 17 are repaired, is characterized in that, also comprise the piston covering described working chamber feeding mouth surface in described reparation portion, described in state reparation portion air inlet place when being provided with air pressure valve, described method comprises:
Open the described air pressure valve at air inlet place of described reparation portion;
Described reparation driver provides Compressed Gas to described reparation portion, drives described piston mobile along being parallel to described surface to be repaired, to be opened by the feeding mouth of working chamber described at least one;
Described material supply controller provides Compressed Gas to bottle for material, to be transported to by the material in described bottle for material in working chamber that feeding mouth opens;
The working chamber that described in described reparation driver drives, feeding mouth is opened carries out material and drips painting;
It is mobile that reparation portion described in described reparation driver drives is parallel to surface to be repaired, so that described material is coated on described area to be repaired.
The method that 20. Thinfilm patterns according to claim 15 are repaired, is characterized in that, before startup Thinfilm pattern prosthetic device, described method also comprises:
Laser is adopted to carry out ashing process to described area to be repaired.
The method that 21. Thinfilm patterns according to claim 15 are repaired, is characterized in that, also comprise:
Ultraviolet light polymerization process is carried out to the described area to be repaired after the coating of described reparation portion.
22. 1 kinds, for cleaning the method for the Thinfilm pattern prosthetic device as described in any one of claim 1-14, is characterized in that, comprising:
Reparation portion is moved to the top of cleaning slot;
Using at least one bottle for material as washer bottle, for containing washing liquid;
Material supply controller provides Compressed Gas to described washer bottle, with by the cleaning fluid in described washer bottle, is transported to reparation portion by flexible material carrier pipe, to clean described flexible material carrier pipe and described reparation portion.
The method of 23. cleaning Thinfilm pattern prosthetic devices according to claim 22, it is characterized in that, when the air inlet place of described bottle for material is provided with air pressure valve, described material supply controller provides the step of Compressed Gas to washer bottle before, described method also comprises:
Open the air pressure valve at the air inlet place of described bottle for material, described material supply controller provides the Compressed Gas of negative sense to the air inlet of described bottle for material, deviates from the trend of described reparation portion flowing to make the material in described bottle for material have.
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| CN201510023988.8A CN104492656B (en) | 2015-01-16 | 2015-01-16 | A kind of Thinfilm pattern prosthetic device and restorative procedure, cleaning method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106098966A (en) * | 2016-06-29 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of thin film and restorative procedure, display base plate and preparation method thereof |
| CN112965336A (en) * | 2020-10-14 | 2021-06-15 | 深圳市路维光电股份有限公司 | Method and device for repairing mask defect |
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| CN201323206Y (en) * | 2008-09-08 | 2009-10-07 | 台达电子工业股份有限公司 | Device for making photoinduced element |
| CN103123428A (en) * | 2011-11-18 | 2013-05-29 | 上海中航光电子有限公司 | Thin film transistor (TFT)-liquid crystal display (LCD) array substrate and production method thereof |
| CN103792747A (en) * | 2014-02-10 | 2014-05-14 | 北京京东方显示技术有限公司 | Array substrate, manufacturing method and repairing method thereof and display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106098966A (en) * | 2016-06-29 | 2016-11-09 | 京东方科技集团股份有限公司 | A kind of thin film and restorative procedure, display base plate and preparation method thereof |
| CN106098966B (en) * | 2016-06-29 | 2018-04-24 | 京东方科技集团股份有限公司 | A kind of film and its restorative procedure, display base plate and preparation method thereof |
| CN112965336A (en) * | 2020-10-14 | 2021-06-15 | 深圳市路维光电股份有限公司 | Method and device for repairing mask defect |
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