CN201359680Y - Mask plate cleaning device - Google Patents
Mask plate cleaning device Download PDFInfo
- Publication number
- CN201359680Y CN201359680Y CNU2009201060146U CN200920106014U CN201359680Y CN 201359680 Y CN201359680 Y CN 201359680Y CN U2009201060146 U CNU2009201060146 U CN U2009201060146U CN 200920106014 U CN200920106014 U CN 200920106014U CN 201359680 Y CN201359680 Y CN 201359680Y
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- CN
- China
- Prior art keywords
- mask plate
- blowning installation
- cleaning device
- shell
- plate cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model provides a mask plate cleaning device which comprises a cleaning bench for placing mask plate and a blowing device arranged above the cleaning bench, wherein the blowing device is connected with an air inlet pipe and a drive device for driving the blowing device to move horizontally. As the mask plate cleaning device is provided with a blowing device which is driven to move horizontally above the mask plate for blowing the mask plate, the impurities on the mask plate are removed from the surface of the mask plate together with the cleaning air so that the purpose of cleaning mask plate is realized.
Description
Technical field
The utility model relates to LCD manufacturing technology field, relates in particular to a kind of mask plate cleaning device.
Background technology
At present, at thin film transistor (TFT)-LCD (Thin Film Transistor-LiquidCrystal Display, hereinafter to be referred as: TFT-LCD) in the production, the formation of pattern is by photochemical reaction on the glass substrate, and the design transfer on the mask plate is realized to the glass substrate that scribbles photoresist.Mask plate is covered the glass baseplate surface that scribbles photoresist, with ultraviolet light elective irradiation photoresist, make the photoresist generation chemical change that is subjected to illumination, after above-mentioned exposure process, the solubleness of part photoresist in developer solution that chemical change takes place is changed.After the development, photoresist shows and the corresponding pattern of mask plate.Therefore, if the mask plate defectiveness will have influence on the quality of pattern on the glass substrate.
Mask plate is easy to produce defective, the reason that makes mask plate produce defective has two kinds: a kind of is because making, carrying or improper use cause the intrinsic defective of optical mask plate self, this defective can prevent by methods such as strict factory inspection, standard uses, make defective mask plate not enter the production technology of postorder; Another kind is because the particulate that produces in the production run is attached to the surface of mask plate, perhaps produces spot etc. owing to artificial or other reason make the mask plate surface, and mask plate is polluted.This defective can be avoided by the method for cleaning mask plate.
At existing mask plate more in the operational sequence of changing device (mask changer), from magazine (mask cassette), taking out mask plate to mask plate is carried out the exposing operation, there is not cleaning device that mask plate is cleaned, can't eliminate the suffered pollution of mask plate, cause the image fault on the glass substrate, thereby reduced the quality of glass substrate after exposure.
The utility model content
The purpose of this utility model provides a kind of mask plate cleaning device, can eliminate the suffered pollution of mask plate, avoids the image fault on the glass substrate, improves the quality of glass substrate after exposure.
For achieving the above object, the utility model provides a kind of mask plate cleaning device, comprising:
Place the clean hatch of mask plate, the top of clean hatch is provided with blowning installation, and this blowning installation is connected with draft tube and drives the drive unit that this blowning installation moves horizontally.
Further, drive unit also comprises at least one tommy, and this tommy is connected with and drives the motor that blowning installation moves to the other end from an end of tommy.
This mask plate cleaning device also comprises: the shell of sealing clean hatch, blowning installation and drive unit; The shell button is located on the described clean hatch, and shell is provided with the air hole that passes for described draft tube and discharges the exhausr port of cleaning back gas.
This shell also is connected with the jacking gear that separates described shell and described clean hatch.This jacking gear comprises crossbeam, and the two ends of crossbeam are connected with two arm shape web members, and arm shape web member is connected with the two ends of shell respectively.
When the motor-driven tommy of the utility model mask plate cleaning device rotates, blowning installation moves horizontally above mask plate along tommy, blowning installation purges mask plate simultaneously, pollutant on the mask plate is arranged from the mask plate surface with the gas after cleaning, can eliminate the suffered pollution of mask plate, reach the purpose of cleaning mask plate.
Description of drawings
Fig. 1 is the inner structure synoptic diagram of the utility model mask plate cleaning device first embodiment;
Fig. 2 is the shell front view of the utility model mask plate cleaning device first embodiment;
Fig. 3 is the shell mechanism synoptic diagram of the utility model mask plate cleaning device second embodiment.
Embodiment
Further specify the technical scheme of the utility model embodiment below in conjunction with the drawings and specific embodiments.
The utility model mask plate cleaning device comprises: clean hatch, draft tube, blowning installation and drive unit.
Clean hatch require smooth good, can prevent static, being used to place needs the mask plate that cleans.The top of clean hatch is provided with blowning installation.Blowning installation is connected with draft tube, and draft tube is used for feeding gas to this blowning installation; Blowning installation also is connected with the drive unit that this blowning installation of driving moves horizontally.
Drive unit can be made of tommy and motor.Blowning installation be provided with tommy on the corresponding nut of screw thread.When the motor-driven tommy rotated, the nut on the blowning installation moved forward or backward along tommy, thereby blowning installation is moved to the other end from an end of tommy.In addition, blowning installation also can be connected by belt or chain with drive unit, and drive unit adopts cylinder simultaneously.
Blowning installation will have certain angle with the surface of mask plate, avoid the surface of scratch mask plate.Blowning installation can adopt air gun, and air gun is that lubricant is not with in plastic material and inside, pollutes the surface of mask plate with the spot that prevents air gun inside.
To before covering the transverse slat cleaning, earlier mask plate is placed on the clean hatch.Feed gas by draft tube to blowning installation then, blowning installation begins the mask plate surface is purged.Simultaneously, drive unit drives blowning installation and moves horizontally above mask plate, and the surface of mask plate is purged back and forth.For preventing that mask plate is subjected to gaseous contamination, the gas of blowning installation must be nitrogen or pressurized air.
The utility model mask plate cleaning device, by the blowning installation that moves in the mask plate upper horizontal mask plate is blown, pollutant on the mask plate is arranged from the mask plate surface with the gas after cleaning, can be eliminated the suffered pollution of mask plate, reached the purpose of cleaning mask plate.
In order mask plate to be placed the environment of sealing clean, to reach superior cleaning, the utility model mask plate cleaning device also comprises: the shell of sealing clean hatch, blowning installation and drive unit.Shell is provided with air hole and exhausr port, and the shell button is located on the clean hatch.Before the mask plate cleaning, to the draft tube air feed, gas enters blowning installation through draft tube by air hole in elder generation.Blowning installation is blown to mask plate above mask plate, and the pollutant on the gas-entrained mask plate surface that blows out is discharged shell through exhausr port.
Fig. 1 is the inner structure synoptic diagram of the utility model mask plate cleaning device first embodiment, Fig. 2 is the shell front view of the utility model mask plate cleaning device first embodiment, as depicted in figs. 1 and 2, the utility model mask plate cleaning device comprises: clean hatch, shell 1, draft tube 2, blowning installation 3, tommy 4 and motor 5.
Shell can be with clean hatch, blowning installation, tommy and motor complete closed, and shell is provided with air hole 11 and exhausr port 12.
One end of draft tube is connected with air hole 11 on the shell, and the other end of draft tube 2 is connected with the air supply opening 31 of blowning installation 3.
Tommy 4 is connected to the motor 5 that the other end moves with the end of driving blowning installation from tommy 4.Have nut on the blowning installation 3, when the driven by motor tommy rotates, the nut on the blowning installation along tommy clockwise or be rotated counterclockwise, thereby blowning installation is moved forward or backward along tommy.
When mask plate is cleaned, earlier mask plate is placed on the clean hatch, air hole to mask plate cleaning device shell feeds nitrogen or vacuum then, and the nitrogen of feeding or vacuum enter into blowning installation inside along draft tube, and blowning installation is blown to mask plate by inflatable mouth 32 beginnings.The gas-entrained pollutant that blowning installation blows out by discharging in the exhausr port shell on the shell, prevents the secondary pollution mask plate.
When blowning installation was blown, the driven by motor tommy was along certain direction rotation, and the nut on the blowning installation rotates and reach with tommy, thereby blowning installation is moved forward; When motor driver drove the tommy swing arm along another direction rotation, the nut on the blowning installation rotated with tommy and retreats, thereby blowning installation is moved backward.Therefore, blowning installation can purge mask plate above mask plate back and forth, and the area that mask plate is purged increases, and has realized the purpose of effective cleaning mask plate.
The utility model mask plate cleaning device is placed on mask plate in the shell of sealing and cleans.During the rotation of motor-driven tommy, blowning installation moves horizontally above mask plate along tommy, blowning installation purges mask plate simultaneously, and the pollutant on the mask plate is discharged from the exhausr port on the shell with the gas after cleaning, and has reached the purpose of cleaning mask plate.
For shell can be separated with clean hatch, so that take out mask plate, the utility model mask plate cleaning device also comprises: the jacking gear of separate housings and clean hatch.Fig. 3 is the shell mechanism synoptic diagram of the utility model mask plate cleaning device second embodiment, and as shown in Figure 3, jacking gear is made of crossbeam 6 and arm shape web member 7.The two ends of crossbeam connect two arm shape web members, and two arm shape web members are connected with the two ends of shell respectively.
When utilizing the mask plate cleaning device that mask plate is cleaned, with crossbeam and the landing of arm shape web member, the shell that is connected with arm shape web member is landing thereupon also, thereby makes shell with clean hatch, draft tube, blowning installation and drive unit complete closed.After having cleaned mask plate, crossbeam and arm shape web member are risen, the shell of sealing clean hatch, draft tube, blowning installation and drive unit is opened, so that take out mask plate.
For the shell that makes the mask plate cleaning device can with separate with the jacking gear that arm shape web member constitutes by crossbeam, so that the maintenance of mask plate cleaning device, the two ends of shell also are respectively arranged with the groove that engages with arm shape web member on the shell of the utility model mask plate cleaning device.The arm shape web member of jacking gear is connected on the groove, plays the effect that connects shell and jacking gear, also is convenient to shell simultaneously and separates with jacking gear.
Below in conjunction with mask plate more changing device the use of the utility model mask plate cleaning device is described in detail:
Pick and place the magazine that carriage (fork) will be equipped with mask plate earlier and take out from operator's console (mask cassettesupport), lid opening device (lid opening/closing unit) is opened (mask cassette) loam cake of magazine then.Mask plate picks and places carriage (mask loader hand) mask plate is placed on preparation cleaning on the clean hatch.
Crossbeam on the mask plate cleaning device and arm shape web member land, and make shell seal clean hatch, draft tube, blowning installation and tommy and the motor of mask plate cleaning device.
Air supply pipe in the mask plate exposure sources picks out pure nitrogen, is connected to the air hole of mask plate cleaning device shell, and nitrogen enters into the air supply opening of blowning installation by draft tube.Behind blowning installation feeding nitrogen, blowning installation begins mask plate is purged by inflatable mouth.When blowning installation purged, the driven by motor tommy was along certain direction rotation, the nut on the blowning installation with the tommy rotation and on move, blowning installation is moved forward; When driven by motor tommy during along the rotation of another direction, the nut on the blowning installation is with the tommy rotation and move down, and blowning installation is moved backward.Thereby blowning installation purges back and forth to mask plate above mask plate, with the pollutant on the cleaning mask plate.
After cleaning is finished, will move on crossbeam and the arm shape web member, the shell of sealing clean hatch, draft tube, blowning installation and tommy and motor is risen, so that take out mask plate.
Mask plate picks and places carriage (mask loader hand) and takes out mask plate from clean hatch, and mask plate is placed on the exposure desk, carries out the exposure technology of postorder.
Before to the mask plate exposure, the utility model mask plate cleaning device cleans mask plate in advance, can eliminate the suffered pollution of mask plate, avoids the image fault on the glass substrate, has improved the quality of glass substrate after exposure.
It should be noted that at last: above embodiment only in order to the explanation the technical solution of the utility model, is not intended to limit; Although the utility model is had been described in detail with reference to previous embodiment, those of ordinary skill in the art is to be understood that: it still can be made amendment to the technical scheme that aforementioned each embodiment put down in writing, and perhaps part technical characterictic wherein is equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution break away from the spirit and scope of each embodiment technical scheme of the utility model.
Claims (7)
1, a kind of mask plate cleaning device is characterized in that, comprising: place the clean hatch of mask plate, the top of described clean hatch is provided with blowning installation, and described blowning installation is connected with draft tube and drives the drive unit that described blowning installation moves horizontally.
2, mask plate cleaning device according to claim 1 is characterized in that, described drive unit comprises at least one tommy, and described tommy is connected with and drives the motor that described blowning installation moves to the other end from an end of described tommy.
3, mask plate cleaning device according to claim 1, it is characterized in that, also comprise: the shell that seals described clean hatch, described blowning installation and described drive unit, described shell button is located on the described clean hatch, and described shell is provided with the air hole that passes for described draft tube and discharges the exhausr port of cleaning back gas.
4, mask plate cleaning device according to claim 3 is characterized in that, described shell also is connected with the jacking gear that separates described shell and described clean hatch.
5, mask plate cleaning device according to claim 4 is characterized in that, described jacking gear comprises crossbeam, and the two ends of described crossbeam are connected with two arm shape web members, and described two arm shape web members are connected with the two ends of described shell respectively.
6, mask plate cleaning device according to claim 5 is characterized in that, the two ends of described shell also are respectively arranged with the groove that engages with described arm shape web member.
7, according to the arbitrary described mask plate cleaning device of claim 1 to 6, it is characterized in that described blowning installation is an air gun.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009201060146U CN201359680Y (en) | 2009-02-27 | 2009-02-27 | Mask plate cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2009201060146U CN201359680Y (en) | 2009-02-27 | 2009-02-27 | Mask plate cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201359680Y true CN201359680Y (en) | 2009-12-09 |
Family
ID=41425445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2009201060146U Expired - Lifetime CN201359680Y (en) | 2009-02-27 | 2009-02-27 | Mask plate cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201359680Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102247964A (en) * | 2010-05-21 | 2011-11-23 | 上海微电子装备有限公司 | Cleaning device for mask and cleaning method for mask |
| CN105467777A (en) * | 2015-12-14 | 2016-04-06 | 深圳市华星光电技术有限公司 | Exposure machine and photomask cleaning device |
| CN105607414A (en) * | 2016-03-28 | 2016-05-25 | 武汉华星光电技术有限公司 | Mask plate washing device and method |
| CN103537457B (en) * | 2013-10-21 | 2016-06-01 | 中航三鑫太阳能光电玻璃有限公司 | The clearing device of liquid is piled up on a kind of liquid film tail limit |
| CN107600687A (en) * | 2017-09-26 | 2018-01-19 | 武汉华星光电技术有限公司 | Automatically cleaning box for photomask |
| CN108443143A (en) * | 2018-01-31 | 2018-08-24 | 苏州强时压缩机有限公司 | Screw air compressor cooler cleaning systems |
| WO2020220518A1 (en) * | 2019-04-28 | 2020-11-05 | 安徽帝显电子有限公司 | Multifunctional exposure machine base table device |
-
2009
- 2009-02-27 CN CNU2009201060146U patent/CN201359680Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102247964A (en) * | 2010-05-21 | 2011-11-23 | 上海微电子装备有限公司 | Cleaning device for mask and cleaning method for mask |
| CN103537457B (en) * | 2013-10-21 | 2016-06-01 | 中航三鑫太阳能光电玻璃有限公司 | The clearing device of liquid is piled up on a kind of liquid film tail limit |
| CN105467777A (en) * | 2015-12-14 | 2016-04-06 | 深圳市华星光电技术有限公司 | Exposure machine and photomask cleaning device |
| CN105607414A (en) * | 2016-03-28 | 2016-05-25 | 武汉华星光电技术有限公司 | Mask plate washing device and method |
| CN105607414B (en) * | 2016-03-28 | 2019-09-24 | 武汉华星光电技术有限公司 | Mask plate cleaning device and cleaning method |
| CN107600687A (en) * | 2017-09-26 | 2018-01-19 | 武汉华星光电技术有限公司 | Automatically cleaning box for photomask |
| CN108443143A (en) * | 2018-01-31 | 2018-08-24 | 苏州强时压缩机有限公司 | Screw air compressor cooler cleaning systems |
| WO2020220518A1 (en) * | 2019-04-28 | 2020-11-05 | 安徽帝显电子有限公司 | Multifunctional exposure machine base table device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150703 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150703 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20150703 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE Technology Group Co., Ltd. Patentee after: Beijing BOE Photoelectricity Science & Technology Co., Ltd. Address before: 100176 Beijing economic and Technological Development Zone, West Central Road, No. 8 Patentee before: Beijing BOE Photoelectricity Science & Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091209 |