WO2020220518A1 - Multifunctional exposure machine base table device - Google Patents

Multifunctional exposure machine base table device Download PDF

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Publication number
WO2020220518A1
WO2020220518A1 PCT/CN2019/101503 CN2019101503W WO2020220518A1 WO 2020220518 A1 WO2020220518 A1 WO 2020220518A1 CN 2019101503 W CN2019101503 W CN 2019101503W WO 2020220518 A1 WO2020220518 A1 WO 2020220518A1
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WO
WIPO (PCT)
Prior art keywords
base
base table
dust
exposure machine
machine base
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Application number
PCT/CN2019/101503
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French (fr)
Chinese (zh)
Inventor
蒋燕红
程言军
蒋来红
Original Assignee
安徽帝显电子有限公司
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Publication of WO2020220518A1 publication Critical patent/WO2020220518A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

Definitions

  • the utility model relates to the technical field of exposure machines, in particular to a multifunctional exposure machine base station device.
  • Exposure machine refers to the equipment that transmits the image information on the film or other transparent body to the surface coated with photosensitive material by turning on the light to emit UVA wavelength ultraviolet rays.
  • the surface of the base of the exposure machine needs to be kept clean. It is cleaned and wiped once every half a month or a month.
  • the method of cleaning the base of the exposure machine is: the operator puts on dust-free clothes and holds the cleaning liquid with his hands. Dust cloth, extend your arm into the exposure machine to wipe the base of the exposure machine.
  • the above method is used to clean the abutment, the operation is relatively cumbersome.
  • a few exposure machines have a rolling brush to clean the abutment, but the brush is difficult to replace and clean. After a long time of use, there is more dust, which leads to unclean cleaning.
  • the pre-tightening force between the brush and the base is not adjustable, so the cleaning effect cannot be guaranteed.
  • the base of the existing exposure machine and the exposed substrate are often difficult to remove due to the close adhesion, which causes inconvenience in use .
  • the utility model designs a multifunctional exposure machine base device to solve the above-mentioned problems.
  • the purpose of the present utility model is to provide a multifunctional exposure machine base station device to solve the problem of the prior art proposed in the background art.
  • the brush is difficult to be replaced and cleaned. After a long time of use, there is more dust, resulting in unclean cleaning, and The pre-tightening force between the brush and the base is not adjustable, so the cleaning effect cannot be guaranteed.
  • the base of the existing exposure machine and the exposed substrate are often difficult to remove due to the close bonding, which causes inconvenience in use problem.
  • a multifunctional exposure machine base station device including an organic base shell, a base frame is arranged in the base shell, and glass is arranged in the base frame A base, the upper side of the glass base is abutted with a brush plate mechanism, both ends of the brush plate mechanism are symmetrically provided with ear plates, and slide grooves are opened on the left and right side walls inside the machine base shell.
  • the left and right sides of the shell are symmetrically provided with limited polished rods.
  • the lugs pass through the sliding grooves and are slidably connected with the limited polished rods.
  • An electric push rod is provided on the rear side of the lugs, and the telescopic push rods are fixedly connected to the machine.
  • a fan is arranged on the outer rear wall of the base shell, an L-shaped air duct is connected to the right end of the fan, and a straight air duct is connected to the bottom end of the L-shaped air duct through the outer rear wall of the base shell,
  • An air nozzle is evenly arranged on the side of the straight air pipe close to the inner rear wall of the machine base shell, and the air outlet end of the air nozzle penetrates the inner rear wall of the machine base shell, and the left side of the fan is connected with an air purifier through a pipe.
  • the brushing mechanism includes a return frame and a connecting plate, the connecting plate is movably inserted into the return frame, the top end of the connecting plate is provided with an extension plate, and the left and right sides of the extension plate are connected to the top end of the return frame.
  • a locking mechanism is arranged in between, and a dust wipe is arranged at the bottom end of the connecting plate.
  • the locking mechanism includes a threaded rod and a threaded hole, the threaded rod is threaded through the extension plate, and the threaded hole is opened at the top of the return frame.
  • the material of the dust wiper is an elastic rubber material, and the bottom end of the dust wiper is bifurcated.
  • a convex strip is provided on the top of the glass base to reduce the adsorption force and facilitate the exposure of the substrate in the unloading area.
  • the beneficial effects of the present utility model are: the utility model can realize the reciprocating scraping of dust by the electric push rod, the brush plate mechanism, the ear plate and other structures, the transmission is simple and reliable, and the brush plate
  • the dust wiper in the mechanism is easy to disassemble and clean, and the pre-tightening force between the dust wiper and the glass base can be adjusted to ensure the effectiveness of dust wiper and dust removal.
  • the linearly distributed air nozzles can quickly dry the dust wiper. After the residual moisture, the air blown to the base can be made cleaner through the installed air purifier, and the cleanliness of the base can be ensured.
  • the convex strip on the surface of the glass base, the gap between the glass base and the exposed substrate is reduced. The adsorption force makes it easier to disassemble and use the exposed substrate.
  • Figure 1 is a schematic diagram of the structure of the utility model
  • Figure 2 is the front view of the utility model
  • Figure 3 is a schematic diagram of the utility model brush plate mechanism structure
  • Figure 4 is a schematic diagram of the glass base of the utility model.
  • a multifunctional exposure machine base station device including an organic base shell 1, the base shell 1 is provided with a base frame 2 inside the base frame 2 A glass base 3 is provided, a brush mechanism 4 is provided on the upper side of the glass base 3, and two ends of the brush mechanism 4 are symmetrically provided with ear plates 5, and slide grooves 6 are provided on the left and right side walls of the inner side of the base shell 1.
  • the left and right sides of the base shell 1 are symmetrically provided with limited polished rods 7.
  • the lug plate 5 passes through the sliding groove 6 and is slidably connected with the limited polished rod 7.
  • the back of the lug plate 5 is provided with an electric push rod 8 and a telescopic push rod 8.
  • a fan 9 is provided on the outer rear wall of the machine base shell 1.
  • the right end of the fan 9 is connected with an L-shaped air duct 10, and the bottom end of the L-shaped air duct 10 is connected through the outer rear wall of the machine base shell 1
  • the air outlet end of the air nozzle 12 penetrates the inner rear wall of the base shell 1, and the left side of the fan 9 is connected by a pipe Air purifier 13.
  • the brushing mechanism 4 includes a return frame 31 and a connecting plate 32.
  • the connecting plate 32 is movably inserted into the return frame 31.
  • the top of the connecting plate 32 is provided with an extension plate 33.
  • the left and right sides of the extension plate 33 are connected to the return frame 31.
  • a locking mechanism 34 is provided between the top ends, and a dust wiper 35 is provided at the bottom end of the connecting plate 32.
  • the locking mechanism 34 includes a threaded rod 341 and a threaded hole 342, the threaded rod 341 is screwed through the extension plate 33, and the threaded hole 342 is opened at the top of the return frame 31.
  • the dust wiper 35 is made of elastic rubber material, and its bottom end is bifurcated.
  • a convex strip 31 is provided on the top of the glass base 3 to reduce the adsorption force and facilitate the unloading area to expose the substrate.
  • the device is a multi-functional exposure machine base device
  • the electrical components in the device are electrically connected to the external power supply through an external control switch
  • the utility model uses an electric push rod 8 provided , Brush plate mechanism 4, ear plate 5 and other structures can realize the reciprocating scraping of dust.
  • the electric push rod 8 pushes the ear plate 5 to move back and forth along the limit polished rod 7, thereby realizing the brush plate mechanism 4 on the glass base.
  • the transmission of this device is simple and reliable, and the dust wiper 45 in the brush plate mechanism 4 can be disassembled and adjusted. Loosen the threaded rod 441.
  • connection between the dust wiper 45 and the return frame 41 can be disengaged for easy replacement and cleaning, and the pre-tightening force between the dust wiper 45 and the glass base 3 can be adjusted (just control the distance of the threaded rod 441 in the threaded hole 442), The effectiveness of dust scraping is ensured.
  • the linearly distributed air nozzle 12 can quickly dry the residual moisture after the dust wipe 45 is cleaned.
  • the air purifier 13 can make the air blown to the base more It is clean to ensure the cleanliness of the base.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning In General (AREA)

Abstract

Disclosed is a multifunctional exposure machine base table device belonging to the technical field of exposure machines, the device comprising a machine base housing (1). A base table frame (2) is arranged in the machine base housing (1), a glass base table (3) is arranged in the base table frame (2), and a brush plate mechanism (4) abuts against an upper side of the glass base table (3). By means of the provided structures, such as an electric push rod (8), the brush plate mechanism (4) and a lug plate (5), reciprocating scraping and brushing of a dust wiper (45) can be achieved, the transmission is simple and reliable, the dust wiper (45) in the brush plate mechanism (4) is convenient to dismount and clean, and a pre-tightening force between the dust wiper (45) and the glass base table (3) can be adjusted, thereby ensuring the effectiveness of scraping dust by means of the dust wiper (45). By means of provided air nozzles (12) that are distributed linearly, residual water, after cleaning using the dust wiper (45), can be quickly air-dried. By means of a provided air purifier (13), air blown to the base table can be cleaner, thereby ensuring the cleanliness of the base table. By means of arranging protruding strips (31) on the surface of the glass base table (3), an attachment force between the glass base table (3) and an exposure base plate is reduced, such that the exposure base plate is more convenient to dismount and use.

Description

一种多功能的曝光机基台装置Multifunctional exposure machine base table device 技术领域Technical field
本实用新型涉及曝光机技术领域,具体为一种多功能的曝光机基台装置。The utility model relates to the technical field of exposure machines, in particular to a multifunctional exposure machine base station device.
背景技术Background technique
曝光机是指通过开启灯光发出UVA波长的紫外线,将胶片或其他透明体上的图像信息转移到涂有感光物质的表面上的设备。曝光机基台表面需要保持清洁,每半月或一月清理擦拭一次,现有技术下,清理曝光机基台的方法是:操作人员穿上无尘衣服,用手拿着沾有清洗液的无尘布,将手臂伸入曝光机内部对曝光机的基台进行擦拭。Exposure machine refers to the equipment that transmits the image information on the film or other transparent body to the surface coated with photosensitive material by turning on the light to emit UVA wavelength ultraviolet rays. The surface of the base of the exposure machine needs to be kept clean. It is cleaned and wiped once every half a month or a month. Under the prior art, the method of cleaning the base of the exposure machine is: the operator puts on dust-free clothes and holds the cleaning liquid with his hands. Dust cloth, extend your arm into the exposure machine to wipe the base of the exposure machine.
采用上述方法进行基台清理,操作较为繁琐,少数曝光机基台自带有滚动毛刷对基台进行清洗,但是其毛刷难以更换清洗,使用久了灰尘较多,导致清理不干净,且毛刷与基台的预紧力不可调,从而不能很好地保证清理效果,在使用过程中,现有曝光机基台与曝光基板之间由于贴合紧密,常常难以拆下,造成使用不便。The above method is used to clean the abutment, the operation is relatively cumbersome. A few exposure machines have a rolling brush to clean the abutment, but the brush is difficult to replace and clean. After a long time of use, there is more dust, which leads to unclean cleaning. The pre-tightening force between the brush and the base is not adjustable, so the cleaning effect cannot be guaranteed. During use, the base of the existing exposure machine and the exposed substrate are often difficult to remove due to the close adhesion, which causes inconvenience in use .
基于此,本实用新型设计了一种多功能的曝光机基台装置,以解决上述问题。Based on this, the utility model designs a multifunctional exposure machine base device to solve the above-mentioned problems.
实用新型内容Utility model content
本实用新型的目的在于提供一种多功能的曝光机基台装置,以解决上述背景技术中提出的现有技术其毛刷难以更换清洗,使用久了灰尘较多,导致清理不干净,且毛刷与基台的预紧力不可调,从而不能很好地保证清理效果,在使用过程中,现有曝光机基台与曝光基板之间由于贴合紧密,常常难以拆下,造成使用不便的问题。The purpose of the present utility model is to provide a multifunctional exposure machine base station device to solve the problem of the prior art proposed in the background art. The brush is difficult to be replaced and cleaned. After a long time of use, there is more dust, resulting in unclean cleaning, and The pre-tightening force between the brush and the base is not adjustable, so the cleaning effect cannot be guaranteed. During use, the base of the existing exposure machine and the exposed substrate are often difficult to remove due to the close bonding, which causes inconvenience in use problem.
为实现上述目的,本实用新型提供如下技术方案:一种多功能的曝光机基台装置,包括有机座壳,所述机座壳内设置有基台框,所述基台框内设置有玻璃基台,所述玻璃基台上侧抵接设置有刷板机构,所述刷板机构两端对称设置有耳板,所述机座壳内侧左右侧壁上开设有滑槽,所述机座壳左右两 侧壳体内部对称设置有限位光杆,所述耳板穿过滑槽与限位光杆滑动贯穿连接,所述耳板后侧设置有电动推杆,所述伸缩推杆固接与机座壳壳体内壁,所述机座壳外侧后壁设置有风机,所述风机右端连接有L型风管,所述L型风管底端贯穿机座壳外侧后壁连接有直风管,所述直风管靠近机座壳内侧后壁一侧均匀设置有气嘴,且气嘴出气口端贯穿机座壳内侧后壁,所述风机左侧通过管道连接有空气净化器。In order to achieve the above object, the present invention provides the following technical solutions: a multifunctional exposure machine base station device, including an organic base shell, a base frame is arranged in the base shell, and glass is arranged in the base frame A base, the upper side of the glass base is abutted with a brush plate mechanism, both ends of the brush plate mechanism are symmetrically provided with ear plates, and slide grooves are opened on the left and right side walls inside the machine base shell. The left and right sides of the shell are symmetrically provided with limited polished rods. The lugs pass through the sliding grooves and are slidably connected with the limited polished rods. An electric push rod is provided on the rear side of the lugs, and the telescopic push rods are fixedly connected to the machine. On the inner wall of the base shell, a fan is arranged on the outer rear wall of the base shell, an L-shaped air duct is connected to the right end of the fan, and a straight air duct is connected to the bottom end of the L-shaped air duct through the outer rear wall of the base shell, An air nozzle is evenly arranged on the side of the straight air pipe close to the inner rear wall of the machine base shell, and the air outlet end of the air nozzle penetrates the inner rear wall of the machine base shell, and the left side of the fan is connected with an air purifier through a pipe.
优选的,所述刷板机构包括有回型框和连接板,所述连接板活动插接回型框,所述连接板顶端设置有延长板,所述延长板左右两侧与回型框顶端之间设置有锁紧机构,所述连接板底端设置有灰尘擦。Preferably, the brushing mechanism includes a return frame and a connecting plate, the connecting plate is movably inserted into the return frame, the top end of the connecting plate is provided with an extension plate, and the left and right sides of the extension plate are connected to the top end of the return frame. A locking mechanism is arranged in between, and a dust wipe is arranged at the bottom end of the connecting plate.
优选的,所述锁紧机构包括有螺纹杆和螺纹孔,所述螺纹杆螺接贯穿延长板,所述螺纹孔开设于回型框顶端。Preferably, the locking mechanism includes a threaded rod and a threaded hole, the threaded rod is threaded through the extension plate, and the threaded hole is opened at the top of the return frame.
优选的,所述灰尘擦其材质为弹性橡胶材料,且其底端经过分叉处理。Preferably, the material of the dust wiper is an elastic rubber material, and the bottom end of the dust wiper is bifurcated.
优选的,所述玻璃基台顶端设置有凸条,减少吸附力,方便卸区曝光基板。Preferably, a convex strip is provided on the top of the glass base to reduce the adsorption force and facilitate the exposure of the substrate in the unloading area.
与现有技术相比,本实用新型的有益效果是:本实用新型通过设置的电动推杆、刷板机构、耳板等结构,能够实现灰尘擦的往复刮刷,传动简单可靠,且刷板机构中灰尘擦方便拆卸清洗,且灰尘擦与玻璃基台之间预紧力可以调节,保证了灰尘擦刮除灰尘的有效性,通过设置的线型分布的气嘴,能够快速风干灰尘擦清理后残留的水分,通过设置的空气净化器能够使得吹向基台的空气更加干净,保证基台的洁净度,通过在玻璃基台表面设置凸条,减小了玻璃基台与曝光基板之间的吸附力,使得曝光基板拆用更方便。Compared with the prior art, the beneficial effects of the present utility model are: the utility model can realize the reciprocating scraping of dust by the electric push rod, the brush plate mechanism, the ear plate and other structures, the transmission is simple and reliable, and the brush plate The dust wiper in the mechanism is easy to disassemble and clean, and the pre-tightening force between the dust wiper and the glass base can be adjusted to ensure the effectiveness of dust wiper and dust removal. The linearly distributed air nozzles can quickly dry the dust wiper. After the residual moisture, the air blown to the base can be made cleaner through the installed air purifier, and the cleanliness of the base can be ensured. By setting the convex strip on the surface of the glass base, the gap between the glass base and the exposed substrate is reduced. The adsorption force makes it easier to disassemble and use the exposed substrate.
附图说明Description of the drawings
为了更清楚地说明本实用新型实施例的技术方案,下面将对实施例描述所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本实用新型的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the technical solutions of the embodiments of the present utility model more clearly, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained from these drawings without creative work.
图1为本实用新型结构示意图;Figure 1 is a schematic diagram of the structure of the utility model;
图2为本实用新型主视图;Figure 2 is the front view of the utility model;
图3为本实用新型刷板机构结构示意图;Figure 3 is a schematic diagram of the utility model brush plate mechanism structure;
图4为本实用新型玻璃基台示意图。Figure 4 is a schematic diagram of the glass base of the utility model.
附图中,各标号所代表的部件列表如下:In the drawings, the list of parts represented by each number is as follows:
1-机座壳,2-基台框,3-玻璃基台,4-刷板机构,5-耳板,6-滑槽,7-限位光杆,8-电动推杆,9-风机,10-L型风管,11-直风管,12-气嘴,13-空气净化器,31-凸条,41-回型框,42-连接板,43-延长板,44-锁紧机构,45-灰尘擦,441-螺纹杆,442-螺纹孔。1- machine base shell, 2- abutment frame, 3- glass abutment, 4- brush plate mechanism, 5- ear plate, 6-chute, 7- limit polished rod, 8- electric push rod, 9- fan, 10-L air duct, 11-straight air duct, 12-air nozzle, 13-air purifier, 31-raised strip, 41-return frame, 42-connecting plate, 43-extension plate, 44-locking mechanism , 45- dust wipe, 441- threaded rod, 442- threaded hole.
具体实施方式Detailed ways
下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本实用新型一部分实施例,而不是全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例,都属于本实用新型保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, not all implementations. example. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.
请参阅图1-4,本实用新型提供一种技术方案:一种多功能的曝光机基台装置,包括有机座壳1,机座壳1内设置有基台框2,基台框2内设置有玻璃基台3,玻璃基台3上侧抵接设置有刷板机构4,刷板机构4两端对称设置有耳板5,机座壳1内侧左右侧壁上开设有滑槽6,机座壳1左右两侧壳体内部对称设置有限位光杆7,耳板5穿过滑槽6与限位光杆7滑动贯穿连接,耳板5后侧设置有电动推杆8,伸缩推杆8固接与机座壳1壳体内壁,机座壳1外侧后壁设置有风机9,风机9右端连接有L型风管10,L型风管10底端贯穿机座壳1外侧后壁连接有直风管11,直风管11靠近机座壳1内侧后壁一侧均匀设置有气嘴12,气嘴12出气口端贯穿机座壳1内侧后壁,风机9左侧通过管道连接有空气净化器13。Please refer to Figures 1-4, this utility model provides a technical solution: a multifunctional exposure machine base station device, including an organic base shell 1, the base shell 1 is provided with a base frame 2 inside the base frame 2 A glass base 3 is provided, a brush mechanism 4 is provided on the upper side of the glass base 3, and two ends of the brush mechanism 4 are symmetrically provided with ear plates 5, and slide grooves 6 are provided on the left and right side walls of the inner side of the base shell 1. The left and right sides of the base shell 1 are symmetrically provided with limited polished rods 7. The lug plate 5 passes through the sliding groove 6 and is slidably connected with the limited polished rod 7. The back of the lug plate 5 is provided with an electric push rod 8 and a telescopic push rod 8. It is fixedly connected to the inner wall of the machine base shell 1. A fan 9 is provided on the outer rear wall of the machine base shell 1. The right end of the fan 9 is connected with an L-shaped air duct 10, and the bottom end of the L-shaped air duct 10 is connected through the outer rear wall of the machine base shell 1 There is a straight air duct 11, and the straight air duct 11 is evenly provided with an air nozzle 12 on the side close to the inner rear wall of the base shell 1. The air outlet end of the air nozzle 12 penetrates the inner rear wall of the base shell 1, and the left side of the fan 9 is connected by a pipe Air purifier 13.
进一步的,刷板机构4包括有回型框31和连接板32,连接板32活动插接回型框31,连接板32顶端设置有延长板33,延长板33左右两侧与回型框31顶端之间设置有锁紧机构34,连接板32底端设置有灰尘擦35。Further, the brushing mechanism 4 includes a return frame 31 and a connecting plate 32. The connecting plate 32 is movably inserted into the return frame 31. The top of the connecting plate 32 is provided with an extension plate 33. The left and right sides of the extension plate 33 are connected to the return frame 31. A locking mechanism 34 is provided between the top ends, and a dust wiper 35 is provided at the bottom end of the connecting plate 32.
进一步的,锁紧机构34包括有螺纹杆341和螺纹孔342,螺纹杆341螺接贯穿延长板33,螺纹孔342开设于回型框31顶端。Further, the locking mechanism 34 includes a threaded rod 341 and a threaded hole 342, the threaded rod 341 is screwed through the extension plate 33, and the threaded hole 342 is opened at the top of the return frame 31.
进一步的,灰尘擦35其材质为弹性橡胶材料,其底端经过分叉处理。Furthermore, the dust wiper 35 is made of elastic rubber material, and its bottom end is bifurcated.
进一步的,玻璃基台3顶端设置有凸条31,减少吸附力,方便卸区曝光基板。Furthermore, a convex strip 31 is provided on the top of the glass base 3 to reduce the adsorption force and facilitate the unloading area to expose the substrate.
本实施例的一个具体应用为:本装置为一种多功能的曝光机基台装置,本装置中电器件均通过外部控制开关与外部电源电性连接,本实用新型通过设置的电动推杆8、刷板机构4、耳板5等结构,能够实现灰尘擦的往复刮刷,清洗时,电动推杆8推动耳板5沿着限位光杆7前后移动,进而实现刷板机构4在玻璃基台3上往复刮擦,将其上的灰尘除去(清理时可加适量清洗液进行清洗),本装置传动简单可靠,且刷板机构4中灰尘擦45可以拆卸调节,旋松螺纹杆441即可解开灰尘擦45与回型框41的连接,方便更换清洗,且灰尘擦45与玻璃基台3之间预紧力可以调节(控制螺纹杆441在螺纹孔442中的距离即可),保证了灰尘擦刮除灰尘的有效性,通过设置的线型分布的气嘴12,能够快速风干灰尘擦45清理后残留的水分,通过设置的空气净化器13能够使得吹向基台的空气更加干净,保证基台的洁净度,通过在玻璃基台3表面设置凸条31,减小了玻璃基台3与曝光基板之间的吸附力,使得曝光基板拆用更方便。A specific application of this embodiment is: the device is a multi-functional exposure machine base device, the electrical components in the device are electrically connected to the external power supply through an external control switch, and the utility model uses an electric push rod 8 provided , Brush plate mechanism 4, ear plate 5 and other structures can realize the reciprocating scraping of dust. When cleaning, the electric push rod 8 pushes the ear plate 5 to move back and forth along the limit polished rod 7, thereby realizing the brush plate mechanism 4 on the glass base. Scrape the table 3 back and forth to remove the dust on it (you can add a proper amount of cleaning fluid to clean it). The transmission of this device is simple and reliable, and the dust wiper 45 in the brush plate mechanism 4 can be disassembled and adjusted. Loosen the threaded rod 441. The connection between the dust wiper 45 and the return frame 41 can be disengaged for easy replacement and cleaning, and the pre-tightening force between the dust wiper 45 and the glass base 3 can be adjusted (just control the distance of the threaded rod 441 in the threaded hole 442), The effectiveness of dust scraping is ensured. The linearly distributed air nozzle 12 can quickly dry the residual moisture after the dust wipe 45 is cleaned. The air purifier 13 can make the air blown to the base more It is clean to ensure the cleanliness of the base. By providing the convex strips 31 on the surface of the glass base 3, the adsorption force between the glass base 3 and the exposed substrate is reduced, and the exposed substrate is more convenient to disassemble and use.
在本说明书的描述中,参考术语“一个实施例”、“示例”、“具体示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本实用新型的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in the present invention. In at least one embodiment or example. In this specification, the schematic representation of the above-mentioned terms does not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics may be combined in any one or more embodiments or examples in a suitable manner.
以上公开的本实用新型优选实施例只是用于帮助阐述本实用新型。优选实施例并没有详尽叙述所有的细节,也不限制该实用新型仅为所述的具体实施方式。显然,根据本说明书的内容,可作很多的修改和变化。本说明书选取并具体描述这些实施例,是为了更好地解释本实用新型的原理和实际应用,从而使所属技术领域技术人员能很好地理解和利用本实用新型。本实用新型仅受权利要求书及其全部范围和等效物的限制。The preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiment does not describe all the details in detail, nor does it limit the utility model to only the specific implementation. Obviously, many modifications and changes can be made according to the content of this manual. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that those skilled in the art can understand and use the utility model well. The utility model is only limited by the claims and their full scope and equivalents.

Claims (5)

  1. 一种多功能的曝光机基台装置,包括有机座壳(1),其特征在于:所述机座壳(1)内设置有基台框(2),所述基台框(2)内设置有玻璃基台(3),所述玻璃基台(3)上侧抵接设置有刷板机构(4),所述刷板机构(4)两端对称设置有耳板(5),所述机座壳(1)内侧左右侧壁上开设有滑槽(6),所述机座壳(1)左右两侧壳体内部对称设置有限位光杆(7),所述耳板(5)穿过滑槽(6)与限位光杆(7)滑动贯穿连接,所述耳板(5)后侧设置有电动推杆(8),所述伸缩推杆(8)固接与机座壳(1)壳体内壁,所述机座壳(1)外侧后壁设置有风机(9),所述风机(9)右端连接有L型风管(10),所述L型风管(10)底端贯穿机座壳(1)外侧后壁连接有直风管(11),所述直风管(11)靠近机座壳(1)内侧后壁一侧均匀设置有气嘴(12),且气嘴(12)出气口端贯穿机座壳(1)内侧后壁,所述风机(9)左侧通过管道连接有空气净化器(13)。A multifunctional exposure machine base station device, comprising an organic base shell (1), characterized in that: a base frame (2) is provided in the base shell (1), and the base frame (2) is A glass base (3) is provided, the upper side of the glass base (3) is abutted with a brush mechanism (4), both ends of the brush mechanism (4) are symmetrically provided with ear plates (5), so Slide grooves (6) are opened on the left and right side walls of the inner side of the base shell (1), and limited polished rods (7) are symmetrically arranged inside the left and right sides of the base shell (1), and the ear plates (5) Pass through the sliding groove (6) and slide and penetrate the limit polished rod (7), the rear side of the ear plate (5) is provided with an electric push rod (8), and the telescopic push rod (8) is fixedly connected to the base shell (1) On the inner wall of the housing, a fan (9) is provided on the outer rear wall of the base housing (1), and an L-shaped air duct (10) is connected to the right end of the fan (9). ) The bottom end penetrates the outer rear wall of the base shell (1) and is connected with a straight air duct (11). The straight air duct (11) is evenly provided with air nozzles (12) on the side close to the inner rear wall of the base shell (1) , And the air outlet end of the air nozzle (12) penetrates the inner rear wall of the machine base shell (1), and the left side of the fan (9) is connected with an air purifier (13) through a pipe.
  2. 根据权利要求1所述的一种多功能的曝光机基台装置,其特征在于:所述刷板机构(4)包括有回型框(41)和连接板(42),所述连接板(42)活动插接回型框(41),所述连接板(42)顶端设置有延长板(43),所述延长板(43)左右两侧与回型框(41)顶端之间设置有锁紧机构(44),所述连接板(42)底端设置有灰尘擦(45)。A multifunctional exposure machine base station device according to claim 1, characterized in that: the brush mechanism (4) includes a return frame (41) and a connecting plate (42), and the connecting plate ( 42) The movable plug-in return frame (41) is provided with an extension plate (43) at the top of the connecting plate (42), and between the left and right sides of the extension plate (43) and the top end of the return frame (41) are provided A locking mechanism (44) is provided with a dust wipe (45) at the bottom end of the connecting plate (42).
  3. 根据权利要求2所述的一种多功能的曝光机基台装置,其特征在于:所述锁紧机构(44)包括有螺纹杆(441)和螺纹孔(442),所述螺纹杆(441)螺接贯穿延长板(43),所述螺纹孔(442)开设于回型框(41)顶端。The multifunctional exposure machine base device according to claim 2, wherein the locking mechanism (44) includes a threaded rod (441) and a threaded hole (442), and the threaded rod (441) ) The screw connection penetrates through the extension plate (43), and the threaded hole (442) is opened at the top of the return frame (41).
  4. 根据权利要求2所述的一种多功能的曝光机基台装置,其特征在于:所述灰尘擦(35)其材质为弹性橡胶材料,且其底端经过分叉处理。A multifunctional exposure machine base device according to claim 2, wherein the dust wiper (35) is made of elastic rubber material, and the bottom end of the dust wiper (35) is bifurcated.
  5. 根据权利要求1所述的一种多功能的曝光机基台装置,其特征在于:所述玻璃基台(3)顶端设置有凸条(31)。A multifunctional exposure machine base device according to claim 1, characterized in that: the top of the glass base (3) is provided with a convex strip (31).
PCT/CN2019/101503 2019-04-28 2019-08-20 Multifunctional exposure machine base table device WO2020220518A1 (en)

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CN116449658B (en) * 2023-06-15 2023-09-08 广东科视光学技术股份有限公司 Efficient alignment exposure device and alignment method

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CN208027083U (en) * 2018-04-23 2018-10-30 安徽帝显电子有限公司 A kind of cleaning device of exposure machine base station
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CN107748483A (en) * 2017-11-20 2018-03-02 张家港奇点光电科技有限公司 A kind of cleaning device of multi-functional exposure machine base station
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CN208027083U (en) * 2018-04-23 2018-10-30 安徽帝显电子有限公司 A kind of cleaning device of exposure machine base station

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