CN102826762A - Thin film forming apparatus and thin film forming method - Google Patents
Thin film forming apparatus and thin film forming method Download PDFInfo
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- CN102826762A CN102826762A CN2012101821340A CN201210182134A CN102826762A CN 102826762 A CN102826762 A CN 102826762A CN 2012101821340 A CN2012101821340 A CN 2012101821340A CN 201210182134 A CN201210182134 A CN 201210182134A CN 102826762 A CN102826762 A CN 102826762A
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- 238000000034 method Methods 0.000 title claims abstract description 48
- 239000010409 thin film Substances 0.000 title claims abstract 7
- 238000000576 coating method Methods 0.000 claims abstract description 102
- 239000011248 coating agent Substances 0.000 claims abstract description 95
- 239000000463 material Substances 0.000 claims abstract description 51
- 238000010521 absorption reaction Methods 0.000 claims description 25
- 238000001035 drying Methods 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000007599 discharging Methods 0.000 claims description 4
- 238000012423 maintenance Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 12
- 238000005253 cladding Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 11
- 238000001179 sorption measurement Methods 0.000 abstract 2
- 230000007246 mechanism Effects 0.000 description 63
- 239000000758 substrate Substances 0.000 description 44
- 239000011521 glass Substances 0.000 description 36
- 230000033228 biological regulation Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000007641 inkjet printing Methods 0.000 description 6
- 239000000976 ink Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 206010013786 Dry skin Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Coating Apparatus (AREA)
- Mathematical Physics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention provides a thin film forming apparatus and a thin film forming method which can coat high-accurately and uniformly. The thin film forming apparatus comprises an adsorption table (9) for adsorbing and holding coated objects (100); a plurality of coating heads (4) one surface of which discharges coating materials to the surfaces of the coated objects (100) absorbed and held on the adsorption table (9) from inkjet nozzles and the other surface of which forms the thin film; and a gantry frame (3) for enabling the coating heads (4) to move above the coated objects (100), wherein the gantry frame (3) has a heat source device (31) for heating the surfaces of the coated objects (100).
Description
Technical field
The present invention relates to the film forming device and the film formation method of ink-jetting style.
Background technology
Ink-jetting style be from as the utilization that applies head the ink-jet coating head of bubble or piezoelectric element discharge mode on a small quantity and accurately as the black drop of coating material at every turn.'s device from high-precision discharge that will be through this China ink drop to the treatment unit change that apply black drop as the parts that apply object be ink-jet coating apparatus.In recent years, it is attracted attention as the device of the high meticulous coating that can realize China ink, is not limited to the printing to paper, seeks its application possibility at all industrial fields, also has by the device of practicability.
Front end is provided with a plurality of nozzles with the spacing of regulation below applying head, according to the spacing decision of this nozzle as the discharge of the drop of coating material at interval.Because the spacing of this nozzle is little, can individually manage having or not of discharge according to each nozzle, so, do not need the such version type of flexographic printing method, can carry out the coating of the free shape in the plane.
On the other hand, because the viscosity of adjustment coating material, so that can carry out going out drop from nozzle row, so, the profit exhibition that on the substrate after the discharge, produces coating material.Therefore, a dropping liquid drips the stability of dripping the face shape of generation with an adjacent dropping liquid becomes problem, especially in the thread shape of the most peripheral of face shape the quality of fabrication is had very big influence.
For example, patent documentation 1 is through ink gun oriented film material to be discharged, and makes it attached to the document on the substrate.Form in the method for oriented film carrying out dry solidification, represented solvent, the degassing solvent of the surface tension adjustment that the oriented film material to the viscosity that is used for making the discharge that is fit to ink-jet adds.It is that desire improves the discharging operation of ink-jet and the method for the horizontality on the substrate after the discharge, is with regard to dry solidification, carries out the method (referring to non-patent literature 1) that the exsiccant device shifts as other operation to the next one.
TP formerly
Patent documentation
Patent documentation 1: No. 3073493 communique of patent
Non-patent literature
Non-patent literature 1: the strong department in the kind great Yueshi of rock well work " the organic EL of liquid crystal PDP thoroughly compares ", first edition, Co., Ltd.'s census of manufacturing meeting, in July, 2004, P50-58
So far, height in the coating that requires ink-jetting style applies aspect the homogeneity of positional precision, thickness, mainly be conceived to as the coating of target at interval with the relative position relation of the injector spacing that applies head.
But, gradually with being coated in aspect the every field flexible Application of ink-jetting style, on the basis of the action in the moment that applies, to also being important from applying just how the back manage till carry out drying and be bonded on the substrate.
Especially in the example of the manufacturing that is applied in liquid crystal glass base, what kind of tacky state is the progress along with substrate maximizes become and become of crucial importance.Therefore, hope to come the management position, apply, carry out drying rapidly, so that can keep the position managed through ink-jetting style.
But, in method in the past such shown in the non-patent literature 1, after a series of coating processing finish, carry out drying treatment.Therefore, beginning to being set on the drying installation from apply handling, beginning is dry be treated to end during, do not carry out drying treatment.Therefore, exist in beginning dry be treated to end during, be coated on the glass substrate liquid drop movement or because of the possibility of the linksystem ground generation under state unintentionally of the overlapping level that produces between drop.
Therefore, the present invention is a problem so that a kind of film forming device and the film formation method that can carry out high precision and apply uniformly to be provided.
Summary of the invention
In order to solve such problem; The present invention is a kind of film forming device; Said film forming device possesses the absorption maintenance and applies the absorption workbench of object, simultaneously applies material from the ink jet type nozzle to being adsorbed the surface discharge that remains on the above-mentioned coating object on this absorption workbench; One side is carried out a plurality of portalframes that apply head, this coating head is moved in the top position of above-mentioned coating object that film forms; It is characterized in that above-mentioned portalframe also possesses the surface heated heat power supply device with above-mentioned coating object.
The invention effect
According to the present invention, a kind of film forming device and the film formation method that can carry out high precision and apply uniformly can be provided.
Description of drawings
Fig. 1 is the stereographic map of expression about the structure of the film forming device of this embodiment.
Fig. 2 is the structural representation of structure of the rear side of explanation portalframe.
Fig. 3 is the enlarged view of head restoring device.
Fig. 4 is the synoptic diagram of the action of explanation head restoring device.
Fig. 5 is the FBD of the function of explanation control part.
Fig. 6 is the schema of explanation about the film formation method of the film forming device of this embodiment.
Fig. 7 is the schema of explanation housing working procedure of coating.
Fig. 8 is the schema of explanation inner face working procedure of coating.
Fig. 9 is the synoptic diagram of explanation about the housing working procedure of coating of the film forming device of this embodiment, when (a) representing the outlet, when (b) representing the return road.
Figure 10 is the structural representation of structure of portalframe of the film forming device of the relevant variation of explanation.
Figure 11 is the synoptic diagram of housing working procedure of coating of the film forming device of the relevant variation of explanation, (a) during the expression outlet, (b) during the expression return road.
Embodiment
Below, one side is rightly with reference to accompanying drawing, and one side explanation at length is used for the mode (calling " embodiment " in the following text) of embodiment of the present invention.In addition, among each figure, the identical symbol of part mark to common omits the multiple explanation.
Fig. 1 is the stereographic map of expression about the structure of the film forming device 1 of this embodiment.
The film forming device 1 of relevant this embodiment has the flat plate panel indicating meter, used the crooked diversified purposes such as Electronic Paper in pliable and tough ground that are called as flexible display of electrophoresis mode etc.In the explanation below, the film forming device 1 of relevant this embodiment is explained as the device that forms the film of (coating) polyimide with respect to the glass substrate that is used for the flat plate panel indicating meter 100.In addition; Though in the film forming device 1 of relevant this embodiment; The film that forms (coating) polyimide on glass substrate 100 is to become oriented film through carrying out formal drying treatment and directional process (grinding); But, in this explanation, the film before the formal drying treatment directional process is also referred to as " oriented film ".
Film forming device 1 possesses pallet 2, portalframe 3, have a plurality of coatings 4 coating head unit 5, X axle travel mechanism 6, y-axis shift actuation mechanism 7, Z axle travel mechanism 8, the glass substrate 100 as the object that forms (coating) oriented film is carried out vacuum suck and carries out fixed absorption workbench 9, head restoring device 10, heat power supply device 31, adjustment photographic camera 32 (referring to Fig. 2), adjustment camera movement mechanism 33 (referring to Fig. 2), control part 50 (referring to Fig. 5).
In addition, as shown in Figure 1 in the explanation below, the length direction (travel direction of portalframe 3) of pallet 2 as the X axle, as the Y axle, as the Z axle, is described with vertical direction the width of pallet 2 (on horizontal plane with the orthogonal direction of X axle).In addition, the positive dirction of portalframe 3 to the X axle moved as the outlet, will move as the return road, describe to the negative direction of X axle.
Portalframe 3 be and pallet 2 between have the door type portalframe of opening 3a, be set on the pallet 2 through X axle travel mechanism 6.
Side is provided with the coating head unit 5 with a plurality of coatings 4 through y-axis shift actuation mechanism 7 and Z axle travel mechanism 8 in the return road of portalframe 3.
Side is provided with heat power supply device 31 in the outlet of portalframe 3.In addition, side is provided with adjustment photographic camera 32 (referring to Fig. 2) through adjustment camera movement mechanism 33 (referring to Fig. 2) in the outlet of portalframe 3.
X axle travel mechanism 6 is the linear motor actuators that are made up of stator (magnetic sheet) 6a and mover (coil) 6b that is arranged on the portalframe 3 that are arranged on the pallet 2, can portalframe 3 moved in X-direction with respect to pallet 2.
Y-axis shift actuation mechanism 7 be by be arranged on the portalframe 3 stator (magnetic sheet) 7a be arranged on the linear motor actuator that mover (coil) 7b that applies on the head unit 5 constitutes, can make with respect to portalframe 3 to apply head unit 5 and move in Y direction.
Z axle travel mechanism 8 is made up of servomotor, can make with respect to portalframe 3 to apply head unit 5 and move in Z-direction.
Promptly, apply a head unit 5 (apply 4, after the nozzle 4a that states) and can move in X-direction through X axle travel mechanism 6, move in Y direction through y-axis shift actuation mechanism 7, move in Z-direction through Z axle travel mechanism 8.
In addition, X axle travel mechanism 6, y-axis shift actuation mechanism 7 and Z axle travel mechanism 8 are by control part 50 controls.
Setting has the coating head unit 5 of a plurality of coatings 4.In order to ensure the continuity of the spacing of the nozzle that oriented film material is discharged, a plurality of coatings 4 are set.In example shown in Figure 1, illustrate applying head unit 5 upper edge Y directions and apply 4 with four and be configured to row, this coatings 4 be listed in the situation that X-direction configuration 3 is listed as.
Have again, with respect to one apply 4 discharge oriented film materials a nozzle (not shown go out) become a row configuration a plurality of along Y direction, the row of this nozzle dispose multiple row (not shown go out).In addition, applying 4 is to utilize piezoelectric element etc. to discharge the ink gun of a spot of drop accurately from nozzle.
In addition, control part 50 can be according to the amount of the oriented film material of each having or not of applying that each nozzle control oriented film material of 4 discharges, time, discharge.
Fig. 2 is the structural representation of structure of the rear side of explanation portalframe 3.In addition, in Fig. 2, the mover 6b, y-axis shift actuation mechanism 7, the Z axle travel mechanism 8 that omit X axle travel mechanism 6 represent.
As shown in Figure 2, the heat power supply device 31 that is configured in the outlet side (rear side of Fig. 1) of portalframe 3 for example is made up of infrared(ray)lamp, can be to the irradiation of vertical direction roughly infrared rays.Promptly, when being the return road of portalframe 3, can be with respect to object (glass substrate 100) the irradiation infrared rays that has passed through at the opening 3a of portalframe 3 (referring to Fig. 1).
In addition, it lights a lamp and turns off the light heat power supply device 31 by control part 50 control.
In addition; Though the film forming device 1 of relevant this embodiment is to be illustrated infrared(ray)lamp as the device that heat power supply device 31 uses; But be not limited thereto; Can be the visible rays lamp (not shown go out) of irradiation visible rays, also can be the UV-lamp (not shown go out) of irradiation ultraviolet radiation, can also be can be with the parts that are coated in the oriented film material heating on the glass substrate 100.
Along being with one; Under the situation of using UV-lamps (not shown go out) as heat power supply device 31; Owing to till the ultraviolet intensity stabilization that is shone, need the time from power connection with UV-lamp, so, hope to be provided with optical gate (not shown go out); On the basis of controlling that lighting a lamp of UV-lamp turned off the light, the switching through optical gate stops to control to irradiation beginning and irradiation.
In addition, as heat power supply device 31, also can be air (cleaned air) heating with the cleaning that does not contain dust etc., the hot blast air-supply arrangement that brushes to object (glass substrate 100) (not shown go out).Air through with heated cleaning brushes to object as heat medium, can further object (glass substrate 100) be heated.In addition, also can be heat power supply device with the combination of hot blast air-supply arrangement and infrared(ray)lamp (visible rays lamp, UV-lamp).
Adjustment photographic camera 32 be except that be used for the location that is adsorbed on the glass substrate 100 on the absorption workbench 9 with, also be used for observing from applying 4 and discharge, be coated in the photographic camera of the oriented film material on the glass substrate 100.
Adjustment camera movement mechanism 33 can make adjustment photographic camera 32 move in Y direction with respect to portalframe 3.Promptly, adjustment photographic camera 32 can move in X-direction through X axle travel mechanism 6, move in Y direction through adjustment camera movement mechanism 33.
In addition, X axle travel mechanism 6 and adjustment camera movement mechanism 33 are by control part 50 controls.In addition, to control part 50 transmission, be used to apply a position correction of 4 by the image of adjustment photographic camera 32 shooting.
Turn back to Fig. 1, absorption workbench 9 can vacuum suck glass substrate 100 and is fixed.In addition, absorption workbench 9 possesses the θ rotating mechanism that is made up of servomotor (not shown go out), can be turning axle rotation rotation angle θ with the axle of Z-direction.
In addition, absorption workbench 9 can be through the mounting or dismounting and the rotation angle θ of control part 50 feed glass substrates 100.
Then, use Fig. 3 and Fig. 4, further specify head restoring device 10.Fig. 3 is the enlarged view of head restoring device 10.
LED12 with the position be arranged on coating 4 corresponding mode that are configured to row along Y direction that apply on the head unit 5 and be configured.Promptly, four LED12 and coating head unit 5 shown in Figure 1 are configured to row along Y direction accordingly.In addition, LED12 can move in Y direction through the 12A of LED travel mechanism.
In addition, it lights a lamp and turns off the light LED12 by control part 50 control.
In addition, the image by photographic camera 13 shootings transmits to control part 50.
Fig. 4 is the synoptic diagram of the action of explanation head restoring device 10.In addition, Fig. 4 is the synoptic diagram of seeing on the X-Z plane of Fig. 1.In addition, among Fig. 1, though dispose a plurality of coatings 4 and suction port 11 in X-direction,, coating corresponding with the nozzle that becomes the inspection object 4 and suction port 11 parts have in addition omitted diagram in this Fig. 4.
At first, control part 50 (the head restoring control part of afterwards stating 51) control X axle travel mechanism 6 and y-axis shift actuation mechanism 7 apply 4 and move to make with suction port 11 corresponding mode.In addition, control part 50 (head restoring control part 51) control LED 12A of travel mechanism and the 13A of camera movement mechanism make it to move with the consistent mode of Y axial coordinate of the nozzle 4a of inspection object with the Y axial coordinate of LED12 and photographic camera 13.In addition, photographic camera 13 has the travel mechanism (not shown go out) of X-direction, and the focal position that makes shooting is to move with the consistent mode of X axial coordinate of the nozzle 4a of inspection object.
Then, control part 50 (head restoring control part 51) control applies 4, carries out discharging from nozzle 4a the recovery running of the drop 4b of oriented film material.The drop 4b of the oriented film material that is discharged from addition, gets into suction port 11.
At this moment, control part 50 (head restoring control part 51) is lit a lamp LED12, is made a video recording by photographic camera 13.The drop 4b of the oriented film material that is discharged from is made a video recording as shadow in the image by photographic camera 13 shootings.In view of the above, can detect the recovery of the hole plug of nozzle 4a.
In addition; Though the hole plug of nozzle 4a is to eliminate through the drop 4b that discharges oriented film material,, only can not eliminate under the situation of hole plug through discharging control; Also can be control part 50 (head restoring control part 51) control Z axle 8 (referring to Fig. 1) of travel mechanism; Make to apply 4 decline,, attract to recover so that contact with suction port 11.And control part 50 (head restoring control part 51) is controlled Z axle 8 (referring to Fig. 1) of travel mechanism, returns the height of regulation, and the drop 4b from nozzle 4a discharge oriented film material is made a video recording by photographic camera 13, confirms recovering.
Fig. 5 is the FBD of the function of explanation control part 50.
Control part 50 can be controlled the shift position of X axle travel mechanism 6, y-axis shift actuation mechanism 7, Z axle travel mechanism 8, the 12A of LED travel mechanism, the 13A of camera movement mechanism and adjustment camera movement mechanism 33.
In addition, control part 50 can be at the mounting or dismounting and the rotation angle θ of absorption workbench 9 feed glass substrates 100.
In addition, control part 50 can be controlled LED12 and lighting a lamp of heat power supply device 31 turned off the light.
In addition, control part 50 can be according to each of the nozzle of a plurality of coating 4, having or not, constantly controlling the discharge of oriented film material.
In addition, import control part 50 by the image of photographic camera 13 and 32 shootings of adjustment photographic camera.
Control part 50 possesses head restoring control part 51, housing working procedure of coating control part 52, inner face working procedure of coating control part 53.
Head restoring control part 51 makes and applies the control that a nozzle of 4 recovers.
Housing working procedure of coating control part 52 forms the control of the housing of the oriented film that on glass substrate 100, applies.
Inner face working procedure of coating control part 53 carries out applying to the inside of the housing of the oriented film that is formed by housing working procedure of coating control part 52 control of oriented film material.
Then, use Fig. 6 to Fig. 8, the film formation method of the film forming device 1 of relevant this embodiment is described.
In step S1, can the head restoring control part of control part 50 51 is confirmed from applying a nozzle of 4 oriented film material that normally drips.In addition, use electronic balance 14, adjustment is from the output of the oriented film material that applies a nozzle of 4.
Specifically, head restoring control part 51 control X axle travel mechanism 6 and y-axis shift actuation mechanism 7 apply 4 and move to make with suction port 11 corresponding mode.In addition, control the LED 12A of travel mechanism and the 13A of camera movement mechanism make it mobile with the Y axial coordinate of LED12 and photographic camera 13 with the consistent mode of Y axial coordinate of the nozzle of checking object.
And head restoring control part 51 control applies 4, discharges oriented film material from nozzle, is made a video recording and is confirmed by the drop of 13 pairs of oriented film materials that are discharged from of photographic camera.
In addition, produce hole plug, under the situation of not dripping, carry out above-mentioned attraction and recover at nozzle.
Affirmation can get into step S2 from applying after a nozzle of 4 normally drips.
In step S2, control part 50 control absorption workbench 9 are configured in the glass substrate 100 (substrate loading) on the absorption workbench 9 by the substrate filling mechanism of outside (not shown go out) absorption.In addition, control part 50 control X axle travel mechanism 6 and adjustment camera movement mechanisms 33 move adjustment photographic camera 32, according to the position of being confirmed to be attracted to the glass substrate 100 on the absorption workbench 9 by the image of adjustment photographic camera 32 shootings.The positional information of the glass substrate 100 that control part 50 bases here are identified, the coating of stating after the control 4 moves.
In step S3, the housing working procedure of coating control part 52 of control part 50 applies and forms the housing of oriented film on glass substrate 100.Here, use Fig. 7, further specify the housing working procedure of coating shown in the step S3.
At first; In step S31, housing working procedure of coating control part 52 control y-axis shift actuation mechanism 7 move the position of Y axle (applying a Y axle contraposition); So that after among the step S32 that states, apply 4 in zone passages that form housing pattern 110 (referring to Fig. 9 (a)).
In step S32, shown in Fig. 9 (a), housing working procedure of coating control part 52 control X axle travel mechanisms 6, direction moves in the outlet to make portalframe 3, and control applies 4, and control is dripped moment of drop of oriented film material from applying a nozzle of 4.
In view of the above, on glass substrate 100, apply the housing pattern 110 of oriented film.
If the mobile end of the outlet direction of portalframe 3 then gets into step S33.
In step S33, housing working procedure of coating control part 52 makes as the infrared(ray)lamp of heat power supply device 31 light a lamp (heat power supply device ON).
In step S34, shown in Fig. 9 (b), housing working procedure of coating control part 52 control X axle travel mechanisms 6, direction moves in the return road to make portalframe 3.Like this, with respect to the glass substrate 100 that has passed through at the opening 3a of portalframe 3 (referring to Fig. 1), irradiation infrared rays (heating region) 34.
In view of the above, make housing pattern 110 dryings that are applied to the oriented film on the glass substrate 100 at step S32.
If the mobile end of the return road direction of portalframe 3 then gets into step S35.
In step S35, housing working procedure of coating control part 52 makes as the infrared(ray)lamp of heat power supply device 31 turn off the light (heat power supply device OFF).
In step S36, housing working procedure of coating control part 52 judges whether the number of times of regulation finishes.
In the housing working procedure of coating shown in the step S3; For making housing pattern 110 reach the height of regulation; The repeatedly coating of housing pattern 110 and drying repeatedly, under the unclosed situation of number of times of regulation (S36No), step S31 is returned in the processing of housing working procedure of coating control part 52.Under the situation that the number of times of stipulating is through with (S36Yes), finish housing working procedure of coating (step S3) shown in Figure 7, get into the step S4 of Fig. 6.
Return Fig. 6, in step S4, the inner face working procedure of coating control part 53 of control part 50 applies oriented film material to the inner face that is surrounded by the housing pattern 110 (referring to Fig. 9) that forms at step S3.Here, use Fig. 8, further specify the inner face working procedure of coating shown in the step S4.
In step S41, inner face working procedure of coating control part 53 control y-axis shift actuation mechanism 7 move the position of Y axle (applying a Y axle contraposition), so as to make apply 4 be configured in Y direction primary position.
In step S42, inner face working procedure of coating control part 53 control X axle travel mechanisms 6 move portalframe 3, and control applies 4, and control is dripped moment (portalframe moves coating) of drop of oriented film material from nozzle.In addition, moving with outlet, return road of the portalframe in S42 3 has nothing to do.
In view of the above, apply oriented film material to the inner face that surrounds by the housing pattern 110 (referring to Fig. 9) that forms at step S3.
In step S43, inner face working procedure of coating control part 53 judges whether the coating number of times (N time) of regulation finishes.
Of the back, the coating of the inner face that is surrounded by housing pattern 110 is that one side makes the 1/N that applies 4 a moving nozzle spacing, and one side is carried out N coating.The spacing of the drop that drips to the inner face that is surrounded by housing pattern 110 in view of the above, is the 1/N that applies an injector spacing of 4.In view of the above, can make uniform film thicknessization.
Under the unclosed situation of coating number of times of regulation (S43No), get into step S44, inner face working procedure of coating control part 52 control y-axis shift actuation mechanism 7 make to apply 4 and move the 1/N injector spacing.Then, return step S42.
Under the situation that the coating number of times of stipulating is through with (S43Yes), finish inner face working procedure of coating (step S4) shown in Figure 8, get into the step S5 of Fig. 6.
In step S5, control part 50 control absorption workbench 9 are removed the absorption that is configured in the glass substrate 100 on the absorption workbench 9.Be coated with the glass substrate 100 of oriented film and take out (substrate unloading) from film forming device 1 by the substrate filling mechanism of outside (not shown go out).
In addition, the glass substrate 100 that takes out from film forming device 1 is sent to the drying process device that carries out formal drying treatment (not shown go out).
Like this, because the film forming device of relevant this embodiment 1 uses ink-jetting style, form oriented film; So; Do not need the such version type of flexographic printing method in the past, oriented film formation (in other words, being the manufacturing of the flat plate panel indicating meter of a small amount of many kinds) that can corresponding a small amount of many kinds.
In addition, the film forming device 1 of relevant this embodiment is being formed on oriented film 100 last times of glass substrate, forms the housing pattern 110 of oriented film, after this, in frame, applies oriented film material.
Here; As shown in Figure 9; Because when forming the housing pattern 110 of oriented film; Heat power supply device 31 by infrared(ray)lamp etc. will be applied to the oriented film material heating on the glass substrate 100, so, can reduce the situation of the position expansion of the coating of coated oriented film material from the glass substrate 100.In view of the above, can reduce from oriented film and form overflowing of zone, use oriented film material effectively.
In addition, can improve the rectilinearity at the edge of oriented film.In view of the above, can seek the further downsizing of the non-display part area of flat plate panel indicating meter.In addition, in the glass substrate that carries out many chamferings, adjacent oriented film pattern-pitch can be dwindled, the number of the flat plate panel indicating meter that obtains from a glass substrate can be improved.
Then, the oriented film material that is applied in the frame is stopped by housing, can not further expand.In view of the above, can reduce overflow (the profit exhibition) that forms the zone from oriented film, use oriented film material effectively.
In addition, film forming device 1 and the absorption workbench 9 about this embodiment is adjacent to be provided with head restoring device 10.In view of the above, can prevent to apply a hole plug of 4, and nozzle is recovered (cleaning), can control amount and the moment of dripping of the drop of the oriented film material that drips from the nozzle of coating 4 rightly.
In addition, through making a video recording, can confirm whether not have hole plug and discharge correctly by 13 pairs of oriented film materials of photographic camera from coating 4 discharge.
In addition and since the irradiation area (heating region 34 shown in Fig. 9 (b)) of heat power supply device 31 at glass substrate 100 below portalframe 3, so, can not encourage applying a hole plug of 4.
< variation >
In addition, the film forming device of relevant this embodiment is not limited to the structure of above-mentioned embodiment, in the scope of the purport that does not break away from invention, can carry out various changes.
Figure 10 is the structural representation of structure of portalframe 3 of the film forming device of the relevant variation of explanation.Compare with the portalframe 3 (referring to Fig. 2) of relevant this embodiment, side (face side of Fig. 1) also possesses heat power supply device 35 to the portalframe 3 (referring to Figure 10) of relevant variation in the return road of portalframe 3.Heat power supply device 35 is same with heat power supply device 31, for example is made up of infrared(ray)lamp, can be at vertical direction irradiation infrared rays roughly.Promptly, heat power supply device 35 when being the outlet of portalframe 3, can be with respect to the object irradiation infrared rays that has passed through at the opening 3a of portalframe 3 (referring to Fig. 1).
In addition, it lights a lamp and turns off the light heat power supply device 35 by control part 50 control.
Figure 11 is the synoptic diagram of housing working procedure of coating of the film forming device of the relevant variation of explanation, (a) during the expression outlet, (b) during the expression return road.
Shown in Figure 11 (a); Make portalframe 3 when the outlet direction moves, control applies 4, and control is dripped moment of drop of oriented film material from applying a nozzle of 4; And through heat power supply device 35 is lit a lamp, with respect to glass substrate 100 irradiation infrared rays (heating region) 36.
In addition, shown in Figure 11 (b), when making portalframe 3 direction moves in the return road; Control applies 4; Control is dripped moment of drop of oriented film material from applying a nozzle of 4, and through heat power supply device 31 is lit a lamp, with respect to glass substrate 100 irradiation infrared rays (heating region) 34.
Like this, according to the film forming device of relevant variation, when the outlet and during the return road, can both carry out oriented film material drip and dry, can shorten the pitch time that forms housing.
In addition, because the time till can shortening from coating (dripping of the drop of oriented film material) to dry (ultrared irradiation), so the rectilinearity of housing is further enhanced.
In addition; Also can be also to possess heater that the glass substrate 100 that is adsorbed on the absorption workbench 9 (referring to Fig. 1) is heated (not shown go out); Form operation (step S3) with glass substrate 100 heating through frame outside, the drying of the drop of the oriented film material that promotes to be dripped.
Nomenclature
1: film forming device; 2: pallet; 3: portalframe; 3a: opening; 4: apply head; 4a: nozzle; 4b: the drop of oriented film material; 5: apply head unit; 6:X axle travel mechanism; 6a: stator; 6b: mover; 7:Y axle travel mechanism; 7a: stator; 7b: mover; 8:Z axle travel mechanism; 9: absorption workbench; 10: the head restoring device; 11: suction port (drain position); 12:LED (camera head); 12A:LED travel mechanism (camera head); 13: photographic camera (camera head); 13A: camera movement mechanism (camera head); 31: heat power supply device; 32: the adjustment photographic camera; 33: adjustment camera movement mechanism; 34: infrared rays (heating region); 35: heat power supply device; 36: infrared rays (heating region); 50: control unit; 51: the head restoring control part; 52: housing working procedure of coating control part; 53: inner face working procedure of coating control part; 100: glass substrate (coating object); 110: the housing pattern.
Claims (4)
1. film forming device, said film forming device possess absorption workbench that absorption keeps applying object,
One side discharge to apply material from the ink jet type nozzle to being adsorbed the surface that remains on the above-mentioned coating object on this absorption workbench, one side carry out a plurality of coating that film forms,
The portalframe that this coating head is moved in the top position of above-mentioned coating object is characterized in that,
Above-mentioned portalframe also possesses the surface heated heat power supply device with above-mentioned coating object.
2. film forming device as claimed in claim 1 is characterized in that,
With the surperficial different position of above-mentioned coating object, also possess from above-mentioned coating head and will apply the drain position that material is discharged.
3. film forming device as claimed in claim 2 is characterized in that, at above-mentioned drain position
Also possesses the camera head that the coating material of discharging from the nozzle of above-mentioned coating head is made a video recording.
4. the film formation method of a film forming device is to possess
The absorption workbench of absorption maintenance coating object,
One side discharge to apply material from the ink jet type nozzle to being adsorbed the surface that remains on the above-mentioned coating object on this absorption workbench, one side carry out a plurality of coating that film forms,
Make portalframe that this coating head moves in the top position of above-mentioned coating object,
Be configured on the above-mentioned portalframe, and, it is characterized in that having the film formation method of the film forming device of the surface heated heat power supply device of above-mentioned coating object
Discharge the coating material from the nozzle of above-mentioned coating head to the surface of above-mentioned coating object, the housing applying step of film forming housing,
By above-mentioned heat power supply device with above-mentioned coating object surface heated make apply material exsiccant housing drying step,
Apply material, film forming thin film cladding step from the nozzle of above-mentioned coating head to inner discharge of the frame that is formed on the above-mentioned housing on the above-mentioned coating object.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-134131 | 2011-06-16 | ||
| JP2011134131A JP5864141B2 (en) | 2011-06-16 | 2011-06-16 | Thin film forming apparatus and thin film forming method |
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| Publication Number | Publication Date |
|---|---|
| CN102826762A true CN102826762A (en) | 2012-12-19 |
| CN102826762B CN102826762B (en) | 2015-10-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210182134.0A Expired - Fee Related CN102826762B (en) | 2011-06-16 | 2012-06-05 | Film forming device and film forming method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5864141B2 (en) |
| KR (1) | KR101395157B1 (en) |
| CN (1) | CN102826762B (en) |
| TW (1) | TWI526250B (en) |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1939095A (en) * | 2004-12-14 | 2007-03-28 | 株式会社爱发科 | Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus |
| CN101407131A (en) * | 2007-10-12 | 2009-04-15 | 株式会社日立工业设备技术 | Inkjet head device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004057928A (en) * | 2002-07-29 | 2004-02-26 | Pioneer Electronic Corp | Injection coating device for pattern forming material and injection coating method of pattern forming material |
| JP4413535B2 (en) * | 2002-09-19 | 2010-02-10 | 大日本印刷株式会社 | Organic EL display device by inkjet method, color filter manufacturing method, manufacturing device |
| JP2006133671A (en) * | 2004-11-09 | 2006-05-25 | Toshiba Corp | Method for producing display device and method for depositing thin film |
| KR20070031876A (en) * | 2004-12-14 | 2007-03-20 | 가부시키가이샤 알박 | Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus |
| JP5321770B2 (en) * | 2005-03-25 | 2013-10-23 | 大日本印刷株式会社 | Coating equipment |
| JP2007232866A (en) * | 2006-02-28 | 2007-09-13 | Seiko Epson Corp | Pattern forming method, liquid drop discharging device, and liquid crystal display device |
| JP2007256449A (en) * | 2006-03-22 | 2007-10-04 | Toshiba Corp | Droplet jetting inspecting device, droplet jetting device, and manufacturing method for coating body |
| JP2009072691A (en) * | 2007-09-20 | 2009-04-09 | Hitachi High-Technologies Corp | Ink jet state inspection device, manufacturing apparatus for flat panel, and flat panel |
| KR101182226B1 (en) * | 2009-10-28 | 2012-09-12 | 삼성디스플레이 주식회사 | Coating apparatus, coating method thereof, and method for making organic film using the same |
-
2011
- 2011-06-16 JP JP2011134131A patent/JP5864141B2/en active Active
-
2012
- 2012-06-04 KR KR1020120059853A patent/KR101395157B1/en active IP Right Grant
- 2012-06-05 CN CN201210182134.0A patent/CN102826762B/en not_active Expired - Fee Related
- 2012-06-07 TW TW101120476A patent/TWI526250B/en active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1939095A (en) * | 2004-12-14 | 2007-03-28 | 株式会社爱发科 | Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus |
| CN101407131A (en) * | 2007-10-12 | 2009-04-15 | 株式会社日立工业设备技术 | Inkjet head device |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015054955A1 (en) * | 2013-10-17 | 2015-04-23 | 深圳市华星光电技术有限公司 | Alignment liquid nozzle |
| CN105618300A (en) * | 2015-12-25 | 2016-06-01 | 天津滨海光热反射技术有限公司 | Spray equipment specially used for manufacturing solar-thermal power generation reflecting mirror and operation method for spray equipment |
| CN107718880A (en) * | 2016-08-12 | 2018-02-23 | 惠州市富丽电子有限公司 | A kind of full-automatic spray decoding apparatus |
| CN107102458A (en) * | 2017-06-20 | 2017-08-29 | 南京信息职业技术学院 | Device and method for forming photoresist film of liquid crystal display |
| CN107102458B (en) * | 2017-06-20 | 2023-05-16 | 南京信息职业技术学院 | Device and method for forming film of photoresist of liquid crystal display |
| CN114364537A (en) * | 2019-05-16 | 2022-04-15 | 西门子股份公司 | Printing device, printing press system and method for printing objects |
| CN114364537B (en) * | 2019-05-16 | 2024-01-12 | 西门子股份公司 | Printing apparatus, printing press system and method for printing an object |
| US12011935B2 (en) | 2019-05-16 | 2024-06-18 | Siemens Aktiengesellschaft | Printing apparatus, printer system and method for printing on an object |
| WO2021022864A1 (en) * | 2019-08-07 | 2021-02-11 | 华中科技大学 | System and method for manufacturing inkjet-printed flexible display device |
| CN110588186A (en) * | 2019-08-07 | 2019-12-20 | 华中科技大学 | Manufacturing system and method of ink-jet printing flexible display device |
| CN115921168A (en) * | 2023-02-10 | 2023-04-07 | 东莞市华纬涂装设备有限公司 | Multi-station spraying manipulator |
| CN115921168B (en) * | 2023-02-10 | 2023-10-03 | 东莞市华纬涂装设备有限公司 | Multi-station spraying manipulator |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN102826762B (en) | 2015-10-28 |
| JP2013000656A (en) | 2013-01-07 |
| KR101395157B1 (en) | 2014-05-15 |
| KR20120139547A (en) | 2012-12-27 |
| TW201311354A (en) | 2013-03-16 |
| JP5864141B2 (en) | 2016-02-17 |
| TWI526250B (en) | 2016-03-21 |
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