KR20070031876A - Coating apparatus, organic material thin film forming method and organic el panel manufacturing apparatus - Google Patents

Abstract

It provides a coating apparatus that does not require a heating chamber or a cooling chamber. The ejectors 31 and the laser irradiation devices 32a and 32b which are reciprocally movable in the Y-axis direction are disposed on the application object 14 moving in the X-axis direction, and the ejection object 31 is used to The organic material discharged from a part of the surface is irradiated with laser light, heated to dry or polymerized, and thinned. The ejector 31 and the laser irradiation apparatuses 32a and 32b are repeatedly moved in the Y-axis direction and the X-axis direction of the coating object 14 so that a thin film of an organic material is placed in a predetermined region of the coating object 14. Form. Since application | coating and a laser beam irradiation can be performed in parallel, work efficiency is high. In addition, since the application object 14 does not become high temperature, a cooling process is unnecessary.

Laser irradiation device, coating device, ejector, EL panel

Description

Coating apparatus, forming method of organic material thin film, organic EL panel manufacturing apparatus {COATING APPARATUS, ORGANIC MATERIAL THIN FILM FORMING METHOD AND ORGANIC EL PANEL MANUFACTURING APPARATUS}

Field of technology

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for forming an organic thin film, and more particularly, to an application apparatus for forming a film by an inkjet method.

Background

In order to form the organic thin film used for an organic EL panel, the technique using the coating apparatus like an inkjet printer is developed.

Reference numeral 100 in FIG. 8 denotes an organic EL panel manufacturing apparatus of the prior art, and reference numerals O _{1 to} O ₄ denote coating apparatuses for forming an organic thin film on the substrate surface by an inkjet method. Here, the first through fourth coating device (O ₁ ~O ₄₎ is in, each is disposed an organic material for forming the hole transport layer, the red layer, green layer, blue layer.

Code T ₁ ~T ₅ are the first to the fifth transfer chamber for transferring the substrate, the substrate transfer robot is disposed inside of the transport chamber (T ₁ ~T _5).

Numeral ₁ H ~H ₄ is the first to fourth heating chamber for heating a substrate is disposed inside the heating device. Code C ₁ ~C ₄ is the first to fourth cooling chamber for cooling the heated substrate, a cooling unit is placed inside.

In the organic EL panel manufacturing apparatus 100, a substrate disposed in a substrate load chamber (L _in) has been brought into the first application device (O _1), an organic material of the hole transport layer is applied by ink jet method.

Subsequently, the heating is disposed on the hot plate in the first heating chamber (H _1). By this heating, the solvent evaporates to form a hole transport layer.

Then, it is brought into the first heating chamber (H ₁₎ a first cooling chamber (C _1), the second application device (O ₂₎ after the moving is cooled from within.

In the second coating device (O ₂ ), an organic material for red color development is applied onto the hole transport layer, moved into the second heating chamber (H ₂ ), and heated, and the solvent evaporates to form a red light emitting layer on the hole transport layer. Is formed. Subsequently, the two are brought into the after moved to the cooling chamber (C ₂₎ cooled, and the third applying device (O _3).

In the third coating device O ₃ , an organic material for green color development is applied onto the hole transport layer, and is sequentially moved to the third heating chamber H ₃ and the third cooling chamber C ₃ , and heated and cooled. As a result, a green light emitting layer is formed.

Then, a fourth coating device (O ₄₎ is moved into, and an organic material for a blue color applied to the surface of the hole transport layer, the fourth heating chamber (H ₄₎ and a fourth cooling chamber is moved in sequence to (C ₄₎ The blue light emitting layer is formed by heating and cooling.

Finally, it passes through the intermediate chamber E and is taken _out from the carrying out chamber L _out .

As described above, a film forming apparatus for forming an organic thin film using an inkjet printer is described in the following literature. However, the following organic EL panel manufacturing apparatus requires both a heating chamber and a cooling chamber. It costs a lot

Patent Document 1: Japanese Patent Publication No. 2003-515909

Patent Document 2: Japanese Patent Application Publication No. 2004-531859

Disclosure of the Invention

Problems to be Solved by the Invention

An object of the present invention is to provide a coating device capable of raising the temperature of an organic material without heating the entire coating object.

Means to solve the problem

MEANS TO SOLVE THE PROBLEM In order to solve the said subject, this invention is an ejector which discharges an organic material on a coating object, and the laser irradiation which irradiates a laser beam to the said organic material discharged from the said ejector to the said coating object, It is an application device having a device.

Moreover, this invention is the coating device which irradiates the said laser beam for every one part area | region of the said application object surface, and partially heats the said application object surface.

In addition, the present invention is configured such that the coating object and the ejector, the coating object and the laser irradiation apparatus are relatively movable in the first direction, and the coating object and the ejector are substantially perpendicular to the first direction. It is an application device configured to be relatively reciprocating in the second direction.

Moreover, this invention is the coating device with which the said laser irradiation apparatus is arrange | positioned at the both sides of the said ejector along the said 2nd direction, and comprised relatively reciprocally in the said 2nd direction with the said ejector.

In addition, the present invention is the laser irradiation apparatus is a coating apparatus disposed behind the ejector with respect to the direction in which the ejector moves relative to the application object.

In addition, the present invention is the coating device, wherein the laser irradiation device is configured to reciprocate along the second direction.

Moreover, this invention is comprised so that the said application object, the said ejector, and the said application object and the said laser irradiation apparatus may be moved in a 1st direction relatively, The said application object and the said laser irradiation apparatus are the said 1st direction, Is an applicator configured to be relatively reciprocating in a second direction that is approximately vertical.

In addition, the present invention is the laser irradiation apparatus is a coating apparatus disposed behind the ejector with respect to the direction in which the ejector moves relative to the application object.

Moreover, this invention has at least 3 said arbitrary coating apparatuses, and each coating apparatus is arrange | positioned the organic material for red color development, green color development, and blue color development, respectively, and the said application object is not exposed to air | atmosphere, and each said It is an organic EL panel manufacturing apparatus comprised so that a movement can be carried out between coating apparatuses.

Moreover, this invention is the formation method of the organic material thin film which discharges to an application | coated object, irradiates a laser beam to the impacted organic material, and forms the thin film of the said organic material.

Moreover, this invention is the formation method of the organic material thin film which irradiates the said laser beam for every partial area | region of the said application object surface, and partially heats the said application object surface.

The present invention is configured as described above, the application object and the ejector are configured to be relatively movable. When the moving direction is set to the first direction, the application object and the laser irradiation apparatus are also relatively movable in the first direction. When the organic material is discharged by dividing the organic material into a plurality of portions for each range of the application target, before the organic material is discharged for all the ranges, the laser light is irradiated onto the impacted organic material, and the temperature is raised to form a thin film.

The relative movement of the application object and the ejector includes a case where the application object stops and the ejector moves, a case where the ejector stops and the application object moves, and both the application object and the ejector move.

The relative movement of the coating object and the laser irradiation device is also the same.

When the laser irradiation device is synchronized with the ejector, it can move in the second direction together with the ejector, and can move in the second direction asynchronously with the ejector.

Effects of the Invention

Since the organic material is partially heated by laser light irradiation, the organic material can be directly heated without heating the entire substrate, and the entire substrate does not become a high temperature. Therefore, the cooling device becomes unnecessary.

In particular, when the laser light is irradiated for each part of the application object, the portion where the irradiation of the laser light is completed is naturally cooled, so that the increase in the substrate temperature is small.

Moreover, when application | coating of organic material and irradiation of a laser beam are performed simultaneously, the working time required for irradiation of a laser beam will be shortened very much.

Brief description of the drawings

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure for demonstrating operation | movement of the coating device of a 1st example of this invention.

2 is a schematic plan view of the coating device of the first example of the present invention.

3 is a view for explaining application of an organic material and irradiation of laser light in the coating apparatus of the first example of the present invention.

4 is a schematic plan view of a coating device of a second example of the present invention.

5 is a schematic plan view of a coating apparatus of a third example of the present invention.

It is a figure for demonstrating an application object.

7 is an organic EL panel manufacturing apparatus of the present invention.

8 is an organic EL panel manufacturing apparatus of the prior art.

9 is a schematic plan view of a coating device of a fourth example of the present invention.

10 is a schematic plan view of a coating device of a fifth example of the present invention.

Explanation of the sign

1 to 3. … Applicator

10... … Organic EL Panel Manufacturing Equipment

14... … Application object

31, 42... … Ejector

32a, 32b, 43, 46... … Laser irradiation device

34... … Organic materials

To practice the invention  Best form for

1 has shown the coating device of the 1st example of this invention.

This coating device 1 has an application table 12. The board | substrate conveyance mechanism 13 is provided in the application table 12, and the application | coating object 14 loaded on the application table 12 by the operation | movement of this board | substrate conveyance mechanism 13 is applied to the application table 12. It is comprised so that it may move toward the movement destination B from the moving source A side of the coating stand 12 along the longitudinal direction of the stiffening stand. That is, as for the movement of the application | coating object 14, the moving source A is an upstream side, and the moving destination B is a downstream side.

The head movement mechanism 23 is arrange | positioned above the application stand 12, and the head 15 is attached to the head movement mechanism 23 so that a movement is possible. By the operation of the head moving mechanism 23, the head 15 is configured to be able to reciprocate in a direction substantially perpendicular to the moving direction of the application object 14 by the substrate transfer mechanism 13.

FIG. 2 is a schematic plan view of the coating device 1, in which the head 15 is configured to reciprocate along the Y axis substantially perpendicular to the X axis when the moving direction of the coating object 14 is the X axis. When the direction along the X axis is made into a 1st direction, and the direction along a Y axis is made into a 2nd direction, 1st, 2nd direction is located in the plane parallel to the surface of the plate-shaped application object 14, and is mutually perpendicular.

The head 15 has an ejector 31 at the lower portion thereof, and when the head 15 reciprocates, the ejector 31 is located above the application object 14 while being different from the application object 14. It is configured to reciprocate along the Y axis at a distance apart.

In this application object 14, the display area 21 is arrange | positioned in matrix form, and when the application object 14 is aligned with respect to an X-axis and a Y-axis, the line of the display area 21 will be lined up with the X-axis direction and Y It can be adjusted in the axial direction.

As viewed from the position of the moving source A or the moving destination B of the application table 12, the first and second laser irradiation apparatuses 32a and 32b are disposed on both sides of the ejector 31, respectively. That is, along the Y axis, the 1st laser irradiation apparatus 32a, the ejector 31, and the 2nd laser irradiation apparatus 32b are lined in this order (in this case, it goes from the negative direction of a Y axis to a positive direction). Lined up).

The ejector 31 is configured to be capable of ejecting a liquid organic material supplied into the head 15 by a predetermined amount to a constant region on the surface of the application object 14 by an inkjet method.

FIG. 6: is a figure for demonstrating the application object 14 and has shown the partial surface of the application object 14. As shown in FIG. This coating object 14 is a board | substrate for manufacturing an organic electroluminescent display panel, The surface is the several display area 21 to which the organic material is apply | coated, and the isolation area | region 22 which isolates between the display area 21. Divided. The isolation region 22 is made of an insulating material higher than the surface of the display region 21.

FIG. 3 is a view for explaining the application of the organic material to the application object 14, and shows a state in which the ejector 31 discharges a certain amount of the organic material 34 for each display region 21.

The ejector 31 may eject the organic material while moving relative to the application object 14, or may be ejected while the application object 14 and the ejector 31 are relatively stopped.

In the ejector 31, n pieces (1 ≦ n) in the X axis direction and n pieces (1 ≦ m) in the Y axis direction are arranged in a matrix at a position facing the application object 14. To a plurality of discharge holes.

In the state where the ejector 31 and the application target object 14 are relatively stopped, it discharges with respect to the several display area 21 located just below each ejection hole from each ejection hole of one ejector 31. The materials 34 are discharged separately and simultaneously.

When the organic material 34 is discharged, the ejector 31 and the application object 14 are relatively stopped, and in the stopped state, the ejector 31 and the ejector 31 are arranged in a row or a plurality of rows along the Y axis from one ejector 31. The organic materials 34 are individually and simultaneously discharged with respect to the display region 21.

If the discharge hole and the display area 21 correspond one-to-one, and the discharge liquid discharged from one discharge hole reaches the one display area 21, the discharge device 31 discharges one time. The organic material 34 arrives at the n × m display areas 21. In this case, however, the n × m display areas 21 are discharged at two-column intervals.

After the ejector 31 discharges the organic material 34 to the display region 21 located in a predetermined range, the head 15 is relatively in the direction along the Y axis direction with respect to the application object 14. It is stepped by a predetermined amount, stopped on the uncoated display region 21, and the organic material 34 is discharged to the uncoated predetermined range of regions.

That is, after the discharge liquid has been impacted, the head 15 and the object to be coated 14 are relatively moved by m in the positive or negative direction of the Y axis, and the head 15 is stopped on the uncoated display area 21. The organic material 34 is discharged to the n x m uncoated display regions 21.

The head 15 may move in the Y-axis direction in a state where the application object 14 is stopped with respect to the applicator 12, and the application object 14 is in a state where the head 15 is stopped with respect to the applicator 12. ) May move in the Y-axis direction. Both may move relative to each other.

The head 15 is the same as the range of the Y-axis direction in which the display area 21 of the application object 14 is arrange | positioned (in the case of 2nd, 3rd Example below), or longer than it (in the case of 1st Example) It is configured to move).

That is, the range in which the head 15 can move relative to the Y axis direction is a distance of at least the same length as the length in the Y axis direction of the range in which the display area 21 is disposed on the application object 14, that is, the display area. A distance of at least the same length as the length (width) in the Y-axis direction of the range in which the 21 is disposed, or a distance longer than the length (width) in the Y-axis direction of the range in which the display area 21 is disposed (first In the case of the embodiment), it is comprised so that relative movement is possible.

When the ejection and the step movement in the Y-axis direction are repeatedly performed and completely discharged to the display region 21 arranged in one row or a plurality of rows extending in the Y-axis direction, the application object 14 and the head 15 are relatively X. It is moved by the width of the applied heat in one direction of the axis.

That is, when the organic material 34 arrives at all the display areas 21 lined along the Y-axis direction by n widths along the X-axis direction by the movement in the Y-axis direction of the ejector 31, the ejector The 31 and the application target object 14 are relatively moved along the X axis by n parts of the display area 21, and the non-impacted display area 2l moves in the Y axis direction of the ejector 31. Is sent to the bottom of the.

Subsequently, the ejector 31 moves in the opposite direction along the Y-axis direction, and the organic material arrives at the display area 21 having n widths.

When the ejector 31 is discharging the organic material on the uncoated display region 21 or when the ejector 31 is moving in the Y axis direction together with the head 15, the movement of the head 15 is performed. Although the uncoated display area 21 is located under the laser irradiation apparatus 32b or 32a which is the head side of the movement direction in the direction, the laser irradiation apparatus 32a or 32b on the rear side of the movement direction is opposite to that. It moves on the display area 21 to which the organic material was apply | coated.

Therefore, when the laser light is emitted from the laser irradiation apparatus 32a or 32b positioned at the rear side of the moving direction of the ejector 31, the laser light is irradiated to the organic material on the display area 21, and the organic material. Is heated.

The organic material is dissolved in a solvent to form a liquid phase, the solvent evaporates by heating, and the organic material irradiated with laser light is dried and thinned. The code | symbol 35 of FIG. 3 has shown the organic material thin film formed by drying.

When the application of the organic material to the display area 21 arranged in one row or a plurality of rows along the Y axis and the thinning by laser irradiation are completed, as described above, the coating object 14 is formed of the heat applied in the X axis direction. Moved by the width, the uncoated display region 21 is disposed at a position just below the movement range of the ejector 31.

In addition, in this Example and each Example mentioned later, you may irradiate a laser beam in the relative movement besides irradiating in the state where the head 15 and the application | coating object 14 were relatively stationary.

The coating device 1 is a device for forming an organic thin film of one color of RGB, and when one row extending in the Y-axis direction of the display area 21 corresponds to one color of RGB, the coating object 14 The organic material is applied to the display region 21 arranged in one row or in a plurality of rows at two-column intervals by one movement of the ejector 21 in the Y-axis direction. Here, the coating device 1 is applied to a plurality of rows of two rows apart.

On the other hand, when forming the same organic thin film in all the display areas 21 like a hole transport layer, it can discharge to all n * m display area 21. FIG.

After the relative movement in the X-axis direction, the discharge of the organic material from the ejector 31, the movement in the direction along the Y-axis, and the laser irradiation are repeatedly performed to form the display area 21 to be formed on the coating object 14. A thin film is formed on it.

In addition, when the ejector 31 discharges the organic material in both the reciprocating movement and the plural movement along the Y axis, when the application of one to a plurality of rows ends and the application object 14 moves relatively in the X axis direction, , The moving direction of the ejector 31 is reversed. Therefore, when the reciprocating direction is switched to the plural movement direction and when the plural movement direction is switched to the reciprocating direction, the positions of the head side and the tail side of the laser irradiation apparatuses 32a and 32b are changed.

That is, since the laser irradiation apparatus at the head side at the reciprocating movement becomes the rear side at the plural movements, the laser irradiation apparatuses 32a and 32b used for the laser irradiation are also switched when the reciprocating movement and the plural movements are switched.

As mentioned above, formation of the organic material thin film 35 to the display area 21 of a predetermined place by the movement of the application | coating object 14 and the head 15 in the X-axis direction, the one direction of the Y-axis direction, or the reciprocating direction. After this is done, the coating object 14 is taken out from the coating device 1 and sent to a later step.

As mentioned above, although the operation | movement of the coating device 1 was demonstrated, the coating device 1 of this invention can be used as an organic electroluminescent panel manufacturing apparatus by connecting two or more.

Numeral 10 of Figure 7 are connected in series, and the organic EL panel manufacturing equipment of the invention, the board-conveying robot is a feeding chamber (T ₁ ~T ₅₎ arrangement.

Numeral ₁ O ~O ₄ is connected to each of the application device (1), or an application device of any one of the application device (2-5), which described in the following, each of the transport chamber (T ₁ ~T ₄₎ . Each transfer chamber (T ₁ ~T ₅₎ and the respective coating device (O ₁ ~O ₄₎ had a high purity nitrogen is connected to the circulatory system, the water, oxygen atmosphere is managed to a predetermined concentration. Therefore, to and is configured to be movable between a substrate, such as the load chamber (L _in) the film forming object is not exposed to air coating device (O ₁ ~O ₄₎ brought into the organic EL panel manufacturing apparatus 10 from .

In each application device (O ₁ ~O _4), there is respectively disposed an organic material for forming the hole transport layer, a red light emitting layer, green emitting layer, blue light-emitting layer.

A first transfer chamber (T _1), then the connection substrate load chamber (L _in), the application object 14 disposed in the substrate load chamber (L _in) is, beyond the first transfer chamber (T _1), the in one application device (O _1), an organic material of the hole transport layer, and the discharge does not leave a gap in a display area 21 adjacent to each other, and is dried by a laser beam.

Coating object 14 is a hole transport layer formed is second to fourth coating device (O ₂ ~O ₄₎ is brought into the inside, the organic thin film material corresponding to the red color and the green color and the blue color formed by each two-column spacing Then, it is taken _out from the _carrying out room L _out to the exterior of the organic electroluminescent panel manufacturing apparatus 10. FIG.

Reference numerals R, G, and B in FIG. 6 indicate the rows of the display region 21 in which the organic material thin films that emit red, green, and blue colors are formed, respectively.

Thus, in the organic EL panel manufacturing apparatus 10 of this invention, since the organic material apply | coated by irradiation of a laser beam is dried and thinned, a heating chamber is unnecessary and the whole film formation object is not heated up at high temperature. Therefore, the cooling chamber is also unnecessary.

In the first coating device 1, the laser irradiation apparatuses 32a and 32b are disposed on both sides of the ejector 31, that is, both the front side and the rear side of the reciprocating direction along the Y axis. Although it was an example, the present invention is not limited thereto.

The code | symbol 2 of FIG. 4 has shown the coating apparatus of the 2nd example of this invention, and the code | symbol 3 of FIG. 5 has shown the coating apparatus of the 3rd example of this invention.

In the coating apparatuses 2 and 3 of the 2nd, 3rd example, the same code | symbol is attached | subjected to the same member as the coating apparatus 1 of a 1st example, and description is abbreviate | omitted. This coating device 2 and 3 is also comprised by the board | substrate conveyance mechanism 13 so that the coating object 14 can move on the base 12. As shown in FIG.

First, the coating device of a 2nd example is demonstrated with reference to FIG. Reference numeral 17 denotes a coating head, and an ejector 42 for discharging a liquid organic material is provided below.

The laser head 18 is arrange | positioned at the position closer to the movement destination B of the moving direction of the application | coating object 14 rather than the position of the ejector 42. The laser irradiation apparatus 43 is provided in the lower part of the laser head 18, and the application | coating object 14 and the ejector 42 relatively move along the X axis | shaft by the application object 14 moving. Direction) and the application object 14 and the laser irradiation device 40 are also configured to move in a direction (first direction) relatively along the X axis.

The application head 17 and the laser head 18 are attached to the head moving mechanisms 24 and 25, respectively, and the ejector 42 and the laser irradiation device 43 are Y in a state of being stopped in the X-axis direction. It is configured to reciprocate in the direction along the axis (second direction).

The object to be coated 14 is configured to move along the X axis from the moving source A side of the coating table l2 toward the moving destination B side by the substrate transfer mechanism 13, and the object to be coated 14 moves. On the lower surface, the ejector 42 and the laser irradiation device 43 are configured to move relatively from the end portion closer to the moving destination B of the application object 14 toward the end portion closer to the moving source A. .

In the relative movement in the X-axis direction with respect to the application object 14, the ejector 42 is at the head side, the laser irradiation apparatus 43 is at the tail side, and one row or plural number is applied by the application head 17. After the organic material is applied to the display regions 21 arranged in rows, when the object to be coated 14 moves relatively in the X-axis direction, the coated region comes directly below the movement range of the laser head 18.

The laser head 18 moves in the Y-axis direction, and the laser beam is irradiated from the laser irradiation apparatus 43 onto the organic material which landed on the display area 21. When the organic material is heated and dried by the laser light irradiation, an organic material thin film is formed.

The laser irradiation apparatus 43 may irradiate a some laser beam, and may irradiate a laser beam to the some display area 21 one by one.

The application head 17 and the laser head 18 may move together or may move independently. The laser irradiation device 43 may irradiate the unradiated organic material with the laser beam by the one-way movement in the Y-axis direction, and if it is configured to reciprocate in the X-axis direction in addition to the Y-axis direction, the X-axis direction and the Y The laser beam may be irradiated to the unilluminated portion by combination, reciprocation or more return movement in the axial direction.

The laser irradiation apparatus 43 operates in parallel with the ejector 42, and when the ejector 42 reciprocates or discharges the organic material by reciprocating or displacing the organic material, the laser irradiation device 43 is applied when the laser beam is irradiated to the unirradiated organic material. And laser light irradiation are performed at the same time, so that the throughput is improved.

Next, referring to FIG. 5, the same reference numeral 3 is a coating device of a third example of the present invention, and has a laser head 19.

The laser irradiation apparatus 19 has an elongated laser irradiation apparatus 46 along the Y axis direction in the lower portion thereof. The range of the Y-axis direction which this laser irradiation apparatus 46 can irradiate a laser beam is equal to or longer than the range of the Y-axis direction which the display area 21 was arrange | positioned on the application target object 14.

The laser irradiation apparatus 46 is comprised so that a laser beam can be irradiated to all n pieces of the X-axis direction and the Y-axis direction of the display area 21 in the state stopped at the Y-axis direction, and the laser irradiation apparatus 19 ) Can be irradiated with the laser beam to all the display areas 21 on the application object 14 if it moves step by n in the X-axis direction even if it does not move along the Y-axis direction.

As a result, an organic thin film is formed for every n rows of the display regions 21 arranged in the Y-axis direction. At this time, the laser beam may also be irradiated to the separation region 22 as described above.

As mentioned above, although the case where the organic material is heated and dried by irradiation of a laser beam was demonstrated, about the organic material which superpose | polymerizes by heating and forms an organic thin film, an organic thin film can be formed by the heating by irradiation of a laser beam. . The organic material which produces | generates a polymerization reaction by photoreaction, and a thin film is formed can be formed also by irradiation of a laser beam.

In addition, in the present invention, the laser beam may be irradiated to the display region 21, and the separation region 22 may or may not be irradiated with the laser beam. In addition to the case where the laser beam is irradiated to the plurality of display regions 21 at a time, the case where the laser light is irradiated to one display region 21 at a time is also included.

Next, the coating apparatus of the 4th, 5th example of this invention is demonstrated.

9 and 10 have shown the application apparatus of the 4th and 5th example, respectively. Although the laser irradiation apparatus 46 was thin and long in the coating device 3 of the said 3rd example, and the longitudinal direction was arrange | positioned along the Y-axis direction, in the coating devices 4 and 5 of the 4th and 5th example, the ejector ( 47) It is thin and long, and its longitudinal direction is disposed along the Y axis.

This ejector 47 is attached to the print head 20, and is arrange | positioned at intervals with the applicator 12 in the upper position of the applicator 12. As shown in FIG.

The laser irradiation apparatus 43 or 46 is arrange | positioned downstream from the ejector 47 of the relative moving direction of the application target object 14, and the application target object 14 moves the moving destination B side from the moving source A side. When it moves toward, first, it passes through the position facing the elongate application apparatus 47, and then passes through the position facing the laser irradiation apparatus 43 or 46. FIG.

In the ejector 47, one or more rows of discharge holes are arranged along the Y-axis direction, and the ejection object 14 is applied with the ejector 47 and the application object 14 relatively stopped. It is comprised so that organic material may be made to reach all the display areas 21 lined along the Y-axis. If n discharge holes are arranged in the X-axis direction, it lands on n rows.

After the impact, the coating object l4 is relatively moved by n parts. The laser irradiation device 43 of the coating device 4 of the fourth example is configured to reciprocate in the Y-axis direction similarly to the coating device 2 of the second example, and the laser irradiation device 46 of the coating device 5 of the fifth example ) Is arranged along the Y-axis direction in a thin and long manner as in the coating apparatus 3 of the third example.

Therefore, in the coating apparatus 4 of a 4th example, it can move along a Y-axis direction, and can irradiate a laser beam to the organic material on the display area 21, In the coating apparatus 5 of a 5th example, the coating object 14 and a laser Even if the irradiation apparatus 46 is stopped in the Y-axis direction, it is comprised so that a laser beam can be irradiated to all the display areas 21 lined in the Y-axis direction by 1 or several width | variety in the X-axis direction.

Thus, also in the coating apparatuses 4 and 5 of a 4th and 5th example, an organic thin film can be formed.

As mentioned above, although the organic material was made to reach every display area 21, and the several organic thin film separated from each other was formed, the use of this invention also forms the organic thin film which continuously covers the surface of the application object 14, such as a liquid crystal aligning film, Coating apparatus 1-5 can be used.

Moreover, the coating apparatuses 1-5 of this invention can also be used for the use which discharges the dispersion liquid which the spacer of the liquid crystal display device disperse | distributed, evaporates a dispersion solvent with a laser beam, and arrange | positions a spacer on the application target surface.

Claims (11)

An ejector for ejecting an organic material onto an application object, A coating device which has a laser irradiation apparatus which irradiates a laser beam to the said organic material discharged to the said application target object from the said ejector, and was touched. The method of claim 1, The said laser irradiation apparatus irradiates the said laser beam for every partial area | region of the said application object surface, and partially coats the said application object surface. The method of claim 1, The application object, the ejector, and the application object and the laser irradiation device are configured to be relatively movable in the first direction, The coating device and the dispenser are configured to be able to reciprocate relatively in a second direction that is substantially perpendicular to the first direction. The method of claim 3, wherein The said laser irradiation apparatus is arrange | positioned at the both sides of the said ejector along the said 2nd direction, Comprising: It is comprised with the said ejector, Comprising: It is comprised so that a reciprocating movement to the said 2nd direction is possible. The method of claim 3, wherein The said laser irradiation apparatus is the coating apparatus arrange | positioned behind the said ejector with respect to the direction in which the said ejector moves relative with respect to the said coating object. The method of claim 5, The laser irradiation apparatus is configured to be capable of reciprocating along the second direction. The method of claim 1, The application object, the ejector, and the application object and the laser irradiation device are configured to be relatively movable in the first direction, The coating device and the laser irradiation apparatus are configured to be able to reciprocate relatively in a second direction that is substantially perpendicular to the first direction. The method of claim 7, wherein The said laser irradiation apparatus is the coating apparatus arrange | positioned behind the said ejector with respect to the direction in which the said ejector moves relative with respect to the said coating object. It has three or more application apparatuses as described in any one of Claims 1-8, The organic material for red color development, green color development, and blue color development is arrange | positioned in each coating device, respectively, The said application object is made to air | atmosphere. An organic EL panel manufacturing apparatus, configured to be able to move between the respective coating devices without being exposed. A method of forming an organic material thin film, which is discharged to an application object, irradiates a laser beam onto the impacted organic material, and forms a thin film of the organic material. The method of claim 10, A method of forming an organic material thin film, wherein the laser beam is irradiated for each partial region of the surface of the coating object, and the surface of the coating object is partially heated.

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