JP2007136408A - Liquid drop delivery apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid drop delivery apparatus capable of suppressing a reduction of an operation ratio or the like even when an exchange of a delivery head is performed. <P>SOLUTION: The liquid drop delivery apparatus is provided with a plurality of delivery heads capable of delivering a liquid drop of a functional liquid on a substrate P, a support member for supporting the plurality of delivery heads, and a drive apparatus for driving the support member such that the delivery head other than the predetermined delivery head is left from a predetermined position when the predetermined delivery head of the plurality of delivery heads is arranged at the predetermined position capable of delivering the liquid drop on the substrate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a droplet discharge device.

2. Related Art There is known a liquid droplet ejection apparatus (inkjet apparatus) that ejects functional liquid droplets onto a substrate in a film pattern forming process when manufacturing various devices such as liquid crystal devices and organic EL devices.
Japanese Patent Laid-Open No. 11-274671 JP 2000-216330 A JP 2005-12181 A

  The performance of the ejection head for ejecting functional liquid droplets provided in the droplet ejection device may deteriorate depending on the frequency of use, the passage of time, and the like. For this reason, there is a possibility that an operation of replacing the ejection head deteriorated at a predetermined timing with a new one may be required. In order to suppress a drop in the operation rate and throughput of the droplet discharge device, it is desirable to quickly replace the discharge head.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a droplet discharge device that can suppress a decrease in operating rate and the like even when the discharge head is replaced.

  In order to solve the above problems, the present invention adopts the following configuration.

  According to the first aspect of the present invention, a plurality of ejection heads capable of ejecting functional liquid droplets onto a substrate, a support member that supports the plurality of ejection heads, and a predetermined ejection among the plurality of ejection heads. And a driving device that drives the support member so that an ejection head other than the predetermined ejection head moves away from the predetermined position when the head is disposed on the substrate at a predetermined position where droplets can be ejected. A droplet discharge device is provided.

  According to the present invention, by driving the support member using the driving device, the ejection head capable of ejecting droplets can be quickly arranged at a predetermined position, and the reduction in the operating rate of the droplet ejection device is suppressed. be able to.

  In the liquid droplet ejection apparatus according to the present invention, each of the ejection heads has a predetermined surface in which an ejection hole facing the surface of the substrate is formed when the ejection head is disposed at the predetermined position, and the support member includes: When the predetermined surface of the predetermined discharge head and the surface of the substrate face each other among the plurality of discharge heads, the predetermined surface of the discharge head other than the predetermined discharge head is the predetermined surface of the predetermined discharge head. A configuration in which the plurality of ejection heads are supported so as to face in a different direction from the above can be employed. This makes it possible to manufacture a desired device while suppressing a decrease in the operating rate of the droplet discharge device.

  In the droplet discharge device of the present invention, a configuration including an alignment device that positions the predetermined discharge head and the substrate with respect to a predetermined reference can be employed. Thereby, it is possible to eject droplets onto the substrate with high accuracy.

  In the droplet discharge device of the present invention, the alignment device detects an alignment mark provided on the discharge head, and performs the positioning based on the detection result. Thereby, the ejection head and the substrate can be accurately positioned.

  The droplet discharge device of the present invention includes a detection device that detects the state of the discharge head, and the drive device drives the support member based on a detection result of the detection device. As a result, it is possible to discharge droplets onto the substrate using a discharge head in a good state.

  In the liquid droplet ejection apparatus according to the aspect of the invention, when the ejection head disposed at the predetermined position is abnormal, the driving device moves the ejection head in which the abnormality has occurred from the predetermined position, and the other ejection head. The support member is driven so as to be disposed at the predetermined position. As a result, an abnormal ejection head can be quickly replaced with another ejection head.

  In the liquid droplet ejection apparatus according to the aspect of the invention, the support member has a support surface that is rotatable about an axis inclined with respect to the surface of the substrate, and the plurality of ejection heads are different from each other in the support surface. It is provided at each of a plurality of positions. Thereby, the ejection head facing the substrate can be quickly replaced by rotating the support member.

  In the liquid droplet ejection apparatus of the present invention, each of the plurality of ejection heads is detachably supported with respect to the support member. Thereby, the ejection head can be replaced with respect to the support member.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an XYZ orthogonal coordinate system is set as necessary, and the positional relationship of each member will be described with reference to the XYZ orthogonal coordinate system.

  FIG. 1 is a diagram showing a droplet discharge device (inkjet device) IJ according to the present embodiment. In FIG. 1, the droplet discharge device IJ includes a base 30, a stage 31 that is provided on the base 30 and can hold the substrate P, a stage driving device 32 that moves the stage 31 on the base 30, A position detection device 33 that detects the position of the stage 31, a plurality of ejection heads 1 that can eject droplets of the functional liquid L onto the substrate P held on the stage 31, and a support that supports the plurality of ejection heads 1. A member 2, a driving device 10 (10 </ b> A, 10 </ b> B) that drives the support member 2, and a control device 6 that controls the operation of the droplet discharge device IJ are provided.

  The stage driving device 32 can move the stage 31 holding the substrate P on the base 30 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. Here, the θX, θY, and θZ directions are rotation (tilt) directions around the X axis, the Y axis, and the Z axis. The position detection device 33 includes, for example, a linear encoder, and can detect the position of the stage 31 with respect to a predetermined reference position. In the present embodiment, the position detection device 33 can detect the position of the stage 31 in the direction of six degrees of freedom.

  FIG. 2 is a view of the support member 2 as viewed from below. As shown in FIGS. 1 and 2, the support member 2 is a substantially disk-shaped member, and the discharge head 1 that can rotate around an axis G that is inclined with respect to the surface (XY plane) of the substrate P. It has a supporting surface 2A for supporting. In the present embodiment, the support member 2 has a shape obtained by cutting out the apex portion of the conical member, and the side surface of the conical member is the support surface 2A. The support surface 2A is inclined with respect to the axis G.

  The support member 2 is supported on the lower surface 5 </ b> A of the predetermined mount 5 via the support mechanism 7. The support mechanism 7 includes a first support shaft 3 connected to the support member 2, a first drive device 10A that rotates the first support shaft 3, a second support shaft 4 that supports the first drive device 10A, 2 The 2nd drive device 10B which connects the support shaft 4 and the lower surface 5A of the mount frame 5 is provided.

  The first driving device 10 </ b> A can rotate the first support shaft 3. The first support shaft 3 is rotatable about an axis G inclined with respect to the surface (XY plane) of the substrate P. The control device 6 rotates the first support shaft 3 by using the first drive device 10A, whereby the support surface 2A of the support member 2 supported by the first support shaft 3 is rotated about the axis G. Rotate as

  The lower surface 5A of the gantry 5 is substantially parallel to the XY plane, and the second drive device 10B is movable along the lower surface 5A in the X-axis direction and the Y-axis direction. Therefore, the second support shaft 4 connected to the second drive device 10B is also movable in the X-axis direction and the Y-axis direction with the movement of the second drive device 10B. Further, the second drive device 10B is capable of moving the second support shaft 4 in the Z-axis direction, θX, θY, and θZ directions. In other words, the second drive device 10B can move the second support shaft 4 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. The control device 6 is connected to the second support shaft 4 via the first drive device 10A and the first support shaft 3 by driving the second support shaft 4 using the second drive device 10B. The supporting member 2 (supporting surface 2A) that is present can be moved in the direction of six degrees of freedom. Therefore, the control device 6 can move the ejection head 1 supported by the support surface 2A of the support member 2 in the direction of 6 degrees of freedom using the second drive device 10B.

  The plurality of ejection heads 1 are provided at each of a plurality of different positions on the support surface 2 </ b> A of the support member 2. The ejection head 1 is a multi-nozzle type ejection head having a plurality of ejection nozzles (ejection holes) 25, and a plurality of ejection nozzles 25 are provided along the longitudinal direction of the lower surface 1 </ b> A of the ejection head 1. . In the present embodiment, three discharge heads 1 are provided, and are arranged radially at substantially equal intervals on the support surface 2A of the support member 2. Each of the plurality of ejection heads 1 is detachably supported with respect to the support surface 2 </ b> A of the support member 2.

  FIG. 3 is a view showing the ejection head 1 according to the present embodiment. The discharge head 1 discharges droplets of the functional liquid L by an electromechanical conversion method (piezo method). The electromechanical conversion method utilizes the property that a piezo element (piezoelectric element) deforms in response to a pulsed electric signal, and a flexible member is placed in a space where functional fluid is stored by deformation of the piezo element. The pressure is applied through this, and the functional liquid is pushed out from this space and discharged from the nozzle.

  In FIG. 3, the ejection head 1 includes a liquid chamber 21 that stores a functional liquid, and a piezo element 22 that is provided at a position adjacent to the liquid chamber 21 and ejects droplets. The piezo element 22 is deformed with a predetermined stroke as shown by an arrow H in the drawing in order to eject droplets.

  The functional liquid L is supplied to the liquid chamber 21 from a tank 23 that stores the functional liquid L through a supply system 23A. A drive circuit 24 is connected to the piezo element 22. The control device 6 applies a voltage to the piezo element 22 via the drive circuit 24 to deform the piezo element 22, thereby deforming the liquid chamber 21 and ejecting the droplet of the functional liquid L from the ejection nozzle 25. In this case, the control device 6 controls the amount of distortion of the piezo element 22 by changing the value of the applied voltage. The control device 6 controls the strain rate of the piezo element 22 by changing the frequency of the applied voltage.

  Returning to FIG. 1, the discharge nozzles 25 provided on the lower surface 1 </ b> A of the discharge head 1 facing the surface of the substrate P among the plurality of discharge heads 1 supported on the support surface 2 </ b> A of the support member 2. Then, droplets are ejected onto the substrate P. That is, when the control device 6 discharges droplets of the functional liquid L onto the substrate P from the discharge head 1, the control device 6 drives the driving devices 10 </ b> A and 10 </ b> B to perform a plurality of discharges supported on the support surface 2 </ b> A of the support member 2. Among the heads 1, a predetermined discharge head 1 is disposed at a position where droplets can be discharged onto the substrate P, that is, at a position where the lower surface 1 </ b> A of the discharge head 1 faces the surface of the substrate P, and the predetermined discharge Droplets are discharged onto the substrate P from the discharge nozzles 25 formed on the lower surface 1A of the head 1.

  In the following description, the position of the ejection head 1 that can eject droplets onto the substrate P is appropriately referred to as a first position PJ1. That is, the lower surface 1A of the ejection head 1 disposed at the first position PJ1 and the surface of the substrate P held by the stage 31 face each other.

  As described above, the support surface 2A is inclined with respect to the axis G, and among the plurality of discharge heads 1 supported by the support surface 2A, the predetermined discharge head 1 is disposed at the first position PJ1. The other ejection heads 1 other than the predetermined ejection head 1 are disposed at the second position PJ2 away from the position facing the surface of the substrate P. The support member 2 has a lower surface 1A of a discharge head 1 other than the predetermined discharge head 1 when the lower surface 1A of the predetermined discharge head 1 and the surface of the substrate P face each other. However, the plurality of ejection heads 1 are supported so as to face in a direction different from the lower surface 1A of the predetermined ejection head 1. As described above, the control device 6 uses the first and second drive devices 10A and 10B to perform other ejection when the predetermined ejection head 1 among the plurality of ejection heads 1 is disposed at the first position PJ1. The support member 2 is driven so that the head 1 moves away from the first position PJ1.

  Further, the droplet discharge device IJ of the present embodiment includes a detection device 35 that detects the state of the discharge head 1. The detection device 35 detects the discharge state of the droplets of the discharge head 1. The detection device 35 of the present embodiment includes an image sensor such as a CCD, and can acquire an image of the droplet of the functional liquid L ejected on the substrate P. The detection device 35 is disposed above the substrate P, and observes an image of the droplet of the functional liquid L ejected on the surface of the substrate P from above the substrate P. Further, the detection device 35 can detect the position of the droplet on the substrate P with respect to a predetermined reference position.

  FIG. 4 is a diagram schematically showing an operation in which the detection device 35 detects (observes) the droplet discharge state of the discharge head 1. Although schematically illustrated in FIG. 4, the detection device 35 is disposed at a position along with the ejection head 1 as illustrated in FIG. 1. When detecting the discharge state of the discharge head 1 using the detection device 35, the control device 6 discharges droplets onto the substrate P from the discharge head 1. When the ejection state of the ejection head 1 is normal, the interval D2 between the droplets after being supplied onto the substrate P becomes a value corresponding to the interval D1 of the ejection nozzle 25, and a plurality of intervals are arranged at substantially constant intervals in the X-axis direction. It is arranged with. On the other hand, when the ejection state of the ejection head 1 is abnormal, for example, when a so-called flight curve occurs, the interval D2 between the droplets after being supplied onto the substrate P is different from the interval D1 between the ejection nozzles 25. It becomes a value, or a plurality of them are arranged in a non-uniform (unequally spaced) manner. The detection device 35 acquires an image of the droplets supplied on the substrate P, and detects an interval between the droplets or a position of each droplet on the substrate P with respect to a predetermined reference position, whereby the ejection head It can be determined whether the discharge state of 1 is normal or abnormal.

  Further, the droplet discharge apparatus IJ of the present embodiment includes an alignment apparatus 40 that positions the discharge head 1 and the substrate P disposed at the first position PJ1 with respect to a predetermined reference position. The alignment apparatus 40 of the present embodiment is provided at a predetermined position on the upper surface of the stage 31 and can detect an alignment mark provided on the ejection head 1. As shown in FIG. 2, a plurality of alignment marks 8 are formed on the lower surface 1 </ b> A of the ejection head 1, and the alignment device 40 provided on the stage 31 is ejected at a position facing the alignment device 40. An image of the alignment mark 8 on the lower surface 1A of the head 1 can be acquired.

  FIG. 5 is a diagram schematically illustrating an operation in which the alignment apparatus 40 detects the alignment mark 8. The control device 6 makes the alignment device 40 and the lower surface 1A of the ejection head 1 face each other, detects the alignment mark 8 provided on the lower surface 1A of the ejection head 1 using the alignment device 40, and based on the detection result Then, the predetermined ejection head 1 and the substrate P are positioned with respect to a predetermined reference position.

  When positioning the predetermined ejection head 1 and the substrate P with respect to a predetermined reference position, first, the control device 6 monitors the detection result of the position detection device 33 and uses the stage driving device 32 to perform a predetermined operation. The stage 31 is positioned at the reference position. Thereby, the alignment device 40 on the stage 31 is also arranged at a predetermined position with respect to the predetermined reference position. Then, the control device 6 is driven so that the alignment mark 8 is arranged in the detection region (detection field of view) of the alignment device 40 in a state where the position of the stage 31 and thus the position of the alignment device 40 is stopped (fixed). The apparatuses 10A and 10B are driven to move the ejection head 1. The control device 6 drives the drive devices 10A and 10B to move the discharge head 1 in the XY direction so that the alignment mark 8 is arranged in the detection region of the alignment device 40, thereby moving the discharge head 1 in the XY direction. Can be adjusted. The alignment apparatus 40 also has a function of detecting the distance (distance in the Z-axis direction) between the detection reference surface of the alignment apparatus 40 and the lower surface 1A (alignment mark 8) of the ejection head 1. The control device 6 drives the drive devices 10A and 10B while monitoring the detection result of the alignment device 40, and moves the discharge head 1 in the Z-axis direction, thereby adjusting the position of the discharge head 1 in the Z-axis direction. It can be carried out. As shown in FIG. 2, a plurality of (three in the figure) alignment marks 8 are provided for one ejection head 1, and by detecting each alignment mark 8, the control device 6 It is possible to adjust the position of the predetermined ejection head 1 arranged at the first position PJ1 in the θX, θY, and θZ directions. As described above, the control device 6 adjusts the position of the predetermined ejection head 1 in the direction of six degrees of freedom with respect to the stage 31 positioned at the predetermined reference position based on the detection result of the alignment device 40. be able to.

  Next, the operation of the droplet discharge device IJ having the above configuration will be described. As described with reference to FIG. 5, the control device 6 uses the alignment device 40 to discharge the droplets onto the substrate P, and uses the alignment head 40 to position the discharge head 1 on the stage 31 positioned at a predetermined reference position. Adjust the position. Accordingly, the ejection head 1 is disposed at a predetermined position with respect to the substrate P held on the stage 31. In addition, as described with reference to FIG. 4, the control device 6 detects the discharge state of the discharge head 1 and determines that the discharge state is normal, as described with reference to FIG. 4. The operation of discharging is started. The ejection head 1 ejects droplets of the functional liquid L from the ejection nozzle 25 onto the substrate P supported by the stage 31. In the present embodiment, the control device 6 controls the second drive device 10B and the stage drive device 32, and moves the ejection head 1 and the stage 31 holding the substrate P relative to each other in the XY directions while moving the substrate. A droplet of the functional liquid L is supplied onto P.

  Since the predetermined ejection head 1 disposed at a position facing the surface of the substrate P is disposed at an optimum position with respect to the surface of the substrate P, the droplets are ejected to a desired position on the substrate P. be able to. Further, since the other ejection head 1 is disposed at the second position PJ2 that is separated from the substrate P, unnecessary functional liquid drops, foreign matter, etc. fall on the substrate P from the other ejection head 1. Generation | occurrence | production of malfunctions, such as adhering, can be suppressed.

  The control device 6 detects the ejection state of the ejection head 1 using the detection device 35 at a predetermined timing. Based on the detection result of the detection device 35, the control device 6 drives the support member 2 using the drive devices 10 </ b> A and 10 </ b> B. Specifically, when the control device 6 determines that the ejection head 1 disposed at the first position PJ1 is abnormal based on the detection result of the detection device 35, the ejection head 1 in which the abnormality has occurred. Is moved away from the first position PJ1, and the support member 2 is driven using the first and second driving devices 10A and 10B so that the other ejection heads 1 are arranged at the first position PJ1. For example, the control device 6 uses the first driving device 10A to rotate the support member 2 about the axis G as the center of rotation, and moves the abnormal ejection head 1 disposed at the first position PJ1 away from the substrate P. To move. As the support member 2 rotates, another normal ejection head 1 is disposed at the first position PJ1. The control device 6 executes the position adjustment of the discharge head 1 arranged at the first position PJ1 using the alignment device 40, and then discharges the droplet of the functional liquid L from the discharge head 1 onto the substrate P. To do.

  As described above, even if an abnormality occurs in the predetermined discharge head 1 arranged at the first position PJ1, the abnormal discharge head 1 is retreated from the first position PJ1 by rotating the support member 2. Immediately thereafter, the normal (new) ejection head 1 can be disposed at the first position PJ1. Therefore, it is possible to suppress a decrease in the operating rate or the like of the droplet discharge device IJ.

  Since the discharge head 1 is detachably supported with respect to the support member 2, an abnormality occurs at a predetermined timing, for example, during maintenance work of the apparatus, without disturbing the operation of the droplet discharge apparatus IJ. The discharged ejection head 1 can be replaced with a new (normal) ejection head 1.

  In each of the above-described embodiments, various functional liquids (inks) L can be used. The functional liquid means a film that can form a film having a predetermined function (functional film) by forming a film component contained in the liquid into a film. Such functions include electrical and electronic functions (conductive, insulating, piezoelectric, pyroelectric, dielectric, etc.), optical functions (light selective absorption, reflectivity, polarization, light selective transmission, nonlinear optics) , Luminescence such as fluorescence or phosphorescence, photochromic, etc.), magnetic function (hard magnetic, soft magnetic, non-magnetic, magnetic permeability, etc.), chemical function (adsorbing, desorbing, catalytic, water absorbing, ion) Conductivity, redox properties, electrochemical properties, electrochromic properties, etc.), mechanical functions (wear resistance, etc.), thermal functions (heat transfer, heat insulation, infrared radiation, etc.), biological functions (biocompatibility, There are various functions such as antithrombotic properties.

In each of the above-described embodiments, the electromechanical conversion method (piezo method) has been described as an example of the discharge method of the discharge head 1. However, the discharge technology of the droplet discharge method includes a charge control method, pressurization, and the like. A vibration method, an electrothermal conversion method (Bubble Jet (registered trademark) method), an electrostatic suction method, or the like may be used. In the charge control method, a charge is applied to a functional liquid with a charging electrode, and the flight direction of the functional liquid is controlled with a deflection electrode to be discharged from a nozzle. In addition, the pressure vibration method is a method in which an ultra-high pressure of about 30 kg / cm ² is applied to the material and the functional liquid is sent to the nozzle tip side. When the control voltage is applied, electrostatic repulsion occurs in the functional liquid, and the functional liquid is scattered and is not discharged from the nozzle.

  In addition, the electrothermal conversion method (Bubble Jet (registered trademark) method) causes the functional liquid to be rapidly vaporized by a heater provided in the space in which the functional liquid is stored, thereby generating bubbles (bubbles). The functional liquid in the space is discharged. In the electrostatic attraction method, a minute pressure is applied to the space in which the functional liquid is stored, a meniscus of the functional liquid is formed on the nozzle, and the electrostatic liquid is applied in this state before the functional liquid is drawn out. In addition to this, techniques such as a system that uses a change in the viscosity of the functional liquid due to an electric field, a system that uses a discharge spark, and the like can also be applied.

  In the above-described embodiment, an electro-optical device is an example of a device manufactured using the droplet discharge device IJ. Here, the electro-optical device includes at least one of a device having an electro-optic effect that changes a light transmittance by changing a refractive index of a substance by an electric field, and a device that converts electric energy into optical energy. Specifically, as an electro-optical device, for example, a liquid crystal device using a liquid crystal as an electro-optical material, an organic EL device using an organic EL (Electro-Luminescence) as an electro-optical material, an inorganic EL device using an inorganic EL, and an electro-optical device Examples thereof include a plasma display panel (PDP) using a plasma gas as a substance. Furthermore, examples of the electro-optical device include an electrophoretic display device (EPD: Electrophoretic Display), a field emission display device (FED: Field Emission Display device), and the like.

  Furthermore, the droplet discharge device IJ is a device having a substrate (base material) including an electro-optical device, and various devices that can use a step of discharging droplets (ink) onto the substrate (base material). It can be used in the manufacturing process. For example, in order to form electric wiring of a printed circuit board, a liquid metal, a conductive material, a metal-containing paint, etc. are ejected by an ink jet method to form a metal wiring, etc. A configuration in which an optical member is formed by ejecting a lens by an inkjet method, a configuration in which a resist to be applied on a substrate is applied only to a necessary portion, a configuration in which the lens is ejected, a light-transmitting substrate such as a plastic, etc. A structure in which light-scattering plates are formed by ejecting and forming convex portions and small white patterns to be scattered by an ink jet method, RNA (ribonucleic acid: ribonucleic acid) in spike spots arranged in a matrix on a DNA (deoxyribonucleic acid) chip ) Are ejected by an inkjet method to produce a fluorescently labeled probe and hive on a DNA chip. For example, it may be used for a configuration in which a biochip is formed by ejecting a sample, an antibody, DNA, or the like to a dot-like position partitioned by a base material by an inkjet method.

  In addition, as a liquid crystal device, a partition surrounding a pixel electrode is formed such as an active matrix liquid crystal panel including a transistor such as a TFT or a TFD switching element (active element) in a pixel, and ink is formed in a recess formed by the partition. A color filter is formed on the pixel electrode by ejecting a mixture of a color material and a conductive material as ink onto the pixel electrode and ejecting the ink by the inkjet method. Applicable to any part of the electro-optic system of liquid crystal devices, such as a structure in which the filter is formed as a conductive color filter, or a structure in which spacer particles for maintaining a gap between the substrates are ejected and formed by an inkjet method. It is.

  Furthermore, the present invention is not limited to color filters, and can be applied to any other electro-optical device such as an EL device. As an EL device, a stripe type in which EL corresponding to three colors of R, G, and B is formed in a strip shape, As described above, any configuration such as an active matrix display device including a transistor for controlling a current flowing in the light emitting layer for each pixel or a passive matrix display device can be used.

  As mentioned above, although embodiment which concerns on this invention was described, it cannot be overemphasized that this invention is not limited to the example which concerns. Various shapes, combinations, and the like of the constituent members shown in the above-described examples are examples, and various modifications can be made based on design requirements and the like without departing from the gist of the present invention.

It is a schematic block diagram which shows the droplet discharge apparatus of this embodiment. It is the figure which looked at the discharge head and the supporting member from the bottom. It is a figure which shows an ejection head. It is a figure for demonstrating the detection operation | movement of the discharge state of the discharge head by a detection apparatus. It is a figure for demonstrating positioning operation | movement with an alignment apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Discharge head, 1A ... Lower surface, 2 ... Support member, 2A ... Lower surface, 8 ... Alignment mark, 10 (10A, 10B) ... Drive apparatus, 25 ... Discharge nozzle, 35 ... Detection apparatus, 40 ... Alignment apparatus, L ... Functional fluid, P ... substrate

Claims (8)

A plurality of ejection heads capable of ejecting functional liquid droplets on a substrate;
A support member for supporting the plurality of ejection heads;
The support member is arranged such that when a predetermined discharge head among the plurality of discharge heads is disposed at a predetermined position where droplets can be discharged onto the substrate, discharge heads other than the predetermined discharge head are separated from the predetermined position. A droplet discharge device comprising: Each of the ejection heads has a predetermined surface on which an ejection hole facing the surface of the substrate is formed when arranged at the predetermined position;
The support member has a predetermined surface of the discharge head other than the predetermined discharge head when the predetermined surface of the predetermined discharge head of the plurality of discharge heads faces the surface of the substrate. The droplet discharge device according to claim 1, wherein the plurality of discharge heads are supported so as to face a direction different from a predetermined surface of the discharge heads.   The droplet discharge device according to claim 1, further comprising an alignment device that positions the predetermined discharge head and the substrate with respect to a predetermined reference.   The liquid droplet ejection apparatus according to claim 3, wherein the alignment apparatus detects an alignment mark provided on the ejection head and performs positioning based on the detection result. A detection device for detecting the state of the ejection head;
5. The droplet discharge device according to claim 1, wherein the drive device drives the support member based on a detection result of the detection device.   When the ejection head arranged at the predetermined position is abnormal, the driving device retreats the ejection head in which the abnormality has occurred from the predetermined position, and arranges another ejection head at the predetermined position. The liquid droplet ejection apparatus according to claim 1, wherein the support member is driven. The support member has a support surface that is rotatable about an axis inclined with respect to the surface of the substrate,
The liquid droplet ejection apparatus according to claim 1, wherein the plurality of ejection heads are provided at each of a plurality of different positions on the support surface. The droplet discharge device according to claim 1, wherein each of the plurality of discharge heads is detachably supported with respect to the support member.

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