CN106098965B - Flexible base board stripping off device and flexible base board stripping means - Google Patents
Flexible base board stripping off device and flexible base board stripping means Download PDFInfo
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- CN106098965B CN106098965B CN201610422728.2A CN201610422728A CN106098965B CN 106098965 B CN106098965 B CN 106098965B CN 201610422728 A CN201610422728 A CN 201610422728A CN 106098965 B CN106098965 B CN 106098965B
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- microscope carrier
- base board
- flexible base
- stripping
- flexible
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
Abstract
The present invention relates to a kind of flexible base board stripping off device and flexible base board stripping means, wherein flexible base board stripping off device includes：Controller, the first transmission microscope carrier and laser.First transmission microscope carrier is for carrying and transmitting flexible device to be stripped, and underlay substrate is for contacting the first transmission microscope carrier.First transmission microscope carrier includes the first transit area and laser-irradiated domain, and the first transmission microscope carrier is at least equipped with gap at the position positioned at laser-irradiated domain.Laser is used to carry out laser irradiation to flexible device to be stripped by gap.Controller is electrically connected with the first transmission microscope carrier, and controller transmits flexible device to be stripped according to the direction by the first transit area to laser-irradiated domain for controlling the first transmission microscope carrier.When being removed to flexible device to be stripped, the display device on flexible base board will not touch peel-off device for the flexible base board stripping off device and flexible base board stripping means.
Description
Technical field
The present invention relates to flexible display technologies fields, are shelled more particularly to a kind of flexible base board stripping off device and flexible base board
From method.
Background technology
Flexible display has many advantages, such as impact resistance, light-weight, easy to carry, irrealizable with traditional monitor
The advantage of function and user experience, therefore flexible display technologies are increasingly valued by people.
In the preparation process of flexible display, by taking flexible OLED display as an example, need first by flexible base board prepare or
It is adsorbed in underlay substrate (such as glass substrate) surface of hardness, then prepares OLED device on flexible substrates.Work as OLED device
After the completion of preparation, flexible base board need to be removed using lift-off technologies such as laser lift-off, liquid strippings from underlay substrate.
However, traditional lift-off technology, in stripping process, the display device on flexible base board readily accesses stripping and sets
It is standby, it is serious possibly even to damage display device, to result in waste of resources.
Invention content
Based on this, it is necessary to be easy contact for display device of traditional lift-off technology in stripping process on flexible base board
The problem of to peel-off device, provides a kind of flexible base board stripping off device and flexible base board stripping means.
A kind of flexible base board stripping off device, for being removed to flexible device to be stripped, the flexibility to be stripped
Device includes underlay substrate and the flexible base board that is formed on the underlay substrate, and the flexible base board stripping off device includes：Control
Device, the first transmission microscope carrier and laser processed；
The first transmission microscope carrier is for carrying and transmitting the flexible device to be stripped, and the underlay substrate is used for
Contact the first transmission microscope carrier；The first transmission microscope carrier includes the first transit area and laser-irradiated domain, and described the
One transmission microscope carrier is at least equipped with gap at the position positioned at the laser-irradiated domain；The laser is used to pass through the gap
Laser irradiation is carried out to the flexible device to be stripped；The controller is electrically connected with the first transmission microscope carrier, and described
Controller is used to control the first transmission microscope carrier according to the direction transmission by first transit area to laser-irradiated domain
The flexible device to be stripped.
The first transmission microscope carrier is roller transmissioning device in one of the embodiments,.
The first transmission microscope carrier further includes the second transit area in one of the embodiments, and the laser irradiation
Region is between first transit area and the second transit area；The controller is additionally operable in the flexibility to be stripped
After device is stripped, control the first transmission microscope carrier is according to by the laser-irradiated domain to the side of the second transit area
The underlay substrate and flexible base board after the completion of being removed to transmission.
The flexible base board stripping off device further includes the second transmission microscope carrier and absorbent module in one of the embodiments,；
The second transmission microscope carrier is located above second transit area, and the second transmission microscope carrier transmits microscope carrier with described first
The distance between be greater than or equal to the underlay substrate thickness；The absorbent module is electrically connected with the controller；
The flexible base board after the completion of absorbent module is under the control of the controller by the absorption stripping
In non-device region, by the flexible base board after the completion of the stripping be positioned over it is described second transmission microscope carrier on；Described second passes
Send microscope carrier for flexible base board after the completion of transmitting the stripping under the control of the controller；The first transmission microscope carrier is also
Underlay substrate after the completion of for transmitting the stripping under the control of the controller.
The second transmission microscope carrier is roller transmissioning device in one of the embodiments,.
The surface of the first transmission microscope carrier and the second transmission microscope carrier is hung down with gravity direction in one of the embodiments,
Directly.
The first transmission microscope carrier is identical as the second transmission transmission speed of microscope carrier in one of the embodiments,.
The absorbent module includes the vacuum cup being connected and mobile mechanism in one of the embodiments,；It is described true
Suction disk is used to adsorb the non-device region in the flexible base board after the completion of the stripping；The mobile mechanism is used in the control
It is parallel or vertically move relative to the first transmission microscope carrier that the vacuum cup is controlled under the control of device processed.
The mobile mechanism includes mobile slide bar, driving unit and supporting rod in one of the embodiments,；
The mobile slide bar is parallel with the first transmission direction of transfer of microscope carrier；The supporting rod is perpendicular to the movement
Slide bar, and one end of the supporting rod connects the vacuum cup, the other end of the supporting rod connects the driving unit；Institute
It states driving unit to be installed on the mobile slide bar and be electrically connected with the controller, and the driving unit is used in the control
The supporting rod is controlled under the control of device processed to carry out sliding along the slide bar that moves or move perpendicular to the slide bar that moves.
A kind of flexible base board stripping means is based on above-mentioned flexible base board stripping off device；Wherein, the controller is being shelled
From when execution step include：
It controls the first transmission microscope carrier and transmits institute according to by the direction of first transit area to laser-irradiated domain
State flexible device to be stripped；
When the setting position of the flexible device to be stripped reaches the laser-irradiated domain, control described first passes
Microscope carrier is sent to stop transmission；Later, the laser emits laser to remove the flexible base board in setting time；
Judge that the flexible device to be stripped whether there is without being shone by the laser after the setting time
Penetrate the position in region, if so, continue to execute control it is described first transmission microscope carrier start according to by first transit area to swash
Transmit the step of flexible device to be stripped in the direction of light irradiation area；Otherwise, terminate.
Above-mentioned flexible base board stripping off device and flexible base board stripping means have the advantage that for：First transmission microscope carrier is used
In carrying and transmit flexible device to be stripped, and underlay substrate is for contacting the first transmission microscope carrier, therefore is being shelled first
From when flexible base board will not touch the first transmission microscope carrier.Meanwhile first transmission microscope carrier include that the first transit area and laser shine
Region is penetrated, and the first transmission microscope carrier is at least equipped with gap at the position positioned at laser-irradiated domain.Between laser is used for by being somebody's turn to do
Gap carries out laser irradiation to flexible device to be stripped.Controller is for controlling the first transmission microscope carrier according to by the first transit area
Flexible device to be stripped is transmitted to the direction of laser-irradiated domain.
So, after flexible device to be stripped is run to laser-irradiated domain, laser can pass through corresponding gap
Direct irradiation underlay substrate, and across underlay substrate up to the contact surface underlay substrate and flexible base board, to reduce lining
Adhesive force between substrate and flexible base board is to remove flexible base board.Therefore, the flexible base board stripping off device and flexible base
When being removed to flexible device to be stripped, the display device on flexible base board will not touch stripping and set plate stripping means
It is standby, readily access peel-off device to overcome display device of traditional lift-off technology in stripping process on flexible base board
Problem improves the manufacturing yield of flexible device.
Description of the drawings
Fig. 1 is the structural representation when flexible base board stripping off device that an embodiment provides carries flexible device to be stripped
Figure；
Fig. 2 carries another knot when flexible device to be stripped for the flexible base board stripping off device of embodiment illustrated in fig. 1
Structure schematic diagram；
Fig. 3 is after the flexible base board stripping off device of embodiment illustrated in fig. 2 removes a part of structure of flexible base board
Structural schematic diagram；
Fig. 4 is the flexible base board stripping side executed by the controller in the flexible base board stripping off device of embodiment illustrated in fig. 1
The flow chart of method.
Specific implementation mode
To facilitate the understanding of the present invention, below with reference to relevant drawings to invention is more fully described.In attached drawing
Give presently preferred embodiments of the present invention.But the present invention can realize in many different forms, however it is not limited to this paper institutes
The embodiment of description.Keep the understanding to the disclosure more thorough on the contrary, purpose of providing these embodiments is
Comprehensively.
Unless otherwise defined, the skill of all of technologies and scientific terms used here by the article and the technical field for belonging to invention
The normally understood meaning of art personnel is identical.Description to be intended merely in the term used in the description of invention specific herein
The purpose of embodiment, it is not intended that the limitation present invention.Term as used herein "and/or" includes one or more relevant institutes
Any and all combinations of list of items.
As shown in Figure 1, the flexible base board stripping off device that an embodiment provides, for being shelled to flexible device to be stripped
From.Flexible device to be stripped includes underlay substrate 110 and the flexible base board being formed on underlay substrate 110 120, and the flexibility
Substrate 120 is equipped with relevant display device.Flexible base board stripping off device includes controller (not shown), the first transmission load
Platform 210 and laser 220.
Wherein, the first transmission microscope carrier 210 is for carrying and transmitting flexible device to be stripped, and underlay substrate 110 is used for
Contact the first transmission microscope carrier 210.Since flexible base board 120 is formed on underlay substrate 110, the flexibility base when being removed
Plate 120 will not touch the first transmission microscope carrier 210.In addition, the first transmission microscope carrier 210 includes the first transit area 211 and laser
Irradiation area 212.First transmission microscope carrier 210 is at least equipped with gap at the position positioned at laser-irradiated domain 212.It is convenient in the gap
The laser that laser 200 is sent out pass through first transmission microscope carrier 210 irradiate and across underlay substrate 110 until underlay substrate 110 with
Contact surface between flexible base board 120.
Specifically, the first transmission microscope carrier 210 is roller transmissioning device.Since roller transmissioning device is existed by several idler wheels
Transmission is realized under the driving of driving mechanism, it is above-mentioned by that can be formed positioned at the setting of the adjacent rollers interval of laser-irradiated domain 212
Gap, therefore roller transmissioning device is simple in structure, is easy to implement.It is understood that transmitting microscope carrier according to actual conditions first
210 can also be used other kinds of transmission device, if flexible device to be stripped is can be transmitted, and in laser-irradiated domain
212 are equipped with gap.
Laser 220 is used to carry out laser irradiation to flexible device to be stripped by above-mentioned gap.Meanwhile laser
220 are located at the both sides of the first transmission microscope carrier 210 with flexible device to be stripped.Therefore, to flexible device to be stripped into
When row stripping, laser 220 will not equally touch flexible base board 120.
Controller be electrically connected with the first transmission microscope carrier 210, and controller transmits microscope carrier 210 according to by for controlling first
Transmit flexible device to be stripped in the direction of one transit area 211 to laser-irradiated domain 212.When flexible device to be stripped
After any position is transferred into laser-irradiated domain 212, laser 220 can be by above-mentioned gap to the phase of underlay substrate 110
Position is answered to emit laser, and up to the contact surface between underlay substrate 110 and flexible base board 120, to reduce underlay substrate 110
With the adhesive force between flexible base board 120, to achieve the purpose that remove the corresponding position of flexible base board 120.So, when to be stripped
From flexible device all sites by laser-irradiated domain 212 and by laser 220 irradiate after, you can by flexible base board
120 remove from underlay substrate 110 completely.
Therefore, above-mentioned flexible base board stripping off device is when removing flexible device to be stripped, in flexible base board 120
Display device be not in contact with any peel-off device, make on flexible base board in stripping process to overcome traditional lift-off technology
Display device the problem of readily accessing relevant peel-off device, improve the manufacturing yield of flexible device.
Specifically, as shown in Figure 1, the first transmission microscope carrier 210 further includes the second transit area 213.Laser-irradiated domain 212
Between the first transit area 211 and the second transit area 213.Meanwhile first transit area 211, the second transit area 213
Length be all higher than or equal to flexible device to be stripped length, therefore first transmission microscope carrier 210 entire length be more than or
Equal to twice of flexible device length to be stripped.
Controller is additionally operable to after flexible device to be stripped is stripped, control first transmission microscope carrier 210 according to by
Underlay substrate 110 and flexible base board after the completion of the direction transmission stripping of 212 to the second transit area 213 of laser-irradiated domain
120, to ensure underlay substrate 110 after the completion of stripping and flexible base board 120 still in carried state without to downslide
It falls.
Since each position is by laser-irradiated domain 212 and to be removed successively to flexible base board 120 in stripping process
, thus remove after the completion of a part of flexible base board 120 still in carried state when, the effect because of gravity can be avoided
And flexible base board 120 and underlay substrate 110 that other are also not peeled off are pullled downwards, to improve the flexible base board stripping off device
Functional reliability.
It is understood that the structure of the first transmission microscope carrier 210 is not limited to a kind of above-mentioned situation, as long as can be to be stripped
Flexible device in flexible base board 120 normally complete strip operation.For example, the first transmission microscope carrier 210 includes two phases
Connection and the identical transmission unit of height, wherein first transmission unit includes the first transit area and laser-irradiated domain, the
Two transmission units include the second transit area.Flexible device to be stripped is removed on first transmission unit.Meanwhile
Second transmission unit then transmits the flexible base board and underlay substrate after the completion of stripping.
Further, as shown in Fig. 2, flexible base board stripping off device further includes the second transmission microscope carrier 230 and absorbent module.The
Two transmission microscope carriers 230 are located at 213 top of the second transit area.Meanwhile second transmission microscope carrier 230 and first transmission microscope carrier 210 it
Between interval more than or equal to underlay substrate 110 thickness.Absorbent module is electrically connected with the controller.
Absorbent module has absorption property and carries out the performance of perpendicular or parallel movement relative to the first transmission microscope carrier 210.
In the present embodiment, absorbent module is used under the control of the controller by non-in the flexible base board 120 after the completion of adsorption stripping
Flexible base board 120 after the completion of stripping is positioned on the second transmission microscope carrier 230, as shown in Figure 3 by device area.Concrete operations
In, after the completion of flexible base board 120 of absorbent module after the completion of to stripping adsorbs, carry out relative to the first transmission microscope carrier 210
It is a series of it is vertical, move in parallel after the flexible base board 120 after the completion of stripping can be positioned on the second transmission microscope carrier 230.Its
In, due to the non-device region in flexible base board 120 of absorbent module during whole operation only after the completion of adsorption stripping, because
This still ensures that the display device in the flexible base board 120 after the completion of stripping will not touch any peel-off device.
Second transmission microscope carrier 230, for the flexible base board 120 after the completion of transmission stripping under the control of the controller.Simultaneously
First transmission microscope carrier 210, is additionally operable to transmit the underlay substrate 110 after the completion of stripping under the control of the controller.Therefore, it has removed
Flexible base board 120 and underlay substrate 110 after are transmitted by two microscope carriers respectively.
It is greater than or equal to underlay substrate 110 since the second transmission microscope carrier 230 and first transmits the distance between microscope carrier 210
Thickness, therefore can be transmitted by the first transmission microscope carrier 210, second after the completion of stripping after the completion of microscope carrier 230 be respectively transmitted stripping
Underlay substrate 110, flexible base board 120, consequently facilitating subsequently dividing underlay substrate 110, the flexible base board 120 after the completion of stripping
It is not handled.
Specifically, the second transmission microscope carrier 230 is similarly roller transmissioning device.Since the first transmission microscope carrier 210 and second passes
Microscope carrier 230 is sent by controller to control operation, then transmitting microscope carrier 230 in the first transmission microscope carrier 210 and second is similarly rolling
In the case of taking turns transmission device, controller only need to use same class control type of drive that can control 210 He of the first transmission microscope carrier
Second transmission microscope carrier 230, therefore controller of being more convenient for is controlled, while improving the operational efficiency of controller.It is appreciated that
, the concrete type of the second transmission microscope carrier 230 is not limited to the above situation, as long as being controlled convenient for controller according to actual conditions
System.
Specifically, the first transmission microscope carrier 210 and the surface of the second transmission microscope carrier 230 are vertical with gravity direction.Wherein,
Surface, the second surface for transmitting microscope carrier 230 of one transmission microscope carrier 210 refer both to the plane for placing object to be transmitted.This implementation
In example, above-mentioned surface refers specifically to the plane formed by all idler wheels.Therefore, the first transmission microscope carrier 210 and second transmits microscope carrier 230
Surface it is vertical with gravity direction, i.e., and horizontal direction parallel.So either first transmission microscope carrier 210 or second passes
Send microscope carrier 230, can avoid other external force (such as when transmission plane tilts if will produce underlay substrate 110 or flexible base board
120 gravity) transmit process is impacted, to enhance the stability of transmission, and 210 He of the first transmission microscope carrier of being more convenient for
Second transmission microscope carrier 230 is transmitted.
In addition, first transmission microscope carrier 210 with second transmit the transmission speed of microscope carrier 230 it is identical, to make flexible device without
The distance run in same time by the position before being stripped or each position after the completion of stripping is all identical, to keep away
The phenomenon that having exempted to cause fold because of speed difference.It is understood that the first transmission microscope carrier 210 and second transmits microscope carrier 230
Structure be not limited to the above situation, as long as can ensure normally to transmit flexible device.
Therefore after the completion of stripping, underlay substrate 110, the flexible base board 120 after the completion of stripping are respectively placed in difference
Microscope carrier, the not impaired unfailing performance of display device in flexible base board 120 and follow-up can be further increased
Manufacturing process, to improve the manufacture efficiency of flexible device.
It is understood that flexible base board stripping off device is not limited to include the one of the second transmission microscope carrier 230 and absorbent module
Kind situation, as long as the flexible base board 120 and underlay substrate 110 after the completion of enabling stripping are transmitted i.e. by different microscope carriers respectively
It can.For example, other kinds of mechanical structure may be used in absorbent module, as long as can be by the flexible base board 120 after the completion of stripping
It is positioned on the second transmission microscope carrier 230.
Specifically, as shown in Fig. 2, absorbent module includes the vacuum cup 241 being connected and mobile mechanism 242.Vacuum is inhaled
Disk 241 has absorption property, is connected to the bottom of mobile mechanism 242, and for the flexible base board 120 after the completion of adsorption stripping
In non-device region.Mobile mechanism 242 carries for control vacuum cup 241 under the control of the controller relative to the first transmission
Platform 210 is parallel or vertically moves.
In carrying out practically, controller makes vacuum cup 241 be moved accordingly by controlling mobile mechanism 242, with
Related non-device overlying regions in flexible base board 241 of the operation to after the completion of removing.Vacuum cup 241 is controlled later towards stripping
Flexible base board 120 after the completion moves down, you can vacuum cup 241 is made to adsorb corresponding non-device region.Later, controller
Vacuum cup 241 is controlled by mobile mechanism 242 to move to the direction of the second transmission microscope carrier 230, finally will can accordingly shell again
It is positioned on the second transmission microscope carrier 230 from flexible base board 120 after the completion.
Specifically, mobile mechanism 242 includes mobile slide bar, driving unit and supporting rod.Wherein, mobile slide bar and first passes
Send the direction of transfer of microscope carrier 210 parallel.Supporting rod is perpendicular to mobile slide bar, and one end of supporting rod connects vacuum cup 241, branch
The other end of strut connects driving unit.Driving unit is installed on mobile slide bar and is electrically connected with the controller.Driving unit is used
It carries out sliding in control supporting rod under the control of the controller or moves perpendicular to slide bar is moved along moving slide bar.Supporting rod is along shifting
Moving slide-bar is slided, i.e., transmitting microscope carrier 230 relative to the first transmission microscope carrier 210, second moves in parallel.Supporting rod is perpendicular to shifting
Moving slide-bar moves, i.e., transmitting microscope carrier 230 relative to the first transmission microscope carrier 210, second vertically moves.Wherein, driving unit uses
Cylinder, screw component or other kinds of driving element.
Therefore, supporting rod driving unit, controller control under can relative to first transmission microscope carrier 210, second pass
Microscope carrier 230 is sent horizontally or vertically to be moved.Under the drive of supporting rod, vacuum cup 241 can be moved accordingly, to
It realizes the non-device region in the flexible base board 120 after the completion of adsorption stripping, be positioned over the flexible base board 120 after the completion of stripping
The relevant operations such as the second transmission microscope carrier 230.
It is understood that the concrete structure of mobile mechanism 242 is not limited to a kind of above-mentioned situation, as long as can be in controller
Control under control vacuum cup 241 carry out parallel or vertically move relative to the first transmission microscope carrier 210.
In addition, based on above-mentioned flexible base board stripping off device, an embodiment additionally provides a kind of flexible base board stripping means.
Wherein, execution step of the controller when being removed includes the following contents, as shown in Figure 4.
Step S110, the first transmission of control microscope carrier 210 is according to by the first transit area 211 to laser-irradiated domain 212
Transmit flexible device to be stripped in direction.
After controller receives the coherent signal that stripping is opened, that is, controls the first transmission microscope carrier 210 and start above-mentioned transmission
Operation.
Step S120, when the setting position of flexible device to be stripped reaches laser-irradiated domain 212, control first passes
Microscope carrier 210 is sent to stop transmission.Later, laser 220 emits laser to remove flexible base board 120 in setting time.
Wherein, the width at above-mentioned setting position is equal to the width in the gap in above-mentioned first transmission microscope carrier 210.Therefore, it waits for
The distance that the flexible device of stripping moves every time then stops moving after reaching the width in above-mentioned gap, so that laser 220 carries out
Laser irradiation, therefore flexible device to be stripped in transmit process is in laser-irradiated domain 212 after stopping transmitting every time
Position is above-mentioned setting position.Meanwhile above-mentioned setting time need to ensure the laser of the transmitting of laser 220 in the setting time
It is enough the corresponding flexible base board of irradiated site 120 being completely exfoliated.
Step S130, flexible device to be stripped is judged after above-mentioned setting time, and whether there are still do not pass through laser
Otherwise terminate if so, continuing to execute step S110 at the position of irradiation area 212.
Since laser 220 is to carry out laser irradiation by above-mentioned gap, therefore only work as flexible device to be stripped
All sites by laser-irradiated domain 212 and after being irradiated by laser 220, could will be in the flexible device to be stripped
Flexible base board 120 is completely exfoliated.Therefore, between controller needs loop control first to transmit microscope carrier 210 by repeatedly transmitting and being above-mentioned
Gap distance of same size, the operation for stopping transmission, can complete the stripping to the flexible device to be stripped.
In conclusion above-mentioned flexible base board stripping means can equally ensure to remove to flexible device to be stripped
When, the display device in flexible base board 120 is not in contact with any peel-off device, is being removed to overcome traditional lift-off technology
The problem of display device in journey on flexible base board readily accesses relevant peel-off device, the manufacture for improving flexible device are good
Rate.
Each technical characteristic of embodiment described above can be combined arbitrarily, to keep description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (10)
1. a kind of flexible base board stripping off device, for being removed to flexible device to be stripped, the flexible device to be stripped
Part includes underlay substrate and the flexible base board that is formed on the underlay substrate, and the flexible base board is equipped with display device；Its
It is characterized in that, the flexible base board stripping off device includes：Controller, the first transmission microscope carrier and laser；
The first transmission microscope carrier is for carrying and transmitting the flexible device to be stripped, and the underlay substrate is for contacting
The first transmission microscope carrier；The first transmission microscope carrier includes the first transit area and laser-irradiated domain, and described first passes
Microscope carrier is sent at least to be equipped with gap at the position positioned at the laser-irradiated domain；The laser is used for through the gap to institute
It states flexible device to be stripped and carries out laser irradiation, laser is located at the first transmission microscope carrier with flexible device to be stripped
Both sides；The controller is electrically connected with the first transmission microscope carrier, and the controller is for controlling the first transmission microscope carrier
The flexible device to be stripped is transmitted according to the direction by the first transit area to the laser-irradiated domain.
2. flexible base board stripping off device according to claim 1, which is characterized in that the first transmission microscope carrier passes for idler wheel
Send device.
3. flexible base board stripping off device according to claim 1, which is characterized in that the first transmission microscope carrier further includes the
Two transit areas, and the laser-irradiated domain is between first transit area and the second transit area；The control
Device is additionally operable to after the flexible device to be stripped is stripped, and control the first transmission microscope carrier is according to by the laser
The underlay substrate and flexible base board after the completion of irradiation area to the direction transmission stripping of the second transit area.
4. flexible base board stripping off device according to claim 3, which is characterized in that the flexible base board stripping off device also wraps
Include the second transmission microscope carrier and absorbent module；The second transmission microscope carrier is located above second transit area, and described second
It transmits microscope carrier and transmits the thickness that the distance between microscope carrier is greater than or equal to the underlay substrate with described first；The absorbent module
It is electrically connected with the controller；
In flexible base board after the completion of the absorbent module is under the control of the controller by adsorbing the stripping
Flexible base board after the completion of the stripping is positioned on the second transmission microscope carrier by non-device region；Second transmission carries
Flexible base board after the completion of platform is used to transmit the stripping under the control of the controller；The first transmission microscope carrier is additionally operable to
Underlay substrate after the completion of transmitting the stripping under the control of the controller.
5. flexible base board stripping off device according to claim 4, which is characterized in that the second transmission microscope carrier passes for idler wheel
Send device.
6. flexible base board stripping off device according to claim 4, which is characterized in that the first transmission microscope carrier and second passes
Send the surface of microscope carrier vertical with gravity direction.
7. flexible base board stripping off device according to claim 4, which is characterized in that the first transmission microscope carrier and described the
The transmission speed of two transmission microscope carriers is identical.
8. flexible base board stripping off device according to claim 4, which is characterized in that the absorbent module includes being connected
Vacuum cup and mobile mechanism；The vacuum cup is used to adsorb the non-device area in the flexible base board after the completion of the stripping
Domain；The mobile mechanism under the control of the controller for controlling the vacuum cup relative to the first transmission microscope carrier
It is parallel or vertically move.
9. flexible base board stripping off device according to claim 8, which is characterized in that the mobile mechanism includes mobile slides
Bar, driving unit and supporting rod；
The mobile slide bar is parallel with the first transmission direction of transfer of microscope carrier；The supporting rod is perpendicular to described mobile sliding
Bar, and one end of the supporting rod connects the vacuum cup, the other end of the supporting rod connects the driving unit；It is described
Driving unit is installed on the mobile slide bar and is electrically connected with the controller, and the driving unit is used in the control
The supporting rod is controlled under the control of device to carry out sliding along the slide bar that moves or move perpendicular to the slide bar that moves.
10. a kind of flexible base board stripping means, which is characterized in that be based on flexible base board stripping off device described in claim 1；Its
In, execution step of the controller when being removed includes：
The first transmission microscope carrier is controlled to wait for according to described in the direction transmission by first transit area to laser-irradiated domain
The flexible device of stripping；
When the setting position of the flexible device to be stripped reaches the laser-irradiated domain, control first transmission carries
Platform stops transmission；Later, the laser emits laser to remove the flexible base board in setting time；
Judge that the flexible device to be stripped whether there is without passing through the laser irradiation area after the setting time
The position in domain starts to shine according to by first transit area to laser if so, continuing to execute control the first transmission microscope carrier
Penetrate the step of flexible device to be stripped is transmitted in the direction in region；Otherwise, terminate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610422728.2A CN106098965B (en) | 2016-06-15 | 2016-06-15 | Flexible base board stripping off device and flexible base board stripping means |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610422728.2A CN106098965B (en) | 2016-06-15 | 2016-06-15 | Flexible base board stripping off device and flexible base board stripping means |
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| CN106098965B true CN106098965B (en) | 2018-08-21 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107146845A (en) * | 2017-05-05 | 2017-09-08 | 京东方科技集团股份有限公司 | A kind of flexible display substrates stripping off device and method |
| CN107068728A (en) * | 2017-05-05 | 2017-08-18 | 武汉华星光电技术有限公司 | The method for dismounting of electronic device in OLED display panel |
| US10751985B2 (en) | 2017-08-17 | 2020-08-25 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Flexible substrate lifting device and method |
| CN107528009B (en) * | 2017-08-17 | 2020-02-28 | 武汉华星光电半导体显示技术有限公司 | Flexible substrate peeling device and peeling method |
| CN107623089B (en) * | 2017-09-29 | 2019-07-26 | 武汉华星光电半导体显示技术有限公司 | The separation method and flexible OLED display of flexible OLED display |
| CN112713253A (en) * | 2020-12-15 | 2021-04-27 | 广州国显科技有限公司 | Display panel, preparation method thereof and preparation method of display device |
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| JP4878228B2 (en) * | 2006-06-28 | 2012-02-15 | 大日本スクリーン製造株式会社 | Tape peeling apparatus, coating system, and tape peeling method |
| KR101869930B1 (en) * | 2011-11-29 | 2018-06-22 | 삼성디스플레이 주식회사 | Delamination apparatus and inline thermal imaging system |
| KR101929527B1 (en) * | 2012-09-17 | 2018-12-17 | 삼성디스플레이 주식회사 | Film peeling apparatus |
| KR20140063302A (en) * | 2012-11-16 | 2014-05-27 | 삼성디스플레이 주식회사 | Apparatus for removing carrier substrate, system for manufacturing display, and the method of manufacturing display |
| CN203910868U (en) * | 2014-06-25 | 2014-10-29 | 京东方科技集团股份有限公司 | Laser lift-off device |
| CN104916574B (en) * | 2015-04-22 | 2017-11-10 | 四川虹视显示技术有限公司 | A kind of flexible OLED device for removing scum |
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Effective date of registration: 20201210 Address after: No.146 Tianying Road, high tech Zone, Chengdu, Sichuan Province Patentee after: Chengdu CHENXIAN photoelectric Co.,Ltd. Address before: Building 4, No.1 Longteng Road, Kunshan Development Zone, Suzhou City, Jiangsu Province Patentee before: KunShan Go-Visionox Opto-Electronics Co.,Ltd. |
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