US10751985B2 - Flexible substrate lifting device and method - Google Patents

Flexible substrate lifting device and method Download PDF

Info

Publication number
US10751985B2
US10751985B2 US16/136,846 US201816136846A US10751985B2 US 10751985 B2 US10751985 B2 US 10751985B2 US 201816136846 A US201816136846 A US 201816136846A US 10751985 B2 US10751985 B2 US 10751985B2
Authority
US
United States
Prior art keywords
adhesive tape
flexible substrate
reel
lifting
take
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US16/136,846
Other versions
US20190054728A1 (en
Inventor
Dian Liu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN201710708601.1A external-priority patent/CN107528009B/en
Application filed by Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Assigned to WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. reassignment WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LIU, Dian
Publication of US20190054728A1 publication Critical patent/US20190054728A1/en
Application granted granted Critical
Publication of US10751985B2 publication Critical patent/US10751985B2/en
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B43/00Operations specially adapted for layered products and not otherwise provided for, e.g. repairing; Apparatus therefor
    • B32B43/006Delaminating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/10Removing layers, or parts of layers, mechanically or chemically
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2315/00Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
    • B32B2315/08Glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/206Organic displays, e.g. OLED
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0046Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by constructional aspects of the apparatus
    • B32B37/0053Constructional details of laminating machines comprising rollers; Constructional features of the rollers

Definitions

  • the present invention is generally related to the field of flexible devices, and more particularly to a flexible substrate lifting device and a related lifting method.
  • flexible device As technology advances, bendable flexible device is going to be the mainstream for next-generation electronic appliances.
  • Flexible devices such as displays, chips, circuits, power supplies, sensors, etc. provide functions and experiences that are not possible to achieve from conventional electronic appliances.
  • a flexible display As example, it has components formed on a substrate made of a flexible material.
  • a flexible active-matrix organic light emitting diode (AMOLED) display device would have a flexible substrate formed or attached to a rigid substrate. Then, after forming the components on the flexible substrate, the flexible substrate has to be lifted from the rigid substrate. Therefore, one of the key techniques of producing flexible devices is to effectively lift the flexible substrate from the rigid substrate.
  • AMOLED active-matrix organic light emitting diode
  • the mainstream approach in lifting flexible AMOLED substrate is through laser ablation, where high-power laser is applied to the interface between flexible polymer substrate and rigid glass substrate to ablate the polymer at the interface so that the flexible substrate and the rigid substrate may be separated.
  • high-power laser is applied to the interface between flexible polymer substrate and rigid glass substrate to ablate the polymer at the interface so that the flexible substrate and the rigid substrate may be separated.
  • the polymer at the interface is ablated, there is still some slight adhesion between the flexible and rigid substrates. Therefore, to ensure that the flexible substrate is not damaged, some additional measure has to be adopted to fulfill the effective and gentle separation of the flexible substrate and the rigid substrate.
  • the present invention teaches a device and a method for lifting flexible substrate.
  • the device and method achieves the effective and gentle separation of the flexible substrate and the rigid substrate through the traction of adhesive tape.
  • the yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses.
  • the present invention teaches a device for lifting a flexible substrate from its glass substrate, including a supply reel, a take-up reel, a lifting roller, and an adhesive tape.
  • the supply reel spins to deliver the adhesive tape.
  • the adhesive tape has a first side and a second side opposite to each other. A circumferential side of the lifting roller contacts the second side of the adhesive tape.
  • the lifting roller moves along a lateral direction parallel to the glass substrate and presses the flexible substrate so that the flexible substrate is adhered to the first side of the adhesive tape.
  • the take-up reel spin to retract the adhesive tape and the flexible substrate adhered to the first side of the adhesive tape is lifted from the glass substrate.
  • a first guide roller is disposed laterally between the lifting roller and the supply reel, and a second guide roller is disposed laterally between the take-up reel and the lifting roller.
  • the first and second guide rollers spin to deliver the adhesive tape and ensure that the flexible substrate is pressed tightly against the first side of the adhesive tape.
  • the adhesive tape has a first end connected to the supply reel, and has a second end connected to the take-up reel.
  • the supply reel, the first guide roller, the lifting roller, the second guide roller, and the take-up reel are sequentially and laterally arranged from right to left.
  • the lifting roller moves to right along a lateral direction parallel to the glass substrate.
  • the supply reel, the first guide roller, the lifting roller, the second guide roller, and the take-up reel spin clockwise around their respective axles.
  • the locations of the supply reel, the first guide roller, the second guide roller, and the take-up reel within the lifting device are fixed.
  • the take-up reel spins around its axle to retract the adhesive tape.
  • the flexible substrate is configured with flexible components.
  • the adhesive tape is one whose adhesiveness is dissolvable under ultra-violet (UV) light.
  • the device further includes an UV lighting device, emitting UV light onto the first side of the adhesive tape, causing the first side of the adhesive tape to lose its adhesiveness, thereby lifting the flexible substrate from the adhesive tape.
  • the present invention also teaches a method for lifting a flexible substrate from its glass substrate, which includes the following steps.
  • Providing a lifting device including a supply reel, a take-up reel, a lifting roller, an adhesive tape, and an UV lighting device.
  • Engaging the UV lighting device to project UV light on the first side of the adhesive tape causing the first side of the adhesive tape to lose its adhesiveness, and the flexible substrate being lifted from the adhesive tape.
  • the take-up reel spins at a third speed to retract the adhesive tape.
  • the flexible substrate lifting device and method of the present invention have the flexible substrate adhered to an adhesive tape whose adhesiveness is dissolvable under UV light.
  • the effective and gentle separation of the flexible substrate and the glass substrate is achieved through the traction of adhesive tape.
  • the adhesive side of the adhesive tape is then exposed to UV light so that its adhesiveness disappears.
  • the flexible substrate as such is further lifted from the adhesive tape.
  • the yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses.
  • FIG. 1 is a structural schematic diagram showing a lifting device according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram showing the operation of various components of the lifting device of FIG. 1 .
  • FIG. 3 is a flow diagram showing a method of using the lifting device of FIG. 1 to lift a flexible substrate from its glass substrate according to an embodiment of the present invention.
  • connection could mean a fixed connection, a detachable connection, or an integral connection. It may also mean a mechanical connection or an electrical connection. It may be a direct connection, a connection through an intermediate medium, or an internal connection between two elements. For persons skilled in the related art, they should be able to understand the specific meanings of these terms within the context of the present invention.
  • the terms “multiple” and “a number of” refer to two or more entities.
  • the term “process” may refer to an independent process or a subset of another process as long as the subset may fulfill the intended function.
  • a numerical range using two values separated by “ ⁇ ” specifies that the range is inclusive of the two values as the range's minimum and maximum.
  • the present invention teaches a device and a method for lifting flexible substrate.
  • the device and method achieves the effective and gentle separation of the flexible substrate and the rigid substrate through the traction of adhesive tape.
  • the yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses.
  • Detailed description to the lifting device and method is provided below, together with FIGS. 1 to 3 .
  • a lifting device 10 lifts a flexible substrate 20 from a glass substrate 30 .
  • the flexible substrate 20 is located on the glass substrate 30 .
  • the flexible substrate 20 has a first side (i.e., a bottom side) covering the glass substrate 30 , and a second side (i.e., a top side) configured with flexible components (not shown).
  • the flexible components include, but are not limited to, organic light emitting diode (OLED), thin film transistor (TFT), etc.
  • OLED organic light emitting diode
  • TFT thin film transistor
  • the lifting device 10 of the present embodiment includes a supply reel 11 , a take-up reel 12 , a lifting roller 13 , a first guide roller 14 , a second guide roller 15 , and an adhesive tape 16 .
  • the supply reel 11 and the take-up reel 12 spin around their respective axles. Specifically, the supply and take-up reels 11 and 12 may spin clockwise or counter-clockwise around their axles.
  • the supply and take-up reels 11 and 12 are immovable. That is, the locations of the supply and take-up reels 11 and 12 within the lifting device 10 are fixed.
  • the supply reel 11 spins to deliver the adhesive tape 16 , and the adhesive tape 16 has a first end connected to the supply reel 11 .
  • the supply reel 11 provides the adhesive tape 16 .
  • the take-up reel 12 spins to pull the adhesive tape 16 , and the adhesive tape 16 has a second end connected to the take-up reel 12 . In other words, the take-up reel 12 retracts the adhesive tape 16 .
  • the adhesive tape 16 has a first side and a second side opposite to each other.
  • the first side of the adhesive tape 16 is the adhesive side and faces outward away from the axles of the supply and take-up reels 11 and 12
  • the second side faces inward towards the axles of the supply and take-up reels 11 and 12 .
  • the lifting roller 13 spins around its axle. Specifically, the lifting roller 13 may spin clockwise or counter-clockwise around its axles.
  • the lifting roller 13 is moveable. That is, the location of the lifting roller 13 within the lifting device 10 may change.
  • the lifting roller 13 is deposed laterally between the supply and take-up reels 11 and 12 .
  • a circumferential side of the lifting roller 13 contacts the second side of the adhesive tape 16 .
  • the lifting roller 13 has an axial direction perpendicular to a transmission direction of the adhesive tape 16 .
  • the lifting roller 13 may move perpendicularly relative to the flexible substrate 20 and approaches the flexible substrate 20 .
  • the lifting roller 13 may move along a lateral direction parallel to the glass substrate 30 and presses the flexible substrate 20 so that the flexible substrate 20 is adhered to the first side of the adhesive tape 16 .
  • the first guide roller 14 and the second guide roller 15 spin around their respective axles. Specifically, the first and second guide rollers 14 and 15 may spin clockwise or counter-clockwise around their axles.
  • the first and second guide rollers 14 and 15 are immovable. That is, the locations of the first and second guide rollers 14 and 15 within the lifting device 10 are fixed. Furthermore, the first and second guide rollers 14 and 15 spin to deliver the adhesive tape 16 .
  • the first guide roller 14 is disposed laterally between the lifting roller 13 and the supply reel 11
  • the second guide roller 15 is disposed laterally between the take-up reel 12 and the lifting roller 13 .
  • the first and second guide rollers 14 and 15 ensure that the flexible substrate 20 is pressed tightly against the first side of the adhesive tape 16 .
  • the take-up reel 12 spin to retract the adhesive tape 16 and the flexible substrate 20 adhered to the first side of the adhesive tape 16 is therefore lifted from the glass substrate 30 .
  • the glass substrate 30 may be discarded.
  • the supply reel 11 , the first guide roller 14 , the lifting roller 13 , the second guide roller 15 , and the take-up reel 12 are sequentially and laterally arranged from right to left. Their respective axles may be connected into a U-like shape.
  • the supply reel 11 , the first guide roller 14 , the lifting roller 13 , the second guide roller 15 , and the take-up reel 12 spin clockwise around their respective axles.
  • the lifting roller 13 moves laterally to the right parallel with the glass substrate 30 .
  • the adhesive tape 16 is one whose adhesiveness may be dissolved by exposure to ultra-violet (UV) light.
  • the adhesive tape 16 has an adhesive film of coating thickness 25 um. With the adhesive film of this thickness, the adhesive tape 16 provides a lifting strength 1.2 kg/in 2 .
  • the lifting device 10 further includes an UV lighting device (not shown).
  • an UV lighting device (not shown).
  • the flexible substrate 20 and the adhesive tape 16 are exposed to the UV light emitting from the UV lighting device.
  • the adhesiveness of the first side of the adhesive tape 16 dissolves under the UV light.
  • the adhesive film on the first side of the adhesive tape 16 falls off. It should be noted that there would be no residual adhesive by applying UV light to the adhesive tape 16 . Therefore, the flexible substrate 20 may be further lifted from the adhesive tape 16 . Up to this stage, the process of lifting the flexible substrate 20 is completed.
  • the time for exposing the first side of the adhesive tape 16 to the UV light is 10 seconds.
  • the take-up reel 12 retracts the already used adhesive tape 16 .
  • the lifting device 10 further includes a base member (not shown) where the various components of the lifting device 10 are disposed.
  • the base member also drives the supply reel 11 , the first guide roller 14 , the lifting roller 13 , the second guide roller 15 , and the take-up reel 12 spin clockwise or counter-clockwise around their respective axles.
  • the base member also drives the lifting roller 13 to move perpendicularly up or down relative to the flexible substrate 20 , and to move left or right along a lateral direction parallel to the flexible substrate 20 (or the glass substrate 30 ).
  • the flexible substrate 20 then may be lifted from the glass substrate 30 .
  • the base member may also drive the UV lighting device to move relative to the flexible substrate 20 so as to lift the flexible substrate 20 from the adhesive tape 16 .
  • the lifting device 10 further includes a support member (not shown) where the glass substrate 30 , together with the attached flexible substrate 20 , is positioned.
  • the support member also supports the flexible substrate 20 after being lifted from the glass substrate 30 and still adhered to the first side of the adhesive tape 16 .
  • a laser lift-off (LLO) layer (not shown) is disposed between the flexible substrate 20 and the glass substrate 30 .
  • the LLO layer is made of a polymer whose main chain includes imide group (—CO—N—CO—) (i.e., polyimide, PI).
  • the flexible substrate 20 is made of a same material as the LLO layer.
  • a LLO technique may be used, where a laser light is projected to the glass substrate 30 so as to ablate the LLO layer and achieve a preliminary lifting of the flexible substrate 20 from the glass substrate 30 .
  • the laser light has an energy density of 270-300 mJ/cm 2 , an overlap rate of 50%, and a wavelength of 308 nm or 343 nm.
  • FIG. 3 is a flow diagram showing a method of using the lifting device of FIG. 1 to lift a flexible substrate from its glass substrate according to an embodiment of the present invention. As illustrated, the method includes the following steps.
  • the supply reel 11 spins at the first speed clockwise to deliver un-used adhesive tape 16 .
  • the adhesive tape 16 As the adhesive tape 16 is delivered, it sequentially passes through the first guide roller 14 , the lifting roller 13 , the second guide roller 15 , and the take-up reel 12 .
  • the adhesive tape 16 has the first side and the second side opposite to each other.
  • the lifting roller 13 contacts the second side of the adhesive tape 16 .
  • the first side of the adhesive tape 16 is the adhesive side and the flexible substrate 20 is adhered to the adhesive side of the adhesive tape 16 .
  • the method further includes the step of moving the lifting roller 13 perpendicularly relative to the flexible substrate and approaching the flexible substrate 20 . Furthermore, the lifting roller 13 is moved from left to right along the lateral direction parallel to the glass substrate 30 to press the flexible substrate 20 so that the flexible substrate 20 is adhered to the first side of the adhesive tape 16 .
  • the first guide roller 14 is disposed laterally between the lifting roller 13 and the supply reel 11
  • the second guide roller 15 is disposed laterally between the take-up reel 12 and the lifting roller 13 .
  • the first and second guide rollers 14 and 15 ensure that the flexible substrate 20 is pressed tightly against the first side of the adhesive tape 16 .
  • the take-up reel 12 also spins clockwise to retract the adhesive tape 16 .
  • the pull by the adhesive tape 16 lifts the flexible substrate 20 adhered to the first side of the adhesive tape 16 is lifted from the glass substrate 30 .
  • the flexible substrate 20 is lifted from the glass substrate 30 , the flexible substrate 20 is still adhered to the first side of the adhesive tape 16 . Since the adhesive tape 16 is one whose adhesiveness may be dissolved by exposure to UV light, the UV lighting device is engaged to emit UV light onto the first side of the adhesive tape 16 . The first side of the adhesive tape 16 as such loses its adhesiveness, and the adhesive film on the first side of the adhesive tape 16 falls off, thereby lifting the flexible substrate 20 from the adhesive tape 16 .
  • the second end of the adhesive tape is connected to the take-up reel 12 . Therefore, the take-up reel 12 spins to retract the adhesive tape 16 (i.e., the already used adhesive tape 16 ). In the present embodiment, after the flexible substrate 20 is lifted from the adhesive tape 16 , the take-up reel 12 spins at the third speed clockwise to retract the adhesive tape 16 .
  • the present invention teaches a device and a method for lifting flexible substrate.
  • the device and method first achieve preliminary lifting of the flexible substrate through laser ablation. Then, the flexible substrate is adhered to an adhesive tape whose adhesiveness is dissolvable under UV light. The effective and gentle separation of the flexible substrate and the glass substrate is further achieved through the traction of adhesive tape. The adhesive side of the adhesive tape is then exposed to UV light so that its adhesiveness disappears. The flexible substrate as such is further lifted from the adhesive tape.
  • the yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses.
  • phrases such as “an embodiment,” “some embodiments,” “an example,” “some examples,” etc. means that their specified characteristic, structure, material, or feature described may be independently applied or jointly combined in at least one embodiment of the present invention. These phrases also are not necessarily refer to a same embodiment. Their characteristics, structures, materials, or features may be appropriately integrated in one or more embodiments.

Abstract

The present invention teaches a device for lifting a flexible substrate from its glass substrate, including a supply reel, a take-up reel, a lifting roller, and an adhesive tape. The supply reel spins to deliver the adhesive tape. The adhesive tape has a first side and a second side opposite to each other. The lifting roller contacts the second side of the adhesive tape. The lifting roller moves along a lateral direction parallel to the glass substrate and presses the flexible substrate so that the flexible substrate is adhered to the first side of the adhesive tape. The take-up reel spin to retract the adhesive tape and the flexible substrate adhered to the first side of the adhesive tape is lifted from the glass substrate. The lifting device achieves effective and gentle separation of the flexible substrate and the glass substrate through the traction of adhesive tape.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a continuing application of PCT Patent Application No. PCT/CN2017/108690, filed on Oct. 31, 2017, which claims priority to Chinese Patent Application No. 201710708601.1, filed on Aug. 17, 2017, both of which are hereby incorporated herein by reference in their entireties.
FIELD OF THE INVENTION
The present invention is generally related to the field of flexible devices, and more particularly to a flexible substrate lifting device and a related lifting method.
BACKGROUND OF THE INVENTION
As technology advances, bendable flexible device is going to be the mainstream for next-generation electronic appliances. Flexible devices such as displays, chips, circuits, power supplies, sensors, etc. provide functions and experiences that are not possible to achieve from conventional electronic appliances. Taking flexible display as example, it has components formed on a substrate made of a flexible material. Specifically, a flexible active-matrix organic light emitting diode (AMOLED) display device would have a flexible substrate formed or attached to a rigid substrate. Then, after forming the components on the flexible substrate, the flexible substrate has to be lifted from the rigid substrate. Therefore, one of the key techniques of producing flexible devices is to effectively lift the flexible substrate from the rigid substrate.
The mainstream approach in lifting flexible AMOLED substrate is through laser ablation, where high-power laser is applied to the interface between flexible polymer substrate and rigid glass substrate to ablate the polymer at the interface so that the flexible substrate and the rigid substrate may be separated. However, after the polymer at the interface is ablated, there is still some slight adhesion between the flexible and rigid substrates. Therefore, to ensure that the flexible substrate is not damaged, some additional measure has to be adopted to fulfill the effective and gentle separation of the flexible substrate and the rigid substrate.
SUMMARY OF THE INVENTION
The present invention teaches a device and a method for lifting flexible substrate. The device and method achieves the effective and gentle separation of the flexible substrate and the rigid substrate through the traction of adhesive tape. The yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses.
The present invention teaches a device for lifting a flexible substrate from its glass substrate, including a supply reel, a take-up reel, a lifting roller, and an adhesive tape. The supply reel spins to deliver the adhesive tape. The adhesive tape has a first side and a second side opposite to each other. A circumferential side of the lifting roller contacts the second side of the adhesive tape. The lifting roller moves along a lateral direction parallel to the glass substrate and presses the flexible substrate so that the flexible substrate is adhered to the first side of the adhesive tape. The take-up reel spin to retract the adhesive tape and the flexible substrate adhered to the first side of the adhesive tape is lifted from the glass substrate.
A first guide roller is disposed laterally between the lifting roller and the supply reel, and a second guide roller is disposed laterally between the take-up reel and the lifting roller. The first and second guide rollers spin to deliver the adhesive tape and ensure that the flexible substrate is pressed tightly against the first side of the adhesive tape.
The adhesive tape has a first end connected to the supply reel, and has a second end connected to the take-up reel. The supply reel, the first guide roller, the lifting roller, the second guide roller, and the take-up reel are sequentially and laterally arranged from right to left.
The lifting roller moves to right along a lateral direction parallel to the glass substrate. The supply reel, the first guide roller, the lifting roller, the second guide roller, and the take-up reel spin clockwise around their respective axles.
The locations of the supply reel, the first guide roller, the second guide roller, and the take-up reel within the lifting device are fixed.
The take-up reel spins around its axle to retract the adhesive tape.
The flexible substrate is configured with flexible components.
The adhesive tape is one whose adhesiveness is dissolvable under ultra-violet (UV) light.
The device further includes an UV lighting device, emitting UV light onto the first side of the adhesive tape, causing the first side of the adhesive tape to lose its adhesiveness, thereby lifting the flexible substrate from the adhesive tape.
The present invention also teaches a method for lifting a flexible substrate from its glass substrate, which includes the following steps.
Providing a lifting device including a supply reel, a take-up reel, a lifting roller, an adhesive tape, and an UV lighting device.
Spinning the supply reel at a first speed to provide the adhesive tape.
Moving the lifting roller along a lateral direction parallel to the glass substrate and pressing the flexible substrate, so that the flexible substrate is adhered to a first side of the adhesive tape.
Spinning the take-up reel at a second speed to retract the adhesive tape so that the flexible substrate adhered to the first side of the adhesive tape is lifted from the glass substrate.
Engaging the UV lighting device to project UV light on the first side of the adhesive tape, causing the first side of the adhesive tape to lose its adhesiveness, and the flexible substrate being lifted from the adhesive tape.
The take-up reel spins at a third speed to retract the adhesive tape.
The flexible substrate lifting device and method of the present invention have the flexible substrate adhered to an adhesive tape whose adhesiveness is dissolvable under UV light. The effective and gentle separation of the flexible substrate and the glass substrate is achieved through the traction of adhesive tape. The adhesive side of the adhesive tape is then exposed to UV light so that its adhesiveness disappears. The flexible substrate as such is further lifted from the adhesive tape. The yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses.
BRIEF DESCRIPTION OF THE DRAWINGS
In order to more clearly illustrate the embodiments of the present invention or prior art, the following figures will be described in the embodiments are briefly introduced. It is obvious that the drawings are merely some embodiments of the present invention, those of ordinary skill in this field can obtain other figures according to these figures without paying the premise.
FIG. 1 is a structural schematic diagram showing a lifting device according to an embodiment of the present invention.
FIG. 2 is a schematic diagram showing the operation of various components of the lifting device of FIG. 1.
FIG. 3 is a flow diagram showing a method of using the lifting device of FIG. 1 to lift a flexible substrate from its glass substrate according to an embodiment of the present invention.
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
The following descriptions for the respective embodiments are specific embodiments capable of being implemented for illustrations of the present invention with referring to appended figures.
In addition, the following embodiments are described in accordance with the accompanied drawings to exemplify specific embodiments of the present invention. Orientation terms such as “up,” “down,” “front,” “back,” “left,” “right,” “in” “out,” “lateral”, etc. are used in the specification according to the drawings. These terms are intended to better and more clearly explain and understand the present invention. They do not specify or imply that the referred element must have the specific orientation, or must be operated from the specific orientation. They therefore should not be interpreted as limitations to the present invention.
It should be noted that, unless explicitly specified otherwise, terms like “dispose,” “join,” “connect,” etc. should be interpreted broadly. For example, “connect” could mean a fixed connection, a detachable connection, or an integral connection. It may also mean a mechanical connection or an electrical connection. It may be a direct connection, a connection through an intermediate medium, or an internal connection between two elements. For persons skilled in the related art, they should be able to understand the specific meanings of these terms within the context of the present invention.
In addition, unless otherwise specified, the terms “multiple” and “a number of” refer to two or more entities. The term “process” may refer to an independent process or a subset of another process as long as the subset may fulfill the intended function. Furthermore, a numerical range using two values separated by “˜” specifies that the range is inclusive of the two values as the range's minimum and maximum. In the drawings, similar or identical elements are denoted by identical reference numerals.
The present invention teaches a device and a method for lifting flexible substrate. The device and method achieves the effective and gentle separation of the flexible substrate and the rigid substrate through the traction of adhesive tape. The yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses. Detailed description to the lifting device and method is provided below, together with FIGS. 1 to 3.
As shown in FIG. 1, a lifting device 10 according to an embodiment of the present invention lifts a flexible substrate 20 from a glass substrate 30. The flexible substrate 20 is located on the glass substrate 30. The flexible substrate 20 has a first side (i.e., a bottom side) covering the glass substrate 30, and a second side (i.e., a top side) configured with flexible components (not shown). In the present embodiment, the flexible components include, but are not limited to, organic light emitting diode (OLED), thin film transistor (TFT), etc. Specifically, when the flexible substrate 20 is lifted from the glass substrate 30, the flexible substrate 20 and the flexible components on its second side are lifted altogether from the glass substrate 30.
As shown in FIG. 1, the lifting device 10 of the present embodiment includes a supply reel 11, a take-up reel 12, a lifting roller 13, a first guide roller 14, a second guide roller 15, and an adhesive tape 16.
The supply reel 11 and the take-up reel 12 spin around their respective axles. Specifically, the supply and take-up reels 11 and 12 may spin clockwise or counter-clockwise around their axles. The supply and take-up reels 11 and 12 are immovable. That is, the locations of the supply and take-up reels 11 and 12 within the lifting device 10 are fixed. Furthermore, the supply reel 11 spins to deliver the adhesive tape 16, and the adhesive tape 16 has a first end connected to the supply reel 11. In other words, the supply reel 11 provides the adhesive tape 16. The take-up reel 12 spins to pull the adhesive tape 16, and the adhesive tape 16 has a second end connected to the take-up reel 12. In other words, the take-up reel 12 retracts the adhesive tape 16.
The adhesive tape 16 has a first side and a second side opposite to each other. In the present embodiment, the first side of the adhesive tape 16 is the adhesive side and faces outward away from the axles of the supply and take-up reels 11 and 12, and the second side faces inward towards the axles of the supply and take-up reels 11 and 12.
The lifting roller 13 spins around its axle. Specifically, the lifting roller 13 may spin clockwise or counter-clockwise around its axles. The lifting roller 13 is moveable. That is, the location of the lifting roller 13 within the lifting device 10 may change. The lifting roller 13 is deposed laterally between the supply and take-up reels 11 and 12. A circumferential side of the lifting roller 13 contacts the second side of the adhesive tape 16. The lifting roller 13 has an axial direction perpendicular to a transmission direction of the adhesive tape 16. Specifically, the lifting roller 13 may move perpendicularly relative to the flexible substrate 20 and approaches the flexible substrate 20. Furthermore, the lifting roller 13 may move along a lateral direction parallel to the glass substrate 30 and presses the flexible substrate 20 so that the flexible substrate 20 is adhered to the first side of the adhesive tape 16.
The first guide roller 14 and the second guide roller 15 spin around their respective axles. Specifically, the first and second guide rollers 14 and 15 may spin clockwise or counter-clockwise around their axles. The first and second guide rollers 14 and 15 are immovable. That is, the locations of the first and second guide rollers 14 and 15 within the lifting device 10 are fixed. Furthermore, the first and second guide rollers 14 and 15 spin to deliver the adhesive tape 16. In the present embodiment, the first guide roller 14 is disposed laterally between the lifting roller 13 and the supply reel 11, the second guide roller 15 is disposed laterally between the take-up reel 12 and the lifting roller 13. The first and second guide rollers 14 and 15 ensure that the flexible substrate 20 is pressed tightly against the first side of the adhesive tape 16.
Furthermore, the take-up reel 12 spin to retract the adhesive tape 16 and the flexible substrate 20 adhered to the first side of the adhesive tape 16 is therefore lifted from the glass substrate 30. After the flexible substrate 20 is completely lifted from the glass substrate 30, the glass substrate 30 may be discarded.
In an embodiment, the supply reel 11, the first guide roller 14, the lifting roller 13, the second guide roller 15, and the take-up reel 12 are sequentially and laterally arranged from right to left. Their respective axles may be connected into a U-like shape.
In an embodiment, in the process of lifting the flexible substrate 20 from the glass substrate 30 as shown in FIG. 2, the supply reel 11, the first guide roller 14, the lifting roller 13, the second guide roller 15, and the take-up reel 12 spin clockwise around their respective axles. In the meantime, the lifting roller 13 moves laterally to the right parallel with the glass substrate 30.
In an embodiment, the adhesive tape 16 is one whose adhesiveness may be dissolved by exposure to ultra-violet (UV) light. The adhesive tape 16 has an adhesive film of coating thickness 25 um. With the adhesive film of this thickness, the adhesive tape 16 provides a lifting strength 1.2 kg/in2.
In one embodiment, the lifting device 10 further includes an UV lighting device (not shown). After the flexible substrate 20 is completely lifted from the glass substrate 30, the flexible substrate 20 and the adhesive tape 16 are exposed to the UV light emitting from the UV lighting device. The adhesiveness of the first side of the adhesive tape 16 dissolves under the UV light. The adhesive film on the first side of the adhesive tape 16 falls off. It should be noted that there would be no residual adhesive by applying UV light to the adhesive tape 16. Therefore, the flexible substrate 20 may be further lifted from the adhesive tape 16. Up to this stage, the process of lifting the flexible substrate 20 is completed. In one embodiment, the time for exposing the first side of the adhesive tape 16 to the UV light is 10 seconds.
It should be noted that, after the flexible substrate 20 is completely lifted from the adhesive tape 16, the take-up reel 12 retracts the already used adhesive tape 16.
In an embodiment, the lifting device 10 further includes a base member (not shown) where the various components of the lifting device 10 are disposed. The base member also drives the supply reel 11, the first guide roller 14, the lifting roller 13, the second guide roller 15, and the take-up reel 12 spin clockwise or counter-clockwise around their respective axles. The base member also drives the lifting roller 13 to move perpendicularly up or down relative to the flexible substrate 20, and to move left or right along a lateral direction parallel to the flexible substrate 20 (or the glass substrate 30). The flexible substrate 20 then may be lifted from the glass substrate 30. The base member may also drive the UV lighting device to move relative to the flexible substrate 20 so as to lift the flexible substrate 20 from the adhesive tape 16.
In an embodiment, the lifting device 10 further includes a support member (not shown) where the glass substrate 30, together with the attached flexible substrate 20, is positioned. The support member also supports the flexible substrate 20 after being lifted from the glass substrate 30 and still adhered to the first side of the adhesive tape 16.
It should be noted that a laser lift-off (LLO) layer (not shown) is disposed between the flexible substrate 20 and the glass substrate 30. In an embodiment, the LLO layer is made of a polymer whose main chain includes imide group (—CO—N—CO—) (i.e., polyimide, PI). In addition, the flexible substrate 20 is made of a same material as the LLO layer. Before the lifting device 10 is applied to lift the flexible substrate 20 from the glass substrate 30 as shown in FIG. 1, a LLO technique may be used, where a laser light is projected to the glass substrate 30 so as to ablate the LLO layer and achieve a preliminary lifting of the flexible substrate 20 from the glass substrate 30. In an embodiment, the laser light has an energy density of 270-300 mJ/cm2, an overlap rate of 50%, and a wavelength of 308 nm or 343 nm.
After the LLO layer is ablated by laser, there is still some inter-molecular force between the flexible substrate 20 and the glass substrate 30. In addition, there is a little amount of air between the LLO layer and glass substrate 30, leading to a greater negative pressure when lifting a large-size flexible substrate 20. As such, there is some slight adhesion remaining between the flexible substrate 20 and the glass substrate 30 after the LLO layer is ablated by laser. Then, by applying the lifting device 10 of FIG. 1 to adhere the flexible substrate 20 to the UV-dissolvable adhesive tape 16, a gentle and effective lifting of the flexible substrate 20 from the glass substrate 30 is firstly achieved under the pull of the adhesive tape 16 without damaging the flexible substrate 20. Then by the exposure to UV light to dissolve the adhesive tape 16, the further lifting of the flexible substrate 20 from the adhesive tape 16 is achieved. Finally, the complete lifting of the flexible substrate 20 is accomplished.
FIG. 3 is a flow diagram showing a method of using the lifting device of FIG. 1 to lift a flexible substrate from its glass substrate according to an embodiment of the present invention. As illustrated, the method includes the following steps.
S1: Spinning the supply reel at a first speed to provide the adhesive tape.
In an embodiment, the supply reel 11 spins at the first speed clockwise to deliver un-used adhesive tape 16. As the adhesive tape 16 is delivered, it sequentially passes through the first guide roller 14, the lifting roller 13, the second guide roller 15, and the take-up reel 12.
S2: moving the lifting roller along a lateral direction parallel to the glass substrate and pressing the flexible substrate, so that the flexible substrate is adhered to the first side of the adhesive tape.
The adhesive tape 16 has the first side and the second side opposite to each other. The lifting roller 13 contacts the second side of the adhesive tape 16. The first side of the adhesive tape 16 is the adhesive side and the flexible substrate 20 is adhered to the adhesive side of the adhesive tape 16.
In an embodiment, the method further includes the step of moving the lifting roller 13 perpendicularly relative to the flexible substrate and approaching the flexible substrate 20. Furthermore, the lifting roller 13 is moved from left to right along the lateral direction parallel to the glass substrate 30 to press the flexible substrate 20 so that the flexible substrate 20 is adhered to the first side of the adhesive tape 16.
The first guide roller 14 is disposed laterally between the lifting roller 13 and the supply reel 11, the second guide roller 15 is disposed laterally between the take-up reel 12 and the lifting roller 13. The first and second guide rollers 14 and 15 ensure that the flexible substrate 20 is pressed tightly against the first side of the adhesive tape 16.
S3: spinning the take-up reel at a second speed to retract the adhesive tape so that the flexible substrate adhered to the first side of the adhesive tape is lifted from the glass substrate.
It is understandable that the take-up reel 12 also spins clockwise to retract the adhesive tape 16. As the flexible substrate 20 is adhered to the first side of the adhesive tape 16, and as the take-up reel 12 spins at the second speed clockwise to reel in the adhesive tape 16, the pull by the adhesive tape 16 lifts the flexible substrate 20 adhered to the first side of the adhesive tape 16 is lifted from the glass substrate 30.
S4: engaging the UV lighting device so that it project UV light on the first side of the adhesive tape, causing the first side of the adhesive tape to lose its adhesiveness, and the flexible substrate being lifted from the adhesive tape.
After the flexible substrate 20 is lifted from the glass substrate 30, the flexible substrate 20 is still adhered to the first side of the adhesive tape 16. Since the adhesive tape 16 is one whose adhesiveness may be dissolved by exposure to UV light, the UV lighting device is engaged to emit UV light onto the first side of the adhesive tape 16. The first side of the adhesive tape 16 as such loses its adhesiveness, and the adhesive film on the first side of the adhesive tape 16 falls off, thereby lifting the flexible substrate 20 from the adhesive tape 16.
S5: spinning the take-up reel at a third speed to retract the adhesive tape.
The second end of the adhesive tape is connected to the take-up reel 12. Therefore, the take-up reel 12 spins to retract the adhesive tape 16 (i.e., the already used adhesive tape 16). In the present embodiment, after the flexible substrate 20 is lifted from the adhesive tape 16, the take-up reel 12 spins at the third speed clockwise to retract the adhesive tape 16.
The present invention teaches a device and a method for lifting flexible substrate. The device and method first achieve preliminary lifting of the flexible substrate through laser ablation. Then, the flexible substrate is adhered to an adhesive tape whose adhesiveness is dissolvable under UV light. The effective and gentle separation of the flexible substrate and the glass substrate is further achieved through the traction of adhesive tape. The adhesive side of the adhesive tape is then exposed to UV light so that its adhesiveness disappears. The flexible substrate as such is further lifted from the adhesive tape. The yield for lifting the flexible substrate is enhanced, and the cost is lower as the lifting device is simple and requires little extra expenses.
In the present specification, phrases such as “an embodiment,” “some embodiments,” “an example,” “some examples,” etc. means that their specified characteristic, structure, material, or feature described may be independently applied or jointly combined in at least one embodiment of the present invention. These phrases also are not necessarily refer to a same embodiment. Their characteristics, structures, materials, or features may be appropriately integrated in one or more embodiments.
Above are embodiments of the present invention, which does not limit the scope of the present invention. Any equivalent amendments within the spirit and principles of the embodiment described above should be covered by the protected scope of the invention.

Claims (11)

What is claimed is:
1. A device for lifting a flexible substrate from a glass substrate, comprising a supply reel, a take-up reel, a lifting roller, and an adhesive tape, wherein
the supply reel, the lifting roller, and the take-up reel are sequentially and laterally arranged from right to left and spin clockwise respectively;
locations of the supply reel and the take-up reel within the lifting device are fixed;
the adhesive tape has a first end connected to the supply reel, and has a second end connected to the take-up reel, and the adhesive tape has a first side and a second side opposite to each other;
the supply reel spins to deliver the adhesive tape; a circumferential side of the lifting roller contacts the second side of the adhesive tape; the lifting roller moves to right along a lateral direction parallel to the glass substrate and presses the flexible substrate so that the flexible substrate is adhered to the first side of the adhesive tape; and the take-up reel spin to retract the adhesive tape and the flexible substrate adhered to the first side of the adhesive tape is lifted from the glass substrate.
2. The device according to claim 1, further comprising a first guide roller fixedly disposed laterally between the lifting roller and the supply reel and a second guide roller fixedly disposed laterally between the take-up reel and the lifting roller; wherein the first and second guide rollers spin clockwise to deliver the adhesive tape and ensure that the flexible substrate is pressed tightly against the first side of the adhesive tape.
3. The device according to claim 2, wherein the adhesive tape is one whose adhesiveness is dissolvable under UV light.
4. The device according to claim 1, wherein the flexible substrate is configured with flexible components.
5. The device according to claim 1, wherein the adhesive tape is one whose adhesiveness is dissolvable under ultra-violet (UV) light.
6. The device according to claim 5, further comprising an UV lighting device, emitting UV light onto the first side of the adhesive tape, causing the first side of the adhesive tape to lose adhesiveness, thereby lifting the flexible substrate from the adhesive tape.
7. A method for lifting a flexible substrate from a glass substrate, comprising
providing a lifting device including a supply reel, a take-up reel, a lifting roller, an adhesive tape, and an UV lighting device, where the adhesive tape has a first side and a second side opposite to each other, the adhesive tape has a first end connected to the supply reel, and has a second end connected to the take-up reel, and the supply reel, the lifting roller, and the take-up reel are sequentially and laterally arranged from right to left, and the supply reel, the lifting roller, and the take-up reel spin clockwise respectively;
spinning the supply reel at a first speed to provide the adhesive tape;
moving the lifting roller to right along a lateral direction parallel to the glass substrate and pressing the flexible substrate, so that the flexible substrate is adhered to a first side of the adhesive tape;
spinning the take-up reel at a second speed to retract the adhesive tape so that the flexible substrate adhered to the first side of the adhesive tape is lifted from the glass substrate;
engaging the UV lighting device to project UV light on the first side of the adhesive tape, causing the first side of the adhesive tape to lose adhesiveness, and the flexible substrate being lifted from the adhesive tape; and
spinning the take-up reel at a third speed to retract the adhesive tape.
8. The method according to claim 7, wherein a circumferential side of the lifting roller contacts the second side of the adhesive tape.
9. The method according to claim 7, wherein a first guide roller is fixedly disposed laterally between the lifting roller and the supply reel; a second guide roller is fixedly disposed laterally between the take-up reel and the lifting roller; and the first and second guide rollers spin clockwise to deliver the adhesive tape and ensure that the flexible substrate is pressed tightly against the first side of the adhesive tape.
10. The method according to claim 7, wherein the flexible substrate is configured with flexible components.
11. The method according to claim 7, wherein the adhesive tape is one whose adhesiveness is dissolvable under UV light.
US16/136,846 2017-08-17 2018-09-20 Flexible substrate lifting device and method Active 2038-03-07 US10751985B2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
CN201710708601.1 2017-08-17
CN201710708601 2017-08-17
CN201710708601.1A CN107528009B (en) 2017-08-17 2017-08-17 Flexible substrate peeling device and peeling method
PCT/CN2017/108690 WO2019033566A1 (en) 2017-08-17 2017-10-31 Flexible substrate stripping device and stripping method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2017/108690 Continuation WO2019033566A1 (en) 2017-08-17 2017-10-31 Flexible substrate stripping device and stripping method

Publications (2)

Publication Number Publication Date
US20190054728A1 US20190054728A1 (en) 2019-02-21
US10751985B2 true US10751985B2 (en) 2020-08-25

Family

ID=65360944

Family Applications (1)

Application Number Title Priority Date Filing Date
US16/136,846 Active 2038-03-07 US10751985B2 (en) 2017-08-17 2018-09-20 Flexible substrate lifting device and method

Country Status (1)

Country Link
US (1) US10751985B2 (en)

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1087160A (en) * 1996-09-19 1998-04-07 Nec Eng Ltd Peeling mechanism for protective sheet on polarizing plate
JPH10172929A (en) 1996-12-16 1998-06-26 Sony Corp Protection tape peeling device
CN101002312A (en) 2004-07-30 2007-07-18 株式会社半导体能源研究所 Laminating system, IC sheet, scroll of IC sheet, and method for manufacturing IC chip
CN101154561A (en) 2006-09-29 2008-04-02 株式会社半导体能源研究所 Peeling apparatus and manufacturing method of semiconductor device
JP2011187641A (en) 2010-03-08 2011-09-22 Hitachi Cable Ltd Method for manufacturing flexible board
CN103317824A (en) 2013-06-19 2013-09-25 深圳市华星光电技术有限公司 Release paper stripping device
CN103786417A (en) 2014-02-11 2014-05-14 京东方科技集团股份有限公司 Stripping device and stripping method
US20140234664A1 (en) * 2013-02-20 2014-08-21 Semiconductor Energy Laboratory Co., Ltd. Peeling method, semiconductor device, and peeling apparatus
CN104347449A (en) 2013-07-24 2015-02-11 上海和辉光电有限公司 Peeling apparatus and peeling method
US20150319843A1 (en) * 2012-12-12 2015-11-05 Hana Micron Inc. Memory Card Systems Comprising Flexible Integrated Circuit Element Packages, and Methods for Manufacturing Said Memory Card Systems
CN105047598A (en) 2015-06-23 2015-11-11 上海东煦电子科技有限公司 Membrane pasting method for PCB substrate cutting technology
JP2015231869A (en) 2014-05-12 2015-12-24 株式会社石山製作所 Application apparatus and film feeding device
CN106098965A (en) 2016-06-15 2016-11-09 昆山国显光电有限公司 Flexible base board stripping off device and flexible base board stripping means
US20160347047A1 (en) 2015-05-27 2016-12-01 Semiconductor Energy Laboratory Co., Ltd. Separation Apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013192546A1 (en) * 2012-06-22 2013-12-27 Cytomx Therapeutics, Inc. Activatable antibodies having non-binding steric moieties and mehtods of using the same

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1087160A (en) * 1996-09-19 1998-04-07 Nec Eng Ltd Peeling mechanism for protective sheet on polarizing plate
JPH10172929A (en) 1996-12-16 1998-06-26 Sony Corp Protection tape peeling device
CN101002312A (en) 2004-07-30 2007-07-18 株式会社半导体能源研究所 Laminating system, IC sheet, scroll of IC sheet, and method for manufacturing IC chip
CN101154561A (en) 2006-09-29 2008-04-02 株式会社半导体能源研究所 Peeling apparatus and manufacturing method of semiconductor device
JP2011187641A (en) 2010-03-08 2011-09-22 Hitachi Cable Ltd Method for manufacturing flexible board
US20150319843A1 (en) * 2012-12-12 2015-11-05 Hana Micron Inc. Memory Card Systems Comprising Flexible Integrated Circuit Element Packages, and Methods for Manufacturing Said Memory Card Systems
US20140234664A1 (en) * 2013-02-20 2014-08-21 Semiconductor Energy Laboratory Co., Ltd. Peeling method, semiconductor device, and peeling apparatus
CN103317824A (en) 2013-06-19 2013-09-25 深圳市华星光电技术有限公司 Release paper stripping device
CN104347449A (en) 2013-07-24 2015-02-11 上海和辉光电有限公司 Peeling apparatus and peeling method
CN103786417A (en) 2014-02-11 2014-05-14 京东方科技集团股份有限公司 Stripping device and stripping method
JP2015231869A (en) 2014-05-12 2015-12-24 株式会社石山製作所 Application apparatus and film feeding device
US20160347047A1 (en) 2015-05-27 2016-12-01 Semiconductor Energy Laboratory Co., Ltd. Separation Apparatus
CN105047598A (en) 2015-06-23 2015-11-11 上海东煦电子科技有限公司 Membrane pasting method for PCB substrate cutting technology
CN106098965A (en) 2016-06-15 2016-11-09 昆山国显光电有限公司 Flexible base board stripping off device and flexible base board stripping means

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
English Abstract of JP 10-087160 (Year: 2020). *
Machine translation of JP 10-087160 (Year: 2020). *

Also Published As

Publication number Publication date
US20190054728A1 (en) 2019-02-21

Similar Documents

Publication Publication Date Title
CN113421839B (en) Micro light emitting diode transfer method and manufacturing method
US8951387B2 (en) Method and apparatus for peeling protection film for flat display panel
US20190027642A1 (en) Micro-LED Transfer Method and Manufacturing Method
US20210091057A1 (en) Driving substrate and manufacturing method thereof, and micro led bonding method
TWI520850B (en) An electronic device and fabricating method thereof
US10573832B2 (en) Flexible substrate and manufacturing method thereof, and flexible display device
US9818940B2 (en) Large-sized AMOLED display substrate and manufacturing method thereof
KR20100070730A (en) Method of flexible display device
JP5689258B2 (en) Manufacturing method of flexible TFT substrate
JPWO2011142089A1 (en) Flexible semiconductor device, manufacturing method thereof, and image display device
WO2014101080A1 (en) Method for manufacturing flexible electronic device and substrate for manufacturing flexible electronic device
US20140020844A1 (en) Film peeling apparatus
US10438911B2 (en) Electronic component, transposing component, method for fabricating the electronic component, and method for transposing a micro-element
JP4832780B2 (en) Mask forming method, mask material, and pattern film forming system using the same
US10751985B2 (en) Flexible substrate lifting device and method
US20240113083A1 (en) Led chip transfer method and display panel
US20190081178A1 (en) Thin film transistor, array substrate, and method for fabricating the same
JP2009266766A (en) Tape attaching device, coating system and masking tape
TWI559595B (en) Method of manufacturing organic light-emitting display apparatus
JP2006171454A (en) Manufacturing method of display device
KR100669792B1 (en) Method of manufacturing a forming substrate, method of manufacturing a flat panel display device thereused, and pre-bonding apparatus of flexible substrate
WO2019033566A1 (en) Flexible substrate stripping device and stripping method
KR100623697B1 (en) Method for forming organic layer and method for fabricating OLED
CN108284661B (en) Stripping equipment and stripping method for polaroid
WO2018219137A1 (en) Method for manufacturing flexible panel

Legal Events

Date Code Title Description
AS Assignment

Owner name: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DIS

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LIU, DIAN;REEL/FRAME:046929/0149

Effective date: 20180727

Owner name: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD., CHINA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LIU, DIAN;REEL/FRAME:046929/0149

Effective date: 20180727

FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STPP Information on status: patent application and granting procedure in general

Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT VERIFIED

STCF Information on status: patent grant

Free format text: PATENTED CASE

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 4