CN107623089B - The separation method and flexible OLED display of flexible OLED display - Google Patents
The separation method and flexible OLED display of flexible OLED display Download PDFInfo
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- CN107623089B CN107623089B CN201710910923.4A CN201710910923A CN107623089B CN 107623089 B CN107623089 B CN 107623089B CN 201710910923 A CN201710910923 A CN 201710910923A CN 107623089 B CN107623089 B CN 107623089B
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- 238000000926 separation method Methods 0.000 title claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 238000001179 sorption measurement Methods 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims description 10
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 238000005538 encapsulation Methods 0.000 claims description 2
- 238000005096 rolling process Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- -1 polyethylene terephthalate Polymers 0.000 claims 1
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 1
- 239000005020 polyethylene terephthalate Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 5
- 239000010408 film Substances 0.000 description 3
- 238000002955 isolation Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Theoretical Computer Science (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present invention provides a kind of separation methods of flexible OLED display,, comprising steps of OLED display component using vacuum adsorption table vacuum suction after laser lift-off, OLED display component includes by the hard substrate of vacuum adsorption table vacuum suction and the flexible OLED display being formed on hard substrate for it；Make elastic network(s) plate face to flexible OLED display, elastic web plate includes plate ontology and is set to intrinsic at least two idler wheel of plate；Idler wheel is mobile towards flexible OLED display, to drive the part of first surface mobile to flexible OLED display and contact with flexible OLED display；Idler wheel moves away from each other and keeps the pressure to flexible OLED display, so that flexible OLED display is separated with hard substrate；Plate ontology is mobile towards flexible OLED display, so that first surface vacuum suction flexible OLED display；Vacuum adsorption table is moved along the direction far from flexible OLED display.Separation method of the invention has good effect in terms of pitch time, yield and protection.
Description
Technical field
The invention belongs to display manufacture technology fields, in particular, being related to a kind of separation side of flexible OLED display
Method and flexible OLED display.
Background technique
In recent years, Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED) display becomes state
Inside and outside very popular emerging flat-panel screens product, this is because when OLED display has self-luminous, wide viewing angle, short reaction
Between, high-luminous-efficiency, wide colour gamut, low-work voltage, thin thickness, the display that large scale and deflection can be made and processing procedure it is simple
Etc. characteristics, and it also have low cost potentiality.
With the development of industrial technology technology, isolation technics after laser lift-off (LLO) it is universal be applied to flexibility
OLED display field.However, for the isolation technics of the flexible OLED display after existing laser lift-off, in pitch time
(tacktime), the effect of yield etc. is not good enough.
Summary of the invention
In order to solve the above-mentioned problems of the prior art, the purpose of the present invention is to provide one kind in pitch time
(tacktime) and the separation method and flexible OLED display of the flexible OLED display of yield etc. with good result.
According to an aspect of the present invention, it provides a kind of separation method of flexible OLED display comprising step: utilizing
OLED display component of the vacuum adsorption table vacuum suction after laser lift-off；The OLED display component includes being inhaled by the vacuum
The hard substrate of attached vacuum suction and the flexible OLED display being formed on the hard substrate, the flexibility OLED are aobvious
Show that there are minim gap and/or bubbles between device and the hard substrate；Make elastic network(s) plate face to the flexible OLED display；
The elasticity web plate includes plate ontology and is set to intrinsic at least two idler wheel of the plate, and the idler wheel is close to the plate
The first surface towards the flexible OLED display of ontology；The idler wheel is mobile towards the flexible OLED display, with
It drives the part of the first surface mobile to the flexible OLED display and is contacted with the flexible OLED display；It is described
Idler wheel moves away from each other and keeps the pressure to the flexible OLED display so that the flexible OLED display with it is described
Minim gap and/or bubble between hard substrate discharge, thus the flexible OLED display and the hard substrate
Separation；The plate ontology is mobile towards the flexible OLED display so that the first surface all with the flexibility OLED
Flexible OLED display described in display contact and vacuum suction；The vacuum adsorption table is shown along far from the flexibility OLED
The direction of device is mobile, so that the flexible OLED display and the hard substrate are away from each other.
Further, it is aobvious to be fully located at the flexibility OLED for projection of the plate ontology on the flexible OLED display
Show in device.
Further, the first edge institute adjacent thereto of projection of the plate ontology on the flexible OLED display
State the of the distance between edge of flexible OLED display and projection of the plate ontology on the flexible OLED display
The distance between the edge of the two edges flexible OLED display adjacent thereto is equal, first edge and described second
Edge is opposite.
Further, the center portion of first surface described in at least two idler wheels face.
Further, the hard substrate is glass substrate.
Further, the plate ontology is made of pet material.
Further, at least two idler wheel is identical, and the idler wheel is made of rubber material.
Further, the flexible OLED display includes: flexible substrates, is formed on the hard substrate；Film is brilliant
Body tube layer is formed in the flexible substrates；Organic Light Emitting Diode layer is formed on the tft layer；Film envelope
Layer is filled, is formed on the Organic Light Emitting Diode layer and the tft layer, to encapsulate the Organic Light Emitting Diode
Layer.
Further, the flexible substrates are made of polyimide material；After through laser lift-off, the flexible substrates
There are minim gap and/or bubbles between the hard substrate.
According to another aspect of the present invention, a kind of flexible OLED formed that separated by above-mentioned separation method is additionally provided to show
Show device.
Beneficial effects of the present invention: the separation method of flexible OLED display of the invention is in pitch time (tack
Time), yield and protection flexible OLED display etc. have good effect.
Detailed description of the invention
What is carried out in conjunction with the accompanying drawings is described below, above and other aspect, features and advantages of the embodiment of the present invention
It will become clearer, in attached drawing:
Fig. 1 is the processing procedure figure of the separation method of the flexible OLED display of embodiment according to the present invention；
Fig. 2 is the schematic diagram of projection of the elastic web plate according to the present invention on flexible OLED display.
Specific embodiment
Hereinafter, with reference to the accompanying drawings to detailed description of the present invention embodiment.However, it is possible to come in many different forms real
The present invention is applied, and the present invention should not be construed as limited to the specific embodiment illustrated here.On the contrary, providing these implementations
Example is in order to explain the principle of the present invention and its practical application, to make others skilled in the art it will be appreciated that the present invention
Various embodiments and be suitable for the various modifications of specific intended application.
In the accompanying drawings, in order to understand device, the thickness of layer and region is exaggerated.Identical label is in the whole instruction and attached
Identical component is indicated in figure.
Fig. 1 is the processing procedure figure of the separation method of the flexible OLED display of embodiment according to the present invention.
Specifically, the separation method of the flexible OLED display of embodiment according to the present invention includes step 1 to step
Six.
Step 1: (a) figure in referring to Fig.1, it is aobvious using OLED of 100 vacuum suction of vacuum adsorption table after laser lift-off
Show component 200.
Specifically, as an implementation, OLED display component 200 may include by vacuum adsorption table vacuum suction
Hard substrate 210 and the flexible OLED display 220 being formed on hard substrate 210.After by laser lift-off, hard
There are small gap and/or bubbles between substrate 210 and flexible OLED display 220.
In addition, it should be noted that, the hard substrate 210 of the present embodiment can be for example glass substrate, but the present invention is not
Limited to this, such as it is also possible to the resin substrate etc. of hard.
Further, as one embodiment of the present invention, flexible OLED display 220 may include: flexible substrates
221, it is formed on hard substrate 210；Tft layer 222 is formed in flexible substrates 221；Organic Light Emitting Diode layer
223, it is formed on tft layer 222；Thin-film encapsulation layer 224 is formed in Organic Light Emitting Diode layer 223 and film crystal
In tube layer 222, with encapsulating organic light emitting diode layer 223.Here, the structure of flexible OLED display 220 is only a kind of example,
The structure of flexible OLED display of the invention is not limited thereto.
Flexible substrates 221 can be made of polyimide material；But the present invention is not restricted to this.When through laser lift-off
Later, there are minim gap and/or bubbles between flexible substrates 221 and hard substrate 210.
After having carried out step 1, step 2 is carried out.
Step 2: (b) figure in referring to Fig.1 makes elastic web plate 300 towards flexible OLED display 220.
Specifically, as an implementation, elastic web plate 300 can wrap rubbing board ontology 310 and be set to plate ontology
Two idler wheels 320 in 310, first surface towards flexible OLED display 220 of two idler wheels 320 close to plate ontology 310
(not shown).Here, the structure of the elastic web plate 300 in the present embodiment is only a kind of example, the knot of elastic web plate of the invention
Structure is not limited thereto.
In addition, present embodiment illustrates two idler wheels 320, but the present invention does not make specifically the quantity of idler wheel 320
Limit, can the quantity according to actual needs to idler wheel 320 be configured, but minimum need two.
Further, plate ontology 310 can be made of pet material, but the present invention is not intended to limit
In this, such as can also be made of other elastic materials.
In addition, two idler wheels 320 can be identical, and each idler wheel 320 can be made of rubber material, but this hair
It is bright to be not restricted to this, such as the main body of idler wheel 320 can be made of steel, and the materials such as rubber are covered except the main body.
In addition, after elastic web plate 300 is towards flexible OLED display 220, elastic web plate 300 is in flexible OLED display
Projection on 220 is fully located in flexible OLED display 220.Further, as shown in Fig. 2, elastic web plate 300 is in flexibility
The first edge (i.e. left side edge in Fig. 2) flexible OLED display 220 adjacent thereto of projection in OLED display 220
The distance between edge (i.e. left side edge in Fig. 2) and elastic web plate 300 projection on flexible OLED display 220
Edge (the i.e. right edge in Fig. 2 of the second edge (i.e. right edge in Fig. 2) flexible OLED display 220 adjacent thereto
Edge) the distance between it is equal, the first edge described here is opposite with second edge.
Further, elastic web plate 300 is (i.e. upper in Fig. 2 at the third edge of the projection on flexible OLED display 220
Side edge) flexible OLED display 220 adjacent thereto the distance between edge (i.e. upper side edge edge in Fig. 2) and elastic network(s)
The 4th edge (i.e. lower side edge in Fig. 2) flexibility adjacent thereto of projection of the plate 300 on flexible OLED display 220
The distance between the edge (i.e. lower side edge in Fig. 2) of OLED display 220 is equal, third edge described here and described the
Four edges are opposite.
In addition, two idler wheels 320 be close to each other and face described in first surface center portion.Further, two rollings
Wheel 320 is close to each other and the center portion of face flexible OLED display 220, but the present invention is not restricted to this.In this way, can be with
Idler wheel 320 is set to apply the pressure of homogenization.
After having carried out step 2, step 3 is carried out.
Step 3: (c) figure in referring to Fig.1, idler wheel 320 is mobile towards flexible OLED display 220, to drive described the
The part on one surface is mobile to flexible OLED display 220 and contacts with flexible OLED display 220.
That is, plate ontology 310 does not move, only shifting roller 320 in the step 3.Since plate ontology 310 has
Elasticity, therefore idler wheel 320 can contact flexible OLED display 220 with the part of movable plate ontology 310, and show to flexible OLED
Device 220 applies pressure.
After having carried out step 3, step 4 is carried out.
Step 4: (d) figure in referring to Fig.1, two idler wheels 320 are moved away from each other and are kept to flexible OLED display
220 pressure, so that the minim gap and/or bubble between flexible OLED display 220 and hard substrate 210 discharge,
To which flexible OLED display 220 is separated with hard substrate 210.
In the step 4, between flexible OLED display 220 and hard substrate 210 be separated into it is atomic it is small separate, i.e.,
The separation that naked eyes can not be found out.
After having carried out step 4, step 5 is carried out.
Step 5: (e) figure in referring to Fig.1, plate ontology 310 is mobile towards flexible OLED display 220, so that plate ontology
310 first surface is all contacted with flexible OLED display 220 and vacuum suction flexible OLED display 220.
In the step 5, the first surface of plate ontology 310 is all contacted with flexible OLED display 220 and vacuum suction
During flexible OLED display 220, flexible OLED display 220 will not be made to recombine with hard substrate 210, i.e., at this
It still keeps atomic between flexible OLED display 220 and hard substrate 210 during a small to separate.
After having carried out step 5, step 6 is carried out.
Step 6: (f) figure in referring to Fig.1,100 vacuum suction of vacuum adsorption table hard substrate 210 along far from soft
Property OLED display 220 direction it is mobile so that flexible OLED display 220 and hard substrate 210 are away from each other.
After step 6, flexible OLED display 220 and hard substrate 210 can be made completely away to complete
The separation of flexible OLED display 220.
In conclusion the separation method of the flexible OLED display of embodiment according to the present invention, in pitch time (tack
Time), yield and protection flexible OLED display etc. have good effect.
Although the present invention has shown and described referring to specific embodiment, it should be appreciated by those skilled in the art that:
In the case where not departing from the spirit and scope of the present invention being defined by the claims and their equivalents, can carry out herein form and
Various change in details.
Claims (10)
1. a kind of separation method of flexible OLED display, which is characterized in that comprising steps of
Utilize OLED display component of the vacuum adsorption table vacuum suction after laser lift-off；The OLED display component includes by institute
The flexible OLED display stating the hard substrate of vacuum adsorption table vacuum suction and being formed on the hard substrate, it is described soft
There are minim gap and/or bubbles between property OLED display and the hard substrate；
Make elastic network(s) plate face to the flexible OLED display；The elasticity web plate includes plate ontology and is set to the plate sheet
Intracorporal at least two idler wheel, first surface towards the flexible OLED display of the idler wheel close to the plate ontology；
The idler wheel is mobile towards the flexible OLED display, to drive the part of the first surface to the flexibility OLED
Display is mobile and contacts with the flexible OLED display；
The idler wheel moves away from each other and keeps the pressure to the flexible OLED display, so that the flexibility OLED is shown
Minim gap and/or bubble between device and the hard substrate discharge, thus the flexible OLED display with it is described
Hard substrate separation；
The plate ontology is mobile towards the flexible OLED display, so that the first surface is all aobvious with the flexibility OLED
Show flexible OLED display described in device contact and vacuum suction；
The vacuum adsorption table is moved along the direction far from the flexible OLED display, so that the flexible OLED display
Away from each other with the hard substrate.
2. separation method according to claim 1, which is characterized in that the plate ontology is on the flexible OLED display
Projection be fully located in the flexible OLED display.
3. separation method according to claim 2, which is characterized in that the plate ontology is on the flexible OLED display
The distance between the edge of the first edge flexible OLED display adjacent thereto of projection and the plate ontology in institute
State between the edge of the second edge flexible OLED display adjacent thereto of the projection on flexible OLED display away from
From equal, first edge is opposite with second edge.
4. separation method according to any one of claims 1 to 3, which is characterized in that at least two idler wheels face institute
State the center portion of first surface.
5. separation method according to claim 1, which is characterized in that the hard substrate is glass substrate.
6. separation method according to claim 1, which is characterized in that the plate ontology is by polyethylene terephthalate
Material is made.
7. separation method according to claim 1, which is characterized in that at least two idler wheel is identical, the rolling
Wheel is made of rubber material.
8. separation method according to claim 1, which is characterized in that the flexible OLED display includes:
Flexible substrates are formed on the hard substrate；
Tft layer is formed in the flexible substrates；
Organic Light Emitting Diode layer is formed on the tft layer；
Thin-film encapsulation layer is formed on the Organic Light Emitting Diode layer and the tft layer, described organic to encapsulate
LED layers.
9. separation method according to claim 8, which is characterized in that the flexible substrates are made of polyimide material；
After through laser lift-off, there are minim gap and/or bubbles between the flexible substrates and the hard substrate.
10. a kind of separate the flexible OLED display formed by the described in any item separation methods of claim 1 to 9.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710910923.4A CN107623089B (en) | 2017-09-29 | 2017-09-29 | The separation method and flexible OLED display of flexible OLED display |
| PCT/CN2017/110851 WO2019061719A1 (en) | 2017-09-29 | 2017-11-14 | Method for separating flexible oled display and flexible oled display |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710910923.4A CN107623089B (en) | 2017-09-29 | 2017-09-29 | The separation method and flexible OLED display of flexible OLED display |
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| Publication Number | Publication Date |
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| CN107623089A CN107623089A (en) | 2018-01-23 |
| CN107623089B true CN107623089B (en) | 2019-07-26 |
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| WO (1) | WO2019061719A1 (en) |
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| CN110491993B (en) * | 2019-07-24 | 2022-06-10 | 武汉华星光电半导体显示技术有限公司 | Preparation method of PI substrate and display device thereof |
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| KR101787977B1 (en) * | 2011-04-21 | 2017-10-19 | 엘지디스플레이 주식회사 | Release Apparatus |
| JP2013067046A (en) * | 2011-09-21 | 2013-04-18 | Toppan Printing Co Ltd | Printing method |
| KR101894089B1 (en) * | 2011-10-24 | 2018-08-31 | 엘지디스플레이 주식회사 | Manufacturing Method of Flexible Display Device |
| KR20140062368A (en) * | 2012-11-14 | 2014-05-23 | 엘지디스플레이 주식회사 | Method of fabricating the flexible display device |
| CN104347449A (en) * | 2013-07-24 | 2015-02-11 | 上海和辉光电有限公司 | Peeling apparatus and peeling method |
| CN103531442B (en) * | 2013-10-25 | 2015-03-11 | 京东方科技集团股份有限公司 | Preparation method of flexible substrate |
| CN103682177B (en) * | 2013-12-16 | 2015-03-25 | 深圳市华星光电技术有限公司 | Manufacturing method of flexible OLED panel |
| KR101576546B1 (en) * | 2013-12-27 | 2015-12-10 | 주식회사 에스에프에이 | Carrier glass remover |
| KR102405122B1 (en) * | 2015-09-10 | 2022-06-08 | 삼성디스플레이 주식회사 | Apparatus for separating substrate and method of separating substrate using the same |
| CN106920897B (en) * | 2015-12-24 | 2019-02-12 | 昆山国显光电有限公司 | Flexible OLED panel preparation method |
| CN106098965B (en) * | 2016-06-15 | 2018-08-21 | 昆山国显光电有限公司 | Flexible base board stripping off device and flexible base board stripping means |
| CN205880416U (en) * | 2016-06-29 | 2017-01-11 | 京东方科技集团股份有限公司 | Base plate stripping off device |
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| WO2019061719A1 (en) | 2019-04-04 |
| CN107623089A (en) | 2018-01-23 |
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