CN106052597A - Portable high-frequency-response long-working-distance auto-collimation device and method - Google Patents
Portable high-frequency-response long-working-distance auto-collimation device and method Download PDFInfo
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- CN106052597A CN106052597A CN201610639082.3A CN201610639082A CN106052597A CN 106052597 A CN106052597 A CN 106052597A CN 201610639082 A CN201610639082 A CN 201610639082A CN 106052597 A CN106052597 A CN 106052597A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
Abstract
The invention relates to a portable high-frequency-response long-working-distance auto-collimation device and method, and belongs to the fields of precise measurement technology and optical engineering. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system. According to the method, the reflector is adjusted so that a reflection light beam returns to the center of an image plane of the feedback imaging system, and an angle deflection measuring device of the reflector is used to obtain angle change of the surface of a tested object. According to the invention, the reflector is added to a traditional auto-collimation angle measuring system, the problem that reflection light of the tested object is deviated the measuring system and further measurement cannot be carried out can be solved, and the auto-collimation work range is increased under the same work distance, or the working distance is increased under the same work range; concrete designs of the collimating mirror, the feedback imaging system, the reflector and the like enable the auto-collimating device to be small, portable and high in measuring precision; the measuring precision is high under low sampling frequency; and the measurement speed is very high.
Description
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to a kind of portable high frequency and ring big work
Make away from autocollimation and method.
Background technology
In Technology of Precision Measurement field, optical engineering field, the most advanced branches of science experiment field and high-end precision assembly manufacture neck
In territory, urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
Technology and the development of instrument and equipment.
At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angle degree
Measure；Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
Field, two round light that Laser Autocollimator is the most vertical with bidimensional are tested in optical engineering field and the most advanced branches of science
Grid combine, and can carry out the measurement of space angle；Formed position reference by two-way Laser Autocollimator, optical axis two-by-two can be carried out
Angle or the measurement of collimation.Angle working range tens rads to tens jiaos points.
Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure tip
Scientific experiments device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line of linear motion benchmark
The depth of parallelism of precision and two-by-two motion benchmark and perpendicularity.
Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, has wide in above-mentioned field
General application.
Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From
The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 surface
The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This Jin Yuan road
The condition returned limits so that the following two aspect shortcomings of this system existence:
The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can
Cause the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and the survey of micro-angle
Amount；
The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection light
Axle and autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, enter
And cause realizing auto-collimation and micro-angular surveying.
Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.
Summary of the invention
For two problems existing for tradition autocollimator, the invention discloses a kind of portable high frequency and ring big working distance
Autocollimation and method, compared with tradition autocollimator, have and dramatically increase auto-collimation work model under identical operating distance
Enclose, or under identical auto-collimation working range, dramatically increase the technical advantage of operating distance.
The object of the present invention is achieved like this:
A kind of portable high frequency rings big working distance autocollimation, including light source, reflective collimating mirror, reflecting mirror and
Feedback imaging system, described reflecting mirror is provided with angle adjustment measurement apparatus；The light beam of light source outgoing, through reflective collimation
After mirror is collimated into collimated light beam, then reflected by reflecting mirror, incide the surface of measured object；From the light beam of measured object surface reflection,
Again after reflecting mirror reflects, feedback imaging system gather imaging；
Described feedback imaging system is the one in following two form:
The first, it is arranged between light source and reflective collimating mirror, including the first feedback spectroscope and be arranged on reflective standard
Imageing sensor at straight mirror foci；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively through reflection
Formula collimating mirror transmission, first feedback dichroic mirror, gathered imaging by imageing sensor；Vertical with optical axis on measured object surface
Under the conditions of, imageing sensor is become a picture in image plane center position；
The second, be arranged between reflective collimating mirror and reflecting mirror, including the first feedback spectroscope, first feedback object lens and
It is arranged on the imageing sensor of reflective collimating mirror focal point；From the light beam of measured object surface reflection, then reflect through reflecting mirror
After, successively through first feed back dichroic mirror, first feedback object lens transmission, gathered imaging by imageing sensor；At measured object
Under conditions of surface is vertical with optical axis, imageing sensor is become a picture in image plane center position；
Described angle adjustment measurement apparatus includes arranging angular adjustment apparatus on the mirror, dress is measured in angular deflection
Putting and universal drive shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measurement apparatus includes first
Reflecting mirror, the second reflecting mirror, the first laser interferometer of corresponding first reflector position and corresponding second reflector position
Second laser interferometer；First driver, the first reflecting mirror and universal drive shaft are point-blank, the second driver, second anti-
Penetrate mirror and universal drive shaft point-blank, and the first driver second driver vertical with the line of universal drive shaft is with universal
The line of axle.
A kind of portable high frequency big working distance of sound ringing realization on big working distance autocollimation at above-mentioned portable high frequency
Auto-collimation method, comprises the following steps:
Step a, some bright light source, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step b, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return
To image plane center position；
Step c, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains
Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
Above-mentioned portable high frequency rings big working distance autocollimation, also includes Wavefront detecting system and wavefront compensation system；
Described Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation
At least one in wave front detector；Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation ripple
Front detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged on the two of reflecting mirror
In secondary reflection light path；
Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator；Mend
Repay the light beam of light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then adjusted by transmission liquid crystal spatial light modulator
System, incides on Wavefront detecting spectroscope.
A kind of portable high frequency big working distance of sound ringing realization on big working distance autocollimation at above-mentioned portable high frequency
Auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance；
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return
To image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains
Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
A kind of portable high frequency big working distance of sound ringing realization on big working distance autocollimation at above-mentioned portable high frequency
Auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance and reflecting mirror deformation；
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return
To image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains
Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
A kind of portable high frequency big working distance of sound ringing realization on big working distance autocollimation at above-mentioned portable high frequency
Auto-collimation method, it is desirable to Wavefront detecting system includes Wavefront detecting spectroscope, air agitation wave front detector and reflecting mirror simultaneously
Deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation；
Step e, imageing sensor imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver and the second driver to adjust mirror angle, make imageing sensor be become a picture to return
To image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer obtains, and the position that the second laser interferometer obtains
Move changes delta x2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain measured object surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
Beneficial effect:
Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement on the mirror is set
Device, this structure is arranged, it is possible to has bigger drift angle or there is relatively larger transverse position between measured object incident illumination and reflection light
In the case of shifting, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also fed back imaging
System receives, and then is prevented effectively from measured object reflection light deviation measurement system and causes the problem that cannot measure, and then makes this
Invent to have under identical operating distance, dramatically increase auto-collimation working range, or significantly increase under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition, the present invention also has following a few technical advantage:
The first, reflective collimating mirror is selected, although add manufacture difficulty, improve cost of manufacture, but this structure
There are the following three irreplaceable technical advantages of aspect: the most reflective collimating mirror is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is the widest, and the advantage of its certainty of measurement is the most obvious；3rd is by plating
Membrane technology, it is possible to the heat absorption realizing reflective collimating mirror is far smaller than transmission-type, is prevented effectively from sending out of collimating mirror thermal deformation problem
Raw, this not only enables whole system mate high power light source, and is also beneficial to ensure the measuring precision；
The second, select imageing sensor as the image device in feedback imaging system, utilize image area sensor big
Feature, it is ensured that in the case of measured object reflection light and incident illumination drift angle are relatively big, reflection light still is able to enter optical system
Entrance pupil, without departing from range of receiving, then matches with reflecting mirror, it is achieved reflection light quickly return compensation in real time so that the present invention
Auto-collimation working range or operating distance are greatly extended；
3rd, select laser interferometer as angular deflection measurement apparatus so that the present invention can in high sample frequency (
High energy reaches 2000Hz) under complete angular surveying, i.e. there is the highest measuring speed；If the first reflecting mirror and the second reflecting mirror
Use prism of corner cube, it is also possible to the optical characteristics utilizing prism of corner cube inclined for incident ray turnback to be returned, make the angle of the present invention
Degree measurement scope is greatly enhanced, i.e. the present invention has very while high measurement speed, also has the technology of wide-angle range
Advantage；
4th, the present invention additionally uses techniques below: the first driver, the first reflecting mirror and universal drive shaft are straight at one article
On line, the second driver, the second reflecting mirror and universal drive shaft point-blank, and the company of the first driver and universal drive shaft
Vertical second driver of line and the line of universal drive shaft；The orthogonal two dimension of this two lines is arranged so that different line sides
To data non-interference, it is not necessary to decoupling computing, so can conveniently demarcate, simplify calculating process, improve measuring speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.
Fig. 2 is the first structural representation that portable high frequency of the present invention rings big working distance autocollimation specific embodiment one
Figure.
Fig. 3 is the structural representation of angle adjustment measurement apparatus.
Fig. 4 is the second structural representation that portable high frequency of the present invention rings big working distance autocollimation specific embodiment one
Figure.
Fig. 5 is the structural representation that portable high frequency of the present invention rings big working distance autocollimation specific embodiment two.
Fig. 6 is the structural representation that portable high frequency of the present invention rings big working distance autocollimation specific embodiment three.
Fig. 7 is the structural representation that portable high frequency of the present invention rings big working distance autocollimation specific embodiment four.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivings
Device, 412 second drivers, 425 first reflecting mirrors, 426 second reflecting mirrors, 427 first laser interferometer, 428 second swash
Optical interferometer, 43 universal drive shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens,
65 imageing sensors, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflections
Mirror deformation wave front detector, 8 wavefront compensation system, 81 compensatory lights, 82 compensation collimating mirror, 83 transmission liquid crystal spatial light
Manipulator.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The present embodiment is that portable high frequency rings big working distance autocollimation embodiment.
The portable high frequency of the present embodiment rings big working distance autocollimation, and structural representation is as shown in Figure 2.This auto-collimation
Device includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feedback imaging system 6, and described reflecting mirror 3 is provided with angle
Degree adjusts measurement apparatus 4；The light beam of light source 1 outgoing, after reflective collimating mirror 22 is collimated into collimated light beam, then by reflecting mirror
3 reflections, incide the surface of measured object 5；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, by feeding back
Imaging system 6 gathers imaging；
Described feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope 61
With the imageing sensor 65 being arranged on reflective collimating mirror 22 focal point；From the light beam of measured object 5 surface reflection, then through reflection
After mirror 3 reflection, successively reflect through the transmission of reflective collimating mirror 22, the first feedback spectroscope 61, gathered by imageing sensor 65
Imaging；Under conditions of measured object 5 surface is vertical with optical axis, imageing sensor 65 is become a little as in image plane center position；
Described angle adjustment measurement apparatus 4 includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection
Putting and universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measurement apparatus
Including first reflecting mirror the 425, second reflecting mirror 426, the first laser interferometer 427 of corresponding first reflecting mirror 425 position and
Second laser interferometer 428 of corresponding second reflecting mirror 426 position；First driver the 411, first reflecting mirror 425 and universal
Axle 43 point-blank, second driver the 412, second reflecting mirror 426 and universal drive shaft 43 point-blank, and
One driver 411, second driver 412 vertical with the line of universal drive shaft 43 and the line of universal drive shaft 43；As shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 can also select following structure: is arranged on reflection
Between formula collimating mirror 22 and reflecting mirror 3, feed back object lens 63 including the first feedback spectroscope 61, first and be arranged on reflective collimation
The imageing sensor 65 of mirror 22 focal point；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, successively pass through
First feedback spectroscope 61 reflect, first feedback object lens 63 transmission, gathered imaging by imageing sensor 65；On measured object 5 surface
Under conditions of vertical with optical axis, imageing sensor 65 is become a little as in image plane center position；As shown in Figure 4.
Specific embodiment two
The present embodiment is that portable high frequency rings big working distance autocollimation embodiment.
The portable high frequency of the present embodiment rings big working distance autocollimation, and structural representation is as shown in Figure 5.Concrete real
On the basis of executing example one, the portable high frequency of the present embodiment rings big working distance autocollimation and is additionally provided with Wavefront detecting system 7
With wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；Described wavefront
Detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is that portable high frequency rings big working distance autocollimation embodiment.
The portable high frequency of the present embodiment rings big working distance autocollimation, and structural representation is as shown in Figure 6.Concrete real
On the basis of executing example one, the portable high frequency of the present embodiment rings big working distance autocollimation and is additionally provided with Wavefront detecting system 7
With wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；Described ripple
Front detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting and divides
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is that portable high frequency rings big working distance autocollimation embodiment.
The portable high frequency of the present embodiment rings big working distance autocollimation, and structural representation is as shown in Figure 7.Concrete real
On the basis of executing example one, the portable high frequency of the present embodiment rings big working distance autocollimation and is additionally provided with Wavefront detecting system 7
With wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
Surveying device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3
Secondary reflection light path on；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, following 2 needs are also had to illustrate:
The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select to drive
The motor of speed or motor servo driver, can select again the piezoelectric ceramic actuator driving precision higher, also
Motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
It is actually needed and rationally selects.
The second, in all above autocollimation embodiment, it is anti-that angular deflection measurement apparatus all only includes two pairs of planes
Penetrating the combination of mirror and laser interferometer, this design acquiescence reflecting mirror 3 does not the most produce translation and makes；As
Fruit produces translation at work in view of reflecting mirror 3 and affects certainty of measurement, can place the 3rd in universal drive shaft 43 position right
Plane mirror and the combination of laser interferometer, to offset the identical translation that three laser interferometer produce, it is ensured that certainty of measurement.
Specific embodiment five
The present embodiment be specific embodiment once described in portable high frequency ring and realize on big working distance autocollimation
Take formula high frequency sound big working distance auto-collimation embodiment of the method.
The portable high frequency of the present embodiment rings big working distance auto-collimation method, comprises the following steps:
Step a, some bright light source 1, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step b, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65
Become a little as returning to image plane center position；
Step c, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
The main innovative point of the present invention is the angle adjustment measurement dress adding reflecting mirror 3 and being arranged on reflecting mirror 3
Putting 4, this structure can have bigger drift angle or there are the feelings of relatively larger transverse displacement between measured object 5 incident illumination and reflection light
Under condition, adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and connect by feedback imaging system 6
Receive, be prevented effectively from measured object reflection light deviation measurement system and the problem that causes measuring.
But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system；With
Time, the increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce system
Certainty of measurement.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 with tested
The air agitation impact on measurement result between thing 5, to this end, devise specific embodiment six, specific embodiment seven and concrete
Embodiment eight.
Specific embodiment six
The present embodiment is to ring at portable high frequency described in specific embodiment two to realize just on big working distance autocollimation
Take formula high frequency sound big working distance auto-collimation embodiment of the method.
The portable high frequency of the present embodiment rings big working distance auto-collimation method, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation；
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65
Become a little as returning to image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment two, it is possible to utilize air agitation wave front detector 72
Air agitation is separated, and then utilizes wavefront compensation system 8 that air agitation is compensated, finally realize without air agitation
The high-acruracy survey of impact.
Specific embodiment seven
The present embodiment is to ring at portable high frequency described in specific embodiment three to realize just on big working distance autocollimation
Take formula high frequency sound big working distance auto-collimation embodiment of the method.
The portable high frequency of the present embodiment rings big working distance auto-collimation method, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation and reflecting mirror deformation；
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65
Become a little as returning to image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then utilize wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is to ring at portable high frequency described in specific embodiment four to realize just on big working distance autocollimation
Take formula high frequency sound big working distance auto-collimation embodiment of the method.
The portable high frequency of the present embodiment rings big working distance auto-collimation method, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror shape
Become；
Step e, imageing sensor 65 imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, make imageing sensor 65
Become a little as returning to image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer 427 obtains, and the second laser interferometer 428
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then the angle obtaining measured object 5 surface becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize air agitation wave front detector 72
With reflecting mirror deformation wave front detector 73, air agitation and reflecting mirror deformation are separately separated, and then optionally to air
Disturbance carries out separate compensation, reflecting mirror deformation carries out separate compensation or air agitation and reflecting mirror deformation carry out overall benefit
Repay, final realize without air agitation or no-mirror deformation or the high accuracy survey without air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to each
The size that affects of result is individually assessed by part, can not only find out in air agitation and reflecting mirror deformation, and who is impact
The principal contradiction of certainty of measurement, and mirror deformation individually can be assessed, reflecting mirror crudy is carried out simultaneously
Effective evaluation.
Claims (6)
1. a portable high frequency rings big working distance autocollimation, it is characterised in that include light source (1), reflective collimating mirror
(22), reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment measurement apparatus (4)；
The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then is reflected by reflecting mirror (3), incident
Surface to measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by feedback imaging
System (6) gathers imaging；
Described feedback imaging system (6) is the one in following two form:
The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) be arranged on anti-
Penetrate the imageing sensor (65) of formula collimating mirror (22) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror
(3), after reflection, successively reflect, by imageing sensor through reflective collimating mirror (22) transmission, the first feedback spectroscope (61)
(65) imaging is gathered；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) is become a little as in image planes
Heart position；
The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first anti-
Present object lens (63) and be arranged on the imageing sensor (65) of reflective collimating mirror (22) focal point；Reflect from measured object (5) surface
Light beam, then through reflecting mirror (3) reflect after, successively through first feedback spectroscope (61) reflection, first feedback object lens (63)
Transmission, by imageing sensor (65) gather imaging；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor
(65) become a little as in image plane center position；
Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection
Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed
Amount device includes that the first reflecting mirror (425), the second reflecting mirror (426), the first laser of corresponding first reflecting mirror (425) position are done
Second laser interferometer (428) of interferometer (427) and corresponding second reflecting mirror (426) position；First driver (411),
One reflecting mirror (425) and universal drive shaft (43) point-blank, the second driver (412), the second reflecting mirror (426) and
Universal drive shaft (43) point-blank, and the first driver (411) second driver vertical with the line of universal drive shaft (43)
(412) with the line of universal drive shaft (43).
Portable high frequency the most according to claim 1 rings big working distance autocollimation, it is characterised in that also include wavefront
Detection system (7) and wavefront compensation system (8)；
Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti-
Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt
Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror
Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；
Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune
Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type
LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).
3. one kind is rung the portable high frequency sound realized on big working distance autocollimation greatly at portable high frequency described in claim 1
Working distance auto-collimation method, it is characterised in that comprise the following steps:
Step a, some bright light source (1), imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step b, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor
(65) become a little as returning to image plane center position；
Step c, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface
Degree changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
4. one kind is rung the portable high frequency sound realized on big working distance autocollimation greatly at portable high frequency described in claim 2
Working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes that Wavefront detecting spectroscope (71) and air agitation wavefront are visited
Survey device (72)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate
Air agitation；
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor
(65) become a little as returning to image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface
Degree changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
5. one kind is rung the portable high frequency sound realized on big working distance autocollimation greatly at portable high frequency described in claim 2
Working distance auto-collimation method, it is desirable to before Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and reflecting mirror deformation waves
Detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate
Air agitation and reflecting mirror deformation；
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor
(65) become a little as returning to image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface
Degree changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
6. one kind is rung the portable high frequency sound realized on big working distance autocollimation greatly at portable high frequency described in claim 2
Working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes that Wavefront detecting spectroscope (71), air agitation wavefront are visited simultaneously
Survey device (72) and reflecting mirror deformation wave front detector (73)；
It is characterized in that, comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains
Two groups of data of GC and GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror
The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape
Become；
Step e, imageing sensor (65) imaging, obtain a picture deviation image plane center position Δ x and Δ y；
Step f, utilize the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, make imageing sensor
(65) become a little as returning to image plane center position；
Step g, read the change in displacement Δ x1 that the first laser interferometer (427) obtains, and the second laser interferometer (428)
The change in displacement Δ x2 arrived, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle on measured object (5) surface
Degree changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
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