CN106024991A - 硅太阳能电池槽式清洗制绒工艺 - Google Patents

硅太阳能电池槽式清洗制绒工艺 Download PDF

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CN106024991A
CN106024991A CN201610608579.9A CN201610608579A CN106024991A CN 106024991 A CN106024991 A CN 106024991A CN 201610608579 A CN201610608579 A CN 201610608579A CN 106024991 A CN106024991 A CN 106024991A
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朱俊
王丹
陈丽萍
陆红艳
陈如龙
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Wuxi Suntech Power Co Ltd
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract

本发明涉及一种硅太阳能电池槽式清洗制绒工艺,包括以下步骤:上料→预处理工序→水洗工序→制绒工序→水洗工序→酸洗工序→水洗工序→慢提拉工序→烘干工序→下料;所述慢提工序在慢提拉槽进行,烘干工序在烘干槽进行;其特征是:当机械臂从慢提拉槽内将装有硅片的花篮提取到烘干槽,以及从烘干槽内将装有硅片的花篮提取至下料处之前,通过气体喷嘴喷出压缩空气或氮气,将机械臂下提取花篮的挂钩吹干后,再用挂钩提取花篮。本发明所述的硅太阳能电池槽式清洗制绒工艺,能够解决因槽式清洗制绒工艺造成的硅太阳能电池正面水印和背面光致发光(EL)下黑斑问题。

Description

硅太阳能电池槽式清洗制绒工艺
技术领域
本发明涉及一种硅太阳能电池槽式清洗制绒工艺,尤其是一种减少硅太阳能电池清洗制绒外观不良和光致发光下黑斑的方法,属于硅太阳能电池清洗制绒工艺技术领域。
背景技术
目前,太阳能电池的材料以半导体材料为主,其工作原理是利用半导体材料在光照下生成的非平衡载流子在PN结的影响下定向移动,从而将光能转化为电能。根据所用材料的不同,太阳能电池可分为硅太阳能电池、多元化合物太阳能电池、功能高分子材料太阳能电池以及纳米晶太阳能电池等。产业化太阳能电池中,多晶硅和单晶硅太阳能电池所占比例近90%。产业化的硅太阳能电池的生产工艺流程一般为:清洗制绒→扩散→刻蚀→PECVD→丝网印刷。
清洗制绒作为硅太阳能电池生产工艺的第一道工序,作用主要有三点:1、去除原始硅片表面的损伤层;2、去除硅片表面的有机物、金属离子等沾污;3、形成陷光绒面结构,减小硅片表面反射率。产业化的硅太阳能电池清洗制绒工艺主要有链式和槽式两种方式。硅太阳能电池的槽式清洗制绒工艺主要步骤为:上料→预处理→水洗→制绒→水洗→酸洗→水洗→慢提拉→烘干→下料。
硅太阳能电池的槽式清洗制绒工艺中采用机械臂和挂钩来提取装有硅片的花篮。在从慢提拉槽内将装有硅片的花篮提取到烘干槽、从烘干槽内装有硅片的花篮提取至下料处时,机械臂下方挂钩上的残余液体会滴落在花篮和吹干槽内,造成硅片的污染。这种污染主要体现在两个方面:其一,滴落的液体会在硅片正面形成水印,对硅太阳能电池的外观造成影响,导致电池片降级;其二,滴落的液体会影响硅太阳能电池的背面性能,光致发光(EL)下会出现黑斑,降低了电池片的转化效率,并导致电池片降级。
发明内容
本发明的目的是克服现有技术中存在的不足,提供一种硅太阳能电池槽式清洗制绒工艺,解决因槽式清洗制绒工艺造成的硅太阳能电池正面水印和背面光致发光(EL)下黑斑问题。
按照本发明提供的技术方案,所述硅太阳能电池槽式清洗制绒工艺,包括以下步骤:上料→预处理工序→水洗工序→制绒工序→水洗工序→酸洗工序→水洗工序→慢提拉工序→烘干工序→下料;所述慢提工序在慢提拉槽进行,烘干工序在烘干槽进行;其特征是:当机械臂从慢提拉槽内将装有硅片的花篮提取到烘干槽,以及从烘干槽内将装有硅片的花篮提取至下料处之前,通过气体喷嘴喷出压缩空气或氮气,将机械臂下提取花篮的挂钩吹干后,再用挂钩提取花篮。
进一步的,所述吹干挂钩的过程中:气体喷嘴喷出的气体压力为0.3~2Pa,温度为15~70℃,吹干时间大于5s。
进一步的,所述气体喷嘴安装于慢提拉槽和烘干槽前道的水洗槽侧部。
本发明所述的硅太阳能电池槽式清洗制绒工艺,能够解决因槽式清洗制绒工艺造成的硅太阳能电池正面水印和背面光致发光(EL)下黑斑问题。
附图说明
图1为本发明所述机械臂挂钩吹干工艺的示意图。
图中标号:机械臂1、挂钩2、气体喷嘴3。
具体实施方式
下面结合具体附图对本发明作进一步说明。
所述硅太阳能电池槽式清洗制绒工艺,包括以下步骤:上料→预处理工序→水洗工序→制绒工序→水洗工序→酸洗工序→水洗工序→慢提拉工序→烘干工序→下料;
上述的预处理工序、水洗工序、制绒工序、水洗工序、酸洗工序、水洗工序、慢提拉工序和烘干工序均采用现有的常规工艺进行;
所述慢提工序在慢提拉槽进行,烘干工序在烘干槽进行;
如图1所示,在所述慢提拉槽和烘干槽前道的水洗槽侧部安装气体喷嘴3,当机械臂从慢提拉槽内将装有硅片的花篮提取到烘干槽,以及从烘干槽内将装有硅片的花篮提取至下料处之前,通过气体喷嘴喷出压缩空气或氮气,将机械臂1下提取花篮的挂钩2吹干,以解决因挂钩上液体滴落造成的硅太阳能电池正面水印和背面光致发光(EL)下黑斑问题。改善了硅太阳能电池的正面外观和背面性能,提高硅太阳能电池的转化效率,杜绝了因正面水印和背面光致发光(EL)黑斑造成的电池片降级,提高了电池片生产的优质率,降低了生产成本。
所述吹干挂钩的过程中:气体喷嘴喷出的气体压力为0.3~2Pa,温度为15~70℃,吹干时间大于5s。
本发明具有以下优点:(1)本发明通过吹干机械臂下提取花篮的挂钩,解决因挂钩上液体滴落造成的硅太阳能电池正面水印的问题,改善了硅太阳能电池的正面外观,杜绝了因正面水印造成的电池片降级,提高了硅太阳能电池的优质率,降低了生产成本。(2)本发明通过吹干机械臂下提取花篮的挂钩,解决因挂钩上液体滴落造成的硅太阳能电池背面光致发光(EL)下黑斑问题,改善了硅太阳能电池的背面性能,提高硅太阳能电池的转化效率,同时杜绝了因背面光致发光(EL)黑斑造成的电池片降级,降低了生产成本。

Claims (3)

1.一种硅太阳能电池槽式清洗制绒工艺,包括以下步骤:上料→预处理工序→水洗工序→制绒工序→水洗工序→酸洗工序→水洗工序→慢提拉工序→烘干工序→下料;所述慢提工序在慢提拉槽进行,烘干工序在烘干槽进行;其特征是:当机械臂从慢提拉槽内将装有硅片的花篮提取到烘干槽,以及从烘干槽内将装有硅片的花篮提取至下料处之前,通过气体喷嘴喷出压缩空气或氮气,将机械臂(1)下提取花篮的挂钩(2)吹干后,再用挂钩(2)提取花篮。
2.如权利要求1所述的硅太阳能电池槽式清洗制绒工艺,其特征是:所述吹干挂钩的过程中:气体喷嘴喷出的气体压力为0.3~2Pa,温度为15~70℃,吹干时间大于5s。
3.如权利要求1所述的硅太阳能电池槽式清洗制绒工艺,其特征是:所述气体喷嘴(3)安装于慢提拉槽和烘干槽前道的水洗槽侧部。
CN201610608579.9A 2016-07-28 2016-07-28 硅太阳能电池槽式清洗制绒工艺 Pending CN106024991A (zh)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108321220A (zh) * 2017-12-28 2018-07-24 江苏浠吉尔装备科技有限公司 一种单晶制绒清洗工艺
CN111554593A (zh) * 2020-04-29 2020-08-18 常州比太科技有限公司 一种槽式清洗制绒后硅片烘干的方法
CN113451115A (zh) * 2021-06-30 2021-09-28 安徽华晟新能源科技有限公司 一种太阳能电池的清洗方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101276856A (zh) * 2008-04-30 2008-10-01 苏州纳米技术与纳米仿生研究所 硅太阳能电池清洗刻蚀、干燥工艺及其设备
CN201887071U (zh) * 2010-12-18 2011-06-29 广东爱康太阳能科技有限公司 一种太阳能槽式清洗制绒设备
CN202180065U (zh) * 2011-07-26 2012-04-04 韩华新能源(启东)有限公司 全自动太阳能硅片扩散前清洗设备
CN102842652A (zh) * 2012-09-19 2012-12-26 英利能源(中国)有限公司 硅片的制绒酸洗的方法
CN105632980A (zh) * 2016-01-08 2016-06-01 上海艾力克新能源有限公司 一种双制绒槽位的槽式多晶硅片制绒装置及方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101276856A (zh) * 2008-04-30 2008-10-01 苏州纳米技术与纳米仿生研究所 硅太阳能电池清洗刻蚀、干燥工艺及其设备
CN201887071U (zh) * 2010-12-18 2011-06-29 广东爱康太阳能科技有限公司 一种太阳能槽式清洗制绒设备
CN202180065U (zh) * 2011-07-26 2012-04-04 韩华新能源(启东)有限公司 全自动太阳能硅片扩散前清洗设备
CN102842652A (zh) * 2012-09-19 2012-12-26 英利能源(中国)有限公司 硅片的制绒酸洗的方法
CN105632980A (zh) * 2016-01-08 2016-06-01 上海艾力克新能源有限公司 一种双制绒槽位的槽式多晶硅片制绒装置及方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108321220A (zh) * 2017-12-28 2018-07-24 江苏浠吉尔装备科技有限公司 一种单晶制绒清洗工艺
CN111554593A (zh) * 2020-04-29 2020-08-18 常州比太科技有限公司 一种槽式清洗制绒后硅片烘干的方法
CN113451115A (zh) * 2021-06-30 2021-09-28 安徽华晟新能源科技有限公司 一种太阳能电池的清洗方法

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